JPH0936519A - Manufacture of printed wiring board - Google Patents

Manufacture of printed wiring board

Info

Publication number
JPH0936519A
JPH0936519A JP18910695A JP18910695A JPH0936519A JP H0936519 A JPH0936519 A JP H0936519A JP 18910695 A JP18910695 A JP 18910695A JP 18910695 A JP18910695 A JP 18910695A JP H0936519 A JPH0936519 A JP H0936519A
Authority
JP
Japan
Prior art keywords
film
printed wiring
copper
hole
etching resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18910695A
Other languages
Japanese (ja)
Inventor
Ichiro Nakayama
一郎 中山
Heijiro Yanagi
平次郎 柳
Michitsugu Nakagome
道次 中込
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP18910695A priority Critical patent/JPH0936519A/en
Publication of JPH0936519A publication Critical patent/JPH0936519A/en
Pending legal-status Critical Current

Links

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a printed wiring intermediate material with which the conductive circuit of a high density printed wiring board is simply formed without generating a defect on the inner wall of a conductive hole even when there is positional deviation on a master film, and also requiring a long process. SOLUTION: A printed wiring board intermediate material is formed as follows. A through hole is formed in a copper-clad laminated board, a liquid etching resist is applied to the copper-clad laminated board in which a conducting hole is formed on the front and the backside by electroless and electrolytic plating or electroless plating, the resist is dried up and a photosensitive resin film is formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】プリント配線板の加工業にお
いて、銅張り積層板を写真法でエッチングレジスト画像
を形成し、不要な金属部をエッチングにより除去し導体
パターンを形成するのに必要な中間材料およびその製造
方法に関する。
BACKGROUND OF THE INVENTION In the printed wiring board processing industry, an intermediate material necessary for forming a conductive pattern by forming an etching resist image on a copper-clad laminate by a photographic method and removing unnecessary metal parts by etching. And a manufacturing method thereof.

【0002】[0002]

【従来の技術】従来プリント配線板の導体パターン形成
方法として、アディティブ法とサブトラクティブ法が有
るが、その中でもサブトラクティブ法に用いる材料につ
いて述べると導通孔を形成した銅張り積層板の導通孔内
に有機溶剤や水酸化ナトリウム水溶液等のアルカリ水溶
液に溶解できる樹脂を充填して、エッチングレジストイ
ンクをスクリーン印刷法でこの上に回路のパターンを描
画しエッチングレジストインクを加熱或いは紫外線等の
活性光線で乾燥し不要な金属をエッチングすることで導
体パターンを形成する方法がある。
2. Description of the Related Art Conventionally, there are an additive method and a subtractive method as a method for forming a conductor pattern on a printed wiring board. Among them, the materials used for the subtractive method are described below. Is filled with a resin that can be dissolved in an organic solvent or an aqueous alkaline solution such as an aqueous solution of sodium hydroxide, and an etching resist ink is drawn by a screen printing method to draw a circuit pattern on the etching resist ink. There is a method of forming a conductor pattern by drying and etching unnecessary metal.

【0003】また、スクリーン印刷法に比較して微細な
パターンを描画するために、写真法を用いたエッチング
レジストパターンの描画方法が有るが、現在最も良く用
いられている。この写真法について詳細に述べると、導
通孔を設けた銅張り積層板に感光性樹脂を主成分とする
樹脂組成物の皮膜を表裏面に張り付け導通孔の開口部に
膜を張り、エッチング液から導通孔内壁を守るテンティ
ング法があり、銅張り積層板の表裏面に張られた感光性
樹脂に予め回路パターンを描画したマスターフィルムと
なる銀塩フィルムやジアゾフィルムを介して、紫外線等
の活性光線を照射し露光する事により、エッチングレジ
ストの潜在画像を形成した後、未露光部を溶解し露光部
を溶解しない溶剤、例えば炭酸ナトリウム等の希アルカ
リ水溶液を用いて現像することでエッチングレジストの
回路パターンを形成し、露出した金属部をエッチングす
ることで導体回路パターンを形成する。この方法は、テ
ンティング法と呼ばれドライフィルムが用いられる。
Further, there is a method of drawing an etching resist pattern using a photographic method in order to draw a fine pattern as compared with the screen printing method, but it is currently most widely used. This photographic method will be described in detail. A copper-clad laminate provided with a conductive hole is coated with a film of a resin composition containing a photosensitive resin as a main component on the front and back surfaces to form a film at the opening of the conductive hole, and then the etching solution is used. There is a tenting method that protects the inner wall of the conduction hole.Activities such as ultraviolet rays are transmitted through a silver salt film or diazo film which is a master film in which a circuit pattern is drawn in advance on the photosensitive resin stretched on the front and back of the copper clad laminate. After forming a latent image of the etching resist by irradiating with a light beam and exposing it, the etching resist of the etching resist is developed by using a solvent that dissolves the unexposed portion and does not dissolve the exposed portion, for example, a dilute alkaline aqueous solution such as sodium carbonate. A conductor circuit pattern is formed by forming a circuit pattern and etching the exposed metal portion. This method is called a tenting method and a dry film is used.

【0004】また、導通孔を設けた銅張り積層板の導通
孔内に溶剤やアルカリ水溶液に溶解可能な樹脂を充填し
導通孔内壁をエッチング液から保護し、銅張り積層板の
表裏面に感光性樹脂を主成分とする樹脂組成物溶剤溶液
を塗布し乾燥することで、銅張り積層板の表裏面に形成
した感光性樹脂に予め回路パターンを描画したマスター
フィルムとなる銀塩フィルムやジアゾフィルムを介し
て、紫外線等の活性光線を照射して、エッチングレジス
トの潜在画像を形成した後、未露光部を溶解し露光部を
溶解しない溶剤、例えば炭酸ナトリウム等の希アルカリ
水溶液を用いて現像することでエッチングレジストの回
路パターンを形成し、露出した金属部をエッチングする
ことで導体回路パターンを形成する方法も一部行われて
いる。
Further, a resin which is soluble in a solvent or an alkaline aqueous solution is filled in the conduction hole of the copper-clad laminate provided with the conduction hole to protect the inner wall of the conduction hole from the etching solution, and the front and back surfaces of the copper-clad laminate are exposed. Of a resin composition containing a conductive resin as a main component and drying the solution to form a master film in which a circuit pattern is drawn in advance on a photosensitive resin formed on the front and back surfaces of a copper-clad laminate, a silver salt film or diazo film Through an actinic ray such as ultraviolet rays to form a latent image of the etching resist, and then develop using a solvent that dissolves the unexposed area and does not dissolve the exposed area, for example, a dilute aqueous alkali solution such as sodium carbonate. Therefore, a method of forming a circuit pattern of an etching resist and etching the exposed metal portion to form a conductor circuit pattern is also partially performed.

【0005】感光性樹脂を主成分とする樹脂組成物をエ
マルジョンとし電着で導通孔を設けた銅張り積層板の導
通孔内壁や銅張り積層板の表裏面に感光性樹脂組成物皮
膜を形成し、予め回路パターンを描画したマスターフィ
ルムとなる銀塩フィルムやジアゾフィルムを介して、紫
外線等の活性光線を照射して、エッチングレジストの潜
在画像を形成した後、未露光部を溶解し露光部を溶解し
ない溶剤、例えば炭酸ナトリウム等の希アルカリ水溶液
を用いて現像することでエッチングレジストの回路パタ
ーンを形成し、露出した金属部をエッチングすることで
導体回路パターンを形成する方法も一部行われている。
A photosensitive resin composition film is formed on an inner wall of a conductive hole of a copper-clad laminate provided with a conductive hole by electrodeposition using a resin composition containing a photosensitive resin as a main component, and front and back surfaces of the copper-clad laminate. Then, the latent image of the etching resist is formed by irradiating with actinic rays such as ultraviolet rays through a silver salt film or a diazo film, which is a master film on which a circuit pattern is drawn in advance, and then the unexposed area is dissolved to expose the exposed area. A method of forming a circuit pattern of an etching resist by developing with a solvent that does not dissolve, for example, a dilute aqueous alkaline solution such as sodium carbonate, and forming a conductor circuit pattern by etching an exposed metal part is also performed. ing.

【0006】ドライフィルムを用いるテンティング法
は、マスターフィルムの位置ズレにより導通孔の開口部
に張られた感光性樹脂組成物皮膜を十分な面積で露光出
来ない場合、現像により感光性樹脂組成物皮膜に孔が明
きエッチング液が導通孔内に浸透し導通孔内壁の金属を
エッチングし導通孔に欠損が生じるなどの問題が有っ
た。
In the tenting method using a dry film, when the photosensitive resin composition film stretched over the opening of the through hole cannot be exposed in a sufficient area due to the misalignment of the master film, the photosensitive resin composition is developed by development. There was a problem that the film had pores and the etching solution permeated into the conductive hole to etch the metal on the inner wall of the conductive hole to cause a defect in the conductive hole.

【0007】この導通孔開口部の周辺をランドとよぶが
ランドの直径は導通孔開口部の直径に対して0.2〜
0.3mm大きく設計され多少の位置ズレに対して許容
が有ったが、近年導通孔の直径を小さくし、ランド直径
と導通孔の直径差を0.2mm未満とし、表裏の導通孔
を多くすることと導体回路の線幅や線間隔を小さくする
ことでランドとランドの間に配線本数の多くし配線密度
を高めたプリント配線板の設計がなされる様に成ってき
た。このテンティング法では、マスターフィルムと導通
孔の孔位置とのズレの許容が小さくなり歩留良く生産す
ることが困難に成りつつある。
The periphery of the opening of the through hole is called a land, and the diameter of the land is 0.2 to the diameter of the opening of the through hole.
It was designed to be 0.3 mm larger and allowed for some positional deviation, but in recent years the diameter of the through hole has been reduced, and the diameter difference between the land diameter and the through hole has been reduced to less than 0.2 mm. In addition, the number of wirings between the lands has been increased and the wiring density has been increased to design a printed wiring board by reducing the line width and the line spacing of the conductor circuit. In this tenting method, the tolerance of the deviation between the master film and the hole position of the conductive hole becomes small, and it is becoming difficult to produce with good yield.

【0008】一方、孔埋めをして液状のエッチングレジ
ストを塗布乾燥する方法やエマルジョン化した感光性樹
脂組成物を電着で塗布し導通孔内壁や銅張り積層板表裏
面に感光性樹脂の皮膜を形成する方法は、マスクフィル
ムと貫通孔開口部の位置ズレによる導通孔内にエッチン
グ液が流れ込みによる導通孔欠損の問題は無く、配線密
度の高いプリント配線板を製造するための導通回路形成
方法として検討されている。
On the other hand, a method of filling holes and applying and drying a liquid etching resist, or applying a photosensitive resin composition emulsified by electrodeposition to form a film of the photosensitive resin on the inner walls of the conductive holes and the front and back surfaces of the copper clad laminate. The method of forming a conductive circuit forming method for producing a printed wiring board having a high wiring density without the problem of conductive hole loss due to the etching liquid flowing into the conductive hole due to the positional deviation between the mask film and the through hole opening. Is being considered as.

【0009】しかしながら、孔埋と乾燥及び表面の研磨
と液状エッチングレジストの塗布乾燥という長い工程を
必要とし、また孔埋した樹脂は、エッチング後剥離除去
する必要があり生産性が悪い。電着による感光性樹脂皮
膜の形成は、装置自身大がかりな装置を必要とし液管理
等複雑であり簡便に用いることが出来ない。
However, a long process of filling holes and drying, polishing the surface and applying and drying a liquid etching resist is required, and the filled resin needs to be removed by peeling after etching, resulting in poor productivity. The formation of the photosensitive resin film by electrodeposition requires a large-scale device itself, and complicated liquid management and the like cannot be used easily.

【0010】[0010]

【発明が解決しようとする課題】本発明は、マスターフ
ィルムの位置ズレに対しても導通孔内壁に欠陥を生じる
こと無く、長い工程を必要としないで簡便に高密度プリ
ント配線板、特にメモリカード等の薄い板の導通回路を
形成するプリント配線板中間材料とプリント配線板中間
材料の製造方法を提供する。
DISCLOSURE OF THE INVENTION The present invention provides a high-density printed wiring board, particularly a memory card, which does not cause a defect in the inner wall of the conductive hole even when the master film is displaced and does not require a long process. Provided is a printed wiring board intermediate material for forming a conductive circuit of a thin plate such as the following, and a method for manufacturing the printed wiring board intermediate material.

【0011】[0011]

【課題を解決するための手段】すなわち、本発明は、銅
張り積層板に貫通孔をあけ、無電解と電解メッキ或いは
無電解メッキにより表裏に導通孔を形成した銅張り積層
板に、液状のエッチングレジストを塗布し乾燥してな
る、表裏の面及び該導通孔内壁に感光性の樹脂皮膜が形
成されたプリント配線板中間材料であり、また、無電解
と電解メッキ或いは無電解メッキにより表裏に導通孔を
形成した銅張り積層板に、両面同時にできる塗布手段を
用いて液状のエッチングレジストを塗布することによ
り、該導通孔内壁に液状のエッチングレジストを塗布す
るプリント配線板中間材料の製造方法であり、好ましく
は、塗布手段がロールコーターやデップコーターである
プリント配線板中間材料の製造方法に関するものであ
る。
Means for Solving the Problems That is, according to the present invention, a copper-clad laminate is provided with through-holes, and a copper-clad laminate having conductive holes formed on the front and back sides thereof by electroless plating and electrolytic plating or electroless plating It is a printed wiring board intermediate material with a photosensitive resin film formed on the front and back surfaces and the inner walls of the conduction holes, which is formed by applying an etching resist and drying it. A method for producing a printed wiring board intermediate material, comprising applying a liquid etching resist to the inner wall of the conduction hole by applying a liquid etching resist to the copper-clad laminate having the conduction holes formed by using a coating means capable of simultaneously forming both surfaces. And preferably relates to a method for producing an intermediate material for a printed wiring board, wherein the coating means is a roll coater or a dip coater.

【0012】[0012]

【発明の実施の形態】本発明で使用する液状のエッチン
グレジストとは、感光性樹脂組成物を含む溶剤溶液で、
無機或いは有機物の微粒粉を含み構造粘性を有するもの
である。該液状のエッチングレジストの粘度は、適度に
小さければよく、通常0.01〜60cPa・sであ
る。
BEST MODE FOR CARRYING OUT THE INVENTION The liquid etching resist used in the present invention is a solvent solution containing a photosensitive resin composition,
It contains fine particles of an inorganic or organic substance and has a structural viscosity. The viscosity of the liquid etching resist may be appropriately small and is usually 0.01 to 60 cPa · s.

【0013】本発明は、銅張り積層板に貫通孔をあけ、
無電解と電解メッキ或いは無電解メッキにより表裏に導
通孔を形成した銅張り積層板に、両面同時にできる塗布
手段を用いて液状エッチングレジストを塗布乾燥するこ
とにより、表裏の面及び該導通孔内壁に感光性の樹脂皮
膜が形成されたプリント配線板中間材料を製造すること
ができるのである。
According to the present invention, a through hole is formed in a copper-clad laminate,
By applying a liquid etching resist to a copper-clad laminate having electroconductive and electroless plating or electroless plating to form conduction holes on the front and back sides using a coating means capable of forming both sides simultaneously, the front and back surfaces and inner walls of the conduction holes are coated. Thus, it is possible to manufacture the printed wiring board intermediate material on which the photosensitive resin film is formed.

【0014】両面同時にできる塗布手段としては、溝を
形成した一対のロールを有するロールコーターや液溜ま
りに浸漬し引き上げるデップコーターなどが好ましく用
いられる。
As a coating means which can be applied to both sides simultaneously, a roll coater having a pair of rolls having grooves formed therein, or a dip coater which is immersed in a liquid pool and pulled up is preferably used.

【0015】銅張り積層板に塗布した液状エッチングレ
ジストを乾燥する方法としては、熱風乾燥、遠赤外線乾
燥などにより、熱での硬化を避けるため好ましくは15
0℃以下で、乾燥時間を考慮して60℃以上で乾燥する
のが好ましい。このように乾燥することで、導通孔内壁
に感光性樹脂組成物の皮膜を形成することができる。
As a method for drying the liquid etching resist applied to the copper-clad laminate, hot air drying, far infrared ray drying or the like is preferably used to avoid curing by heat.
It is preferable to dry at 0 ° C or lower and 60 ° C or higher in consideration of the drying time. By drying in this way, a film of the photosensitive resin composition can be formed on the inner wall of the conductive hole.

【0016】この表裏の面及び該導通孔内壁に感光性の
樹脂皮膜が形成されたプリント配線板中間材料を使用し
て、感光性樹脂組成物皮膜をエッチングレジストパター
ンとする方法は、回路パターンを描画したマスターフィ
ルムを介し紫外線等の活性光線で露光する。この時に導
通孔を形成する必要のある貫通孔は、導通孔内に活性光
線が透過する様にマスターフィルムの貫通孔位置は抜と
する。また、導通孔としない貫通孔は、マスターフィル
ムの貫通孔位置を遮蔽する。
A method of forming a photosensitive resin composition film as an etching resist pattern by using a printed wiring board intermediate material having a photosensitive resin film formed on the front and back surfaces and the inner wall of the conductive hole is as follows. It exposes with actinic rays, such as ultraviolet rays, through the drawn master film. At this time, the through-holes in which it is necessary to form the through-holes are removed from the through-hole positions of the master film so that the active rays can pass through the through-holes. In addition, the through holes that are not the conductive holes block the positions of the through holes of the master film.

【0017】次に、未露光部を溶解する有機溶剤や炭酸
ナトリウム水溶液等の弱アルカリ水溶液でスプレーや浸
漬し揺動することにより、未露光部や未露光の貫通孔が
洗浄(現像)され、感光性樹脂組成物の皮膜が除去され
る。なお、露光された回路パターンや導通孔となる貫通
孔内は、現像により感光性樹脂組成物皮膜が除去される
こと無く残る。
Next, the unexposed portion and the unexposed through-holes are washed (developed) by spraying or immersing the unexposed portion in a weak alkaline aqueous solution such as an organic solvent or an aqueous sodium carbonate solution, and shaking. The film of the photosensitive resin composition is removed. Incidentally, the exposed circuit pattern and the inside of the through hole to be a conductive hole remain without being removed by the development of the photosensitive resin composition film.

【0018】次に、塩化第二鉄の塩酸溶液や塩化第二銅
の塩酸溶液、或いは硫酸と過酸化水素水の混合溶液を4
0〜50℃とした金属銅に対する一般的なエッチング液
で露出した金属銅を腐食溶解することにより、銅張り積
層板の表裏と導通孔が形成される。
Next, a ferric chloride hydrochloric acid solution, a cupric chloride hydrochloric acid solution, or a mixed solution of sulfuric acid and hydrogen peroxide water is added to the mixture.
The exposed front and back of the copper-clad laminate and the through holes are formed by corrosively dissolving the exposed metal copper with a general etching solution for the metal copper at 0 to 50 ° C.

【0019】このように導通孔を形成した銅張り積層板
の表裏に液状のエッチングレジストをロールコーターや
デップコーターで表裏同時に塗布し乾燥することで導通
孔を有するプリント配線板を容易に形成し本発明の課題
であるマスターフィルムの位置ズレに対しても導通孔内
壁に欠陥を生じること無く、長い工程を必要としないで
簡便に高密度プリント配線板の導通回路を形成する方法
を提供することができるのである。
Liquid etching resist is applied to the front and back of the copper-clad laminate having the through holes in this way by a roll coater or a dip coater at the same time and dried to easily form a printed wiring board having the through holes. It is possible to provide a method for easily forming a conductive circuit of a high-density printed wiring board without causing a defect in the inner wall of the conductive hole even when the master film is displaced, which is the subject of the invention, and does not require a long process. You can do it.

【0020】[0020]

【実施例】以下、本発明のプリント配線板中間材料とそ
の製造方法について、実施例と比較例と同一部には同符
号を付けて部分的に拡大した導通孔を含む断面図に従っ
て説明する。 〔実施例1〕図1に示したような、孔径1.5mmФと
0.3mmФの貫通孔を形成し、銅メッキ或いは銅箔層
3を形成し、孔径1.5mmФの導通孔1と0.3mm
Фの導通孔2を形成した、厚み0.8mmの銅張り積層
板4に、両面同時に塗布できるロールコーターを用いて
液状エッチングレジスト(三井東圧化学株式会社製MT
UV−6102、粘度40cPa・s)を塗布した。乾
燥は、遠赤外線による100℃で3分乾燥した。図5に
乾燥後の感光性樹脂組成物皮膜9の被覆状態を示す。こ
れが表裏の面及び該導通孔内壁に感光性の樹脂皮膜が形
成されたプリント配線板中間材料である。孔径1.5m
mФ導通孔1では、内壁を被覆した状態となり、孔径
0.3mmФの導通孔2では導通孔が塞がり埋まった状
態になった。次に、マスターフィルム7をずらしオーク
社製露光機HMW−201で15秒露光した。マスター
フィルムの抜きの部分から紫外線が透過し感光性樹脂組
成物皮膜の紫外線暴露部分が硬化する。露光の様子を図
6に示す。露光後30℃の1重量%の炭酸ナトリウム水
溶液で40秒現像した。現像後の液状エッチングレジス
トで作成したエッチングレジストパターン10の状態を
図7に示す。液状エッチングレジストで作成したエッチ
ングレジストパターン10は、導通孔の縁に接している
状態でも脱落等の欠陥はなく導通孔を覆う為エッチング
による導通孔の断線は発生していない。
EXAMPLES A printed wiring board intermediate material of the present invention and a method for manufacturing the same will be described below with reference to the sectional views including a partially enlarged through hole in which the same parts as those in the examples and comparative examples are designated by the same reference numerals. [Embodiment 1] As shown in FIG. 1, through holes having hole diameters of 1.5 mm and 0.3 mm are formed, copper plating or copper foil layer 3 is formed, and conductive holes 1 and 0. 3 mm
Liquid etching resist (MT manufactured by Mitsui Toatsu Kagaku Co., Ltd.) was applied to a copper-clad laminate 4 having a thickness of 0.8 mm and having a .phi.
UV-6102, viscosity 40 cPa.s) was applied. The drying was performed by far infrared rays at 100 ° C. for 3 minutes. FIG. 5 shows the coated state of the photosensitive resin composition film 9 after drying. This is an intermediate material for a printed wiring board in which a photosensitive resin film is formed on the front and back surfaces and the inner wall of the conduction hole. Pore diameter 1.5m
In the mΦ conduction hole 1, the inner wall was covered, and in the conduction hole 2 having a hole diameter of 0.3 mmΦ, the conduction hole was closed and filled. Next, the master film 7 was shifted and exposed for 15 seconds using an exposure machine HMW-201 manufactured by Oak. Ultraviolet rays permeate from the blank portion of the master film, and the portion of the photosensitive resin composition film exposed to ultraviolet rays cures. The state of exposure is shown in FIG. After exposure, it was developed for 40 seconds with a 1% by weight sodium carbonate aqueous solution at 30 ° C. The state of the etching resist pattern 10 formed of the liquid etching resist after development is shown in FIG. The etching resist pattern 10 made of the liquid etching resist has no defects such as falling off even when it is in contact with the edge of the conductive hole, and since the conductive hole is covered, disconnection of the conductive hole due to etching does not occur.

【0021】〔実施例2〕デップ法を用いて、液状エッ
チングレジスト(三井東圧化学株式会社製MTUV61
03、アセトンで希釈して粘度を0.3cPa・sに調
節した)を、実施例1と同様の導通孔を形成した銅張り
積層板4に塗布した。この銅張り積層板を遠赤炉で10
0℃4分乾燥し感光性樹脂組成物皮膜9を形成した。図
8に導通孔を形成した銅張り積層板4に形成した感光性
樹脂組成物皮膜9の形成状態を示した。これが表裏の面
及び該導通孔内壁に感光性の樹脂皮膜が形成されたプリ
ント配線板中間材料である。孔径1.5mmФの導通孔
1では、導通孔の内壁に感光性樹脂組成物皮膜9が形成
され、孔径0.3mmФの導通孔2では、その中心部に
膜を張った状態で導通孔内壁に感光性樹脂組成物皮膜9
が形成されている状態となった。
Example 2 A liquid etching resist (MTUV61 manufactured by Mitsui Toatsu Kagaku Co., Ltd.) was prepared using the dip method.
03, diluted with acetone to adjust the viscosity to 0.3 cPa · s) was applied to the copper-clad laminate 4 having the same conductive holes as in Example 1. This copper-clad laminate is used in a far-infrared furnace for 10
It was dried at 0 ° C. for 4 minutes to form a photosensitive resin composition film 9. FIG. 8 shows the formation state of the photosensitive resin composition film 9 formed on the copper-clad laminate 4 having the through holes. This is an intermediate material for a printed wiring board in which a photosensitive resin film is formed on the front and back surfaces and the inner wall of the conduction hole. The photosensitive resin composition film 9 is formed on the inner wall of the conductive hole in the conductive hole 1 having a hole diameter of 1.5 mmΦ, and the conductive resin composition film 9 is formed on the inner wall of the conductive hole in a state in which the film is formed in the central portion of the conductive hole 2 having a hole diameter of 0.3 mmΦ. Photosensitive resin composition film 9
Has been formed.

【0022】次に、マスターフィルム7をずらしオーク
社製露光機HMW−201で15秒露光した。露光の様
子を図9に示す。露光後、30℃の1重量%の炭酸ナト
リウム水溶液で40秒現像した。図10に現像後の液状
エッチングレジストで作成したエッチングレジストパタ
ーン10の状態を示した。導通孔上のエッチングレジス
トパターン10は、導通孔に接した状態でも脱落等の欠
陥は無くエッチングに対して導通孔内壁の金属層を保護
し、断線等の欠陥は発生しない。
Next, the master film 7 was shifted and exposed for 15 seconds using an exposure machine HMW-201 manufactured by Oak Corporation. The state of exposure is shown in FIG. After exposure, it was developed for 40 seconds with a 1 wt% sodium carbonate aqueous solution at 30 ° C. FIG. 10 shows the state of the etching resist pattern 10 formed with the liquid etching resist after development. Even if the etching resist pattern 10 on the conductive hole is in contact with the conductive hole, it does not have defects such as falling off, protects the metal layer on the inner wall of the conductive hole against etching, and does not cause defects such as disconnection.

【0023】〔比較例〕実施例1と同様な導通孔を形成
した銅張り積層板に、一般的によく用いられているドラ
イフィルムを用いて、熱圧着し感光性樹脂組成物皮膜5
を形成した。ドライフィルムの場合感光性樹脂組成物皮
膜5の上にポリエステルの保護フィルム6が形成されて
いる。図2に導通孔を形成した銅張り積層板4にドライ
フィルムを用いて感光性樹脂組成物皮膜5、保護フィル
ム6を形成した状態を示す。
COMPARATIVE EXAMPLE A copper-clad laminate having the same conductive holes as in Example 1 was thermocompression-bonded with a dry film, which is generally used, to form a photosensitive resin composition film 5.
Was formed. In the case of a dry film, a polyester protective film 6 is formed on the photosensitive resin composition film 5. FIG. 2 shows a state in which the photosensitive resin composition film 5 and the protective film 6 are formed by using a dry film on the copper-clad laminate 4 having the through holes.

【0024】次に、導通孔を形成した銅張り積層板を、
マスターフィルム7をずらしオーク社製露光機HMW−
201で15秒露光した。露光の様子を図3に示す。
Next, the copper-clad laminate having the through holes is
The master film 7 is shifted and the exposure machine HMW- manufactured by Oak Co., Ltd.
Exposure at 201 for 15 seconds. The state of exposure is shown in FIG.

【0025】露光後、30℃の1重量%の炭酸ナトリウ
ム水溶液で40秒現像した。露光と現像によりドライフ
ィルムで作成したエッチングレジストパターン8を作成
した状態を図4に示すが、現像により導通孔上の感光性
樹脂組成物皮膜を露光により硬化したドライフィルムで
作成したエッチングレジストパターン8が脱落してい
た。
After the exposure, it was developed for 40 seconds with a 1% by weight sodium carbonate aqueous solution at 30 ° C. FIG. 4 shows a state in which an etching resist pattern 8 formed by a dry film by exposure and development is formed. The etching resist pattern 8 formed by a dry film in which the photosensitive resin composition film on the conductive hole is cured by exposure by development. Was missing.

【0026】[0026]

【発明の効果】本発明は、ロールコーターやデップコー
ター等の両面同時にできる塗布手段を用いて、導通孔を
形成した銅張り積層板に液状のエッチングレジストを塗
布乾燥し、導通孔内壁と銅張り積層板表面に感光性樹脂
層を形成することで、マスクフィルムのズレに対しても
導通孔の形成を可能とするとともに、ランドの小さく設
計しランド間に多くの配線を形成する事ができる高密度
に電子部品を登載することが可能なプリント配線板加工
用の中間材料を提供するこを可能とし、さらにその形成
方法も容易なものとした。
INDUSTRIAL APPLICABILITY The present invention applies a liquid etching resist to a copper-clad laminate having a conductive hole formed therein by using a coating means such as a roll coater or a dip coater capable of simultaneously forming both surfaces, and then the inner wall of the conductive hole and the copper-clad laminate are dried. By forming a photosensitive resin layer on the surface of the laminated plate, it is possible to form conductive holes even when the mask film is displaced, and it is also possible to form many wirings between lands by designing small lands. It has become possible to provide an intermediate material for processing printed wiring boards, which enables electronic components to be mounted at a high density, and also facilitates the formation method thereof.

【図面の簡単な説明】[Brief description of drawings]

【図1】導通孔を形成した銅張り積層板の部分的に拡大
した断面図
FIG. 1 is a partially enlarged cross-sectional view of a copper-clad laminate having a through hole.

【図2】感光性樹脂組成物皮膜の層を形成した状態を部
分的に拡大した断面図
FIG. 2 is a partially enlarged sectional view of a state in which a layer of a photosensitive resin composition film is formed.

【図3】感光性樹脂組成物皮膜を紫外線を照射した後の
状態を部分的に拡大した断面図
FIG. 3 is a partially enlarged cross-sectional view of a state after the photosensitive resin composition film is irradiated with ultraviolet rays.

【図4】エッチングレジストパターンを描画した様子を
部分的に拡大し断面図
FIG. 4 is a partially enlarged sectional view showing how an etching resist pattern is drawn.

【図5】感光性樹脂組成物皮膜の被覆状態を導通孔を中
心に部分的に拡大した断面図
FIG. 5 is a cross-sectional view partially enlarging the covering state of the photosensitive resin composition film centering on the conduction hole.

【図6】エッチングレジストパターンを描画した様子を
部分的に拡大した断面図
FIG. 6 is a partially enlarged sectional view showing how an etching resist pattern is drawn.

【図7】未露光部を現像液で洗い流しエッチングレジス
トパターンを形成した状態を部分的に拡大し断面図
FIG. 7 is a partially enlarged cross-sectional view of a state in which an unexposed portion is washed away with a developing solution to form an etching resist pattern.

【図8】感光性樹脂組成物皮膜の被膜状態を導通孔を中
心に部分的に拡大した断面図
FIG. 8 is a cross-sectional view in which the film state of the photosensitive resin composition film is partially enlarged centering on the conduction hole.

【図9】エッチングレジストパターンを描画した様子を
部分的に拡大した断面図
FIG. 9 is a partially enlarged cross-sectional view showing how an etching resist pattern is drawn.

【図10】未露光部を現像液で洗い流しエッチングレジ
ストパターンを形成した状態を部分的に拡大し断面図
FIG. 10 is a partially enlarged cross-sectional view of a state where an unexposed portion is washed away with a developing solution to form an etching resist pattern.

【符号の説明】[Explanation of symbols]

1 孔径1.5mmФの導通孔 2 孔径0.3mmФの導通孔 3 銅メッキ或いは銅箔 4 絶縁層 5 ドライフィルムで作成した感光性樹脂組成物皮膜 6 ドライフィルムに用いられている保護フィルム 7 マスターフィルム 8 ドライフィルムによるエッチングレジストパターン 9 液状エッチングレジストから形成した感光性樹脂組
成物皮膜 10 液状エッチングレジストから形成したエッチング
レジストパターン
1 Conduction hole with a hole diameter of 1.5 mmΦ 2 Conduction hole with a hole diameter of 0.3 mmΦ 3 Copper plating or copper foil 4 Insulating layer 5 Photosensitive resin composition film made of dry film 6 Protective film used for dry film 7 Master film 8 Etching resist pattern by dry film 9 Photosensitive resin composition film formed by liquid etching resist 10 Etching resist pattern formed by liquid etching resist

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 銅張り積層板に貫通孔をあけ、無電解と
電解メッキ或いは無電解メッキにより表裏に導通孔を形
成した銅張り積層板に、液状のエッチングレジストを塗
布し乾燥してなる、表裏の面及び該導通孔内壁に感光性
の樹脂皮膜が形成されたプリント配線板中間材料。
1. A copper-clad laminate having through holes formed therein, and a copper-clad laminate having conductive holes formed on the front and back sides thereof by electroless and electrolytic plating or electroless plating, is coated with a liquid etching resist and dried. An intermediate material for a printed wiring board in which a photosensitive resin film is formed on the front and back surfaces and the inner wall of the conduction hole.
【請求項2】 無電解と電解メッキ或いは無電解メッキ
により表裏に導通孔を形成した銅張り積層板に、両面同
時にできる塗布手段を用いて液状のエッチングレジスト
を塗布することにより、該導通孔内壁に液状のエッチン
グレジストを塗布するプリント配線板中間材料の製造方
法。
2. An inner wall of the conductive hole is formed by applying a liquid etching resist to a copper-clad laminate having conductive holes formed on the front and back sides by electroless and electrolytic plating or electroless plating using a coating means capable of simultaneously forming both surfaces. A method for manufacturing an intermediate material for a printed wiring board, which comprises applying a liquid etching resist to the substrate.
【請求項3】 塗布手段がロールコーターである請求項
2記載のプリント配線板中間材料の製造方法。
3. The method of manufacturing a printed wiring board intermediate material according to claim 2, wherein the coating means is a roll coater.
【請求項4】 塗布手段がデップコーターである請求項
2記載のプリント配線板中間材料の製造方法。
4. The method for producing a printed wiring board intermediate material according to claim 2, wherein the coating means is a dip coater.
JP18910695A 1995-07-25 1995-07-25 Manufacture of printed wiring board Pending JPH0936519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18910695A JPH0936519A (en) 1995-07-25 1995-07-25 Manufacture of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18910695A JPH0936519A (en) 1995-07-25 1995-07-25 Manufacture of printed wiring board

Publications (1)

Publication Number Publication Date
JPH0936519A true JPH0936519A (en) 1997-02-07

Family

ID=16235473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18910695A Pending JPH0936519A (en) 1995-07-25 1995-07-25 Manufacture of printed wiring board

Country Status (1)

Country Link
JP (1) JPH0936519A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014636A (en) * 2009-06-30 2011-01-20 Goo Chemical Co Ltd Method for manufacturing printed wiring board with through-hole

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014636A (en) * 2009-06-30 2011-01-20 Goo Chemical Co Ltd Method for manufacturing printed wiring board with through-hole

Similar Documents

Publication Publication Date Title
JP2006310689A (en) Manufacturing method of double-access flexible circuit board
JP3031042B2 (en) Printed wiring board for surface mounting
JPH0537140A (en) Manufacture of printed wiring board
JPH0936519A (en) Manufacture of printed wiring board
JP3395222B2 (en) Manufacturing method of printed wiring board
JPH08186373A (en) Manufacture of printed wiring board
JPH036880A (en) Printed wiring board and manufacture thereof
JP2586777B2 (en) Method for manufacturing multilayer printed wiring board
JPH077264A (en) Manufacture of printed wiring board
JPH08204339A (en) Manufacture of printed wiring board
JP3711569B2 (en) Printed wiring board and manufacturing method thereof
JP2005286299A (en) Method of manufacturing circuit board
JPH09130016A (en) Circuit formation method
JPH1013017A (en) Manufacture of printed wiring board
JP2622848B2 (en) Manufacturing method of printed wiring board
JPH05243709A (en) Manufacture of printed wiring board
JPH07321461A (en) Method for manufacturing printed wiring method
JP2669411B2 (en) Manufacturing method of printed wiring board
JPH02144988A (en) Manufacture of wiring board with through hole
JPH06318774A (en) Manufacturing method of printed-wiring board
JPS62156898A (en) Manufacture of through-hole printed wiring board
JP2002261424A (en) Method of manufacturing printed-wiring board
JPH10247778A (en) Manufacture of printed wiring board
JPH05291728A (en) Manufacture of printed wiring board
JP2005286294A (en) Method of manufacturing circuit board