JPH09325124A - Method and device for crystallographic axis orientation adjustment of ingot using x ray - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the method and device which can adjust the crystallographic axis orientation of the ingot on the same machine as an X-ray crystallographic axis orientation measuring instrument by making good use of X rays. SOLUTION: A slide table 22 is provided on the same machine as the X-ray crystallographic axis orientation measuring instrument 20, and the ingot 12 with a tilt unit 16 is fixed to the slide table 22. The slide table 22 is moved to put the ingot 12 close to an X-ray irradiation part 26 and an X-ray photodetection part 28. The X-ray irradiation part 26 and X-ray photodetection part 28 are driven to set the crystallographic orientation of the ingot 12 vertically and after the X-ray irradiation part 26 and X-ray photodetection part 26 are shifted to horizontal positions, the vertical crystallographic orientation is measured by the X-ray irradiation part 26 and X-ray photodetection part 28. Then the ingot 12 is tilted in the direction of the measured crystallographic orientation by the tilt unit 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for adjusting the crystal axis orientation of an ingot using X-rays, and more particularly to an X-ray capable of adjusting the crystal axis orientation of an ingot on the same machine as an X-ray crystal axis orientation measuring apparatus. The present invention relates to a method and an apparatus for adjusting the orientation of a crystal axis of an ingot using the method.

[0002]

2. Description of the Related Art The crystal axis of a silicon ingot is measured by
The measurement is performed using an X-ray crystal axis direction measuring device. That is, X
A silicon ingot is placed on a line crystal axis azimuth axis measuring device, X-rays are emitted to the end face of the silicon ingot, reflected X-rays from the end face of the ingot are detected, and the vertical direction of the ingot,
The crystal axis orientation in the horizontal direction is measured. After the measurement, the ingot is attached to the wire saw, and the crystal axis orientation of the ingot is adjusted on the wire saw based on the measurement data.

[0003]

However, the conventional X-ray crystal axis orientation measuring apparatus takes out the ingot after measuring the crystal axis orientation of the ingot, and uses the tilt unit in a limited space on the wire saw to measure data. The crystal axis orientation must be adjusted based on the above, and there is a drawback in that it is not possible to confirm the error that occurs when the ingot and the ingot holding plate are bonded after the measurement.

The present invention has been made in view of the above circumstances, and a method for adjusting the crystal axis orientation of an ingot using X-rays capable of adjusting the crystal axis orientation of the ingot on the same machine as the X-ray crystal axis orientation measuring apparatus. And to provide a device.

[0005]

In order to achieve the above-mentioned object, the present invention is provided with a tilt unit comprising a plurality of tilt blocks capable of adjusting vertical and horizontal crystal axis orientations of the ingot. The attached ingot is placed on the moving table of the X-ray crystal axis orientation measuring apparatus, and the ingot on the moving table is moved to the detection position of the X-ray crystal axis orientation measuring apparatus to move in the vertical direction of the ingot.
Detects the horizontal crystal axis orientation, returns the ingot to the original position, drives the tilt block of the tilt unit to adjust the vertical and horizontal crystal axis orientations of the detected ingot, and then adjusts. The tilt block of the tilt unit is tightened and fixed.

Further, according to the present invention, the tilt block of the tilt unit may be driven and adjusted so that the ingot detected at the detected position has the crystal axis azimuths in the vertical and horizontal directions. Further, the adjustment may be performed based on the measurement result while emitting the X-ray. According to the present invention, since the crystal axis orientation of the ingot can be adjusted on the same machine as the X-ray crystal axis orientation measuring device, the crystal axis orientation of the ingot can be adjusted outside the wire saw, and the crystal axis orientation of the ingot can be easily adjusted. Becomes Also, because the result after adjustment can be confirmed on the same machine,
It is possible to significantly improve the accuracy of the axial orientation.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method and an apparatus for adjusting the crystal axis orientation of an ingot using X-rays according to the present invention will be described below in detail with reference to the accompanying drawings. As shown in FIG. 1, the manipulator 10 holds the ingot 12, and the tilt unit 16 is fixed to the adhesive plate 14 attached to the side of the ingot 12. The tilt unit 16 is fitted with a dovetail groove on the adhesive plate 14 (not shown).
Then, it is clamped and fixed to the adhesive plate 14 from the side by the screw 18. The tilt unit 16 is shown in FIGS.
Will be described later.

FIG. 2 shows an X-ray crystal axis azimuth measuring device 20. A slide table 22 is provided on the same machine as the X-ray crystal axis azimuth measuring device 20 through a guide 23 and a rail 25 in the left-right direction in the drawing. It is freely movable to. The slide table 22 is a screw shaft (not shown) connected to the motor 24.
It is driven in the left-right direction by rotating. The ingot 12 with the tilt unit 16 is placed on the slide table 22 configured as described above by using the manipulator 10. The ingot 12 with the tilt unit 16 is fitted into a slide table 22 by means of a dovetail groove (not shown), and is clamped and fixed by levers 22A and 22A.

The X-ray crystal axis orientation measuring device 20 has an X-ray irradiating section 26 and an X-ray receiving section 28. The X-ray irradiation unit 26 is provided at one end of the arm 30, and the X-ray reception unit 28
Is supported by the other end of the arm 30 with a predetermined angle. The arm 30 is swingably supported by a fan-shaped plate 31 via an arcuate rail 33. A rotary shaft 32 is fixed to the plate 31, and the rotary shaft 32 is connected to a spindle 38 of a motor 36 via a bearing 34. The motor 36 is drive-controlled by a controller (not shown) so as to rotate the arm 30 every 90 °.

The X-ray irradiator 26 and the X-ray receiver 28 are
A guide and a rail 33 (not shown) are swung by a screw feed mechanism by a motor. This X-ray crystal axis orientation measuring device 20
When measuring the crystal axis orientation of the ingot 12, the ingot 12 with the tilt unit 16 is first fixed on the slide table 22. Next, the slide table 22
Is moved to the right in FIG. 2 to position the ingot 12 at the detection position indicated by the chain double-dashed line in the figure. Next, X-rays are radiated from the X-ray irradiation unit 26 toward the end surface of the ingot 12, the reflected X-rays are received by the X-ray light receiving unit 28, and the crystal axis in the vertical direction of the ingot 12 is based on the reflection angle. Measure the azimuth. Then, the horizontal crystal axis orientation of the ingot 12 is measured. This completes the measurement of the crystal axis orientation. The measured vertical crystal axis orientation and the measured horizontal crystal axis orientation are displayed on the monitor 40.

Next, the slide table 22 is returned to its original position, and the vertical tilt angle and the horizontal tilt angle of the ingot 12 are adjusted by the tilt unit 16 so that the measured crystal axis orientation is obtained. First, in order to adjust the vertical tilt angle, the micrometer 4 shown in FIG.
This is done by rotating the head of No. 2. This micrometer 42
Is a plate 44 fixed on the slide table 22.
Supported by. A pressing rod 46 is connected to the spindle of the micrometer 42, and the pressing rod 46 moves in the left-right direction in the drawing together with the spindle when the micrometer 42 is rotated. When the pressing rod 46 is moved to the right in the drawing by the micrometer 42, the tip end portion of the pressing rod 46 pushes the vertical swing block 70 of the tilt unit 16, so that the vertical swing block 70 is urged by the spring 48. It begins to tilt against it, and tilts vertically with respect to the horizontal rocking block 68. If this tilt angle is fixed according to the measured vertical crystal axis orientation, the vertical tilt angle is adjusted. As shown in FIG. 4, the micrometer 42 is provided at a position where the central portion of the vertical swing block 70 is pushed.

Then, the head of the micrometer 50 shown in FIG. 3 is rotated to adjust the horizontal tilt angle. The micrometer 50 is supported by the plate 44. A pressing rod 52 is connected to the spindle of the micrometer 50, and the pressing rod 52 moves in the horizontal direction in the drawing together with the spindle when the micrometer 50 is rotated. When the pressing rod 52 is moved to the right in the drawing by the micrometer 50, the tip end of the pressing rod 52 pushes the horizontal swing block 68 of the tilt unit 16, so that the horizontal swing block 68 becomes the biasing force of the spring 54. Then, it starts to rotate in the horizontal direction and tilts in the horizontal direction with respect to the mounting block 66. If this tilt angle is fixed according to the measured horizontal crystal axis orientation, the horizontal tilt angle is adjusted. As shown in FIG. 4, the micrometer 50 is provided at a position to push the vicinity of the corner of the horizontal swing block 68.

Next, the ingot 12 whose crystal axis orientation has been adjusted is again measured by the X-ray crystal axis orientation measuring device 20,
Reconfirm whether the adjusted crystal axis orientation is correct. After the reconfirmation, when the crystal axis orientation is not properly adjusted, the above-mentioned crystal axis orientation adjusting work is performed again. Such a crystal axis orientation adjusting operation of the ingot 12 may be performed by temporarily returning the ingot 12 to the original position shown by the solid line in FIG. 2 as described above. May be adjusted. When the adjustment is performed at the detection position, the adjustment error is smaller than when the adjustment is performed at the original position.

If the result of the reinspection is correct, the ingot 12 together with the tilt unit 16 is removed from the slide table 22 and placed on the setting base 56 shown in FIG. 5 using the manipulator 10. The ingot 12 with the tilt unit 16 is fitted with a dovetail groove (not shown) to the setting base 56, and the lever 56.
It is fixed by A and 56A. After that, it is carried to the wire saw by a carrying means or a conveyor not shown. Then, the ingot 12 with the tilt unit 16
Is fixed to the work feed table of the wire saw via the setting base 56.

In the present embodiment, the crystal axis azimuth adjustment work is performed by rotating the micrometers 42 and 50 shown in FIG. 3, that is, manually performed by the operator, but the present invention is not limited to this. . For example, the micrometer 42, 50
Connect a stepping motor to the head. Then, the rotation angle of this stepping motor is controlled based on the information indicating the crystal axis orientation obtained by the X-ray crystal axis orientation measuring apparatus 20, and the crystal axis orientation obtained by the X-ray crystal axis orientation measuring apparatus 20. The heads of the micrometers 42 and 50 are rotated by a stepping motor so that the inclining angle of the ingot 12 is matched with. As a result, the work of aligning the crystal axis of the ingot 12 can be automated.

Next, the structure of the tilt unit 16 will be described with reference to FIGS. 6 and 7. 6 is a vertical sectional view of the tilt unit 16, and FIG. 7 is a plan view of the tilt unit 16. As shown in FIG. 6, the tilt unit 16 includes a mounting block 66, a horizontal swing block 68, and a vertical swing block 70 as main constituent members.
The bolts 72, 78, 78 are connected to each other and are integrally configured.

The mounting block 66 is formed in a rectangular shape, and a dovetail portion 67 is formed on the upper surface thereof. This ant part 6
The upper surface 67A of 7 serves as a horizontal reference surface for the wire row of the wire saw. The mounting block 66 is shown in FIG.
As shown in, the guide holes 74, 74 formed in an arc shape.
Are formed concentrically around the bolt 72 and at symmetrical positions. Guide nuts 76 are inserted into the guide holes 74, 74,. The guide nut 76 is formed so as to be slidable along the guide hole 74, and a bolt 78 disposed at the center thereof is screwed into the nut 82 through the through hole 80 of the horizontal swing block 68. ing.

Therefore, when the bolts 78, 78 are loosened, the action of the guide hole 74 and the guide nut 76, and the sliding of the circular concave portion 69 of the horizontal swing block 68 and the circular convex portion 67 of the mounting block 66. The horizontal swing block 68 can be horizontally rotated with respect to the mounting block 66 by the operation, and by tightening the bolts 78, 78,
The horizontal tilt angle of the horizontal swing block 68 can be adjusted.

The horizontal swing block 68 is the mounting block 6.
It slides along the lower surface of 6 and is fixed to the mounting block 66 by tightening the bolts 78, 78, and when loosened, it swings horizontally along the circular convex portion 67 of the mounting block 66. A concave curved surface 84 is formed on the lower portion of the horizontal swing block 68. The curved surface 84 is a vertical reference surface for the wire row. On the other hand, a convex curved surface 86 conforming to the shape of the curved surface 84 is formed on the upper part of the vertical swing block 70. In the center of the upper part of the vertical swing block 70, an arc-shaped long hole 88 is formed along the shape of the curved surface 86. This long hole 88
The nut 72 is screwed into the bolt 72.

The vertical swing block 70 slides on the concave curved surface 84 (vertical reference plane) of the horizontal swing block 68,
By tightening the bolt 72, it is fixed to the mounting block 66 via the horizontal swing block 68, and by loosening it, it swings in the vertical direction with respect to the horizontal swing block 68. A dovetail groove 92 is formed in the lower portion of the vertical swing block 70, and the dovetail groove 92 is formed parallel to the horizontal reference plane. The ingot 12 is fixed to the dovetail groove 92 via the adhesive plate 14.

With this tilt unit 16, the ingot 12
In detail, the procedure for adjusting the crystal axis orientations of (1) and (2) is first loosened to make the vertical swing block 70 swingable with respect to the horizontal swing block 68. Then, the vertical rocking block 70 is tilted in the vertical direction with respect to the horizontal rocking block 68, and when the tilt angle matches the crystal axis direction of the ingot 12 in the vertical direction, the bolts 72 are fastened to the vertical rocking block 70. Is fixed to the horizontal rocking block 68.

Next, the bolts 78, 78 are loosened so that the horizontal swing block 68 can swing with respect to the mounting block 66. Then, the horizontal rocking block 68 and the vertical rocking block 70, which have been fixed after the vertical rocking direction has been adjusted, are horizontally rocked, and the rocking angle is the horizontal crystal axis of the ingot 12. When the orientation is matched, the bolts 78, 78 are fastened to fix the horizontal swing block 68 to the mounting block 66. This completes the work of aligning the crystal axis orientation of the ingot 12.

The above bolt tightening work is performed by the automatic screw tightening device 94 provided in the X-ray crystal axis orientation measuring device 20 of FIG.
Can be done automatically. This automatic screw tightening device 94 has a cylinder 96, a motor 98, a bolt fitting member 100, and the like. The cylinder 96 is attached to the guide 102 so as to be vertically movable, and is driven and controlled by a control unit (not shown) to guide the guide 10.
It is moved up and down along 2. The motor 98 is fixed to the cylinder 96 and moved as the cylinder 96 moves up and down. Like the cylinder 96, the motor 98 is also drive-controlled by the controller.

The bolt fitting member 100 is a motor 98.
When the cylinder 96 is connected to the spindle 104 and is moved upward in the drawing, the opening 1 formed in the casing 20A of the X-ray crystal axis orientation measuring apparatus 20 as shown in FIG.
It is fitted to the bolt 72 of the tilt unit 16 shown in FIG. 6 via 06. In this state, if the motor 98 is drive-controlled in the forward direction, the bolt 72 can be tightened, and if it is drive-controlled in the reverse direction, the bolt 72 can be loosened. Further, the automatic screw tightening device 94 is horizontally moved to a position corresponding to the position of the bolts 78, 78 by a horizontal moving device (not shown) so that the bolt fitting member 100 is also fitted to the bolts 78, 78 of the tilt unit 16. To be done. As a result, the bolts 78, 78 are tightened or loosened by the automatic screw tightening device 94.

By using the automatic screw tightening device 94 described above and the stepping motor described above in combination and controlling them, the crystal axis orientation of the ingot 12 by X-rays can be completely automated. In FIG.
First, the motor 24 is drive-controlled to position the ingot 12 at the detection position, and then the X-ray irradiator 26 and the X-ray receiver 2 are provided.
8 and the motor 36 are controlled to detect the crystal axis orientation of the ingot 12. Next, the motor 24 is drive-controlled to return the ingot 12 to its original position, and then the stepping motor is controlled based on the detected crystal axis orientation.
As a result, the micrometers 42 and 50 connected to the stepping motor are rotated, and the blocks 68 and 70 of the tilt unit 16 are tilted, whereby the crystal axis orientation adjustment of the ingot 12 is automatically adjusted. Then, by tightening the bolts 72, 78, 78 of the tilt unit 16 with the automatic screw tightening device 94, the crystal axis orientation adjustment of the ingot 12 can be completely automated.

[0026]

As described above, according to the method and apparatus for adjusting the crystal axis orientation of an ingot using X-ray according to the present invention, the crystal axis orientation adjustment of the ingot is performed on the same machine as the X-ray crystal axis orientation measuring apparatus. Therefore, the crystal axis orientation of the ingot can be adjusted outside the wire saw, and the crystal axis orientation of the ingot can be easily adjusted.

[Brief description of drawings]

FIG. 1 is an explanatory view showing a state in which an ingot is fixed to a tilt unit via a mounting plate.

FIG. 2 is an overall view of an X-ray crystal axis direction measuring apparatus according to an embodiment of the present invention.

FIG. 3 is a front view of a tilt unit.

FIG. 4 is a view of the tilt unit viewed from line 4-4 in FIG.

FIG. 5 is an explanatory view showing a state where an ingot is fixed to a setting base via a tilt unit.

FIG. 6 is a vertical sectional view of a tilt unit.

FIG. 7 is a plan view of a tilt unit.

[Explanation of symbols]

 10 ... Manipulator 12 ... Ingot 14 ... Adhesive plate 16 ... Tilt unit 20 ... X-ray crystal axis orientation measuring device 22 ... Slide table 26 ... X-ray irradiator 28 ... X-ray receiver 42, 50 ... Micrometer

Claims (6)

[Claims] 1. A tilt unit comprising a plurality of tilt blocks capable of adjusting crystal axis directions in the vertical and horizontal directions of the ingot is attached to the ingot, and the ingot with the tilt unit is mounted on a moving table of an X-ray crystal axis direction measuring apparatus. It was placed, the ingot on the moving table was moved to the detection position of the X-ray crystal axis orientation measuring device, the vertical and horizontal crystal axis orientations of the ingot were detected, and the ingot was returned to the original position and detected. The tilt block of the tilt unit is driven and adjusted so that the crystal axis directions of the vertical and horizontal directions of the ingot are adjusted, and after adjustment, the tilt block of the tilt unit is tightened and fixed. Crystal axis orientation adjustment method. 2. The method according to claim 2, wherein after the tilt block of the tilt unit is clamped and fixed, the X-ray crystal axis orientation measuring device again detects the vertical and horizontal crystal axis orientations of the ingot at the detection position. The method for adjusting the crystal axis orientation of an ingot using X-rays according to claim 1. 3. A tilt unit comprising a plurality of tilt blocks capable of adjusting crystal axis orientations in vertical and horizontal directions of the ingot is attached to the ingot, and the ingot with the tilt unit is mounted on a moving table of an X-ray crystal axis orientation measuring apparatus. Place it, move the ingot on the moving table to the detection position of the X-ray crystal axis orientation measuring device, detect the vertical and horizontal crystal axis orientations of the ingot, and detect the vertical direction of the ingot detected at the detected position. The crystal axis orientation of the ingot using X-rays characterized by driving and adjusting the tilt block of the tilt unit so that the crystal axis orientation is the horizontal and horizontal directions, and then tightening and fixing the tilt block of the tilt unit after the adjustment. Adjustment method. 4. A tilt unit equipped with a plurality of tilt blocks capable of adjusting crystal axis orientations in vertical and horizontal directions of an ingot, and a tilt unit attached to the ingot, and the ingot with the tilt unit mounted thereon and moving on the main body of the apparatus. Provided on the main body of the apparatus: X-ray crystal axis orientation measuring device, and a display unit for displaying the vertical and horizontal crystal axis orientations of the ingot detected by the X-ray crystal axis orientation measuring device. Axial orientation adjustment device. 5. The crystal axis orientation adjusting device for an ingot using an X-ray according to claim 4, further comprising an automatic screw tightening device for tightening or loosening a screw between blocks of the tilt unit. 6. A vertical direction of the detected ingot,
The tilt block of the tilt unit is driven based on the crystal axis orientation in the horizontal direction, and the vertical direction of the ingot,
The crystal axis orientation adjusting device for an ingot using X-rays according to claim 4, further comprising control means for automatically adjusting the crystal axis orientation in the horizontal direction.