JP2002337137A - Work mounting method, wire saw and support plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a work mounting method or the like for enhancing processing efficiency by preliminarily aligning the crystal orientations of a plurality of works prior to mounting the work on a work support mechanism. SOLUTION: Works 22 and 22' are fixed to respective work holding fixtures 33 and the work holding fixture 33 to which the work 22 is fixed is directly fixed to a support plate 38 while the work fixture 33 to which the work 22' is fixed is attached to the daughter goniometer 43 provided to the support plate 38 and the crystal orientation of the work 22' is aligned with that of the work 22 by the daughter goniometer. The support plate 38 is mounted on the work support mechanism 21 having a parent goniometer 63 and the orientation of the support plate 38 is adjusted by the parent goniometer 63 to adjust the crystal orientation of the whole of the works 22 and 22'.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a method of using a wire,
Semiconductor material, magnetic material, a method of mounting a work on a wire saw for cutting a work having a crystal structure such as ceramic,
And its wire saw and support plate.

[0002]

2. Description of the Related Art Generally, in a wire saw, a plurality of processing rollers are disposed at predetermined intervals, and a plurality of annular grooves are formed on the outer periphery of the rollers at a predetermined pitch. In addition, between each processing roller, 1 is provided in the annular groove.
The books are wound sequentially. Further, a work support mechanism is provided corresponding to the wire between the processing rollers, and a work is detachably attached to a lower portion of the work support mechanism. Then, while the wire is running, a working fluid is supplied onto the wire, and in this state, the work is pressed against the wire by the work supporting mechanism to make a work such as cutting. Note that the other configurations are completely the same, and there are some devices in which the positions of the wire and the work are upside down.

In this type of wire saw, it is necessary to measure the crystal orientation of the work in advance and adjust the orientation of the work according to the measurement result so that the crystal orientation corresponds to the traveling direction of the wire with a predetermined positional relationship. was there. For this reason, in the conventional wire saw, the work supporting mechanism is provided with an azimuth adjustment mechanism for adjusting the direction of the crystal orientation in the rotation direction and the horizontal direction of the work. Then, after mounting the work on the work support mechanism, this work direction adjustment mechanism rotates the work around its central axis to adjust the crystal orientation in the rotation direction, and shifts the work's central axis in the horizontal plane. The crystal orientation in the horizontal direction was adjusted.

[0004]

However, in the conventional wire saw, since there is only one orientation adjusting mechanism in the work supporting mechanism, a plurality of works having different crystal orientations are installed, and cutting is performed while simultaneously adjusting the crystal orientations. It was impossible to do. In other words, it is possible to cut only short and long workpieces one by one, such as mounting one workpiece on one workpiece support, mounting it on the workpiece support mechanism, adjusting the orientation, and then cutting. could not. Therefore, the processing efficiency of the wire saw was poor and the productivity was low.

It is also conceivable to provide a plurality of azimuth adjusting mechanisms in the work supporting mechanism, attach a plurality of works having different crystal orientations, and adjust the azimuth of each of the works to enable simultaneous processing. However, the structure of the work supporting mechanism becomes very complicated, and furthermore, since the cutting is started after performing the azimuth adjustment in each of the two directions, the workability is poor and the adjustment time is long, and as a result, the productivity is also low. It was not good.

[0006] The invention according to the present application has been made to solve the above problems. The purpose is to adjust the crystal orientation of the work before mounting the work on the work supporting mechanism, thereby simplifying the configuration of the wire saw and improving the processing efficiency. It is an object of the present invention to provide a work mounting method, a wire saw, and a support plate that can be used.

[0007]

According to a first aspect of the present invention, there is provided a first jig and a second jig to which a work having a crystal structure is fixed, and the first jig and a second jig. A work plate having a support plate to which a second jig is mounted and a work support mechanism to which the support plate is mounted, wherein the work is mounted via the first jig, the second jig and the support plate A work mounting method of mounting a work on a wire saw that cuts a work by moving a support mechanism toward a traveling wire, wherein the work is fixed to each of the first jig and the second jig. Fixing the first jig to a support plate, attaching the second jig to an azimuth adjustment mechanism provided on the support plate, and crystallizing the work fixed to the first and second jigs. Measure each direction and The crystal orientation of the work fixed to the second jig was adjusted using an orientation adjustment mechanism provided on the support plate according to the measured value, and then the support plate was provided on the work support mechanism. Mounting the workpiece on an orientation adjustment mechanism, and adjusting the crystal orientation of the entire workpiece mounted on the support plate using an orientation adjustment mechanism provided on the workpiece support mechanism based on the measurement value; Is the way.

According to a second aspect of the present invention, a crystal orientation of a workpiece fixed to the second jig is fixed to the first jig by using an orientation adjusting mechanism provided on the support plate. The work mounting method according to the first aspect, wherein the work is adjusted to match the crystal orientation of the work.

A third invention according to the present application is the work mounting method according to the first or second invention, wherein the measurement of the crystal orientation of the work is performed by an X-ray direction measuring device.

According to a fourth aspect of the present invention, a first jig and a second jig to which a work having a crystal structure is fixed, and the first jig and the second jig are attached. A wire that has a support plate and a work support mechanism to which the support plate is mounted, and travels through the work support mechanism in which the work is mounted via the first jig, the second jig, and the support plate. In a wire saw that cuts a workpiece by approaching the workpiece, the support plate includes an orientation adjustment mechanism that adjusts a crystal orientation of the workpiece fixed to the second jig, and the first jig includes the support plate. Directly, the second jig is attached to the azimuth adjustment mechanism provided in the support plate,
The work support mechanism includes an orientation adjustment mechanism that adjusts a crystal orientation of the entire work mounted on the support plate,
The support plate is attached to the azimuth adjustment mechanism provided in the work support mechanism.

According to a fifth aspect of the present invention, there is provided a support plate for mounting a plurality of jigs each having a work having a crystal structure fixed thereon, and cutting the work by being approached toward a traveling wire. The support plate has an orientation adjustment mechanism for adjusting the crystal orientation of the work fixed to the jig, and the number of the orientation adjustment mechanisms is one less than the number of jigs to be mounted. It is a supporting plate characterized by the following.

A sixth invention according to the present application is characterized in that the azimuth adjustment mechanism is an adjustment mechanism in two different directions, and a tilt mechanism by a pivot is used in at least one direction adjustment mechanism. It is a support plate of 3.

[0013]

An embodiment of the present invention will be described below with reference to the drawings.

First, the configuration of the wire saw will be briefly described with reference to FIGS. 1 is a right side view of the wire saw, and FIG. 2 is a schematic plan view of the wire saw shown in FIG. 1 as viewed from above. As shown in FIG. 1, a column 12 is erected on an apparatus base 11. Column 1
A cutting mechanism 13 is provided in front of (the left side in FIG. 1) of the bracket 2.
4 is provided. The cutting mechanism 13 has a plurality of processing rollers 15, 16 and 17 rotatably supported by a bracket 14, and the respective processing rollers are arranged in parallel at a predetermined interval. As shown in FIG. 2, annular grooves 15a, 16a, and 17a are formed at predetermined pitches on the outer circumference of the processing rollers 15, 16, and 17, respectively. In the drawings, the number of the annular grooves 15a, 16a, 17a is smaller than the actual number for easy understanding.

A wire 18 made of a single wire is continuously wound around each of the annular grooves 15a, 16a, 17a of the processing rollers 15, 16, 17. As shown in FIG. 2, a wire traveling motor 19 is provided on the bracket 14, and the processing rollers 15, 16, 17 are rotationally driven by the wire traveling motor 19 via a transmission mechanism (not shown). . And these processing rollers 1
Due to the rotation of 5, 16 and 17, the wire 18 runs at a predetermined running speed. The traveling of the wire 18 is repeated so as to advance forward and backward by a fixed amount and to move forward stepwise as a whole. Further, the processing rollers 15, 1
Only 12 rollers out of 6, 17 are driven by the wire running motor 19, and the wire
A drive transmission mechanism in which rotation is transmitted to another roller via the drive mechanism may be used. In addition, as the wire 18, not only a normal wire but also a fixed abrasive wire having abrasive grains attached to the surface of the wire can be used.

As shown in FIG. 1, a working fluid supply mechanism 20 is disposed on the bracket 14 so as to be located above the cutting mechanism 13, and from the working fluid supply mechanism 20, the processing rollers 15, 16, and An aqueous or oily working fluid is supplied on the wire 18 between the 17. As the working fluid, a working fluid containing free abrasive grains or a working fluid containing no free abrasive grains can be used. In the case of using a working fluid containing no free abrasive grains, the use of a fixed abrasive wire enables effective working.

Above the working fluid supply mechanism 20, a work support mechanism 21 is supported on the column 12 so as to be vertically movable, and a work 22 having a plurality of crystal structures made of a hard and brittle material is set under the work support mechanism 21. A work elevating motor 23 is disposed on the column 12, and the work elevating motor 23 moves the work support mechanism 21 up and down via a ball screw (not shown) or the like.

During operation of the wire saw, the wire 18 is connected to the processing rollers 15, 16, 1 of the cutting mechanism 13.
The work supporting mechanism 21 is moved down toward the cutting mechanism 13 while traveling between the seven positions. At this time, the work fluid is supplied from the work fluid supply mechanism 20 onto the wire 18, and the work 22 is pressed against and brought into contact with the wire 18, so that the work 22 is simultaneously sliced into a wafer by a grinding action.

As shown in FIG. 2, a reel mechanism 24 is mounted on the apparatus base 11, and a reel 25 for reeling out the wire 18 and a winding reel 26 for winding up the wire 18. And A pair of reel rotation motors 27 and 28 composed of servo motors capable of changing the rotation direction and the rotation speed are arranged on the device base 11,
Reels 25 and 26 are connected to these motor shafts. The reel rotation motors 27 and 28 are reversible,
After the winding of the wire 18 on one reel 26 is completed,
The reel 26 is positioned on the wire feed side and the other reel 2
Reference numeral 5 replaces the wire winding side.

A traverse mechanism 29 is mounted on the apparatus base 11 adjacent to the reel mechanism 24. The traverse mechanism 29 feeds the wire 18 from the pay-out reel 25 and winds the wire 18 onto the take-up reel 26. The wire 18 is guided while traversing up and down. And the reel mechanism 2
4 and the reels 25 and 26 rotate, and the reel 2
The wire 18 is fed out from the 5 to the cutting mechanism 13, and the processed wire 18 is wound up on a take-up reel 26.

As shown in FIG. 1, the traverse mechanism 2
A tension holding mechanism 30 and a guide mechanism 31 are disposed between the cutting mechanism 9 and the cutting mechanism 13. And the cutting mechanism 13
Both sides of the wire 18 wound between the processing rollers 15, 16 and 17 are wound around the tension holding mechanism 30 via the respective guide rollers 32 of the guide mechanism 31. In this state, the processing rollers 15, 1
A predetermined tension is applied to the wire 18 between the wires 6 and 17.

Next, a mechanism for adjusting the crystal orientation of the work 22 prior to mounting the work 22 on the work support mechanism 21 will be described. Generally, the work 22 (for example, an ingot) before cutting has a notch groove or the like formed on a part of the outer peripheral surface to indicate the crystal orientation, and the notch groove or the like is used as a reference for adjusting the crystal orientation. It is also possible to use. However, the present application is a technique for mounting the work 22 on a wire saw by adjusting the crystal orientation of the work 22 with higher accuracy.

First, the work 22 is mounted on the work holding jig 33. The work holding jig 33 includes an intermediate plate 34, a mounting plate 35, a mounting portion 36, and the like as shown in FIG. The intermediate plate 34 is made of carbon or the like, and its lower surface is concavely curved so that the outer peripheral surface of the cylindrical work 22 is in close contact. The upper surface of the intermediate plate 34 is fixed to the lower surface of the mounting plate 35.
The mounting part 36 is fixed to the upper surface of the. Mounting part 36
Has an engagement arm 37 projecting left and right when viewed from the front, and has a substantially T-shape.

Usually, the mounting portion 36 and the mounting plate 35 are not used separately, but are treated as one.
Further, the intermediate plate 34 is cut by the wire 18 together with the work 22 at the time of working with the wire saw, and thus is fixed to the lower surface of the mounting plate 35 with an adhesive or the like. Then, after finishing the processing, the mounting plate 3
5 so that the next new intermediate plate 34 is glued.

When attaching the work 22 to the work holding jig 33, it is not necessary to detect and attach an accurate crystal orientation of the work 22, for example, by arranging a notch groove, an orientation flat or the like downward. Is fixed to the intermediate plate 34 in a state where the crystal orientations are roughly adjusted. The work 22 is fixed with an adhesive or the like by fitting its outer peripheral surface to the concave curved portion on the lower surface of the intermediate plate 34. In this manner, at least two sets in which the work 22 is fixed to the work holding jig 33 are created.

Next, the work 22 fixed to the work holding jig 33 is attached to the support plate 38 this time. FIG. 4 is a perspective view of the support plate 38. As shown in FIG. 4, the support plate 38 has a structure in which at least two sets of the work holding jigs 33 can be attached and detached.

Here, the support plate 38 will be described in detail with reference to FIGS. FIG. 5 shows the support plate 3
8 is a front view, and FIG. 6 is a left side view of the support plate. As shown in FIG. 5, the support plate 38 is provided with a support portion 39 for mounting the work holding jig 33 to the left and right.
A pair (39a, 39b) is provided. The support portion 39a located on the right side is provided with two right and left locking portions 42a protruding toward the front of the paper on a back plate 41a extending downward from the support plate main body 40. The left and right engaging arms 37 of the mounting portion 36 are mounted and positioned on the left and right locking portions 42a, respectively, and fixing screws are screwed into through holes provided in the mounting portion 36 to be screwed to the back plate 41a. Then, the work holding jig 33 is
(First jig) is fixed.

On the other hand, a support portion 39b located on the left side of the support plate 38 is provided below the goniometer.
In the present embodiment, the goniometer is provided with a work holding jig 33 (second jig) attached to the support plate 38 in the horizontal and tilt directions (clockwise in a plane parallel to the plane of FIG. 5). Or adjust the azimuth (counterclockwise direction).

Here, the goniometer (hereinafter referred to as a child goniometer 43) provided on the support plate 38 will be briefly described with reference to the drawings. FIGS. 7A and 7B show child goniometer 43.
It is a schematic diagram which shows the principle of the adjustment mechanism of a tilt direction. As shown in FIG. 7A, the adjusting mechanism in the tilting direction includes a rotating plate 44 and a tilting plate 45 mounted below the rotating plate 44. The tilt plate 45 is formed with four through holes 45a in the vertical direction, and a fixing screw 46 is inserted into each of the through holes 45a.
The tip of the fixing screw 46 is inserted into the through hole 45 of the tilt plate 45.
a of the fixing screw 46 is slidably inserted through the through hole 45 a of the tilting plate 45. Fixing screw 46
A flange 46a is formed at a lower end of the tilting plate 45. A compression coil spring 47 is provided between the flange 46a and the lower surface of the tilting plate 45. The fixing screw 46 passes through the inside of the coil of the compression coil spring 47,
And the compression coil spring 47 are provided substantially coaxially.
The tilting plate 45 has a structure in which the tilting plate 45 is urged upward toward the rotating plate 44 by a fixing screw 46 and a compression coil spring 47.

The central portions of the opposing surfaces of the rotating plate 44 and the tilting plate 45 are each provided with a V extending in the lateral direction.
The linear grooves 48, 49 are formed, and the column-shaped pivot 50, which serves as the tilt fulcrum axis, is formed in the linear grooves 48, 49.
Are rotatably arranged. Therefore, the tilt plate 4
Reference numeral 5 is supported on the rotating plate 44 so as to be tiltable with a pivot 50 as a fulcrum like a seesaw.

A tilt adjustment screw 51 is provided symmetrically with respect to the pivot 50. The tilt adjustment screw 51 is screwed into a female screw formed on the tilting plate 45, and its tip projects from the upper surface of the tilting plate 45 and contacts the lower surface of the rotating plate 44. As described above, the tilting mechanism by the pivot is used for the adjusting mechanism in the tilting direction, and the overall structure is compact. For example, when the left tilt adjustment screw 51 is loosened and the right tilt adjustment screw 51 is screwed in, the right side of the tilting plate 45 is lowered. The left side of the plate 45 is lowered. Angle gauges 52 and 53 are fixed to the rotating plate 44 and the tilting plate 45, respectively, and it is possible to detect the tilt angle between the rotating plate 44 and the tilting plate 45 from the amount of displacement of the scales of the two angle gauges 52 and 53. it can.

The supporting portion 39b is provided with two right and left locking portions 42b protruding toward the front of the drawing on a back plate 41b extending downward from the tilting plate 45.
The work holding jig 33 is attached to the left and right locking portions 42b.
The left and right engagement arms 37 provided on the mounting portion 36 (see FIG. 3) are placed and positioned, and a fixing screw is screwed into two through holes 36a formed in the mounting portion 36 to fix the back plate 41b.
Then, the work holding jig 33 is fixed to the support plate 38 by screwing.

Next, a mechanism for adjusting the horizontal rotation direction of the child goniometer 43 will be described with reference to schematic diagrams. FIG. 8 is a schematic diagram briefly showing the principle of the horizontal rotation adjusting mechanism. In FIG. 8, the description of the structure below the rotating plate 44 is omitted.

The horizontal rotation direction adjusting mechanism rotates the rotary plate 44 in a horizontal plane. As shown in FIG. 8, a columnar rotating shaft 54 is fixed to the upper surface of the rotating plate 44 vertically upward. Its rotation axis 54
An arm 55 arranged in the horizontal direction is fixed to the upper end of the arm. The arm 55 has a root portion fixed to the rotation shaft 54, and a distal end portion around the rotation shaft 54.
It is rotatable with it. An engagement bolt 56 is screwed into the tip of the arm 55 from below. Below the engaging bolt 56, a grooved nut 57 is slidably provided in the short direction (the direction of arrow a) of the support plate 38, and the grooved nut 57 has a horizontal rotation adjusting screw 58. By rotating, the support plate 38 is fed back and forth in the short direction.

When adjusting the rotation direction, the horizontal rotation adjusting screw 58 is rotated to feed and move the grooved nut 57 in the short direction. An engagement groove 57a, which is obtained by flattening a part of the outer periphery, is formed in the upper middle portion of the grooved nut 57, and the head of the engagement bolt 56 is engaged with the engagement groove 57a. The mating bolt 56 moves in accordance with the operation of the grooved nut 57 in a state of being engaged with the engaging groove 57a. Since the engagement bolt 56 is fixed to the tip of the arm 55,
The arm 55 rotates about the rotation shaft 54 together with the rotation shaft 54. Since the rotating plate 44 is fixed to the lower end of the rotating shaft 54, the rotating plate 44 performs a rotating operation in a horizontal plane. As described above, the rotation of the rotation plate 44 can be adjusted by the rotation of the horizontal rotation adjustment screw 58.

The structure of the support plate 38 for specifically implementing the horizontal rotation adjusting mechanism will be described with reference to FIG. FIG. 9 is an enlarged view of a state where a part of the support plate 38 is viewed from the front. A fixing nut 59 is screwed into the upper end of the rotating shaft 54 to fix the arm 55. The lower surface of the arm 55 is the support plate body 40
The rotary shaft 54 is placed on the upper surface of the flange portion 60 provided on the support plate 40 to prevent the rotating shaft 54 from falling down from the support plate main body 40. The rotating shaft 54 is rotatably supported by a bearing 61 provided on the support plate body 40. A flange 54a is formed at the lower end of the rotating shaft 54, and the rotating plate 44 is fastened to the flange 54a by screws.

The support plate body 40 has a grooved nut 5
The straight hole 62 for the movement of the support plate body 7 is
The grooved nut 57 is slidably fitted in the straight hole 62. The head of an engagement bolt 56 screwed into the tip of the arm 55 from below is engaged with an engagement groove 57 a provided on the upper surface of the grooved nut 57. The arm 55 rotates with the rotation shaft 54 about the rotation shaft 54. A female screw 57b is formed along the central axis of the grooved nut 57, and a horizontal rotation adjusting screw 58 is screwed into the female screw 57b. The horizontal rotation adjusting screw 58 is supported by the support plate main body 40 so as not to move in the short direction of the support plate main body 40. When the horizontal rotation adjusting screw 58 is rotated, the grooved nut 57 is fed in the short direction of the support plate main body 40, and the rotation shaft 54 performs horizontal rotation through the rotation of the arm 55. Then, the rotating plate 44 screwed to the flange 54a at the lower end of the rotating shaft rotates in the horizontal plane.

The tilt plate 45 is provided below the rotary plate 44 as described above, and the tilt plate 45 horizontally rotates together with the rotary plate 44. Therefore, the supporting plate 3 is provided by the child goniometer 43 provided on the supporting plate 38.
The horizontal rotation direction and the tilt direction of the work holding jig 33 attached to the work 8 can be adjusted. In the present embodiment, only the structure of the support plate 38 to which the two sets of work holding jigs 33 are detachable has been described.
The present invention is not limited to this, and it is also possible to create and use a support plate 38 to which two or more sets of work holding jigs 33 are detachable. In that case, support plate 3
8 may be provided with (number of detachable work holding jigs)-(one) child goniometer 43. For example, in the case of a support plate 38 to which three work holding jigs 33 can be attached, two child goniometers 43 may be provided, and the support plate 38 to which four work holding jigs 33 can be attached is provided. In this case, three child goniometers 43 may be provided.

The support plate 38 constructed as described above is attached to the wire saw device main body, and the work is cut. In the present invention, as shown in FIG. 11, the work support mechanism 21 provided on the wire saw is provided with a goniometer (hereinafter, referred to as a parent goniometer 63) for adjusting the horizontal rotation direction and the tilt direction of the support plate 38. ing. The parent goniometer 63 provided in the wire saw device main body has the same structure as the child goniometer 43 provided on the support plate 38, and a detailed description of the structure will be omitted. The support plate 38 is attached to the work support mechanism 21 of the wire saw device main body by screwing a connection portion 40a provided at an upper portion to the parent goniometer 63. Then, the support plate 38 to which the two or more works 22 are attached is fixed to the work support mechanism 21, and the work support mechanism 21 is lowered toward the wire 18 so that the two or more works 22 become one work. And can be cut and processed.

[Embodiment 1] A method of using the work holding jig 33 and the support plate 38 configured as described above will be described below.

First, in the first step P1, as shown in FIG.
The work 22 is bonded to the work holding jig 33. This bonding is performed by applying an adhesive to the curved portion on the lower surface of the intermediate plate 34 of the work holding jig 33 or the side surface of the work 22 and pressing them together. At this time, the work 22 is adhered in a state where the crystal directions are roughly aligned, for example, by turning a notch groove or an orientation flat downward. In the first step P1, the work (22, 22 ', 22 ",...) Is attached to the work holding jig 33 as described above.
At least two sets are prepared by bonding the above.

Next, in the second step P2, the work holding jig 33 is attached to the support plate 38 as shown in FIG. First, the work holding jig 33 is connected to the right support portion 39a.
Attach to For mounting, the engaging arm 37 provided on the mounting portion 36 of the work holding jig 33 is positioned on the locking portion 42a of the support portion 39a, and is positioned, and a screw is passed through a through hole 36a provided on the mounting portion 36. The work holding jig 33 is fixed to the support portion 39a by screwing. Similarly, another work 2 is provided on the support portion 39b on the left side of the support plate 38.
A work holding jig 33 to which 2 ′ is adhered is attached.

The support portions 39a, 39b of the support plate 38
After the work holding jigs 33 are screwed, respectively, in the third step P3, the X-ray azimuth measuring device 64 measures the crystal orientation in the horizontal rotation direction and the tilt direction of the right work 22 and the left work 22 '. .

First, the crystal orientation of the right work 22 is measured by the X-ray measuring device 64. As shown in FIG.
With the work 22 on the right side facing the X-ray measurement device 64, the connecting portion 40 a formed on the upper portion of the support plate 38 is inserted into the support rail 67. The X-ray azimuth measuring device 64 includes a rotating irradiation head 65 and a measuring device 6 that are arranged to face the end surface of the work 22 in a state where the work 22 is arranged at the measurement position.
6 is provided. Then, the rotary irradiation head 65 is rotated by a predetermined angle, and
The measuring device 66 receives X-rays at a plurality of locations on the end surface of the workpiece 22 and receives the reflected light. The measuring device 66 uses the measuring device 66 to rotate and horizontally rotate the work 22 based on the wavelength and intensity of the X-rays generated from the work 22. The crystal orientation in the direction is measured.

Next, the support plate 38 is connected to the support rail 67.
, And rotated 180 degrees to exchange the left and right sides of the support plate 38. And this time, the left work 22 '
Is turned toward the X-ray measurement device 64, and the connecting portion 40 a formed on the upper portion of the support plate 38 is inserted into the support rail 67. The X-ray azimuth measuring device 64 applies X-ray to the end face of the work 22 '.
Then, the measuring device 66 measures the crystal orientation in the rotation direction and the horizontal direction of the work 22 ′. In the above description, in order to measure the crystal orientation of the work 22 and the work 22 ', the left and right sides of the support plate 38 are switched and attached to the support rail 67. However, the support plate 38 is attached to the support rail 67 itself. A reversing mechanism for rotating by 180 degrees may be provided.

Then, in the fourth step P4, the third
Based on the measured values of the crystal orientation measured in the process P3, a difference value between the crystal orientation in the horizontal rotation direction and the tilt direction of the right work 22 and the left work 22 ′ is obtained. The calculation of the difference value of the crystal orientation is not only a manual calculation but also the works 22 and 22 ′ measured by the measuring device 66 of the X-ray direction measuring device 64.
Alternatively, the crystal orientation values in the horizontal rotation direction and the tilt direction may be temporarily stored in a memory, and the values may be read out from the memory and automatically calculated by an arithmetic unit.

Thereafter, the left work 22 'is rotated in the horizontal rotation direction and the tilt direction by using the child goniometer 43 by the difference value. By rotating the tilt adjustment screw 51 shown in FIG. 4, the work 22 'is tilted by the difference value in the tilt direction according to the scale of the angle gauges 52 and 53. Subsequently, by rotating the horizontal rotation adjustment screw 58, the work 22 'is rotated by the difference value in the horizontal rotation direction according to the scale of the gauge 68. Work 22 'on the left
The crystal orientation of the left work 22 ′ and the right work 22
Can be matched. In this manner, by fixing the work 22 and the work 22 'to the support plate 38 in a state where the crystal orientations of the work 22 and 22' are aligned, it is possible to determine whether the two separate works 22 and 22 'are one work in the following cutting processing. Can be treated as Note that the crystal orientation may be adjusted to rotate first in either the tilt direction or the horizontal rotation direction.

Subsequently, in a fifth step P5, the support plate 38 fixed with the crystal orientations of the works 22, 22 'as described above is fixed to the work supporting mechanism 21 of the wire saw.
Attach to As shown in FIG.
The mounting of the support plate 38 on the support plate 38
The connecting portion 40a provided on the upper part of the work support mechanism 2
1 by screwing it to the parent goniometer 63 provided. At the time of cutting the work 22, it is necessary that the crystal orientation of the work 22 and the line direction of the wire 18 wound around the processing rollers 15, 16, 17 intersect at a predetermined angle. In other words, the crystal orientation of the workpieces 22 and 22 'need not be at a predetermined angle with respect to the line direction of the wire 18.

Then, in the sixth step P6, the azimuth adjustment of the horizontal rotation direction and the tilt direction of the support plate 38 is performed using the parent goniometer 63 of the work support mechanism 21. This orientation adjustment is performed based on the measured values of the crystal orientation in the horizontal rotation direction and the tilt direction of the right work 22 measured in the third step P3. In the third step P3, the work 22
Is measured, the angle between the crystal orientation of the work 22 and the line direction of the wire 18 is adjusted by the parent goniometer 63 based on the measured values.

The crystal orientation of the work 22 on the support plate 38 and the crystal orientation of the work 22 'are adjusted by the child goniometer 43 in the fourth step P4 so as to match each other. Therefore, only by adjusting the orientation of the support plate 38 based on the crystal orientation of one of the works 22, the crystal orientation of the entire work 22, 22 ′ attached to the support plate 38 and the line direction of the wire 18 are set at a predetermined angle. Can be adjusted.

When the crystal orientation of the work is adjusted in the first to sixth steps P1 to P6 and the works 22, 22 'are mounted on the work support mechanism 21, the traveling wire 18 is moved.
The workpieces 22, 22 'are cut into wafers by moving the workpiece support mechanism 21 downward.

According to the present embodiment, the two works 22 and 22 'are fixed to the support plate 38 in a state where the crystal orientation of the work 22 and the crystal orientation of the work 22' match. . In this way, by using the support plate 38 to fix and support the two workpieces 22 and 22 'with the same crystal orientation, it is possible to treat the two workpieces 22 and 22' in the subsequent cutting process as if they were one workpiece. , The processing efficiency can be improved.

Further, according to the present invention, the support plate 38
Since the number of the child goniometers 43 provided in the step (b) is only one less than the number of the work holding jigs 33 to be mounted, the cost of the support plate 38 can be reduced.

[Second Embodiment] In the second embodiment, the work 22 is first adhered to the work holding jig 33 as shown in FIG. This bonding is performed on the intermediate plate 3 of the work holding jig 33.
4 is performed by applying an adhesive to the curved portion on the lower surface or the side surface of the work 22 and pressing them together. At this time, the work 22 is adhered in a state where the crystal directions are roughly aligned, for example, by turning a notch groove or an orientation flat downward. In the first process P1, the work (22, 22 ', 2) is attached to the work holding jig 33 as described above.
2 ″,...) Are prepared and prepared in at least two sets.

Next, in the second step P2, as shown in FIG.
The crystal orientation in the horizontal rotation direction and the tilt direction such as 2 ′ is measured.

As shown in FIG. 12, the X-ray azimuth measuring device 6
The first work holding jig 33 to which the work 22 is adhered is attached to a jig fixing portion 70 provided in a horizontal direction on the upper part of the work 4. The jig fixing portion 70 is provided with a locking portion 71. The engaging arm 37 of the work holding jig 33 is
The first work holding jig 33 is fixed to the jig fixing section 70 by mounting and positioning the first work holding jig 33 by screwing a screw into a through hole 36 a provided in the mounting section 36. The X-ray azimuth measuring device 64 rotates the rotating irradiation head 65 by a predetermined angle in a state where the work 22 is arranged at the measurement position, and irradiates the rotating irradiation head 65 with X-rays at a plurality of positions on the end face of the work 22, The reflected light is received by the measuring device 66, and the measuring device 66
The crystal orientation in the rotation direction and the horizontal direction of the work 22 is measured.

In Embodiment 2, as shown in FIG. 13, the upper surface of the mounting plate 35 of the work holding jig 33 is
A label 69 for writing the crystal direction of the work is attached. On the label 69, the orientation of the work adhered to the work holding jig 33 and the crystal orientation in the horizontal rotation direction can be entered. After the crystal orientation of the work 22 is measured by the X-ray orientation measuring device 64, the tilt direction and the horizontal rotation direction of the work 22 are written on the label 69 of the first work holding jig 33.
In the embodiment, the label 69 is used, but another method may be used.

Next, the first work holding jig 33 is removed from the jig fixing portion 70, and the second work holding jig 33 to which the work 22 'is adhered is attached to the jig fixing portion 70 this time. Then, the work 2 is measured by the X-ray azimuth measuring device 64.
The 2 ′ crystal orientation is measured. After the crystal orientation of the work 22 'is measured, the crystal orientation of the work 22' in the tilt direction and the horizontal rotation direction is written on the label 69 of the second work holding jig 33.

The above operation is repeated for each work, and the work crystal orientations of a plurality of work holding jigs 33 to which the works (22, 22 ', 22 ",...) Are bonded are measured, and the crystal orientations are measured. This is written on the work holding jig label 69. In the second embodiment, by attaching the label 69 to the work holding jig 33 in this manner, the crystal orientation of the work bonded to the work holding jig 33 is obtained. The workpiece and the workpiece holding jig can be integrally managed while grasping the condition.

Subsequently, in a third step P3, the work holding jig 33 is attached to the support plate 38 as shown in FIG. Here, the first work holding jig 33 to which the work 22 is adhered is attached to the right support portion 39a, and the second work holding jig 33 to which the work 22 'is attached is attached to the left support portion 39a.
b. The mounting method is the same as that of the first embodiment, and the description is omitted.

Then, in the fourth step P4, based on the measured values of the crystal orientation measured in the second step P2, the difference between the crystal orientation in the horizontal rotation direction and the tilt direction of the right work 22 and the left work 22 'is calculated. Ask for. This difference value can be obtained from the value of the crystal orientation written on the label 69 attached to the first and second work holding jigs 33.

Thereafter, the left work 22 'is rotated in the horizontal rotation direction and the tilt direction by using the child goniometer 43 by the difference value. By rotating and adjusting the crystal orientation of the left work 22 ′ with the child gonio, the crystal orientation of the left work 22 ′ and the crystal orientation of the right work 22 can be matched.

Subsequently, in the fifth step P5, the support plate 38 fixed with the crystal orientations of the works 22, 22 'as described above is fixed to the work support mechanism 21 of the wire saw as shown in FIG. When cutting the work 22, the crystal orientation of the work 22 and the processing roller 1
It is necessary that the line directions of the wires 18 wound around 5, 16, 17 intersect at a predetermined angle. At this time, the crystal orientation of the work 22 forms a predetermined angle with the line direction of the wire 18. You don't have to.

Then, in the sixth step P6, the azimuth adjustment of the horizontal rotation direction and the tilt direction of the support plate 38 is performed using the parent goniometer 63 of the work support mechanism 21 shown in FIG. This orientation adjustment is performed based on the measured values of the crystal orientation in the horizontal rotation direction and the tilt direction of the right work 22 measured in the second step P2. In the second step P2, since the crystal orientation of the work 22 is measured and written on the label 69, the parent goniometer is set at a predetermined angle with respect to the crystal orientation of the work 22 and the line direction of the wire 18 based on the entered value. Adjust by 63.

The crystal orientation of the work 22 on the support plate 38 and the crystal orientation of the work 22 'are adjusted by the child goniometer 43 in the fourth step P4 so as to match each other. Therefore, only by adjusting the orientation of the support plate 38 based on the crystal orientation of the one work 22, the work 2
The crystal orientation of 2 ′ and the line direction of the wire 18 can be adjusted to a predetermined angle, so that the crystal orientation of the entire work 22, 22 ′ mounted on the support plate 38 can be adjusted.

After adjusting the crystal orientation of the work in the first step P1 to the sixth step P6 and attaching the works 22, 22 'to the work support mechanism 21, the traveling wire 18 is moved.
The workpieces 22, 22 'are cut into wafers by moving the workpiece support mechanism 21 downward.

According to the second embodiment, the work holding jig 3
By attaching a label 69 to 3 and writing the crystal orientation of the work adhered to the work holding jig 33 on the label 69, the work and the work holding jig can be integrally managed. Therefore, it is possible to know the crystal orientation of the work adhered to the work holding jig 33 from the description of the label 69 without storing the work on the support plate 38 while keeping the crystal orientations of the plurality of works aligned. When the work is attached to the support plate 38, the crystal orientation can be adjusted immediately.

[0068]

As described above, according to the present invention, the support plate is provided with an orientation adjusting mechanism, and a plurality of works are fixedly supported on the support plate in a state where the crystal orientations are aligned with each other, so that subsequent cutting is performed. In the processing step, it can be handled in the same way as one work, and the processing efficiency can be increased. Further, a plurality of works can be easily attached to the work supporting mechanism via the support plate, and a plurality of works can be simultaneously processed, thereby improving productivity.

Further, by providing an azimuth adjusting mechanism in the wire saw device main body, the azimuth angle of the support plate is adjusted, so that the crystal orientation of the entire work mounted on the support plate can be adjusted with high precision by a predetermined positional relationship with respect to the wire. Can be adjusted.

[Brief description of the drawings]

FIG. 1 is a side view of a wire saw according to the present invention.

FIG. 2 is a plan view of a wire saw according to the present invention.

FIG. 3 is a perspective view of a work holding jig according to the present invention.

FIG. 4 is a perspective view of a support plate according to the present invention.

FIG. 5 is a front view of a support plate according to the present invention.

FIG. 6 is a side view of a support plate according to the present invention.

7A is a front view schematically illustrating a tilt adjusting mechanism of a child gonio according to the present invention, and FIG. 7B is a side view schematically illustrating the tilt adjusting mechanism.

FIG. 8 is a perspective view schematically showing a horizontal rotation adjusting mechanism according to the present invention.

FIG. 9 is an enlarged front view showing a part of the support plate according to the present invention.

FIG. 10 is a perspective view showing a state in which a crystal orientation of a work attached to a support plate is measured by an X-ray measuring device.

FIG. 11 is a perspective view showing a state in which a support plate is attached to a parent goniometer provided in the work supporting mechanism.

FIG. 12 is a perspective view showing a state in which the crystal orientation of a work adhered to a work holding jig is measured by an X-ray measuring device.

FIG. 13 is a perspective view of a work holding jig according to the second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 ... Device base 12 ... Column 13 ... Cutting mechanism 14 ... Bracket 15, 16, 17 ... Processing roller 15a, 16a, 17a ... Annular groove 18 ... Wire 19 ... Wire running motor 20 ... Processing fluid supply mechanism 21 ... Work Supporting mechanism 22 ... Work 23 ... Work lifting motor 24 ... Reel mechanism 25 ... Pay-out reel 26 ... Take-up reel 27,28 ... Reel rotation motor 29 ... Traverse mechanism 30 ... Tension holding mechanism 31 ... Guide mechanism 32 ... Guide roller 33 ... Work holding jig 34 ... Intermediate plate 35 ... Mounting plate 36 ... Mounting part 36a ... Through hole 37 ... Engagement arm 38 ... Support plate 39a, 39b ... Support part 40 ... Support plate body 40a ... Connection part 41a, 41b ... Back Plates 42a, 42b: locking portion 43: child goniometer (azimuth adjustment mechanism) 44: rotating plate 4 Reference numeral 5: tilting plate 45a: through hole 46: fixing screw 46a: flange portion 47: compression coil spring 48, 49 ... linear groove 50: pivot 51: tilt adjustment screw 52, 53 ... angle gauge 54: rotating shaft 55 ... arm 56 ... Engagement bolt 57 ... Nut with groove 57a ... Engagement groove 58 ... Horizontal rotation adjusting screw 59 ... Fixing nut 60 ... Flange part 61 ... Bearing part 62 ... Straight hole 63 ... Parent goniometer (direction adjustment mechanism) 64 ... X-ray direction measurement Apparatus 65 Rotating irradiation head 66 Measuring instrument 67 Support rail 68 Gauge 69 Label 70 Jig fixing part 71 Locking part.

Claims (6)

[Claims] 1. A first jig and a second jig to which a workpiece having a crystal structure is fixed, a support plate to which the first jig and the second jig are attached, and the support plate, respectively. A work support mechanism to which the work is mounted, and the work support mechanism to which the work is mounted via the first jig, the second jig and the support plate is brought closer to a traveling wire. A work mounting method for mounting a work on a wire saw for cutting the work, wherein the work is fixed to each of the first jig and the second jig, and the first jig is fixed to a support plate, The second jig is mounted on an orientation adjustment mechanism provided on the support plate, and the crystal orientation of the work fixed to the first and second jigs is measured, and the support is performed according to the measured value. Prepared for the plate The crystal orientation of the work fixed to the second jig is adjusted using the adjusted orientation adjustment mechanism. Next, the support plate is mounted on the orientation adjustment mechanism provided in the work support mechanism, and the measured value is measured. A work mounting method, comprising: adjusting a crystal orientation of the entire work mounted on the support plate using an orientation adjustment mechanism provided in the work support mechanism based on the above. 2. A crystal orientation of a work fixed to the second jig is adjusted to a crystal orientation of a work fixed to the first jig by using an orientation adjustment mechanism provided on the support plate. The work mounting method according to claim 1, wherein the adjustment is performed in such a manner. 3. The work mounting method according to claim 1, wherein the measurement of the crystal orientation of the work is performed by an X-ray azimuth measuring device. 4. A first jig and a second jig to which a work having a crystal structure is respectively fixed, a support plate to which the first jig and the second jig are attached, and the support plate A work support mechanism to which the work is mounted, and the work support mechanism to which the work is mounted via the first jig, the second jig and the support plate is brought closer to a traveling wire. In a wire saw for cutting a work, the support plate includes an orientation adjusting mechanism for adjusting a crystal orientation of the work fixed to the second jig, the first jig is directly fixed to the support plate, and the The second jig is attached to the orientation adjustment mechanism provided on the support plate, and the work support mechanism adjusts the crystal orientation of the entire work mounted on the support plate. With a structure,
A wire saw, wherein the support plate is attached to the azimuth adjustment mechanism provided in the work support mechanism. 5. A support plate for mounting a plurality of jigs each fixing a work having a crystal structure, and cutting the work by being approached toward a traveling wire, wherein the support plate comprises: A support plate having an orientation adjustment mechanism for adjusting a crystal orientation of a work fixed to a jig, wherein the number of the orientation adjustment mechanisms is smaller by one than the number of jigs to be mounted. 6. The support plate according to claim 5, wherein the azimuth adjustment mechanism is an adjustment mechanism in two different directions, and a tilting mechanism by a pivot is used for at least one direction of the adjustment mechanism.