JPH09323321A - Method and apparatus for measuring groove shape of grooved roller for wire saw - Google Patents
Method and apparatus for measuring groove shape of grooved roller for wire sawInfo
- Publication number
- JPH09323321A JPH09323321A JP14586396A JP14586396A JPH09323321A JP H09323321 A JPH09323321 A JP H09323321A JP 14586396 A JP14586396 A JP 14586396A JP 14586396 A JP14586396 A JP 14586396A JP H09323321 A JPH09323321 A JP H09323321A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- groove
- measuring
- grooved roller
- groove shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、円柱状の半導体イ
ンゴット、セラミック、ガラス等の被加工物を走行する
ワイヤで薄板状のウェーハに切断するワイヤソー用溝付
ローラの溝形状測定方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for measuring the groove shape of a grooved roller for a wire saw, which cuts a thin plate-shaped wafer with a traveling wire through a workpiece such as a cylindrical semiconductor ingot, ceramic, or glass. .
【０００２】[0002]
【従来の技術】半導体インゴット、セラミック、ガラス
等の被加工物を薄板状のウェーハに切断する切断装置の
一つにワイヤソーがある。このワイヤソーは、一方のワ
イヤリールから繰り出されたワイヤを複数台の溝付ロー
ラの溝に巻き掛けてワイヤ列を形成し、他方のワイヤリ
ールに巻き取ると共に、前記ワイヤ列に砥粒を含む加工
液を供給して被加工物を押し当てることにより、その砥
粒のラッピング作用によって前記被加工物を多数のウェ
ーハに切断する。2. Description of the Related Art A wire saw is one of the cutting devices for cutting a workpiece such as a semiconductor ingot, ceramic, glass or the like into a thin wafer. In this wire saw, a wire reeled out from one wire reel is wound around the grooves of a plurality of grooved rollers to form a wire row, and the wire row is wound on the other wire reel, and the wire row includes abrasive grains. By supplying a liquid and pressing the workpiece, the lapping action of the abrasive grains cuts the workpiece into a large number of wafers.
【０００３】ところで、溝付ローラの溝が磨耗していく
と、切断されるウェーハの精度に悪影響を与える。即
ち、前記溝の傾斜面が磨耗した場合には、ワイヤが溝付
ローラの軸線方向に移動してしまい、結果的にウェーハ
の厚さが不均一になる。また、溝が径方向に磨耗して隣
接する溝との溝径が大きく変化するとワイヤが蛇行して
しまい、結果的にウェーハの平坦度が悪化するという現
象が生じる。[0003] When the grooves of the grooved rollers are worn, the accuracy of the cut wafer is adversely affected. That is, when the inclined surface of the groove is worn, the wire moves in the axial direction of the grooved roller, and as a result, the thickness of the wafer becomes uneven. Further, when the groove is worn in the radial direction and the groove diameter between the adjacent groove and the groove greatly changes, the wire meanders, and as a result, the flatness of the wafer is deteriorated.
【０００４】そこで、従来から形状測定機を用いて溝付
ローラの溝形状を測定し、その結果が許容値を外れた時
に溝付ローラの寿命と判断して溝付ローラを新品のもの
と交換するようにしている。図６は、溝付ローラ１の測
定状態を示す要部断面図である。同図に示すように、形
状測定機の触針先端子２を溝付ローラ１の溝３に当接さ
せると共に、溝付ローラ１の軸線方向（図中矢印で示す
方向）に走行させて溝３の形状を測定する。図７は、そ
の測定結果を示す出力データであり、このデータに基づ
いて隣接する溝３、３…同士のピッチ（Ｐ）、及び溝径
のバラツキ（α）を算出し溝３、３…の磨耗量を計測し
ている。Therefore, conventionally, the groove shape of the grooved roller is measured using a shape measuring machine, and when the result is out of an allowable value, it is judged that the life of the grooved roller has expired, and the grooved roller is replaced with a new one. I am trying to do it. FIG. 6 is a cross-sectional view of essential parts showing a measuring state of the grooved roller 1. As shown in the figure, the stylus tip terminal 2 of the shape measuring machine is brought into contact with the groove 3 of the grooved roller 1 and is caused to run in the axial direction of the grooved roller 1 (the direction indicated by the arrow in the figure). The shape of 3 is measured. FIG. 7 is output data showing the measurement results. Based on this data, the pitch (P) between the adjacent grooves 3, 3, ... And the variation (α) in the groove diameter are calculated, and the grooves 3, 3 ,. The amount of wear is being measured.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、従来の
形状測定装置は、ワイヤが巻き掛けられていない状態で
の溝自体の形状を測定するものなので、負荷がかかった
状態の溝形状を測定することができない。従って、従来
装置では、溝３の磨耗量（変化量）を正確に計測できな
いという欠点がある。However, since the conventional shape measuring apparatus measures the shape of the groove itself in the state where the wire is not wound, it is necessary to measure the groove shape under a load. I can't. Therefore, the conventional device has a drawback that the wear amount (change amount) of the groove 3 cannot be accurately measured.
【０００６】例えば、図７に示すように、溝３の両壁３
Ａ、３Ｂの傾斜角度θ１、θ２に差があると、実際には
この溝３に巻き掛けられるワイヤの位置が図６上で左右
方向にずれているにもかかわらず、先端子２は溝３の深
部を測定し、この深部でＰを算出するので測定誤差が出
る。また、図６に示すように溝３の深部に割れ３Ｃが生
じていると、実際にはこの溝３に巻き掛けられるワイヤ
が割れ３Ｃを押し広げて下方にずれているにもかかわら
ず、先端子２は溝３の深部を測定し、この深部でαを算
出するので測定誤差が出る。For example, as shown in FIG. 7, both walls 3 of the groove 3 are formed.
If there is a difference between the inclination angles θ1 and θ2 of A and 3B, although the position of the wire wound around the groove 3 is actually deviated in the left-right direction in FIG. Is measured and P is calculated at this depth, so a measurement error occurs. Further, as shown in FIG. 6, when a crack 3C is formed in the deep portion of the groove 3, even though the wire wound around the groove 3 actually pushes the crack 3C and is displaced downward, Since the terminal 2 measures the deep portion of the groove 3 and calculates α at this deep portion, a measurement error occurs.
【０００７】このような不具合は、溝３にワイヤが巻き
掛けられた実機上で測定すれば解消できるが、実機上で
は形状測定機を配置するスペースがなく、そのスペース
を確保しようとするとワイヤソー全体が大型になるとい
う欠点が生じる。本発明はこのような事情に鑑みてなさ
れたもので、実機と略同じ条件で溝形状を測定すること
ができるワイヤソー用溝付ローラの溝形状測定方法及び
装置を提供することを目的とする。Such a problem can be solved by measuring on a real machine in which the wire is wound in the groove 3, but there is no space for arranging the shape measuring machine on the real machine, and if the space is to be secured, the entire wire saw Has the drawback of becoming large. The present invention has been made in view of such circumstances, and an object thereof is to provide a groove shape measuring method and apparatus for a grooved roller for a wire saw, which can measure the groove shape under substantially the same conditions as an actual machine.
【０００８】[0008]
【課題を解決する為の手段】本発明は、前記目的を達成
するために、一方のワイヤリールから繰り出されたワイ
ヤを複数台の溝付ローラの溝に巻き掛けてワイヤ列を形
成し、他方のワイヤリールに巻き取ると共に、前記ワイ
ヤ列に砥粒を含む加工液を供給して被加工物を押し当て
ることにより、前記被加工物を多数のウェーハに切断す
るワイヤソー用溝付ローラの溝形状測定方法に於いて、
前記ワイヤの直径と等しい測定用ワイヤを前記溝付ロー
ラの溝に所定の張力で巻き掛けたのち、形状測定手段に
よって溝付ローラの溝形状を測定することを特徴として
いる。According to the present invention, in order to attain the above object, a wire fed from one wire reel is wound around grooves of a plurality of grooved rollers to form a wire row, and the other. The groove shape of the grooved roller for a wire saw for cutting the work into a number of wafers by winding the work around the wire reel and supplying a working liquid containing abrasive grains to the wire row and pressing the work. In the measurement method,
A measuring wire having a diameter equal to that of the wire is wound around the groove of the grooved roller with a predetermined tension, and then the groove shape of the grooved roller is measured by the shape measuring means.
【０００９】本発明によれば、ワイヤの直径と等しい測
定用ワイヤを溝付ローラの溝に巻き掛け、そして、張力
付与手段によって測定用ワイヤの張力を設定したのち、
この状態の溝形状を形状測定手段によって測定する。こ
のように本発明は、溝付ローラの溝に測定用ワイヤを巻
き掛けて測定したので、実際の溝形状を測定する従来の
測定方法と比較して、実機と略同じ条件で溝同士のピッ
チ、及び溝径のバラツキを算出できる。従って、本発明
によれば、溝付ローラの溝の磨耗量を正確に計測でき
る。According to the present invention, the measuring wire having the same diameter as the wire is wound around the groove of the grooved roller, and the tension of the measuring wire is set by the tension applying means.
The groove shape in this state is measured by the shape measuring means. As described above, the present invention is measured by winding the measuring wire around the groove of the grooved roller, so that the pitch between the grooves is substantially the same as the actual machine as compared with the conventional measuring method of measuring the actual groove shape. , And the variation in groove diameter can be calculated. Therefore, according to the present invention, it is possible to accurately measure the wear amount of the groove of the grooved roller.
【００１０】また、本発明は、張力付与手段による測定
用ワイヤの張力を、溝付ローラの溝に巻き掛けられるワ
イヤの張力と略同一に設定したので、更に実機に近い状
態で溝形状を測定できる。Further, according to the present invention, the tension of the measuring wire by the tension applying means is set to be substantially the same as the tension of the wire wound around the groove of the grooved roller, so that the groove shape is measured in a state closer to the actual machine. it can.
【００１１】[0011]
【発明の実施の形態】以下添付図面に従って本発明に係
るワイヤソー用溝付ローラの溝形状測定方法及び装置の
好ましい実施の形態について詳説する。図１は、本発明
の実施の形態に係る溝形状測定装置によって、溝付ロー
ラの溝形状が測定されている状態を示す正面図である。BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a groove shape measuring method and device for a grooved roller for a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a front view showing a state where the groove shape of a grooved roller is measured by a groove shape measuring device according to an embodiment of the present invention.
【００１２】同図に示す溝形状測定装置１０は台車１２
上に設置されており、使用途中の溝付ローラを測定する
際にはワイヤソーの近傍に移動され、新品の溝付ローラ
を測定する際には搬入倉庫等に移動されて、その場所で
測定を行うことが可能となっている。前記溝形状測定装
置１０は、台車１２上に固定される測定台ベース１４を
有し、この測定台ベース１４上にコラム１６が鉛直方向
に立設されている。コラム１６には、駆動部１８が図示
しない直動ベアリングを介して昇降移動可能に設けら
れ、この駆動部１８を昇降移動させる電動モータ２０が
コラム１６の上部に設置されている。前記駆動部１８の
下部には、検出器２２が取り付けられる。駆動部１８
は、検出器２２を水平方向に往復移動させるもので、そ
の移動速度は、台車１２内のコントローラ１９によって
制御されている。検出器２２の側部には、逆Ｌ字状の触
針２４が延設され、触針２４は基部を支点に上下に揺動
自在に設けられる。この触針２４の移動が検出器２２で
検出されると、検出器２２は触針２４の移動量に基づい
た電気信号をコントーラ１９に出力する。そして、コン
トローラ１９は前記電気信号に基づいて測定データを作
成し、これを図示しないディスプレイ、又はプリンタに
出力して表示させる。また、検出器２２は、触針２４の
先端子２６の押付力も設定することができる。符号２８
は傾斜装置であり、傾斜装置２８のハンドル３０を操作
すれば、検出器２２と駆動部１８とが所定の傾きに設定
される。The groove shape measuring device 10 shown in the figure is a dolly 12
It is installed on the top and moved to the vicinity of the wire saw when measuring the grooved roller in use, and moved to the carry-in warehouse etc. when measuring a new grooved roller and measured at that place. It is possible to do. The groove shape measuring device 10 has a measuring table base 14 fixed on a carriage 12, and a column 16 is erected vertically on the measuring table base 14. A drive unit 18 is provided in the column 16 so as to be able to move up and down via a linear motion bearing (not shown), and an electric motor 20 for moving the drive unit 18 up and down is installed above the column 16. A detector 22 is attached to the lower portion of the driving unit 18. Drive unit 18
Is to reciprocate the detector 22 in the horizontal direction, and its moving speed is controlled by the controller 19 in the carriage 12. An inverted L-shaped stylus 24 extends from a side portion of the detector 22, and the stylus 24 is provided to be vertically swingable with a base as a fulcrum. When the movement of the stylus 24 is detected by the detector 22, the detector 22 outputs an electric signal based on the amount of movement of the stylus 24 to the controller 19. Then, the controller 19 creates measurement data based on the electric signal and outputs it to a display (not shown) or a printer for display. The detector 22 can also set the pressing force of the tip terminal 26 of the stylus 24. Reference numeral 28
Is a tilting device, and when the handle 30 of the tilting device 28 is operated, the detector 22 and the drive unit 18 are set to a predetermined tilt.
【００１３】測定対象の溝付ローラ３２は、前記台車１
２上に設置されたＸ−Ｙテーブル３４上に支持される。
Ｘ−Ｙテーブル３４は、Ｘ方向に配設された一対のガイ
ドレール３６、３６とＹ方向に配設された一対のガイド
レール３８（一方側は図示せず）を有している。前記ガ
イドレール３６、３６は台車１２上に平行に固定され、
これに前記ガイドレール３８が形成されたテーブル４０
がＸ方向に移動自在に載置されている。前記ガイドレー
ル３８には、支持台４２がＹ方向に移動自在に載置され
る。支持台４２上にはＶブロック４４が固定され、この
Ｖブロック４４上に前記溝付ローラ３２が載置されて支
持されている。The grooved roller 32 to be measured is the carriage 1
2 is supported on an XY table 34 installed on the table 2.
The XY table 34 has a pair of guide rails 36, 36 arranged in the X direction and a pair of guide rails 38 (one side not shown) arranged in the Y direction. The guide rails 36, 36 are fixed in parallel on the carriage 12,
A table 40 on which the guide rail 38 is formed
Is movably mounted in the X direction. A support base 42 is mounted on the guide rail 38 so as to be movable in the Y direction. A V block 44 is fixed on the support base 42, and the grooved roller 32 is placed and supported on the V block 44.
【００１４】ところで、前記溝付ローラ３２は図２、図
３に示すようにその溝３３、３３…に測定用ワイヤ４
６、４６…が各々が巻き掛けられた状態でＶブロック４
４上に支持される。前記測定用ワイヤ４６は、所定の長
さに形成されると共に、実機のワイヤと同じ材質で且つ
等しい直径に形成される。この測定用ワイヤ４６は図２
に示すように、基端部４６ＡがＶブロック４４のフラン
ジ部４８に固定されると共に、先端部４６Ｂが図３に示
すようにスプリング５０を介して支持台４２上に固定さ
れている。前記測定用ワイヤ４６は、スプリング５０の
付勢力によって、溝付ローラ３２の溝３３に巻き掛けら
れる実機のワイヤの張力と同一の張力に設定されてい
る。By the way, as shown in FIGS. 2 and 3, the grooved roller 32 has the measuring wire 4 in the grooves 33, 33 ...
V block 4 with 6, 46 ...
Supported on four. The measuring wire 46 is formed to have a predetermined length and is made of the same material and has the same diameter as the wire of the actual machine. This measuring wire 46 is shown in FIG.
3, the base end portion 46A is fixed to the flange portion 48 of the V block 44, and the tip end portion 46B is fixed on the support base 42 via the spring 50 as shown in FIG. The measuring wire 46 is set to the same tension as the tension of the wire of the actual machine wound around the groove 33 of the grooved roller 32 by the urging force of the spring 50.
【００１５】次に、前記の如く構成された溝形状測定装
置１０による測定方法について説明する。先ず、Ｘ−Ｙ
テーブル３４を駆動して支持台４２を溝形状測定装置１
０から離れた位置に移動させ、この位置で溝付ローラ３
２をＶブロック４４上に支持させる。そして、Ｘ−Ｙテ
ーブル３４を駆動して前記溝付ローラ３２を溝形状測定
装置１０に近づけると共に、支持台４２をＹ方向に移動
させて、測定部分を前記触針２４の下方に位置させる。Next, a measuring method by the groove shape measuring apparatus 10 configured as described above will be described. First, XY
The table 34 is driven to move the support base 42 to the groove shape measuring device 1
Move to a position away from 0, and at this position the grooved roller 3
2 is supported on the V block 44. Then, the XY table 34 is driven to bring the grooved roller 32 closer to the groove shape measuring device 10, and the support base 42 is moved in the Y direction to position the measurement portion below the stylus 24.
【００１６】次に、溝形状測定装置１０の駆動部１８を
コラム１６に沿って下降移動させて先端子２６の高さを
溝付ローラ３２の位置に合わせる。そして、駆動部１８
を駆動して検出器２２を測定開始位置（図１に示す位
置）に移動させたのち、触針２４を下降移動させて溝付
ローラ３２の溝３３に当接させる。以上で測定準備が完
了する。Next, the drive unit 18 of the groove shape measuring apparatus 10 is moved down along the column 16 so that the height of the tip terminal 26 is adjusted to the position of the grooved roller 32. Then, the drive unit 18
Is driven to move the detector 22 to the measurement start position (the position shown in FIG. 1), and then the stylus 24 is moved downward to contact the groove 33 of the grooved roller 32. This completes the measurement preparation.
【００１７】次いで、検出器２２を図１中右方向に水平
移動させて溝３３の形状測定を開始する。図４は、溝付
ローラ３２の測定状態を示す要部断面図である。同図に
示すように、溝形状測定装置１０の先端子２６を溝付ロ
ーラ３２の軸線方向（図中矢印で示す方向）に走行させ
て溝３３の形状を測定する。図５は、その測定結果を示
す出力データであり、この出力データに基づいて隣接す
る溝３３、３３…同士のピッチ（Ｐ）、及び溝径のバラ
ツキ（α）を算出し、溝３３、３３…の磨耗量を計測す
る。Next, the detector 22 is horizontally moved to the right in FIG. 1 to start measuring the shape of the groove 33. FIG. 4 is a sectional view of an essential part showing a measuring state of the grooved roller 32. As shown in the figure, the tip terminal 26 of the groove shape measuring device 10 is run in the axial direction of the grooved roller 32 (the direction indicated by the arrow in the figure) to measure the shape of the groove 33. FIG. 5 is output data showing the measurement results. Based on this output data, the pitch (P) between the adjacent grooves 33, 33 ... And the variation (α) in the groove diameter are calculated, and the grooves 33, 33. Measure the amount of wear of.
【００１８】前記測定結果において、本実施の形態で
は、溝付ローラ３２の溝３３に測定用ワイヤ４６を巻き
掛けて測定しているので、前記出力データは測定用ワイ
ヤ４６の一部周部を含むデータとして出力される。しか
し、本実施の形態では、測定用ワイヤ４６を溝３３に巻
き掛けているので、溝３３の両壁３３Ａ、３３Ｂの傾斜
角度θ１、θ２に差があっても、また、溝３３の深部に
割れ３３Ｃが生じていても、この溝３３に巻き掛けられ
る実際のワイヤの位置で前記Ｐ、α値を測定できる。即
ち、測定用ワイヤ４６の形状を示すデータの頂部Ｔ、Ｔ
間の軸線方向の距離をＰ値とし、径方向の距離をα値と
して測定する。In the present embodiment, the measurement result is obtained by winding the measuring wire 46 around the groove 33 of the grooved roller 32. Therefore, the output data is obtained by measuring the partial circumference of the measuring wire 46. It is output as including data. However, in the present embodiment, since the measuring wire 46 is wound around the groove 33, even if there is a difference in the inclination angles θ1 and θ2 between the walls 33A and 33B of the groove 33, the deeper portion of the groove 33 is present. Even if the crack 33C is generated, the P and α values can be measured at the actual position of the wire wound around the groove 33. That is, the tops T, T of the data indicating the shape of the measuring wire 46
The distance in the axial direction is taken as the P value, and the distance in the radial direction is taken as the α value.
【００１９】従って、本実施の形態によれば、実際の溝
形状を測定する従来の測定方法と比較して、実機と略同
じ条件で前記ピッチＰと溝径のバラツキαを測定できる
ので、溝付ローラ３２の溝３３の磨耗量を正確に計測で
きる。また、本実施の形態では、スプリング５０の付勢
力によって測定用ワイヤ４６の張力を、実機のワイヤの
張力と同一に設定している。従って、溝付ローラ３２が
ワイヤの張力で弾性変形する弾性体の場合に特に有効で
あり、この場合には更に実機に近い状態で溝形状を測定
できる。Therefore, according to the present embodiment, the variation P between the pitch P and the groove diameter can be measured under substantially the same conditions as the actual machine, as compared with the conventional measuring method for measuring the actual groove shape. The amount of wear of the groove 33 of the attached roller 32 can be accurately measured. Further, in the present embodiment, the tension of the measuring wire 46 is set to be the same as the tension of the wire of the actual machine by the biasing force of the spring 50. Therefore, it is particularly effective when the grooved roller 32 is an elastic body that is elastically deformed by the tension of the wire, and in this case, the groove shape can be measured in a state closer to the actual machine.
【００２０】尚、前記先端子２６は測定用ワイヤ４６に
邪魔されて溝３３の深部には到達せず、溝３３の実際の
形状を測定することはできないが、必要な情報はピッチ
Ｐと溝径のバラツキαなので、磨耗量を計測するにあた
り支障は全くない。一方、本溝形状測定装置１０を使用
することで、溝付ローラ３２の寿命及び保守点検（再生
加工）の時期を判断することもできる。The tip terminal 26 does not reach the deep portion of the groove 33 because it is hindered by the measuring wire 46, and the actual shape of the groove 33 cannot be measured. However, necessary information is the pitch P and the groove. Since the variation in diameter is α, there is no problem in measuring the amount of wear. On the other hand, by using the present groove shape measuring device 10, it is possible to judge the life of the grooved roller 32 and the timing of maintenance inspection (reproduction processing).
【００２１】その判断方法は、先ず、新品の溝付ローラ
３２の溝形状を測定し、前記ピッチＰ1 と溝径のバラツ
キα1 の初期データを保存する。次に、この溝付ローラ
３２を実機に搭載し、被加工物をｎ本（例えば１０本）
切断した後のＰ2 、α2 の中間データを保存する。そし
て、初期データＰ1 、α1 から中間データＰ2 、α2を
減算し、ｎ本目における変化量（磨耗量）を求める。こ
の変化量に基づいて、被加工物１本当たりの変化量を求
め、何本目に保守点検が必要となるか、及び何本目に寿
命となるかを予測する。即ち、保守点検時期の規定値、
及び寿命の規定値を予め設定しておき、これらの規定値
を超えると予測される本数目の被加工物を切断終了した
時に、保守点検を行い又は新品のものと交換する。In the determination method, first, the groove shape of a new grooved roller 32 is measured, and the initial data of the pitch P 1 and the groove diameter variation α 1 are stored. Next, the grooved roller 32 is mounted on an actual machine, and n pieces (for example, 10 pieces) of workpieces are processed.
The intermediate data of P 2 and α 2 after cutting is saved. Then, the intermediate data P 2 and α 2 are subtracted from the initial data P 1 and α 1 to obtain the change amount (wear amount) at the n-th line. On the basis of the amount of change, the amount of change per work piece is obtained, and it is predicted at which line maintenance and inspection will be required and at which line the end of life will be reached. That is, the specified value of the maintenance inspection time,
And the specified value of the life are set in advance, and when the number of workpieces expected to exceed these specified values have been cut, maintenance inspection is performed or replacement with a new one is performed.
【００２２】これにより、溝付ローラ３２の寿命及び保
守点検の時期を効率良く判断することができる。尚、前
記中間データは１回に限らず、ｎ本毎に複数回取得する
ようにすれば、切断本数に対する溝の形状変化の統計値
を得ることができる。従って、この統計値から変化量の
異常の有無を判定できるので、例えば、変化量が異常の
場合には、ワイヤソーに異常が生じたと判断しワイヤソ
ーの異常診断を行う。これにより、ワイヤソーの故障を
未然に防止することができる。As a result, the life of the grooved roller 32 and the timing of maintenance inspection can be efficiently judged. If the intermediate data is acquired not only once but also plural times every n lines, a statistical value of the change in the shape of the groove with respect to the number of cuts can be obtained. Therefore, since it is possible to determine whether or not there is an abnormality in the variation amount from this statistical value, for example, when the variation amount is abnormal, it is determined that an abnormality has occurred in the wire saw and the abnormality diagnosis of the wire saw is performed. Thereby, the failure of the wire saw can be prevented.
【００２３】本実施の形態では、形状測定手段として触
針先端子を有する接触式の形状測定装置について述べた
が、これに限られるものではなく、溝にレーザービーム
を照射して溝形状を非接触で測定するレーザー変位計を
適用しても良い。また、測定用ワイヤ４６は、前記Ｐ、
α値を取得するために少なくとも２列の溝３３を巻き掛
けることが必要であるが、測定対象の溝３３、３３…の
数に応じて測定ワイヤ４６の本数を設定すれば良い。In the present embodiment, the contact type shape measuring device having the stylus tip terminal as the shape measuring means has been described, but the present invention is not limited to this, and the groove shape is made non-uniform by irradiating the groove with a laser beam. A laser displacement meter that measures by contact may be applied. In addition, the measurement wire 46 is the P,
It is necessary to wind at least two rows of the grooves 33 in order to obtain the α value, but the number of the measurement wires 46 may be set according to the number of the measurement target grooves 33, 33 ...
【００２４】[0024]
【発明の効果】以上説明したように本発明に係るワイヤ
ソー用溝付ローラの溝形状測定方法及び装置によれば、
ワイヤの直径と等しい測定用ワイヤを溝付ローラの溝に
巻き掛け、張力付与手段によって測定用ワイヤの張力を
設定したのち、この状態の溝形状を形状測定手段によっ
て測定するようにしたので、実機と略同じ条件で溝形状
を測定できる。従って、本発明は、溝付ローラの溝の磨
耗量を正確に計測することができる。As described above, according to the groove shape measuring method and apparatus of the grooved roller for the wire saw according to the present invention,
The measuring wire having the same diameter as the wire is wound around the groove of the grooved roller, the tension of the measuring wire is set by the tension applying means, and the groove shape in this state is measured by the shape measuring means. The groove shape can be measured under substantially the same conditions as. Therefore, the present invention can accurately measure the wear amount of the groove of the grooved roller.
【００２５】また、本発明によれば、張力付与手段によ
る測定用ワイヤの張力を、実機のワイヤの張力と略同一
に設定したので、更に実機に近い状態で溝形状を測定で
きる。Further, according to the present invention, since the tension of the measuring wire by the tension applying means is set to be substantially the same as the tension of the wire of the actual machine, the groove shape can be measured in a state closer to the actual machine.
【図１】本発明の溝形状測定装置による溝付ローラの溝
形状測定状態を示す正面図FIG. 1 is a front view showing a groove shape measuring state of a grooved roller by a groove shape measuring device of the present invention.
【図２】溝付ローラに測定用ワイヤが巻き掛けられた状
態を示す斜視図FIG. 2 is a perspective view showing a state in which a measuring wire is wound around a grooved roller.
【図３】溝付ローラに測定用ワイヤが巻き掛けられた状
態を示す正面図FIG. 3 is a front view showing a state in which a measuring wire is wound around a grooved roller.
【図４】溝形状測定状態を示す要部拡大断面図FIG. 4 is an enlarged sectional view of an essential part showing a groove shape measurement state.
【図５】溝形状測定結果の出力データを示す説明図FIG. 5 is an explanatory diagram showing output data of groove shape measurement results.
【図６】従来の溝形状測定状態を示す要部拡大断面図FIG. 6 is an enlarged sectional view of an essential part showing a conventional groove shape measurement state.
【図７】従来の溝形状測定結果の出力データを示す説明
図FIG. 7 is an explanatory view showing output data of a conventional groove shape measurement result.
１０…溝形状測定装置 １２…台車 １８…駆動部 １９…コントローラ ２２…検出器 ２４…触針 ２６…先端子 ３２…溝付ローラ ４４…Ｖブロック ４６…測定用ワイヤ ５０…スプリング DESCRIPTION OF SYMBOLS 10 ... Groove shape measuring device 12 ... Bogie 18 ... Drive part 19 ... Controller 22 ... Detector 24 ... Stylus 26 ... Tip terminal 32 ... Grooved roller 44 ... V block 46 ... Measuring wire 50 ... Spring
Claims (4)
ヤを複数台の溝付ローラの溝に巻き掛けてワイヤ列を形
成し、他方のワイヤリールに巻き取ると共に、前記ワイ
ヤ列に砥粒を含む加工液を供給して被加工物を押し当て
ることにより、前記被加工物を多数のウェーハに切断す
るワイヤソー用溝付ローラの溝形状測定方法に於いて、 前記ワイヤの直径と等しい測定用ワイヤを前記溝付ロー
ラの溝に所定の張力で巻き掛けたのち、形状測定手段に
よって溝付ローラの溝形状を測定することを特徴とする
ワイヤソー用溝付ローラの溝形状測定方法。1. A wire row is formed by winding a wire fed from one wire reel around the grooves of a plurality of grooved rollers, and is wound on the other wire reel, and the wire row contains abrasive grains. In the groove shape measuring method of the grooved roller for wire saw for cutting the workpiece into a large number of wafers by supplying the working liquid and pressing the workpiece, a measuring wire having a diameter equal to that of the wire is used. A method for measuring the groove shape of a grooved roller for a wire saw, which comprises winding the grooved roller with a predetermined tension and then measuring the groove shape of the grooved roller by a shape measuring means.
ラの溝に巻き掛けられる前記ワイヤの張力と略同一に設
定されていることを特徴とする請求項１記載のワイヤソ
ー用溝付ローラの溝形状測定方法。2. A grooved roller for a wire saw according to claim 1, wherein the tension of the measuring wire is set to be substantially the same as the tension of the wire wound around the groove of the grooved roller. Groove shape measuring method.
ヤを複数台の溝付ローラの溝に巻き掛けてワイヤ列を形
成し、他方のワイヤリールに巻き取ると共に、前記ワイ
ヤ列に砥粒を含む加工液を供給して被加工物を押し当て
ることにより、前記被加工物を多数のウェーハに切断す
るワイヤソー用溝付ローラの溝形状測定装置に於いて、 前記ワイヤの直径と等しく形成されて前記溝付ローラの
溝に巻き掛けられる測定用ワイヤと、 前記溝付ローラの溝に巻き掛けられた前記測定用ワイヤ
に張力を与える張力付与手段と、 前記溝付ローラの溝に前記測定用ワイヤが巻き掛けられ
た状態の溝形状を測定する形状測定手段と、 を備えたことを特徴とするワイヤソー用溝付ローラの溝
形状測定装置。3. A wire row is formed by winding a wire delivered from one wire reel around the grooves of a plurality of grooved rollers, and is wound on the other wire reel, and the wire row contains abrasive grains. In a groove shape measuring device for a grooved roller for a wire saw, which cuts the work piece into a large number of wafers by supplying a working liquid and pressing the work piece, it is formed to have a diameter equal to that of the wire. A measuring wire wound around the groove of the grooved roller, a tension applying means for applying a tension to the measuring wire wound around the groove of the grooved roller, and the measuring wire in the groove of the grooved roller. A groove shape measuring device for a grooved roller for a wire saw, comprising: a shape measuring means for measuring the groove shape in a wound state.
の張力は、前記溝付ローラの溝に巻き掛けられる前記ワ
イヤの張力と略同一に設定されていることを特徴とする
請求項３記載のワイヤソー用溝付ローラの溝形状測定装
置。4. The tension of the measuring wire by the tension applying means is set to be substantially the same as the tension of the wire wound around the groove of the grooved roller. Groove shape measuring device for grooved roller for wire saw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14586396A JPH09323321A (en) | 1996-06-07 | 1996-06-07 | Method and apparatus for measuring groove shape of grooved roller for wire saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14586396A JPH09323321A (en) | 1996-06-07 | 1996-06-07 | Method and apparatus for measuring groove shape of grooved roller for wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09323321A true JPH09323321A (en) | 1997-12-16 |
Family
ID=15394814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14586396A Pending JPH09323321A (en) | 1996-06-07 | 1996-06-07 | Method and apparatus for measuring groove shape of grooved roller for wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09323321A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973083A (en) * | 2010-09-29 | 2011-02-16 | 常州亿晶光电科技有限公司 | Cutting wire guide wheel component of silicon rod cut square machine |
-
1996
- 1996-06-07 JP JP14586396A patent/JPH09323321A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973083A (en) * | 2010-09-29 | 2011-02-16 | 常州亿晶光电科技有限公司 | Cutting wire guide wheel component of silicon rod cut square machine |
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