JPH09323318A - Method and apparatus for measuring groove shape of grooved roller for wire saw - Google Patents
Method and apparatus for measuring groove shape of grooved roller for wire sawInfo
- Publication number
- JPH09323318A JPH09323318A JP14565396A JP14565396A JPH09323318A JP H09323318 A JPH09323318 A JP H09323318A JP 14565396 A JP14565396 A JP 14565396A JP 14565396 A JP14565396 A JP 14565396A JP H09323318 A JPH09323318 A JP H09323318A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- groove
- grooved roller
- groove shape
- grooved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、円柱状の半導体イ
ンゴット、セラミック、ガラス等の被加工物を走行する
ワイヤで薄板状のウェーハに切断するワイヤソー用溝付
ローラの溝形状測定方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for measuring the groove shape of a grooved roller for a wire saw, which cuts a thin plate-shaped wafer with a traveling wire through a workpiece such as a cylindrical semiconductor ingot, ceramic, or glass. .
【０００２】[0002]
【従来の技術】半導体インゴット、セラミック、ガラス
等の被加工物を薄板状のウェーハに切断する切断装置の
一つにワイヤソーがある。このワイヤソーは、一方のワ
イヤリールから繰り出されたワイヤを複数台の溝付ロー
ラの溝に巻き掛けてワイヤ列を形成し、他方のワイヤリ
ールに巻き取ると共に、前記ワイヤ列に砥粒を含む加工
液を供給して被加工物を押し当てることにより、その砥
粒のラッピング作用によって前記被加工物を多数のウェ
ーハに切断する。2. Description of the Related Art A wire saw is one of the cutting devices for cutting a workpiece such as a semiconductor ingot, ceramic, glass or the like into a thin wafer. In this wire saw, a wire reeled out from one wire reel is wound around the grooves of a plurality of grooved rollers to form a wire row, and the wire row is wound on the other wire reel, and the wire row includes abrasive grains. By supplying a liquid and pressing the workpiece, the lapping action of the abrasive grains cuts the workpiece into a large number of wafers.
【０００３】ところで、溝付ローラの溝が磨耗していく
と、切断されるウェーハの精度に悪影響を与える。即
ち、前記溝の傾斜面が磨耗した場合には、ワイヤが溝付
ローラの軸線方向に移動して、結果的にウェーハの厚さ
が不均一となる。また、溝が径方向に磨耗して隣接する
溝との溝径が大きく変化するとワイヤが蛇行してしま
い、結果的にウェーハの平坦度が悪化するという現象が
生じる。[0003] When the grooves of the grooved rollers are worn, the accuracy of the cut wafer is adversely affected. That is, when the inclined surface of the groove is worn, the wire moves in the axial direction of the grooved roller, resulting in a non-uniform wafer thickness. Further, when the groove is worn in the radial direction and the groove diameter between the adjacent groove and the groove greatly changes, the wire meanders, and as a result, the flatness of the wafer is deteriorated.
【０００４】そこで、従来から形状測定機を用いて溝付
ローラの溝形状を測定し、その結果が許容値を外れた時
に溝付ローラの寿命と判断して溝付ローラを新品のもの
と交換するようにしている。図５は、溝付ローラ１の測
定状態を示す要部断面図である。同図によれば、形状測
定機の触針先端子２は先鋭状に形成され、これを溝付ロ
ーラ１の溝３に当接させると共に、溝付ローラの軸線方
向（図中矢印で示す方向）に走行させて溝３の形状を測
定する。図６は、その測定結果を示す出力データであ
り、このデータに基づいて隣接する溝３、３…同士のピ
ッチ（Ｐ）、及び溝径のバラツキ（α）を算出し溝３、
３…の磨耗量を計測している。Therefore, conventionally, the groove shape of the grooved roller is measured using a shape measuring machine, and when the result is out of an allowable value, it is judged that the life of the grooved roller has expired, and the grooved roller is replaced with a new one. I am trying to do it. FIG. 5 is a cross-sectional view of essential parts showing a measurement state of the grooved roller 1. According to the figure, the stylus tip terminal 2 of the shape measuring machine is formed in a sharpened shape, and is brought into contact with the groove 3 of the grooved roller 1, and the axial direction of the grooved roller (direction shown by an arrow in the figure). ) And measure the shape of the groove 3. FIG. 6 is output data showing the measurement results. Based on this data, the pitch (P) between the adjacent grooves 3, 3, ... And the variation (α) in the groove diameter are calculated, and the groove 3,
The wear amount of 3 ... is measured.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、従来の
形状測定装置は、ワイヤが巻き掛けられていない状態で
の溝自体の形状を測定するものなので、負荷がかかった
状態の溝形状を測定することができない。従って、従来
装置では、ワイヤが巻き掛かった状態での溝３の磨耗量
（変化量）を正確に計測できないという欠点がある。However, since the conventional shape measuring apparatus measures the shape of the groove itself in the state where the wire is not wound, it is necessary to measure the groove shape under a load. I can't. Therefore, the conventional device has a drawback that the wear amount (change amount) of the groove 3 when the wire is wound cannot be accurately measured.
【０００６】例えば、図６に示すように、溝３の両壁３
Ａ、３Ｂの傾斜角度θ１、θ２に差があると、実際には
この溝３に巻き掛けられるワイヤの位置が図６上で左右
方向にずれているにもかかわらず、先端子２は溝３の深
部を測定し、この深部でＰを算出するので測定誤差が出
る。このような不具合は、溝３にワイヤが巻き掛けられ
た実機上で測定すれば解消できるが、実機上では形状測
定機を配置するスペースがなく、そのスペースを確保し
ようとするとワイヤソー全体が大型になるという欠点が
生じる。For example, as shown in FIG. 6, both walls 3 of the groove 3 are formed.
If there is a difference between the inclination angles θ1 and θ2 of A and 3B, although the position of the wire wound around the groove 3 is actually deviated in the left-right direction in FIG. Is measured and P is calculated at this depth, so a measurement error occurs. Such a problem can be solved by performing measurement on an actual machine in which a wire is wound around the groove 3, but there is no space for disposing the shape measuring machine on the actual machine, and when trying to secure such space, the entire wire saw becomes large. Disadvantage.
【０００７】本発明はこのような事情に鑑みてなされた
もので、実機と略同じ条件で溝形状を測定することがで
きるワイヤソー用溝付ローラの溝形状測定方法及び装置
を提供することを目的とする。The present invention has been made in view of the above circumstances, and an object thereof is to provide a groove shape measuring method and apparatus for a grooved roller for a wire saw, which can measure the groove shape under substantially the same conditions as in an actual machine. And
【０００８】[0008]
【課題を解決する為の手段】本発明は、前記目的を達成
するために、一方のワイヤリールから繰り出されたワイ
ヤを複数台の溝付ローラの溝に巻き掛けてワイヤ列を形
成し、他方のワイヤリールに巻き取ると共に、前記ワイ
ヤ列に砥粒を含む加工液を供給して被加工物を押し当て
ることにより、前記被加工物を多数のウェーハに切断す
るワイヤソー用溝付ローラの溝形状測定方法に於いて、
形状測定装置の触針先端子を前記ワイヤの直径と等しい
球体又は円柱体に形成し、該球体又は円柱体を前記溝付
ローラの溝に押し付けると共に溝付ローラの軸線方向に
走行させて溝付ローラの溝形状を測定することを特徴と
している。According to the present invention, in order to attain the above object, a wire fed from one wire reel is wound around grooves of a plurality of grooved rollers to form a wire row, and the other. The groove shape of the grooved roller for a wire saw for cutting the work into a number of wafers by winding the work around the wire reel and supplying a working liquid containing abrasive grains to the wire row and pressing the work. In the measurement method,
The stylus tip terminal of the shape measuring device is formed in a spherical body or a cylindrical body having the same diameter as the wire, and the spherical body or the cylindrical body is pressed against the groove of the grooved roller and is made to run in the axial direction of the grooved roller to form the groove The feature is that the groove shape of the roller is measured.
【０００９】本発明によれば、溝形状測定装置の触針先
端子を、ワイヤの直径と等しい球体又は円柱体に形成
し、この触針先端子を押圧手段によって溝付ローラの溝
に押し付けたのち、駆動手段によって溝付ローラの軸線
方向に走行させて溝形状を測定する。このように本発明
は、触針先端子の形状をワイヤの直径と等しい球体又は
円柱体としたので、先鋭状の触針先端子で測定する従来
の測定方法と比較して、実機と略同じ条件で溝形状を測
定できる。従って、本発明によれば、溝付ローラの溝の
磨耗量を正確に計測できる。According to the present invention, the stylus tip terminal of the groove shape measuring device is formed into a spherical or cylindrical body having the same diameter as the wire, and the stylus tip terminal is pressed into the groove of the grooved roller by the pressing means. Then, the groove shape is measured by causing the grooved roller to travel in the axial direction by the driving means. As described above, according to the present invention, since the shape of the stylus tip terminal is a sphere or a columnar body having the same diameter as the wire, it is substantially the same as the actual machine as compared with the conventional measurement method of measuring with the sharpened stylus tip terminal. The groove shape can be measured under the conditions. Therefore, according to the present invention, it is possible to accurately measure the wear amount of the groove of the grooved roller.
【００１０】また、本発明は、押圧手段による触針先端
子の押付力を、溝付ローラの溝に対するワイヤの押付力
と略同一に設定したので、更に実機に近い状態で溝形状
を測定できる。Further, according to the present invention, since the pressing force of the stylus tip terminal by the pressing means is set to be substantially the same as the pressing force of the wire to the groove of the grooved roller, the groove shape can be measured in a state closer to the actual machine. .
【００１１】[0011]
【発明の実施の形態】以下添付図面に従って本発明に係
るワイヤソー用溝付ローラの溝形状測定方法及び装置の
好ましい実施の形態について詳説する。図１は、本発明
の実施の形態に係る溝形状測定装置によって、溝付ロー
ラの溝形状が測定されている状態を示す正面図である。BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a groove shape measuring method and device for a grooved roller for a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a front view showing a state where the groove shape of a grooved roller is measured by a groove shape measuring device according to an embodiment of the present invention.
【００１２】同図に示す溝形状測定装置１０は台車１２
上に設置されており、使用途中の溝付ローラを測定する
際にはワイヤソーの近傍に移動され、新品の溝付ローラ
を測定する際には搬入倉庫等に移動されて、その場所で
測定を行うことが可能となっている。前記溝形状測定装
置１０は、台車１２上に固定される測定台ベース１４を
有し、この測定台ベース１４上にコラム１６が鉛直方向
に立設されている。コラム１６には、駆動部１８が図示
しない直動ベアリングを介して昇降移動可能に設けら
れ、この駆動部１８を昇降移動させる電動モータ２０が
コラム１６の上部に設置されている。前記駆動部１８の
下部には、検出器２２が取り付けられる。駆動部１８
は、検出器２２を水平方向に往復移動させるもので、そ
の移動速度は、台車１２内のコントローラ１９によって
制御されている。検出器２２の側部には、逆Ｌ字状の触
針２４が延設され、触針２４は基部を支点に上下に揺動
自在に設けられる。この触針２４の移動が検出器２２で
検出されると、検出器２２は触針２４の移動量に基づい
た電気信号をコントーラ１９に出力する。そして、コン
トローラ１９は前記電気信号に基づいて測定データを作
成し、これを図示しないディスプレイ、又はプリンタに
出力して表示させる。また、前記検出器２２は、先端子
２６の測定圧（押圧力）を設定することもできる。符号
２８は傾斜装置であり、傾斜装置２８のハンドル３０を
操作すれば、検出器２２と駆動部１８とが所定の傾きに
設定される。The groove shape measuring device 10 shown in the figure is a dolly 12
It is installed on the top and moved to the vicinity of the wire saw when measuring the grooved roller in use, and moved to the carry-in warehouse etc. when measuring a new grooved roller and measured at that place. It is possible to do. The groove shape measuring device 10 has a measuring table base 14 fixed on a carriage 12, and a column 16 is erected vertically on the measuring table base 14. A drive unit 18 is provided in the column 16 so as to be able to move up and down via a linear motion bearing (not shown), and an electric motor 20 for moving the drive unit 18 up and down is installed above the column 16. A detector 22 is attached to the lower portion of the driving unit 18. Drive unit 18
Is to reciprocate the detector 22 in the horizontal direction, and its moving speed is controlled by the controller 19 in the carriage 12. An inverted L-shaped stylus 24 extends from a side portion of the detector 22, and the stylus 24 is provided to be vertically swingable with a base as a fulcrum. When the movement of the stylus 24 is detected by the detector 22, the detector 22 outputs an electric signal based on the amount of movement of the stylus 24 to the controller 19. Then, the controller 19 creates measurement data based on the electric signal and outputs it to a display (not shown) or a printer for display. The detector 22 can also set the measurement pressure (pressing force) of the tip terminal 26. Reference numeral 28 is a tilting device, and when the handle 30 of the tilting device 28 is operated, the detector 22 and the drive unit 18 are set to a predetermined tilt.
【００１３】前記触針２４の先端部には図１、図２に示
す球状の先端子２６が固着されている。前記先端子２６
は、実機のワイヤソーで使用されるワイヤの直径と等し
く形成されている。ところで、測定対象の溝付ローラ３
２は、前記台車１２上に設置されたＸ−Ｙテーブル３４
上に支持される。Ｘ−Ｙテーブル３４は、Ｘ方向に配設
された一対のガイドレール３６、３６とＹ方向に配設さ
れた一対のガイドレール３８（一方側は図示せず）を有
している。前記ガイドレール３６、３６は台車１２上に
平行に固定され、これに前記ガイドレール３８が形成さ
れたテーブル４０がＸ方向に移動自在に載置されてい
る。前記ガイドレール３８には、支持台４２がＹ方向に
移動自在に載置される。前記溝付ローラ３２は、前記支
持台４２の両側に立設された支持アーム４４、４４上に
その軸受部３２Ａ、３２Ａが載置されて支持されてい
る。A spherical tip terminal 26 shown in FIGS. 1 and 2 is fixed to the tip of the stylus 24. The tip terminal 26
Is formed to have the same diameter as the wire used in the wire saw of the actual machine. By the way, the grooved roller 3 to be measured
2 is an XY table 34 installed on the carriage 12.
Supported above. The XY table 34 has a pair of guide rails 36, 36 arranged in the X direction and a pair of guide rails 38 (one side not shown) arranged in the Y direction. The guide rails 36, 36 are fixed in parallel on the carriage 12, and a table 40 on which the guide rail 38 is formed is movably mounted in the X direction. A support base 42 is mounted on the guide rail 38 so as to be movable in the Y direction. The grooved roller 32 is supported by bearing portions 32A and 32A placed on support arms 44 and 44 provided upright on both sides of the support base 42.
【００１４】次に、前記の如く構成された溝形状測定装
置１０による測定方法について説明する。先ず、Ｘ−Ｙ
テーブル３４を駆動して支持台４２を溝形状測定装置１
０から離れた位置に移動させ、この位置で溝付ローラ３
２を支持台４２上に支持させる。そして、Ｘ−Ｙテーブ
ル３４を駆動して前記溝付ローラ３２を溝形状測定装置
１０に近づけると共に、支持台４２をＹ方向に移動させ
て、所望の測定部分を前記触針２４の下方に位置させ
る。Next, a measuring method by the groove shape measuring device 10 configured as described above will be described. First, XY
The table 34 is driven to move the support base 42 to the groove shape measuring device 1
Move to a position away from 0, and at this position the grooved roller 3
2 is supported on the support base 42. Then, the XY table 34 is driven to bring the grooved roller 32 closer to the groove shape measuring device 10, and the support base 42 is moved in the Y direction to position a desired measurement portion below the stylus 24. Let
【００１５】次に、溝形状測定装置１０の駆動部１８を
コラム１６に沿って下降移動させて先端子２６の高さを
溝付ローラ３２の位置に合わせる。そして、駆動部１８
を駆動して検出器２２を測定開始位置に移動させたの
ち、触針２４を下降移動させて溝付ローラ３２の溝３３
に当接させると共に先端子２６による測定圧Ｆを設定す
る。この測定圧Ｆは、溝付ローラ３２の溝３３に対する
ワイヤの押付力、即ち実機の押付力と同一に設定する。
以上で測定準備が完了する。Next, the drive portion 18 of the groove shape measuring device 10 is moved down along the column 16 so that the height of the tip terminal 26 is adjusted to the position of the grooved roller 32. Then, the drive unit 18
Is driven to move the detector 22 to the measurement start position, and then the stylus 24 is moved downward to move the groove 33 of the grooved roller 32.
And the measurement pressure F by the tip terminal 26 is set. The measurement pressure F is set to be the same as the pressing force of the wire against the groove 33 of the grooved roller 32, that is, the pressing force of the actual machine.
This completes the measurement preparation.
【００１６】次いで、検出器２２を水平方向に移動させ
て溝３３の形状測定を開始する。図２は、溝付ローラ３
２の測定状態を示す要部断面図である。同図に示すよう
に、溝形状測定装置１０の先端子２６を溝付ローラ３２
の軸線方向（図中矢印で示す方向）に走行させて溝３３
の形状を測定する。図３は、その測定結果を示す出力デ
ータであり、このデータに基づいて隣接する溝３３、３
３…同士のピッチ（Ｐ）、及び溝径のバラツキ（α）を
算出し溝３３、３３…の磨耗量を計測する。Next, the detector 22 is moved in the horizontal direction to start measuring the shape of the groove 33. FIG. 2 shows the grooved roller 3
It is a principal part sectional view which shows the measurement state of 2. As shown in the figure, the tip terminal 26 of the groove shape measuring device 10 is attached to the grooved roller 32.
The groove 33 by traveling in the axial direction (the direction indicated by the arrow in the figure)
Is measured. FIG. 3 is output data showing the measurement results, and based on this data, the adjacent grooves 33, 3
3 and the pitch (P) between them and the variation (α) in the groove diameter are calculated, and the wear amount of the grooves 33, 33 ... Is measured.
【００１７】前記測定結果において、本実施の形態で
は、前記先端子２６をワイヤの直径と等しく形成してい
るので、溝３３の両壁３３Ａ、３３Ｂの傾斜角度θ１、
θ２に差があっても、この溝３３に巻き掛けられるワイ
ヤの位置を先端子２６の位置で測定できる。従って、本
実施の形態によれば、先鋭状の触針先端子で測定する従
来の測定方法と比較して、実機と略同じ条件で前記ピッ
チＰと溝径のバラツキαを測定できるので、溝付ローラ
３２の溝３３の磨耗量を正確に計測できる。According to the measurement result, in the present embodiment, since the tip terminal 26 is formed to have the same diameter as the wire, the inclination angles θ1 of both walls 33A and 33B of the groove 33 are
Even if there is a difference in θ2, the position of the wire wound around the groove 33 can be measured at the position of the tip terminal 26. Therefore, according to the present embodiment, as compared with the conventional measurement method of measuring with a sharpened stylus tip terminal, the variation P between the pitch P and the groove diameter can be measured under substantially the same conditions as in the actual machine. The amount of wear of the groove 33 of the attached roller 32 can be accurately measured.
【００１８】また、本実施の形態では、先端子２６の測
定力を、溝付ローラ３２の溝３３に対するワイヤの押付
力と略同一に設定している。従って、溝付ローラ３２が
ワイヤの押付力で弾性変形する弾性体の場合に特に有効
であり、この場合には更に実機に近い状態で溝形状を測
定できる。尚、前記先端子２６は球体なので溝３３の深
部には到達せず、溝３３の実際の形状を測定することは
できないが、必要な情報はピッチＰと溝径のバラツキα
なので、磨耗量を計測するにあたり支障は全くない。Further, in this embodiment, the measuring force of the tip terminal 26 is set to be substantially the same as the pressing force of the wire against the groove 33 of the grooved roller 32. Therefore, it is particularly effective when the grooved roller 32 is an elastic body that is elastically deformed by the pressing force of the wire, and in this case, the groove shape can be measured in a state closer to the actual machine. Since the tip terminal 26 is a sphere, it does not reach the deep portion of the groove 33, and the actual shape of the groove 33 cannot be measured. However, necessary information is the variation P between the pitch P and the groove diameter.
Therefore, there is no problem in measuring the amount of wear.
【００１９】一方、本溝形状測定装置１０を使用するこ
とで、溝付ローラ３２の寿命及び保守点検（再生加工）
の時期を判断することもできる。その判断方法は、先
ず、新品の溝付ローラ３２の溝形状を測定し、前記ピッ
チＰ1 と溝径のバラツキα1 の初期データを保存する。
次に、この溝付ローラ３２を実機に搭載し、被加工物を
ｎ本（例えば１０本）切断した後のＰ2 、α2 の中間デ
ータを保存する。そして、初期データＰ1 、α1 から中
間データＰ2 、α2を減算し、ｎ本目における変化量
（磨耗量）を求める。この変化量に基づいて、被加工物
１本当たりの変化量を求め、何本目に保守点検が必要と
なるか、及び何本目に寿命となるかを予測する。即ち、
保守点検時期の規定値、及び寿命の規定値を予め設定し
ておき、これらの規定値を超えると予測される本数目の
被加工物を切断終了した時に、保守点検を行い又は新品
のものと交換する。On the other hand, by using the groove shape measuring apparatus 10, the service life and maintenance inspection (regeneration) of the grooved roller 32 are performed.
You can also determine when. The determination method, first, by measuring the groove shape of the grooved rollers 32 a new, stores the variation alpha 1 of the initial data of the pitch P 1 and groove diameter.
Next, the grooved roller 32 is mounted on an actual machine, and intermediate data of P 2 and α 2 after cutting n (for example, 10) workpieces is stored. Then, the intermediate data P 2 and α 2 are subtracted from the initial data P 1 and α 1 to obtain the change amount (wear amount) at the n-th line. On the basis of the amount of change, the amount of change per work piece is obtained, and it is predicted at which line maintenance and inspection will be required and at which line the end of life will be reached. That is,
The specified values for maintenance and inspection time and the specified values for life are set in advance, and when the number of workpieces that are expected to exceed these specified values have been cut, maintenance and inspection are performed or new Exchange.
【００２０】これにより、溝付ローラ３２の寿命及び保
守点検の時期を効率良く判断することができる。尚、前
記中間データは１回に限らず、ｎ本毎に複数回取得する
ようにすれば、切断本数に対する溝の形状変化の統計値
を得ることができる。従って、この統計値から変化量の
異常の有無を判定できるので、例えば、変化量が異常の
場合には、ワイヤソーに異常が生じたと判断しワイヤソ
ーの異常診断を行う。これにより、ワイヤソーの故障及
び切断ウェーハの精度低下を未然に防止することができ
る。As a result, the life of the grooved roller 32 and the timing of maintenance inspection can be efficiently judged. If the intermediate data is acquired not only once but also plural times every n lines, a statistical value of the change in the shape of the groove with respect to the number of cuts can be obtained. Therefore, since it is possible to determine whether or not there is an abnormality in the variation amount from this statistical value, for example, when the variation amount is abnormal, it is determined that an abnormality has occurred in the wire saw and the abnormality diagnosis of the wire saw is performed. As a result, it is possible to prevent a failure of the wire saw and a decrease in accuracy of the cut wafer.
【００２１】また、本実施の形態では先端子２６を球体
としたが、これに限られるものではなく、図４に示すよ
うに先端子４６をワイヤの直径と等しい円柱体に形成し
ても良い。Further, although the tip terminal 26 is a sphere in the present embodiment, it is not limited to this, and the tip terminal 46 may be formed into a columnar body having the same diameter as the wire as shown in FIG. .
【００２２】[0022]
【発明の効果】以上説明したように本発明に係るワイヤ
ソー用溝付ローラの溝形状測定方法及び装置によれば、
ワイヤの直径と等しい球体又は円柱体に触針先端子を形
成したので、実機と略同じ条件で溝形状を測定すること
ができる。従って、本発明は、溝付ローラの溝の磨耗量
を正確に計測することができる。As described above, according to the groove shape measuring method and apparatus of the grooved roller for the wire saw according to the present invention,
Since the stylus tip terminal is formed on the spherical body or the cylindrical body having the same diameter as the wire, the groove shape can be measured under substantially the same conditions as the actual machine. Therefore, the present invention can accurately measure the wear amount of the groove of the grooved roller.
【００２３】また、本発明によれば、触針先端子の押付
力を、溝付ローラの溝に対するワイヤの押付力と略同一
に設定したので、更に実機に近い状態で溝形状を測定す
ることができる。Further, according to the present invention, since the pressing force of the stylus tip terminal is set to be substantially the same as the pressing force of the wire to the groove of the grooved roller, the groove shape can be measured in a state closer to the actual machine. You can
【図１】本発明の溝形状測定装置による溝付ローラの溝
形状測定状態を示す正面図FIG. 1 is a front view showing a groove shape measuring state of a grooved roller by a groove shape measuring device of the present invention.
【図２】溝形状測定状態を示す要部拡大断面図FIG. 2 is an enlarged sectional view of an essential part showing a groove shape measurement state.
【図３】溝形状測定結果の出力データを示す説明図FIG. 3 is an explanatory diagram showing output data of groove shape measurement results.
【図４】触針先端子の第２の実施の形態を示す斜視図FIG. 4 is a perspective view showing a second embodiment of a stylus tip terminal.
【図５】従来の溝形状測定状態を示す要部拡大断面図FIG. 5 is an enlarged sectional view of an essential part showing a conventional groove shape measurement state.
【図６】従来の溝形状測定結果の出力データを示す説明
図FIG. 6 is an explanatory diagram showing output data of a conventional groove shape measurement result.
１０…溝形状測定装置 １２…台車 １８…駆動部 １９…コントローラ ２２…検出器 ２４…触針 ２６、４６…先端子 ３２…溝付ローラ DESCRIPTION OF SYMBOLS 10 ... Groove shape measuring device 12 ... Bogie 18 ... Driving part 19 ... Controller 22 ... Detector 24 ... Stylus 26, 46 ... Tip terminal 32 ... Grooved roller
Claims (4)
ヤを複数台の溝付ローラの溝に巻き掛けてワイヤ列を形
成し、他方のワイヤリールに巻き取ると共に、前記ワイ
ヤ列に砥粒を含む加工液を供給して被加工物を押し当て
ることにより、前記被加工物を多数のウェーハに切断す
るワイヤソー用溝付ローラの溝形状測定方法に於いて、 形状測定装置の触針先端子を前記ワイヤの直径と等しい
球体又は円柱体に形成し、該球体又は円柱体を前記溝付
ローラの溝に押し付けると共に溝付ローラの軸線方向に
走行させて溝付ローラの溝形状を測定することを特徴と
するワイヤソー用溝付ローラの溝形状測定方法。1. A wire row is formed by winding a wire delivered from one wire reel around the grooves of a plurality of grooved rollers, and is wound on the other wire reel, and the wire row contains abrasive grains. In a groove shape measuring method of a grooved roller for a wire saw that cuts the workpiece into a large number of wafers by supplying a working liquid and pressing the workpiece, the stylus tip terminal of the shape measuring device is It is formed into a spherical body or a cylindrical body having a diameter equal to that of the wire, and the spherical body or the cylindrical body is pressed against the groove of the grooved roller and is made to run in the axial direction of the grooved roller to measure the groove shape of the grooved roller. Method for measuring groove shape of grooved roller for wire saw.
ローラの溝に対する前記ワイヤの押付力と略同一に設定
されていることを特徴とする請求項１記載のワイヤソー
用溝付ローラの溝形状測定方法。2. The grooved roller for a wire saw according to claim 1, wherein the pressing force of the spherical body or the cylindrical body is set to be substantially the same as the pressing force of the wire against the groove of the grooved roller. Groove shape measuring method.
ヤを複数台の溝付ローラの溝に巻き掛けてワイヤ列を形
成し、他方のワイヤリールに巻き取ると共に、前記ワイ
ヤ列に砥粒を含む加工液を供給して被加工物を押し当て
ることにより、前記被加工物を多数のウェーハに切断す
るワイヤソー用溝付ローラの溝形状測定装置に於いて、 前記ワイヤの直径と等しい球体又は円柱体に形成された
触針先端子と、該触針先端子を前記溝付ローラの溝に押
し付ける押圧手段と、該触針先端子を溝付ローラの軸線
方向に走行させる駆動手段と、を有することを特徴とす
るワイヤソー用溝付ローラの溝形状測定装置。3. A wire row is formed by winding a wire fed from one wire reel around the grooves of a plurality of grooved rollers, and is wound on the other wire reel, and the wire row contains abrasive grains. In a groove shape measuring device for a grooved roller for a wire saw that cuts the workpiece into a large number of wafers by supplying a working liquid and pressing the workpiece, a spherical body or a cylindrical body having a diameter equal to that of the wire. A stylus tip terminal, a pressing means for pressing the stylus tip terminal against the groove of the grooved roller, and a driving means for moving the stylus tip terminal in the axial direction of the grooved roller. A groove shape measuring device for grooved rollers for wire saws.
力は、前記溝付ローラの溝に対する前記ワイヤの押付力
と略同一に設定されていることを特徴とする請求項３記
載のワイヤソー用溝付ローラの溝形状測定装置。4. The wire saw according to claim 3, wherein the pressing force of the stylus tip terminal by the pressing means is set to be substantially the same as the pressing force of the wire against the groove of the grooved roller. Shape measuring device for roller with groove for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14565396A JPH09323318A (en) | 1996-06-07 | 1996-06-07 | Method and apparatus for measuring groove shape of grooved roller for wire saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14565396A JPH09323318A (en) | 1996-06-07 | 1996-06-07 | Method and apparatus for measuring groove shape of grooved roller for wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09323318A true JPH09323318A (en) | 1997-12-16 |
Family
ID=15389996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14565396A Pending JPH09323318A (en) | 1996-06-07 | 1996-06-07 | Method and apparatus for measuring groove shape of grooved roller for wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09323318A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104097269A (en) * | 2013-09-30 | 2014-10-15 | 凡登（江苏）新型材料有限公司 | Guide wheel with customized groove type for multi-line cutting and preparation method thereof |
| CN113375615A (en) * | 2021-08-11 | 2021-09-10 | 南京泰普森自动化设备有限公司 | Arc-shaped groove measuring system and measuring device thereof |
-
1996
- 1996-06-07 JP JP14565396A patent/JPH09323318A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104097269A (en) * | 2013-09-30 | 2014-10-15 | 凡登（江苏）新型材料有限公司 | Guide wheel with customized groove type for multi-line cutting and preparation method thereof |
| CN113375615A (en) * | 2021-08-11 | 2021-09-10 | 南京泰普森自动化设备有限公司 | Arc-shaped groove measuring system and measuring device thereof |
| CN113375615B (en) * | 2021-08-11 | 2021-11-30 | 南京泰普森自动化设备有限公司 | Arc-shaped groove measuring system and measuring device thereof |
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