JPH09320924A5 - - Google Patents

Info

Publication number
JPH09320924A5
JPH09320924A5 JP1996131509A JP13150996A JPH09320924A5 JP H09320924 A5 JPH09320924 A5 JP H09320924A5 JP 1996131509 A JP1996131509 A JP 1996131509A JP 13150996 A JP13150996 A JP 13150996A JP H09320924 A5 JPH09320924 A5 JP H09320924A5
Authority
JP
Japan
Prior art keywords
optical system
projection optical
measurement
reticle
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996131509A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09320924A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8131509A priority Critical patent/JPH09320924A/ja
Priority claimed from JP8131509A external-priority patent/JPH09320924A/ja
Publication of JPH09320924A publication Critical patent/JPH09320924A/ja
Publication of JPH09320924A5 publication Critical patent/JPH09320924A5/ja
Pending legal-status Critical Current

Links

JP8131509A 1996-05-27 1996-05-27 投影露光装置 Pending JPH09320924A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8131509A JPH09320924A (ja) 1996-05-27 1996-05-27 投影露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8131509A JPH09320924A (ja) 1996-05-27 1996-05-27 投影露光装置

Publications (2)

Publication Number Publication Date
JPH09320924A JPH09320924A (ja) 1997-12-12
JPH09320924A5 true JPH09320924A5 (https=) 2004-11-25

Family

ID=15059705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8131509A Pending JPH09320924A (ja) 1996-05-27 1996-05-27 投影露光装置

Country Status (1)

Country Link
JP (1) JPH09320924A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003252349A1 (en) * 2002-07-31 2004-02-16 Nikon Corporation Position measuring method, position control method, exposure method and exposure apparatus, and device manufacturing method

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