JPH09304438A - Probe unit and head for inspection - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate the manufacture and improve the elasticity, by bending a probe sheet capable of elastic deformation, in an U-shape, and fixing the sheet on both side surfaces of a retainer in such a manner that a probe is positioned on the lower side of the retainer. SOLUTION: A plurality of through holes formed in a retainer 30 have planar forms which are long in the longitudinal direction of the retainer 30, and correspond to a probe sheet 32. The lower surface 40 of the retainer 30 is constituted as a crest surface wherein the height position becomes gradually low from the side of the one side surface 42 toward the central part, and gradually high toward the side of the other side surface 44. The top of the crest surface, i.e., downward protruding part 46 is displaced on the side of the one side surface 42. The probe sheet 32 is so bent in an U shape that electric wiring 52 becomes outside, and bonded to the side surfaces 42, 44 of the retainer 30, in a sheet type part member 50. Each probe 56 of a probe unit 16 abuts against the protruding part 46, in the longitudinal direction, and the tip part does not abut against the retainer 30, so that the spring force is large and excellent electric contact can be obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit and an inspection head used for inspecting the electrical characteristics of a device under test such as an integrated circuit.

[0002]

2. Description of the Related Art Generally, a test head called a probe card, a probe board, or the like is used for an electric current test of an integrated circuit. Many conventional inspection heads use a probe in which a plurality of metal wires are attached to an electrically insulating substrate and each metal wire contacts an electrode of an integrated circuit. In such an inspection head, since the spring force of the metal wire is large, the degree of electrical contact between the probe and the terminal of the integrated circuit is high, but it is necessary to accurately attach multiple metal wires to the substrate at a fine pitch. Is difficult and therefore expensive.

One of inspection heads that does not use a plurality of metal wires
As one, a probe having a plurality of electric wires formed by a printed wiring technique on one surface of a film having electric insulation and flexibility and hemispherical projections (contacts for measurement) formed on each electric wire An inspection head using a probe unit provided with a sheet and a support for supporting the probe sheet has been proposed (Japanese Patent Laid-Open No. 62-1826).
No. 7, JP-A-2-126160, Japanese Patent Publication No. 3-
45541).

In each of these inspection heads, a projection is formed on each electric wire and a part of the electric wire is used as a probe, so that the probe sheet is easily manufactured and the cost is low. On the other hand, since the probe sheet is only attached to the support in a plane, the elasticity of the probe portion is low and therefore sufficient electrical contact can be obtained between the probe and the terminals of the integrated circuit. No, you can't do the correct test.

A probe unit has been proposed in which a cushioning material is arranged between the probe portion of the probe sheet and the support as described above to increase the apparent spring force of the probe portion (Japanese Patent Publication No. 7-105416). Gazette). But,
In this probe unit, the spring force of the entire probe portion is large, but when one probe portion is deformed, a plurality of probes in the vicinity thereof are deformed, so that the apparent spring force of each probe portion is actually small.

A plate-shaped spring material is arranged on the probe sheet,
A probe unit has been proposed in which adjacent probe portions are physically separated by slits formed in a probe sheet to form independent probes (Japanese Patent Laid-Open No. 4-363).
No. 671). However, also in this probe unit, since the probe sheet is only attached flatly to the support, the elasticity of each probe is low, and sufficient electrical contact can be obtained between the probe and the terminals of the integrated circuit. I can't.

[0007]

An object of the present invention is to increase the elasticity of each probe, though it is easy to manufacture.

[0008]

A probe unit of the present invention comprises a support having first and second surfaces that are at an angle to each other, a sheet-shaped member, and a plurality of electric wirings formed on the sheet-shaped member. And an elastically deformable probe sheet. The probe sheet serves as a probe for connecting a part of the electrical wiring to an electrode of a device under test, and has a slit that physically separates adjacent probes, and at least the tip of the probe supports the support. It is located on the side of the first surface of the body and is bent so that at least another part of the probe sheet is located on the side of the second surface of the support.

When inspecting an object to be inspected such as an integrated circuit, the probe unit is pressed against the object to be inspected so that the tips of the probes come into contact with the terminals of the object to be inspected. As a result, each probe elastically deforms. Each probe is
Because it is physically separated from the adjacent probe, it deforms independently. Therefore, the deformation of each probe does not deform the adjacent probe and does not reduce the spring force of the adjacent probe.

In the probe unit, the probe sheet itself is elastically deformable, and the probe is the first support member.
The probe sheet is planarly supported because it is bent in an L-shape or a U-shape so that the probe sheet is located on the side of the surface and the other part is located on the side of the second surface of the support. Even if each probe is independent, the spring force of each probe is larger than that of the conventional probe unit arranged in.

According to the present invention, since the probe sheet that can be produced by the printed wiring technique is used, the probe sheet can be easily produced. In addition, adjacent probes are physically separated, and the probes are located on the side of the first surface of the support, and the other part of the second surface has an angle with respect to the first surface. Since the probe sheet is bent so as to be located on the side, the spring force of each probe is large, and therefore sufficient electrical contact can be obtained between the probe and the terminal of the device under test.

[0012] It is preferable that the probe sheet further includes an electrical insulating film that covers the electrical wiring at a portion on the second surface side of the support. By doing so, even if a plurality of probe units are stacked in parallel, it is possible to prevent electrical wiring of adjacent probe units from being electrically short-circuited.

The preferred embodiment further includes a flexible flat cable or strip circuit board having leads connected to each electrical wire. The sheet-like member has a sheet material that is elastically deformable like a metal sheet, and a film having electrical insulation formed on one surface of the sheet material, and the electrical wiring is opposite to the sheet material. Is formed on the side of the film. Further, the probe sheet is bonded to the second surface of the support on the surface of the sheet-shaped member opposite to the electric wiring.

It is preferable that the support has a protrusion or a recess on the first surface that prevents the tip of the probe from coming into contact with the support. By doing so, since the tip of the probe is separated from the support, the spring force of the tip of the probe becomes larger, and better electrical contact can be obtained between the probe and the terminal of the DUT. .

It is preferable that the support has a hole or groove through which the tip of the probe can be seen from the side opposite to the first surface. With this configuration, the position of the probe with respect to the terminal of the inspection object can be visually observed through the hole or groove during the inspection.

The support is a rectangular parallelepiped further having a third surface on the side opposite to the second surface, and the second surface is closer to the second surface as it is away from the first surface. It is preferably an inclined surface that recedes to the side. By doing this, when stacking multiple probe units in parallel,
Since the interval formed between the adjacent probe units due to the lead wire connected to the electric wiring can be reduced, a plurality of probe units can be arranged at high density.

In a preferred embodiment, when the support is a rectangular parallelepiped which further has a third surface opposite to the second surface, the probe sheet has another part of the third surface. It is preferably bent so as to be located on the side, and each probe is physically separated from the sheet material at its tip portion. With this configuration, since the tip end portion of each probe is reliably separated from the first surface of the support body, each probe is reliably supported by the support body in a stable state. No loss of function.

The probe sheet further comprises a second probe formed by a plurality of probes formed at positions symmetrical to the first probe group formed by the plurality of probes.
And a second slit that physically separates adjacent probes of the second probe group, and each probe of the second probe group is formed on the sheet-like member. It is preferable that the plurality of second electric wirings are formed in a part thereof and are physically separated from the probes of the first probe group. With this configuration, a large number of probes can be formed on the probe sheet, and an object to be inspected having two symmetrically formed terminal groups can be inspected at once.

When a plurality of probe sheets are used, it is preferable to sequentially arrange the probe sheets on the support at intervals in one direction. With this configuration, one probe unit can be applied to inspect a plurality of inspected objects at the same time, and one probe unit can be applied to inspect one inspected object with a plurality of probe sheets. can do. Further, since the adjacent probe sheets are physically separated, even if the thermal expansion coefficients of the probe sheet and the support are different, the difference in thermal expansion and contraction between each probe sheet and the support affects the adjacent probe sheet. Therefore, the relative displacement between each probe and the terminal of the device under test is small.

The inspection head includes a substrate having a through hole,
And a probe unit as described above. The probe unit is arranged on the substrate with the first surface of the support protruding from one surface of the substrate. One probe unit may be arranged on the substrate, or a plurality of probe units may be arranged on the substrate in parallel. The substrate further includes a plurality of first electrodes electrically connected to the tester and a plurality of second electrodes connected to the electric wiring by a flexible belt-shaped wiring circuit board. You can

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 and 2, an inspection head 10 is used for an electric current test of an object to be inspected in which a large number of electrodes or terminals are arranged at a fine pitch like an integrated circuit. The inspection head 10 includes a disk-shaped substrate 12 and
A mounting frame 14 mounted in parallel on the board, a plurality of probe units 16 mounted on the mounting frame, and a flat cable 18 extending from each probe unit 16.
And The inspection head 10 is attached to an inspection device (not shown) such that the thickness direction of the substrate 12 is the vertical direction. It should be noted that FIG. 1 is shown with the flat cable 18 removed.

The substrate 12 has a rectangular through hole 20 in the central portion and a plurality of first electrodes or tester lands 22 electrically connected to an external tester on the outer peripheral portion. Further, it has a plurality of second electrodes or connectors 24 for connecting the flat cable 18 in the middle part.

The mounting frame 16 is fitted in the through hole 20 and is fixed to the substrate 12 by a plurality of screw members or adhesives so that it cannot be displaced. Probe unit 16
Are removably attached to the attachment frame 14 by a plurality of screw members (not shown). Flat cable 1
Reference numeral 8 is a flexible strip-shaped wiring circuit board formed by a printed wiring technique, and has a connector 26 at one end which is connected to the connector 24 of the substrate 12.

Referring to FIGS. 3 to 9, each probe unit 16 includes a support 30 having an elongated rectangular parallelepiped shape.
And a plurality (four in the illustrated example) of probe sheets 32 that are elastically deformable and are assembled to the support body at intervals in the longitudinal direction.

The support 30 has the shape of a pillar having a substantially quadrangular cross section, and has a plate-shaped mounting portion 34 projecting in the longitudinal direction from the upper end of each end face. The support body 30 is attached to the attachment frame 14 shown in FIGS. 1 and 2 by a screw member that is passed through a hole 36 formed in the attachment portion 34. The support 30 also has a plurality of through holes 38 that penetrate the support in the vertical direction. Each through hole 38 has a planar shape that is long in the longitudinal direction of the support body 30 and corresponds to the probe sheet 32.

As shown in FIG. 9, the lower surface 40 of the support 30.
Has a chevron shape whose height position gradually decreases from one side surface 42 side toward the center and then gradually increases toward the other side surface 44 side. The top of the chevron, that is, the downwardly projecting portion 46 is displaced to the side surface 42 on one side.

The support 30 is made of a material having a small coefficient of linear thermal expansion,
For example, it is preferably formed of a metal material commercially available under the trade name of Novinite, which can suppress the displacement of the measurement protrusion, that is, the contactor, with respect to the terminal of the device under test at the time of high temperature measurement.

As shown in FIGS. 7 to 9, each probe sheet 32 includes an elastically deformable sheet-like member 50, a plurality of electric wires 52 formed on the sheet-like member, and a wiring pattern, that is, electric wires 52. On one side 4 of the support 30
And an electrical insulating film 54 that covers the portion on the second side. Each probe sheet 32 is also bent into a U shape, that is, a U shape so that the electric wiring 52 is on the outside,
In the sheet member 50, the side surfaces 42, 44 of the support 30
Adhered to.

The sheet-like member 50 is made of a metal such as stainless steel and is elastically deformable like a sheet material 50a, and a material such as polyimide having an electrically insulating property. And an insulating film 50b formed on one surface thereof. The electric wiring 52 has a narrow and thin strip shape, and the sheet material 50a.
It is formed in parallel with the portion of the insulating film 50b on the opposite side.

Each electric wire 52 is continuous from one end of the sheet-like member 50 to the central portion thereof, and the central end portion thereof serves as a contact arm, that is, a probe 56. Each probe sheet 32 has a slit 58 that physically separates adjacent probes 56. The slit 58 physically separates the tip of the probe 56 from the sheet-like member 50.
Each probe 56 has a hemispherical protrusion 60 on the outside of the tip. The bumps or protrusions 60 are used as inspection contacts that come into contact with the terminals of the device under test.

Each probe sheet 32 has a corresponding probe 56.
Is on the side of the lower surface 40 of the support 30, each probe 56 abuts the protrusion 46 midway in the longitudinal direction, the tip of each probe 56 is located below the hole 38, and the tip of each probe 56 is Is bent in a U-shape so that it slightly protrudes downward from the sheet-shaped member 50, and the support 3
It is fixed to the 0 side surfaces 42 and 44 by mounting or the like. Of the lower surface of each probe sheet 32, a portion other than the probe 56 may be fixed to the lower surface 40 of the support 30 by adhesion or the like.

The electrically insulating film 54 is provided on the side surface 42 of the support 30.
Is formed in the portion corresponding to the lower part of. The flat cable 18 is a flexible printed wiring circuit board created by a printed wiring technique, and also has a lead portion corresponding to each electric wiring 52. The flat cable 18 is connected to the probe sheet 32 by means such as thermocompression bonding in a state where the ends of the lead portions are in contact with the corresponding electric wirings 52.

The probe unit 16 is arranged in parallel with the mounting frame 14 with the probe 56 facing downward and penetrates the mounting frame 14 in the vertical direction, and is screwed. In a state in which the plurality of probe units 16 are stacked in parallel, each electrically insulating film 54 prevents an electrical short circuit between the adjacent probe units even if the adjacent probe units come into contact with each other.

The mounting frame 14 to which the plurality of probe units 16 are mounted is assembled to the substrate 12 in a state in which the probe unit 16 penetrates the substrate 12 in the vertical direction so that the probe 56 faces downward.

When conducting an energization test on an object to be inspected such as an integrated circuit, the inspection head 10 is pressed against the object to be inspected so that the contacts 60 of each probe 56 come into contact with the terminals of the object to be inspected. . At this time, the position of the probe 56 with respect to the terminal of the inspection object can be visually confirmed through the hole 38.

When each contact 60 is pressed against the terminal of the object to be inspected, each probe 56 is elastically deformed. Each probe 56
Is deformed independently because it is physically separated from the adjacent probe 56. Therefore, the deformation of each probe 56 does not deform the adjacent probe 56 and does not reduce the spring force of the adjacent probe 56.

In the probe unit 16, the probe sheet 32 itself is elastically deformable, moreover, the probe 56 is located on the side of the lower surface 40 of the support 30 and the other portions are on both sides 42, 44 of the support 30. U to be located on the side of
Since the probe sheets 32 are bent in a letter shape and the probe sheets 32 are attached to the both side surfaces 42 and 44 of the probe sheets 32, the adjacent probe 56 is different from the conventional probe unit in which the probe sheets are planarly arranged on the support. Even if it is separated, the spring force of the probe 56 is large.

The elastic deformation of the probe 56 having a large spring force causes the contactor 60 and the terminal such as the wafer pad to be relatively displaced while being pressed against each other. This allows
Since part of the oxide film of the terminal is scraped off by the contactor 60, sufficient electrical contact can be obtained between the contactor 60 and the terminal. On the other hand, elastic deformation of the probe with a small spring force only causes slippage between the contact and the terminal, and the contact does not scrape a part of the oxide film of the terminal. Contactor 60 for sufficient electrical contact
And the terminal of the device under test cannot be obtained.

The probe unit 16 includes each probe 56.
By contacting the protruding portion 46 in the middle of its longitudinal direction, the tip end of each probe 56 is prevented from contacting the support body 30, so that the tip end portion of each probe 56 is separated from the lower surface 40 of the support body 30. Be separated. As a result, the spring force at the tip of the probe is larger, and better electrical contact can be obtained between each contact 60 and the terminal of the device under test.
Further, since the probe sheet 32 is bent in a U shape and is fixed to the side surfaces 42 and 44 of the support body 30, each probe sheet is reliably supported by the support body in a stable state. Does not lose its function.

According to the probe unit 16, since the plurality of probe sheets 32 are sequentially arranged on the support 30 in the one direction at the intervals 62, one probe unit 16 is arranged so as to simultaneously inspect a plurality of objects to be inspected. Can be applied, and one inspected object can be used as a plurality of probe sheets 32.
It is possible to apply one probe unit 16 so as to be inspected.

According to the probe unit 16, since the adjacent probe sheets 32 are physically separated by the space 62, even if the thermal expansion coefficients of the support 30 and the probe sheet 32 are different, the support 30 is different. The difference in thermal expansion and contraction between the probe sheet 32 and the probe sheet 32 does not affect the adjacent probe sheet 32, and therefore the relative displacement between each contact 60 and the terminal of the device under test is small. However, one probe sheet may be arranged on one support.

Since the inspection head 10 includes the plurality of probe units 16 arranged in parallel, it is possible to simultaneously inspect a plurality of objects to be inspected. However, the inspection head may include one probe unit.

The side surfaces 42, 44 of the support 30 may be inclined surfaces that recede toward the hole 38 as they move away from the lower surface 40. In this way, the plurality of probe units 16
Even when the probe units are stacked in parallel, the gap formed between the adjacent probe units, especially the gap required for the flat cable 18, can be reduced, so that a plurality of probe units can be arranged at high density. .

Probe unit 7 shown in FIGS. 10 to 12.
Reference numeral 0 denotes a support body 72 formed of a metal material having a small linear thermal expansion coefficient in the shape of a prism like the support body 30 described above, and a plurality of probe sheets manufactured by the printed wiring technique like the probe sheet 32 described above. 74 and.

The support 72 has a plate-shaped mounting portion 76 projecting in the longitudinal direction from the upper end of each end face.
1 through a screw member that is passed through a hole 78 formed in FIG.
And the mounting frame 14 shown in FIG. The lower surface 80 of the support body 72 is a flat surface, and the side surfaces 82 and 84 are inclined surfaces that recede toward the center side as they move away from the lower surface 80 due to the recesses formed in each probe sheet 74.

The support 72 has, for each probe sheet 74, a notch portion 86 formed by notching each corner portion on the side faces 82, 84 at the lower end and a groove 88 formed in each of the side faces 82, 84 and extending in the vertical direction. . The notch portion 86 and the groove 88 communicate with the corresponding probe sheet 74 so as to be visible from above.

Similar to the probe sheet 32, each probe sheet 74 has an elastically deformable sheet-like member 90, a plurality of first and second electric wirings 92 formed on the sheet-like member, and the first and second electric wires 92. And the second electric wiring to the supporting body 72.
And first and second electrically insulating films 94 respectively covering the side surfaces 82 and 84. Each probe sheet 74 also includes a first and second electrical wiring 9
It is bent in a U shape so that 2 is on the outside, and is fixed to the side surfaces 82 and 84 of the support body 72 in the sheet-shaped member 90 by adhesion or the like.

The sheet-like member 90, like the sheet-like member 50, is a sheet material 90a which is elastically deformable like a metal film, and a sheet material 90 made of an electrically insulating material.
an insulating film 90b formed on one surface of a. Similar to the electric wiring 52, the first and second electric wirings 92 have a narrow and thin strip shape, and are formed in parallel on the insulating film 90b.

First electric wiring 92 and second electric wiring 92
And are formed at positions symmetrical with respect to an imaginary line extending in the longitudinal direction of the support body 72. The first electric wiring 92 is continuous from one end of the sheet-shaped member 90 to the central portion,
The second electric wiring 92 is continuous from the other end of the sheet-shaped member 90 to the central portion. First and second electric wiring 9
2 is a first and a second probe 96 whose central end is symmetric with respect to an imaginary line extending in the longitudinal direction of the support 72.
And

Adjacent probes 96 are physically separated by slits 98 formed in each probe sheet 74. The tip of the probe 96 is also physically separated from the sheet-shaped member 90 by the slit 98. Each probe 96 has a hemispherical protrusion 100 on the outside of the tip. The bumps or protrusions 100 are used as inspection contacts that come into contact with the terminals of the device under test.

Each probe sheet 74 has a corresponding probe 96.
Is on the side of the lower surface 80 of the support 72, and each probe 9
6 is located below the groove 88, and each probe 9
The tip end of 6 is bent in a U shape and fixed to the side surface 82 of the support body 72 by mounting or the like so that the tip end portion of the sheet 6 slightly projects downward from the sheet-shaped member 90. Of the lower surface of each probe sheet 74, the portion other than the probe 96 may be fixed to the lower surface 80 of the support 72 by adhesion or the like. Adjacent probe sheets 74 are spaced by a distance 62.

Each electrically insulating film 94 is formed in a portion corresponding to the lower portion of the corresponding side surface 84 of the support 72.
Each flat cable 18 is connected to the probe sheet 74 by means such as thermocompression bonding with the end of each lead portion in contact with the corresponding electric wiring 92.

According to the probe unit 70, since each probe sheet 74 includes the first and second probe groups formed symmetrically and in parallel, a large number of probes can be formed on the probe sheet. It is possible to inspect an object to be inspected having two symmetrically formed terminal groups at one time.

Probe unit 1 shown in FIGS. 13 to 15
10 is an embodiment in which the width dimension, that is, the thickness dimension of the probe unit 16 shown in FIGS. 7 to 9 is improved. Therefore, the probe unit 110 includes the support 1
12 has been removed leaving a portion on the left side of the hole 38 of the support 30 in FIG.
The probe unit is formed in the same manner as the probe unit 16 shown in FIGS. 7 to 9 except that the corresponding portion of 4 is removed and each probe sheet 114 is bent in an L shape.

Since the probe unit 110 has a smaller width dimension, that is, a thickness dimension than the probe units 16 and 70, they can be arranged at a high density.

16 to 19 are views for explaining a method of manufacturing the probe unit 16 shown in FIGS. 1 to 9.

First, as shown in FIG. 16 (A), a thin stainless steel plate having a size capable of producing a plurality of probe sheets, that is, a polyimide material is applied to the entire surface of one side of the sheet material 50a to electrically conduct the probe sheet. The insulating film 50b is formed. Thereby, the sheet member 50 is formed.

Next, as shown in FIG. 16B, a wiring pattern made of gold is formed on the surface of the insulating film 50b by a printed wiring technique, that is, a photoengraving technique. As a result, a large number of electric wirings 52 extending from one end of the sheet-shaped member 50 to the central portion are formed in parallel.

Next, as shown in FIG. 16C, a polyimide material is applied to a part of the electric wiring 52 to form an electric insulating film 54.

Next, as shown in FIG. 17A, a contact 60 is formed on the tip of each electric wiring 52 by plating.

Next, as shown in FIG. 17B, the slit 58 is formed in the sheet member 50 by laser processing. As a result, the tip end of the electric wiring 52 is cut off, and the contact arm, that is, the probe 56, is connected to the electric wiring 52.
Formed at the tip of the

As described above, the sheet 120 integrally having a plurality of probe sheets is formed.

Next, as shown in FIGS. 18A and 18B, a groove 122 for bending the sheet 120 is formed on the other surface (back surface) of the sheet material 50a by laser processing.

Next, as shown in FIG. 18C, the sheet 120 is bent into a U shape. As a result, the tip of each probe 56 slightly projects outward from the sheet 120.

Next, as shown in FIG. 19 (A), the U-shaped bent sheet 120 is adhered to the support 30 which is manufactured in a predetermined shape in advance.

Next, as shown in FIG. 19B, the sheet 120 is laser-processed into a plurality of probe sheets 32.
Divide into. Thereby, the adjacent probe sheets 32
A gap 62 is formed therebetween.

Next, as shown in FIG. 19C, the flat cable 18 is bonded to each probe sheet 32 by thermocompression bonding while each lead portion is in contact with the electric wiring.

As described above, if the probe sheet is manufactured by using the printed wiring technique, a large amount of the probe sheet can be easily manufactured, and the probe sheet itself becomes inexpensive.

The present invention is not limited to the above embodiment. For example, the sheet-shaped member may be a single sheet material having electrical insulation and elastically deformable.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of an inspection head using a probe unit of the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

FIG. 3 is a plan view showing an embodiment of the probe unit of the present invention.

FIG. 4 is a front view of the probe unit shown in FIG.

5 is a bottom view of the probe unit shown in FIG.

6 is a right side view of the probe unit shown in FIG.

FIG. 7 is a front view showing an example of a probe sheet.

FIG. 8 is a bottom view of the probe sheet shown in FIG.

FIG. 9 is a sectional view taken along line 9-9 in FIG. 7;

FIG. 10 is a front view showing another embodiment of the probe sheet.

11 is a bottom view of the probe sheet shown in FIG.

12 is a cross-sectional view taken along line 11-11 of FIG.

FIG. 13 is a front view showing still another embodiment of the probe sheet.

FIG. 14 is a bottom view of the probe sheet shown in FIG.

FIG. 15 is a sectional view taken along line 13-13 of FIG.

16 is a diagram for explaining a step of the method for manufacturing the probe sheet shown in FIG. 7. FIG.

FIG. 17 is a view for explaining the process following the process in FIG.

FIG. 18 is a diagram for explaining the process following the process in FIG.

FIG. 19 is a diagram for explaining the process following the process in FIG.

[Explanation of symbols]

 10 Inspection Head 12 Substrate 14 Mounting Frame 16, 70, 112 Probe Unit 18 Flat Cable 20 Substrate Hole 30, 72, 112 Support 32, 74, 114 Probe Sheet 38 Support Bore 46 Support Protrusion 50, 90 sheet-like member 52,92 electrical wiring 54,94 electrical insulating film 56,96 probe 58,98 slit 60,100 contact 62 spacing 86 support groove 88 support notch 5-a, 90a sheet material 50b , 90b Electrically insulating film

Claims (13)

[Claims] 1. An elastically deformable probe sheet comprising a support having first and second surfaces that are at an angle to each other, and a sheet-shaped member and an elastically deformable probe sheet including a plurality of electric wirings formed on the sheet-shaped member, The probe sheet serves as a probe for connecting a part of the electrical wiring to an electrode of a device under test, and has a slit that physically separates adjacent probes, and at least the tip of the probe supports the support. A probe unit located on the side of the first surface of the body and bent so that at least another part of the probe sheet is located on the side of the second surface of the support. 2. The probe unit according to claim 1, wherein the probe sheet further includes an electrical insulating film that covers the electrical wiring at a portion on the second surface side of the support body. 3. The probe unit according to claim 1, wherein the probe sheet is bonded to a second surface of the support on a surface of the sheet-shaped member opposite to the electric wiring. 4. The support according to claim 1, wherein the support has a protrusion or a recess on the first surface that prevents the tip of the probe from coming into contact with the support. The described probe unit. 5. The probe unit according to claim 1, wherein the support has a hole or a groove that allows the tip of the probe to be viewed from the side opposite to the first surface. 6. The support is a rectangular parallelepiped further having a third surface on the side opposite to the second surface, and the second surface is closer to the second surface as it is farther from the first surface. 6. An inclined surface that recedes to the side opposite to the above.
The probe unit according to the item. 7. The support is a rectangular parallelepiped further having a third surface opposite to the second surface, and the probe sheet has another part thereof located on the side of the third surface. The probe unit according to any one of claims 1 to 6, wherein each probe is physically separated from the sheet material at a tip portion thereof. 8. The probe sheet further comprises a second probe group composed of a plurality of probes formed at symmetrical positions with respect to a first probe group composed of the plurality of probes, and The second probe group has a second slit that physically separates adjacent probes from each other, and each probe of the second probe group includes a plurality of second electrical electrodes formed on the sheet-shaped member. The probe unit according to claim 7, which is formed on a part of the wiring and is physically separated from the probes of the first probe group. 9. The plurality of probe sheets are sequentially arranged on the support at intervals in one direction.
The probe unit according to claim 1. 10. The probe unit according to claim 1, further comprising a flexible flat cable having a lead portion connected to each electric wiring. 11. A substrate having a through hole, and claims 1 to 1.
1. The probe unit according to any one of 1, wherein the probe head is arranged on the substrate in a state where the first surface of the support body protrudes from one surface of the substrate. 12. The inspection head according to claim 11, wherein a plurality of the probe units are arranged in parallel on the substrate. 13. The substrate further includes a plurality of first electrodes electrically connected to a tester, and a plurality of second electrodes connected to the electric wiring by a flexible strip-shaped wiring circuit board. The inspection head according to claim 11, further comprising an electrode.