JPH09278408A - Ozone generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator which is compact, is inexpensive and has high ozone generation efficiency and cooling efficiency. SOLUTION: This ozone generator is constituted to have a vessel 1 provided with a supply port 11 and a discharge port 12, an ozone generating element 2 which is disposed in this vessel 1 and is provided with a discharge electrode 23 and counter electrode 22 across a flat planar dielectric substance and a power source 3 for impressing a high-frequency voltage on the discharge electrode 23. In such a case, the one flank of the vessel 1 is provided with the supply port 11 and the discharge port 12. The ozone generating element 2 is arranged with the vessel 1 between the supply port 11 and the discharge port 12 and is provided with a space C between the end of the ozone generating element 2 and the other flank 1b of the vessel 1 so that the gaseous raw material is supplied from the supply port 11 via the space C to the discharge electrode 23.

Description

Detailed Description of the Invention

[0001]

The present invention relates to an ozone generator for generating ozone by creeping discharge.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 2, a creeping discharge type ozone generator has one or more discharge electrodes arranged in the same plane in a container 1 made of a material having high ozone resistance. Japanese Patent Application Laid-Open No. 6-183702 discloses a device including the ozone generating element 2 described above, and the ozone generating elements 2 arranged in parallel on the same plane. In this case, the ozone generating element 2 has a flat plate-shaped counter electrode 22 in a dielectric 21 made of flat plate-shaped ceramics.
And a flat discharge electrode 2 on the surface of the dielectric 21.
3 is arranged and a high frequency high voltage is applied to the discharge electrode 23 by the power supply 3. A supply port 11 is provided on one side of the container 1 so that a raw material gas containing oxygen molecules is supplied into the container 1 as shown by an arrow, and an exhaust port 12 is provided on the other side to perform ozonization. It is designed to discharge gas. When a high frequency high voltage is applied to the discharge electrode 23, discharge is generated from the end face of the discharge electrode 23 in the creeping direction of the dielectric 21. If oxygen molecules in the raw material gas are present in the creeping discharge region, a part thereof becomes ozone and is discharged from the discharge port 12. Further, for example, as shown in FIG. 3, a container 1 in which a tubular ozone generating element 2 is formed is disclosed (JP-A-6-234507). That is, the discharge electrode 23 is formed on the inner wall of the tubular dielectric body 21 made of a glass tube whose one end is closed, and the counter electrode 22 is arranged outside the dielectric body 21 with a gap. A cooling water jacket 13 for cooling is provided outside the counter electrode 22.
In this case, as shown by the arrow, the raw material gas is supplied from the opening of the tubular dielectric 21 in the direction of the closed portion by the supply pipe 14, and the discharge by the discharge electrode 23 is performed while the raw material gas is flowing from the closed portion to the opening. Is converted into ozone and is discharged from the opening to the outside of the container 1 through the outside of the dielectric 21.

[0003]

However, in the former prior art, since the ozone generating elements are arranged in parallel on the same plane, the raw material gas diffuses from the supply port to the discharge region of each discharge electrode. At this time, there is a problem that the distance from the supply port to each discharge electrode changes, the distribution of the raw material gas becomes non-uniform, and the supply of the raw material gas to the discharge surface of the ozone generating element becomes inefficient. Further, since the raw material gas only flows in contact with one surface of the dielectric, the cooling efficiency is poor, the temperature of the dielectric rises, and the ozone generation efficiency decreases. In the latter conventional technique, since the ozone generating element is tubular, it is necessary to increase the diameter in order to increase the capacity. Therefore, the volume of the ozone generating element itself becomes large, and the ozone having the flat ozone generating element is required. There is a problem that it is more expensive than the generator. The present invention provides a compact, inexpensive ozone generator with high ozone generation efficiency and cooling efficiency by using a flat-plate ozone generation element and by uniformly distributing a source gas with respect to a discharge electrode. It is intended.

[0004]

In order to solve the above-mentioned problems, the present invention relates to a container having a supply port and a discharge port, and a discharge electrode provided in the container with a flat plate-shaped dielectric material interposed therebetween. In an ozone generator comprising an ozone generating element having a counter electrode and a power source for applying a high frequency high voltage to the discharge electrode, the supply port and the discharge port are provided on one side surface of the container, The ozone generating element has the container arranged between the supply port and the discharge port, and a space is provided between the end of the ozone generating element and the other side surface of the container, and the source gas is The discharge electrode is supplied from the supply port through the space. Further, the counter electrode is provided with an insulating plate covering the surface thereof, and the surface of the insulating plate is provided with a heat sink having cooling fins extending along the flow of the raw material gas. Further, the cooling fins are arranged such that the pitch between the adjacent cooling fins becomes smaller as the pitch becomes closer to the supply port.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below with reference to embodiments shown in the drawings. FIG. 1 is a front sectional view (a), a side sectional view (b) and a plane sectional view (c) showing an embodiment of the present invention. In the figure, 1 is a container, 11 is a supply port provided at the position of the upper half of one side surface 1a on one side of the container 1, and a source gas containing oxygen molecules is supplied into the container 1; The ozonized gas is discharged through the discharge port provided at the position of the lower half of the side surface 1a. Reference numeral 2 denotes an ozone generating element arranged in the center of the container 1, and spaces A and B are formed between both surfaces of the ozone generating element and the container 1.
Reference numeral 21 is a dielectric made of flat ceramics, one end of which is fixed at a position sandwiched between the supply port 11 and the discharge port 12 of the side surface 1a, and the other end of which is a space between the other side surface 1b of the container 1. Opposite with C open. Reference numeral 22 denotes a flat plate-shaped counter electrode provided on the surface of the dielectric body 21, and 23 denotes a plurality of flat plate-shaped electrodes arranged in parallel on the surface of the dielectric body 21 on the opposite side to the side where the counter electrode 22 is provided. 2 is an insulating plate that covers the counter electrode, and 3 is a power source that applies a high frequency high voltage to the discharge electrode 23. Reference numeral 4 denotes a heat sink provided on the surface of the insulating plate 24 and having an end surface closely attached to the container 1 and made of a material having high thermal conductivity such as aluminum.
1 is provided with a plurality of cooling fins 41 extending along the flow of the raw material gas toward the side surface 1b, and the pitch between the cooling fins 41 adjacent to each other is arranged so that the pitch becomes closer to the supply port 11 and becomes smaller. There is.

With such a configuration, the raw material gas 22 supplied from the supply port 11 passes through the space A between the cooling fins 41 of the heat sink 4 to cool the ozone generating element 2 and the width of the ozone generating element 2. While diffusing in the direction, it is inverted in the space C and enters the space B. In the space B, the source gas is the discharge electrode 2
3 is made ozonized and flows out of the exhaust port 12 to the outside. In this way, the source gas is diffused in the width direction of the ozone generating element 2 from the narrow supply port 11 by the cooling fin and is flowed to the surface of the dielectric 21 having the discharge electrode 23, so that the distribution of the source gas is in the width direction. Becomes almost uniform,
The efficiency of supplying the source gas to the discharge surface of the ozone generating element is improved. Further, since the raw material gas diffuses in the width direction of the dielectric 21 and is cooled, the dielectric 21 improves the cooling efficiency of the dielectric 21.

[0007]

As described above, according to the present invention, the source gas supply port is provided so that the source gas flows from one surface to the other surface of the flat plate-shaped ozone generating element provided in the container. And a discharge port, a heat sink is arranged on one surface of the ozone generating element, and the cooling fins of the heat sink cause the raw material gas to diffuse from the supply port in the width direction of the ozone generating element and flow to the surface of the discharge electrode. Since the distribution of the source gas is made substantially uniform in the width direction, there is an effect that it is possible to provide a compact ozone generator capable of improving not only the ozone generation efficiency but also the cooling efficiency.

[Brief description of drawings]

FIG. 1A is a front sectional view showing an embodiment of the present invention,
(B) Side sectional view and (c) Plan sectional view.

FIG. 2 is a front sectional view showing a conventional example.

FIG. 3 is a front sectional view showing another conventional example.

[Explanation of symbols]

1: container, 1a, 1b: side surface, 11: supply port, 12: discharge port, 2: ozone generating element, 21: dielectric, 22: counter electrode, 23: discharge electrode, 3: power supply, 4: heat sink,
41: Cooling fin

Claims (3)

[Claims] 1. A container provided with a supply port and a discharge port, an ozone generating element provided in the container and having a discharge electrode and a counter electrode sandwiching a flat plate-shaped dielectric, and the discharge electrode. In an ozone generator having a power supply for applying a high-frequency high voltage to the container, the supply port and the discharge port are provided on one side surface of the container, and the ozone generation element includes the container for the supply port and the discharge port. And a space is provided between the end of the ozone generating element and the other side surface of the container, and a source gas is supplied from the supply port to the discharge electrode through the space. An ozone generator characterized in that. 2. The ozone according to claim 1, wherein the counter electrode is provided with an insulating plate covering the surface thereof, and the surface of the insulating plate is provided with a heat sink having cooling fins extending along the flow of the source gas. Generator. 3. The ozone generator according to claim 2, wherein the cooling fins are arranged such that a pitch between the adjacent cooling fins becomes smaller as the pitch becomes closer to the supply port.