JPH09274854A - Manufacture of shadow mask - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate the foreign material, which is adhered to the shadow mask material at the time of peeling a film, and to shorten the process distance to be required for the film peeling process by jetting the high-pressure water to a metal raw material with the water-jet method. SOLUTION: An opening 3 is formed so as to pass through a shadow mask material 1, and film peeling processing of a resist film and an etching preventing layer is concluded in a film peeling vessel 6, and the shadow mask material 1 is carried from the left to the right. High-pressure water is jetted to the shadow mask material 1, of which film peeling processing is concluded, by the water-jet method so as to blow the foreign material adhered to the shadow mask material 1 at the time of film peeling processing. At this stage, the high- pressure water, which is pressurized by a pressurizing device, is jetted from a high-pressure nozzle 9 to the shadow mask material 1 carried inside of a washing chamber 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a shadow mask having a plurality of openings penetrating a metal material by a photoetching method, and particularly to a high-definition shadow having a small opening diameter and a large number of openings. The present invention relates to a mask manufacturing method.

[0002]

2. Description of the Related Art Conventionally, a shadow mask used for a color picture tube or the like has generally been manufactured by a process using a photoetching method. For example, FIG. 3 shows an example of a manufacturing process of a shadow mask using a photo etching method. That is, for example, a low carbon steel plate having a thickness of 0.13 mm is used as a metal material (hereinafter, referred to as a shadow mask material 1), and both surfaces thereof are degreased, surface-treated and washed, and then casein or polyvinyl alcohol and heavy chromium are applied to both surfaces. A water-soluble photosensitive solution composed of ammonium acid or the like is applied and dried to form a photosensitive resin layer.

Then, a small-hole image negative pattern is exposed on one surface of the shadow mask material 1 and a large-hole image negative pattern is exposed on the other surface through an exposure mask having a predetermined pattern. After that, a developing treatment for dissolving the photosensitive resin layer in the unexposed and uncured portion is performed with warm water, and then the remaining photosensitive resin layer is subjected to a hardening treatment and a burning treatment. As shown in FIG. 5, a small-hole side corrosion-resistant coating (hereinafter referred to as resist film 2) in which the shadow mask material 1 is exposed through the opening and a large-hole side resist film 2b are obtained.

Then, etching is performed from both sides of the shadow mask material 1 to form an opening 3 penetrating the shadow mask material 1 as shown in FIG. 3 (b). Then, FIG.
As shown in (c), the resist film 2 is brought into contact with a stripping solution such as an alkaline solution, and after the resist film 2 is stripped, washing and drying are performed. After that, the shadow mask 4 is obtained by cutting unnecessary portions.

There is also a method of dividing the etching into two steps, forming an etching prevention layer in addition to the resist film 2 as a corrosion resistant film, and forming an opening 3 penetrating the shadow mask material 1. For example, after forming the resist film 2 having an opening, the first stage etching is performed halfway from the front and back surfaces of the shadow mask material 1 to form a small hole concave portion on the small hole resist film 2a side and a large hole resist film 2b side. A large hole recess is formed. Then, for example, a photocurable resin is applied and filled in the concave portion on the small hole side by a gravure coating method or the like, and then the resin is irradiated with light to form an etching prevention layer on the small hole resist film 2a side. Then, the second stage etching is performed from the large hole resist film 2b surface side to form the opening 3 penetrating from the large hole side to the small hole.
Then, the resist film, which is a corrosion resistant film, and the etching prevention layer are peeled off to obtain a shadow mask.

[0006]

However, in the shadow mask obtained by the photoetching method described above,
When the resist film and the etching prevention layer are stripped from the shadow mask material 1, there arises a problem that residues of the resist film and the etching prevention layer adhere to the shadow mask material 1 as foreign matter.

Conventionally, the step of stripping the etching prevention layer and the resist film after etching is performed by the method shown in the example of FIG. First, for example, an alkali solution having a solution temperature of 80 ° C. and 20% by weight of caustic soda is used as the film stripping solution 15, and the shadow mask material 1 is immersed in the film stripping tank 6 containing the film stripping solution 15 to form an etching prevention layer and a resist. After performing the stripping treatment of the corrosion resistant coating made of a film, for example, a water spray nozzle
Washing with water is performed in the washing chamber 7 having 14. After that, it is dried in a drying furnace 8 such as an infrared heater. However, in the conventional film-removing treatment, a part of the corrosion-resistant film becomes a minute slag and remains adhered to the shadow mask material 1 without being film-deposited, or the corrosion-resistant film peeled in the film removing tank 6 A part of the slag becomes slag, and the slag reattaches to the shadow mask material 1 transported in the film stripping tank 6. In the washing and washing performed in the washing chamber 7 after the stripping treatment performed in the stripping tank 6, the spray pressure of water is low, for example, about 2 to 8 kg / cm ² . Since the washing pressure for washing with water is low, a foreign substance (hereinafter simply referred to as a foreign substance 5) composed of an etching prevention layer and a residue of the resist film attached to the shadow mask material 1
Cannot be completely removed from the shadow mask material 1 and remains attached to the shadow mask 4 as shown in FIG.

The foreign matter remaining on the shadow mask material 1 even after washing with water is firmly stuck to the shadow mask material 1 during drying after washing with water.
The foreign matter 5 that was once firmly stuck to the shadow mask could not be easily removed even by rubbing it with a brush or the like.

Therefore, particularly, as shown in FIG. 4, when the portion where the foreign matter 5 is attached is the opening 3, the following problems will occur. That is, it is general to inspect whether or not the opening 3 formed in the shadow mask by etching has a desired shape after the film peeling step. For example, as an inspection method,
Light is irradiated from one surface of the shadow mask, and then the inspection machine provided on the other surface of the shadow mask receives the light that has passed through the opening 3 of the shadow mask, and the quality of the opening shape is judged based on this transmitted light. The way to do is raised. In addition, since many openings 3 formed in the shadow mask must be inspected, and manual inspection is time-consuming, mechanical inspection, that is, inspection using an automatic inspection machine is generally performed. There is.

However, even if the opening 3 having a desired shape is formed by etching, if the foreign matter 5 adheres to the opening 3, the foreign matter 5 may be present during the above-described inspection.
The adhered part of the shadow becomes a shadow, and it is determined that the shape is defective. For this reason, even if the desired opening shape, an error that is determined to be a defective shape due to adhesion of foreign matter, that is, a pseudo error, frequently occurs in the inspection by the automatic inspection machine, and the accuracy of the inspection by the automatic inspection machine is lowered. I can say.

For this reason, when a shape defect is detected by the automatic inspection machine, it is manually inspected again by using a magnifying glass such as a microscope whether the detected shape defect is a pseudo error due to adhesion of foreign matter or a true shape defect. It had to be done, and it took time and effort for re-examination. Further, as a result of the re-inspection, if the defective shape is due to the adhesion of foreign matter, the foreign matter 5 is manually removed by using a brush or the like. However, as described above, the foreign matter 5 sticks firmly to the shadow mask, and it can be said that the removal is difficult and time-consuming. In addition, if the inspection accuracy of the automatic inspection machine is lowered to reduce the detection of pseudo errors, the true shape defect may not be detected and the shadow mask with the defective shape may flow out as a good product. Is also pointed out as a problem.

Further, the shape of the opening 3 formed in the shadow mask is preset so that the color picture tube or the like can exhibit desired performance when the shadow mask is incorporated in the color picture tube or the like. is there. However, if the foreign matter 5 remains attached to the opening 3 of the shadow mask during the film peeling process, the color cathode ray tube or the like may not be able to exhibit the desired performance when the shadow mask is incorporated into the color cathode ray tube or the like. It can be said that there is.

As described above, if foreign matter remains attached to the shadow mask in the film peeling process, it takes time and effort for the inspection, the inspection accuracy is deteriorated, and the quality of the shadow mask is deteriorated. This is a problem in terms of production efficiency and quality of the shadow mask.

Further, the conventional shadow mask manufacturing method requires a long equipment for the film removing step. Generally, the shadow mask material 1 is supplied from a metal roll and has a long strip shape. As shown in FIG. 5, when the film stripping process is performed, the long strip-shaped shadow mask material 1 to be transported is stripped for 6 minutes, for example, for about 6 minutes.
Since it has to be dipped therein, it requires a film stripping tank 6 having a long distance. Further, the water washing chamber after the film peeling treatment also requires a distance of, for example, about 10 m. For this reason, the space for the film stripping facility is taken up, and the facility cost of the transport system, heating device, etc., and the maintenance cost such as the temperature maintenance of the stripping solution, the cost of the renewal material of the solution, etc. increase, and the manufacturing cost of the shadow mask increases. It can be said to be one of the factors.

The present invention has been made in view of the above circumstances. That is, a method for manufacturing a shadow mask that solves the above-mentioned problems is provided by removing the foreign matter 5 attached to the shadow mask material 1 in the film removing process and shortening the process distance required for the film removing process. The purpose is to do.

[0016]

In order to achieve the above object in the present invention, first, in claim 1, a plate-shaped shadow mask metal material on which a corrosion-resistant coating having a predetermined pattern is formed is etched. Then, in the method of manufacturing a shadow mask obtained by performing at least a film removing step of removing the corrosion-resistant film by an etching step of obtaining a large number of openings penetrating the metal material, during the film removing step, This is a method for producing a shadow mask, characterized in that a water jet method is used to spray high-pressure water on a metal material to be transported after the corrosion-resistant coating film is stripped by a stripping solution.

According to a second aspect of the present invention, an etching step of etching a plate-shaped shadow mask metal material on which a corrosion-resistant coating having a predetermined pattern is formed to obtain a large number of openings penetrating the metal material, In the method for producing a shadow mask obtained by performing at least a film removing step of removing the corrosion resistant film, in the film removing step, at least the corrosion resistant film is swollen by a film removing solution, and then a water jet method is used. The method for producing a shadow mask is characterized in that high-pressure water is sprayed on a metal material to remove the corrosion-resistant coating.

Furthermore, in Claim 3, the spray pressure of the high-pressure water is set to 50 to 600 Kgf / cm ^2, and the method for producing a shadow mask according to Claim 1 or 2 is provided. According to a fourth aspect of the present invention, there is provided the method of manufacturing a shadow mask according to the first, second or third aspect, characterized in that the high pressure water jetted onto the metal material is circulated through a foreign matter removing filter.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, the shadow mask material 1 is supplied from a metal roll and has a long strip shape. In the shadow mask material 1, according to the process described in the above-mentioned section (prior art), etching is completed as usual, and an opening 3 penetrating the shadow mask material 1 is formed.
In the stripping tank 6 shown in FIG. 3, the stripping process of the resist film and the etching prevention layer has been completed, and the film is transported from left to right.

Next, in the present invention, high-pressure water is sprayed onto the shadow mask material 1 that has been subjected to the film stripping process by the water jet method, and the foreign substances attached to the shadow mask material 1 by the film stripping process are blown off and removed. It is characterized by that.

That is, as shown in FIG. 1, in the water washing chamber 7, the shadow mask material 1 to be conveyed is sprayed with high-pressure water from the high-pressure spray nozzle 9 to pressurize the shadow mask material 1 to a high pressure. . At this time, the present inventors have empirically found that if the spray pressure of the high-pressure water is set to about 50 to 600 Kgf / cm ² , the foreign matter can be removed to such an extent that there is no practical problem. It is a proposal. In the example of FIG. 1, high-pressure water is sprayed from both sides of the shadow mask material 1 to be conveyed. However, when the purpose is to remove foreign matter adhering to the openings 3, It can be said that high-pressure water injection from only one side is acceptable.

Since the conventional water washing chamber uses low pressure water washing, the distance between the water washing chambers has to be increased and the removal of foreign substances adhering to the shadow mask material 1 is incomplete. However, as shown in FIG. 1, by removing foreign matters using high-pressure water, the distance between the washing chambers can be reduced to, for example, about half of the distance between the washing chambers used in the past, and the foreign matter removal is performed. Is entirely possible.

Next, the inventors of the present invention claim 1 as described above.
As a modification of the invention relating to, it is proposed to use high-pressure water jet also for the stripping treatment of the resist film and the etching prevention layer. That is, as the invention according to claim 2, at the time of the film stripping treatment, at least the corrosion resistant coating is swollen with an alkaline solution, and thereafter, high pressure water is sprayed onto the metal material by a water jet method to remove the stripping of the corrosion resistant coating. This is a method for manufacturing a shadow mask, which is characterized by performing

In FIG. 2, the shadow mask material 1 is supplied from a metal roll and has a long strip shape. The shadow mask material 1 has been etched up to the conventional manner according to the process described in the above-mentioned (Prior Art) section, etc., the opening 3 penetrating the shadow mask material 1 is formed, and the shadow mask material 1 is conveyed from left to right. It is a thing.

Next, for example, caustic soda 20% by weight, liquid temperature
The conveyed shadow mask material 1 is immersed in a film stripping tank 6 containing an alkaline solution at 80 ° C. as a film stripping solution 15. Here, in the present invention, the immersion in the film stripping tank 6 is not intended to strip the corrosion-resistant coating as in the conventional case, but strips the corrosion-resistant coating formed on the shadow mask material 1. The purpose is to swell with the liquid 15 and reduce the adhesive force to the shadow mask material 1. Therefore, the immersion time of the shadow mask material 1 in the stripping solution 15 is, for example, about half of the conventional immersion time. That is, the length of the film stripping tank 6 used in the present invention can be as short as about half of that of the conventional film stripping tank.

Next, in the water washing chamber 7, the film stripping tank 6
The high pressure spray nozzle 9 injects water, which has been pressurized to a high pressure by a pressure device, to the shadow mask material 1 that has exited. As a result, the corrosion-resistant coating film, which is swollen with the film removing liquid 15 and whose adhesion to the shadow mask material 1 is reduced, can be easily removed from the shadow mask material 1 by the water pressure of high-pressure water.
At this time, the peeled corrosion-resistant coating film has a residual capacity of high-pressure water other than that used for peeling from the shadow mask material 1,
It is prevented from being blown off from the shadow mask material 1 and adhering to the shadow mask material 1 as a foreign matter.
In addition, even if foreign matter adheres to the shadow mask material 1, the foreign matter is easily removed by the water pressure of the high pressure water.

Even with the spray pressure of the high-pressure water at this time, if the spray pressure is about 50 to 600 Kgf / cm ² ,
The present inventors have empirically obtained and proposed that the corrosion-resistant coating can be stripped and foreign matter can be removed to the extent that there is no practical problem.

In the film stripping step shown in FIG. 2 described above, the distance of the film stripping tank 6 can be made shorter than that of the conventional film stripping tank by, for example, about half, and high pressure water is also used in the washing chamber 7 to form a corrosion resistant coating. By removing the film and removing foreign matter at the same time,
The length of the washing chamber conventionally used can be reduced to, for example, about half. As a result, the length of the devices required for the film peeling process can be shortened, and the foreign matter can be completely removed.

Next, the inventors of the present invention propose to circulate and reuse the water used for foreign matter removal, including the viewpoint of resource saving and pollution prevention. As shown in FIGS. 1 and 2, the water accumulated in the bottom portion of the washing chamber 7 after being sprayed in the washing chamber 7 is pumped up by the circulation pump 10 and circulated.

In the circulating water, the slag of the corrosion resistant coating removed from the shadow mask material 1 is deposited as foreign matter. Therefore, if the water in which foreign matter is deposited is circulated as it is and is jetted from the high-pressure spray nozzle 9, the foreign matter in the circulating water once removed from the shadow mask material 1 will reattach to the shadow mask material 1, and high pressure The spray nozzle 9 may be clogged. Therefore, a foreign matter removal filter 11 is provided in the circulating water path to remove foreign matter in the circulating water. By the way, in the examples of FIGS. 1 and 2, the water circulation path is indicated by a dotted line. In the example of FIG. 2, circulating water may be used as the water supplied to the low-pressure washing spray nozzle 14. The present inventors have empirically obtained that the foreign matter removal filter 11 can remove foreign matter in the circulating water to the extent that there is no practical problem if the filter diameter is about 10 μm.

In the shadow mask manufacturing method of the present invention, as shown in FIGS.
The shadow mask material 1 exiting from the above is passed through a drying furnace 8 and dried, and then a necessary process such as cutting is performed as usual to obtain a shadow mask.

The embodiment of the present invention is not limited to the above-mentioned drawings and description, and it goes without saying that various modifications can be made based on the spirit of the present invention. For example, a plurality of high-pressure spray nozzles 9 may be provided in accordance with the width of the shadow mask material 1 and the conveying speed, and high-pressure water may be sprayed onto the shadow mask material 1. Further, in order to improve the foreign matter removal efficiency, the high-pressure spray nozzle 9 may be used. It is also possible to inject high-pressure water onto the shadow mask material 1 while oscillating 9. Further, in order to prevent the rust generation of the shadow mask, a rust preventive agent may be added to the high pressure water.

[0034]

In the method for manufacturing a shadow mask according to the present invention, it is possible to remove foreign matters attached to the shadow mask material 1 by jetting high pressure water using the water jet method described above. Also, as mentioned above,
If jetting of high-pressure water is also used for the film removal process, the equipment distance in the film removal step can be shortened and foreign matter can be prevented from adhering to the shadow mask material 1. As a result, as described in the above (Problems to be solved by the invention), the present invention is caused by the adhesion of foreign matter, which makes the inspection time-consuming and deteriorates the inspection accuracy, and the quality of the shadow mask. To reduce the manufacturing efficiency and quality of the shadow mask. Further, the equipment distance of the film stripping step used in the present invention, for example, because it can be shortened to about half of the conventional, the facility cost does not take place, the transportation system, equipment costs such as a heating device, and the temperature maintenance of the film stripping solution, It can be said that the present invention is practically excellent in that maintenance costs such as liquid renewal material costs are low.

[0035]

[Brief description of drawings]

FIG. 1 is an explanatory view showing a main part of an embodiment of a method for manufacturing a shadow mask of the present invention.

FIG. 2 is an explanatory diagram showing a main part of another embodiment of the shadow mask manufacturing method of the present invention.

3A to 3C are cross-sectional views showing an example of a method of manufacturing a shadow mask in the order of steps.

FIG. 4 is an explanatory diagram showing an example of foreign matter adhesion.

FIG. 5 is an explanatory view showing an example of a conventional film peeling process.

[Explanation of symbols]

 1 Shadow Mask Material 2 Resist Film 3 Opening 4 Shadow Mask 5 Foreign Material 6 Stripping Tank 7 Washing Chamber 8 Drying Furnace 9 High Pressure Spray Nozzle 10 Pump 11 Filter 12 Transport Roll 13 Backing Roll 14 Washing Spray Nozzle 15 Stripping Liquid

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Satoshi Tsunashima 1-5-1 Taito, Taito-ku, Tokyo Toppan Printing Co., Ltd.

Claims (4)

[Claims] 1. An etching step of etching a plate-shaped shadow mask metal material having a corrosion resistant coating having a predetermined pattern to obtain a large number of openings penetrating the metal material, and removing the corrosion resistant coating. In the method for producing a shadow mask obtained by performing at least a film stripping step, in the film stripping step, after the corrosion resistant coating is stripped by a stripping solution, a water jet method is used for the metal material to be transported. A method for manufacturing a shadow mask, which comprises spraying high-pressure water. 2. An etching step of etching a plate-shaped shadow mask metal material having a corrosion resistant coating having a predetermined pattern to obtain a large number of openings penetrating the metal material, and removing the corrosion resistant coating. In the method for producing a shadow mask obtained by performing at least the film stripping step, in the film stripping step, at least the corrosion-resistant coating film is swollen with a stripping solution, and thereafter, high pressure water is used as a metal material by using a water jet method. A method for producing a shadow mask, characterized in that the peeling of the corrosion-resistant coating is performed by spraying onto the surface. 3. The spray pressure of the high-pressure water is 50 to 600 Kgf / cm.
^The method of manufacturing a shadow mask according to claim 1 or 2, wherein the number is 2. 4. The method of manufacturing a shadow mask according to claim 1, wherein the high-pressure water sprayed onto the metal material is circulated through a foreign matter removing filter.