JPH09253642A - Pure water making apparatus - Google Patents
Pure water making apparatusInfo
- Publication number
- JPH09253642A JPH09253642A JP8070173A JP7017396A JPH09253642A JP H09253642 A JPH09253642 A JP H09253642A JP 8070173 A JP8070173 A JP 8070173A JP 7017396 A JP7017396 A JP 7017396A JP H09253642 A JPH09253642 A JP H09253642A
- Authority
- JP
- Japan
- Prior art keywords
- exchange resin
- water
- cation exchange
- pure water
- resin column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は純水製造装置に係
り、特に、水中の酸素、炭酸及び電解質を効率的に除去
することができる純水製造装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pure water producing apparatus, and more particularly to a pure water producing apparatus capable of efficiently removing oxygen, carbonic acid and an electrolyte in water.
【０００２】[0002]
【従来の技術】従来のボイラ給水用又は半導体プロセス
用の純水製造装置は、一般に強酸性陽イオン交換樹脂塔
及び強塩基性陰イオン交換樹脂塔を備え、強酸性陽イオ
ン交換樹脂塔でカチオンが除去され、強塩基性陰イオン
交換樹脂塔でアニオンが除去されて純水が製造されてい
る。2. Description of the Related Art A conventional pure water producing apparatus for supplying water to a boiler or for a semiconductor process is generally equipped with a strongly acidic cation exchange resin tower and a strongly basic anion exchange resin tower, and a cation is used in the strongly acidic cation exchange resin tower. Are removed, and the anions are removed in the strongly basic anion exchange resin tower to produce pure water.
【０００３】図２は、このような従来の純水製造装置の
一例を示す二床三塔式純水製造装置の系統図であり、こ
の純水製造装置は、強酸性陽イオン交換樹脂塔１と、脱
炭酸塔２と、強塩基性陰イオン交換樹脂塔３とで構成さ
れている。この純水製造装置では、まず、強酸性陽イオ
ン交換樹脂塔１でカチオンを除去する。強酸性陽イオン
交換樹脂塔１におけるイオン交換で溶出したＨ+ イオン
により、強酸性陽イオン交換換脂塔１の処理水のｐＨは
低下するため、水中の炭酸イオンや重炭酸イオンは遊離
炭酸（炭酸ガス）となる。この炭酸ガスを脱炭酸塔２で
除去し、残りのアニオン成分を強塩基性陰イオン交換樹
脂塔３で除去する。FIG. 2 is a system diagram of a two-bed, three-column type deionized water producing apparatus showing an example of such a conventional deionized water producing apparatus. This deionized water producing apparatus is a strong acid cation exchange resin tower 1. , A decarbonation tower 2 and a strongly basic anion exchange resin tower 3. In this pure water producing apparatus, first, cations are removed in the strongly acidic cation exchange resin tower 1. Since the pH of the treated water in the strongly acidic cation exchange and fat exchange tower 1 is lowered by the H + ions eluted by the ion exchange in the strongly acidic cation exchange resin tower 1, the carbonate ions and bicarbonate ions in the water are converted to free carbonic acid ( Carbon dioxide). This carbon dioxide gas is removed in the decarbonation tower 2, and the remaining anion component is removed in the strongly basic anion exchange resin tower 3.
【０００４】なお、従来、膜を介して液中の溶存気体を
減圧の気相側へ透過させて除去する膜式脱気装置は、特
開平５−１８５０６８号公報等に記載されて公知である
が、膜式脱気装置では電解質成分の除去は行えない。Conventionally, a membrane-type deaerator for permeating and removing a dissolved gas in a liquid through a membrane to the decompressed gas phase side is known and disclosed in Japanese Patent Laid-Open No. 185068/1993. However, the membrane type deaerator cannot remove the electrolyte component.
【０００５】[0005]
【発明が解決しようとする課題】純水製造装置の原水と
なる市水等には、電解質及び溶存酸素等の溶存気体が含
有されており、このうち、電解質は主に強酸性陽イオン
交換樹脂塔及び強塩基性陰イオン交換樹脂塔で除去され
る。しかしながら、図２に示すような従来の純水製造装
置には、水中の溶存酸素の除去機能はない。このため、
溶存酸素の除去のために、更に純水製造装置の後段に脱
気装置を設置する必要があり、エネルギーコスト、設備
コストが高騰し、また、装置が大型化するという欠点が
ある。The raw water of a pure water producing apparatus, such as city water, contains an electrolyte and a dissolved gas such as dissolved oxygen. Of these, the electrolyte is mainly a strong acid cation exchange resin. Removed in the tower and strongly basic anion exchange resin tower. However, the conventional pure water producing apparatus as shown in FIG. 2 does not have a function of removing dissolved oxygen in water. For this reason,
In order to remove the dissolved oxygen, it is necessary to further install a deaerator at the latter stage of the pure water producing device, which has a drawback that the energy cost and the equipment cost increase, and the device becomes large.
【０００６】本発明は上記従来の問題点を解決し、水中
の酸素、炭酸及び電解質を効率的に除去することができ
る純水製造装置を提供することを目的とする。An object of the present invention is to solve the above-mentioned conventional problems and to provide a pure water producing apparatus capable of efficiently removing oxygen, carbonic acid and an electrolyte in water.
【０００７】[0007]
【課題を解決するための手段】本発明の純水製造装置
は、強酸性陽イオン交換樹脂塔と、該強酸性陽イオン交
換樹脂塔の処理水が導入される膜式脱気装置と、該膜式
脱気装置の処理水が導入される強塩基性陰イオン交換樹
脂塔とを備えてなることを特徴とする。The pure water producing apparatus of the present invention comprises a strongly acidic cation exchange resin tower, a membrane degassing apparatus into which treated water of the strongly acidic cation exchange resin tower is introduced, It is characterized by comprising a strongly basic anion exchange resin tower into which the treated water of the membrane type deaerator is introduced.
【０００８】本発明の純水製造装置では、まず、強酸性
陽イオン交換樹脂塔で水中のカチオンが除去される。前
述の如く、この強酸性陽イオン交換樹脂塔におけるイオ
ン交換で溶出したＨ+ イオンにより、強酸性陽イオン交
換樹脂塔の処理水のｐＨは低下（ｐＨ＝２〜４程度）す
るため、水中の炭酸イオンや重炭酸イオンは遊離炭酸と
なる。この炭酸ガスは膜式脱気装置で除去されるが、そ
の際に、溶存酸素等の他の溶存気体も膜式脱気装置で効
率的に除去される。そして、残りのアニオン成分は強塩
基性陰イオン交換樹脂塔で除去される。In the pure water producing apparatus of the present invention, first, cations in water are removed in the strongly acidic cation exchange resin tower. As described above, the pH of the treated water in the strongly acidic cation exchange resin tower is lowered (pH = about 2 to 4) by the H + ions eluted by the ion exchange in this strongly acidic cation exchange resin tower, so Carbonate ions and bicarbonate ions become free carbon dioxide. The carbon dioxide gas is removed by the membrane deaerator, but at that time, other dissolved gases such as dissolved oxygen are also efficiently removed by the membrane deaerator. Then, the remaining anion component is removed by the strongly basic anion exchange resin tower.
【０００９】[0009]
【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
【００１０】図１は本発明の純水製造装置の一実施例を
示す系統図である。FIG. 1 is a system diagram showing an embodiment of the pure water producing apparatus of the present invention.
【００１１】図示の如く、本発明の純水製造装置は、強
酸性陽イオン交換樹脂塔１、膜式脱気装置４及び強塩基
性陰イオン交換樹脂塔３で構成される。As shown in the figure, the pure water producing apparatus of the present invention comprises a strong acid cation exchange resin tower 1, a membrane degasser 4 and a strong basic anion exchange resin tower 3.
【００１２】強酸性陽イオン交換樹脂塔１及び強塩基性
陰イオン交換樹脂塔３としては、従来の純水製造装置に
一般的に用いられているものを使用することができる。As the strongly acidic cation exchange resin tower 1 and the strongly basic anion exchange resin tower 3, those generally used in conventional pure water producing apparatuses can be used.
【００１３】膜式脱気装置４としては、膜の気相側を真
空ポンプで減圧するか、又は、窒素ガス等を使用して炭
酸及び酸素分圧を下げるか、真空ポンプと窒素ガス等を
併用する脱気方式を用いることができる。As the membrane type deaerator 4, the gas phase side of the membrane is decompressed by a vacuum pump, or the partial pressure of carbonic acid and oxygen is reduced by using nitrogen gas or the like, or the vacuum pump and nitrogen gas or the like is used. A deaeration method used in combination can be used.
【００１４】このような本発明の純水製造装置では、強
酸性陽イオン交換樹脂塔１でカチオン成分が、膜式脱気
装置４で炭酸ガス、酸素、その他の溶存気体が、更に、
強塩基性陰イオン交換樹脂塔３でアニオン成分が除去さ
れることにより、高純度の純水が製造される。In the pure water producing apparatus of the present invention as described above, the cation component in the strongly acidic cation exchange resin tower 1, the carbon dioxide gas, oxygen and other dissolved gases in the membrane degassing apparatus 4,
Highly pure water is produced by removing the anion component in the strongly basic anion exchange resin tower 3.
【００１５】[0015]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明する。The present invention will be described more specifically below with reference to examples and comparative examples.
【００１６】説明の便宜上、まず、比較例を挙げる。For convenience of explanation, first, a comparative example will be given.
【００１７】比較例１ 図２に示す従来の純水製造装置（栗田工業株式会社製
上向流再生式純水装置「ＫＴＳ ＣＲ−８」）を用い、
表１に示す水質の原水を１０ｍ3 ／ｈｒの流量で処理し
て純水の製造を行った。得られた処理水の水質を表１に
示す。COMPARATIVE EXAMPLE 1 A conventional pure water production apparatus shown in FIG. 2 (manufactured by Kurita Water Industries Ltd.
Using an upflow regeneration pure water device "KTS CR-8")
Pure water was produced by treating raw water having the water quality shown in Table 1 at a flow rate of 10 m 3 / hr. The water quality of the obtained treated water is shown in Table 1.
【００１８】実施例１ 比較例１で用いた純水製造装置の脱炭酸塔を１０インチ
モジュール２本からなる膜脱気装置（栗田工業株式会社
製「ウォーターサーバ ＷＳ−２ＯＷＮ（真空ポンプと
窒素ガスを併用するタイプ）」）に変更し、図１に示す
構成とした純水製造装置を用い、比較例１で処理した原
水と同水質の原水を１０ｍ3 ／ｈｒの流量で処理して純
水の製造を行った。得られた処理水の水質を表１に示
す。Example 1 A membrane degassing apparatus comprising two 10-inch modules for the decarbonation tower of the deionized water producing apparatus used in Comparative Example 1 (Kurita Kogyo Co., Ltd. "Water Server WS-2OWN (vacuum pump and nitrogen gas 1))), and using the pure water producing apparatus configured as shown in FIG. 1, the raw water treated in Comparative Example 1 and the raw water having the same water quality are treated at a flow rate of 10 m 3 / hr to obtain pure water. Was manufactured. The water quality of the obtained treated water is shown in Table 1.
【００１９】[0019]
【表１】 [Table 1]
【００２０】表１より、本発明の純水製造装置によれ
ば、溶存酸素を極低濃度にまで除去できる上に、炭酸ガ
ス除去効率も向上し、後処理装置を設けることなく、高
純度の純水を製造することができることが明らかであ
る。From Table 1, according to the pure water producing apparatus of the present invention, the dissolved oxygen can be removed to an extremely low concentration, and the efficiency of removing carbon dioxide gas is improved. It is clear that pure water can be produced.
【００２１】[0021]
【発明の効果】以上詳述した通り、本発明の純水製造装
置によれば、膜式脱気装置で炭酸ガスと共に、溶存酸素
等の他の溶存気体も効率的に除去することができ、しか
も炭酸ガスの除去性能も従来の純水製造装置に比較して
向上する。As described in detail above, according to the pure water producing apparatus of the present invention, it is possible to efficiently remove not only carbon dioxide gas but also other dissolved gases such as dissolved oxygen by the membrane type deaerator, Moreover, the carbon dioxide gas removal performance is also improved as compared with the conventional pure water production apparatus.
【００２２】このため、純水製造装置の後段に更に脱気
装置を設ける必要がなくなり、エネルギーコスト、装置
コストが低減すると共に、装置を小型化することが可能
となる。Therefore, it is not necessary to further provide a deaerator at the subsequent stage of the pure water producing apparatus, and the energy cost and the apparatus cost can be reduced and the apparatus can be downsized.
【００２３】本発明は、市水等を原水とするボイラ給水
用又は半導体プロセス用の純水製造装置等として、工業
的に極めて有用である。INDUSTRIAL APPLICABILITY The present invention is industrially very useful as a pure water producing apparatus for boiler water supply using raw water such as city water or for semiconductor processes.
【図１】本発明の純水製造装置の一実施例を示す系統図
である。FIG. 1 is a system diagram showing an embodiment of a pure water producing apparatus of the present invention.
【図２】従来の純水製造装置を示す系統図である。FIG. 2 is a system diagram showing a conventional pure water production apparatus.
１ 強酸性陽イオン交換樹脂塔 ２ 脱炭酸塔 ３ 強塩基性陰イオン交換樹脂塔 ４ 膜式脱気装置 1 Strongly acidic cation exchange resin tower 2 Decarbonation tower 3 Strongly basic anion exchange resin tower 4 Membrane degasser
Claims (1)
脱気装置と、 該膜式脱気装置の処理水が導入される強塩基性陰イオン
交換樹脂塔とを備えてなる純水製造装置。1. A strong acid cation exchange resin tower, a membrane degasser into which treated water of the strong acid cation exchange resin tower is introduced, and a strong to which treated water of the membrane degasser is introduced. A pure water production system comprising a basic anion exchange resin tower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8070173A JPH09253642A (en) | 1996-03-26 | 1996-03-26 | Pure water making apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8070173A JPH09253642A (en) | 1996-03-26 | 1996-03-26 | Pure water making apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09253642A true JPH09253642A (en) | 1997-09-30 |
Family
ID=13423883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8070173A Pending JPH09253642A (en) | 1996-03-26 | 1996-03-26 | Pure water making apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09253642A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001205297A (en) * | 2000-01-21 | 2001-07-31 | Japan Organo Co Ltd | Apparatus for producing pure water |
| JP2003031255A (en) * | 2001-07-18 | 2003-01-31 | Matsushita Electric Ind Co Ltd | Fuel cell power generation device and feeding method of condensate to water storage tank |
| JP2003080245A (en) * | 2001-09-13 | 2003-03-18 | Nippon Rensui Co Ltd | Water purifying apparatus |
| EP1396285A1 (en) * | 2002-09-06 | 2004-03-10 | Rohm And Haas Company | Fluid treatment system |
| JP2005334798A (en) * | 2004-05-28 | 2005-12-08 | Miura Co Ltd | Water supply system |
| WO2007094242A1 (en) * | 2006-02-16 | 2007-08-23 | Arkray, Inc. | Degasifier and liquid chromatograph equipped therewith |
| CN101508473A (en) * | 2009-04-08 | 2009-08-19 | 夏玉利 | Purifier apparatus |
| JP2014168743A (en) * | 2013-03-04 | 2014-09-18 | Nomura Micro Sci Co Ltd | Pure water manufacturing method |
-
1996
- 1996-03-26 JP JP8070173A patent/JPH09253642A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001205297A (en) * | 2000-01-21 | 2001-07-31 | Japan Organo Co Ltd | Apparatus for producing pure water |
| JP2003031255A (en) * | 2001-07-18 | 2003-01-31 | Matsushita Electric Ind Co Ltd | Fuel cell power generation device and feeding method of condensate to water storage tank |
| JP2003080245A (en) * | 2001-09-13 | 2003-03-18 | Nippon Rensui Co Ltd | Water purifying apparatus |
| EP1396285A1 (en) * | 2002-09-06 | 2004-03-10 | Rohm And Haas Company | Fluid treatment system |
| KR100965489B1 (en) * | 2002-09-06 | 2010-06-24 | 롬 앤드 하스 캄파니 | Fluid Treatment System |
| JP2005334798A (en) * | 2004-05-28 | 2005-12-08 | Miura Co Ltd | Water supply system |
| WO2007094242A1 (en) * | 2006-02-16 | 2007-08-23 | Arkray, Inc. | Degasifier and liquid chromatograph equipped therewith |
| US8495906B2 (en) | 2006-02-16 | 2013-07-30 | Arkray, Inc. | Degasifier and liquid chromatograph equipped therewith |
| JP5324913B2 (en) * | 2006-02-16 | 2013-10-23 | アークレイ株式会社 | Deaeration device and liquid chromatography device having the same |
| CN101508473A (en) * | 2009-04-08 | 2009-08-19 | 夏玉利 | Purifier apparatus |
| JP2014168743A (en) * | 2013-03-04 | 2014-09-18 | Nomura Micro Sci Co Ltd | Pure water manufacturing method |
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