JPH09251106A - Production of color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a multicolored fine pattern with good workability and high accuracy on a transparent substrate by laminating the second or succeeding color photosensitive resin layer in such a manner that the layer is partially adhered to the substrate and then heating to transfer the resin layer from a base film to the substrate. SOLUTION: A color photosensitive resin layer (green) 2 of the second color of a photosensitive film is partially adhered and laminated to a transparent substrate 4 where pixels (red) 3 are preliminarily and regularly arranged (process b). In the transfer process which is between the laminating process above described and a treating process including development, a space 5 is replaced by the colored photosensitive resin layer (green) 2. The resin layer (green) 2 is transferred to the space 5 by heating. Namely, by heating, the fluidity of the resin increases and the resin is transferred to the space on the substrate surface by the gravity to exchange the resin layer (green) 2 with the space 5 (process c). In this process, the resin layer (green) 2 is made uniform by the surface tension so that the layer has excellent surface flatness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a color filter.

[0002]

2. Description of the Related Art A color filter is formed by forming two or more kinds of very fine stripe-like or mosaic-like patterns having different hues on a surface of an optically transparent substrate such as glass in parallel or intersecting at regular intervals. It is a thing arranged. It is necessary for these patterns to arrange hues in a predetermined order at predetermined intervals and to form a uniform layer with little thickness unevenness, and various color filter manufacturing methods have been proposed. For example, the screen printing method can form a low-cost color filter. Further, a method using a photolithography technique, that is, a method of irradiating a transparent film formed on a color filter substrate with ultraviolet rays through a predetermined negative mask to remove an unexposed portion, and then dyeing while forming a stain-proof layer is available. is there.

There is known a method for manufacturing a color filter which can easily and highly accurately form a multicolor fine stripe-shaped or mosaic-shaped pattern using a photosensitive film composed of a base film and a photosensitive resin layer. A process of laminating a photosensitive film consisting of a base film and a photosensitive resin layer colored in one color on a transparent substrate so that the colored photosensitive resin layer faces the substrate, and exposing to form a predetermined pattern The step of performing and the step of peeling off and developing the base film are repeated to form a multicolor pattern to manufacture a color filter.

For example, a photosensitive resin layer of one color is applied to a base film and dried, and the photosensitive resin layer of the photosensitive film is transferred onto a transparent substrate and exposed through a mask having a predetermined pattern, A method of developing to form a pattern (JP-A-61-99102), a method of performing alkali development (JP-A-2-239205), and a method of using a water-soluble base film (JP-A-2-271301). A method of forming a transparent colored image pattern by heat-pressing this film on a transparent plate, exposing it through a mask having a predetermined pattern, peeling off the base film and developing it. -187203, JP-A-2-
No. 244005) is known. Further, as a method for producing a color filter using a photosensitive film, there are disclosed in Japanese Patent Laid-Open No. 3-160454 and Japanese Patent Laid-Open No. 3-160454.
111802, JP-A-2-151805,
JP-A-4-212161, JP-A-4-30160
No. 2, JP-A-5-2107, etc. are known.

Regarding the followability of the photosensitive film, a device for improving the followability of the photosensitive film has been made for a long time in order to obtain a good pattern. A three-layer resist method has been developed by researchers at Bell Laboratories, which is characterized in that the substrate can be precisely microfabricated even if there is a step on the substrate (for example, J. Vac. Sci. Technol., 16: 1620). Published in 1968). In addition, detailed studies have also been conducted on the conformability of the printed circuit board to the unevenness of the substrate, and they have been put to practical use. Since the photosensitive film is semi-solid, lamination (thermocompression bonding) is important for improving the followability so as to form a state close to a liquid (close to a liquid resist). In order to follow unevenness, it is necessary to set the temperature of the laminate so that the viscosity is sufficiently low. It is said that if the liquidity is large, the storage stability at room temperature tends to be poor and cold flow occurs, so that the viscosity cannot be made too low. It is said that a thicker film is advantageous for filling the recess (for example, Solid State Technology Vol. 29, No. 6).
153 pages, published in 1986, Proceedings of the Academic Lecture Meeting of the Printed Circuit Society, p. 83, 1989).

Heating after the exposure step is generally performed and is called afterbaking. For example, a color filter that uses a pigment-dispersed photopolymer (J. Photopol
ym.Sci.Technol., Vol.2, No.2, 1989, pp. 244-248), a photoinitiator radical-induced generation of a monomer radical and its polymerization chain reaction are promoted. The photosensitive resist layer is applied, but it is also common to perform pre-baking (for example, at 85 ° C. for 5 minutes) to remove the solvent. In the film method, the solvent is removed when the film is formed, so such prebaking is generally not performed.
Also, the photosensitive resist layer is exposed to 50 to 1 before development and after exposure.
It is also performed by heating at 50 ° C. for 30 seconds to 60 seconds to promote the reaction of the lower layer portion which is not sufficiently exposed to UV light (JP-A-3-196596).

In the conventional method for manufacturing a color filter, when the second and subsequent color layers are formed, a gap between the second and subsequent color layers on the already formed color layer and the color layer which is in direct contact with the substrate is formed. There is a step in the area. This step is determined by the thickness (1 to 5 μm) of the already formed colored layer. Due to this step, the new colored layer does not come into contact with the base (transparent glass), and due to insufficient adhesion pressure, the adhesive strength becomes insufficient, the colored layer does not adhere to the base, and the base film is peeled off. , The base film is peeled off to form a part where the colored layer does not adhere to the base. If it is exposed and developed as it is,
Inconvenience such as exposing the part where the colored image does not exist,
There is a disadvantage that a desired color filter cannot be obtained.

More specifically, particularly when the color filter is composed of pixels of three primary colors (red, green, blue) in stripes, the pixels of the first color in stripes have a thickness of 2.0 μm and a width, for example. 70 μm, spacing 300 μm
When a colored layer of the second color is pasted on the transparent substrate, the unevenness of about 2.0 μm is generated due to the front pixels, and thus the insufficient contact between the transparent substrate and the colored layer may occur. However, there is a drawback that the second colored layer does not sufficiently follow this unevenness.

Further, on the pixels of the second and subsequent colors, a part of the colored photosensitive resin layer on the pixels of the first color flows in, and in the second color, the edge close to the pixels of the first color is lifted and the pixel The surface becomes slanted, and its cross section is a so-called J shape,
It becomes n-shaped. The pixels of the third color have a so-called M-shaped cross section because both ends of the pixels are lifted because the colored photosensitive resin layer flows in from both adjacent pixels. FIG. 2 is a schematic diagram of a cross section of a pixel of a conventional color filter, and shows cross sections of J-shaped and M-shaped pixels. If there is a J-shaped lift or the like, the surface of the three-color pixels becomes uneven, and the desired flatness cannot be obtained.
The lifted edge comes into contact with the counter electrode to cause pixel defects, and further causes color unevenness. The film followability cannot be improved only by adhering the colored photosensitive resin layer to the substrate and passing through (laminating) the pressure sensitive roll while peeling off the protective film of the photosensitive film after heating the substrate.

[0010]

The invention according to claim 1 has a good workability on a transparent substrate such as a glass plate and is capable of forming a multicolor fine pattern with high accuracy and a method for producing a color filter. Is provided.

[0011]

According to the present invention, there is provided a photosensitive film comprising a base film and a photosensitive resin layer colored in one color on a transparent substrate, wherein (1) the colored photosensitive resin layer is A step of bonding so as to face the substrate,
In a method for producing a color filter in which a step of (2) exposing to form a predetermined pattern and (3) a step including a developing step are repeated to form a multicolor pattern, the second and subsequent colored photosensitive resin layers are The step of laminating is performed so as to partially adhere to the substrate, and a step of transferring the photosensitive resin layer of the second and subsequent colors from the base film to the substrate by heating is performed between the steps (1) and (3). The present invention relates to a method for manufacturing a color filter, which includes:

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION In order to flatten the surface of the pixels of the color filters of the second and subsequent colors, a photosensitive resin layer of the second and subsequent colors is formed from the base film to the substrate between the steps (1) and (3). The aspect of the transfer step of transferring to the space on the surface will be described in more detail with reference to FIG. FIG. 1 is a schematic view showing the manufacturing method of the present invention, in which the base film 1 is PET.
An example will be described in which the colored photosensitive resin layer is laminated in the order of red and green with (polyethylene terephthalate film).

FIG. 1A shows a base film 1 (PET).
The transparent substrate 4 on which the colored photosensitive resin layer (green) 2 of the photosensitive film composed of polyethylene terephthalate film) and the colored photosensitive resin layer (green) 2 and the front pixel (red) 3 are arranged in order is faced. Indicates that FIG. 1B shows a bonding process in which the colored photosensitive resin layer (green) 2 of the photosensitive film is partially adhered to the transparent substrate 4 in which the front pixels (red) 3 are arranged in order. ing. At this time, if the colored photosensitive resin layer (green) 2 is attempted to completely follow the front pixels (red) 3 and the transparent substrate 4, wrinkles and wrinkles occur, so that the colored photosensitive resin layer 2 may be partially adhered to the transparent substrate 4. is necessary. Here, the part indicated as space 5 is a part of the space where neither the colored photosensitive resin layer (green) 2 nor the front pixel (red) 3 exists, and when laminated in vacuum, Part, a part filled with nitrogen when laminated in a nitrogen stream, and a part filled with air when laminated in air.

FIG. 1C shows a state in which the transition process in the present invention is completed. The transition process is the above (1)-
This is a step which is inserted between the steps (3) to replace the colored photosensitive resin layer (green) 2 with the space 5. Colored photosensitive resin layer (green)
The transfer of 2 to the space 5 is performed by heating. Immediately after bonding in the state of FIG. 1B, the colored photosensitive resin layer (green) 2 is in close contact with the base film 1. And
It is partially adhered to the transparent substrate 4, and there is also another part that is not adhered (so-called defective followability part). This is the space 5 in FIG. 1 (b).

Here, in order to explain the state of FIG. 1C in detail, description will be made with reference to FIG. In FIG. 3A, assuming that the thickness of the colored photosensitive resin layer (green) 2 in the adhesive portion is x and the thicknesses on both sides in the vicinity thereof are y, x <y. y is larger than x because there is a part of the flow of the colored photosensitive resin layer (green) 2 because the base film is lifted up in the front pixels 3 at both ends. FIG. 3B shows a state in which the transition of the photosensitive layer is completed and the colored photosensitive resin layer (green) 2 and the space 5 are exchanged. x <y. In order to obtain a practical color filter, the step difference is preferably 0.2 μm or less (y−x is 0.2 μm or less).

The step (y-x) can be reduced by partially adhering the photosensitive resin layer to the transparent substrate. This partial adhering can be achieved by adjusting the film thickness of the base film of the photosensitive film and the photosensitivity. It can be controlled by the viscosity (melting) of the resin layer, the roll temperature during lamination, the substrate temperature, the roll pressure, and the substrate feeding speed. An example of desirable conditions is that the film thickness of the base film is 1 to 30 μm, preferably 1 to 10 μm, the viscosity of the photosensitive resin layer (at the time of lamination) is 10 ³ to 10 ⁶ poise, the roll temperature at the time of lamination is 20 to 120 ° C., Substrate temperature 20-
The temperature is 120 ° C., the roll pressure is 0.1 to 10 kgf / cm ² , and the substrate feeding speed is 0.1 to 10 m / min.

In the transfer step, the fluidity is increased by heating, and the transfer is started by the gravity into the space above the substrate surface.
FIG. 1 (c) shows a state in which the transfer process is completed,
The colored photosensitive resin layer (green) 2 ends the transition to the space 5 on the surface of the transparent substrate 4, a space appears on the surface, and the colored photosensitive resin layer (green) 2 and the space 5 are exchanged. At this time,
Since the colored photosensitive resin layer (green) 2 is made uniform by its surface tension, the surface flatness is excellent, and the developed pixel has almost the same cross-sectional shape as the first color.
Although the case where the first color is red and the second color is green has been described above as an example, the order of colors is not limited to this. In addition to the order red, green, blue and black, any color order is possible with the present invention, such as black, blue, green and red, black, red, blue and green.

The transfer of the colored photosensitive resin layer (green) 2 to the space is performed by heating. The heating is performed at a temperature of room temperature or higher and at a temperature lower than the temperature at which the colored photosensitive resin layer starts a thermosetting reaction. The transfer is completed at a low temperature for a long time and at a high temperature in a short time, and the transferred colored photosensitive resin layer surface has a high degree of flatness. For heating, hot plate heating, oven heating, ultrasonic heating, infrared heating, electromagnetic induction heating, hot water immersion, oil heating, friction heating,
Heating in a pressure oven, heating in a vacuum vessel, etc. are possible and are not limited to these. The transition step of the present invention is performed between the above (1) to (3) and may be performed before or after the exposure step of (2), or may be performed twice before and after the exposure step. It is also possible to carry out in the exposure step.

FIG. 1D shows the cross-sectional shape of the pixel of the color filter after development of the colored photosensitive resin layer (green) after exposure. The peeling of the base film 1 is performed after the exposure step and before the development step or before the exposure step.

The photosensitive film used in the present invention is obtained by coating a transparent base film, for example, a film of polyethylene terephthalate or the like, with a photosensitive resin composition colored in one color and drying it to color the film in one color. A photosensitive resin layer is formed. Since this colored photosensitive resin layer is uncured, flexible and sticky, it is desirable to further attach a protective film such as a polyethylene film thereon to prevent external damage, adhesion of foreign matter, and the like. . The colored photosensitive resin layer formed on the photosensitive film is laminated on the transparent substrate while peeling off the protective film, and the base film on the surface of the colored photosensitive resin layer is removed after being exposed through a negative pattern of a predetermined pattern. To be done.

As the photosensitive resin composition, known ones can be used without particular limitation, and examples thereof include an ethylenically unsaturated compound (a), a carboxyl group-containing film-imparting polymer (b), and a photopolymerization initiator (c). ) And pigments or dyes (d)
Is preferred.

As the ethylenically unsaturated compound (a),
For example, compounds obtained by adding an α, β-unsaturated carboxylic acid to a polyhydric alcohol (trimethylolpropane diacrylate, trimethylolpropane triacrylate, tetramethylolmethane triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate) Acrylate), compounds obtained by adding an α, β-unsaturated carboxylic acid to a glycidyl group-containing compound (trimethylolpropane triglycidyl ether triacrylate, bisphenol A diglycidyl ether diacrylate, etc.), polyvalent carboxylic acid (anhydride) Esterified product of a compound having a hydroxyl group and an ethylenically unsaturated group (such as β-hydroxyethyl acrylate), an alkyl ester of acrylic acid (methyl acrylate, ethyl acrylate, Butyl acrylate, 2-ethylhexyl acrylate, etc.), urethane diacrylate compounds obtained by reacting trimethylhexamethylene diisocyanate, dihydric alcohol and dihydric acrylate monoester, and methacrylates corresponding thereto. Can be These compounds are used alone or in combination of two or more. In terms of light sensitivity and developability,
The amount of the component (a) is preferably 90 to 50 parts by weight based on 100 parts by weight of the total amount of the components (a) and (b).

The carboxyl group-containing film-forming polymer (b) is, for example, a copolymer of an acrylic acid alkyl ester or a methacrylic acid alkyl ester and acrylic acid or methacrylic acid, an acrylic acid alkyl ester or a methacrylic acid alkyl ester, and an acrylic acid. Examples thereof include a copolymer of an acid or methacrylic acid and a vinyl monomer copolymerizable therewith.

Examples of alkyl acrylates include methyl acrylate, ethyl acrylate, butyl acrylate, 2-ethylhexyl acrylate and the like. Examples of the alkyl methacrylate include those corresponding to the above-mentioned alkyl acrylate. Examples of the copolymerizable vinyl monomer include, for example,
Dimethylaminoethyl acrylate, tetrahydrofurfuryl acrylate, aminoethyl acrylate, 2,2,2-trifluoroethyl acrylate,
2,2,3,3-tetrafluoropropyl acrylate, methacrylate, acrylamide, methacrylamide diacetone acrylamide, styrene, vinyltoluene and the like corresponding thereto.

As the carboxyl group-containing film property imparting polymer (b), for example, polyester using terephthalic acid, isophthalic acid, sebacic acid or the like, copolymer of butadiene and acrylonitrile, cellulose acetate, cellulose acetate butyrate, methyl cellulose, Ethyl cellulose and the like can be used together.
The use of the component (b) improves the coating properties and the film properties of the cured product, and the compounding amount is preferably from 10 to 50 parts by weight based on 100 parts by weight of the total amount of the components (a) and (b). . When the amount is less than 10 parts by weight, the photosensitivity tends to decrease due to an increase in the amount of the ethylenically unsaturated compound.
If the amount exceeds the weight part, the photocured product tends to become brittle. Further, the weight average molecular weight of the component (b) is preferably from 10,000 to 500,000 from the viewpoint of the coating properties and the film strength. The weight average molecular weight is a value converted into polystyrene by gel permeation chromatography.

Examples of the photopolymerization initiator (c) include aromatic ketones (benzophenone, N, N'-tetramethyl-4,4'-diaminobenzophenone (Michler's ketone), 4-methoxy-4'-dimethyl. Aminobenzophenone, 4,4'-diethylaminobenzophenone, 2-
Ethyl anthraquinone, phenanthrene quinone, etc.), benzoin ether (benzoin methyl ether, benzoin ethyl ether, benzoin phenyl ether, etc.), benzoin (methyl benzoin, ethyl benzoin, etc.), 2,4,5-triarylimidazole dimer, 2- (O-chlorophenyl) -4,5-diphenylimidazole dimer, 2- (o-chlorophenyl)-
4,5-di (m-methoxyphenyl) -4,5-diphenylimidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer, 2-
(O-methoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methoxyphenyl) -4,5
-Diphenylimidazole dimer, 2,4-di (p-methoxyphenyl) -5-phenylimidazole dimer,
2- (2,4-dimethoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methylmercaptophenyl) -4,5-diphenylimidazole dimer, etc., acridine derivative (1,7- Bis (9-acridinyl) heptane and the like are used. These compounds are used alone or in combination of two or more.

The compounding amount of the component (c) is 0.1 to 10 relative to 100 parts by weight of the total amount of the components (a) and (b).
Parts by weight are preferred. If the content is less than 0.1 parts by weight, the photosensitivity tends to be insufficient, and if it exceeds 10 parts by weight, the light absorption on the surface of the composition during exposure increases,
Internal photocuring tends to be inadequate.

As the pigment or dye (d), a generally known coloring agent can be used, and the compatibility with the photosensitive resin layer, particularly the ethylenically unsaturated compound or the carboxyl group-containing film imparting polymer, is targeted. It is selected in consideration of hue, light transmittance and the like. As a pigment that can be used for a color filter, various compounds can be used.
Examples include inorganic pigments such as barium sulfate, zinc oxide, lead sulfate, titanium oxide, red iron oxide, carbon black, graphite, and chromium oxide, and the following organic pigments (color index numbers).

Yellow pigment: CI Pigment Yellow 20,
24, 83, 86, 93, 109, 110, 117, 1
25, 137, 138, 139, 147, 148, 15
3, 154, 166, 168 Orange pigment: CI Pigment Orange 36, 43, 5
1, 55, 59, 61 Red pigment: CI Pigment Red 9, 97, 122, 1
23, 149, 168, 177, 180, 092, 21
5, 216, 217, 220, 223, 224, 22
6, 227, 228, 240, 48: 1 Violet pigment: CI Pigment Violet 19,
23, 29, 30, 37, 40, 50 Blue pigment: CI Pigment Blue 15, 15: 6, 2,
2, 60, 64 Green pigment: CI Pigment Green 7, 36 Black pigment: CI Pigment Black 7

The blending amount of the component (d) is preferably 1 to 50 parts by weight based on 100 parts by weight of the total amount of the components (a) and (b). If the amount is less than 1 part by weight, the coloring tends to be insufficient, and if it exceeds 50 parts by weight, the light transmittance tends to decrease.

In the colored photosensitive resin layer, a melamine resin and / or an epoxy resin which reacts thermally with the carboxyl group of the carboxyl group-containing film-forming polymer in order to enhance the heat-curing property, the component (a) and the component (b). Total amount of ingredients 10
It is preferable to add 1 to 20 parts by weight to 0 parts by weight and heat the mixture. The heating temperature is preferably from 130 to 200 ° C., and the heating time is preferably from 30 to 60 minutes, from the viewpoint of improving the crosslinking density of the colored layer, improving the heat resistance, and the like.

In the present invention, the color filter is manufactured, for example, as follows. First, a colored photosensitive resin formed on a photosensitive film is laminated on a transparent substrate, a negative mask having a predetermined pattern is placed on the base film on the surface of the colored photosensitive resin layer, and the base film is removed. . Then, the unexposed portion is developed with a developing solution to form a colored pattern. This colored pattern forming step is repeated a predetermined number of times by using photosensitive films of different colors to form a multicolor pattern, thereby obtaining a color filter. When forming a fine line with a colored photosensitive resin layer attached on a transparent substrate, the colored layer after development may be flexible because it is exposed with the minimum exposure amount that can withstand the developing solution, and further UV rays are required after development. By irradiation or heat treatment,
Further, the colored layer is completely cured by electron beam irradiation to impart strength and heat resistance.

In the present invention, in particular, the laminating step is performed so that the second and subsequent colored photosensitive resin layers are partially adhered to the substrate, and the steps (1) and (3) above are carried out. In the meantime, a step of transferring the photosensitive resin layers of the second and subsequent colors from the base film to the substrate by heating is performed.

[0034]

EXAMPLES The present invention will be described below with reference to examples. Example 1 (1) Production of coating liquid for colored photosensitive resin layer: 135 parts by weight of the pigment paste of any one of Table 2 and 200 parts by weight of a solution prepared by uniformly dissolving the materials of Table 1 and melamine resin 5
Parts by weight and 5 parts by weight of a silane coupling agent were added and dissolved and dispersed to obtain a coating liquid for a colored photosensitive resin layer.

[0035]

[Table 1]

[0036]

[Table 2]

Melamine resin Cymel 300 (trade name of hexamethoxymethylmelamine, manufactured by Mitsui Toatsu Chemicals, Inc.) Silane coupling agent KBM503 (manufactured by Shin-Etsu Chemical Co., Ltd.) Preparation of coating liquid Immediately before use Was ultrasonically dispersed for 2.5 hours before use.

(2) Production of Photosensitive Film A coating solution obtained was applied to a polyethylene terephthalate film having a thickness of 6 μm (Tetron film M5 manufactured by Teijin Ltd.).
R) was applied to a uniform thickness and dried in a dryer at 100 ° C. for 2 minutes. The application was performed using a micro gravure coater (produced by Yasui Seiki Co., Ltd.). The diameter of the micro gravure roll was 40 mm in the reverse roll coating method. The coating speed was 15 m / min for red and green, and 20 m / min for blue. The gravure mesh of the micro gravure roll was 150 mesh, and the rotation speed was 350 rpm. A 30 μm-thick polyethylene film was laminated as a protective film to obtain a photosensitive film. The thickness of the photosensitive resin layer after drying was 2.0 μm.

(3) Production of color filter (a) Substrate heating A base substrate for a color filter (glass substrate having a thickness of 1.1 mm, Corning 7074 manufactured by Corning Co.) was heated at 80 ° C. for 10 minutes. (B) Laminating step While peeling off the protective film of the photosensitive film,
The colored photosensitive resin layer was laminated under the following conditions on the base substrate for the color filter heated under the above conditions. Roll temperature: 40 to 80 ° C Roll pressure: 1.0 to 4.0 kgf / cm ² Speed: 1.0 to 3.0 m / min

(C) Exposure Step An exposure machine HMW-201 is passed through a negative mask having a predetermined pattern (a striped pattern having a width of 87.5 μm and a length of 150 mm and an interval of 300 μm in the parallel direction).
B (3 kW ultra-high pressure mercury lamp, manufactured by Oak Manufacturing Co., Ltd.) was used to adjust the exposure amount to a predetermined value for exposure. (D) Peeling step The polyethylene terephthalate film was removed. (E) Development step The unexposed portion was removed by spray development with a 0.08% by weight Na ₂ CO ₃ aqueous solution at 20 ° C. for 15 seconds to form a single colored pattern.

The steps of forming the colored patterns (a) to (e) above were repeated using the photosensitive films of respective colors in the order of red, blue and green. When the second color of blue is laminated, the film is fed in a direction parallel to the red stripe pattern of the front pixels, and then heated at 60 ° C. for 15 minutes before the exposure step (c), The same procedure was performed for the third color, green, to form a multicolor pattern. The exposure dose at this time was 250 mJ / cm ² for the red, blue and green photosensitive resin layers. The mask pattern used is one in which a gap is provided in the longitudinal direction of the stripe. An ultraviolet irradiator (lamp H5600L /
2. Toshiba Denshi Co., Ltd.) at 3 J / cm ² and then
The color filter was obtained by heating at 50 ° C. for 45 minutes. The resulting color filter had good redness, blue and green patterns and good followability. In addition, the step (y−
x, x = 2.0) was 0.2 μm or less, and neither M-shape nor J-shape was observed in the cross section of the pixel, and it was tent-shaped. Table 3
The laminating conditions and the value of y are shown in.

[0042]

[Table 3]

Example 2 (1) Production of coating liquid for colored photosensitive resin layer: To 200 parts by weight of a solution prepared by uniformly dissolving the materials shown in Table 4, 145 parts by weight of the pigment paste of any one of Table 2 and 5 of the melamine resin
Parts by weight and 5 parts by weight of a silane coupling agent were added and dissolved and dispersed to obtain a coating liquid for a colored photosensitive resin layer.

[0044]

[Table 4]

Melamine resin Cymel 300 (trade name of hexamethoxymethyl melamine, manufactured by Mitsui Toatsu Chemicals, Inc.) Silane coupling agent KBM503 (manufactured by Shin-Etsu Chemical Co., Ltd.) Preparation of coating solution Preparation of coating solution The above materials were gradually added to the pigment paste and kneaded and dispersed in a ball mill for 8 hours to prepare a pigment paste.

(2) Production of Photosensitive Film A coating solution obtained was applied to a polyethylene terephthalate film having a thickness of 23 μm (Tetron Film S manufactured by Teijin Ltd.).
23) The above was coated using a kiss touch reverse roll coater. It was dried for 2 minutes in a dryer at 100 ° C. A 30 μm-thick polyethylene film was laminated as a protective film to obtain a photosensitive film. The thickness of the photosensitive resin layer after drying was 1.95 μm.

(3) Production of color filter (a) Substrate heating The base substrate for the color filter used in Example 1 was heated to 80 ° C.
For 10 minutes. (B) Laminating step While peeling off the protective film of the photosensitive film,
The colored photosensitive resin layer was laminated under the following conditions on the base substrate for the color filter heated under the above conditions. Roll temperature: 80 ℃ Roll pressure: 1.0kgf / cm ² Speed: 2.5m / min

(C) Exposure step The exposure machine H is passed through a negative mask of a predetermined pattern (for a normal color filter consisting of stripe-shaped pixels).
MW-201B (3 kW, ultra-high pressure mercury lamp, manufactured by Oak Manufacturing Co., Ltd.) was used for contact exposure at a predetermined exposure amount. (D) Peeling step The polyethylene terephthalate film was removed. (E) Developing step The unexposed part was removed by spray development with a 0.08 wt% aqueous solution of Na ₂ CO ₃ at 30 ° C. for 15 seconds to form a one-colored pattern.

The above steps (a) to (e) of forming the colored pattern were repeated using the photosensitive films of respective colors in the order of red, blue and green. When the second color of blue is laminated, the film is fed with the feeding direction of the film orthogonal to the red stripe pattern of the front pixels, and after that, after the exposure step of (c), heating is performed at 60 ° C. for 15 minutes and The same procedure was performed for the green color to form a multicolor pattern. The exposure dose at this time was 100 mJ / cm ² for the red, blue and green photosensitive resin layers. The obtained multicolor pattern was irradiated at 3 J / cm ² using an ultraviolet irradiator (Lamp H5600L / 2, manufactured by Toshiba Denshi Co., Ltd.), and then heated at 150 ° C. for 45 minutes to obtain a color filter. The color filter obtained is red,
The blue and green patterns were lined up neatly, and the followability was good. Further, the step difference of the pixel was 0.2 μm, neither M-shape nor J-shape was recognized in the cross section of the pixel, and the effect of heating at 60 ° C. for 15 minutes was recognized.

Example 3 Example 1 was repeated except that the materials in Table 5 below were replaced with the materials in Table 1.

[0051]

[Table 5]

The color filter thus obtained had an orderly arrangement of red, blue and green patterns and had good followability. The step difference of the pixel was 0.2 μm. No M-shape or J-shape was observed in the cross section of the pixel, and the effect of heating at 60 ° C. for 15 minutes was recognized.

Comparative Example 1 A red colored pattern was formed in the same manner as in Example 1, and then the pattern forming process was performed in the same manner as in Example 1 using blue.
The procedure was repeated using the photosensitive film of each color in the order of green, but heating was not performed for 15 minutes at 60 ° C. before the exposure of (c). The film had insufficient followability and some wrinkles were generated on the film, resulting in uneven followability. The film was lacking at one end of the second color pixel and at both ends of the third color pixel. Further, when the surface of the pixel was blue, the cross section thereof was J-shaped, and the difference in film thickness between both ends was 0.3 μm to 1.0 μm. In green, its cross section is M-shaped, and at both ends and the center is 0.5 μm
There was a difference in film thickness of 0.8 μm. This is because the heating step at 60 ° C. for 15 minutes was not performed before the exposure of (c), and thus a rectangular pixel cross section could not be obtained.

[0054]

According to the method of manufacturing a color filter according to the first aspect of the present invention, a highly precise multicolor fine pattern having a uniform thickness is formed on a substrate with good followability and workability of the photosensitive film. It is possible to manufacture a color filter having excellent heat resistance.

[Brief description of drawings]

FIG. 1 is a schematic view showing a production method of the present invention.

FIG. 2 is a schematic view of a cross section of a pixel of a conventional color filter.

FIG. 3 is a schematic view showing a manufacturing method of the present invention.

[Description of sign]

 1 Base film (PET) 2 Colored photosensitive resin (green) 3 Front pixel (red) 4 Transparent substrate 5 Space 6 First color pixel 7 Second color pixel 8 Third color pixel

Claims (1)

[Claims] 1. A photosensitive film comprising a base film and a photosensitive resin layer colored in one color on a transparent substrate,
A multicolor pattern is formed by repeating the steps of (1) attaching the colored photosensitive resin layer so as to face the substrate, (2) exposing to form a predetermined pattern, and (3) a step including a developing step. In the method of manufacturing a color filter for forming a film, a step of laminating the second and subsequent colored photosensitive resin layers so as to partially adhere to the substrate is carried out, and between the steps (1) and (3) above. A method for producing a color filter, which further comprises a step of transferring the photosensitive resin layer of the second and subsequent colors from the base film to the transparent substrate by heating.