JPH0815518A - Production of color filter - Google Patents

Abstract

PURPOSE:To lessen the ruggedness on the surfaces of pixels by providing the process with a stage for shifting photosensitive resin layers of the second and subsequent colors to the space above a substrate surface from a base film. CONSTITUTION:The ruggedness of the pixel surfaces which is a defect is reduced if a photoreceptor film is heated before a stage for forming prescribed patterns by exposing and is then shifted into the stage after a stage for sticking the photosensitive film to a transparent substrate 4 having previously placed pixels 3 on the surface, then sticking the colored photosensitive resin layers 2 of the second and subsequent colors to the substrate 4 surface from the base film 1 in such a manner that the colored photosensitive resin layers 2 face the substrate 4. In such a case, the colored photosensitive resin layers 2 of the second and subsequent colors are stuck flatly to the parts where there are no previously placed pixels 3 exclusive of spaces 5 at the time of sticking these layers to the previously placed pixels 3 in order to eliminate the ruggedness of the pixel surfaces. Namely, the parts where there are no previously placed pixels 3 are required to be held at the same height as the film thickness of the previously placed pixels 3.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a method for manufacturing a color filter.

[0002]

2. Description of the Related Art A color filter is a parallel or intersecting pattern of extremely fine stripe-shaped or mosaic-shaped patterns having different hues on the surface of an optically transparent substrate such as glass, which are spaced at regular intervals. It is the one arranged side by side. It is necessary for these patterns to arrange hues in a predetermined order at predetermined intervals and to form a uniform layer with little thickness unevenness, and various color filter manufacturing methods have been proposed. For example, the screen printing method can form a low-cost color filter. Further, a method using a photolithography technique, that is, a method of irradiating a transparent film formed on a color filter substrate with ultraviolet rays through a predetermined negative mask to remove an unexposed portion, and then dyeing while forming a stain-proof layer is available. is there.

There is known a method for manufacturing a color filter which can easily and highly accurately form a multicolor fine stripe-shaped or mosaic-shaped pattern using a photosensitive film composed of a base film and a photosensitive resin layer. A step of laminating a photosensitive film consisting of a base film and a photosensitive resin layer colored in one color on a transparent substrate so that the colored photosensitive resin layer faces the substrate, and exposing to form a predetermined pattern The step of allowing and the step of peeling off and developing the base film are repeated to form a multicolor pattern to manufacture a color filter. Photosensitive films are known, and the basic composition and constitution and their action are described in JP-B-45-
This is disclosed in Japanese Patent No. 25231.

For example, a photosensitive resin layer of one color is applied to a base film and dried, and the photosensitive resin layer of the photosensitive film is transferred onto a transparent substrate and exposed through a mask having a predetermined pattern, A method of developing to form a pattern (JP-A-61-99102), a method of performing alkali development (JP-A-2-239205), and a method using a water-soluble base film (JP-A-2-271301). , Heat-press this film on a transparent plate,
A method of exposing through a mask having a predetermined pattern, peeling off the base film, and developing to form a transparent colored image pattern (JP-A-63-187203, JP-A-2).
No. 244005, etc.) is known. Furthermore,
A method for producing a color filter using a photosensitive film is disclosed in JP-A-3-160454 and JP-A-3-160454.
111802, JP-A-2-151805,
JP-A-4-212161, JP-A-4-30160
No. 2, JP-A-5-2107, etc. are known.

Regarding the followability of the photosensitive film, it is necessary to solve it in order to obtain a good pattern, and various measures have been taken to obtain good followability of the photosensitive film. Researchers at Bell Laboratories have developed a three-layer resist method that is capable of accurately microfabricating a substrate even if it has a step (for example, J.Vac.Sci.Tecno).
16: 1620, 1968). In addition, detailed studies have also been conducted on the conformability of the printed circuit board to the unevenness of the substrate, and they have been put to practical use. Since the photosensitive film is semi-solid, lamination (thermocompression bonding) is important for improving the followability so as to form a state close to a liquid (close to a liquid resist). In order to follow unevenness, it is necessary to set the temperature of the laminate so that the viscosity is sufficiently low. It is said that if the liquidity is large, the storage stability at room temperature tends to be poor and cold flow occurs, so that the viscosity cannot be made too low.
It is said that a thicker film is advantageous for filling the recess (for example, solid state technology (Solid
d State Technology) Vol. 29, No. 6, 153, published in 1986, Proc.
Year). Heating after the exposure step is generally performed and is called afterbaking. For example, a color filter (J. Photopolym.S.
ci.Technol., Vol.2, No.2, 1989, pp. 244-248),
Generation of monomer radicals induced by radicals of photoinitiator by afterbaking and its polymerization chain reaction are promoted, and a photosensitive resist layer is applied using a spinner, but prebaking is performed to remove the solvent (for example, 85 ° C. for 5 minutes). It is also common to do. In the film method, the solvent is removed when the film is formed, and thus such prebaking is generally not performed. Further, before development, after heating, the photosensitive resist layer is heated at 50 to 150 ° C. for 30 to 60 seconds to accelerate the reaction of the lower layer portion which is not sufficiently exposed to UV light (JP-A-3- (196596 publication)
Is also being done.

[0006]

In the conventional method for manufacturing a color filter, when the second and subsequent layers are formed, the second and subsequent colored layers on the already formed colored layer (front pixel) are A step is formed between the substrate and the colored layer that is in direct contact with the substrate. This step difference is due to the thickness of the colored layer already formed (1 to 5 μm).
m). Due to this step, the new colored layer does not come into contact with the base (transparent glass), and due to insufficient adhesion pressure, the adhesive strength becomes insufficient, the colored layer does not adhere to the base, and the base film is peeled off. , The base film is peeled off to form a part where the colored layer does not adhere to the base. Further, if exposed and developed as it is, there is a disadvantage that a portion where a colored image does not exist is exposed, and a desired color filter cannot be obtained. More specifically, when the color filter is composed of stripe-shaped pixels of three primary colors (red, green, and blue), the stripe-shaped pixel of the first color has, for example, a thickness of 2.0 μm and a width of 7 μm.
When the second color layer is laminated on the transparent substrate with a gap of 0 μm and a gap of 300 μm, there is unevenness of about 2.0 μm due to the front pixels, and therefore there is no contact between the transparent substrate and the color layer. There was a defect that a sufficient portion was generated and the second colored layer did not sufficiently follow this unevenness. In addition, on the pixels of the second and subsequent colors, part of the colored photosensitive resin layer that had been on the pixels of the first color flows in, and in the second color, the edge close to the pixels of the first color is lifted and the pixel surface is slanted. The cross section becomes so-called J-shape or n-shape. The third color pixel has a so-called M-shaped cross section because both ends of the pixel are lifted because the colored photosensitive resin layer flows in from the adjacent pixels on both sides. FIG. 2 shows a schematic view of a cross section of J-shaped, n-shaped, and M-shaped pixels. If there is a J-shaped lift, the surface of the three-color pixels is not uniform, the desired flatness cannot be obtained, and the lifted edge comes into contact with the counter electrode, resulting in an image defect and further color unevenness. There was a defect such as causing it. In FIG. 2, 6 is a first color pixel, 7 is a second color pixel, and 8 is a third color pixel. The film followability cannot be improved only by adhering the colored photosensitive resin layer to the substrate and passing it through a pressure roll (laminating) while peeling off the protective film of the photosensitive film after heating the substrate.

[0007]

SUMMARY OF THE INVENTION The present invention is a color filter which eliminates the above-mentioned drawbacks, has good workability on a transparent substrate such as a glass plate, and can form a multicolor fine pattern with high accuracy. It provides a manufacturing method. The present invention comprises a step of laminating a photosensitive film comprising a base film and a photosensitive resin layer colored in one color on a transparent substrate so that (i) the colored photosensitive resin layer faces the substrate. , (Ii) a step of forming a predetermined pattern by exposure and (iii) a step of including at least a developing step is repeated to form a multicolor pattern. A step of forming a space between pixels and adhering the layers is performed so that the layer faces the substrate, and after the step of (i), the step of (ii)
The method for producing a color filter, in which heating is performed before the step (1) and the step of transferring the second and subsequent colored photosensitive resin layers from the base film to the space between pixels is performed.

According to the manufacturing method of the present invention, the photosensitive film of the second and subsequent colors can be satisfactorily followed by the unevenness due to the pixels. That is, after the step (i), before the step (ii), heating is performed to transfer the second and subsequent colored photosensitive resin layers from the base film to the substrate surface. Surface irregularities are reduced. After attaching the photosensitive film to the transparent substrate having front pixels on the surface, the second and subsequent colored photosensitive resin layers are applied from the base film to the substrate surface after the step (i) and the step (ii) When the heating is performed before the transfer, the unevenness on the pixel surface, which is the above-mentioned defect, is reduced. In the conventional method, the photosensitive resin layer on the front pixel spreads and rides on the pixels of the second color and the third color to cause unevenness on the pixel surface. This produces a pixel surface without irregularities. In order to eliminate the unevenness on the pixel surface, it is necessary to bond the second and subsequent colored photosensitive resin layers flatly while leaving a space in a portion where there is no front pixel when bonding them onto the front pixel. That is, it is necessary to keep the portion without the front pixel at the same height as the film thickness of the front pixel. The film is floated from the surface of the substrate by the same height as the film thickness of the pixel of the first color, and the colored photosensitive resin layer of the second color does not contact the substrate. To bring the second and subsequent colored photosensitive resin layers into contact with the substrate, heating is performed after the step (i) and before the step (ii). The photosensitive resin layer colored by heating is softened and melted to develop fluidity, and is transferred to the surface of the substrate by flow to adhere to it.

The step of heating before exposure is called prebaking, and this step is generally performed in the known resist technology and photosensitive film technology. In these technologies, prebaking is performed by applying a resist coating solution with a spinner. After that, the remaining solvent is evaporated and the adsorbed solvent is eliminated. Further, this pre-baking is a baking for improving the photosensitivity, and is performed to enhance the adhesion of the photosensitive resin layer to the substrate, and the fluid resin layer is moved to the space. It is different from the heating of the present invention. As the colored photosensitive resin layer, 40 to 90
A low-temperature melting property that allows transfer at ° C is desired. Since the colored photosensitive resin layer has the property of not only photo-curing reaction but also thermo-curing reaction, it is not desirable to carry out the transfer process at high temperature. In the conventional method, the photosensitive resin layer on the front pixel spreads and rides on the second-color and third-color pixels to generate unevenness on the pixel surface. The second and subsequent colored photosensitive resin layers are satisfactorily followed. By the step of transferring the second and subsequent colored photosensitive resin layers from the base film to the space on the surface of the substrate, the above-mentioned defects, that is, the unevenness of the pixel surface, are reduced. The pixel cross-sectional shape of the color filters of the second and subsequent colors is a flat rectangle (for example, a height of 2 μm).
m, width of 75 μm, etc.), after the step of (i) and before the step of (ii), a heating mode in which the photosensitive resin layers of the second and subsequent colors are transferred from the base film to the surface of the transparent substrate is shown in FIG. Will be explained. FIG. 1 is a schematic view showing the production method of the present invention, in which the base film 1 is PET (polyethylene terephthalate film) and the colored photosensitive resin layer is formed in the order of red (R) and green (G). Take for example.

In (a), a colored photosensitive resin layer of a photosensitive film comprising a base film 1 (PET polyethylene terephthalate film) and a colored photosensitive resin layer (green) 2 and front pixels (red) 3 are arranged in order. The state where the transparent substrate 4 facing is shown. (B) shows the bonding in which a space is formed between the colored photosensitive resin layer of the photosensitive film and the substrate on which the front pixels (red) of one color are arranged in order. This step shows the state after the step (i). At this time, it is important that the colored photosensitive resin layer does not follow the pre-pixels and the substrate, remains flat, and contacts the surface of the pre-pixels leaving a space between the pre-pixels. (B)
Shows a state in which the green (G) colored photosensitive resin layer is in close contact with the red (R) which is the front pixel. Here, the portion indicated as space is a portion of the space between the pre-pixels in which neither the green colored photosensitive resin layer nor the red colored photosensitive resin layer exists, and when laminated in a vacuum, the Part, the part filled with nitrogen when laminated in a nitrogen stream,
When laminated in air, it becomes a part filled with air.

(C) shows the state after the heating step of the present invention. The heating step is performed after the step (i) and before the step (ii), and the colored photosensitive resin layer (G) and the space are separated from each other. Has been replaced. Immediately after lamination in the state of (b), the colored photosensitive resin layer (green) 2 is in close contact with the base film 1, but the fluidity is increased by the heating step and transferred to the transparent substrate surface. The green colored photosensitive resin layer has a larger adhesion to the substrate than the base film. That is, it can be inferred that the contact angle of the green colored photosensitive resin layer is larger than the contact angle of the base film with respect to the substrate, so when the liquid drops down the wall of the red front pixel, droplets are created on the base film surface. And may contact the substrate and then spread over the substrate to complete the transition. When the transfer process is completed, a space appears on the surface of the green colored photosensitive resin layer. That is, the space is replaced with the colored photosensitive resin layer. At this time, since the colored photosensitive resin layer is made uniform by its surface tension, the flatness of the surface is excellent, and the pixel after development has almost the same cross-sectional shape as the first color. Although the case where the first color is red and the second color is green has been described above as an example, the order of colors is not limited to this. In addition to the order of red, green, blue and black, any color order such as black-blue-green-red and black-red-blue-green is possible in the present invention.

(D) shows the cross-sectional shape of the pixel of the color filter after the colored photosensitive resin layer (green) is exposed and developed. The peeling of the base film is performed after the exposure step and before the development step or before the exposure step.

The heating step after the step (i) and before the step (ii) is carried out at room temperature or above and below the temperature at which the thermosetting reaction of the colored photosensitive resin layer starts. The transfer is completed at a low temperature for a long time and at a high temperature in a short time, and the transferred colored photosensitive resin layer surface has a high degree of flatness. For heating, hot plate heating, hot air blowing (warming with a dryer), oven heating, ultrasonic heating, infrared heating, electromagnetic induction heating, hot water immersion, underwater temperature raising,
There are, but not limited to, hot water casting (spraying hot water), hot oil immersion, friction heat heating, friction heat heating from the substrate side, heating in a pressure oven, heating in a vacuum container, and the like.

The photosensitive film used in the present invention is a transparent base film, for example, a film of polyethylene terephthalate or the like, coated with a photosensitive resin composition colored in one color, and dried to form a photosensitive film colored in one color. A resin layer is formed. Since this colored photosensitive resin layer is uncured, flexible and has adhesiveness, it is desirable that a protective film such as a polyethylene film is further laminated on the colored photosensitive resin layer to prevent external damage and adhesion of foreign matter. . The colored photosensitive resin layer formed on the photosensitive film is attached on a transparent substrate while peeling off the protective film, and the base film on the surface of the colored photosensitive resin layer is removed after exposure through a negative mask having a predetermined pattern. It

The photosensitive resin layer colored in one color includes an ethylenically unsaturated compound (a), a carboxyl group-containing film-forming polymer (b), a photopolymerization initiator or a photopolymerization initiator compound (c) and a pigment. Alternatively, the dye (d) is preferably contained, and the layer thickness is preferably 0.5 to 15 μm.

As the ethylenically unsaturated compound (a),
For example, a compound obtained by adding an α, β-unsaturated carboxylic acid to a polyhydric alcohol, such as trimethylolpropane di (meth) acrylate (means methacrylate or acrylate; the same applies hereinafter), trimethylolpropane tri (meth) Acrylate, tetramethylolmethane tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, etc .; Compound obtained by adding α, β-unsaturated carboxylic acid to glycidyl group-containing compound , Trimethylolpropane triglycidyl ether triacrylate, bisphenol A diglycidyl ether di (meth) acrylate, etc .; polyvalent carboxylic acids,
For example, a compound having a hydroxyl group and an ethylenically unsaturated group with phthalic anhydride, etc., such as an esterified product of β-hydroxyethyl (meth) acrylate; (meth) acrylic acid (meaning methacrylic acid or acrylic acid, the same applies hereinafter) Alkyl ester of, for example, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate and the like, trimethylhexamethylene diisocyanate and dihydric alcohol A urethane diacrylate compound obtained by reacting a divalent (meth) acrylic acid monoester may also be used. You may use 2 or more types of these compounds. The blending amount of the component (a) is preferably 90 to 50 parts by weight, with the total amount of the components (a) and (b) being 100 parts by weight.

The carboxyl group-containing film-forming polymer (b) is, for example, a copolymer of (meth) acrylic acid alkyl ester and (meth) acrylic acid, (meth)
Examples thereof include a copolymer of an acrylic acid alkyl ester, (meth) acrylic acid, and a vinyl monomer copolymerizable therewith. Examples of the alkyl (meth) alkyl ester include methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, and 2-ethylhexyl (meth) acrylate. Further, as (meth) acrylic acid alkyl ester, (meth) acrylic acid and vinyl monomers copolymerizable with these,
Dimethylethyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, diethyl (meth) acrylate, 2,2,2-trifluoroethyl (meth) acrylate, 2,2,3,3-tetrafluoropropyl ( Examples thereof include (meth) acrylate, acrylamide, diacetone acrylamide, styrene and vinyltoluene.
Further, copolyesters such as terephthalic acid, isophthalic acid, sebacic acid and the like, copolymers of butadiene and acrylonitrile, cellulose acetate, cellulose acetate butyrate, methyl cellulose, ethyl cellulose and the like can be used. By using the component (b), the coating properties and the film properties of the cured product are improved, and the amount thereof is preferably 10 to 50 parts by weight, with the total amount of the components (a) and (b) being 100 parts by weight. is there. If the blending amount is less than 10 parts by weight, the amount of ethylenically unsaturated compound is large and the photosensitivity is lowered, and if it exceeds 50 parts by weight, the photocured product tends to be brittle. Further, the weight average molecular weight of the component (b) is 10,000 from the viewpoint of the coating property and the film strength.
The above is preferable.

Examples of the photopolymerization initiator or the photopolymerization initiator compound (c) include benzophenone, N, N'-tetramethyl-4,4'-diaminobenzophenone (Michler's ketone), and N, N'-tetra. Methyl-4,4'-
Aromatic ketones such as diaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone, 2-ethylanthraquinone, phenanthrenequinone; benzoin ethers such as benzoin methyl ether, benzoin ethyl ether, benzoin phenyl ether , Benzoin such as methylbenzoin and ethylbenzoin; 2- (o-chlorophenyl) -4,5-diphenylimidazole dimer, 2-
(O-chlorophenyl) -4,5-di (m-methoxyphenyl) -4,5-diphenylimidazole dimer, 2
-(O-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (o-methoxyphenyl) -4,
5-diphenylimidazole dimer, 2- (p-methoxyphenyl) -4,5-diphenylimidazole dimer, 2,4-di (p-methoxyphenyl) -5-phenylimidazole dimer, 2- ( 2,4-dimethoxyphenyl) -4,5-diphenylimidazole dimer, 2-
A 2,4,5-triarylimidazole dimer such as (p-methylmercaptophenyl) -4,5-diphenylimidazole dimer is used. The compounding amount of (c) is preferably 0.1 to 10 parts by weight based on 100 parts by weight of the total amount of (a) and (b). If the content is less than 0.1 parts by weight, the photosensitivity will be insufficient, and if it exceeds 10 parts by weight, the light absorption on the surface of the composition will increase during exposure, and the internal photocuring will tend to be insufficient. There is.

As the pigment or dye (d), a generally known coloring agent can be used, and the compatibility with the photosensitive resin layer, particularly the ethylenically unsaturated compound or the carboxyl group-containing film-forming polymer, the target hue , Light transmittance, etc. are taken into consideration. Various compounds can be used as pigments for the color filter, for example, inorganic pigments such as barium sulfate, zinc oxide, lead sulfate, titanium oxide, red iron oxide, carbon black, graphite, and chromium oxide, the following organic pigments (color index number) )and so on. Yellow pigment: CI Pigment Yellow 20, 24, 83,
86, 93, 109, 110, 117, 125, 13
7, 138, 139, 147, 148, 153, 15
4, 166, 168 Orange Pigment: CI Pigment Orange 36, 43, 5
1, 55, 59, 61 Red pigment: CI Pigment Red 9, 97, 122, 1
23, 149, 168, 177, 180, 092, 21
5, 216, 217, 220, 223, 224, 22
6, 227, 228, 240, 48: 1 violet pigment: CI pigment violet 19,
23, 29, 30, 37, 40, 50 Blue Pigment: CI Pigment Blue 15, 15: 6, 2
2, 60, 64 Green pigment: CI Pigment Green 7, 36 Black pigment: CI Pigment Black 7 The content of (d) is preferably 1 to 50 parts by weight based on 100 parts by weight of the total amount of (a) and (b). It is a department. If the blending amount is less than 1 part by weight, the coloring is insufficient, and if it exceeds 50 parts by weight, the light transmittance tends to decrease.

In the colored photosensitive resin layer, a melamine resin and / or an epoxy resin which thermally reacts with the carboxyl group of the carboxyl group-containing film-forming polymer in order to enhance the heat-curing property, (a) component and (b) component. Total of 10
It is desirable to add 1 to 20 parts by weight to 0 parts by weight. By adding these and heating at 130 to 200 ° C. for 30 to 60 minutes, the crosslink density of the colored layer is improved and the heat resistance is significantly improved.

In the present invention, the color filter is manufactured as follows. First, a colored photosensitive resin formed on a photosensitive film is laminated on a transparent substrate, a negative mask having a predetermined pattern is placed on the base film on the surface of the colored photosensitive resin layer, and the base film is removed. . Then, the unexposed portion is developed with a developing solution to form a colored pattern. This colored pattern forming step is repeated a predetermined number of times using photosensitive films of different colors to form a multicolor pattern, whereby a color filter is obtained. When forming a fine line with a colored photosensitive resin layer attached on a transparent substrate, the colored layer after development may be flexible because it is exposed with the minimum exposure amount that can withstand the developing solution, and further UV rays are required after development. The colored layer is completely cured by irradiation or heat treatment, or by electron beam irradiation to give strength and heat resistance. In the present invention, in particular, so that the second and subsequent colored photosensitive resin layers face the substrate,
A step of forming a space between the pixels and adhering is performed, and after the step (i) and before the step (ii), from the base film of the photosensitive resin layer of the second and subsequent colors by heating to the space between the pixels. The transition process is performed.

[0022]

【Example】

Example 1 (1) Production of coating liquid for colored photosensitive resin layer: 135 parts by weight of the pigment paste of any one of Table 2 and 200 parts by weight of a solution prepared by uniformly dissolving the materials of Table 1 and melamine resin 5
Parts by weight and 5 parts by weight of a silane coupling agent were added and dissolved and dispersed to obtain a colored photosensitive resin layer coating liquid.

[0023]

[Table 1]

[0024]

[Table 2]

Melamine resin Cymel 300 (trade name of hexamethoxymethyl melamine, manufactured by Mitsui Toatsu Co., Ltd.) Silane coupling agent K3M503 (manufactured by Shin-Etsu Chemical Co., Ltd.) Preparation of coating liquid 2. Ultrasonic wave is applied immediately before using the coating liquid. It was used by dispersing for 5 hours.

(2) Production of Photosensitive Film The obtained coating solution was applied to a polyethylene terephthalate film having a thickness of 6 μm (Tetron film S6 manufactured by Teijin Ltd.).
It was coated on the above to a uniform thickness and dried in a dryer at 100 ° C. for 2 minutes. As a protective film, a 30-μm-thick polyethylene film was laminated to obtain a photosensitive film. The thickness of the photosensitive resin layer after drying was 2.01 μm.

(3) Production of Filter (a) Substrate Heating A base substrate for a color filter (glass substrate having a thickness of 1.1 mm, Corning 7074 manufactured by Corning Co., Ltd.) was heated at 80 ° C. for 10 minutes. (B) Laminating step While peeling off the protective film of the photosensitive film,
The colored photosensitive resin layer was laminated under the following conditions on the base substrate for the color filter heated under the above conditions. Roll temperature: 120 ° C. Roll pressure: 1.0 kg / cm ² Speed: 1.5 m / min (c) Heating process Green and blue were especially heated. It heat-processed for 15 minutes in an 80 degreeC oven. (D) Exposure step A predetermined pattern (a rectangle of 70 μm × 270 μm having a gap of 30 μm in the longitudinal direction and a length of 150 mm,
There is a 30 μm gap in the parallel direction, and the gap in the parallel direction is 3
Through a negative mask having a stripe pattern with a period of 00 μm), an exposure device HMW-201B (3 kW ultra-high pressure mercury lamp, manufactured by Oak Manufacturing Co., Ltd.) was used to adjust the exposure amount to a predetermined value, and the exposure was performed. (E) Peeling process The polyethylene terephthalate film was removed. (F) Developing Step 10-2 with 0.08 wt% Na ₂ CO ₃ aqueous solution at 30 ° C.
Spray development was carried out for 0 seconds to remove the unexposed portion, and a colored pattern of one color was formed. The steps of forming the colored patterns (a) to (f) described above were repeated using the photosensitive films of respective colors in the order of red, blue, and green. When the second color of blue is laminated, the film is fed with the film feed direction orthogonal to the red stripe pattern of the front pixels, and then
Prior to the exposure of (d), heating was carried out at 80 ° C. for 15 minutes and the third color green was similarly processed to form a multicolor pattern. The exposure dose at this time was 50 mJ / cm ² for the red, blue and green photosensitive resin layers. The pattern of the mask used is one in which the stripes form an independent rectangle for each pixel and a gap is provided in the longitudinal direction of the stripes. An ultraviolet irradiator (lamp H5600L /
(2, made by Toshiba Denshi Co., Ltd.) and then irradiated at ³ J / cm ²
It heated at 50 degreeC for 45 minutes, and obtained the color filter. The resulting color filter has red, blue and green patterns (7
A rectangle of 0 μm x 270 μm with a gap of 30 μm in the longitudinal direction, a length of 150 mm, and 30 μm in the parallel direction.
2), the stripe-shaped pattern) having an interval of 300 μm in the parallel direction is regularly arranged, and the followability is good. Further, there was no step in the pixel, neither M-shape nor J-shape was observed in the cross section of the pixel, and the effect of heating at 80 ° C. for 15 minutes was recognized.

Example 2 (1) Production of coating liquid for colored photosensitive resin layer To 200 parts by weight of a solution prepared by uniformly dissolving the materials shown in Table 3, 145 parts by weight of the pigment paste of any one of Table 2 and 5 of the melamine resin were added.
Parts by weight and 5 parts by weight of a silane coupling agent were added and dissolved and dispersed to obtain a colored photosensitive resin layer coating liquid.

[0029]

[Table 3]

Melamine resin Cymel 300 (trade name of hexamethoxymethyl melamine, manufactured by Mitsui Toatsu Co., Ltd.) Silane coupling agent K3M503 (manufactured by Shin-Etsu Chemical Co., Ltd.) Preparation of coating liquid The above-mentioned materials are used as a pigment paste. Was gradually added, and kneaded and dispersed in a ball mill for 8 hours in a usual manner to adjust.

(2) Production of Photosensitive Film A polyethylene terephthalate film having a thickness of 23 μm (Tetron Film S manufactured by Teijin Ltd.)
6) The above was coated using a kiss-touch reverse roll coater. It was dried for 2 minutes in a dryer at 100 ° C. As a protective film, a 30-μm-thick polyethylene film was laminated to obtain a photosensitive film. The thickness of the photosensitive resin layer after drying was 1.9 μm.

(3) Production of Filter (a) Substrate Heating The base substrate for the color filter used in Example 1 was heated to 80 ° C.
Heated for 10 minutes. (B) Laminating step While peeling off the protective film of the photosensitive film,
The colored photosensitive resin layer was laminated under the following conditions on the base substrate for the color filter heated under the above conditions. Roll temperature: 80 ° C. Roll pressure: 1.0 kg / cm ² Speed: 2.5 m / min (c) Heating process Green and blue were especially heated. It heat-processed for 15 minutes in an 80 degreeC oven. (D) Exposure step Exposure machine H through a negative mask of a predetermined pattern (for a normal color filter consisting of stripe-shaped pixels)
MW-201B (3 kW, ultra-high pressure mercury lamp, manufactured by Oak Manufacturing Co., Ltd.) was used for contact exposure at a predetermined exposure amount. (E) Peeling The polyethylene terephthalate film was removed. (F) Development 10-2 with 0.08% by weight Na ₂ CO ₃ aqueous solution at 30 ° C.
Spray development was carried out for 0 seconds to remove the unexposed portion, and a colored pattern of one color was formed.

The steps of forming the colored patterns (a) to (f) described above are repeated using the photosensitive films of respective colors in the order of red, blue and green. When the second color of blue is laminated, the film is fed. The film is sent with the direction orthogonal to the red stripe pattern of the front pixels, and then (d)
Prior to the exposure step, heating was carried out at 80 ° C. for 15 minutes, and the third color, green, was similarly processed to form a multicolor pattern. The exposure dose at this time was 50 mJ / cm ² for the red, blue and green photosensitive resin layers. An ultraviolet irradiator (lamp H5600L / 2, manufactured by Toshiba Denshi Co., Ltd.) is applied to the obtained multicolor pattern.
Was irradiated at ³ J / cm ² and then heated at 150 ° C. for 45 minutes to obtain a color filter. The color filter obtained has red, blue and green patterns (70 μm × 270 μm).
Rectangle has a gap of 30 μm in the longitudinal direction and has a length of 15
The distance was 0 mm, there was a gap of 30 μm in the parallel direction, and the stripe-like pattern with a gap of 300 μm in the parallel direction was arranged in an orderly manner, and the followability was good. Further, there was no step in the pixel, and neither M-shaped nor J-shaped was observed in the cross section of the pixel. The effect of heating at 80 ° C. for 15 minutes was confirmed.

Example 3 The procedure of Example 1 was repeated, except that the materials in Table 4 below were replaced with the materials in Table 1.

[Table 4] The color filter obtained has red, blue and green patterns (a rectangle of 70 μm × 270 μm is 30 μm in the longitudinal direction).
With a gap of 150 mm and a length of 30 mm.
There were gaps of .mu.m, stripe-like patterns having a 300 .mu.m period in the parallel direction were arranged in an orderly manner, and the followability was good. In addition, there is no step in the pixel, and M is
Neither shape nor J shape was recognized, and the effect of heating at 80 ° C. for 15 minutes was recognized.

Comparative Example 1 A red colored pattern was formed in the same manner as in Example 1, and then the formation process of this pattern was performed in blue as in Example 1.
The process was repeated using the photosensitive film of each color in the order of green, but the heating step at 80 ° C. for 15 minutes before the exposure of (d) was not performed. At this time, the stripe pattern has a width of 7
The stripe shape was 0 μm, the length was 150 mm, and the interval was 300 μm. The film has insufficient followability and some wrinkles are generated on the film, resulting in uneven followability. Further, when the surface of the pixel was blue, the cross section thereof was J-shaped, and the difference in film thickness between both ends was 0.3 μm. In green, its cross section is M-shaped,
There was a difference in film thickness of 0.5 μm between both ends and the center. This is because the heating step of baking at 80 ° C. for 15 minutes before the exposure of (d) was not performed, and thus a rectangular pixel cross section could not be obtained.

[0036]

According to the conventional method, the photosensitive resin layer on the front pixel spreads and rides on the second color and third color pixels to cause unevenness on the pixel surface. According to the above, the photosensitive film of the second color or later is satisfactorily followed by the unevenness due to the pixels, and the step of migrating the photosensitive resin layer of the second color or later from the base film to the space on the substrate surface causes Surface irregularities are reduced. According to the manufacturing method of the present invention, a color filter having excellent heat resistance in which a highly precise multicolor fine pattern having a uniform thickness is formed on a substrate with good followability and workability of a photosensitive film is manufactured. be able to.

[Brief description of drawings]

FIG. 1 is a schematic view showing a production method of the present invention.

FIG. 2 is a schematic view of a cross section of a pixel of a conventional color filter.

[Explanation of symbols]

 1 Base film (PET) 2 Colored photosensitive resin (green) 3 Front pixel (red) 4 Transparent substrate 5 Space 6 First color pixel 7 Second color pixel 8 Third color pixel

Claims (1)

[Claims] 1. A photosensitive film comprising a base film and a photosensitive resin layer colored in one color on a transparent substrate,
Multicoloring is performed by repeating (i) a step of laminating the colored photosensitive resin layer so as to face the substrate, (ii) a step of exposing to form a predetermined pattern, and (iii) a step including at least a developing step. In the method of manufacturing a color filter for forming a pattern, a step of forming a space between pixels and adhering is performed so that the second and subsequent colored photosensitive resin layers face the substrate. A method for producing a color filter, characterized in that heating is performed after the step and before the step (ii), and a step of transferring the second and subsequent colored photosensitive resin layers from the base film to the space between pixels is performed.