JPH09246085A - Manufacture of multilayered ceramic capacitor - Google Patents
Manufacture of multilayered ceramic capacitorInfo
- Publication number
- JPH09246085A JPH09246085A JP8055720A JP5572096A JPH09246085A JP H09246085 A JPH09246085 A JP H09246085A JP 8055720 A JP8055720 A JP 8055720A JP 5572096 A JP5572096 A JP 5572096A JP H09246085 A JPH09246085 A JP H09246085A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- zirconia
- layers
- laminated body
- sheet layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は積層セラミックコン
デンサの製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a monolithic ceramic capacitor.
【0002】[0002]
【従来の技術】従来の積層セラミックコンデンサの製造
方法は、セラミック誘電体層と内部電極層を交互に複数
枚積層し、加圧圧着して積層体を得る。その後所定寸法
形状に切断、分離しグリーンチップを得る。次に、この
グリーンチップをジルコニア粉末になじませた後、さら
にジルコニア粉末を底面に敷いたアルミナ質サヤに詰め
て焼成していた。2. Description of the Related Art In a conventional method of manufacturing a monolithic ceramic capacitor, a plurality of ceramic dielectric layers and internal electrode layers are alternately laminated and pressure-bonded to obtain a laminated body. After that, it is cut into a predetermined shape and separated to obtain a green chip. Next, after this green chip was soaked in zirconia powder, the zirconia powder was further packed in an alumina-based sheath laid on the bottom surface and baked.
【0003】[0003]
【発明が解決しようとする課題】前記従来の製造方法で
は、焼成サヤ詰め前に、あらかじめグリーンチップに融
着防止のためジルコニア粉末をなじませる準備作業時間
が必要であるとともに、サヤ詰め工程でグリーンチップ
の表面にサヤ成分等の、焼結過程にグリーンチップと反
応する不純物が付着しやすく、外観及び特性不良発生の
原因となっていた。In the above conventional manufacturing method, it is necessary to prepare the zirconia powder to prevent the green chips from adhering to the zirconia powder in advance before the firing and the filling in the sheath. Impurities such as sheath components that react with the green chip during the sintering process are likely to adhere to the surface of the chip, causing defects in appearance and characteristics.
【0004】本発明は焼成の準備作業を省略し、しかも
グリーンチップ表面に不純物の付着も防止できる積層セ
ラミックコンデンサの製造方法を提供することを目的と
するものである。It is an object of the present invention to provide a method for manufacturing a monolithic ceramic capacitor which can omit the preparation work for firing and can prevent the adhesion of impurities to the surface of the green chip.
【0005】[0005]
【課題を解決するための手段】この目的を達成するため
本発明は、セラミック誘電体層と内部電極層との積層体
の最外層面をジルコニア粉末からなるシート層で覆い、
切断分離後、一体焼成することにより所期の目的を達成
するものである。To achieve this object, the present invention covers the outermost layer surface of a laminate of a ceramic dielectric layer and an internal electrode layer with a sheet layer made of zirconia powder,
The intended purpose is achieved by integrally firing after cutting and separating.
【0006】[0006]
【発明の実施の形態】本発明の請求項1に記載の製造方
法は、セラミック誘電体層と内部電極層を交互に複数枚
積層する積層体において、その積層体の少なくとも一つ
の最外層面を、ジルコニア粉末からなるシート層で覆
い、この積層体を切断後一体焼成するものである。これ
によりグリーンチップをジルコニア粉末になじませる準
備作業が不要になるとともに、サヤ成分等の不純物がグ
リーンチップ表面に付着することを防止できる。DESCRIPTION OF THE PREFERRED EMBODIMENTS The manufacturing method according to claim 1 of the present invention is a laminated body in which a plurality of ceramic dielectric layers and internal electrode layers are alternately laminated, and at least one outermost layer surface of the laminated body is formed. The sheet is covered with a sheet layer made of zirconia powder, and the laminated body is cut and integrally fired. This eliminates the need for preparatory work for adapting the green chip to the zirconia powder, and prevents impurities such as sheath components from adhering to the surface of the green chip.
【0007】本発明の請求項2に記載の発明は、最外層
面を覆うジルコニア粉末よりなるシート層の厚さを、7
〜30μmとするものである。これはグリーンチップ同
士の焼成付着及び不純物との反応を防止するに必要な厚
さの下限と、焼成後最外層のジルコニア層を除去する
際、チップ素子の外観寸法形状に影響を与えない上限を
定めたものである。According to the second aspect of the present invention, the thickness of the sheet layer made of zirconia powder covering the outermost layer surface is set to 7
˜30 μm. This is the lower limit of the thickness necessary to prevent the firing adhesion between green chips and the reaction with impurities, and the upper limit that does not affect the external dimensions and shape of the chip element when removing the outermost zirconia layer after firing. It has been set.
【0008】以上の手段によれば、積層体が不純物との
反応性の低いジルコニアで覆われているため、焼結過程
不純物との反応が防げ、外観及び特性不良を起こすこと
がない。また、焼成時のチップ同士の付着及び焼成用サ
ヤとの付着は発生しないことから、焼成サヤ詰め準備作
業が不必要となる。According to the above means, since the laminate is covered with zirconia, which has a low reactivity with impurities, the reaction with impurities in the sintering process can be prevented, and the appearance and characteristics will not be deteriorated. Further, since the chips are not attached to each other and the firing sheath is not attached at the time of firing, the firing sheath filling preparation work is unnecessary.
【0009】以下、本発明の実施形態について説明す
る。 (実施の形態1)図1は本実施形態のグリーンチップの
斜視図、図2は同じく積層体の斜視図、図3は同じく積
層セラミックコンデンサの斜視図である。図1、図2に
おいて1はセラミック誘電体層、2は内部電極層、3は
無効層、4はジルコニア粉末からなるシート層である。
図3において5は外部電極である。Embodiments of the present invention will be described below. (Embodiment 1) FIG. 1 is a perspective view of a green chip of the present embodiment, FIG. 2 is a perspective view of a laminated body, and FIG. 3 is a perspective view of a laminated ceramic capacitor. 1 and 2, 1 is a ceramic dielectric layer, 2 is an internal electrode layer, 3 is an ineffective layer, and 4 is a sheet layer made of zirconia powder.
In FIG. 3, reference numeral 5 denotes an external electrode.
【0010】先ずカルシアで安定化させたジルコニア微
粉末をバインダーのポリビニールブチラールを用いて2
5μmのシート層4を作成する。次にそのジルコニア層
4上に、あらかじめ作成していたチタン酸バリウムを主
成分とするセラミックの無効層3を積層する。次いで内
部電極層2が印加されたチタン酸バリウムを主成分とす
るセラミック誘電体層1を必要枚数を積層し、その後さ
らに無効層3を積層する。その積層体の最上層に、前記
ジルコニア粉末よりなるシート層4を積層加圧して、上
下層がジルコニア粉末よりなるシート層4で覆われた積
層体を形成する。その後所定寸法形状に切断、分離した
グリーンチップを得る。First, calcia-stabilized zirconia fine powder was mixed with polyvinyl butyral as a binder.
A 5 μm sheet layer 4 is created. Next, on the zirconia layer 4, a ceramic ineffective layer 3 containing barium titanate as a main component, which has been prepared in advance, is laminated. Next, the required number of ceramic dielectric layers 1 containing barium titanate as a main component, to which the internal electrode layers 2 are applied, are laminated, and then the ineffective layer 3 is further laminated. The sheet layer 4 made of the zirconia powder is laminated and pressed on the uppermost layer of the laminated body to form a laminated body in which upper and lower layers are covered with the sheet layer 4 made of zirconia powder. After that, a green chip that is cut into a predetermined shape and separated is obtained.
【0011】前記グリーンチップを、以下の3種類のア
ルミナ質サヤにサヤ詰めして1300℃の温度で焼成し
た。(1)底面にジルコニア粉末を散布、(2)表面を
ジルコニアでコート、(3)無加工。The green chips were packed in the following three types of alumina-based sheaths and baked at a temperature of 1300 ° C. (1) Sprinkle zirconia powder on the bottom surface, (2) coat the surface with zirconia, (3) unprocessed.
【0012】焼成後、それぞれのチップ素子をバレル研
磨機を用いて、上下面のシート層4を除去するとともに
内部電極3を露出させるために端面を研磨する。その端
面に外部電極5を塗布、焼き付けて、さらに外部電極5
上にメッキ処理を行い積層セラミックコンデンサを完成
させた。この様にして得られた完成品と、従来方法で得
られた完成品の外観(ピンホール)検査結果を(表1)
に、電気特性(ショート)選別結果を(表2)に示し
た。After firing, each chip element is polished with a barrel polishing machine to remove the upper and lower sheet layers 4 and to polish the end surfaces to expose the internal electrodes 3. The external electrode 5 is applied and baked on the end face, and the external electrode 5
The monolithic ceramic capacitor was completed by performing a plating process on the top. The appearance (pinhole) inspection results of the finished product thus obtained and the finished product obtained by the conventional method are shown in (Table 1).
Table 2 shows the electrical characteristics (short) selection results.
【0013】[0013]
【表1】 [Table 1]
【0014】[0014]
【表2】 [Table 2]
【0015】(表1)で明らかなように、本発明品は従
来品に比べて外観不良の発生率が著しく低い、しかも焼
成サヤ詰めの条件に関係なく良好な効果が得られること
が判る。また、(表2)からも、本発明品は従来品に比
べて電気特性不良の発生率が低く、なかでも外観不良が
原因とみられるショート不良の発生はゼロであった。As is clear from (Table 1), the product of the present invention has a remarkably low occurrence rate of appearance defects as compared with the conventional product, and further, a good effect can be obtained regardless of the firing sheath filling condition. In addition, from Table 2 as well, the product of the present invention had a lower occurrence rate of defective electrical characteristics than the conventional product, and in particular, there was no occurrence of a short circuit defect which is considered to be caused by a defective appearance.
【0016】(実施の形態2)次に、実施形態2におい
て、積層体上下面に使用する、ジルコニア粉末よりなる
シート4の厚みのみを変え、その他の条件は前記実施形
態1と全く同一条件で作成した。(Embodiment 2) Next, in Embodiment 2, only the thickness of the sheet 4 made of zirconia powder used on the upper and lower surfaces of the laminate is changed, and the other conditions are exactly the same as those of Embodiment 1. Created.
【0017】ジルコニア層4の厚さは各々以下の通りと
した。(1)3μm、(2)7μm、(3)25μm、
(4)30μm、(5)35μm。The thickness of the zirconia layer 4 was as follows. (1) 3 μm, (2) 7 μm, (3) 25 μm,
(4) 30 μm, (5) 35 μm.
【0018】以上の条件で作成した積層セラミックコン
デンサの外観及び電気特性の検査結果を(表1)、(表
2)に示した。Tables 1 and 2 show the inspection results of the appearance and electrical characteristics of the monolithic ceramic capacitors produced under the above conditions.
【0019】(表1)及び(表2)から明らかなよう
に、7〜30μmの範囲の厚さのシート層4を用いたも
のは外観、電気特性とも実施形態1と同様に不良の発生
率が極めて低く良好な結果が得られることが判る。しか
しながら3μmのシート層4の場合はジルコニアシート
が薄すぎて、成形用キャリアフィルムから剥離できず、
良好なシート層4が得られず積層は中止した。また一方
35μmのシート層4を用いた場合、バレル研磨機等を
用いて、シート層4の焼結部分を除去する際、シート層
4の厚みが厚いため、研磨時間が長くなり焼結部分を完
全に除去すると、焼結素体の内部分も大きく研磨されて
しまい、焼結体側面から内部電極が露出してしまうた
め、電気特性に悪影響を与えるおそれがあり、しかも、
外形寸法不良となったため、その時点で評価を中止し
た。As is clear from (Table 1) and (Table 2), those using the sheet layer 4 having a thickness in the range of 7 to 30 μm have the same appearance and electrical characteristics as those of the first embodiment. It can be seen that is very low and good results are obtained. However, in the case of the sheet layer 4 having a thickness of 3 μm, the zirconia sheet is too thin to be peeled from the carrier film for molding,
The good sheet layer 4 was not obtained and the lamination was stopped. On the other hand, when the sheet layer 4 having a thickness of 35 μm is used, when the sintered portion of the sheet layer 4 is removed using a barrel polishing machine or the like, since the thickness of the sheet layer 4 is large, the polishing time becomes long and the sintered portion is removed. If completely removed, the inner part of the sintered body is also greatly polished, and the internal electrodes are exposed from the side surface of the sintered body, which may adversely affect the electrical characteristics.
Since the external dimensions became defective, the evaluation was stopped at that point.
【0020】尚、本実施形態では、ジルコニアをカルシ
アで安定化させたものを用いたが、イットリアの安定化
した材料を用いても良い。またさらに、積層体を覆うた
めのシート層4は、上下層が同一厚みである必要はな
く、ジルコニアシートキャリアフィルムから剥離できる
厚さで、しかも30μmを越えなければどのような組合
せでも良い。In this embodiment, zirconia stabilized with calcia was used, but yttria stabilized material may be used. Furthermore, the sheet layer 4 for covering the laminate does not have to have the same thickness in the upper and lower layers, and may have a thickness such that it can be peeled from the zirconia sheet carrier film, and may be any combination as long as it does not exceed 30 μm.
【0021】[0021]
【発明の効果】以上のように、本発明による積層セラミ
ックコンデンサの製造方法によれば、グリーンチップを
不純物との反応性の低いジルコニア粉末よりなるシート
層で覆った状態で焼成するため、不純物が付着しても、
外観及び電気特性不良を起こすことがなく、品質の優れ
た積層セラミックコンデンサが得られるとともに、焼成
時のチップ素子同士の付着防止の目的で、ジルコニア粉
末をなじませる準備作業が省略できる。As described above, according to the method for manufacturing a monolithic ceramic capacitor according to the present invention, since the green chip is fired in a state of being covered with a sheet layer made of zirconia powder having low reactivity with impurities, the impurities are removed. Even if it adheres,
It is possible to obtain a monolithic ceramic capacitor of excellent quality without causing defects in appearance and electrical characteristics, and it is possible to omit the preparatory work for accommodating zirconia powder for the purpose of preventing adhesion of chip elements to each other during firing.
【図1】本発明の一実施形態のグリーンチップの斜視図FIG. 1 is a perspective view of a green chip according to an embodiment of the present invention.
【図2】本発明の一実施形態の積層体の斜視図FIG. 2 is a perspective view of a laminate according to an embodiment of the present invention.
【図3】積層セラミックコンデンサの斜視図FIG. 3 is a perspective view of a multilayer ceramic capacitor.
1 セラミック誘電体層 2 内部電極層 3 無効層 4 シート層 5 外部電極 DESCRIPTION OF SYMBOLS 1 Ceramic dielectric layer 2 Internal electrode layer 3 Invalid layer 4 Sheet layer 5 External electrode
Claims (2)
に複数枚積層した積層体の少なくとも一つの最外層面を
ジルコニア粉末からなるシート層で覆い、その後このシ
ート層を有する積層体を切断し、次に一体焼成すること
を特徴とする積層セラミックコンデンサの製造方法。1. A laminate in which a plurality of ceramic dielectric layers and internal electrode layers are alternately laminated, at least one outermost layer surface is covered with a sheet layer made of zirconia powder, and then the laminate having the sheet layer is cut. And a method for manufacturing a monolithic ceramic capacitor, which is characterized by integrally firing.
が、7〜30μmであることを特徴とする請求項1記載
の積層セラミックコンデンサの製造方法。2. The method for producing a monolithic ceramic capacitor according to claim 1, wherein the thickness of the sheet layer made of zirconia powder is 7 to 30 μm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8055720A JPH09246085A (en) | 1996-03-13 | 1996-03-13 | Manufacture of multilayered ceramic capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8055720A JPH09246085A (en) | 1996-03-13 | 1996-03-13 | Manufacture of multilayered ceramic capacitor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09246085A true JPH09246085A (en) | 1997-09-19 |
Family
ID=13006713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8055720A Pending JPH09246085A (en) | 1996-03-13 | 1996-03-13 | Manufacture of multilayered ceramic capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09246085A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018133441A (en) * | 2017-02-15 | 2018-08-23 | 株式会社村田製作所 | Production method of multilayer ceramic electronic part |
-
1996
- 1996-03-13 JP JP8055720A patent/JPH09246085A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018133441A (en) * | 2017-02-15 | 2018-08-23 | 株式会社村田製作所 | Production method of multilayer ceramic electronic part |
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