JPH09245724A - Air evacuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase air evacuation speed, reduce air ovacuation time, improve the degree of vacuum, and obtain a longer service life of an image display device by providing a high voltage field applied positive electrode and a negative electrode as a means of ionization of the gas in a container and acceleration of that ionization in the container to be vacuumed. SOLUTION: A positive electrode 109 has a higher potential than the peripheral potential, and a negative electrode 110 is grounded in the same was as that in the peripheral potential. The residual molecules adsorbed on the positive electrode 109 is ionized on the positive electrode surface by means of its high electric field and is accelerated toward the negative electrode 110. The shape of the negative electrode minimizes the collision surface area, and positive ion passes through an air evacuation tube 108 without being hardly picked up by the negative electrode and is evacuated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum container exhaust device, a vacuum tube to which the same is applied, and a flat image display device.

[0002]

2. Description of the Related Art Conventionally, vacuumized devices are used in various fields. The above-mentioned flat image display device is one of them. First, this display device will be described. Flat-panel image display devices include plasma displays, EL display devices, and flat-panel image display devices that use electron beams, and the demand for larger screens and higher definition is increasing, and self-luminous flat-panel image display devices are increasingly being used. Equipment needs are increasing. An image display device that mainly excites a phosphor to emit light, such as a display device using a fluorescent display tube, a field emission type (FE) and a surface conduction type electron-emitting device as an image forming device, is flat and easy to see brightly. It has the advantages of, and is positively applied and expected in industry.

Various thin image display devices have been proposed in which a surface conduction type element is used as a source of an electron beam and the electron beam is accelerated to irradiate a phosphor to emit light to display an image (for example, Japanese Unexamined Patent Publication No. Hei 3 (1999) -311). -261024).

FIG. 6 and FIG. 7 are a perspective view and a sectional view of an example of an image display device, respectively. In FIGS. 6 and 7, reference numeral 300 denotes an exhaust pipe for exhausting the inside of the image display device (in the figure, a state after being sealed off is shown).
Reference numeral 1 is a rear plate made of soda-lime glass that constitutes an electron-emitting device, 302 and 303 are electrodes that are installed at regular intervals, 304 is a thin film including an electron-emitting portion provided between the electrodes 302 and 303, and 308 is A festival plate 311 made of soda-lime glass on which a metal back 309 and a phosphor 310 are formed is an outer frame, and 314 is a getter material container. The getter material container 314 is fixed to the getter material container fixing jig 313 and accommodates a getter material for the purpose of maintaining a vacuum inside the panel. The evaporation type getter material is a face plate 308 or a back plate. It is vapor-deposited on (rear plate) 301.

Now, a method of manufacturing the image display device will be described with reference to FIGS. 6 and 7. The airtight container which is the main body of the image display device is evacuated through the exhaust pipe 300, and after degassing by baking, a part of the exhaust pipe is heated to melt and sealed (blocked, cut). Finally, the getter material container 314 installed inside the airtight container is heated, and the evaporation type getter material contained therein is vapor-deposited on the face plate 308 or the back plate 301 to complete the image display device.

Next, the surface conduction electron-emitting device will be described. In this surface conduction electron-emitting device, an Au thin film is used as a thin film for controlling electron emission [G. Dittmer:
"ThinSolis Films", 9, 317 (1972)], In ₂ O ₃ /
With SnO ₂ thin film [M. Hartwell and CG Fonst
ad: "IEEE Trans. ED Conf.", 519 (1975)], by a carbon thin film [Haraki Araki et al .: Vacuum, Vol. 26, Vol. 1]
No., p. 22 (1983)] and the like.

As a typical device configuration of these surface conduction electron-emitting devices, the above-mentioned M.D. The Hartwell device configuration is shown in FIG. In the figure, reference numeral 501 denotes an insulating substrate.
502 is a thin film for forming an electron emitting portion, which is made of a metal oxide thin film formed by sputtering in an H-shaped pattern,
The electron-emitting portion 503 is formed by an energization process called forming described later. Reference numeral 504 denotes a thin film including an electron-emitting portion. In addition, L in the figure is 0.5 to 1 mm,
W is set to 0.1 mm.

Conventionally, in these surface conduction electron-emitting devices, the electron-emitting portion forming thin film 5 is formed before electron emission.
It was general that the electron emission part 503 was formed in advance by applying an electric current called 02 to an energization process.
That is, forming means that a voltage is applied to both ends of the electron-emitting-portion-forming thin film 502 to locally destroy, deform, or alter the electron-emitting-portion-forming thin film so that the electron emission is in a high resistance state. That is to form the portion 503. In the electron emitting portion 503, a crack is generated in a part of the electron emitting portion forming thin film 502, and electrons are emitted from the vicinity of the crack. Hereinafter, the electron-emitting-portion-forming thin film 502 including an electron-emitting portion formed by forming is referred to as a thin film 504 including an electron-emitting portion. The surface conduction electron-emitting device that has undergone the forming process has a thin film 50 including the above-mentioned electron-emitting portion.
By applying a voltage to No. 4 and causing a current to flow through the element, electrons are emitted from the electron emitting section 503.

The surface conduction electron-emitting device described above has an advantage that a large number of devices can be arrayed and formed over a large area because it has a simple structure and is easy to manufacture. Therefore, by utilizing this feature, various applications are possible, and it is also suitable for the image display device as described above. That is, in recent years, flat panel display devices using liquid crystal have become widespread instead of CRTs, but since they are not self-luminous, there is a problem that they must have a backlight, etc., and the development of self-luminous display devices Has been desired. In comparison with that, an image display device, which is a display device in which a large number of surface-conduction type electron-emitters are arranged and a phosphor that emits visible light by electrons emitted from the electron source, is used as a large-screen device. It is a self-luminous display device that can be manufactured relatively easily and has excellent display quality (for example, USP 5066883).

However, in the flat panel display device as described above, it is necessary to continuously and stably emit electrons from the surface conduction electron-emitting device portion for stable image display. In the surface conduction electron-emitting device part, the electron emission capability of the driven surface conduction electron emission device may decrease due to the residual molecules adsorbed on the device surface. It seems to depend on the amount of adsorbed molecules. Therefore, it is considered that there is a great need for an exhaust means for reducing the adsorption residual molecules on the device surface as much as possible. This is considered to occur not only in the surface conduction electron-emitting device described above but also in the field emission electron-emitting device described above.

Generally, in image display devices and other vacuum devices, the pressure in the container, that is, the residual molecules in the container is reduced by passing through a heating process during baking called baking in the exhausting process. A cathode ray tube or the like drives an internal electron gun, irradiates the inside of the container with a high-energy electron beam emitted from this electron gun, and desorbs and exhausts residual molecules on the inner surface of the container. Promotes exhaust. Generally, by increasing the exhaust pipe diameter of the vacuum device, the time required for the exhaust process including baking and aging can be reduced and the ultimate vacuum can be improved.

[0012]

However, the exhaust means as described above has the following problems. (1) In the baking process, the baking temperature is high, and the longer the time, the greater the effect. In particular, it is important to raise the baking temperature. Therefore, in vacuum tubes and cathode ray tubes, the temperature is raised as much as possible for baking. However, in order to protect the element portion and the wiring portion of the flat panel display device from heat damage, it may not be possible to reach the baking temperature equivalent to that of a vacuum tube or a Brunun tube. (2) Further, even in the aging step, the device is damaged in a considerable amount by driving the device in the presence of a large amount of residual molecules, so that the surface conduction electron-emitting device, the field emission electron-emitting device, etc. The electron emission capability inherent in the electron-emitting device cannot be fully exhibited. The driving of the surface conduction electron-emitting device, the field-emission electron-emitting device and the like of the flat panel display device must be performed in a higher vacuum than in the case of a vacuum tube or a cathode ray tube. (3) In addition, exhaust without these baking and aging steps requires a long time to reach a sufficient pressure in the container and the number of residual molecules, which is not realistic. Considering the structural arrangement of the vacuum device, the exhaust pipe strength, the sealing process, etc., it is difficult to significantly increase the diameter of the exhaust pipe of the vacuum device.

[0013]

The present inventors have completed the present invention as a result of repeated researches for solving various problems in the exhaust means of a flat image display device. The present invention is as follows. 1. An exhaust device used for evacuating a container, characterized in that the container is provided with means for ionizing a gas in the container consisting of a high electric field applying positive electrode and a negative electrode and accelerating the ions. apparatus. 2. 2. The exhaust apparatus according to 1 above, wherein the means for ionizing the gas and accelerating the ions include a control electrode in addition to the positive electrode and the negative electrode for applying a high electric field. 3. An exhaust pipe connected to an exhaust pump is attached to the container to be evacuated, and the means is arranged so that the ions accelerated by the means flow in the axial direction of the exhaust pipe. Or the exhaust device according to 2. 4. 1 or 2, wherein the container to be evacuated is a closed container provided with a getter, and the means is arranged so that the accelerated ions of the gas flow in the surface direction of the getter. Exhaust device described. 5. The exhaust device according to any one of the above 1 to 4, wherein a plurality of the high electric field applying positive electrodes are provided. 6. 1, 2, wherein the container to be evacuated is a vacuum tube
The exhaust device according to 3, 4, or 5. 7. 6. The exhaust device according to 1, 2, 3, 4 or 5, wherein the container to be evacuated is an image display device. 8. An image display device, wherein the inside of the image display device is evacuated by the exhaust device described in 1, 2, 3, 4 or 5 above. It is.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION The above-mentioned positive electrode to which a high electric field is applied and the negative electrode are arranged so as to face each other, and the electric field strength between the electrodes facing each other is set to 10 ⁷ V / m or more. It is observed that the existing molecules are ionized and become cations and are desorbed from the electrode surface. This phenomenon is due to field desorption (Field
Desorption) and [EW Muller: N
aturwissenschaften, 29 (1941) 533 et al., Application for mass spectrometry [MG Ingjram and R. Gomer: J. Chem. Phy
s., 22 (1954) 1279], and is also used as an industrial ion source.

Ions desorbed from the surface of the positive electrode are accelerated toward the counter electrode. By appropriately selecting the shape and configuration of the counter electrode, it is possible to allow ions to flow without being caught by the counter electrode, so when the exhaust pipe for exhaust is attached to the vessel to be evacuated, it is possible to arrange it parallel to the exhaust pipe axis. It becomes possible to use an ion flow. While this gas flow is exhausted while general gas molecules repeatedly collide with the exhaust pipe wall, it is exhausted regardless of the conductance of the exhaust pipe because it is rectified in the exhaust pipe axial direction.

Even if the ions collide with the tube wall, the kinetic energy obtained by the ions between the opposing electrodes is remarkably large as compared with the molecular adsorption energy, so that the ions are not adsorbed and re-emitted on the surface of the tube wall and are thus mirror-surfaced. It has a high probability of being reflected and moved, and is exhausted with fewer collisions than general gas molecules.

As a result, the exhaust speed can be increased even when the conductance of the exhaust pipe is small.
Further, it is possible to shorten the exhaust time, lower the baking temperature, and shorten the baking time also in the manufacturing process of vacuum tubes, cathode ray tubes and the like.

Further, not only the exhaust using the exhaust pipe but also the exhaust speed of the getter can be increased by directing the exhaust device of the present invention to the suction surface of the getter portion in the vacuum container.

According to the present invention, the above-mentioned counter electrode is provided in a portion of the vacuum container having an exhaust pipe for exhausting which is opposed to the exhaust portion, and a voltage is applied between the electrodes during the exhausting operation so that the electric field is decoupled. It is characterized by increasing the speed. The present invention also includes an image display device having a structure for implementing this method.

The above-described exhaust device of the present invention and the image display device equipped with the exhaust device assist exhaust in the form of an ion flow due to desorption of an electric field, so that the baking temperature, the aging process, the exhaust time, the exhaust pipe diameter, etc. It is possible to sufficiently exhaust the residual molecules in the vacuum device even if the conditions in the process of (1) do not satisfy the conditions conventionally required. Since the above conditions are relaxed, it is possible to reduce the thermal damage due to baking, prevent the damage of the element during the aging process, shorten the exhaust time, and prolong the life of the image display device, stabilize it, and improve its characteristics. It is possible.

With reference to the drawings, the configuration of the apparatus according to the present invention and the method of using the apparatus will be described in detail below with reference to the exhaust of the image display apparatus as an embodiment.

FIG. 1 is a side view of an exhaust device using the electric field desorption method of the present invention and an image display device incorporating this exhaust device. The above device will be described below with reference to the drawings. In FIG. 1, 101 is a phosphor surface 102 and a metal back 10.
3, 104 is an outer frame, 104 is an outer frame, 105 is a rear plate on which the surface conduction electron-emitting device 107 is installed, and 108 is an exhaust pipe. 109 is a positive electrode for electric field desorption, and 110 is a negative electrode for electric field desorption. An electric field desorption type exhaust device is constituted by these both electrodes. The positive electrode 109 needs to have a shape that maximizes the electric field strength of the electric field desorption part. As the shape of the positive electrode, in addition to the needle shape as shown in FIG. 1, a wire shape, a wire coil shape, a foil shape, or the like is suitable.

The material of the positive electrode 109 is resistant to electron impact and is required to have a high melting point. If the materials of 109 are listed, refractory metals such as W, Pt, Re, Ta, Ir and Os, carbides such as WC, TaC, TiC and SiC, Al
₂ O ₃ and other oxides, BN, BC and other boride, TiN
Such as nitride. Negative electrode 11 facing this
0 is required to have such a shape that the electric field strength is increased and the collision area is minimized so that the cations emitted from the positive electrode 109 collide with and are scattered by the negative electrode 110. The material of the negative electrode 110 is the same as that of the positive electrode and is preferably a material having a high melting point and resistant to ion bombardment, and the material used for the positive electrode is used.

The positive electrode 109 has a higher potential than the surrounding potential, and the negative electrode 110 is grounded like the surroundings. Therefore, the residual molecules adsorbed on the positive electrode 109 are ionized by the high electric field on the surface of the positive electrode and accelerated toward the negative electrode 110. The shape of the negative electrode reduces the collision cross-sectional area as much as possible, and the cations pass through the exhaust pipe 108 and are exhausted without being caught by the negative electrode.

In normal exhaust, gas molecules passing through the exhaust pipe are incident on the exhaust pipe opening face from all directions as shown in FIG. 5 (a) and collide with the exhaust pipe wall surface. The gas molecules that collide with the wall surface lose the information of the incident direction and are emitted again according to a certain angular distribution. Exhaust is carried out by repeating collision adsorption with the wall surface and re-emission. Therefore, as the number of collisions with the wall surface increases, that is, as the exhaust pipe diameter decreases and the exhaust pipe length increases, the exhaust velocity decreases.

However, in the above exhaust device of the present invention, as shown in FIG.
Since a positive ion flow of residual molecules is created along the exhaust pipe axial direction as in (b), it is possible to reduce collision with the exhaust pipe wall surface and increase the exhaust speed.

The inter-electrode voltage of the above-described exhaust device can be exhausted if the electric field strength between both electrodes is 10 ⁷ V / m or more, and is therefore determined in consideration of the distance between both electrodes. The distance between the two electrodes may be any distance as long as the electric field strength is such that the electric field can be desorbed. However, considering the arrangement of the device, the voltage between the electrodes, and the fact that the cations emitted from the positive electrode are caught by the negative electrode, it is 10 m.
Within m is desirable. Further, since the inter-electrode voltage is also related to the velocity of field desorption ions, the maximum possible applied voltage is desirable in consideration of the arrangement of the device.

It is also possible to install a control electrode between the negative electrode and the exhaust pipe to control the exhaust amount and the flight direction of the positive ions. The number of control electrodes may be any number if necessary. The shape, arrangement, and material of the control electrode are not particularly limited as long as the electric field can be applied and the cation flow can be controlled.

Further, as shown in FIG. 4, a getter surface 113 inside the vacuum tube (a vapor deposition surface formed by getter flash when an evaporation type getter is used, a getter material when a non-evaporation type getter is used) When the exhaust device consisting of 109 and 110 is operated for the surface), the getter surface 113 collides with the getter surface 113 in the form of accelerated ions, so that the probability of adsorption of the getter surface is increased and the exhaust speed can be increased. .

[0030]

EXAMPLES The present invention will be specifically described below with reference to examples.

Example 1 A flat image display device having the exhaust device of the present invention installed therein as shown in FIG. 1 was produced, and after preliminary evacuation of the image display device, baking was performed and then the electric field desorption method was used. Utilized exhaust system.

The flat image display device has an internal volume of 220 × 24.
A 6 × 4 (mm) prototype was used, and the exhaust device of the present invention was installed near the opening of the exhaust pipe 108 of this prototype. The positive electrode 109 of this exhaust device has a length of 8 mm and a maximum diameter of 0.1.
With one needle electrode of mm, the material was made of tungsten in consideration of high melting point and strength, and the tip of the needle electrode was sharpened by sputtering to concentrate the electric field. The axial direction of the needle electrode was set parallel to the axial direction of the exhaust pipe, and its tip was positioned on the center line of the exhaust pipe 108. Fixing to the image display device was performed with a jig made of Cu and led out with a Dumet wire. The negative electrode 110 is a circular metal net having a diameter of a metal wire of 0.01 mm and a stitch pitch of 0.2 mm. The size of the negative electrode 110 is 3 mm, which is slightly smaller than the diameter of the exhaust pipe, which is 3.5 mm. The metal wire was made of platinum in consideration of ion impact resistance and high melting point. Further, in this embodiment, a surface conduction electron-emitting device was used as the electron-emitting device 107.

The closest distance between the positive electrode 109 and the negative electrode 110 is 1 mm, and the voltage between both electrodes is 1500 V from the required electric field strength.
And The negative electrode 110 was installed at a position 5 mm inside from the exhaust pipe port to avoid an obstacle during preliminary exhaust as much as possible.

In order to confirm the effect of this exhaust system, the exhaust pipe was connected to a vacuum gauge (not shown), and changes during the operation of the exhaust system were measured. The vacuum gauge on the exhaust system side after baking is 6 × 10 ^-8
I was instructing Torr. Almost at the same time when the exhaust system was activated, the reading on the exhaust system side vacuum gauge was 1.4 × 10 ^-7 Tor.
It was r, indicating that the residual gas in the image display device was exhausted. After that, when the exhaust device was operated for 4 hours, the indicated value on the exhaust system side vacuum gauge was 4 × 10 ^-8 Tor.
r was shown. The exhaust system was stopped, the residual gas existing between the image display and the vacuum gauge was removed, and the reading on the exhaust system side vacuum gauge showed 8 × 10 ^-9 Torr, indicating that the exhaust system was functioning sufficiently. I confirmed that

If the exhaust device is not operated under the same conditions,
It took 20 hours to reach 8 × 10 ⁻⁹ Torr, and it was confirmed that the exhaust device was effective in increasing the exhaust speed.

The half-life of the electron emission amount of the electron-emitting device of the flat panel image display device which was evacuated by using this exhaust device was measured, and it was 1. It was possible to obtain a value four times that of the display device and to prolong the life of the display device.

Example 2 A flat image display device having the exhaust device of the present invention installed therein as shown in FIG. 2 was produced, and after preliminary evacuation of the image display device, baking was performed and then the electric field desorption method was used. Utilized exhaust system. In the figure, members having the same functions as those in FIG. 1 described above are designated by the same reference numerals.

The flat image display device has an internal volume of 220 × 24.
A 6 × 4 (mm) prototype was used, and the exhaust device of the present invention was installed near the opening of the exhaust pipe 108 of this prototype. The positive electrode of the exhaust device is the needle-shaped electrode used in Example 1
Books were bundled and used as a multi-needle electrode 111. The needle-like electrodes are in the shape of hexagonal columns with a distance of 0.2 mm from each other. A lateral field emission type electron-emitting device (FE) was used as the electron-emitting device. The other structure is the first embodiment.
Is the same as

In order to confirm the effect of this exhaust device, a vacuum gauge was installed on the exhaust system side and changes during the operation of the exhaust device were measured. The vacuum gauge on the exhaust system side after baking is 6 × 10 ^-8 Tor
r. Simultaneously with the operation of the exhaust device, the indicated value of the exhaust system side vacuum gauge shows 4 × 10 ⁻⁷ Torr, and if the operation of the exhaust system is continued for 4 hours thereafter, the indicated value of the exhaust system side vacuum gauge becomes 6 × 1.
It dropped to 0 ^-8 Torr. When the exhaust system was stopped, the reading on the exhaust system side vacuum gauge decreased to 7 × 10 ^-9 Torr, confirming that the exhaust system was functioning sufficiently.

If the exhaust system was not operated under the same conditions, it was not possible to reach 7 × 10 ^-9 Torr within 24 hours.

When the electron emission amount half-life of the electron-emitting device of the flat image display device exhausted using the exhaust device was measured, it was 1.8 times on average as compared with the case of the image display device of the conventional process. The value was obtained, and the life of the display device could be significantly extended.

Example 3 As shown in FIG. 3, a flat image display device having the exhaust device of the present invention installed therein was prepared, and after preliminary evacuation of the image display device, baking was performed and then the electric field desorption method was used. Utilized exhaust system. In the figure, members having the same functions as those in FIG. 1 described above are designated by the same reference numerals. As the flat image display device, a prototype having an inner volume of 220 × 246 × 4 (mm) was used, and the exhaust device of the present invention was installed near the opening of the exhaust pipe 108 of this prototype. The positive electrode 109 of the exhaust device,
The negative electrode 110 is the one used in the first embodiment, and the control electrode 112 is provided separately from the negative electrode 110 and the exhaust pipe 1.
It was placed between the mouth of 08. The control electrode 112 is arranged at a position 5 mm inside the exhaust pipe opening, and the negative electrode 110 is located 3 mm from the control electrode 112. The positional relationship between the negative electrode 110 and the positive electrode 109 is the same as that in the first embodiment. The control electrode 112 has an inner diameter of 3 mm, a length of 3 mm, and a thickness of 0.2 mm.
The positive ion flow is controlled by applying a voltage close to the positive electrode potential in a cylindrical shape. Control electrode 1
The material of No. 12 does not need to have high strength because it has less ion and electron impact, and an electrode made of Au was used. Other structures are the same as in the first embodiment.

In order to confirm the effect of this exhaust device, a vacuum gauge was installed on the exhaust system side and changes during the operation of the exhaust device were measured. Vacuum system side vacuum gauge reading after baking is 6 × 10 ^-8
Torr. Simultaneously with the operation of this exhaust device, the indicated value on the exhaust system side vacuum gauge shows 3 × 10 ⁻⁷ Torr, and if the operation of the exhaust system is continued for 4 hours after that, the indicated value on the exhaust system side vacuum gauge reaches 8 × 10 ⁻⁸ Torr. lowered. After that, when the operation of the exhaust device is stopped, the indicated value of the vacuum gauge on the exhaust system side becomes 1 × 10.
It fell to ^-8 Torr, and it was confirmed that the exhaust system was functioning sufficiently.

If the exhaust system is not operated under the same conditions, it takes 12 hours to reach 1 × 10 ^-8 Torr,
It was confirmed that this exhaust device was effective in increasing the exhaust speed.

When the half emission time of the electron emission amount of the electron-emitting device of the flat plate-shaped image display device which was evacuated by using this exhaust device was measured, as compared with the case of the image display device manufactured by the conventional process, An average value of 1.2 times was obtained, and the life of the display device could be significantly extended.

Example 4 A flat image display device having the exhaust device of the present invention as shown in FIG.
After performing conventional processes such as baking, the exhaust pipe was sealed and the exhaust device using the electric field desorption method was operated. In the figure, members having the same functions as those in FIG. 1 described above are designated by the same reference numerals.

As the flat panel image display device, a prototype having an internal volume of 220 × 246 × 4 (mm) similar to that in Example 1 was used, and an exhaust device was installed on the getter surface 113 of this prototype. The positive electrode 109 and the negative electrode 110 of the exhaust device are the first embodiment.
Used in. The negative electrode is placed at a distance of 5 mm with respect to the getter surface 113, and the negative electrode 110 and the positive electrode 1
The arrangement of 09 is the same as that of the first embodiment. Reference numeral 114 is a getter container.

This exhaust device collides the positive ion flow with the getter surface 113, and not only chemically adsorbs the getter but also has a function of embedding residual molecules in the getter surface. This makes it possible to increase the exhaust speed of the getter.

When this exhaust device was continuously operated under the same conditions as in Example 1, the electron emission amount half time of the electron-emitting device of the image display device was produced by the conventional process, and the image display device without this exhaust device was incorporated. I was able to extend it 1.4 times.

[0050]

As described above, by applying the present invention, the exhaust speed can be increased without increasing the exhaust pipe diameter of the flat image display device, the exhaust time can be shortened, and the ultimate vacuum degree can be improved. Since it is possible to reduce the residual molecules in the image display device by weighing, it is effective in extending the life of the image display device, stabilizing the image, and making the image uniform.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view of a flat image display device including an exhaust device according to an example of the present invention.

FIG. 2 is a schematic cross-sectional view of a flat image display device including an exhaust device according to another example of the present invention.

FIG. 3 is a schematic cross-sectional view of a flat image display device provided with an exhaust device of the present invention using a control electrode.

FIG. 4 is a schematic cross-sectional view of an exhaust device and a flat image display device of the present invention used for a getter surface.

5A and 5B are schematic diagrams of the movement of gas molecules in an exhaust pipe, where FIG. 5A is a conventional device and FIG. 5B is when the device of the present invention is used.

FIG. 6 is a schematic perspective view of a flat image display device.

7 is a schematic cross-sectional view of a cross section including an exhaust pipe of the flat image display device of FIG.

FIG. 8 is a schematic view of a surface conduction electron-emitting device used in a flat image display device.

[Explanation of symbols]

 101 Face Plate 102 Phosphor 103 Metal Back 104 Outer Frame 105 Rear Plate 106 Wiring 107 Surface Conduction Electron Emitting Element 108 Exhaust Pipe 109 Needle Positive Electrode 110 Negative Electrode 111 Multiple Needle Electrode 112 Control Electrode 113 Getter Surface 114 Getter Container 300 Exhaust pipe 301 Back plate 302, 303 Electrode 304 Thin film 308 Face plate 309 Metal back 310 Phosphor 311 Outer frame 313 Getter material container fixing jig 314 Getter material container 501 Substrate 502 Electrode 503 Electron emitting part 504 Conductive thin film

Claims (8)

[Claims] 1. An exhaust device used for evacuating a container, wherein the container is provided with a means for ionizing gas in the container and accelerating the ions, the positive electrode applying a high electric field and a negative electrode. Exhaust device characterized by. 2. The exhaust system according to claim 1, wherein the gas ionization means and the ion acceleration means are provided with a control electrode in addition to the high electric field application positive electrode and the negative electrode. 3. An exhaust pipe connected to an exhaust pump is attached to the container, and the means is arranged so that the accelerated ions of the gas flow in an axial direction of the exhaust pipe. The exhaust system according to claim 1 or 2. 4. The container is a closed container having a getter, and the means is arranged so that the accelerated ions of the gas flow in the surface direction of the getter. Or the exhaust device according to 2. 5. A plurality of high electric field applying positive electrodes are provided, as claimed in any one of claims 1 to 4.
Exhaust device according to item 1. 6. The container according to claim 1, wherein the container is a vacuum tube.
The exhaust device according to 3, 4, or 5. 7. The exhaust device according to claim 1, 2, 3, 4, or 5, wherein the container is an image display device. 8. An image display device, wherein the inside of the image display device is evacuated by the exhaust device according to claim 1, 2, 3, 4 or 5.