JP3423515B2 - Vacuum envelope and image forming apparatus incorporating the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum envelope, a flat panel image forming apparatus using an electron-emitting device, and a manufacturing method thereof.

[0002]

2. Description of the Related Art In recent years, a light and book-type flat panel display (flat plate image forming apparatus) has been attracting attention as an image forming apparatus replacing a large and heavy CRT (CRT). As a flat panel display,
Liquid Crystal Display (Liquid Crystal Display)
has been actively researched and has been released as a product. However, in the liquid crystal display device, visible light emitted from a light source called a backlight is passed through the liquid crystal to control the amount of transmission, so that there remain problems to be solved such as a dark image and a narrow viewing angle. Instead of a liquid crystal display device having such a problem, a self-luminous flat panel that forms an image by irradiating a light-emitting body such as a phosphor with electrons emitted from a plurality of electron-emitting devices to generate visible light. Panel displays are being researched.

Electron emitting devices that have been studied as electron emitting sources for these flat panel displays are roughly classified into two types, which are a thermoelectron emitting device and a cold cathode electron emitting device. The cold cathode electron-emitting device is, for example, a field emission type cold cathode device as disclosed in FIG. 1 of JP-A-53-121544 or a planer disclosed as a modification thereof in JP-A-63-274047. Field emission type cold cathode device, C.I. A. Mead, "0p
association of Tunnel-Emissio
n Devices', J. Apply. Phys. ,
32,646 (1961), etc.
Examples thereof include an insulating layer / metal type (hereinafter referred to as “MIM type”), a surface conduction electron-emitting device and a semiconductor electron-emitting device disclosed in JP-A-7-235255.
Here, the electron source refers to one including an electron-emitting device and a drive system for driving the electron-emitting device.

A flat panel display using a surface conduction electron-emitting device as an electron source is disclosed in Japanese Laid-Open Patent Publication No.
There are 299136. In Japanese Patent Laid-Open No. 2-299136, an atmospheric pressure resistant support member is arranged in order to reduce the weight of the flat panel display and to impart mechanical strength.
FIG. 24 is a schematic diagram of a partial cross section of the display disclosed in the above-mentioned JP-A-2-299136. In FIG. 24,
Reference numeral 801 denotes a substrate made of an insulating material such as soda glass, 8
Reference numeral 02 is a surface conduction electron-emitting device, 803 is an atmospheric pressure resistant support member made of photosensitive glass, and 804 is a phosphor 805 covered with a metal back 806 for accelerating electrons emitted from the surface conduction electron-emitting device. Is a face plate made of soda glass having the inside of the panel, 807 is frit glass, and 808 is an outer frame.

The substrate 801 and the face plate 804 are supported by the atmospheric pressure resistant supporting member 803 at a predetermined interval, and these and the outer frame form a vacuum envelope. In order to bring the inside of such a vacuum envelope into a predetermined vacuum state, a method of performing vacuum exhaust by an external vacuum pump through an exhaust pipe (not shown) attached to a predetermined portion of the vacuum envelope is used. .

Further, Japanese Patent Publication No. 56-44534 discloses a fluorescent display tube (VFD), which is a flat panel display using a thermoelectron source, and when a getter flash of an evaporation type getter is used, a getter material is sometimes used. A filament for supporting the linear thermoelectron source to reach the image display area and thereby generate a non-light-emitting part, so that the getter material does not reach the image display area and the scattering area of the getter material is suppressed. The support has a function of a shielding plate, and the support is provided with a ring getter.

Further, in JP-A-4-132147, it is necessary to arrange a getter in the vacuum envelope in order to maintain a vacuum in the vacuum envelope after sealing the envelope. Furthermore, it is disclosed that in the vacuum envelope, it is required to have as many regions for arranging getters as possible. Therefore, JP-A-4-132147
Then, by providing a region dedicated to the getter outside the image display region (region where the electron source, the light emitting member, the wiring, etc. are formed), by applying a getter flash of an evaporation type getter, the getter material is deposited on the region, Providing a through hole that connects the area and the image display area, and occurs in the image display area, or
The remaining gas diffuses into the getter-dedicated area, and the gas is exhausted by the getter material formed in the getter-dedicated area. (FIG. 25) It is also disclosed that when the getter material adheres to the cold cathode device during getter flash of the evaporation type getter, the device surface state is changed, and the electron emission characteristic is adversely affected. Has been done.

However, in the flat panel display as described above, the larger the display area, the lighter the flat panel display itself, as shown in Japanese Patent Laid-Open No. 2-299136. An atmospheric pressure resistant support member is required in the vessel.

While the atmospheric pressure resistant support member is preferably used for reducing the weight of a flat panel display, it serves as a structure that obstructs the exhaust of the interior thereof. Exhaust gas here means 1) exhaust of gas in the envelope through an exhaust pipe in the manufacturing process of a flat panel display,
2) Means both the exhaust of gas remaining or generated in the vacuum envelope after the exhaust pipe is closed. The obstruction of the atmospheric pressure resistant support member in the above 1) and 2) will be described below.

1) Exhaust in the flat panel display manufacturing process In the flat panel display manufacturing process, there is a step of exhausting the inside of the envelope to a high vacuum state through an exhaust pipe. At this time, the gas remaining in the envelope moves along the atmospheric pressure resistant support member and is exhausted through the exhaust pipe. Therefore, depending on the positional relationship between the atmospheric pressure resistant support member and the exhaust pipe, it may take a relatively long time to exhaust the residual gas. Further, when exhausting for a relatively short time, the ultimate vacuum in the envelope may be low, and pressure distribution may occur in the envelope. For this reason, when it is attempted to manufacture a vacuum envelope having a high ultimate vacuum, it takes a long time to exhaust gas, resulting in an increase in manufacturing cost. Further, if the exhaust time is shortened, as will be described later in detail, a large amount of residual gas remains, resulting in deterioration of image quality of the image forming apparatus.

2) Exhaust by getter after sealing As shown in Japanese Patent Application Laid-Open No. 4-132147, a getter is usually arranged in a flat panel display, and after the exhaust pipe is closed by performing getter flash. A structure is adopted in which the gas remaining or generated in the vacuum envelope is exhausted to maintain or improve the degree of vacuum immediately after the gas is completely sealed.

The gas remaining or generated in the vacuum envelope moves along the atmospheric pressure resistant support member and reacts with the getter arranged in the vacuum envelope, as in the case of exhausting by the exhaust pipe. It is exhausted by doing.

Here, the gas generated in the vacuum envelope is
After the exhaust pipe is closed, especially in a vacuum envelope in a flat plate image forming apparatus which is being driven, a light emitting member such as a phosphor with which electrons emitted from a plurality of electron emitting elements forming an image display region collide. And the gas generated from the plurality of electron-emitting devices forming the electron source.

However, depending on the shape and arrangement position of the atmospheric pressure resistant support member, the gas remaining in the image display area after the exhaust process in the envelope through the exhaust pipe, and during driving as the image forming apparatus, etc. In addition, for example, when electrons emitted from the electron-emitting device irradiate the phosphor, the gas generated from the phosphor takes a long time to diffuse into the region where the getter is formed, and thus is exhausted by the getter. It could take a considerable amount of time.

As a result, in order to exhaust the residual gas and the gas generated during driving by the getter, especially at a position apart from the getter forming area in the vacuum envelope, the distance from the getter forming area is almost required. Since it is presumed that it takes a proportional time, the longer the gas is generated at a portion farther from the getter formation region, the longer the gas stays at that portion. For this reason, a local pressure rise may occur, and a pressure distribution may occur in the image forming apparatus.

Therefore, for example, the gas emitted from the phosphor by irradiating the phosphor with the electron emitted from the electron emitting element is ionized by the electron emitted from the electron emitting element to form the electron emitting element. The gas ionized by the electric field formed by the substrate on which the phosphor is formed and the anode (metal back or anode) on which the phosphor is formed travels toward the substrate on which the electron-emitting device having a lower potential than the anode is formed. Accelerated and collide with the electron-emitting device formed on the substrate to damage the device, or in the worst case, destroy the device by causing a discharge between the electron-emitting device and the anode. was there.

Such a phenomenon is more prominent in a portion farther from the getter forming region, and its duration is long.

As a result, if the gas remains or is generated at a location away from the area where the getter material is adhered and formed, the getter cannot immediately evacuate the gas. In some cases, a fatal defect may occur in the image display, or the image forming apparatus may have poor image quality. In particular, as described above, the exhaust by the getter depends on the distance between the getter formation region and the place where the gas is generated or remains, which is a particular problem in a large flat panel display of several tens of inches.

[0019]

Therefore, the present invention has been made in view of the above-mentioned problems. In the present invention, the atmospheric pressure resistant support member is formed by an exhaust pipe even if the order of manufacturing steps is different. It was positioned as an obstacle to the exhaust and the exhaust by the getter. In order to solve the above two problems at the same time, an ideal relative arrangement of an exhaust pipe, a getter, and an atmospheric pressure resistant support member is proposed. The purpose is to provide a flat panel display that solves the above problems. To provide.

Specifically, in the exhaust process in the flat panel display through the exhaust pipe, the structure formed in the exhaust pipe and the flat panel display (especially the atmospheric pressure resistant support) has good conductance during the exhaust. The arrangement, shape, and relative position of the getter material are formed through the exhaust pipe until the flat panel display is evacuated to a desired vacuum degree and the exhaust pipe is closed. The arrangement, shape, and relative position of the getter material forming region and the atmospheric pressure resistant supporting member have good conductance between the formed region and the image display region.

Therefore, this vacuum envelope is excellent in pressure uniformity in the envelope after exhausted by the exhaust pipe, has a high degree of ultimate vacuum in a short time, and has the above-mentioned residual gas and It is excellent in the exhaust speed of the gas generated during driving by the getter.

[0022]

In order to achieve the above-mentioned object, the present invention provides an envelope, an exhaust pipe provided in the envelope, and a flat plate-shaped resistance member installed in the envelope. In a vacuum envelope having at least an atmospheric pressure support member and a getter provided in the envelope to form a getter forming region, the vacuum envelope is formed by the getter and the longitudinal direction of the flat atmospheric pressure resistant support member. The vacuum envelope is characterized in that the length direction of the getter forming region is substantially vertical, and the central axis direction of the exhaust pipe and the length direction of the getter forming region are formed substantially vertical. The above envelope is
The exhaust pipe is provided in the outer frame, which is composed of a pair of flat plate-shaped face plates and a substrate arranged substantially in parallel, and an outer frame formed between peripheral portions of the pair of face plates and the substrate. The exhaust pipe is provided on a face plate, the exhaust pipe is provided on a substrate, the exhaust pipe is provided in plural, the getter it formation region is one that was formed with a plurality of, that the getter in which is arranged in addition to the image forming region, that the upper Symbol getter comprises the evaporable getter, that said getter is a non-evaporable getter, The getter uses an evaporation type getter and a non-evaporation type getter, the plurality of atmospheric pressure resistant supporting members are arranged in parallel with each other, It is pressure support member in which is disposed a plurality zigzag, among the pair of flat plates,
An electron-emitting device is formed on the substrate, and a light-emitting member that emits light when the electrons emitted from the electron-emitting device collide is formed on a face plate which is the other flat plate. The surface on which the electron emitting device is formed and the surface on which the light emitting member is formed face each other, and an electron source including a plurality of the electron emitting devices is formed on the substrate. ,
The electron-emitting device is a cold cathode electron-emitting device, the cold-cathode electron-emitting device is a field-emission electron-emitting device, and the cold-cathode electron-emitting device is a surface conduction electron-emitting device. Including that it is composed of.

Further, the present invention is an image forming apparatus characterized by incorporating the above vacuum envelope.

Further, the present application discloses a method of manufacturing a vacuum envelope for manufacturing the vacuum envelope according to any one of the above.
It is arranged such that the longitudinal direction of the flat plate-shaped atmospheric pressure resistant support member and the longitudinal direction of the getter forming region formed by the getter are substantially perpendicular to each other, and the central axis direction of the exhaust pipe and the A method of manufacturing a vacuum envelope, characterized in that the envelope is arranged so that the longitudinal direction of the getter forming region is substantially vertical, the envelope is assembled, and then the interior of the envelope is evacuated and sealed. When exhausting the inside of the envelope through the exhaust pipe, getter flash the getter, through the exhaust pipe, a gas for activating the surface conduction electron-emitting device into the vacuum envelope. Including to introduce.

Further, the present application also provides a method of manufacturing an image forming apparatus using the method of manufacturing the vacuum envelope described in any of the above.
Shows .

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION An example of a preferable configuration of the image forming apparatus of the present invention will be described with reference to FIG. FIG. 1 is a schematic plan view of the image forming apparatus of the present invention. FIG. 2 shows AA ′ of FIG.
FIG. 1 and 2, 1 is a substrate on which an electron source 4 in which a plurality of electron-emitting devices are arranged is formed, 2 is a face plate on which a phosphor 80 and an anode (not shown) are formed, and 3 is a face plate 2. An outer frame surrounding the periphery of the substrate 1 is an electron source 4 composed of a plurality of electron-emitting devices on the substrate 1, and a flat plate 5 is for maintaining the face plate 2 and the substrate 1 at a substantially constant distance. Atmospheric pressure resistant support member (hereinafter referred to as atmospheric pressure resistant support member), 6 is a getter forming region, 7
Is an exhaust pipe.

In the image forming apparatus of the present invention, the substrate 1, the face plate 2 and the outer frame 3 form a vacuum envelope. In this vacuum envelope, a flat plate-shaped atmospheric pressure resistant support member 5 is provided between the substrate 1 and the face plate 2, whereby a large number of electron-emitting devices are arrayed over a large area. In this case, distortion of the face plate 2 and the like due to atmospheric pressure is prevented.

As the electron source which can be used in the image forming apparatus of the present invention, cold cathode electrons using a thermoelectron source, a semiconductor electron source, a field emission type electron emission device, MIM, a surface conduction type electron emission device, or the like. Source is applicable.

As the phosphor 80, a phosphor for high acceleration electron beam excitation used in a CRT or the like or a phosphor for low acceleration electron beam excitation used in a fluorescent display tube (VDF) or the like, depending on an electron source to be applied. Is appropriately selected.

Therefore, when the phosphor for high-acceleration electron beam excitation is used in the image forming apparatus of the present invention, the energy of the electrons when colliding with the phosphor is sufficiently high, so that the contrast and brightness of the phosphor are improved. , A metal back of Al or the like is usually formed on the phosphor in order to obtain conductivity.
On the contrary, when the low-acceleration electron beam excitation phosphor is used in the image forming apparatus of the present invention, since the energy when colliding with the phosphor is low, most of the energy is lost when passing through the metal back, Normally, no metal back is formed.

In the case of an image forming apparatus for black and white images, the phosphor 80 is composed of only the phosphor, but when displaying a color image, each of the phosphors of three primary colors of red, green and blue is used. The elements are formed, and a black conductive material is used to separate the elements from each other to improve the contrast, and also to prevent color mixing caused by the irradiation of the adjacent pixels by the electrons.

Now, the arrangement positions of the exhaust pipe 7 and the atmospheric pressure resistant support member 5 in the vacuum envelope of the present invention will be described.

The atmospheric pressure resistant supporting members 5 are in the form of elongated flat plates, and a plurality of them are arranged at predetermined intervals so that the longitudinal directions of the portions contacting the face plate 2 and the substrate 1 are substantially parallel. The above atmospheric pressure resistant support member is not limited to the zigzag arrangement as shown in FIGS.
An atmospheric pressure resistant supporting member having a larger aspect ratio (FIG. 3) may be used, and the aspect ratio is set appropriately. Further, the number of the atmospheric pressure resistant supporting members 5 to be arranged is not limited to the number shown in FIGS.

Further, as described above, since the atmospheric pressure resistant supporting member 5 must be generally arranged in the image forming area which occupies the main area of the flat plate type image forming apparatus, it is necessary to pay attention to the arrangement position. . For example, just above the electron-emitting device,
When the phosphor is arranged directly above the phosphor or at a portion intersecting with the flight direction of electrons, the phosphor that should have been emitted by electrons does not emit light, so that a pixel defect occurs in the image forming apparatus. Therefore, as the location of the atmospheric pressure resistant supporting member, specifically, not on the electron-emitting device, immediately above the light-emitting member such as a phosphor, or at a portion intersecting with the flight direction of electrons, for example, a plurality of electron-emitting devices are arranged. Substrate 1 being formed
On the side, the atmospheric pressure resistant support member is in contact with the wiring for driving the electron-emitting devices, and on the side of the face plate 2, if the image forming apparatus performs color display,
It is preferably on a black conductor formed between each of the three primary color phosphors. With the above configuration, it is possible to prevent the atmospheric pressure resistant supporting member from interfering with image formation even in the image forming area.

Next, the arrangement position of the exhaust pipe 7 and the atmospheric pressure resistant support member 5 will be described.

As shown in FIGS. 1, 2, 3, 4, and 5, the exhaust pipe 7 is on the extension line in the longitudinal direction of the flat plate-shaped atmospheric pressure resistant support members 5 arranged at desired intervals and the outer frame. 3 on the side or on the face plate 2 or the substrate 1 near the side. Specifically, the central axis direction of the exhaust pipe 7 is attached substantially parallel to the longitudinal direction of the flat plate atmospheric pressure resistant support member 5, or the longitudinal direction of the getter forming region 6 and the center of the exhaust pipe 7 which will be described later. The axes are attached so that they are substantially orthogonal to each other. Further, the number of the exhaust pipes 7 attached is not limited to one, and a plurality of exhaust pipes 7 may be arranged. Further, the sectional shape of the exhaust pipe 7 is not limited to the cylindrical shape. Further, it is preferable that the exhaust pipe 7 has a facing structure as shown in FIG. 3 because the exhaust speed can be improved compared with the structure shown in FIGS. 1 and 2 when exhausting the inside of the envelope.

The exhaust pipe 7 may be formed on the side of the face plate 2 as shown in FIG. 4, or on the side of the substrate 1 on which the electron-emitting device is formed as shown in FIG. You may. As shown in FIGS. 4 and 5, when formed on the side of the substrate on which the face plate or electron-emitting device is formed, the upper limit of the diameter of the exhaust pipe is virtually eliminated as in the case of forming on the outer frame 3. It is preferable in terms of conductance when exhausted by the exhaust pipe 7.

As a matter of course, in the process of forming the vacuum envelope, the exhaust pipe is sealed off (sealed), so that the exhaust pipe is placed inside the envelope as shown in FIGS. Not only does it not pass through the outside, it is terminated, and the exhaust pipe that is closed is not only a shape that protrudes (extends) to the outside from the outer surface of the vacuum envelope (the surface that contacts the atmosphere), A shape that is sucked inside the outer surface of the vacuum envelope, or
The closed exhaust pipe may have a shape that does not project from the outer surface of the vacuum envelope.

With the above-described structure, in the process of manufacturing a flat panel display, in the process of exhausting the inside of the envelope through the exhaust pipe 7, the gas (gas molecule) in the envelope is resistant to atmospheric pressure. Exhaust pipe 7 along support member 5
To the outside of the envelope through the exhaust pipe 7. In the positional relationship between the atmospheric pressure resistant support member 5 and the exhaust pipe 7 as shown in FIGS. 1, 2, 3, 4, and 5, the atmospheric pressure resistance is maintained in the process of the gas inside the envelope moving to the exhaust pipe 7. Since the shielding effect that prevents the residual gas (gas molecules) from moving to the exhaust pipe 7 by the support member 5 can be minimized, the time required for exhaust and the vacuum envelope after exhaust for a certain period of time The conductance is improved by minimizing the pressure distribution in the interior and by adopting the configuration shown in FIGS. 4 and 5, so that a vacuum envelope having a high ultimate vacuum can be obtained.

As will be described in detail later, a step of forming the getter forming region so that the longitudinal direction thereof is substantially perpendicular to the longitudinal direction of the atmospheric pressure resistant supporting member 5, and exhausting to the outside of the vacuum envelope through the exhaust pipe 7. In (1), after the vacuum degree in the envelope reaches a certain degree, the getter flashing of the getter can further shorten the time required for the exhaust process.

In the present specification, for the sake of simplification, in the case of an evaporation type getter, the step of evaporating and forming the getter material is applied, and in the case of a non-evaporation type getter, the surface of the getter material is cleaned. The process of developing the exhaust capacity is referred to as getter flash.

Next, the arrangement positions of the atmospheric pressure resistant supporting member 5 and the getter forming region 6 in the vacuum envelope of the present invention will be described.

The structure and arrangement of the atmospheric pressure resistant supporting member 5 are as described above.

The getter forming region 6 has a certain shape and area, and is formed and arranged so that the longitudinal direction in which the shape and area are widened and the longitudinal direction of the flat-plate atmospheric pressure resistant supporting member 5 are substantially orthogonal to each other. Has been done. Further, as described in the description of the arrangement position of the exhaust pipe and the atmospheric pressure resistant support member, the central axis direction of the exhaust pipe 7 and the longitudinal direction of the getter formation region are arranged substantially orthogonal to each other. Here, the getter formation region 6 is a region in which the evaporated getter material adheres to the inner surface of the vacuum container by heating an evaporative getter containing BaAl alloy or the like as a main component to cause getter flash. Alternatively, for example, Ti, Zr, Hf, V,
It means a region where a state in which a non-evaporable getter itself made of a metal such as Nb, Ta, W or the like and an alloy thereof is heated to exhibit a function as a getter is formed.

As the getter used in the present invention, not only the evaporative getter or the non-evaporable getter may be used alone, but the non-evaporable getter and the evaporative getter may be used in combination. In particular, the evaporative getter and the non-evaporable getter have different exhaust capacities for a specific gas. It is possible to consider the effect of going through the step of flashing the getter, so
It is preferable to selectively use the evaporation type getter and the non-evaporation type getter depending on the residual or generated gas.

After the exhaust pipe 7 is completely closed, the getter disposed in the vacuum envelope is heated to obtain a getter flash (if it is an evaporation type, the getter material is evaporated to form a deposit, and the getter material is not evaporated. In the case of a mold getter, the surface of the getter material is cleaned) to form the getter forming region 6 so that the gas remaining in the vacuum envelope and the image when the image forming apparatus is being driven. As described above, the gas generated from the display area (for example, a light emitting member such as a phosphor) moves to the getter forming area 6 along the atmospheric pressure resistant supporting member 5 and reacts with the getter material to be exhausted.

The positional relationship between the atmospheric pressure resistant supporting member 5 and the getter forming region 6 shown in FIG. 1 is the residual gas in the vacuum envelope, or the image display region (for example, when operating as an image forming apparatus). In the process in which the gas generated from the electron source) moves to the getter formation region 6, the residual gas by the atmospheric pressure resistant support member 5 or the gas generated in the vacuum envelope is prevented from moving toward the getter formation region 6. Such shielding effect can be minimized. Therefore, the time required for exhausting the getter material is shortened.

Further, the getter forming region is not limited to the one shown in FIGS. 1 and 2, but as shown in FIG. 6, for example.
You may arrange | position also in the position which opposes the getter formation area 6 arrange | positioned in FIG. In this case, the image forming area closer to the getter forming area is further increased, which is preferable in terms of the exhaust speed of the getter. That is, in the configuration as shown in FIG. 1, it is sure that the residual gas due to the atmospheric pressure resistant supporting member or the gas generated in the vacuum envelope is prevented from moving toward the getter forming region 6 as described above. Such a shielding effect can be minimized, but the gas remaining or generated at the position farthest from the getter forming region 6 (the position facing the getter forming region) must cross the image forming region, It takes some time to exhaust. Therefore, it is more preferable to dispose the getter forming regions on both sides as shown in FIG. 6 because the time required to exhaust the gas remaining or generated in the region by the getter can be shortened.

Therefore, the above-mentioned discharge or the like, which remains after the gas is exhausted by the exhaust pipe, or the gas generated when the image forming apparatus is driven is not exhausted promptly, so that the image forming apparatus is driven for a long time. Even after this, an image forming apparatus with less decrease in brightness can be obtained.

Further, the shape of the getter forming region is not limited to the rectangle shown in FIG. 1, and may be, for example, an elliptical shape, or circular getter regions may be continuously formed in contact with each other. Even if they are discontinuously scattered, it suffices if the scattered direction is a substantially straight line and the directionality is recognized (Fig. 7). The getter formation region is not limited to the substrate on which the electron-emitting device is formed, but the getter formation region is not limited to the outer frame 3.
It may be the inner surface or the face plate 2. However, when a getter material is formed on the face plate 2 or the substrate 1 (if it is an evaporation type, it is adhered), as described above, the phosphor, the electron-emitting device, the wiring, etc. Care must be taken not to wear it.

Further, the material of the substrate used in the present invention can be appropriately selected from glass, metal or the like as long as it does not adversely affect the alignment as the electron-emitting device or the envelope.

When an evaporative getter is used as the getter, it is shown in FIG.
As shown in the schematic view of the image forming apparatus using the above configuration, a shielding plate for suppressing the scattering area of the getter material must be used in the vacuum envelope.

Here, in FIG. 26, the getter material container fixing jig 102 which functions as a shielding plate for suppressing the scattering of the getter material is provided on the substrate 801. A getter agent container 103 storing a getter is attached to the getter agent container fixing jig 102.
With such a configuration, a getter material such as a face plate 804 in which a getter material (arrow in FIG. 26) scattered by a getter flash is formed with an electron-emitting device 802, a phosphor, and the like (not shown). It suppresses the adhesion of the material to a member which is difficult to adhere, and suppresses the deterioration of the image display characteristics due to the adhesion of the getter material.

While the shielding plate has a function of suppressing the region in which the getter material scatters, it is not as much as the case of the above atmospheric pressure resistant support member, but when exhausted through the exhaust pipe and exhausted by the getter. In addition, depending on its shape and arrangement, it may hinder the exhaust.

Therefore, in the present invention, if the above-mentioned arrangement relation required for the getter material forming region is satisfied, when the getters are arranged as shown in FIGS. 21 and 22 and the evaporation type getter is used, for example. By forming the structure 60 for suppressing the scattering region of the getter material on the substrate 1 on which the electron-emitting device is formed, the atmospheric pressure resistant support member becomes an obstacle when exhausting through the getter and the exhaust pipe. In addition to the configuration that can minimize the above, it is possible to have a configuration that does not hinder the above-described exhaust by the shield plate, which is more preferable.

As a matter of course, the structure of the substrate as described above can be applied to the case where a non-evaporable getter is used, which leads to an increase in getter area.

The substrate to be used may be the metal substrate 21 as shown in FIG. 27 as long as it is possible to eliminate the positional deviation at the time of sealing the envelope and the influence on the electron source to be used. Further, in terms of the ease of manufacturing the substrate, it is preferable to process the metal substrate rather than forming the groove in the glass substrate.

Next, an example of a preferable method of manufacturing the image forming apparatus of the present invention will be described below.

1) On an electron source substrate having a plurality of electron-emitting devices arranged on the substrate, a plurality of atmospheric pressure resistant supporting members having a desired height are installed at desired intervals and with a plurality of frit glasses or the like. It has almost the same height as the atmospheric pressure support member,
The outer frame to which the exhaust pipe is already attached at a predetermined position is installed with frit glass or the like so that the central axis of the exhaust pipe and the major axis direction of the atmospheric pressure resistant support member are substantially parallel to each other. Further, at this stage, for example, a plurality of evaporation type ring getters are formed in a line and in a region substantially not orthogonal to the long axis direction of the plurality of atmospheric pressure resistant supporting members in a region where the electron source is not formed. . However, at this time, when the evaporation type getter is used, it is necessary to provide a shielding plate so that the getter material does not scatter in the image forming area when the getter is flashed.
However, as described above, when the non-evaporable getter is used, the shielding plate is not necessary. Further, as described above, in order to remove the shielding plate, a groove is formed in the substrate before forming the electron-emitting device, and further, an evaporation type getter or a non-evaporation type getter is formed in the formed groove. You can also

2) Next, the face plate on which the phosphor and, if necessary, the metal back are formed is sufficiently aligned with the electron source substrate on which the outer frame, the exhaust pipe, the atmospheric pressure resistant support member and the like are installed. While performing, a frit glass or the like is used for sealing to form an envelope.

3) The residual gas in the sealed envelope is exhausted through the exhaust pipe while heating the envelope,
The exhaust pipe is sealed when the inside of the envelope reaches about 10 ⁻⁷ Torr.

When a plurality of getters are arranged in the envelope when the inside of the envelope has a vacuum degree of about 10 ⁻⁶ Torr, some of the getters are flashed by getter. As a result, the exhaust time is shortened as compared with the exhaust using only the exhaust pipe.

Particularly, as the image forming apparatus becomes thinner and the screen becomes larger, the conductance of the exhaust pipe itself becomes worse. For example, in a cylindrical exhaust pipe having an inner diameter of 10 mm and a length in the central axis direction of 100 mm, the temperature is about 1.21 at a temperature of 20 ° C.
Although there is only l / s · cm ² of exhaust capability, exhaust capacity of the getter is known to be 2.31 l / s · cm ² about in H ₂ O. Therefore, it is better to exhaust to a certain degree of vacuum with an exhaust pipe, but if the degree of vacuum is lower than that, exhaust by a getter may shorten the exhaust time.

4) Subsequently, the exhaust pipe is sealed, a vacuum envelope is formed, and further connected to a drive circuit for driving the image forming apparatus, thereby completing the image forming apparatus.

[0065]

The present invention will be described in more detail with reference to the following examples.

Example 1 An image forming apparatus shown in FIGS. 8 and 9 was prepared.

In FIGS. 8 and 9, reference numeral 1 is a soda lime glass substrate, on which an electron source 4 composed of a plurality of surface conduction electron-emitting devices is formed. FIG. 19A is a plan view showing a schematic configuration diagram of a surface conduction electron-emitting device, and FIG. 19B shows a cross section taken along the line AB in FIG. 19A.

In FIG. 19, reference numeral 150 denotes a substrate, 151,
Reference numeral 152 is an element electrode arranged on the substrate 150 at intervals of 5 μm, 160 is a conductive thin film made of palladium oxide formed on the element electrode, and 165 is formed by energizing a conductive thin film made of palladium oxide. An electron emitting portion 170 is an element wiring, which is connected to an external element driving circuit. Element wiring 1 on the element electrodes 151 and 152
By applying a voltage from 70, the electron emission portion 165
Emits electrons. As shown in the schematic enlarged view of FIG. 10, the plurality of surface conduction electron-emitting devices are respectively formed at the intersections of the X-direction wiring and the Y-direction wiring. Select X-direction wiring and Y-direction wiring arbitrarily,
By applying a voltage to these, a simple matrix structure capable of selectively emitting electrons to a desired element is adopted.

In FIGS. 8 and 9, 2 is a face plate made of soda lime glass, and 3 is on the face plate.
A primary color phosphor 80 and a metal back 50 made of Al are formed. Reference numeral 5 is a flat plate-shaped atmospheric pressure resistant supporting member for keeping the substrate 1 and the face plate 2 substantially parallel to each other, and is formed on the Y direction wiring in the drawing. Reference numeral 7 is an exhaust pipe, and 8 is a ring getter made of a container containing an evaporative getter material made of Ba.Al alloy. Reference numeral 9 is a getter forming region formed of a Ba film formed when the ring getter is flashed by high frequency heating. Further, 10 is a shielding plate for preventing the getter material from scattering, and 11 is an outer frame made of soda-lime glass.

In the structure of this embodiment, as shown in FIG. 8, a plurality of flat plate-shaped atmospheric pressure resistant supporting members 6 are arranged so that their longitudinal directions are substantially parallel to each other. The longitudinal direction of 5 and the longitudinal direction of the getter forming region 9 are substantially orthogonal to each other, and the longitudinal direction of the getter forming region 9 and the central axis direction of the exhaust pipe 7 are substantially orthogonal to each other.

The method of manufacturing the image forming apparatus of this embodiment will be described below.

1) A plurality of surface conduction electron-emitting devices were formed on a blue glass substrate 1 in a simple matrix structure.

2) The upper and lower end surfaces of the atmospheric pressure resistant support member 5 (where they are adhered to the substrate 1 and the face plate 2) and the upper and lower end surfaces of the outer frame 11 (where they are adhered to the substrate 1 and the face plate 2) are previously prepared. A mixture of low melting point glass (LS3081 manufactured by Nippon Electric Glass Co., Ltd.) with a solvent was applied. At the same time, a low melting point glass was similarly applied to the joint portion of the shield plate 10 to which the ring getter 8 was joined by welding in advance with the substrate 1.

3) First, the atmospheric pressure resistant supporting member 5 and the face plate 2 were fixed by a jig and pre-baked in an electric furnace. Further, the shield plate 10 to which the ring getter 8 was adhered on the substrate 1 and the outer frame 11 to which the exhaust pipe 7 was adhered in advance were fixed by a jig and pre-baked in an electric furnace.

4) Next, in the sealing step, the face plate 2 to which the atmospheric pressure resistant supporting member 5 is fixed and the substrate 1 to which the shield plate 10 to which the ring getter 8 is adhered and the outer frame 11 are fixed are sufficiently aligned. After that, it was fixed with a jig and heated at 410 ° C. in an electric furnace. Then slowly cool down,
An envelope was obtained by taking it out from the electric furnace.

[0076] 5) an exhaust pipe 7 connected to a vacuum pump (not shown), after evacuating the inside of the envelope to about 1 × l0 ^over 7 Torr, elements of the surface conduction electron-emitting device electrodes 151 and 152
Through the conductive thin film 160 on the triangular waveform (base 2msec,
A voltage pulse having a cycle of 10 msec and a peak value of 6 V) was applied for 60 seconds to perform forming to form an electron emitting portion 165.

6) Subsequently, acetone and hydrogen were introduced into the envelope through the exhaust pipe 7, and activation treatment was performed while monitoring the electron emission characteristics of the surface conduction electron-emitting device.

7) The gas introduced into the envelope was exhausted.

[0079] 8) while heating the envelope by a hot plate, the inside of the envelope was evacuated through the exhaust pipe 7, where the vacuum in the envelope exceeds 1 × 10 ^{over 7} Torr,
The exhaust pipe 7 was heated by a gas burner to seal the envelope, thereby completing the vacuum envelope.

9) Subsequently, the ring getter 8 was induction-heated and getter flashed to form a getter forming region 9 mainly composed of Ba.

10) A drive circuit and the like were connected in order to make the vacuum envelope act as an image forming apparatus. This image forming apparatus formed an image by sending a signal from a driving circuit.

For the energization forming process and the activation process, known methods disclosed in JP-A-7-235255 were used.

<Comparative Example 1> An image forming apparatus having the structure shown in FIG. 11 was prepared. The difference from the first embodiment is that the exhaust pipe 7
Is attached to the outer frame parallel to the longitudinal direction of the atmospheric pressure resistant supporting member 5.

<Comparative Example 2> An image forming apparatus having the structure shown in FIG. 12 was prepared. The difference from the first embodiment is that the getter forming region 9 is arranged in a position parallel to the longitudinal direction of the atmospheric pressure resistant supporting member 5 and outside the image display region.

<Comparative Example 3> An image forming apparatus having the structure shown in FIG. 13 was prepared. The difference from the first embodiment is that the longitudinal direction of the atmospheric pressure resistant support member 5 is rotated by 90 degrees from the direction of the first embodiment.

In the above Example 1 and Comparative Examples 1 to 3,
The time required to evacuate to the same ultimate pressure, and vacuum evacuation to the same level of pressure, sealing, and then getter flashing, and connecting to a drive circuit for displaying the image of the vacuum envelope to form an image The luminance unevenness of the image after the device was driven for a certain period of time was measured. The vacuum envelope of Example 1 and the vacuum envelope of Comparative Example 2 reached the desired internal pressure in about the same time, and the vacuum envelopes of Comparative Examples 1 and 3 were about 1.5 times that. It took exhaust time.

On the other hand, regarding the uneven brightness after driving for a certain period of time, almost no uneven brightness was confirmed in the image forming apparatuses of Example 1 and Comparative Example 1, but in the image display areas of Comparative Examples 2 and 3, It was confirmed that the brightness decreased toward the center and a phenomenon such as discharge was observed.

From the above, the vacuum envelope having the structure of the first embodiment is excellent in shortening the exhaust time and can display stably for a long time even when driven as an image forming apparatus. It can be seen that the image forming apparatus is excellent in image quality.

<Embodiment 2> FIGS. 14 and 15 are a plan view showing an image forming apparatus of this embodiment and a sectional view taken along the line AA 'in FIG.

Here, the same symbols as those in FIGS. 8 and 9 indicate the same parts. The difference between the first embodiment and the present embodiment is that a planar type field emission device is used as an electron emitting device, the mounting position of the exhaust pipe 7 is on the face plate 2, and two exhaust pipes 7 are provided. That is the point. With this configuration, the diameter of the exhaust pipe is not limited by the height of the outer frame (thickness of the image forming apparatus), so that an exhaust pipe having a diameter larger than the height of the outer frame can be attached. Becomes Therefore, the conductance at the time of evacuation in the manufacturing process of the image forming apparatus of this embodiment is good. Also, 2
The exhaust pipes 7 are arranged so as to face each other across the image forming area, and the number of exhaust pipes is increased, whereby the exhaust time by the exhaust pipes 7 is further shortened compared to the first embodiment.

<Third Embodiment> FIGS. 16 and 17 are a plan view showing an image forming apparatus of the present embodiment and a sectional view taken along line AA 'in FIG.

Here, the same symbols as those in FIGS. 14 and 15 indicate the same parts. The difference between the second embodiment and the present embodiment is the arrangement and shape of the atmospheric pressure resistant support member 5 and the type of getter used.

The getter used in this image forming apparatus is a non-evaporable getter, and more specifically, it is a Zn--Al alloy (SAE).
S company St 101) was used. Since the non-evaporable getter is used, the image forming apparatus according to the present embodiment has an advantage over the second embodiment that a shield plate need not be formed and a getter formation region can be set in advance. With this configuration, in the manufacturing process of the image forming apparatus of this embodiment,
Since the step of installing the shield plate is omitted and the shield plate is not present, the exhaust time by the exhaust pipe 7 can be further shortened as compared with the second embodiment. Further, even when the electron-emitting device was driven, the deterioration of image quality was alleviated.

<Embodiment 4> FIGS. 28 and 29 are a plan view showing an image forming apparatus of the present embodiment and a sectional view taken along line AA 'in FIG.

Here, the difference from the second embodiment is that the exhaust pipe 7
And the getter formation region 9 are in one place.

The image forming apparatus of this embodiment uses the surface conduction electron-emitting device as the electron-emitting device and arranges it in a simple matrix structure as in the first embodiment. The substrate on which the emitting element was formed, the outer frame and the like were sufficiently aligned and then sealed. Then, after the inside of the envelope was sufficiently evacuated by the vacuum pump through the exhaust pipe 7, the energization forming treatment was performed through the X-direction and Y-direction wirings as shown in FIG. further,
Acetone was introduced into the envelope through the exhaust pipe 7 to perform activation treatment. Further, evacuating the acetone was introduced into the envelope to about 1 × 10 ^{over 7} Torr vacuum of about through the exhaust pipe 7, the exhaust pipe 7 is heated by a gas burner, seals the envelope, the vacuum outside An envelope was formed. Subsequently, the ring getter 8 was induction-heated and subjected to getter flash to form a getter forming region 9 mainly composed of Ba.

In order to operate the vacuum envelope thus created as an image forming apparatus, when a drive circuit or the like was connected and an image was formed, almost all phenomena observed as discharge were observed even after driving for a long time. In addition, there was little deterioration in brightness.

<Fifth Embodiment> FIG. 18A is a plan view of an image forming apparatus according to the present embodiment, and FIG.
It is sectional drawing which followed the AB line in (a).

In FIGS. 18A and 18B, 1
Reference numeral 01 is a rear plate on which a plurality of electron-emitting devices 107 are formed, and 102 is a face plate on which a light-emitting body (not shown) such as a phosphor is formed, both of which are insulating substrates made of soda glass. 103 is an outer frame made of soda glass. Rear plate 101, face plate 1
02 is sealed with frit glass through the outer frame 103,
The inside is evacuated to a high vacuum to form a vacuum envelope. In this vacuum envelope, an atmospheric pressure resistant support member 105 is provided between the rear plate 101 and the face plate 102, so that the atmospheric pressure resistance due to the increase in the display area of the image forming apparatus is achieved. Have a structure.

The atmospheric pressure resistant supporting member 105 has a flat plate shape,
A plurality of them are arranged in the vacuum envelope, and they are provided at predetermined intervals so that their main surfaces are parallel to each other. The line getter 108 is arranged so as to be substantially perpendicular to the longitudinal direction of the atmospheric pressure resistant supporting member 105 and the getter deposition area formed by getter flashing. The line getter 108 is an evaporation type getter, and is Ba-Al-
A Ni alloy was used. Reference numeral 104 denotes an exhaust pipe for reducing the pressure inside the envelope, and two exhaust pipes are formed in this embodiment.
The central axis of the exhaust pipe 104 is the atmospheric pressure resistant support member 10
It is attached to the outer frame 103 so as to be parallel to the main surface of No. 5 and substantially perpendicular to the longitudinal direction of the getter formation region. Reference numeral 107 denotes an electron-emitting device, and in this embodiment, a surface conduction electron-emitting device was used. The surface conduction electron-emitting device will be described below with reference to FIG.

FIG. 19A is a plan view showing a schematic configuration diagram of a surface conduction electron-emitting device, and FIG. 19B is a plan view.
It is sectional drawing which followed the AB line in (a).

In FIG. 19, reference numeral 150 denotes the above substrate, and 15
1, 152 are element electrodes arranged at intervals of 5 μm on the substrate 150, 160 is a conductive thin film made of palladium oxide formed on the element electrode, and 165 is a conductive thin film made of palladium oxide. The formed electron emission portion 170 is element wiring or is connected to an external element driving circuit. By applying a voltage from the element wiring to the element electrodes 151 and 152, the electron emitting portion 165
Emits electrons.

Next, an outline of the manufacturing process of the vacuum envelope will be described.

The exhaust pipe 104 allows the inside of the envelope to be approximately 1 × 1.
After evacuating to about 0 ^over 7 Torr, surface conduction electron-emitting triangular waveform in the conductive thin film 14 through the device electrodes 151 and 152 of the element (bottom 2 msec, period 10 msec, the peak value 6
A voltage pulse of V) was applied for 60 seconds to perform forming to form an electron emitting portion 165. Then, the vacuum envelope was baked at 200 ° C. for 5 hours. After baking, the line getter was degassed. After performing sufficient degassing treatment on both the vacuum envelope and the getter material, the exhaust pipe 104 was sealed and getter flushed to form a vacuum envelope.

In the image forming apparatus obtained in this example, almost no uneven brightness was observed even after being driven for a certain period of time.

<Embodiment 6> FIG. 20 is a schematic structural view of an image forming apparatus of the present embodiment, and FIG. 20 (a) is a plan view thereof.
20B is a cross-sectional view taken along the line AB of FIG. 20A.

20 and FIG. 18, which is the image forming apparatus of the fifth embodiment, are different only in the shape of the atmospheric pressure resistant support member 305 and the portion in which the getter 308 is composed of a plurality of ring getters. Since it is the same as that of the fifth embodiment, the same parts as those in FIG. 18 are designated by the same reference numerals.

The manufacturing process of the image forming apparatus of this embodiment will be described below.

The residual gas in the envelope is exhausted by the exhaust pipe 304 until the degree of vacuum in the envelope becomes about 1 × 10 ⁻⁶ Torr or less. All getters 308 in the exhaust
Is baked by induction heating. After that, FIG.
Of the surface conduction electron-emitting device shown in FIG.
Triangular voltage pulse between 2 (base lmsec, wave height 5
V, cycle 10 msec) is applied for 80 seconds to perform a forming process to form a surface conduction electron-emitting device. After the formation of the surface conduction electron emission, the vacuum container was baked at 200 ° C., and the vacuum container and the getter material were sufficiently degassed, and then a part of the getter (two in this embodiment) was gettered. I flashed. After that, the exhaust pipe was sealed, and the remaining getter was flashed by getter to complete the vacuum container.

<Embodiment 7> FIGS. 21 and 22 are schematic configuration diagrams of an image forming apparatus according to the present embodiment. 21 is a plan view, and FIG. 22 is a sectional view taken along line AA of the image forming apparatus shown in FIG.

21 and 22, 1 is a substrate, 2 is a face plate, 3 is an outer frame, 40 is an electron-emitting device arranged on the substrate 1, and 5 is a predetermined distance between the substrate 1 and the face plate 2. An atmospheric pressure resistant support member for supporting, 60 is a getter groove for storing the getter 8, and 7 is an exhaust pipe.

In the image forming and displaying apparatus of this embodiment, the substrate 1, the face plate 2 and the outer frame 3 form a vacuum envelope. In this vacuum envelope, an atmospheric pressure resistant supporting member 5 is provided between the substrate 1 and the face plate 2, so that due to the atmospheric pressure when a large number of elements are arrayed over a large area. Distortion of the face plate 2 and the like is prevented.

The atmospheric pressure resistant supporting members 5 are elongated flat plates, and a plurality of them are arranged at predetermined intervals so that their longitudinal directions are the same. The getter groove portion 60 is a groove formed on the substrate 1 along the side of the substrate 1 around the region where the atmospheric pressure resistant support member 5 is provided. Here, the getter groove portion 60 is the atmospheric pressure resistant support member. It is substantially perpendicular to the longitudinal direction of the member 5. Exhaust resistance (exhaust resistance determined by the relative disposition of the atmospheric pressure resistant support member 5 and the area where the getter is formed)
Are formed at the positions (both ends of the substrate 1) that are the smallest. In this embodiment, the getter adhered range at the time of getter flash is limited by the edge of the getter groove 60.

Next, the surface conduction electron-emitting device which is the electron-emitting device used in this embodiment will be described. FIG. 19 (a)
19B is a plan view showing a partial schematic structure of a surface conduction electron-emitting device formed in plural on the substrate 1, and FIG.
9 (a) is a cross-sectional view taken along the line AB of FIG.

In FIG. 19, reference numeral 150 denotes a substrate, 151,
Reference numeral 152 denotes a device electrode, which is made of Au having a film thickness of 100 nm and has an interval L of 2 μm. 160 is a conductive thin film,
The width W was 500 μm. The conductive thin film 160 is formed by applying an organic Pd (ccP4230; Okuno Pharmaceutical Co., Ltd.)-Containing solution, which is an organic metal solution, and then performing heat treatment at 350 ° C. for 10 minutes to form fine particles containing PdO as a main component. It is formed of a thin film. Also, the electron emission unit 1
65 is formed by subjecting the conductive thin film 160 to a forming process. 170 is the device electrodes 151, 152
Is the element wiring connected to.

The substrate 1, face plate 2 and atmospheric pressure resistant support member 5 are all made of soda glass. A phosphor and a metal back for applying a high potential are formed on the face plate 2 (not shown).

The getter groove portion 60 is formed on the substrate 1 by shaving. This getter groove 6
An evaporative getter 8 containing BaAl as a main component is fixedly installed on the 0 bottom surface by a getter fixing jig (not shown).

Next, a method of forming the vacuum envelope of this embodiment will be described.

First, the getter groove 60, the substrate 1 on which the plurality of surface conduction electron-emitting devices 40 are formed, and the face plate 2 on which the phosphor and the metal back are provided.
The outer frame 3 and the outer frame 3 form an envelope, and the atmospheric pressure resistant support members 5 as the atmospheric pressure resistant reinforcing members are arranged in one direction at predetermined intervals in the envelope. Then, frit glass (LS-) is attached to a portion where the substrate 1, the face plate 2, the outer frame 3 in which the exhaust pipe 7 is arranged in advance, and the atmospheric pressure resistant support member 5 are in contact with each other.
0206 (manufactured by Nippon Electric Glass Co., Ltd.) is applied at 450 ° C.
After being heated for 10 minutes, it was sealed to form an envelope.

[0120] Subsequently, the envelope external vacuum pump through the exhaust pipe 7, to evacuate the envelope to about 1 × 10 ^-7. Then, the device electrode 15 of the surface conduction electron-emitting device is formed.
1, 152 to the conductive thin film 160 via a triangular waveform (base 1
A voltage pulse of msec, a period of 10 msec, and a peak value of 5 V) was applied for 60 seconds to perform forming to form an electron emitting portion 165.

After the electron emission portion 165 was formed as described above, the entire vacuum envelope was evacuated through the exhaust pipe 7 while being heated at 130 ° C. for 24 hours for degassing. Then, the evaporative getter 8 containing BaAl as a main component provided in the getter groove portion 60 was getter flashed with a high frequency of 350 kHz, and then the exhaust pipe 7 was closed. The vacuum envelope was formed by the above steps.

The getter deposition and its action in the getter flash, which are the features of this embodiment, will be described below.

In the above vacuum envelope, the getter 8 is fixed in the getter groove 60, so that the getter scattered by the getter flash described above is not included in the getter groove 6.
The edge of 0 limits the scattering and limits the deposition area. Therefore, here, the scattered getter is the getter groove 6
No. 0 inner wall, bottom, part of the outer frame, and outside the image display area of the face plate where the phosphor is not formed. Further, a getter deposition area is formed along the getter groove portion 60. By forming the evaporative getter in the getter structure 60 in this manner, the area where the scattered getter is deposited can be controlled. Further, since the scattered getter is also deposited on the getter groove 60, it is possible to increase the getter deposition area in the vacuum envelope by forming the getter groove 60 on the substrate 1.

In the getter deposition region formed as described above, the gas remaining in the vacuum envelope after the exhaust pipe is closed, or the gas generated during driving as the image display device. Is captured. In the vacuum envelope of the present embodiment, each atmospheric pressure resistant supporting member 5 is provided with its longitudinal direction substantially perpendicular to the longitudinal direction of the getter deposition area, so that it is generated during the above-mentioned residual gas and driving. The gas moves along the atmospheric pressure resistant support member 5 to reach the getter deposition area, and is captured by the getter. The residual gas of the getter and the gas generated during driving capture an exhaust effect, so that the pressure inside the vacuum envelope is maintained at a high vacuum.

<Comparative Example 4> The vacuum envelope described in Example 7 below includes the getter groove portion 60 and the atmospheric pressure resistant support member 5.
An example of a vacuum envelope having different relative arrangement positions with respect to will be described.

FIG. 23 is similar to the vacuum envelope shown in FIG. 1 except that the getter groove portion 60 is arranged along the side of the substrate 1 so that the longitudinal direction of the getter groove portion 60 is parallel to the atmospheric pressure resistant supporting member 5. It is the structure of. The same components as those of the image forming apparatus shown in FIG. 21 are designated by the same reference numerals.

When the getter groove portion 60 and the atmospheric resistance support member 5 are arranged relative to each other as shown in FIG. Will be the largest. The reason will be described below.

When the getter material is scattered by the getter flash, a getter deposition area is formed in the same manner as in the vacuum envelope shown in FIG. 21, and the getter deposition area causes residual gas and The generated gas is exhausted. However, in the vacuum envelope shown in FIG. 23, since each atmospheric pressure resistant support member 5 is provided so that its longitudinal direction is parallel to the getter deposition area, the atmospheric pressure resistant support members 5 remain. The gas and the gas generated during driving are prevented from reaching the getter deposition area (shielding action of the atmospheric pressure resistant support member). Therefore, in the vacuum envelope of this comparative example, the capture efficiency of the residual gas and the gas generated during driving is reduced, and the exhaust effect of the getter is reduced. Further, due to the shielding action of the atmospheric pressure resistant support member 5, the pressure inside the vacuum envelope becomes non-uniform due to the exhaust action of the getter.

Each of the vacuum envelopes shown in FIGS. 21 and 23 described above is connected to a drive circuit for displaying an image,
When the image forming apparatus was driven for a certain period of time, the image forming apparatus of Example 7 did not cause uneven brightness and a good image was displayed, but the image forming apparatus of Comparative Example 4 showed uneven brightness. Occurred.

[0130]

As described above, the image forming apparatus of the present invention is excellent in the exhaust speed at the time of exhausting by the exhaust pipe in the manufacturing process thereof, so that the inside of the vacuum envelope can be highly vacuumed in a short time. The air can be exhausted to a desired state and the pressure distribution inside the envelope can be suppressed. Therefore, the image forming apparatus of the present invention can suppress the manufacturing cost thereof, and since the pressure distribution due to the residual gas in the vacuum envelope after exhausting by the exhaust pipe is small, when it is driven as the image forming apparatus by this. The image quality of is also excellent. In addition, since the inside of the vacuum envelope after the exhaust pipe is closed is excellent in the exhaust rate of the residual gas by the getter and the gas generated during driving, the quality (luminance Etc.) is less likely to decrease. Further, by forming the getter groove portion on the substrate itself, a complicated process such as positioning in the arrangement of the shield plate is not required in the manufacturing process of the image forming apparatus, so that the yield is improved.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of an image forming apparatus of the present invention.

FIG. 2 is a cross-sectional view taken along the line A-A ′ in FIG.

FIG. 3 is a plan view showing another embodiment of the image forming apparatus of the present invention.

FIG. 4 is a side view showing still another embodiment of the image forming apparatus of the present invention.

FIG. 5 is a side view showing an image forming apparatus or still another embodiment of the present invention.

FIG. 6 is a plan view showing another embodiment of the image forming apparatus of the present invention.

FIG. 7 is a plan view showing another embodiment of the image forming apparatus of the present invention.

FIG. 8 is a plan view showing a first embodiment of the image forming apparatus of the invention.

9 is a cross-sectional view taken along the line A-A ′ in FIG.

FIG. 10 is a schematic plan view of an electron source substrate in which surface conduction electron-emitting devices are arranged in a matrix.

11 is a plan view showing an image forming apparatus of Comparative Example 1. FIG.

FIG. 12 is a plan view showing an image forming apparatus of Comparative Example 2.

FIG. 13 is a plan view showing an image forming apparatus of Comparative Example 3.

FIG. 14 is a plan view showing a second embodiment of the image forming apparatus of the invention.

15 is a cross-sectional view taken along the line AA ′ in FIG.

FIG. 16 is a plan view showing a third embodiment of the image forming apparatus of the invention.

FIG. 17 is a cross-sectional view taken along the line AA ′ in FIG.

FIG. 18A is a plan view showing a fifth embodiment of the image forming apparatus of the present invention, and FIG. 18B is a sectional view taken along the line AB of FIG.

FIG. 19 shows a structure of a surface conduction electron-emitting device (a).
Is a plan view and (b) is a cross-sectional view taken along the line AB of (a).

20A and 20B are a plan view and a sectional view taken along the line AB of FIG. 20A, respectively, showing a sixth embodiment of the image forming apparatus of the invention.

FIG. 21 is a plan view showing a seventh embodiment of the image forming apparatus of the invention.

22 is a cross-sectional view taken along the line AA in FIG.

FIG. 23 is a plan view showing an image forming apparatus of a fourth comparative example. Figure

FIG. 24 is a sectional view showing a first example of a conventional image forming apparatus.

FIG. 25 is a side sectional view showing a third example of the conventional image forming apparatus.

FIG. 26 is a side sectional view showing a fourth example of the conventional image forming apparatus.

FIG. 27 is a side view showing another embodiment of the image forming apparatus of the present invention.

FIG. 28 is a plan view showing a fourth embodiment of the image forming apparatus of the invention.

29 is a cross-sectional view taken along the line AA ′ in FIG.

[Explanation of symbols]

1 substrate 2 face plate 3 outer frame 4 electron sources 5 Atmospheric pressure resistant support member 6 Getter formation area 7 exhaust pipe 8 getters 9 Getter formation area 10 Shield 11 outer frame 40 electron-emitting device 50 metal back 60 getter groove 80 phosphor

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁷ Identification code FI H01J 29/94 H01J 29/94 31/12 31/12 C (56) References JP-A-7-140907 (JP, A) Kaihei 7-104676 (JP, A) JP 7-296732 (JP, A) JP 8-171871 (JP, A) JP 9-22649 (JP, A) JP 9-106771 ( (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01J 29/87 H01J 29/94 H01J 31/12 H01J 31/15

Claims (19)

(57) [Claims] 1. An envelope, an exhaust pipe provided in the envelope, a plate-like atmospheric pressure resistant support member standing upright in the envelope, and a getter provided in the envelope. In a vacuum envelope having at least a getter forming a formation region,
The longitudinal direction of the plate-shaped atmospheric pressure resistant support member and the longitudinal direction of the getter forming region formed by the getter are substantially perpendicular, and the central axis direction of the exhaust pipe and the longitudinal direction of the getter forming region are. A vacuum envelope characterized by being formed substantially vertically. 2. The envelope comprises a pair of flat plate-shaped face plates and a substrate arranged substantially in parallel, and an outer frame formed between peripheral portions of the pair of face plates and the substrate. The vacuum envelope according to claim 1. 3. The exhaust pipe is provided on an outer frame.
The vacuum envelope according to 1. 4. The vacuum envelope according to claim 2, wherein the exhaust pipe is provided on a face plate. 5. The substrate according to claim 2, wherein the exhaust pipe is provided on the substrate.
The vacuum envelope according to 1. 6. The vacuum envelope according to claim 1, wherein a plurality of the exhaust pipes are provided. 7. The vacuum envelope according to claim 1, wherein a plurality of getter formation regions are formed. 8. The vacuum envelope according to claim 1, wherein the getter is arranged outside the image forming area. 9. The vacuum envelope according to claim 1 , wherein the getter is an evaporation type getter. 10. The vacuum envelope according to claim 1 , wherein the getter is a non-evaporable getter. 11. The vacuum envelope according to claim 1 , wherein the getter includes an evaporative getter and a non-evaporable getter. 12. The vacuum envelope according to claim 1, wherein a plurality of the atmospheric pressure resistant supporting members are arranged in parallel with each other. 13. The vacuum envelope according to claim 1, wherein a plurality of the atmospheric pressure resistant supporting members are arranged in a zigzag shape. 14. A light emission device that emits light when an electron-emitting device is formed on a substrate of the pair of flat plates, and electrons emitted from the electron-emitting device collide with a face plate that is the other flat plate. Members are formed,
The vacuum envelope according to claim 2, wherein a surface of the pair of flat plates on which the electron emitting element is formed and a surface of the light emitting member on which they are formed face each other. 15. The vacuum envelope according to claim 14 , wherein an electron source including a plurality of the electron-emitting devices is formed on the substrate. 16. The vacuum envelope of claim 14 or 15 the electron-emitting devices are cold cathode electron-emitting device. 17. The vacuum envelope according to claim 16 , wherein the cold cathode electron emission device is a field emission type electron emission device. 18. The vacuum envelope according to claim 16 , wherein the cold cathode electron-emitting device is a surface conduction electron-emitting device. 19. An image forming apparatus incorporating the true-air envelope according to any one of claims 1 to 18 .