JPH09245642A - Device and method for exposure of cathode ray tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lessen a table and make capable high accurate exposure, by arranging a slide member slidable in an X/Y-axis direction on an exposure base plate, and bringing a PAG surely into contact with a butt pin of a stopper. SOLUTION: This exposure device comprises a synthetic resin-made mounting plate 24 arranging a face panel 2 and an assembly (PAG) of a color selecting electrode 5 on three panel receiving base on an exposure base table 1b. A frame body 31 fixed to a lower surface of the mounting plate 24, Y-axis slider 30Y comprising right/left columnar members 30YL, 30YR extended in a Y-axis direction and a Y-axis slider base part 33 are opposed through a bearing receiving part and a bearing arranged in these side surfaces. In an X-axis slider 30X fixed onto the table 1b, an X-axis base 32 extending a slide groove in an X-axis direction is provided, on its top, the base part 33 is slid in an X-axis direction. By an XY slider mechanism thus formed, good movement of the PAG can be made even by a small sized cylinder.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for a cathode ray tube and an exposure method therefor, and more particularly to an exposure apparatus suitable for exposing a large cathode ray tube and an exposure method therefor.

[0002]

2. Description of the Related Art Conventionally, an exposure apparatus as shown in FIG. 4 has been used as an exposure apparatus for forming phosphor stripes or dots on the inner surface of a color cathode ray tube.

Such an exposure apparatus is constructed as shown in FIG. That is, a light source 6 such as an ultra-high pressure mercury lamp is arranged at the lower end inside the frame 1a of the exposure apparatus 1, and an exposure table 1b of the exposure apparatus 1 is provided via a shutter 7, a filter 8, a correction lens 9 and the like.
A face panel is placed on the upper panel pedestal 10, and the phosphor stripe applied to the inner surface of the face panel 2 is exposed.

The face panel 2 brought onto the exposure table 1b of the exposure apparatus 1 has a color selection electrode (including a frame and an aperture grill plate) 5 as a face for selective exposure using the aperture grill plate 4 as a mask. It is fitted to a pin 2a formed on the inner surface of the panel 2.

The filter 8 in the frame 1a of the exposure apparatus 1 described above corrects the amount of light reduction caused by the difference in the distance from the light source 6 to the face panel 2, and the transmittance at the center portion so that the ultraviolet rays are evenly irradiated. Is small and the transmittance is increased in the peripheral area.

Further, the correction lens 9 is corrected so that the incident angle from the light source 6 to the inner surface of the face panel 2 becomes the same as the incident angle of the electron beam by the deflection yoke.

In the phosphor stripe exposure in such an exposure apparatus, the exposure is performed in the exposure process as shown in FIG. That is, generally, in the step of applying the phosphors of the three primary colors to the inner surface of the face panel 2, carbon stripes (CS) are produced in the first step. After applying a photosensitizer such as alcohol (PVA) and drying it, the color selection electrode 5 including the aperture grill plate 4 is mounted on the inner surface of the face panel 2 and placed on the exposure table to irradiate ultraviolet rays from the light source 6. After baking, the color selection electrode 5 is removed, and the unexposed portion is washed away with pure water, so that the photosensitive agent remains in a stripe shape. A carbon film is applied on this to have a uniform thickness, and then the photosensitizer is decomposed to remove the photosensitizer and the carbon on the photosensitizer to form CS stripes on the inner surface of the face panel 1 at a predetermined pitch. To be done.

On such a CS stripe, R (red), G
Three-color phosphors of (green) and B (blue) are applied. Generally, B of a color phosphor material of a color cathode ray tube (hereinafter referred to as CRT) is zinc sulfide containing silver (ZnS: Ag), G is a mixed crystal sulfide containing green emitting copper and aluminum (ZnS: CuA).
For l) and R, a rare earth phosphor (Y ₂ O ₂ S or the like to which eurobium is added) or the like is used.

Such a color phosphor is usually formed as a color phosphor slurry in which each of G, B, and R phosphors is mixed with a photosensitive resin such as PVA and water. FIG. 5 shows a process of applying such a color phosphor slurry to the inner surface of the face panel 2. In FIG. 5, the face panel 2 is subjected to the reverse stripe development 12 after the CS stripe coating and drying step 11 by the above-described method, and the above-mentioned G phosphor slurry is uniformly coated on the CS stripe. A spin coating method or the like is used for uniform coating of the slurry. After applying and drying 13, the color selection electrode 5 (hereinafter referred to as AG plate 4) is attached to the inner surface of the face panel 14
Then, G exposure 15 is performed by the light source 6 of the G phosphor. After that, when the AG plate 4 is removed 16 from the face panel 2 and developed 17, the unexposed portion of the G phosphor and the photosensitizer are eluted, and the G phosphor stripe or dots of the first color are formed.

The second B-color phosphor is also coated with the B-color phosphor slurry in the same manner as in the above-mentioned step B-process 1 shown in FIG.
8 is performed to form a B phosphor stripe or dot for the second color.

Further, the application of the R phosphor of the third color is also carried out by the R phosphor slurry as shown in FIG.
9 is performed to form phosphor stripes or dots for the third color.

After treatment with the R phosphor, as shown in the process diagram of FIG. 5, an intermediate film of an organic substance which decomposes at about 420 ° C. is applied and dried.
Then, a metal back such as an aluminum vapor-deposited film for improving the efficiency of the phosphor is performed on the intermediate film, and the intermediate film thermal decomposition process 22 is performed after the metal back to perform the photosensitive resin and water in the color phosphor slurry. Then, the intermediate film is disassembled, and the coating process of the fluorescent screen composed of fluorescent stripes or dots is completed.

FIG. 6 is a plan view of the exposure table 1b of the exposure apparatus 1 described above, and FIG. 7 is a sectional view taken along the line AA 'of FIG.

6 and 7 show a state in which the broken line position is arranged at the proper exposure position on the exposure table 1b. For example, the face panel 2 is placed on the exposure table 1b of the exposure apparatus 1.
A color selection electrode 5 in which the AG plate 4 and the AG plate 4 are integrated is placed as shown by a solid line.

On the exposure table 1b of the exposure apparatus 1, there is provided a panel receiving table 10 which is in contact with the lower ends of the panel upper and lower side walls 2b and 2c in the X-axis direction (long side portion) of the face panel 2.

The panel pedestal 10 is disposed on the lower side of the first panel pedestal 10a and the panel lower side wall 2c, which are disposed on the lower side of the panel upper side wall 2b at the substantially central position in the X axis direction. And a second panel support 10b and a third panel support 10c. The panel support 10 has a substantially rectangular metal plate 23.
A mounting plate 24 selected from a synthetic resin material, such as acetal resin, which has lubricity and wear resistance of the same shape, is fixed on the top. The metal plate 23 of the panel pedestal 10 is fixed on the exposure table 1b of the exposure apparatus 1.

These panel pedestals 10 (10a, 10b,
10c) the face panel 2 including the color selection electrode 5 mounted thereon is provided with two Y-axis panel direction alignment means and 1
Position adjustment in the X-axis and Y-axis directions is performed by the X-axis panel direction alignment means.

The Y-axis panel direction alignment means is a cylinder 2 that presses the upper side wall 2b of the face panel 2 at two points.
5Y and 25Y and two stoppers 26Y and 26Y contacting the lower side wall 2c of the face panel 2,
The stopper 26Y is fixed on the exposure table 1b through a predetermined spacer 27, and the cylinder 25Y is also slidably mounted on the exposure table.

The X-axis panel direction alignment means is composed of a cylinder 25X that presses the left side wall 2L of the face panel 2 downward in the X-axis direction and a stopper 26X that abuts the right side wall 2R of the face panel 2. Stopper 2
6X is fixed on the exposure table 1b via a predetermined spacer 27 as shown in FIG. 7, and the cylinder 25X is slidably mounted on the exposure table 1b in the same manner as the cylinders 25Y and 25Y described above. .

As shown in FIG. 7, stoppers 26Y and 26X are made of synthetic resin, and their tips are made to be slidable on spacer 27 in one direction by a coil spring or the like so as to be slidable. The abutting pin 28 is provided, and the abutting state can be detected by the sensor 29 arranged at the base of the abutting pin 28, and an alarm sound or the like is emitted when an abnormality occurs.

The face panel 2 (hereinafter referred to as PAG) incorporating the color selection electrode 5 mounted on the panel pedestal 10 on the exposure table 1b of the exposure apparatus 1 having the above-mentioned structure presses the cylinders 25Y and 25X. By the operation, while sliding on the mounting plate 24 of the panel pedestal, the abutment pins 28 of the stoppers 26Y and 26X are brought into contact with each other so that the proper exposure position is achieved.

[0022]

The X and Y-axis panel direction alignment means for aligning the exposure of the exposure apparatus described above is mounted on the exposure table 1b because the panel support 10 is fixed on the exposure table 1. P mounted on the mounting plate 24
If AG is large and heavy (25 inches or more, about 15 kg), or if the pressure adjustment is poor such that there is an air pressure difference with one of the two cylinders 25Y and 25Y, P
Friction and a friction difference occur between the lower surface of the upper and lower side walls 2b and 2c of the face panel 2 of the AG and the mounting plate 24, and the PAG
Of the face panel 2 and the lower end side wall 2c of the face panel 2 and the abutting pin 28 without being positioned by the abutting pin 28 in the adjusted regular position. There was a problem of creating a gap between them.

Further, the mounting plate 24 on the panel receiving base 10 is rubbed and deformed by friction, the height of the panel receiving base 10 is gradually changed, and the position of the color phosphor at the time of exposure is on the light source side of the exposure apparatus 1. There was also a bad effect such as shifting.

Further, the face panel 2 is a stopper 26X.
And the side wall of 26Y does not come into contact with the sensor 29
The face panel 2 is manually pressed again in such an abnormal condition to start exposure after contacting the abutting pin 28, but the waiting time (about 0.5 If the length is longer, the stripe width of the phosphor will be varied, which will cause adverse effects.

The above-mentioned PAG is attached to the panel pedestal 10 (10a ...
10c) and smoothly slides on the mounting plate 24 has a face panel diameter of 3 inches to 20 inches (weight 15 kg or less). For large pipes 25 inches or more, the cylinders 25X and 25Y are used. Since a large size is required and the size becomes long, not only the area of the exposure table 1b becomes large, but also a large pressing force must be given to the PAG. If such a large pressing force is applied, PAG
The face panel 2 and the color selection electrode 5 are shocked.
There is also a problem that the position of AG4 is displaced due to the poor mating condition of.

Further, since the vibration is large, the thin yarns of the AG plate are not shaken, and the mask is exposed in the shaken state, so that there is a problem that the AG shake defect is caused on the color phosphor surface.

The present invention is a color C which solves the above problems.
The present invention is intended to provide an RT exposure apparatus and an exposure method therefor, and a PAG can be reliably brought into contact with a stopper abutting pin with a cylinder having a small pressing force (1 kgf / cm ² ), and the exposure table can be made small. At the same time, it is an object of the present invention to provide an exposure apparatus and an exposure method capable of performing accurate exposure without causing AG fluctuation.

[0028]

A CRT exposure apparatus according to the present invention has a CRT panel 2 as shown in FIG.
In a CRT exposure apparatus configured to expose and produce a fluorescent layer on the inner surface of a substrate through a color selection electrode 5, a CRT exposure apparatus 1
A slide member 30 that is slidable in the X and Y axis directions is provided on the exposure table 1b.

According to the CRT exposure apparatus and the exposure method of the present invention, a small pressing force (1 kgf / c) of a small cylinder is used.
Even at m ² ) or less, the PAG smoothly contacts the stopper to enable high-precision exposure without AG shaking.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION An example of an exposure apparatus for a color CRT and an exposure method therefor according to the present invention will be described below with reference to FIGS. 1 is a partial side sectional view of an exposure apparatus of the present invention, FIG. 2 is a partial plan view of a panel mounting plate and a stopper portion of the exposure apparatus of the present invention, and FIG. 3 is an XY slider used in the exposure apparatus of the present invention. It is a perspective view showing an example. In the present invention, portions corresponding to those of the conventional configuration described with reference to FIGS.

As shown in FIG. 1, in the exposure apparatus 1 of this embodiment, the PAG in which the face panel 2 and the color selection electrode 5 are assembled is arranged in the same manner as described in detail with reference to FIG. 10 (10a, 10b, 10c). For the mounting plate 24, a synthetic resin having excellent wear resistance, heat resistance, and lubricity such as polyacetal resin (Delrin, trademark) or polyimide resin (Vespel, trademark) is selected.

The mounting plate 24 described above is formed in a substantially rectangular shape as shown in FIG. 2, and is fixed on the Y-axis slider 30Y. The Y-axis slider 30Y has a substantially rectangular frame body 31 fixed to the lower surface of the mounting plate 24 by interposing bearing receivers on the left and right prismatic members 30YL and 30YR extending in the Y-axis direction.
Are fixed to the lower surfaces of the left and right side walls of the Y-axis slider 30Y along the Y-axis direction, and these bearing receivers are opposed to the bearing receivers disposed on the left and right side walls of the Y-axis slider base 33 of the Y-axis slider 30Y via the bearings 34. ing.

The X-axis slider 30X has an X-axis base 32 having slide grooves extending in the X-axis direction. The X-axis base 32 is formed in a substantially rectangular shape and is fixed on the exposure table 1b. ing. The Y-axis slide base 33 has a smaller area than the X-axis base 32 and is formed in a substantially square shape, and is slidable in the X-axis direction. Therefore, as the Y-axis slide base 33 slides in the X-axis direction, the prismatic members 30YL and 30YR, the frame body 31, and the mounting plate 24 simultaneously slide in the X-axis direction.

FIG. 3 is a perspective view showing another structure of the XY slider 30. The V-shaped protruding groove 3 formed on the lower surface of the mounting plate 24 is shown in FIG.
5 and the flat protruding groove 36 are slidably fitted in the V-shaped groove 37 and the concave groove 38 formed on the upper surface of the Y-axis slider 30Y in the Y-axis direction. Therefore, the mounting plate 24 is smoothly moved in the Y-axis direction with a bearing member interposed between the fitting facing surfaces.

Similarly, a V-shaped projection groove 39 and a flat projection groove 40 extending in the X-axis direction are formed on the lower end surface of the Y-axis slider 30Y,
V-shaped groove 41 extending in the X-axis direction of the X-axis slider 30X
Also, the groove 42 is slidably fitted in the X-axis direction, and a bearing is interposed between these fitting portions to smoothly move in the X-axis direction.

X and Y consisting of such an XY slider
The axial sliding member 30 is arranged as a panel pedestal at the lower end of the mounting plate 24 at three or four positions in the same manner as in FIG. 6, and the PAG is placed on the mounting plate 24 by the solid line position shown in FIGS. 1kgf / for cylinders 25X and 25Y
By pressing the PAG from the X and Y axis directions with a light pressing force of about cm ^2, the X and Y axis sliders 30X and 30Y of the XY slider 30 smoothly move in the X and Y axis directions to the positions of broken lines in FIGS. 1 and 2. The right side wall 2R and the lower side wall 2C of the face panel 2 of the PAG come into contact with the butting pins 28 of the stoppers 26X and 26Y, and the positioning sensor 29 detects G, B, and R after the contact is detected. The exposure process is started. In the present invention, since the X and Y sliders are arranged on the lower surface of the mounting plate 24, the weight of the PAG is 15%.
A cylinder with a pressing force of 1 kgf / cm ² can be struck smoothly even if the pressure exceeds 1 kg, and there are no stripe position defects and sensor detection defects, wear on the mounting plate is reduced, and long-term (about 1 year) An exposure apparatus and an exposure method thereof having effects such that maintenance of these panel pedestals is unnecessary are obtained.

[0037]

According to the exposure apparatus and the exposure method of the present invention, the following effects can be obtained. 1. Since the XY slider mechanism is installed on the mounting plate, PAG can be performed even with a small pressing force of a small cylinder (about 1 kgf / cm ² ).
Since it is now possible to move to the abutting pin and there is no abutting mistake, it is possible to perform accurate exposure without variation in the exposure position of the resist or the like. 2. The exposure system does not need to use a large cylinder, the exposure system is also compact, the floor area used in the fluorescent screen exposure process is wide, and the area of the conventional exposure table (1.5 m ² ) can be reduced by about 10%. It was 3. Since the PAG slips less on the mounting plate, the friction resistance is reduced, the wear of the panel pedestal is reduced, and the regular height is maintained, so that the color stripe position during exposure shifts. No, and I did not need long-term maintenance. 4. Since the small cylinder is small and the pressing force is small, it does not give a shock to the PAG. As a result, since there is no AG shift, the matching between the panel and the AG is improved, and color stripe exposure can be performed at an appropriate position. Furthermore, since the vibration is small, the problem of AG shaking does not occur.

[Brief description of drawings]

FIG. 1 is a partial side sectional view of an exposure apparatus of the present invention.

FIG. 2 is a partial plan view of the exposure apparatus of the present invention.

FIG. 3 is a perspective view showing another embodiment of the XY slider used in the exposure apparatus of the present invention.

FIG. 4 is a configuration diagram of a conventional exposure apparatus.

FIG. 5 is a conventional phosphor exposure process diagram.

FIG. 6 is a plan view of a conventional exposure apparatus.

FIG. 7 is a partial side sectional view of a conventional exposure apparatus.

[Explanation of symbols]

1 exposure apparatus, 1b exposure table, 10, 10a,
10b, 10c panel pedestal, 24 mounting plate, 25X,
25Y cylinder, 26X, 26Y stopper, 30
XY slider

Claims (4)

[Claims] 1. A cathode ray tube exposure apparatus configured to expose a fluorescent layer on a panel inner surface of the cathode ray tube through a color selection electrode, wherein X and X are provided on an exposure table of the cathode ray tube exposure apparatus. Y
An exposure apparatus for a cathode ray tube comprising a sliding member which is slidable in the axial direction. 2. The exposure apparatus for a cathode ray tube according to claim 1, wherein the slide member is interposed between an exposure table and a panel mounting plate of the exposure apparatus for the cathode ray tube. 3. The exposure apparatus for a cathode ray tube according to claim 1, wherein the sliding member is an XY slider. 4. A method for exposing a cathode ray tube, wherein a fluorescent layer is exposed on a panel inner surface of the cathode ray tube through a color selection electrode, and a primary and secondary electrodes are provided between the panel of the cathode ray tube and an exposure table. A pressing member presses the panel side wall of the cathode ray tube with a pressing member through a sliding member that is slidable in the dimensional direction to a predetermined position to lower the pressing force of the pressing member. A method of exposing a cathode ray tube, characterized in that