JP2003031122A - Forming method of aligner and fluorescent screen - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a forming method of an aligner and a fluorescent screen in which a fluorescent screen, that prevents irregular reflection in the aligner and has a pattern of desired size, can be formed and in which occurrence of display defects in the color cathode-ray tube can be prevented. SOLUTION: The device comprises a support table 40 which supports a panel 1 that is installed with a shadow mask 4 opposed to the photosensitive material 21, a light source 41 that irradiates a light for printing a pattern corresponding to the opening of the shadow mask 4 on the photosensitive material 21 applied on the inner wall of the panel 1 that is supported on the support table 40, optical members 43, 44 45 that give prescribed optical characteristics on the light radiated from the light source 41, and an irregular-reflection preventing member 51 that restricts the irradiation range of the light radiated from the light source 41 within the effective region 1b of the panel 1 and absorbs the reflection light reflected toward the light source 41 side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus and a phosphor screen forming method, and more particularly to forming a phosphor screen of a color cathode ray tube used when a phosphor screen is formed on the inner surface of a panel by a photo printing method. The present invention relates to an exposure apparatus.

[0002]

2. Description of the Related Art Among conventional in-line color cathode ray tubes, for a normal color cathode ray tube used for receiving a television image, a shadow mask has a plurality of substantially rectangular openings arranged in a line through a bridge. The phosphor screen has a hole, and the light absorption layer and the three-color phosphor layer of the phosphor screen are formed in a stripe shape corresponding to the arrangement of the holes.

On the other hand, in a high-definition in-line color cathode ray tube used for a display of an information terminal or the like, the shadow mask has a plurality of circular openings, and these openings are provided in these openings. Correspondingly, the phosphor screen has dots having matrix-shaped light absorption layers having circular matrix holes (gap) and circular dot-shaped three-color phosphor layers embedded in the matrix holes of the light absorption layers. It is a matrix type.

Conventionally, a phosphor screen of a color cathode ray tube is formed by a photo printing method using a shadow mask as a photo mask. For example, a dot matrix type phosphor screen is formed by first forming a matrix-shaped light absorbing layer on the inner surface of the panel and then forming a three-color phosphor layer in the matrix hole.

Used to print a pattern corresponding to a circular opening of a shadow mask on a photosensitive material such as photoresist or photosensitive phosphor slurry applied to form a phosphor screen on the inner surface of a panel. The exposure apparatus includes a support base that positions and supports a panel on which a photosensitive material is formed and a shadow mask is mounted.

A light source section for irradiating ultraviolet light toward a panel positioned and supported by the support table is provided under the support table.
In addition, various optical members that impart predetermined optical characteristics to the light emitted from the light source unit are arranged.

Generally, the size of the dot pattern and the stripe pattern forming the phosphor screen is such that the integrated quantity of ultraviolet light during exposure (ultraviolet illuminance × irradiation time)
Or the hole diameter of the shadow mask (hole diameter through which ultraviolet light passes)
Depends on. Therefore, in order to obtain a pattern of a desired size, adjustment is made with these two parameters.

However, inside the exposure apparatus,
Part of the ultraviolet light emitted from the light source unit may cause irregular reflection. That is, part of the ultraviolet light emitted from the light source part is reflected back to the light source part side on the back surface of the support base, the surface of each optical member, and the surface other than the effective area of the panel. As a result, when the photosensitive material is exposed, irregularly reflected light is applied to the photosensitive material, which causes a problem that the dot pattern and the stripe pattern cannot be formed in a desired size.

Therefore, in the completed color cathode ray tube, the display brightness of red (R), green (G), and blue (B) varies, which causes a problem of display failure.

[0010]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems and is capable of preventing diffused reflection inside an exposure apparatus and forming a phosphor screen having a pattern of a desired size. An object of the present invention is to provide an exposure apparatus and a phosphor screen forming method capable of preventing the occurrence of display defects in a color cathode ray tube.

[0011]

In order to solve the above-mentioned problems and to achieve the object, a first aspect of the present invention is directed to forming a phosphor screen for exposing a photosensitive material applied to an effective area of a panel inner surface of a color cathode ray tube. In the exposure apparatus, with respect to the photosensitive material applied to the inner surface of the panel supported by the support table and the support table supporting the panel on which the shadow mask is mounted facing the photosensitive material, A light source unit that emits light for printing a pattern corresponding to the openings of the shadow mask, an optical member that imparts predetermined optical characteristics to the light emitted from the light source unit, and the irradiation of light emitted from the light source unit. A diffuse reflection preventing member that limits the range to the effective area of the panel and absorbs the reflected light reflected toward the light source unit side is provided.

According to a fourth aspect of the present invention, a photosensitive material is provided on the inner surface of the panel of the color cathode ray tube, and the panel on which the shadow mask is mounted is supported by the support base so as to face the photosensitive material, and is supported by the support base. In addition, by irradiating the photosensitive material applied to the inner surface of the panel with light from a light source unit, a pattern corresponding to the openings of the shadow mask is printed, and the photosensitive material is developed. In a phosphor screen forming method for forming a phosphor screen in a region, an irregular reflection preventing member arranged between the light source unit and the support base allows an effective range of light emitted from the light source unit to the panel. It is characterized in that the reflected light reflected toward the light source section side is absorbed while being restricted by the area.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of an exposure apparatus for forming a phosphor screen of a color cathode ray tube and a phosphor screen forming method of the present invention will be described below with reference to the drawings.

As shown in FIG. 2, the color cathode ray tube includes a vacuum envelope 9. The vacuum envelope 9 has a horizontal axis (X axis) as a long axis and a vertical axis (Y axis) as a short axis, and has long sides extending in the horizontal axis (X axis) direction and extending in the vertical axis (Y axis) direction. A panel 1 having a short side and a skirt portion 1a on the periphery and having a substantially rectangular outer surface, a funnel 2 connected to the skirt portion 1a of the panel 1, and a cylindrical shape connected to a small diameter portion of the funnel 2. It has a neck 5.

The phosphor screen 3 is arranged in the rectangular effective area 1b on the inner surface of the panel 1. As shown in FIGS. 3A and 3B, the phosphor screen 3 is a three-color phosphor layer that emits a large number of dot-like red (R), green (G), and blue (B) lights, respectively. 11R, 11G, and 11B, and a black light absorption layer 11K disposed in a gap between these phosphor layers
It has and.

The shadow mask 4, which is a color selection mechanism, is arranged in the vacuum envelope 9 from the phosphor screen 3 to the tube axis (Z
They are arranged so as to face each other at a predetermined distance in the axial direction. The shadow mask 4 is provided inside the panel 1 by engaging a plurality of elastic supports fixed to the outer wall of a mask frame (not shown) with a plurality of stud pins embedded in the inner surface of the skirt portion 1a of the panel 1. It is detachably supported.

The vacuum envelope 9 and the shadow mask 4 including the panel 1 have a tube axis Z extending through the center of the panel 1 and the electron gun assembly 7, and a long axis (horizontal axis) extending orthogonal to the tube axis Z. ) X and a short axis (vertical axis) Y extending orthogonally to the tube axis Z and the long axis X.

The in-line type electron gun assembly 7 is arranged inside the neck 5. The electron gun assembly 7 includes three electron beams 6 (B, G, R) arranged in a line in the X-axis (horizontal) direction, which includes a center beam 6G passing through the same horizontal plane and a pair of side beams 6B, 6R on both sides thereof. ) Is emitted in the Z-axis (tube axis) direction. Since the three electron beams 6B, 6G, and 6R emitted from the electron gun structure 7 have different angles of incidence to the electron beam passage holes of the shadow mask 4, the three electron beams 6B, 6G, and 6R are landed on the target dot-shaped phosphor layer and predetermined. The color of light is emitted.

The deflection yoke 8 is attached to the outer periphery of the funnel 2 from the neck 5. The deflection yoke 8 is provided with electron beams 6B and 6B emitted from the electron gun assembly 7.
It includes a horizontal deflection coil for generating an inhomogeneous deflection magnetic field for deflecting G and 6R in the horizontal axis direction and the vertical axis direction, and a vertical deflection coil. This non-uniform magnetic field is formed by a pincushion type horizontal deflection magnetic field and a barrel type vertical deflection magnetic field.

An inner shield (not shown) is arranged inside the joint between the panel 1 and the funnel 2 to shield the three electron beams 6R, 6G and 6B from undesired external magnetic fields generated from the earth magnetism and external circuits. Has been done.

In the color cathode ray tube having the above-described structure, the three electron beams 6B, 6 emitted from the electron gun assembly 7 are emitted.
The G and 6R are focused on the corresponding phosphor layers 11B, 11G and 11R on the phosphor screen 3 while being self-converged toward the phosphor screen 3. The three electron beams 6B, 6G, and 6R are deflected in the horizontal axis X direction and the vertical axis Y direction by the nonuniform deflection magnetic field generated by the deflection yoke 8, and pass through the electron beam passage holes of the shadow mask 4 to the panel 1. The phosphor screen 3 on the inner surface is scanned horizontally and vertically. As a result, a color image is displayed.

Next, an exposure apparatus for forming a phosphor screen for printing the phosphor layers of respective colors and the black light absorbing layer of the phosphor screen formed on the panel inner surface of the above-mentioned color cathode ray tube will be described.

As shown in FIG. 1, this exposure apparatus includes a support base 40. This support base 40 has a photosensitive material 21 such as a photoresist or a photosensitive phosphor slurry layer on its inner surface.
The panel 1 on which the shadow mask 4 is mounted is positioned and supported so as to face the photosensitive material 21. A light source is provided below the support base 40 so that the panel 1 positioned and supported by the support base 40 can be moved to a position corresponding to one row of three electron beams emitted from the electron gun assembly of the color cathode ray tube. A section 41 is provided.

Further, various optical members for imparting predetermined optical characteristics to the light emitted from the light source unit 41 are arranged between the light source unit 41 and the shadow mask 4 mounted on the panel 1. That is, as the optical member, the light source unit 41
ΔS correction lens 43 corresponding to a pair of side beams that approximates the trajectory of the light 41A emitted from the electron gun to the trajectory of the electron beam emitted from the electron gun structure, and a γ-ΔP correction lens that performs correction accompanying the movement of the deflection center. A correction lens optical system such as 44 is arranged.

Further, on the shadow mask 4 side of the correction lens optical system, a light distribution adjusting filter 45 having a pattern having a transmittance distribution for adjusting the light amount distribution with respect to the inner surface of the panel 1 is arranged as an optical member. ing. These correction lenses 43 and 44 and the light distribution adjustment filter 45
Are movable together with the light source unit 41 so as to keep the relative positional relationship with the light source unit 41 constant.

The light source unit 41 is, for example, a straight tube type ultra-high pressure mercury lamp that emits ultraviolet light having a wavelength of 365 nm.
7, the light source 47 is housed in a water-cooled light house 48 having a light transmission window. Near the light source 47, a light shielding portion 42 in which an opening 49 that substantially regulates the size of the light source 47 is formed is arranged. Further, a flat glass plate 46 is arranged in the light transmission window of the lightus 48.

In particular, in this embodiment, as shown in FIG. 1, the irradiation range of the light emitted from the light source section 41 is restricted to the effective area 1b of the panel 1 between the light source section 41 and the shadow mask 4. In addition, the irregular reflection preventing member 51 that absorbs the reflected light reflected toward the light source unit 41 side is arranged.

The diffused reflection preventing member 51 is formed of a metal plate member such as an amber material having a thickness of 0.1 to 0.1 mm. Further, the diffused reflection preventing member 51 allows the light emitted from the light source to pass through the central portion thereof and blocks the light emitted toward the area other than the effective area 1b of the panel 1 to regulate the light irradiation range. It has an opening portion 51a for opening. The surface of the irregular reflection preventing member 51 is subjected to surface treatment so as to prevent irregular reflection and absorb the reflected light reflected toward the light source unit 41 side.

The irregular reflection preventing member 51 is provided, for example, between the support 40 and the light distribution adjusting filter 45, between the light distribution adjusting filter 45 and the γ-ΔP correcting lens 44, and between γ-ΔP.
It is arranged at least at one location between the correction lens 44 and the ΔS correction lens 43, between the ΔS correction lens 43 and the light source section 41, and more preferably at all. In addition, the light source unit 4
Also in the inside of the first light house 48, the light shielding portion 42 arranged between the light source 47 and the glass plate 46 may have the same configuration as the diffuse reflection preventing member 51 described above.

The opening 51a of the diffuse reflection preventing member 51 has a circular shape as it is closer to the light source 47, and the panel 1 gradually becomes closer to the panel 1.
Is formed in a rectangular shape close to the shape of the effective area 1b.

Next, a method of manufacturing a phosphor screen by the exposure apparatus for forming a phosphor screen having such a diffused reflection preventing member will be described.

The phosphor screen 3 arranged on the inner surface of the panel 1 of the color cathode ray tube is formed by a photo printing method using the shadow mask 4 as a photo mask. The dot-matrix phosphor screen is formed by first forming the matrix-shaped light absorption layer 11K and then filling the matrix holes with the three-color phosphor layers 11R, 11G, and 11B.

That is, as shown in FIG. 4A, first, a photosensitive material is applied to the inner surface of the panel 1 and dried to form a photoresist 13. Then, the shadow mask 4 is attached to the panel 1 on which the photoresist 13 is formed, the photoresist 13 is exposed by using the above-described exposure apparatus, and the photoresist 13 corresponds to the circular opening 14 of the shadow mask 4. Bake a circular pattern.

Subsequently, as shown in FIG. 4B, the photoresist 13 having the circular pattern printed thereon is developed to remove the unexposed portion, and a resist 15 having a circular dot pattern is formed. .

Then, as shown in FIG. 4C, a light absorbing paint is applied to the inner surface of the panel 1 on which the resist 15 is formed and dried to form a light absorbing paint layer 16.

Subsequently, as shown in FIG. 4D, the light absorbing paint layer 16 applied to the resist 15 is peeled off together with the resist 15 to form a matrix hole 17 at a position where the phosphor layer is formed. The matrix-shaped light absorption layer 11K is formed.

Subsequently, as shown in FIG. 4 (e), a photosensitive phosphor slurry mainly containing a phosphor and a photosensitive material is applied to the inner surface of the panel 1 on which the light absorption layer 11K is formed. ,
The photosensitive phosphor slurry layer 19 is formed by drying. Then, the shadow mask 4 is attached to the panel 1 on which the photosensitive phosphor slurry layer 19 is formed, and the photosensitive phosphor slurry layer 19 is exposed by using the above-described exposure apparatus, so that the photosensitive phosphor slurry calendar 19 is obtained. A circular pattern corresponding to the circular opening 14 of the shadow mask 4 is printed.

Subsequently, as shown in FIG. 4F, a photosensitive phosphor slurry layer 19 having a circular pattern printed thereon.
Is developed to remove the unexposed portion, and a circular dot-shaped phosphor layer, for example, a blue phosphor layer 11B is formed in a predetermined matrix hole 17 of the light absorption layer 11K.

Further, the step of forming the blue phosphor layer 11B is sequentially repeated for the green phosphor and the red phosphor, and as shown in FIG. 4 (g), a predetermined matrix hole 17 is formed in the light absorption layer 11K. A circular dot-shaped green phosphor layer 11G and a red phosphor layer 11R are formed.

Through these steps, the dot matrix type phosphor screen 2 is formed on the inner surface of the panel 1. In the above-described phosphor screen manufacturing method, the dot matrix type in which the three-color phosphor layers are arranged in a dot shape has been described as an example, but the phosphor screen in which the three-color phosphor layers are arranged in a stripe shape is also predetermined. It can be manufactured by a similar manufacturing method by mounting a shadow mask having a shaped opening.

In a color cathode ray tube having a phosphor screen manufactured by the manufacturing method as described above,
When a white screen was displayed, a uniform and good image could be displayed.

As described above, the diffused reflection preventing member 51 that restricts the irradiation range of the light emitted from the light source section 41 to the effective area 1b of the panel 1 and absorbs the reflected light reflected toward the light source section 41 side. Is arranged at least at one position between the light source 47 included in the light source section 41 and the support base 40, so that the light source 4 is provided on the surface other than the effective region 1b of the panel 1.
It is possible to prevent irradiation of unnecessary ultraviolet light emitted from 7. Further, due to the irregular reflection preventing member 51, a part of the ultraviolet light emitted from the light source 47 inside the exposure device is part of the ultraviolet light emitted from the light source part on the back surface of the support base 40, the front surface of each optical member, or the like. The diffuse reflection light reflected so as to return to the light source unit 47 side can be absorbed.

Therefore, when exposing the photosensitive material arranged in the effective area 1b of the panel 1, it is possible to prevent undesired exposure of the photosensitive material due to unnecessary irregular reflection light.
It is possible to form a dot-shaped or stripe-shaped pattern of a desired size. As a result, in the completed color cathode-ray tube, it becomes possible to form the phosphor screen 3 having the three-color phosphor layer of a desired size in the effective area 1b of the panel 1, and suppress the variation in the brightness of each phosphor layer. As a result, display uniformity is improved and it becomes possible to prevent the occurrence of display defects.

In the above-described embodiment, the diffused reflection preventing member is arranged as a plate-like member at least at one position between the light source 47 included in the light source section 41 and the support base. The present invention is not limited to the above, and various changes can be made.

For example, the irregular reflection preventing member includes the back surface of the support base 40, the light distribution adjustment filter 45, and the γ-ΔP correction lens 4.
4, it may be provided as a thin film on at least one main surface of the ΔS correction lens 43 and the glass plate 46.

Even in such an embodiment, the same effect as that of the embodiment shown in FIG. 1 can be obtained.

[0047]

As described above, according to the present invention, it is possible to prevent the diffused reflection inside the exposure apparatus, form a phosphor screen having a pattern of a desired size, and cause a display defect in the color cathode ray tube. It is possible to provide an exposure apparatus and a method for forming a phosphor screen that can prevent the above.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing a configuration of an exposure apparatus for forming a fluorescent surface of a color cathode ray tube according to an embodiment of the present invention.

FIG. 2 is a horizontal sectional view schematically showing the structure of a color cathode ray tube having a phosphor screen formed using the exposure apparatus of this embodiment.

3 (a) is a plan view schematically showing the structure of the phosphor screen of the color cathode ray tube shown in FIG. 2, and FIG. 3 (b) is FIG. 3 (a). 3 is a cross-sectional view schematically showing the structure of the phosphor screen shown in FIG.

4 (a) to 4 (g) are views for explaining main steps of forming a dot matrix type phosphor screen.

[Explanation of symbols]

1 ... panel 1b ... Effective area 2 ... Funnel 3 ... Phosphor screen 4 ... Shadow mask 5 ... neck 6 (R, G, B) ... electron beam 7 ... In-line type electron gun structure 8 ... Deflection yoke 10 ... Vacuum envelope 11 (R, G, B) ... Phosphor layer 11K ... Light absorbing layer 21 ... Photosensitive material 41 ... Light source section 43 ... ΔS correction lens 44 ... γ-ΔP correction lens 45 ... Light distribution adjustment filter 47 ... Light source 51 ... Diffuse reflection prevention member 51a ... Opening

Claims (4)

[Claims] 1. An exposure apparatus for forming a phosphor screen, which exposes a photosensitive material applied to an effective area of an inner surface of a panel of a color cathode ray tube, wherein the panel provided with a shadow mask is opposed to the photosensitive material. A support table for supporting the light-sensitive material applied to the inner surface of the panel supported by the support table, and a light source section for irradiating light for printing a pattern corresponding to the openings of the shadow mask, An optical member that imparts predetermined optical characteristics to the light emitted from the light source unit, and restricts the irradiation range of the light emitted from the light source unit to the effective region of the panel, and is reflected toward the light source unit side. And an irregular reflection preventing member that absorbs reflected light. 2. The exposure apparatus according to claim 1, wherein the irregular reflection preventing member is arranged between a light source included in the light source section and the support base. 3. The irregular reflection preventing member is a thin film provided on at least one main surface of the optical member arranged between a light source included in the light source section and the support base. The exposure apparatus according to claim 1. 4. A color cathode ray tube is provided with a photosensitive material on an inner surface of the panel, and the panel having a shadow mask mounted thereon is supported by a supporting base so as to face the photosensitive material, and the panel supported by the supporting base. The light source unit irradiates the photosensitive material applied to the inner surface of the substrate with light to print a pattern corresponding to the openings of the shadow mask, and develops the photosensitive material. In a phosphor screen forming method for forming a body screen, an irregular reflection preventing member arranged between the light source unit and the support base regulates an irradiation range of light emitted from the light source unit to an effective region of the panel. The method for forming a phosphor screen is characterized in that the reflected light reflected toward the light source section is absorbed.