JP2000173467A - Exposing device for forming fluorescent screen in color cathode-ray-tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate color displacement and image irregularity caused by low machining accuracy of an optical member, by placing a lens-shaped light-distribution corrective optical member for light from a light source that is used for printing a pattern corresponding to a shadow mask opening onto a photosensitive-fluorescent-screen forming layer on the inner surface of a panel between the light source and the shadow mask, and rotating and driving it around an optical axis. SOLUTION: A corrective lens system having a tilting surface such as a corrective lens 34, ΔS corrective lens 35, and γ-ΔP corrective lens 36, and a corrective filter 37, which are arranged between a light source part 31 movable at a lower part of a support table 30 of a panel 1 and a shadow mask 4, are movable and has a constant relation with the light source part 31. A central part of a lens-shaped light-distribution corrective member 44 between the corrective lens 34 having the tilting surface and the light source part 31 has a non-spherical projecting part that is symmetric in rotation in relation to a central axis, is rotated around the optical axis 33 during pattern printing, and is highly accurately machined in larger shape than that in the case of placing it on a light transmitting window of a lamp house 40, and machining errors are uniformized by rotation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for forming a fluorescent screen of a color cathode ray tube used for forming a fluorescent screen by a photographic printing method.

[0002]

2. Description of the Related Art Generally, a color cathode ray tube has an envelope composed of a panel 1 and a funnel 2 as shown in FIG. A phosphor screen 3 including a three-color phosphor layer provided so as to be embedded is provided. Further, a shadow mask 4 is disposed inside the fluorescent screen 3 so as to face the fluorescent screen 3. On the other hand, an electron gun 7 for emitting three electron beams 6B, 6G, 6R is arranged in the neck 5 of the funnel 2. Then, the three electron beams 6B, 6G, 6R emitted from the electron gun 7 are deflected by the deflecting device 8 mounted outside the funnel 2, and the fluorescent screen 3 is horizontally and vertically scanned through the shadow mask 4. Thus, a structure for displaying a color image is formed.

At present, such a color cathode ray tube has three electron beams 6B and 6B arranged in a line passing an electron gun 7 on the same plane.
In-line type color cathode ray tubes, which are electron guns emitting 6G and 6R, are mainly used.

In this in-line type color cathode ray tube,
For a normal color cathode ray tube used for television image reception, the shadow mask 4 has a plurality of substantially rectangular openings arranged in a line via a bridge. Correspondingly, the light absorbing layer and the three-color phosphor layer of the phosphor screen 3 are formed in a stripe shape.
In contrast, high-definition in-line color cathode ray tubes used as display tubes for information processing terminals, etc.
The opening of the shadow mask 4 is circular, and the light absorbing layer and the three-color phosphor layer corresponding to the opening form a matrix light absorbing layer having a circular matrix hole (gap) as shown in FIG. 10 and three-color phosphor layers 11B, 11G in the form of circular dots in matrix holes of the light absorbing layer 10.
, 11R are embedded in a dot matrix type phosphor screen.

Conventionally, the fluorescent screen of this color cathode ray tube is formed by a photographic printing method using a shadow mask 4 as a photomask. For the dot matrix type fluorescent screen, a matrix light absorbing layer 10 is first formed. Next, the three-color phosphor layers 11B, 1B are provided in the matrix holes.
It is formed by a method for forming 1G and 11R.

That is, first, a photosensitive agent is applied to the inner surface of the panel and dried to form a photoresist. Then
A shadow mask is mounted on the panel on which the photoresist is formed, and is exposed using an exposure device described later, and a circular pattern corresponding to the circular opening of the shadow mask is printed on the photoresist. Next, the photoresist on which the pattern is baked is developed to remove unexposed portions, thereby forming a resist having a circular dot pattern. Next, a light absorbing paint is applied to the inner surface of the panel on which the resist is formed, and dried to form a light absorbing paint layer. Next, the light-absorbing paint layer applied on the resist is peeled off together with the resist to form a matrix-shaped light-absorbing layer having a matrix hole at the position where the phosphor layer is to be formed.

Then, a photosensitive phosphor slurry containing a phosphor and a photosensitive agent as main components is applied to the inner surface of the panel on which the light absorbing layer is formed, and dried to form a photosensitive phosphor slurry layer. Then, a shadow mask is mounted on the panel on which the photosensitive phosphor slurry layer is formed, and the panel is exposed to light using an exposure apparatus described later. The photosensitive phosphor slurry layer has a circular shape corresponding to the circular opening of the shadow mask. Bake the pattern. Next, the photosensitive phosphor slurry layer in which the pattern is baked is developed to remove unexposed portions, and a circular dot-shaped phosphor layer, for example, a blue phosphor layer is formed in a predetermined matrix hole of the light absorbing layer. I do. This step of forming the blue phosphor layer is sequentially repeated for the green phosphor and the red phosphor, and the green phosphor layer and the red phosphor layer in the form of circular dots are formed in predetermined matrix holes of the light absorbing layer. You.

An exposure apparatus used for printing a pattern corresponding to a circular opening of a shadow mask on a photosensitive phosphor screen forming layer such as a photoresist or a photosensitive phosphor slurry layer formed on the inner surface of the panel is as follows. As shown in FIG. 7, the photosensitive phosphor screen forming layer 13 is formed and the panel 1 on which the shadow mask 4 is mounted is positioned under the support 14 for positioning and supported by the support 14. A light source unit 15 is provided on the panel 1 so as to be movable at a position corresponding to three electron beams arranged in a row in a row from the electron gun of the color cathode ray tube, and the light source unit 15 and a shadow mounted on the panel 1 are provided. Opening of the shadow mask 4 projected between the mask 4 and the photosensitive phosphor screen forming layer 13 formed on the inner surface of the panel 1 by light 16 emitted from the light source unit 15 Correcting lens 17 having the inclined plane that changes the corresponding pattern temporally, the light source unit 15
A pair of side beam-corresponding ΔS correction lenses 18 for approximating the trajectory of the light 16 emitted from the electron gun to the trajectory of the electron beam emitted from the electron gun, a γ-ΔP correction lens 19 for performing a correction accompanying movement of the deflection center, and A correction filter 20 for correcting the light amount distribution with respect to the inner surface of the panel 1 and the like are arranged.

The light source section 15 uses a straight tube ultrahigh pressure mercury lamp or the like as a light source 21, and this light source 21 is housed in a water-cooled lamp house 22 having a light transmission window.
In the vicinity of the light source 21, a light shielding portion 24 having an opening 23 for substantially regulating the size of the light source 21 is arranged. When viewed from the axial direction of the light source 21,
It is formed in a V-shape or a shape having a flat cross section. Further, a lens-shaped light distribution correction optical member 25 having a convex curved surface portion is disposed in the light transmission window of the lamp house 22.

As described above, the lens-like light distribution correcting optical member 25 is used.
Can increase the amount of light in the peripheral area where the amount of light tends to be insufficient for the central part of the inner surface of the panel, and is particularly effective when applied to the formation of the fluorescent screen of large color cathode ray tubes where the amount of light in the peripheral area is significantly insufficient. Can be

[0011]

As described above, the fluorescent screen of the color cathode ray tube is formed by a photographic printing method using a shadow mask as a photomask, and is used for a high-definition in-line type color cathode ray tube used for an information processing terminal or the like. The dot matrix type phosphor screen of the tube is formed by first forming a matrix light absorbing layer, and then forming a three-color phosphor layer in the matrix hole. In this method of forming a phosphor screen by the photo printing method, when printing a pattern corresponding to the opening of the shadow mask on a photosensitive phosphor screen forming layer such as a photoresist or a photosensitive phosphor slurry layer formed on the inner surface of the panel, An exposure device is used.

Conventionally, this exposure apparatus is provided below a support for positioning and supporting a panel on which the photosensitive phosphor screen forming layer is formed and on which a shadow mask is mounted, with respect to the panel positioned and supported by the support. A light source unit is provided movably at a position corresponding to the three electron beams arranged in a row emitted from the electron gun of the color cathode ray tube, and various correction lenses and correction filters are provided between the light source unit and the shadow mask. It has been arranged. The light source unit is a straight tube ultra-high pressure mercury lamp or the like, and the light source is housed in a lamp house having a light transmission window, and has a lens-shaped light distribution correction having a convex curved surface portion in the light transmission window of the lamp house. The optical member is arranged.

Incidentally, the light distribution correcting optical member needs to be accurately processed into a predetermined shape in order to make the light distribution to the inner surface of the panel appropriate. However, as described above, the light distribution correction optical member disposed close to the light source in the light transmitting window of the lamp house needs to have a smaller shape than a correction lens disposed far from the light source unit, and the accuracy is high. It is difficult to process well.

In this case, if the processing accuracy is low, the position of the pattern corresponding to the opening of the shadow mask to be printed on the photosensitive phosphor screen forming layer formed on the inner surface of the panel shifts, causing color shift. In addition, a processing error of the light distribution correcting optical member appears in the matrix holes of the matrix-shaped light absorbing layer, causing problems such as causing image unevenness.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a fluorescent lamp for a color cathode ray tube which can eliminate color shift and image unevenness caused by low processing accuracy of a light distribution correcting optical member. An object of the present invention is to configure a surface forming exposure apparatus.

[0016]

Means for Solving the Problems (1) A pattern corresponding to the opening of a shadow mask disposed opposite to the photosensitive phosphor screen forming layer is formed on the photosensitive phosphor screen forming layer formed on the inner surface of the panel. In an exposure apparatus for forming a fluorescent screen of a color cathode-ray tube, comprising: a light source unit that emits light to be printed; and a lens-shaped light distribution correction optical member that corrects the light distribution of light emitted from the light source unit. The member was disposed between the light source unit and the shadow mask at a distance from the light source unit, and was formed into a structure that was rotated and driven around the optical axis of light emitted from the light source unit.

(2) The photosensitive phosphor screen forming layer formed on the inner surface of the panel emits light for printing a pattern corresponding to the opening of the shadow mask disposed opposite to the photosensitive phosphor screen forming layer. A color cathode ray tube including a light source unit, a correction lens optical system that changes the trajectory of light emitted from the light source unit, and a lens-shaped light distribution correction optical member that corrects the light distribution of the light emitted from the light source unit. In a phosphor screen forming exposure apparatus, a light distribution correction optical member is disposed at a distance from a light source section between a light source section and a correction lens optical system, and is rotationally driven around an optical axis of light emitted from the light source section. Formed into a structure.

(3) In the exposure apparatus for forming a fluorescent screen of a color cathode-ray tube according to (1) or (2), the light distribution correcting optical member is moved substantially in the radial direction with the optical axis of the light emitted from the light source section as the central axis. It was formed in a symmetrical shape.

(4) In the exposure apparatus for forming a fluorescent screen of a color cathode ray tube according to any one of (1) to (3), the light distribution correcting optical member is formed in a shape having a convex curved surface portion.

(5) In the exposure apparatus for forming a fluorescent screen of a color cathode ray tube according to any one of (1) to (3), the light distribution correcting optical member is formed in an aspherical shape having a convex curved surface portion.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an exposure apparatus which is one embodiment of the present invention.
This exposure apparatus has a panel in which a photosensitive phosphor screen forming layer 13 such as a photoresist or a photosensitive phosphor slurry layer is formed on the inner surface, and a shadow mask 4 is mounted opposite the photosensitive phosphor screen forming layer 13. Support base 3 for positioning and supporting 1
A light source unit 31 is provided below the panel 0 so as to be movable with respect to the panel 1 positioned and supported by the support table 30 to a position corresponding to three electron beams arranged in a row and emitted from an electron gun of a color cathode ray tube. ing. A light 32 emitted from the light source unit 31 between the light source unit 31 and the shadow mask 4 mounted on the panel 1 corresponds to an opening of the shadow mask 4 projected on the photosensitive phosphor screen forming layer 13. A correction lens 34 having an inclined plane that is driven to rotate about the optical axis 33 of the light 32 emitted from the light source unit 31 so that the pattern to be moved temporally;
A pair of side beam-corresponding ΔS correction lenses 35 for approximating the trajectory of the light 32 emitted from the electron gun to the trajectory of the electron beam emitted from the electron gun, and a γ-ΔP correction lens 36 for performing a correction accompanying the movement of the deflection center. A correction lens optical system is provided, and a correction filter 37 for correcting the light quantity distribution on the inner surface of the panel 1 is provided on the shadow mask 4 side of the correction lens optical system. These correction lenses 34, 35, 36 and correction filter 37
The light source unit 31 can be moved together with the light source unit 31 so as to maintain a certain relationship.

The light source section 31 uses a straight tube ultra-high pressure mercury lamp or the like as a light source 39, and this light source 39 is housed in a water-cooled lamp house 40 having a light transmission window.
In the vicinity of the light source 39, a light shielding portion 42 having an opening 41 for substantially regulating the size of the light source 39 is arranged.

Particularly, in this embodiment, the light source 31
A lens-shaped light distribution correction optical member 44 is disposed between the light transmission correction optical member 44 and the correction lens 34 having the inclined plane. A transmission member 45 is provided.

As shown in FIG. 2, the light distribution correction optical member 44 has a central portion which is substantially symmetric (rotationally symmetric) in the radial direction with respect to the central axis 47, and protrudes in the direction of a correction lens having an inclined plane. It is formed into a shape having a spherical convex curved surface portion 48, is movable together with the correction lenses 34, 35, 36 and the correction filter 37 so as to maintain a constant relationship with the light source portion 31. As shown in FIG. 3, the driving device 49 is driven by a driving device 49 together with a correction lens having an inclined plane and a center axis 47 coincident with the optical axis 33 as a rotation center. It is something to be done.

Next, a method of forming a dot matrix type phosphor screen using the above exposure apparatus will be described.

The dot matrix type phosphor screen is formed by first forming a matrix-like light absorbing layer, and then forming a three-color phosphor layer in the matrix hole.

First, as shown in FIG.
A photosensitive agent is applied to the inner surface of the
To form Then, the shadow mask 4 is mounted on the panel 1 on which the photoresist 50 is formed, and is exposed using the above-described exposure apparatus, and a circular pattern corresponding to the circular opening 51 of the shadow mask 4 is printed on the photoresist 50. wear. In this case, the light source unit is sequentially moved to a position corresponding to three electron beams arranged in a row emitted from the electron gun of the color cathode ray tube, and with the movement of the light source unit, a correction lens having an inclined plane, a ΔS correction lens, and γ Moving a correction lens optical system such as a ΔP correction lens, a correction filter, and a light distribution correction optical member so as to maintain a fixed relationship with the light source unit, and rotating the correction lens and the light distribution correction optical member having an inclined plane; Perform printing of the pattern.

Next, the photoresist 50 on which the pattern has been baked is developed to remove unexposed portions.
As shown in (1), a resist 52 having a circular dot pattern is formed. Next, as shown in (c), a light absorbing paint is applied to the inner surface of the panel 1 on which the resist 52 is formed, and dried to form a light absorbing paint layer 53. Next, the light absorbing paint layer 53 applied on the resist 52
Is peeled off together with the resist 52 to form a matrix-shaped light absorbing layer 10 in which the positions where the phosphor layers in the form of circular dots are formed are the matrix holes 54 as shown in FIG.

After that, for example, a photosensitive phosphor slurry containing a blue phosphor and a photosensitive agent as main components is applied to the inner surface of the panel 1 on which the light absorbing layer 10 is formed, dried, and dried (e).
As shown in (1), a photosensitive phosphor slurry layer 55 is formed.
Then, the shadow mask 4 is mounted on the panel 1 on which the photosensitive phosphor slurry layer 55 is formed, and is exposed using the above-described exposure apparatus. The circular opening 51 of the shadow mask 4 is formed in the photosensitive phosphor slurry layer 55. Bake a circular pattern corresponding to. In this case, the light source unit is moved to a position corresponding to the electron beam for emitting the blue phosphor layer among the three electron beams arranged in a row emitted from the electron gun, and a correction lens having an inclined plane, a ΔS correction lens, A correction lens optical system such as a γ-ΔP correction lens, a correction filter, and a light distribution correction optical member are moved so as to maintain a constant relationship with the light source unit,
The pattern is printed while rotating the correction lens and the light distribution correction optical member having an inclined plane.

Next, the photosensitive phosphor slurry layer 55 on which the pattern is baked is developed to remove unexposed portions, and a circular hole is formed in a predetermined matrix hole of the light absorbing layer 10 as shown in FIG. A dot-shaped blue phosphor layer 11B is formed. Further, the step of forming the blue phosphor layer 11B is sequentially repeated for the green phosphor and the red phosphor, and the green phosphor layer of a circular dot shape is formed in a predetermined matrix hole of the light absorbing layer 10 as shown in FIG. 11G and red phosphor layer 11R
To form

When the exposure apparatus is constructed as described above and the light distribution correcting optical member 44 is disposed between the light source unit 31 and the correction lens 34 having an inclined plane, the light of the lamp house can be changed as in the conventional exposure apparatus. As compared with the case where the light distribution correction optical member is arranged in the transmission window, the shape can be made larger, and the light distribution correction optical member can be processed with high accuracy. In addition, since the light distribution correction optical member 44 is driven to rotate about the optical axis 33 of the light 32 emitted from the light source unit 31, even if there is a processing error in the light distribution correction optical member 44, the light distribution correction optical member 44 is averaged and formed. , The matrix holes 53 of the light absorbing layer 10, the three-color phosphor layers 11B,
The influence on 11G and 11R can be reduced, and a fluorescent screen in which color unevenness and image unevenness do not easily occur can be formed.

In the above-described embodiment, the light distribution correction optical member is driven to rotate together with the correction lens having the inclined plane. However, the light distribution correction optical member and the correction lens having the inclined plane are independent of each other. It is good also as a structure driven to rotate.

In the above embodiment, the light distribution correcting optical member is disposed on the light source side of the correcting lens having an inclined plane. However, this light distribution correcting optical member is a ΔS correcting lens of a correcting lens having an inclined plane. It may be arranged on the side.

In the above embodiment, the exposure apparatus in which the correction lens having the inclined plane is arranged has been described. However, the present invention can be applied to an exposure apparatus in which the correction lens having the inclined plane is not arranged.

The present invention is also applicable to the formation of a phosphor screen other than the dot matrix phosphor screen.

[0037]

As described above, the lens-shaped light distribution correcting optical member is disposed between the light source unit and the correcting lens optical system, and the light distribution correcting optical member is used to adjust the optical axis of light emitted from the light source unit. With a structure that is driven to rotate as the central axis, the light distribution correction optical member can be made larger than when a light distribution correction optical member is arranged in the light transmission window of the lamp house as in a conventional exposure apparatus, and the convex curved surface portion can be formed. Can be processed with high precision. Moreover, by rotating the light distribution correcting optical member, even if there is a processing error in the light distribution correcting optical member, the influence on the matrix holes and the three-color phosphor layer of the light absorbing layer to be formed is reduced. In addition, it is possible to form a phosphor screen that is unlikely to cause color unevenness and image unevenness.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an exposure apparatus according to an embodiment of the present invention.

FIG. 2A is a plan view showing a shape of a light distribution correcting optical member arranged in the exposure apparatus, and FIG. 2B is a front view thereof.

FIG. 3 is a view for explaining rotational driving of the light distribution correction optical member.

FIGS. 4A to 4G are diagrams for explaining a method of forming a dot matrix type fluorescent screen.

FIG. 5 is a diagram showing a configuration of a color cathode ray tube.

FIG. 6A is a plan view of a dot matrix type fluorescent screen, and FIG. 6B is a cross-sectional view thereof.

FIG. 7 is a diagram illustrating a configuration of a conventional exposure apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Panel 4 ... Shadow mask 13 ... Photosensitive fluorescent screen forming layer 31 ... Light source part 32 ... Light 33 ... Optical axis 34 ... Correction lens with an inclined plane 35 ... ΔS correction lens 36 ... γ-ΔP correction lens 44 ... Lens shape Light distribution correcting optical member 48: convex curved surface portion 51: aperture of shadow mask

Claims (5)

[Claims] 1. A light source for emitting light for printing a pattern corresponding to an opening of a shadow mask disposed on a photosensitive phosphor screen forming layer formed on an inner surface of a panel so as to face the photosensitive phosphor screen forming layer. Unit, and a lens-shaped light distribution correction optical member for correcting the light distribution of light emitted from the light source unit, an exposure apparatus for forming a fluorescent screen of a color cathode ray tube, wherein the light distribution correction optical member is the light source unit A color cathode ray tube which is disposed between the light source unit and the shadow mask so as to be separated from the light source unit and which is driven to rotate about an optical axis of light emitted from the light source unit as a central axis; Exposure apparatus for forming a fluorescent screen. 2. A light source for emitting light for printing a pattern corresponding to an opening of a shadow mask disposed on a photosensitive phosphor screen forming layer formed on an inner surface of a panel so as to face the photosensitive phosphor screen forming layer. Unit, a correction lens optical system that changes the trajectory of light emitted from the light source unit, and a lens-shaped light distribution correction optical member that corrects the light distribution of the light emitted from the light source unit. In the phosphor screen forming exposure apparatus, the light distribution correction optical member is disposed apart from the light source unit between the light source unit and the correction lens optical system, and the optical axis of light emitted from the light source unit is An exposure apparatus for forming a fluorescent screen of a color cathode ray tube, wherein the exposure apparatus is formed in a structure driven to rotate as a center axis. 3. The collar according to claim 1, wherein the light distribution correcting optical member is formed in a substantially symmetrical shape in a radial direction with respect to an optical axis of light emitted from the light source. An exposure apparatus for forming a fluorescent screen of a cathode ray tube. 4. The exposure apparatus for forming a fluorescent screen of a color cathode ray tube according to claim 1, wherein the light distribution correction optical member is formed in a shape having a convex curved surface portion. 5. The exposure apparatus for forming a fluorescent screen of a color cathode ray tube according to claim 1, wherein the light distribution correction optical member is formed in an aspherical shape having a convex curved surface portion. .