JPH09232105A - Thermistor element and thermistor using the same - Google Patents

Thermistor element and thermistor using the same

Info

Publication number
JPH09232105A
JPH09232105A JP3090496A JP3090496A JPH09232105A JP H09232105 A JPH09232105 A JP H09232105A JP 3090496 A JP3090496 A JP 3090496A JP 3090496 A JP3090496 A JP 3090496A JP H09232105 A JPH09232105 A JP H09232105A
Authority
JP
Japan
Prior art keywords
thermistor element
thermistor
electrodes
corners
rounded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3090496A
Other languages
Japanese (ja)
Inventor
Ikuya Taniguchi
幾哉 谷口
Masahiko Kawase
政彦 川瀬
Ryoichi Urahara
良一 浦原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP3090496A priority Critical patent/JPH09232105A/en
Publication of JPH09232105A publication Critical patent/JPH09232105A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To remove stress caused by the cutting of a thermistor element and prevent chipping at the corners by rounding principal planes in which electrodes are formed and side faces of a thermistor element assembly which are adjacent to the principal planes. SOLUTION: Corners 28, 29 which are formed by principal planes in which electrodes 26, 27 are formed and side faces of a thermistor element assembly 25 which are adjacent to the principal planes are rounded. At that time, the ends of the electrodes are also rounded together with the corners 28, 29. Therefore, the electrodes 26, 27 are not formed in the rounded corners 28, 29. As a method for rounding, a barrel polishing method is used. By this method, residual stress near side faces 30, 31, 32 due to dicing is removed and microcracks generated in the interfaces between parts of the thermistor element assembly 25 which are near the corners 28, 29 and the electrodes 26, 27 are eliminated. Furthermore, the barrel-polished thermistor element 21 can have the increased adhesion between the thermistor element 25 and the electrodes 26, 27.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、高精度の抵抗値を
有するサーミスタ素子およびその素子を用いたサーミス
タに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermistor element having a highly accurate resistance value and a thermistor using the element.

【0002】[0002]

【従来の技術】従来のこの種のサーミスタ素子について
図4および図5にもとづいて説明する。セラミックから
なる大きな板状のサーミスタウエハ2の両主面に電極
3、4が形成され、次に、図4に示した一点鎖線A、B
に沿ってダイシングされる。ダイシングによって分割さ
れた各個片がサーミスタ素子1である。従って、サーミ
スタ素子1は6面体状であってサーミスタ素体5の両主
面に一対の電極6、7を備えたものである。
2. Description of the Related Art A conventional thermistor element of this type will be described with reference to FIGS. Electrodes 3 and 4 are formed on both main surfaces of a large plate-shaped thermistor wafer 2 made of ceramic, and then the alternate long and short dash lines A and B shown in FIG.
Is diced along. Each piece divided by dicing is the thermistor element 1. Therefore, the thermistor element 1 has a hexahedral shape and is provided with a pair of electrodes 6 and 7 on both main surfaces of the thermistor element body 5.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、かかる
サーミスタ素子1において、サーミスタ素体5と電極
6、7の端部とで形成される角部8、9が直角状になる
と共に、ダイシングによって切断されたサーミスタ素子
1の側面10、11、12、13にはストレスが残留す
る。また、角部8、9近傍におけるサーミスタ素体5と
電極6、7との界面は、ダイシングによってマイクロク
ラックが内在しており、密着強度が低下している。
However, in the thermistor element 1, the corners 8 and 9 formed by the thermistor element body 5 and the end portions of the electrodes 6 and 7 are formed into a right angle and cut by dicing. The stress remains on the side surfaces 10, 11, 12, 13 of the thermistor element 1. Further, at the interfaces between the thermistor element body 5 and the electrodes 6 and 7 in the vicinity of the corners 8 and 9, microcracks are inherently present due to dicing, and the adhesion strength is lowered.

【0004】このため、サーミスタ素子1の角部8、9
は、サーミスタ素子1の取扱い等において何かに接触す
ると欠けやすく、欠けることによって電極6、7の面積
が減少してサーミスタ素子1の抵抗値が大きくなるとい
う問題点を有していた。さらに、角部8、9におけるセ
ラミック素体5と電極6、7との密着強度が低下してお
り電気的接続が不安定であり、温度サイクルテスト等の
負荷試験に対する信頼性が低下するという問題点があっ
た。
Therefore, the corners 8 and 9 of the thermistor element 1 are
Has a problem that when the thermistor element 1 is handled, it is likely to be chipped when it comes into contact with something, and the chipping reduces the area of the electrodes 6 and 7 and increases the resistance value of the thermistor element 1. Furthermore, the adhesion strength between the ceramic body 5 and the electrodes 6 and 7 at the corners 8 and 9 is low, the electrical connection is unstable, and the reliability of the load test such as the temperature cycle test is lowered. There was a point.

【0005】また、サーミスタ素子1の電極にリード端
子を接続し、さらにサーミスタ素子1を絶縁被覆したサ
ーミスタにおいても上述したサーミスタ素子1における
問題点と同様の問題点があった。
Further, a thermistor in which a lead terminal is connected to the electrode of the thermistor element 1 and the thermistor element 1 is covered with insulation also has the same problems as those of the thermistor element 1 described above.

【0006】本発明の目的は、上述の問題点を解消すべ
くなされたもので、サーミスタ素子の角部が欠けにく
く、電極の密着強度が安定し、かつ抵抗値の精度及び信
頼性がよいサーミスタ素子およびその素子を用いたサー
ミスタを提供することにある。
The object of the present invention is to eliminate the above-mentioned problems, and it is difficult for the thermistor element to have the corners without chipping, the electrode adhesion strength is stable, and the resistance value is highly accurate and reliable. An object is to provide an element and a thermistor using the element.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明のサーミスタ素子においては、セラミックか
らなる板状のサーミスタ素体と、該サーミスタ素体の対
向する主面に形成された一対の電極とから構成されてお
り、前記電極が形成されている主面とこの主面に隣接す
るサーミスタ素体の側面との角部に丸みをつける。
In order to achieve the above object, in a thermistor element of the present invention, a plate-like thermistor element body made of ceramic and a pair of thermistor element bodies formed on opposing main surfaces thereof. And the side surface of the thermistor element body adjacent to the main surface on which the electrode is formed is rounded.

【0008】また、本発明のサーミスタにおいては、上
述のサーミスタ素子と、サーミスタ素子の電極に導通し
て接続されたリード端子とを備え、前記サーミスタ素子
が絶縁被覆される。これにより、サーミスタ素子の切断
によるストレスを解消し、接触および衝突が起こりやす
い角部のチッピングを防止することができ、サーミスタ
素体と電極との密着強度が弱い部分を除去することがで
きる。
Further, the thermistor of the present invention comprises the above-mentioned thermistor element and a lead terminal electrically connected to the electrode of the thermistor element, and the thermistor element is insulated and coated. As a result, the stress due to the cutting of the thermistor element can be eliminated, the chipping of the corner portion where contact and collision are likely to occur can be prevented, and the portion where the adhesion strength between the thermistor element body and the electrode is weak can be removed.

【0009】[0009]

【発明の実施の形態】本発明によるサーミスタ素子の一
つの実施の形態について、図1および図2にもとづいて
説明する。サーミスタ素子21は、例えば、Mn−Ni
−Coを主原料としてAl,Fe,Cu等が添加された
セラミック原料からなる負特性を有するセラミック素体
5に、Ag等を主成分とする電極が形成された図5に示
した従来のサーミスタ素子1の角部8、9に丸みを付け
たものである。つまり、サーミスタ素子21は、図1及
び図2に示すように、サーミスタ素体25の対抗する両
主面に一対の電極26、27が形成されており、電極2
6、27が形成されている主面と、この主面に隣接する
サーミスタ素体25の側面とで形成される角部28、2
9が、電極26、27の端部を含めて一体的に丸みが付
いている。したがって、図2に示すように、角部28、
29の丸みの部分において、サーミスタ素子21は電極
26、27を備えていない。
BEST MODE FOR CARRYING OUT THE INVENTION One embodiment of a thermistor element according to the present invention will be described with reference to FIGS. The thermistor element 21 is, for example, Mn—Ni.
The conventional thermistor shown in FIG. 5 in which an electrode containing Ag as a main component is formed on a ceramic body 5 having negative characteristics and made of a ceramic raw material containing —Co as a main raw material and Al, Fe, Cu, etc. The corners 8 and 9 of the element 1 are rounded. That is, in the thermistor element 21, as shown in FIGS. 1 and 2, a pair of electrodes 26 and 27 are formed on both main surfaces of the thermistor element body 25 which face each other, and the electrode 2
Corners 28, 2 formed by the main surface on which 6 and 27 are formed and the side surface of the thermistor element body 25 adjacent to this main surface.
9 is integrally rounded including the ends of the electrodes 26 and 27. Therefore, as shown in FIG.
In the rounded portion 29, the thermistor element 21 does not include the electrodes 26 and 27.

【0010】丸みを付ける方法として好ましくはバレル
研磨があり、バレル研磨によって角部28、29に丸み
が付けられたサーミスタ素子21は、図1および図2上
では図示できないが、側面30、31、32、33近傍
におけるダイシングによる残留ストレスが解消されると
ともに、角部28、29近傍におけるサーミスタ素体2
5と電極26、27との界面に発生したマイクロクラッ
ク部分が除去される。さらに、バレル研磨されたサーミ
スタ素子21は、電極26、27が玉石等と衝突するこ
とによってサーミスタ素体25と電極26、27との密
着強度がさらに大きくなるという効果も得られる。
Barrel polishing is preferably used as the rounding method, and the thermistor element 21 whose corners 28, 29 are rounded by barrel polishing cannot be shown in FIGS. 1 and 2, but the side surfaces 30, 31, Residual stress due to dicing near 32 and 33 is eliminated, and the thermistor element body 2 near corners 28 and 29 is removed.
The microcrack portion generated at the interface between the electrode 5 and the electrodes 26 and 27 is removed. Furthermore, the barrel-polished thermistor element 21 has the effect of further increasing the adhesion strength between the thermistor element body 25 and the electrodes 26, 27 due to the collision of the electrodes 26, 27 with a cobblestone or the like.

【0011】次に、本発明によるサーミスタの一つの実
施の形態について、図3にもとづいて詳細に説明する。
サーミスタ41は、サーミスタ素子21の電極26、2
7のそれぞれに、例えば半田引き軟銅線からなるリード
端子42、43の一端が半田44、45等によって電気
的に接続され、さらに、サーミスタ素子21をリード端
子42、43の接続部と共に例えば樹脂モールド46に
よって絶縁被覆されたものである。
Next, one embodiment of the thermistor according to the present invention will be described in detail with reference to FIG.
The thermistor 41 includes the electrodes 26, 2 of the thermistor element 21.
7, the ends of lead terminals 42, 43 made of, for example, soldered annealed copper wires are electrically connected by solders 44, 45, etc., and the thermistor element 21 together with the connecting portions of the lead terminals 42, 43 is, for example, resin-molded. Insulation coating is carried out by 46.

【0012】以下にサーミスタ素子21を得た方法につ
いての実施例を述べる。図5に示した大きさが1×1×
0.5mmのサーミスタ素子1を20000個と、φ3
〜φ5mmの玉石600gと、水350gとをφ110
mm×高さ100mmのバレルに投入し、バレルを22
0rpmで回転させて、サーミスタ素子1を研磨した。
An example of a method for obtaining the thermistor element 21 will be described below. The size shown in FIG. 5 is 1 × 1 ×
20,000 0.5mm thermistor elements 1 and φ3
~ Φ5mm boulder 600g and water 350g φ110
mm barrel × height 100 mm barrel, 22 barrel
The thermistor element 1 was polished by rotating at 0 rpm.

【0013】研磨時間を変化させて得られたサーミスタ
素子21について、バレル研磨時間と角部28、29の
丸み(半径Rで表す)との関係を表1に示す。表1か
ら、バレル研磨時間を長くするほど角部の丸みが大きく
なることがわかる。
Table 1 shows the relationship between the barrel polishing time and the roundness of the corners 28 and 29 (represented by the radius R) of the thermistor element 21 obtained by changing the polishing time. It can be seen from Table 1 that the longer the barrel polishing time, the larger the roundness of the corners.

【0014】[0014]

【表1】 [Table 1]

【0015】上述したバレル研磨で得られたサーミスタ
素子21について、電極26、27の密着強度を表2に
示す。なお、比較例として従来品のサーミスタ素子1に
おける電極6、7の密着強度を表2に示す。表2から明
らかなように、本発明による電極の密着強度は、従来例
の密着強度より平均値で34%、最小値で67%大きく
なった。
Table 2 shows the adhesion strength of the electrodes 26 and 27 of the thermistor element 21 obtained by the above-mentioned barrel polishing. As a comparative example, Table 2 shows the adhesion strength of the electrodes 6 and 7 in the conventional thermistor element 1. As is clear from Table 2, the adhesion strength of the electrode according to the present invention was 34% on average and 67% higher than the adhesion strength of the conventional example.

【0016】[0016]

【表2】 [Table 2]

【0017】次に、チッピング発生率、抵抗値のばらつ
き(Rばらつき)およびサーミスタ素子21を用いてサ
ーミスタ41に加工する間における常温抵抗値の変化率
(加工変化率)を表3に示す。さらに、温度サイクルテ
ストによる抵抗値の変化率も表3に示す。表3中の温度
サイクルテスト(HCTと呼ぶ)の条件は−55±3
℃、常温、125±2℃を空気中で各30分保持するこ
とを1サイクルとして、100サイクル繰り返すもので
ある。また、表3中の3CVは、集合のばらつき度合い
を表す指標であって、その集合の平均値をX、標準偏差
をσとすると、3CV=3σ/Xで定義される。
Next, Table 3 shows the chipping occurrence rate, the resistance value variation (R variation), and the room temperature resistance value change rate (working change rate) during processing of the thermistor element 21 into the thermistor 41. Further, Table 3 also shows the rate of change in resistance value by the temperature cycle test. The condition of the temperature cycle test (referred to as HCT) in Table 3 is −55 ± 3.
One cycle consists of holding each of the air at 30 ° C., room temperature and 125 ± 2 ° C. for 30 minutes, which is repeated 100 times. Further, 3CV in Table 3 is an index representing the degree of variation of the set, and is defined as 3CV = 3σ / X, where X is the average value of the set and σ is the standard deviation.

【0018】[0018]

【表3】 [Table 3]

【0019】なお、表2、表3に示したサーミスタ素子
21の角部28、29の丸みは、Rが0.02mm以上
であれば同様の効果が得られる。また、バレルに投入す
る玉石の量が600±50g、水の量が350±50
g、バレルの回転数が220±40rpmの範囲であれ
ば、上述の実施例と同様にサーミスタ素子21の角部2
8、29に丸みを付けることができる。
The rounded corners 28 and 29 of the thermistor element 21 shown in Tables 2 and 3 have similar effects as long as R is 0.02 mm or more. In addition, the amount of boulders to be put into the barrel is 600 ± 50g, and the amount of water is 350 ± 50.
g, if the rotation speed of the barrel is in the range of 220 ± 40 rpm, the corner portion 2 of the thermistor element 21 is the same as in the above-described embodiment.
It is possible to add roundness to 8 and 29.

【0020】また、サーミスタ素子21およびサーミス
タ41は負特性サーミスタに基づいて説明をしたが、正
特性サーミスタに適用されてもよく、また、サーミスタ
以外の電子部品であってもセラミック素子の両主面に一
対の電極が形成される電子部品であれば適用することが
できる。
Further, although the thermistor element 21 and the thermistor 41 have been described based on the negative characteristic thermistor, they may be applied to the positive characteristic thermistor, and even if they are electronic parts other than the thermistor, both main surfaces of the ceramic element are used. Any electronic component in which a pair of electrodes is formed can be applied.

【0021】[0021]

【発明の効果】以上述べたように、本発明によるサーミ
スタ素子では、電極が形成されている主面とこの主面に
隣接するサーミスタ素体の側面との角部に丸みが付けら
れているために、サーミスタ素子同志またはサーミスタ
素子以外のものに接触しても、角部が欠けるなどのチッ
ピングが発生せず、サーミスタ素子の取扱いが容易にな
るとともに、サーミスタ素子に形成された電極の面積が
減少せず、抵抗値の変化率が減少する。
As described above, in the thermistor element according to the present invention, the corners between the main surface on which the electrode is formed and the side surface of the thermistor element body adjacent to this main surface are rounded. In addition, even if the thermistor elements are in contact with each other or other than the thermistor element, chipping such as chipping of the corners does not occur, handling of the thermistor element is easy and the area of the electrode formed on the thermistor element is reduced. Without doing so, the rate of change of resistance decreases.

【0022】さらに、サーミスタ素子の角部近傍の電極
密着強度が弱い部分が除去されているため、電極密着強
度が一定になり、負荷試験等によるサーミスタ素子の抵
抗値の変化率が減少し、サーミスタ素子の信頼性が向上
する。
Further, since the portion where the electrode adhesion strength near the corner of the thermistor element is weak is removed, the electrode adhesion strength becomes constant, and the rate of change in the resistance value of the thermistor element due to a load test or the like decreases, and the thermistor element is reduced. The reliability of the device is improved.

【0023】また、本発明によるサーミスタでは、角部
に丸みが付いたサーミスタ素子を用いるために、上述の
サーミスタ素子における効果と同様の効果を得ることが
できる。
Further, in the thermistor according to the present invention, since the thermistor element having rounded corners is used, it is possible to obtain the same effect as that of the above-described thermistor element.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るサーミスタ素子21の一つの実施
の形態の斜視図である。
FIG. 1 is a perspective view of an embodiment of a thermistor element 21 according to the present invention.

【図2】図1の断面図である。FIG. 2 is a sectional view of FIG.

【図3】図1のサーミスタ素子21を用いたサーミスタ
41の一つの実施の形態の部分断面図である。
FIG. 3 is a partial cross-sectional view of one embodiment of a thermistor 41 using the thermistor element 21 of FIG.

【図4】従来のダイシングする前の電極3、4が形成さ
れたサーミスタウエハ2の斜視図である。
FIG. 4 is a perspective view of a conventional thermistor wafer 2 on which electrodes 3 and 4 before dicing are formed.

【図5】従来のサーミスタ素子1の斜視図である。FIG. 5 is a perspective view of a conventional thermistor element 1.

【符号の説明】[Explanation of symbols]

21 サーミスタ素子 25 サーミスタ素体 26,27 電極 28,29 角部 41 サーミスタ 42,43 リード端子 21 thermistor element 25 thermistor element body 26, 27 electrode 28, 29 corner 41 thermistor 42, 43 lead terminal

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 セラミックからなる板状のサーミスタ素
体と、該サーミスタ素体の対向する主面に形成された一
対の電極とから構成されており、前記電極が形成されて
いる主面とこの主面に隣接するサーミスタ素体の側面と
の角部に丸みをつけたことを特徴とするサーミスタ素
子。
1. A plate-like thermistor element body made of ceramics and a pair of electrodes formed on opposing main surfaces of the thermistor element body, the main surface having the electrodes and the main surface A thermistor element having rounded corners with the side surface of the thermistor element body adjacent to the main surface.
【請求項2】 請求項1に記載のサーミスタ素子と、該
サーミスタ素子の電極に導通して接続されたリード端子
とを備え、前記サーミスタ素子が絶縁被覆されているこ
とを特徴とするサーミスタ。
2. A thermistor comprising the thermistor element according to claim 1 and a lead terminal electrically connected to an electrode of the thermistor element, wherein the thermistor element is insulation-coated.
JP3090496A 1996-02-19 1996-02-19 Thermistor element and thermistor using the same Pending JPH09232105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3090496A JPH09232105A (en) 1996-02-19 1996-02-19 Thermistor element and thermistor using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3090496A JPH09232105A (en) 1996-02-19 1996-02-19 Thermistor element and thermistor using the same

Publications (1)

Publication Number Publication Date
JPH09232105A true JPH09232105A (en) 1997-09-05

Family

ID=12316720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3090496A Pending JPH09232105A (en) 1996-02-19 1996-02-19 Thermistor element and thermistor using the same

Country Status (1)

Country Link
JP (1) JPH09232105A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
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JP2011516821A (en) * 2008-02-19 2011-05-26 エプコス アクチエンゲゼルシャフト COMPOSITE MATERIAL FOR TEMPERATURE MEASUREMENT, TEMPERATURE SENSOR HAVING COMPOSITE MATERIAL, COMPOSITE MATERIAL MANUFACTURING METHOD, AND TEMPERATURE SENSOR MANUFACTURING METHOD
JP2014003053A (en) * 2011-08-09 2014-01-09 Murata Mfg Co Ltd Thermistor
JP2014154830A (en) * 2013-02-13 2014-08-25 Mitsubishi Materials Corp Thermistor element and manufacturing method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011516821A (en) * 2008-02-19 2011-05-26 エプコス アクチエンゲゼルシャフト COMPOSITE MATERIAL FOR TEMPERATURE MEASUREMENT, TEMPERATURE SENSOR HAVING COMPOSITE MATERIAL, COMPOSITE MATERIAL MANUFACTURING METHOD, AND TEMPERATURE SENSOR MANUFACTURING METHOD
US9341521B2 (en) 2008-02-19 2016-05-17 Epcos Ag Composite material for temperature measurement, temperature sensor comprising the composite material, and method for producing the composite material and the temperature sensor
JP2014003053A (en) * 2011-08-09 2014-01-09 Murata Mfg Co Ltd Thermistor
JP2014154830A (en) * 2013-02-13 2014-08-25 Mitsubishi Materials Corp Thermistor element and manufacturing method thereof

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