JPH09155743A - Method for removing grinding/polishing/cleaning material adhering to workpiece - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely remove a grinding/polishing/cleaning material coming into the recessed part of, particularly, the worked surface of a workpiece to which blast work is applied by jetting the grinding/polishing/cleaning material. SOLUTION: Considering a workpiece to which blast work is applied by jetting a grinding/polishing/cleaning material, for instance, a low melting-point glass layer 12 having a blast property is formed in the whole surface of the one side of a PDP substrate, a resist layer 13 is formed by patterning in the surface of the low melting- point glass layer 12, and blast work is performed by jetting a grinding/polishing/ cleaning material from the resist layer 13 side whereby the low melting-point glass layer 12 other than the lower layer of the resist layer 13 is polished and removed by the grinding/polishing/cleaning material and a high-accurate rib 14 is formed. All of the grinding/polishing/cleaning materials coming into the gap of the rib 14 cannot be removed by an air blow applied to the surface of the rib 14 side but water-soluble fine particles 23 comprising a water-soluble substance are jetted from the rib 14 side to surely remove the grinding/polishing/cleaning materials 21 by the collision force of the water-soluble fine particles 23 and to replace it with the water-soluble fine particles 23. The PDP is washed, thereby dissolving in water the water-soluble fine particles 23 adhering to the PDP to surely discharge it.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for removing a cleaning / cleaning material adhering to a work after the cleaning / cleaning material is sprayed onto the work to be blasted, and more particularly to a plasma display panel (hereinafter , "PDP") is formed in a fine pattern by blasting, and a narrow gap is formed such that the polishing agent enters the gap between the fine ribs of the PDP or the corners of the fine ribs. The present invention relates to a method of removing a polishing / cleaning material adhering to a concave portion or a corner portion of a concave portion of a workpiece blasted into an uneven shape and attached.

[0002] A plasma display is a combination of two PDPs each having a plurality of vertical electrodes and horizontal electrodes inside, with a discharge gas space of about 0.1 mm interposed therebetween. It has a structure in which a discharge gas of neon / xenon gas is sealed between the substrates. By applying a voltage between the electrodes, the intersections of a large number of vertical electrodes and horizontal electrodes are electrically selected, and light is emitted by the discharge generated at the points to display characters and figures. More specifically, for example, one of the two glass substrates is a front glass substrate forming a discharge part of the plasma display, and the other is a rear glass substrate forming a light emitting part of the plasma display. The front glass substrate has a large number of vertical electrodes on its inner surface, and a dielectric layer is formed on the surface on which the vertical electrodes are provided, and a protective layer is formed on the surface of the dielectric layer. On the other hand, the rear glass substrate is provided with a large number of horizontal electrodes on its inner surface, and ribs are provided so as to project between the horizontal electrodes. The ribs form a parallel (striped) or lattice-shaped pattern (referring to a picture or a pattern) on the surface of the glass substrate. By applying a voltage between the vertical electrode and the horizontal electrode, surface discharge occurs on the surfaces of the dielectric layer and the protective layer of the discharge part, and ultraviolet rays are generated. This ultraviolet ray excites the phosphor in the light emitting portion to cause the phosphor to emit light, and color display is performed by separately coating the phosphor.

Currently, PDPs are required to have long life, high brightness, large size, and high definition, and in order to meet these demands, ribs of low melting point glass are formed on a substrate such as glass by blasting. By doing so, the rib width of the PDP is narrowed, the uniformity is improved, and the phosphor coating area is being expanded. By the way, the PDP has a rib width of about 50 μ and a rib height of 150 to 200 μ, for example.
The gap between the ribs is about 100μ, and a PDP with a total size of 21 inches is produced.
There is a direction to develop a PDP with a size of about 0 inches.

Along with this, between the high-definition ribs after the blasting process, the polishing agent itself or the PDP is finely detailed.
Is adhered to the corners of the high-definition ribs and the glass substrate due to the static electricity of the PDP. If this polishing agent remains between the high-definition ribs, the performance of the PDP will be adversely affected. Need to be removed.

[0005]

2. Description of the Related Art Conventionally, as a method of removing the abrasive cleaning material adhering to the work piece after blasting, the work piece after blasting is adhered to the work piece by performing air blow or ultrasonic cleaning. The cleaning material was removed. Alternatively, before the air blowing, the static electricity removing device is used to remove the static electricity of the polishing / cleaning material itself or the workpiece generated during the blasting.

[0006]

However, in the case where the processed surface of the work piece has a shape with a fine unevenness such as a high-definition rib of a PDP, the abrasive material has entered the concave portion. There is a problem in that even if air is blown onto the blasted surface, the abrasive material cannot be surely removed to the details of the recess.

Further, even when ultrasonically cleaning the processed surface of the object to be processed, it is not possible to reliably remove the polishing / cleaning material down to the details of the recess, as in the case of the air blow.

This was also the case when air blowing was performed after removing the static electricity of the polishing material itself or the workpiece.

When the blasted workpiece is washed with water, for example, even if water is jetted from the nozzle onto the blasted surface of the workpiece, the jetting force of the water simply narrows the corners in the recesses. It was not possible to remove the polishing / cleaning material sandwiched between the parts, or the polishing / cleaning material attached to the details of the recess due to static electricity of the polishing / cleaning material itself or the workpiece.

The present invention was developed to solve the above problems, and its purpose is to remove the abrasive cleaning material adhering to the surface of the workpiece after the abrasive cleaning material is jetted and blasted. The object of the present invention is to provide a method for surely removing even the details of the machined surface of a workpiece. In particular, it is an object of the present invention to provide a method for surely removing a polishing / cleaning material that has entered a concave portion of a processed surface, as in the case of blast processing for forming a high-definition rib of a PDP.

[0011]

In order to achieve the above object, in the method for removing the abrasive cleaning material adhering to the workpiece according to the present invention, the water-soluble powder 23 is added to the blasted workpiece W.
To remove the cleaning / cleaning material 21 adhering to the work piece by the collision force of the water-soluble powder 23, and then to wash the work piece with water, thereby removing the water-soluble powder adhering to the work piece. 23 is dissolved in water, discharged, and removed.

The work piece is formed on the entire surface of the substrate.
A low melting point glass layer 12 having a blast property is formed, a resist layer 13 is patterned on the surface of the low melting point glass layer 12, and a polishing material 21 is formed from the surface side of the low melting point glass layer 12.
By low-melting point glass layer 12 excluding the low-melting point glass layer below resist layer 13 by spraying
Can be ground and removed to form the ribs 14.

The water-soluble powder 23 is preferably a powder made of a water-soluble substance such as sodium sulfate, boric acid and sodium bicarbonate.

Further, the water-soluble powder 23 is a powder having characteristics such as hardness, weight, and particle size that can remove the abrasive cleaning material 21 adhering to the workpiece by the collision force of the water-soluble powder 23. It consists of

Further, after the water-soluble powder 23 is sprayed onto the blast-processed work piece as described above, the work-piece is air blown to adhere to the work piece.
It is also possible to remove most of the above, then wash this work piece with water to dissolve the water-soluble powder 23 remaining in the work piece in water, discharge it, and remove it.

Further, the water-soluble powder has an average particle size of 10 to 10.
35μ, this water-soluble powder spray pressure 1.0 ~ 3.0
It is preferable to inject at an injection amount of 5 to 30 g / min in kg / cm ² .

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a method for removing a polishing / cleaning material adhering to a workpiece according to the present invention will be described below. When the abrasive cleaning material 21 is sprayed onto the work W to be blasted, a blasted surface having an uneven shape is formed on the work. The polishing / cleaning material 21 adheres to the concave portion of the blasted surface, and particularly when the clearance of the concave portion is narrow, the polishing / cleaning material 21 enters the concave portion or is sandwiched between the corners of the concave portion. When air blow is applied to such a blasted surface, most of the abrasives 2
Although 1 is removed to the outside of the concave portion, all cannot be removed and remains in the concave portion. However, the water-soluble powder 2 is preferably sprayed onto the blasted surface of the workpiece by spraying the water-soluble powder 23 having a particle size equal to or smaller than the abrasive material.
3 collides with the abrasive cleaning material 21, and the collision force causes the abrasive cleaning material 21
Are reliably blown out of the recesses and removed.
The water-soluble powder 23 adheres to the inside of the recess instead. By washing the work piece in such a state with water, the water-soluble powder 23 is a powder made of a water-soluble substance such as sodium sulfate, boric acid, or baking soda. All of the water-soluble powder 23 attached to the inside of the recess or to the other surface is dissolved in water and discharged together with the water. Further, even if a trace amount of the polishing / cleaning material remains, this polishing / cleaning material is flowed together with the powder dissolved by the water washing in the above step.

As described above, all of the abrasives 21 attached to the workpiece by the blasting are easily and surely removed.

The object to be processed may be, for example, a case in which ribs of a PDP are formed in a fine pattern by blasting. In this PDP, a low melting point glass layer 12 having a blast property is formed on the entire surface of a substrate, and a resist layer 13 is patterned on the surface of the low melting point glass layer 12, and the low melting point glass layer 12 is polished from the surface side. The low melting point glass layer 12 excluding the low melting point glass layer under the resist layer 13 is ground and removed by spraying the cleaning material 21 to blast the ribs 14 to form the ribs 14. The low melting point glass of the ribs 14 is fired to form high definition ribs. In the present embodiment, the state before the low melting point glass of the rib 14 is fired, that is, the state in which the polishing agent 21 is sprayed from the surface side of the low melting point glass layer 12 and blasted to form the rib 14 is formed. The PDP can be used as the work piece, and the method for removing the abrasive cleaning material adhering to the work piece of the present invention is the rib 14 of the PDP.
This is a particularly effective method for a work piece having a shape in which the unevenness has a narrow gap.

The water-soluble powder 23 is selected according to the hardness, weight, particle size and other characteristics of the abrasive material 21, that is, the impact force of the water-soluble powder 23 adheres to the workpiece. Cleaning material 21
It is preferable to select a powder having characteristics such as hardness, weight, and particle size capable of removing the cleaning and cleaning material 21 adhering to the workpiece.

Further, as described above, removing the majority of the water-soluble powder 23 adhering to the workpiece by air-blowing the workpiece allows the water-soluble powder 23 remaining on the workpiece to be removed.
Therefore, in the next step, the water-soluble powder 23 remaining on the workpiece is quickly dissolved in water and discharged.

[0022]

EXAMPLE An embodiment of a method for removing a polishing / cleaning material adhering to a work piece according to the present invention will be described below with reference to a grinding method attached to a work piece when high-definition ribs are formed on a PDP substrate by blasting. The method of removing the cleaning material will be described with reference to the drawings.

FIG. 1 shows steps (a) to (h) for forming a high-definition rib of a PDP by blasting.

In FIG. 1A, the glass substrate 11 has a flat size of 1000 × 600 mm and a thickness of 3 mm, and one surface of the glass substrate 11 has a large number of parallel stripes at intervals of 150 μm. The electrode 15 is formed by printing.
The entire surface of the glass substrate 11 on the electrode 15 side is coated with a low-melting point glass paste using a cellulosic or acrylic resin as a binder, dried and solidified to form the low-melting point glass layer 12.

The low-melting-point glass layer 12 is formed by applying a low-melting-point glass paste on a substrate by a screen printing method and drying it 15
It was left for a minute, and after the method was removed, it was dried at 150 ° C. for 15 minutes, and in this example, it was formed by printing 12 times.

Since the low melting point glass layer 12 is formed from a low melting point glass paste using a cellulosic resin or an acrylic resin as a binder, the grindability by blasting (hereinafter referred to as "blasting property" in this specification) is extremely good. Is.

In FIG. 1B, a water-soluble resin layer 18 made of dextrin having a thickness of 3 is formed on the entire surface of the low melting point glass layer 12.
Apply with μ and dry. On the entire surface of the water-soluble resin layer 18, a blast resistant low melting point glass paste 16 having photosensitivity is prepared by mixing a photosensitive material (photoresist) into a blast resistant low melting point glass paste using an acrylic resin as a binder. Negative film 1 after coating with 27μ and drying
7 is applied for exposure.

As the low melting point glass paste and the blast resistant low melting point glass paste, those which completely burn without causing carbon and tar of each binder to remain on the ribs 14 even if they are fired in the step described later are used.

Alternatively, without using the water-soluble resin layer 18,
Oblast BF603 manufactured by Tokyo Ohka Kogyo Co., Ltd. is laminated on the blast-resistant low-melting glass paste 16 and exposed.
Development was performed to form a pattern on the glass paste. A 0.2% aqueous solution of sodium carbonate is used as the developing solution [FIG. 1 (c)].

The pattern of the resist layer 13 of this embodiment is in the form of parallel stripes having a width of 50 μ and a gap of 100 μ, and the electrode 15 on the surface of the glass substrate 11 is almost in the center between the gaps of 100 μ of the resist layer 13. It is arranged to be located in.

In FIG. 1D, from the surface side of the low melting point glass layer 12 and the resist layer 13 of the above glass substrate 11,
A blasting machine is used to spray a polishing agent 21 having a hardness lower than that of the glass substrate 11 to grind and remove the low melting point glass layer 12 other than the low melting point glass layer 12 below the resist layer 13, and to remove the ribs 14. To form. The ribs 14 have a width of 50 μ and a height of 200 μ, and the distance between the ribs 14 is 100 μ.
By the way, although glass beads are used as the abrasive in this embodiment, calcium carbonate is also preferable as the abrasive.

In the PDP after the blasting, a large number of abrasive cleaning materials 21 are inserted between the ribs 14. In other words, polishing agent 2
Many 1 are attached to the wall surfaces of the ribs 14, the corners between the ribs 14 and the glass substrate 11, the glass substrate 11 and the electrodes 15. In this embodiment, as will be described later, the average particle diameter of the polishing / cleaning material 21 is 20 μ, while the spacing between the ribs 14 is 100 μm.
Since it is μ, the polishing and cleaning material 21 easily enters between the narrow ribs 14 as described above. Generally, by air blowing the surface of the workpiece after blasting,
Almost all of the polishing material adhering to the surface of the work piece is removed. However, for the blasting surface formed with narrow irregularities such as the high-definition rib of the PDP, the inside of the recess is blown by air blow. It is difficult to completely remove the abrasive cleaning agent that has entered.

The blasting device 40 used in this embodiment will be described below with reference to the drawings.

In FIG. 2, reference numeral 41 designates the main body of the blasting machine, and a large number of conveying rollers 42 for conveying the workpiece from right to left on the paper surface of FIG. A hopper is provided, and the bottom end of the hopper is the conduit 51.
Through the upper part of the separation tank 52.

A closed blasting chamber 43 is provided on the main body 41, and in the blasting chamber 43, the cleaning and cleaning material is conveyed to the workpiece, that is, the surface of the glass substrate 11 by the conveying roller 42. Melting point glass layer 12 and resist layer 13
Six jet nozzles 44 for jetting toward the surface side of the low-melting point glass layer 12 and the resist layer 13 of the processed workpiece and reciprocating in the direction orthogonal to the conveying direction of the processed workpiece are provided. Each of the injection nozzles 44 is a diffusion-type injection nozzle that diffuses the injection shape of the polishing / cleaning material to 2.5 times the normal shape. Even if the speed is increased, the blasting uniformity can be maintained.

The blasting chamber 43 is arranged in the conveying direction of the workpiece.
Before and after the static electricity removing devices 45, 45, and an air blow chamber 46 for so-called after-blowing that blows air to remove the abrasive material attached to the workpiece on the upstream side in the conveying direction of the workpiece. Is provided.

Reference numeral 56 is a polishing / cleaning material injection amount control mechanism, which is a digitalized injection amount of the polishing / cleaning material, and a desired polishing / cleaning material injection amount can be freely set digitally. When compressed air is supplied to each jet nozzle 44, each jet nozzle 44 and the abrasive cleaning material tank 55
Since a negative pressure is generated in the pipe communicating with the polishing / cleaning material tank 55, the polishing / cleaning material in the polishing / cleaning material tank 55 is sent to the foreign matter removing device 58 via the automatic polishing / cleaning material supply device 57 communicating with the lower end of the polishing / cleaning material tank 55. A foreign matter having a size of 50 μm or more is removed in the foreign matter removing device 58, and the foreign matter is supplied to the ejection nozzle 44 and ejected. A polishing / cleaning material amount detection sensor 59 is provided between the foreign matter removing device 58 and the injection nozzle 44. The polishing / cleaning material amount detection sensor 59 detects the amount of the polishing / cleaning material passing therethrough, and Is displayed.

The low melting point glass layer 1 is formed on the surface of the glass substrate 11.
2 and the work piece having the resist layer 13 formed thereon are placed on the carrying roller 42 of the carrying device on the main body 41, the work piece is carried from the right side to the left side on the paper surface of FIG. The static electricity of the workpiece is removed, and the workpiece is conveyed into the blast processing chamber 43. In the blasting chamber 43, the injection nozzle 44
From the low melting point glass layer 12 and the resist layer 13 of the workpiece to be sprayed with a cleaning agent from the surface side, the resist layer 1
Since the lower melting point glass layer 12 of 3 is protected by the resist layer 13, it is not ground or engraved with an abrasive, but all the low melting point glass layers 12 other than the lower melting point glass layer 12 of the resist layer 13 are not covered. Grinded and removed. But,
Since the abrasive material is glass peas having a hardness lower than that of the material of the glass substrate 11, the glass substrate 11 is not ground by the abrasive material. Therefore, as a result, according to the pattern of the resist layer 13, a plurality of ribs 14 having a width of 50 μ and a height of 200 μ are formed.
Are formed in parallel stripes with an interval of 100 μ between each rib 14.

The above blasting conditions are as shown in the table below.

[0040]

[Table 1]

The abrasive cleaning material sprayed from the spray nozzle 44 onto the workpiece drops into the lower hopper, and the conduit 5 is fed from the lower end of the hopper.
10 was carried to the separation tank 52 by the air flow generated in the No. 1 and mixed in the polishing and cleaning material in the separation tank 52.
Foreign matter having a size of 0 μ or more is removed, and then the communication pipe 53
It is delivered to the cyclone 54 via. The airflow in the blasting device 40 is generated by the suction of air by the air exhaust device in the dust collector 62. That is, the airflow sequentially flows to the hopper, the conduit 51, the separation tank 52, the communication pipe 53, the cyclone 54, the duct 61, and the dust collector 62. The reusable abrasive cleaning material is classified by the cyclone 54, and the crushed abrasive cleaning material and dust formed of fragments of the low melting point glass layer 12 ground from the workpiece are classified. The reusable abrasive cleaning material stays in the lower part of the cyclone 54, while the dust rises in the center of the cyclone 54 by the air flow and is sent to the dust collector 62 via the duct 61 communicating with the upper center. Then, dust is collected by the dust collector 62 and clean air is discharged into the atmosphere. The polishing / cleaning material accumulated in the lower portion of the cyclone 54 falls into the polishing / cleaning material tank 55 connected to the lower end of the cyclone 54. The polishing / cleaning material in the polishing / cleaning material tank 55 is again supplied to the spray nozzle 44 and sprayed as described above. The abrasive material is sprayed from the spray nozzle 44 onto the workpiece by repeating the above steps.

In FIG. 1 (e), the water-soluble powder 23 is jetted from the jet nozzle 47 onto the surface of the workpiece after the blasting, and the polishing / cleaning material 21 is removed. FIG. 1E shows a state in which two jet nozzles 47 arranged above the surface of the workpiece are running laterally, and the ribs of the PDP are caused by the collision force of the water-soluble powder 23. The abrasive cleaning material 21 between the fourteen is reliably ejected and removed, and the water-soluble powder 23 jetted in place thereof enters into the space between the ribs 14. That is, the abrasive material 21 is replaced with the water-soluble powder 23. By the way, although the water-soluble powder 23 uses anhydrous sodium sulfate in the present embodiment, it is made of a water-soluble substance and has hardness, weight, and particle size capable of removing the abrasive cleaning material 21 adhering to the surface of the workpiece. Any powder having characteristics such as sodium sulfate,
A powder made of a water-soluble substance such as boric acid or sodium bicarbonate is used as a water-soluble powder 2
3 can be used. That is, the water-soluble powder 23
Is a water-soluble powder having properties such as hardness, weight, size, and the like that repels the abrasive cleaning material 21 when it collides with the abrasive cleaning material 21. For example, even if the water-soluble powder 23 has a hardness lower than that of the polishing / cleaning material 21, the particle size or weight is large and the collision force is sufficient to repel the water-soluble powder 23. Therefore, the water-soluble powder can be selected according to the characteristics such as the particle size, weight and hardness of the abrasive.

In this embodiment, the injection nozzle 47 is provided in front of the injection nozzle 44 of the blast processing device 40 in the conveying direction of the workpiece, and below the injection nozzle 47, a hopper (not shown) is provided. . The injection and recovery mechanism of the water-soluble powder 23 is basically the same as that of the blasting device 40 described above, but the recovery tank for the hopper, the conduit, the cyclone, etc., and the water-soluble powder 23 are collected from the recovery tank. It is composed of a basic mechanism such as a mechanism for feeding to the injection nozzle 47, a mechanism for discharging dust from the recovery tank to the dust collector,
A simpler mechanism than the blasting device 40 described above may be used.

The above-mentioned blasting device 40 may be used together as a mechanism for injecting and collecting the water-soluble powder 23, but in the PDP production line, the blasting device 40 and the blasting device 40 are used as described above in order to increase production efficiency. Is preferably provided separately, and a so-called other blasting device can be installed as a spraying and collecting mechanism for the water-soluble powder 23, and is not particularly limited.

In this embodiment, the conditions for spraying the water-soluble powder 23 are as shown in the table below.

[0046]

[Table 2]

In FIG. 1 (f), the workpiece is sent to the air blow chamber 46 (FIG. 2). In the present embodiment, the static electricity of the workpiece is removed by the static electricity removing device 45 while being sent to the air blow chamber 46. In the air blow chamber 46, air is blown from the nozzle to the work in order to remove the water-soluble powder 23 adhering to the surface of the work, but in actuality, in the air blow, as shown in FIG. 1 (f). The water-soluble powder 23 that has entered between the ribs 14 remains.

In this air blowing process, the water-soluble powder 2
3 is not completely removed from the surface of the work piece, but the amount of the water-soluble powder 23 is small, so that it is easy to remove the water-soluble powder 23 in the next step of washing with water. Is preferably provided.

In FIG. 1G, the PDP that has been conveyed through the air blow chamber 46 (FIG. 2) has the air blow chamber 4
Cleaning chamber 48 provided in front of the workpiece 6 in the conveying direction
In (Fig. 2), water is sprayed from the nozzle onto the surface of the PDP to wash it. The water-soluble powder 23 between the ribs 14 is completely dissolved in water and discharged together with the water. As a result, the water-soluble powder 23 attached to the PDP is surely removed.

In this embodiment, the water is jetted from the nozzle in the cleaning chamber 48 provided on the PDP production line, but the surface of the PDP is simply washed with running water, or the inside of the cleaning chamber 48 is cleaned. A water tank may be provided in the water tank, and the PDP may be submerged in the water tank and washed with water by another method. In addition, the PDP after the water-soluble powder 23 is sprayed to remove the cleaning and cleaning material 21 [FIG. 1 (e)] or the PDP after air blowing [FIG. 1 (f)] is discharged from a nozzle provided separately. It is also possible to dissolve and remove the water-soluble powder 23 from the PDP by rinsing with a jet stream of water, running water, or a washing device such as a water tank.

In FIG. 1 (h), as described above, the work piece having the ribs 14 formed on the surface of the glass substrate 11 is gradually heated to a temperature at which the lead glass of the low melting point glass is completely melted and the binder is incinerated. By heating to a low temperature, the binders of the low-melting-point glass layer 12 and the resist layer 13 forming the ribs 14 are completely burned and the low-melting-point glass is melted and fired to form the ribs 14. Note that if the cleaning / cleaning material remains in the gaps between the ribs 14, the cleaning / melting / cleaning material is melted by the heating in the baking step and adheres to the surface of the PDP, which adversely affects the performance of the product. Although generated, the removal method of the present invention forms a high-quality PDP because the abrasive material does not remain between the ribs 14.

In the above example, the method for surely removing the abrasive cleaning material adhering to the blasted surface of the workpiece is explained by taking the case where the high-definition rib of the PDP is formed by the blasting as an example. The method of removing the abrasive cleaning material adhering to the work piece of the present invention is widely applied to all blasted products.

[0053]

Since the present invention is configured as described above, it has the following effects.

By spraying a blasting material on the work piece to perform blasting, and by spraying a water-soluble powder on the work piece,
By removing the cleaning material adhering to the work piece by the collision force of the water-soluble powder and washing the work piece with water, the water-soluble powder adhering to the work piece is dissolved in water and discharged. Therefore, even when the processed surface of the workpiece has a shape with a narrow gap between the concavities and convexities, it is possible to provide a method for surely removing the abrasive cleaning material that has entered the recesses and attached.

In addition, since the water-soluble powder is sprayed onto the blasted work piece and then the work piece is blown with air, most of the water-soluble powder attached to the work piece is removed. Less water-soluble powder remains on the work piece. Therefore, by washing this work piece with water, the water-soluble powder remaining on the work piece could be easily dissolved in water, discharged, and efficiently removed.

In addition, as described above, P of extremely high quality is used.
A DP can be formed.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a manufacturing process of a PDP according to an embodiment of the present invention.

FIG. 2 is a front view showing a PDP production line including a blasting apparatus and the like used in an embodiment of the present invention.

[Explanation of symbols]

11 glass substrate 12 low melting point glass layer 13 resist layer 14 rib 15 electrode 16 blast resistance low melting point glass paste (having photosensitivity) 17 negative film 18 water soluble resin layer 21 polishing agent 21 23 water soluble powder 23 40 blast Processing device 41 Main body 42 Conveying roller 43 Blast processing chamber 44 Injection nozzle 45 Static electricity removing device 46 Air blow chamber 47 Injection nozzle 47 48 Cleaning chamber 48 51 Conduit 52 Separation tank 53 Communication pipe 54 Cyclone 55 Abrasive cleaning agent tank 56 Abrasive cleaning agent injection Quantity control mechanism 57 Abrasive cleaning material automatic supply device 58 Foreign matter removing device 59 Abrasive cleaning material amount detection sensor 61 Duct 62 Dust collector

Claims (6)

[Claims] 1. A blasting-processed workpiece is sprayed with a water-soluble powder to remove the abrasive material adhering to the workpiece by the collision force of the water-soluble powder, and then the workpiece is washed with water. By doing so, the water-soluble powder adhering to the work piece is dissolved in water, discharged, and removed, thereby removing the abrasive cleaning material adhering to the work piece. 2. A low melting point glass layer having blasting property is formed on the entire surface of a substrate of the workpiece, and a resist layer is formed on the surface of the low melting point glass layer by patterning. The rib according to claim 1, wherein a low-melting-point glass layer other than the low-melting-point glass layer under the resist layer is ground and removed by jetting a polishing agent from the front surface side to perform blast processing. A method for removing abrasives attached to a work piece. 3. The method for removing a polishing / cleaning material adhering to a workpiece according to claim 1, wherein the water-soluble powder is a powder made of a water-soluble substance such as sodium sulfate, boric acid and sodium bicarbonate. 4. The water-soluble powder is a powder having characteristics such as hardness, weight, and particle size that can remove the abrasive cleaning material adhering to the workpiece by the collision force of the water-soluble powder. Item 4. A method for removing a polishing / cleaning material attached to a workpiece according to item 1, 2 or 3. 5. After spraying the water-soluble powder on the blasted workpiece, the workpiece is air-blown to remove most of the water-soluble powder adhering to the workpiece, and then the workpiece is removed. The method for removing a polishing / cleaning material adhering to a work piece according to claim 1, 2, 3 or 4, wherein the work piece is washed with water. 6. The water-soluble powder has an average particle size of 10 to 35 μm.
And the injection pressure of this water-soluble powder is 1.0 to 3.0 kg.
/ In cm ^2, injection quantity 5 to 30 g / min at the jetting claims 1, 2, 3, 4 or 5 a method for removing the deposited abrasive cleaning agent to a workpiece according.