JPH09143786A - Silver and silver alloy plating bath - Google Patents
Silver and silver alloy plating bathInfo
- Publication number
- JPH09143786A JPH09143786A JP31974095A JP31974095A JPH09143786A JP H09143786 A JPH09143786 A JP H09143786A JP 31974095 A JP31974095 A JP 31974095A JP 31974095 A JP31974095 A JP 31974095A JP H09143786 A JPH09143786 A JP H09143786A
- Authority
- JP
- Japan
- Prior art keywords
- silver
- plating bath
- compounds
- sulfur
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 56
- 239000004332 silver Substances 0.000 title claims abstract description 40
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 229910001316 Ag alloy Inorganic materials 0.000 title claims abstract description 36
- 229910052709 silver Inorganic materials 0.000 claims abstract description 39
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 29
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000011593 sulfur Substances 0.000 claims abstract description 28
- 150000002500 ions Chemical class 0.000 claims abstract description 10
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims description 31
- -1 cyanide compound Chemical class 0.000 claims description 20
- UMGDCJDMYOKAJW-UHFFFAOYSA-N aminothiocarboxamide Natural products NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 17
- 125000004432 carbon atom Chemical group C* 0.000 claims description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 10
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 9
- 239000002736 nonionic surfactant Substances 0.000 claims description 9
- 229940126062 Compound A Drugs 0.000 claims description 8
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 claims description 8
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical group C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 claims description 6
- 150000002989 phenols Chemical group 0.000 claims description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical class CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 claims description 3
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 claims description 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 claims description 2
- BYLSIPUARIZAHZ-UHFFFAOYSA-N 2,4,6-tris(1-phenylethyl)phenol Chemical compound C=1C(C(C)C=2C=CC=CC=2)=C(O)C(C(C)C=2C=CC=CC=2)=CC=1C(C)C1=CC=CC=C1 BYLSIPUARIZAHZ-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 2
- 150000004659 dithiocarbamates Chemical class 0.000 claims description 2
- 239000000194 fatty acid Substances 0.000 claims description 2
- 229930195729 fatty acid Natural products 0.000 claims description 2
- 150000004665 fatty acids Chemical class 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 125000001424 substituent group Chemical group 0.000 claims description 2
- 125000003785 benzimidazolyl group Chemical class N1=C(NC2=C1C=CC=C2)* 0.000 claims 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 1
- QAZLUNIWYYOJPC-UHFFFAOYSA-M sulfenamide Chemical class [Cl-].COC1=C(C)C=[N+]2C3=NC4=CC=C(OC)C=C4N3SCC2=C1C QAZLUNIWYYOJPC-UHFFFAOYSA-M 0.000 claims 1
- 150000003557 thiazoles Chemical class 0.000 claims 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052718 tin Inorganic materials 0.000 abstract description 4
- 150000003378 silver Chemical class 0.000 abstract description 2
- 239000004094 surface-active agent Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 21
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 20
- 239000002253 acid Substances 0.000 description 17
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 10
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 10
- 238000007796 conventional method Methods 0.000 description 10
- 229940098779 methanesulfonic acid Drugs 0.000 description 9
- MLKQJVFHEUORBO-UHFFFAOYSA-M silver;methanesulfonate Chemical compound [Ag+].CS([O-])(=O)=O MLKQJVFHEUORBO-UHFFFAOYSA-M 0.000 description 9
- 238000006467 substitution reaction Methods 0.000 description 9
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 8
- JALQQBGHJJURDQ-UHFFFAOYSA-L bis(methylsulfonyloxy)tin Chemical compound [Sn+2].CS([O-])(=O)=O.CS([O-])(=O)=O JALQQBGHJJURDQ-UHFFFAOYSA-L 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 150000003839 salts Chemical class 0.000 description 7
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical class [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- NNBBQNFHCVVQHZ-UHFFFAOYSA-N methyl carbamimidothioate;sulfuric acid Chemical compound CSC(N)=N.OS(O)(=O)=O NNBBQNFHCVVQHZ-UHFFFAOYSA-N 0.000 description 5
- FLVIGYVXZHLUHP-UHFFFAOYSA-N N,N'-diethylthiourea Chemical compound CCNC(=S)NCC FLVIGYVXZHLUHP-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 150000001335 aliphatic alkanes Chemical class 0.000 description 4
- HTKFORQRBXIQHD-UHFFFAOYSA-N allylthiourea Chemical compound NC(=S)NCC=C HTKFORQRBXIQHD-UHFFFAOYSA-N 0.000 description 4
- 229960001748 allylthiourea Drugs 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- UDYXMTORTDACTG-UHFFFAOYSA-N 1,1,3-tributylthiourea Chemical compound CCCCNC(=S)N(CCCC)CCCC UDYXMTORTDACTG-UHFFFAOYSA-N 0.000 description 3
- JAEZSIYNWDWMMN-UHFFFAOYSA-N 1,1,3-trimethylthiourea Chemical compound CNC(=S)N(C)C JAEZSIYNWDWMMN-UHFFFAOYSA-N 0.000 description 3
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 3
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 3
- RYYXDZDBXNUPOG-UHFFFAOYSA-N 4,5,6,7-tetrahydro-1,3-benzothiazole-2,6-diamine;dihydrochloride Chemical compound Cl.Cl.C1C(N)CCC2=C1SC(N)=N2 RYYXDZDBXNUPOG-UHFFFAOYSA-N 0.000 description 3
- PIVQQUNOTICCSA-UHFFFAOYSA-N ANTU Chemical compound C1=CC=C2C(NC(=S)N)=CC=CC2=C1 PIVQQUNOTICCSA-UHFFFAOYSA-N 0.000 description 3
- PDQAZBWRQCGBEV-UHFFFAOYSA-N Ethylenethiourea Chemical compound S=C1NCCN1 PDQAZBWRQCGBEV-UHFFFAOYSA-N 0.000 description 3
- FCSHMCFRCYZTRQ-UHFFFAOYSA-N N,N'-diphenylthiourea Chemical compound C=1C=CC=CC=1NC(=S)NC1=CC=CC=C1 FCSHMCFRCYZTRQ-UHFFFAOYSA-N 0.000 description 3
- IPCRBOOJBPETMF-UHFFFAOYSA-N N-acetylthiourea Chemical compound CC(=O)NC(N)=S IPCRBOOJBPETMF-UHFFFAOYSA-N 0.000 description 3
- WJAASTDRAAMYNK-UHFFFAOYSA-N benzyl carbamimidothioate;hydron;chloride Chemical compound Cl.NC(=N)SCC1=CC=CC=C1 WJAASTDRAAMYNK-UHFFFAOYSA-N 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- LMBWSYZSUOEYSN-UHFFFAOYSA-N diethyldithiocarbamic acid Chemical compound CCN(CC)C(S)=S LMBWSYZSUOEYSN-UHFFFAOYSA-N 0.000 description 3
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 3
- 229910052716 thallium Inorganic materials 0.000 description 3
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 3
- BJDDAXVXMQYXHL-UHFFFAOYSA-J tris(ethylsulfonyloxy)stannyl ethanesulfonate Chemical compound [Sn+4].CCS([O-])(=O)=O.CCS([O-])(=O)=O.CCS([O-])(=O)=O.CCS([O-])(=O)=O BJDDAXVXMQYXHL-UHFFFAOYSA-J 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- IEORSVTYLWZQJQ-UHFFFAOYSA-N 2-(2-nonylphenoxy)ethanol Chemical compound CCCCCCCCCC1=CC=CC=C1OCCO IEORSVTYLWZQJQ-UHFFFAOYSA-N 0.000 description 2
- XZBJUNADPUBXEY-UHFFFAOYSA-N 2-sulfanyl-3H-1,2-benzothiazole 1-oxide Chemical compound SN1S(C2=C(C1)C=CC=C2)=O XZBJUNADPUBXEY-UHFFFAOYSA-N 0.000 description 2
- JYCQQPHGFMYQCF-UHFFFAOYSA-N 4-tert-Octylphenol monoethoxylate Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(OCCO)C=C1 JYCQQPHGFMYQCF-UHFFFAOYSA-N 0.000 description 2
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 2
- 235000006708 antioxidants Nutrition 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 150000003946 cyclohexylamines Chemical class 0.000 description 2
- AFZSMODLJJCVPP-UHFFFAOYSA-N dibenzothiazol-2-yl disulfide Chemical compound C1=CC=C2SC(SSC=3SC4=CC=CC=C4N=3)=NC2=C1 AFZSMODLJJCVPP-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- AUZONCFQVSMFAP-UHFFFAOYSA-N disulfiram Chemical compound CCN(CC)C(=S)SSC(=S)N(CC)CC AUZONCFQVSMFAP-UHFFFAOYSA-N 0.000 description 2
- 229950004394 ditiocarb Drugs 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229920000847 nonoxynol Polymers 0.000 description 2
- 229920002113 octoxynol Polymers 0.000 description 2
- 235000011007 phosphoric acid Nutrition 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- GURNTNKIRDSILY-UHFFFAOYSA-M silver;ethanesulfonate Chemical compound [Ag+].CCS([O-])(=O)=O GURNTNKIRDSILY-UHFFFAOYSA-M 0.000 description 2
- WWGXHTXOZKVJDN-UHFFFAOYSA-M sodium;n,n-diethylcarbamodithioate;trihydrate Chemical compound O.O.O.[Na+].CCN(CC)C([S-])=S WWGXHTXOZKVJDN-UHFFFAOYSA-M 0.000 description 2
- 150000003475 thallium Chemical class 0.000 description 2
- GBECUEIQVRDUKB-UHFFFAOYSA-M thallium monochloride Chemical compound [Tl]Cl GBECUEIQVRDUKB-UHFFFAOYSA-M 0.000 description 2
- UVZICZIVKIMRNE-UHFFFAOYSA-N thiodiacetic acid Chemical compound OC(=O)CSCC(O)=O UVZICZIVKIMRNE-UHFFFAOYSA-N 0.000 description 2
- YODZTKMDCQEPHD-UHFFFAOYSA-N thiodiglycol Chemical compound OCCSCCO YODZTKMDCQEPHD-UHFFFAOYSA-N 0.000 description 2
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 description 2
- 229960002447 thiram Drugs 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical compound [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 2
- MLYNHXYBUIJTRF-UHFFFAOYSA-L zinc;ethanesulfonate Chemical compound [Zn+2].CCS([O-])(=O)=O.CCS([O-])(=O)=O MLYNHXYBUIJTRF-UHFFFAOYSA-L 0.000 description 2
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 2
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- BIGYLAKFCGVRAN-UHFFFAOYSA-N 1,3,4-thiadiazolidine-2,5-dithione Chemical compound S=C1NNC(=S)S1 BIGYLAKFCGVRAN-UHFFFAOYSA-N 0.000 description 1
- LFMQNMXVVXHZCC-UHFFFAOYSA-N 1,3-benzothiazol-2-yl n,n-diethylcarbamodithioate Chemical compound C1=CC=C2SC(SC(=S)N(CC)CC)=NC2=C1 LFMQNMXVVXHZCC-UHFFFAOYSA-N 0.000 description 1
- ORGWCTHQVYSUNL-UHFFFAOYSA-N 1,3-bis(hydroxymethyl)thiourea Chemical compound OCNC(=S)NCO ORGWCTHQVYSUNL-UHFFFAOYSA-N 0.000 description 1
- YLMXNQPOOVZIHK-UHFFFAOYSA-N 1,3-bis[3-(dimethylamino)propyl]thiourea Chemical class CN(C)CCCNC(=S)NCCCN(C)C YLMXNQPOOVZIHK-UHFFFAOYSA-N 0.000 description 1
- CMCBDXRRFKYBDG-UHFFFAOYSA-N 1-dodecoxydodecane Chemical compound CCCCCCCCCCCCOCCCCCCCCCCCC CMCBDXRRFKYBDG-UHFFFAOYSA-N 0.000 description 1
- GCZZOZBWAZHCAN-UHFFFAOYSA-N 1-phenyl-3-(1,3-thiazol-2-yl)thiourea Chemical compound C=1C=CC=CC=1NC(=S)NC1=NC=CS1 GCZZOZBWAZHCAN-UHFFFAOYSA-N 0.000 description 1
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- XGIDEUICZZXBFQ-UHFFFAOYSA-N 1h-benzimidazol-2-ylmethanethiol Chemical compound C1=CC=C2NC(CS)=NC2=C1 XGIDEUICZZXBFQ-UHFFFAOYSA-N 0.000 description 1
- XKZQKPRCPNGNFR-UHFFFAOYSA-N 2-(3-hydroxyphenyl)phenol Chemical class OC1=CC=CC(C=2C(=CC=CC=2)O)=C1 XKZQKPRCPNGNFR-UHFFFAOYSA-N 0.000 description 1
- SRLLDMVISOTQFV-UHFFFAOYSA-N 2-methylpiperidine-1-carbodithioic acid Chemical compound CC1CCCCN1C(S)=S SRLLDMVISOTQFV-UHFFFAOYSA-N 0.000 description 1
- 150000004786 2-naphthols Chemical class 0.000 description 1
- BKZXZGWHTRCFPX-UHFFFAOYSA-N 2-tert-butyl-6-methylphenol Chemical compound CC1=CC=CC(C(C)(C)C)=C1O BKZXZGWHTRCFPX-UHFFFAOYSA-N 0.000 description 1
- CPGFMWPQXUXQRX-UHFFFAOYSA-N 3-amino-3-(4-fluorophenyl)propanoic acid Chemical compound OC(=O)CC(N)C1=CC=C(F)C=C1 CPGFMWPQXUXQRX-UHFFFAOYSA-N 0.000 description 1
- BUZICZZQJDLXJN-UHFFFAOYSA-N 3-azaniumyl-4-hydroxybutanoate Chemical compound OCC(N)CC(O)=O BUZICZZQJDLXJN-UHFFFAOYSA-N 0.000 description 1
- RYKLZUPYJFFNRR-UHFFFAOYSA-N 3-hydroxypiperidin-2-one Chemical compound OC1CCCNC1=O RYKLZUPYJFFNRR-UHFFFAOYSA-N 0.000 description 1
- HLBZWYXLQJQBKU-UHFFFAOYSA-N 4-(morpholin-4-yldisulfanyl)morpholine Chemical compound C1COCCN1SSN1CCOCC1 HLBZWYXLQJQBKU-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- GHKOFFNLGXMVNJ-UHFFFAOYSA-N Didodecyl thiobispropanoate Chemical compound CCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCC GHKOFFNLGXMVNJ-UHFFFAOYSA-N 0.000 description 1
- 239000003508 Dilauryl thiodipropionate Substances 0.000 description 1
- 239000002211 L-ascorbic acid Substances 0.000 description 1
- 235000000069 L-ascorbic acid Nutrition 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- FMRLDPWIRHBCCC-UHFFFAOYSA-L Zinc carbonate Chemical compound [Zn+2].[O-]C([O-])=O FMRLDPWIRHBCCC-UHFFFAOYSA-L 0.000 description 1
- OBWNGNXDUVABAS-UHFFFAOYSA-N [In].C(C)(C)O Chemical compound [In].C(C)(C)O OBWNGNXDUVABAS-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- VUAQKPWIIMBHEK-UHFFFAOYSA-K bis(methylsulfonyloxy)indiganyl methanesulfonate Chemical compound [In+3].CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O VUAQKPWIIMBHEK-UHFFFAOYSA-K 0.000 description 1
- 150000001621 bismuth Chemical class 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- CSNJTIWCTNEOSW-UHFFFAOYSA-N carbamothioylsulfanyl carbamodithioate Chemical compound NC(=S)SSC(N)=S CSNJTIWCTNEOSW-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229940116318 copper carbonate Drugs 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 description 1
- SSOVMNXYUYFJBU-UHFFFAOYSA-L copper;ethanesulfonate Chemical compound [Cu+2].CCS([O-])(=O)=O.CCS([O-])(=O)=O SSOVMNXYUYFJBU-UHFFFAOYSA-L 0.000 description 1
- BSXVKCJAIJZTAV-UHFFFAOYSA-L copper;methanesulfonate Chemical compound [Cu+2].CS([O-])(=O)=O.CS([O-])(=O)=O BSXVKCJAIJZTAV-UHFFFAOYSA-L 0.000 description 1
- SDFNZYMSEOUVIF-UHFFFAOYSA-N copper;methanesulfonic acid Chemical compound [Cu].CS(O)(=O)=O SDFNZYMSEOUVIF-UHFFFAOYSA-N 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 229960004643 cupric oxide Drugs 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- PGAXJQVAHDTGBB-UHFFFAOYSA-N dibutylcarbamothioylsulfanyl n,n-dibutylcarbamodithioate Chemical compound CCCCN(CCCC)C(=S)SSC(=S)N(CCCC)CCCC PGAXJQVAHDTGBB-UHFFFAOYSA-N 0.000 description 1
- NBGTWXBPCIHUQD-UHFFFAOYSA-N diethylcarbamodithioic acid;n-ethylethanamine Chemical compound CCNCC.CCN(CC)C(S)=S NBGTWXBPCIHUQD-UHFFFAOYSA-N 0.000 description 1
- 235000019304 dilauryl thiodipropionate Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- KHKQTRJMBORFEK-UHFFFAOYSA-N ethane-1,2-diamine;oxirane Chemical compound C1CO1.NCCN KHKQTRJMBORFEK-UHFFFAOYSA-N 0.000 description 1
- ZFMTZQIBTTWXKJ-UHFFFAOYSA-K ethanesulfonate indium(3+) Chemical compound [In+3].CCS([O-])(=O)=O.CCS([O-])(=O)=O.CCS([O-])(=O)=O ZFMTZQIBTTWXKJ-UHFFFAOYSA-K 0.000 description 1
- 150000002171 ethylene diamines Chemical class 0.000 description 1
- RXPAJWPEYBDXOG-UHFFFAOYSA-N hydron;methyl 4-methoxypyridine-2-carboxylate;chloride Chemical compound Cl.COC(=O)C1=CC(OC)=CC=N1 RXPAJWPEYBDXOG-UHFFFAOYSA-N 0.000 description 1
- 229960004337 hydroquinone Drugs 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000018984 mastication Effects 0.000 description 1
- 238000010077 mastication Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- AICMYQIGFPHNCY-UHFFFAOYSA-J methanesulfonate;tin(4+) Chemical compound [Sn+4].CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O AICMYQIGFPHNCY-UHFFFAOYSA-J 0.000 description 1
- IUJLOAKJZQBENM-UHFFFAOYSA-N n-(1,3-benzothiazol-2-ylsulfanyl)-2-methylpropan-2-amine Chemical compound C1=CC=C2SC(SNC(C)(C)C)=NC2=C1 IUJLOAKJZQBENM-UHFFFAOYSA-N 0.000 description 1
- CMAUJSNXENPPOF-UHFFFAOYSA-N n-(1,3-benzothiazol-2-ylsulfanyl)-n-cyclohexylcyclohexanamine Chemical compound C1CCCCC1N(C1CCCCC1)SC1=NC2=CC=CC=C2S1 CMAUJSNXENPPOF-UHFFFAOYSA-N 0.000 description 1
- DEQZTKGFXNUBJL-UHFFFAOYSA-N n-(1,3-benzothiazol-2-ylsulfanyl)cyclohexanamine Chemical compound C1CCCCC1NSC1=NC2=CC=CC=C2S1 DEQZTKGFXNUBJL-UHFFFAOYSA-N 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- WKMKTIVRRLOHAJ-UHFFFAOYSA-N oxygen(2-);thallium(1+) Chemical compound [O-2].[Tl+].[Tl+] WKMKTIVRRLOHAJ-UHFFFAOYSA-N 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- XKJCHHZQLQNZHY-UHFFFAOYSA-N phthalimide Chemical compound C1=CC=C2C(=O)NC(=O)C2=C1 XKJCHHZQLQNZHY-UHFFFAOYSA-N 0.000 description 1
- 150000003053 piperidines Chemical class 0.000 description 1
- APBOZDGTRCWHKW-UHFFFAOYSA-N potassium;1,3,4-thiadiazolidine-2,5-dithione Chemical compound [K].[K].SC1=NN=C(S)S1 APBOZDGTRCWHKW-UHFFFAOYSA-N 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- GQWFSUFTPBQRDY-UHFFFAOYSA-N propan-2-ol;silver Chemical compound [Ag].CC(C)O GQWFSUFTPBQRDY-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 1
- 229960001755 resorcinol Drugs 0.000 description 1
- GPNLWUFFWOYKLP-UHFFFAOYSA-N s-(1,3-benzothiazol-2-yl)thiohydroxylamine Chemical compound C1=CC=C2SC(SN)=NC2=C1 GPNLWUFFWOYKLP-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- HUMLQUKVJARKRN-UHFFFAOYSA-M sodium;n,n-dibutylcarbamodithioate Chemical class [Na+].CCCCN(C([S-])=S)CCCC HUMLQUKVJARKRN-UHFFFAOYSA-M 0.000 description 1
- ZTEPAMQURYRDPM-UHFFFAOYSA-M sodium;n,n-diethylcarbamothioate Chemical compound [Na+].CCN(CC)C([O-])=S ZTEPAMQURYRDPM-UHFFFAOYSA-M 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 229960002920 sorbitol Drugs 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 229910003438 thallium oxide Inorganic materials 0.000 description 1
- YTQVHRVITVLIRD-UHFFFAOYSA-L thallium sulfate Chemical compound [Tl+].[Tl+].[O-]S([O-])(=O)=O YTQVHRVITVLIRD-UHFFFAOYSA-L 0.000 description 1
- 229940119523 thallium sulfate Drugs 0.000 description 1
- HQOJMTATBXYHNR-UHFFFAOYSA-M thallium(I) acetate Chemical compound [Tl+].CC([O-])=O HQOJMTATBXYHNR-UHFFFAOYSA-M 0.000 description 1
- 229910000374 thallium(I) sulfate Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 150000003751 zinc Chemical class 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 235000004416 zinc carbonate Nutrition 0.000 description 1
- 239000011667 zinc carbonate Substances 0.000 description 1
- 229910000010 zinc carbonate Inorganic materials 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
- MKRZFOIRSLOYCE-UHFFFAOYSA-L zinc;methanesulfonate Chemical compound [Zn+2].CS([O-])(=O)=O.CS([O-])(=O)=O MKRZFOIRSLOYCE-UHFFFAOYSA-L 0.000 description 1
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、銀および銀合金め
っき浴に関し、更に詳細には、シアン系化合物を使用し
ない銀および銀合金めっき浴に関する。TECHNICAL FIELD The present invention relates to a silver and silver alloy plating bath, and more particularly to a silver and silver alloy plating bath that does not use a cyan compound.
【0002】[0002]
【従来の技術】銀および銀合金めっき浴等のめっき浴に
は古くからシアン系の浴が知られている。 このシアン
系の貴金属めっき浴は、析出する金属結晶の緻密さ、均
一電着性、浴管理の容易さなどの点で優れたものであ
り、装飾品の他、半導体部品やプリント基板関係におけ
るめっきにおいても広く利用されている。2. Description of the Related Art Cyan-based baths have long been known as plating baths such as silver and silver alloy plating baths. This cyan-based noble metal plating bath is excellent in terms of the density of the deposited metal crystals, uniform electrodeposition, and ease of bath management. It is used for plating not only ornaments but also semiconductor parts and printed circuit boards. It is also widely used in.
【0003】しかしながら、これらのめっき浴は毒性の
強いシアン化物を利用するものであるため、作業環境、
環境保全、排水処理等の面には多くの問題点があった。However, since these plating baths use cyanide, which is highly toxic, the working environment,
There were many problems in terms of environmental protection and wastewater treatment.
【0004】[0004]
【発明が解決しようとする課題】従って、シアン系化合
物を利用することなく、析出皮膜や浴管理等の面では従
来のシアン化物系のめっき浴と同等である銀および銀合
金めっき浴の提供が求められていた。Therefore, it is possible to provide a silver and silver alloy plating bath that is equivalent to a conventional cyanide-based plating bath in terms of deposition film and bath management without using a cyanide-based compound. It was wanted.
【0005】[0005]
【課題を解決するための手段】本発明者らは、シアン系
化合物を使用しない銀および銀合金めっき浴に関し鋭意
研究を行っていたところ、ある種の含イオウ化合物をA
g+イオンの置換防止剤として添加し、非イオン界面活性
剤を加えた銀および銀合金めっき浴を用いれば、シアン
化物系めっき浴を使用した場合と同等な銀および銀合金
皮膜が得られることを見出し、本発明を完成した。The inventors of the present invention have conducted earnest research on silver and silver alloy plating baths that do not use cyanide compounds.
If silver and silver alloy plating baths containing nonionic surfactants are added as g + ion displacement preventive agents, silver and silver alloy coatings equivalent to those obtained using cyanide plating baths can be obtained. And completed the present invention.
【0006】すなわち本発明は、下記3成分(a)〜
(c) (a)Ag+イオン (b)含イオウ化合物の1種またはそれ以上 (c)非イオン界面活性剤 を含有し、シアン系化合物を含まないことを特徴とする
銀めっき浴を提供するものである。That is, the present invention relates to the following three components (a)-
(C) (a) Ag + ion (b) One or more kinds of sulfur-containing compounds (c) Non-ionic surfactant is contained and a silver plating bath characterized by containing no cyanide compound is provided. It is a thing.
【0007】また、本発明は、下記4成分(a)〜
(d) (a)Ag+イオン (b)含イオウ化合物の1種またはそれ以上 (c)非イオン界面活性剤 (d)Sn2+、Cu2+、In3+、Tl+、Zn2+および
Bi3+からなる群から選ばれた金属イオンの1種または
それ以上 を含有し、シアン系化合物を含まないことを特徴とする
銀合金めっき浴をも提供するものである。The present invention also provides the following four components (a)-
(D) (a) Ag + ion (b) One or more sulfur-containing compounds (c) Nonionic surfactant (d) Sn 2+ , Cu 2+ , In 3+ , Tl + , Zn 2+ And a silver alloy plating bath containing one or more metal ions selected from the group consisting of Bi 3+ and containing no cyanide compound.
【0008】[0008]
【発明の実施の形態】本発明の酸性銀および銀合金めっ
き浴の(a)成分であるAg+イオンは、メタンスルホン
酸銀、エタンスルホン酸銀等のアルカンスルホン酸銀
塩、イソプロパノールスルホン酸銀等のアルカノールス
ルホン酸銀塩、酸化銀、塩化銀、硝酸銀等の水溶性銀塩
を水に溶解することにより得られる。好ましい水溶性銀
塩としては、銀アルカンスルホン酸塩および銀アルカノ
ールスルホン酸塩が挙げられる。BEST MODE FOR CARRYING OUT THE INVENTION The Ag + ion which is the component (a) of the acidic silver and silver alloy plating bath of the present invention is a silver alkane sulfonate such as silver methane sulfonate or silver ethane sulfonate, or a silver isopropanol sulfonate. It can be obtained by dissolving a water-soluble silver salt such as a silver salt of an alkanol sulfonic acid such as the above, a silver oxide, a silver chloride, a silver nitrate or the like in water. Preferred water-soluble silver salts include silver alkane sulfonates and silver alkanol sulfonates.
【0009】また、本発明の(b)成分である含イオウ
化合物とは、分子中に硫黄原子を含む化合物であり、浴
中でAg+の置換防止剤として機能するものをいう。Further, the sulfur-containing compound which is the component (b) of the present invention is a compound containing a sulfur atom in the molecule and which functions as a substitution inhibitor for Ag + in the bath.
【0010】含イオウ化合物の例としては、チオ尿素、
二酸化チオ尿素、1−アセチル−2−チオ尿素、アリル
チオ尿素、エチレンチオ尿素、sym.−ジ−o−トリ
ルチオ尿素、sym.−ジ−p−トリルチオ尿素、1,3
−ビス(ヒドロキシメチル)チオ尿素、1−フェニル−
3−(2−チアゾリル)−2−チオ尿素、塩酸ベンジル
イソチオ尿素、2−マロニルチオ尿素、S−メチルイソ
チオ尿素硫酸塩、N,N'−ジフェニルチオ尿素、トリメ
チルチオ尿素、N,N'−ジエチルチオ尿素、1−ナフチ
ルチオ尿素、1,3−ビス(ジメチルアミノプロピル)
−2−チオ尿素、トリブチルチオ尿素等のチオ尿素系化
合物;2−メルカプトベンゾチアゾール、ジベンゾチア
ゾールジスルフィド、2−メルカプトベンゾチアゾール
のシクロヘキシルアミン塩、2−(N,N−ジエチルチ
オカルバモイルチオ)ベンゾチアゾール、2−(4'−
モルホリノジチオ)ベンゾチアゾール等のチアゾール系
化合物;N−シクロヘキシル−2−ベンゾチアゾリルス
ルフェンアミド、N−tert−ブチル−2−ベンゾチ
アゾリルスルフェンアミド、N−オキシジエチレン−2
−ベンゾチアゾリルスルフェンアミド、N,N−ジシク
ロヘキシル−2−ベンゾチアゾリルスルフェンアミド等
のスルフェンアミド系化合物;テトラメチルチウラムジ
スルフィド、テトラエチルチウラムジスルフィド、テト
ラブチルチウラムジスルフィド、テトラキス(2−エチ
ルヘキシル)チウラムジスルフィド、テトラメチルチウ
ラムモノスルフィド、ジペンタメチレンチウラムテトラ
スルフィド等のチウラム系化合物;ペンタメチレンジチ
オカルバミン酸ピペリジン塩、ピペコリルジチオカルバ
ミン酸ピペコリン塩、ジエチルジチオカルバミン酸ナト
リウム、ジブチルジチオカルバミン酸ナトリウム等のジ
チオカルバミン酸塩系化合物;4,4'−チオビス(3−
メチル−6−tert−ブチルフェノール)等のビスフ
ェノール系化合物;2−メルカプトベンツイミダゾー
ル、2−メルカプトメチルベンツイミダゾール等のベン
ツイミダゾール系化合物;チオジプロピオン酸ジラウリ
ル等の有機チオ酸系化合物;N−シクロヘキシルチオフ
タルイミド等のスコーチ防止剤;4,4'−ジチオモルホ
リン等の加硫剤;o,o'−ジベンズアミドジフェニルジ
スルフィド等の素練促進剤;その他、2−ベンゾキサゾ
ールチオール、2,5−ジメルカプト−1,3,4−チア
ジアゾール、2,5−ジメルカプト−1,3,4−チアジ
アゾール 二カリウム、ジエチルジチオカルバミン酸ジ
エチルアンモニウム、ジエチルジチオカルバミン酸ナト
リウム三水和物、チオグリコール、チオグリコール酸、
チオジグリコール酸、β−チオジグリコール等の含イオ
ウ化合物を挙げることができる。これら含イオウ化合物
は、一種で配合してもよいが、二種以上を組み合わせて
配合することが好ましく、特にチオ尿素系化合物を中心
に複数の含イオウ化合物を組み合わせることが好まし
い。Examples of the sulfur-containing compound include thiourea,
Thiourea dioxide, 1-acetyl-2-thiourea, allylthiourea, ethylenethiourea, sym.-di-o-tolylthiourea, sym.-di-p-tolylthiourea, 1,3
-Bis (hydroxymethyl) thiourea, 1-phenyl-
3- (2-thiazolyl) -2-thiourea, benzylisothiourea hydrochloride, 2-malonylthiourea, S-methylisothiourea sulfate, N, N'-diphenylthiourea, trimethylthiourea, N, N'-diethylthio Urea, 1-naphthylthiourea, 1,3-bis (dimethylaminopropyl)
Thiourea compounds such as 2-thiourea and tributylthiourea; 2-mercaptobenzothiazole, dibenzothiazole disulfide, cyclohexylamine salt of 2-mercaptobenzothiazole, 2- (N, N-diethylthiocarbamoylthio) benzothiazole , 2- (4'-
Thiazole compounds such as morpholinodithio) benzothiazole; N-cyclohexyl-2-benzothiazolylsulfenamide, N-tert-butyl-2-benzothiazolylsulfenamide, N-oxydiethylene-2
-Sulfenamide compounds such as benzothiazolyl sulfenamide and N, N-dicyclohexyl-2-benzothiazolyl sulfenamide; tetramethylthiuram disulfide, tetraethylthiuram disulfide, tetrabutylthiuram disulfide, tetrakis (2-ethylhexyl) Thiuram-based compounds such as thiuram disulfide, tetramethylthiuram monosulfide, dipentamethylene thiuram tetrasulfide; pentamethylenedithiocarbamic acid piperidine salt, pipecolyl dithiocarbamic acid pipecoline salt, sodium diethyldithiocarbamate, dithiocarbamate salts such as sodium dibutyldithiocarbamate Compounds; 4,4'-thiobis (3-
Bisphenol-based compounds such as methyl-6-tert-butylphenol); benzimidazole-based compounds such as 2-mercaptobenzimidazole and 2-mercaptomethylbenzimidazole; organic thioacid-based compounds such as dilauryl thiodipropionate; N-cyclohexylthio Anti-scorch agents such as phthalimide; Vulcanizing agents such as 4,4'-dithiomorpholine; Mastication accelerators such as o, o'-dibenzamide diphenyl disulfide; Others, 2-benzoxazole thiol, 2,5-dimercapto -1,3,4-thiadiazole, 2,5-dimercapto-1,3,4-thiadiazole dipotassium, diethylammonium diethyldithiocarbamate, sodium diethyldithiocarbamate trihydrate, thioglycol, thioglycolic acid,
Examples thereof include sulfur-containing compounds such as thiodiglycolic acid and β-thiodiglycol. These sulfur-containing compounds may be blended in one kind, but it is preferable to combine two or more kinds in combination, and it is particularly preferable to combine a plurality of sulfur-containing compounds centering on a thiourea compound.
【0011】更に、本発明の(c)成分である非イオン
界面活性剤は、密着性よく緻密で平滑なめっき面を得る
ために使用されるものであり、本発明において本成分を
欠くと満足の行く銀および銀合金めっき被膜が得られな
い。Further, the nonionic surfactant which is the component (c) of the present invention is used for obtaining a dense and smooth plated surface with good adhesiveness, and it is satisfactory in the present invention to lack this component. No clear silver and silver alloy plating film can be obtained.
【0012】この(c)成分の好ましい具体例として
は、下記一般式(1)〜(4)の何れかで表される化合
物を主成分とするものが挙げられる。Specific preferred examples of the component (c) include those containing a compound represented by any one of the following general formulas (1) to (4) as a main component.
【0013】[0013]
【化2】 Embedded image
【0014】[式中、R1は、炭素数8〜22の脂肪族
アルコール、炭素数1〜25のアルキル基で置換された
フェノール、炭素数1〜25のアルキルで置換されたβ
−ナフトール、炭素数1〜25のアルコキシル化リン
酸、炭素数8〜22の脂肪酸でエステル化したソルビタ
ンもしくはスチレン化フェノール(そのフェノール核の
水素は炭素数1〜4のアルキル基またはフェニル基で置
換されてもよい)からそれらの水酸基の水素原子を除い
て得られる残基または水素原子を示し、R2は炭素数8
〜18のアルキル基を、R3およびR4は水素原子または
炭素数1〜5のアルキル基を示し、Aは−CH2CH2O
−を、Bは−CH2CH(CH3)O−を示し、m1およ
びn1は0〜30の整数、m2、n2、m3およびn3は0
〜40の整数、m4およびn4は0〜20の整数をそれぞ
れ示す。 但し、m1とn1、m2とn2、m3とn3および
m4とn4がそれぞれ同時に0となることはなく、m1〜
m4およびn1〜n4は、置換基における総数を意味し、
AとBの存在位置は限定されないものとする][In the formula, R 1 is an aliphatic alcohol having 8 to 22 carbon atoms, a phenol substituted with an alkyl group having 1 to 25 carbon atoms, and a β substituted with an alkyl group having 1 to 25 carbon atoms.
-Naphthol, alkoxylated phosphoric acid having 1 to 25 carbon atoms, sorbitan esterified with fatty acid having 8 to 22 carbon atoms or styrenated phenol (the hydrogen of the phenol nucleus is substituted with an alkyl group having 1 to 4 carbon atoms or a phenyl group) R 2 is a carbon atom having a carbon number of 8 or less.
To 18 alkyl groups, R 3 and R 4 each represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and A represents —CH 2 CH 2 O.
- a, B represents a -CH 2 CH (CH 3) O- , m 1 and n 1 is 0 to 30 integer, m 2, n 2, m 3 and n 3 0
40 integers, m 4 and n 4 is 0-20 of integer respectively. However, m 1 and n 1 , m 2 and n 2 , m 3 and n 3, and m 4 and n 4 do not become 0 at the same time, and m 1 ~
m 4 and n 1 to n 4 mean the total number of substituents,
The positions where A and B are present are not limited]
【0015】これらの非イオン界面活性剤は、いずれも
対応する脂肪族アルコール、置換フェノール、アルキル
で置換β−ナフトール、アルコキシル化リン酸、エステ
ル化したソルビタン、スチレン化フェノール、エチレン
ジアミン、モノアルキルアミン、アルキル置換されてい
ても良いジフェノールにエチレンオキサイドおよび/ま
たはプロピレンオキサイドを所定のモル数付加させるこ
とによって調製できるものであるが、また、市販品とし
ても容易に入手できるものである。These nonionic surfactants are all corresponding aliphatic alcohols, substituted phenols, alkyl-substituted β-naphthols, alkoxylated phosphoric acids, esterified sorbitans, styrenated phenols, ethylenediamines, monoalkylamines, It can be prepared by adding a predetermined number of moles of ethylene oxide and / or propylene oxide to an alkyl-substituted diphenol, but it is also easily available as a commercial product.
【0016】市販品の例としては、前記式(1)で表さ
れるものとして、プルラファックLF401(BASF
社製)等が、式(2)で表されるものとして、テトロニ
ックTR−702(旭電化工業社製)等がそれぞれ挙げ
られ、また、式(3)で表されるものはナイミーンL−
207(日本油脂社製)等、式(4)で表されるもの
は、リポノックスNC−100(ライオン社製)等がそ
れぞれ挙げられる。As an example of a commercially available product, the one represented by the above-mentioned formula (1) is Pullurafak LF401 (BASF
(Manufactured by Asahi Denka Kogyo Co., Ltd.) and the like, and those represented by formula (3) are those represented by formula (2).
Examples of the compound represented by the formula (4) such as 207 (manufactured by NOF Corporation) include Liponox NC-100 (manufactured by Lion Corporation).
【0017】また更に、本発明の(d)成分は、S
n2+、Cu2+、In3+、Tl+、Zn2+およびBi3+から
選ばれた金属(以下、これら金属を「合金成分」という
ことがある)のイオンであり、合金成分の水溶性塩を水
に溶解することにより得られる。Furthermore, the component (d) of the present invention is S
An ion of a metal selected from n 2+ , Cu 2+ , In 3+ , Tl + , Zn 2+ and Bi 3+ (hereinafter, these metals may be referred to as “alloy component”), It is obtained by dissolving a water-soluble salt in water.
【0018】合金成分の水不溶性塩のうち、錫塩の例と
しては、メタンスルホン酸錫、エタンスルホン酸錫、イ
ソプロパノールスルホン酸錫、塩化第一錫、酸化第一
錫、酸化第二錫、硫酸第一錫等が、銅塩の例としては、
メタンスルホン酸銅、エタンスルホン酸銅、イソプロパ
ノールスルホン酸銅、硫酸銅、酸化第二銅、硝酸銅、塩
化第一銅、塩化第二銅、炭酸銅等が、インジウム塩の例
としては、メタンスルホン酸インジウム、エタンスルホ
ン酸インジウム、イソプロパノールスルホン酸インジウ
ム、インジウム等が、タリウム塩の例としては、メタン
スルホン酸タリウム、エタンスルホン酸タリウム、イソ
プロパノールスルホン酸タリウム、酸化タリウム、硫酸
タリウム、硝酸タリウム、塩化タリウム、酢酸タリウム
等が、亜鉛塩の例としては、メタンスルホン酸亜鉛、エ
タンスルホン酸亜鉛、イソプロパノールスルホン酸亜
鉛、塩化亜鉛、硝酸亜鉛、炭酸亜鉛、硫酸亜鉛等が、ビ
スマス塩の例としては、メタンスルホン酸ビスマス、エ
タンスルホン酸ビスマス、イソプロパノールスルホン酸
ビスマス、酸化ビスマス、硝酸ビスマス等がそれぞれ挙
げられる。Among the water-insoluble salts of the alloy components, examples of tin salts include tin methanesulfonate, tin ethanesulfonate, tin isopropanolsulfonate, stannous chloride, stannous oxide, stannic oxide, and sulfuric acid. Examples of the copper salt such as stannous tin are
Copper methanesulfonate, copper ethanesulfonate, copper isopropanolsulfonate, copper sulfate, cupric oxide, copper nitrate, cuprous chloride, cupric chloride, copper carbonate, etc. Examples of the thallium salt include indium acid salt, indium ethanesulfonate, indium isopropanol sulfonate, and indium, and examples of thallium salts include thallium methanesulfonate, thallium ethanesulfonate, thallium isopropanolsulfonate, thallium oxide, thallium sulfate, thallium chloride, and thallium chloride. , Thallium acetate, etc., examples of zinc salts include zinc methanesulfonate, zinc ethanesulfonate, zinc isopropanolsulfonate, zinc chloride, zinc nitrate, zinc carbonate, zinc sulfate, etc., examples of bismuth salts include methane. Bismuth sulfonate, bis ethane sulfonate Scan, isopropanol sulfonic acid bismuth, bismuth oxide, bismuth nitrate, and the like, respectively.
【0019】本発明の銀および銀合金浴は、常法に従
い、酸性浴中に前記(a)成分〜(c)成分または
(a)成分〜(d)成分を添加することにより調製され
る。具体的には、硫酸や、アルカンスルホン酸、アルカ
ノールスルホン酸等で酸性とした水溶液中に、(b)成
分である含イオウ化合物を加え、十分に溶解させた後、
前記の水溶性銀塩および合金成分の水溶性塩を加え、さ
らに(c)成分である非イオン界面活性剤を添加するこ
とにより調製される。The silver and silver alloy baths of the present invention are prepared by adding the components (a) to (c) or (a) to (d) in an acidic bath according to a conventional method. Specifically, after adding the sulfur-containing compound, which is the component (b), to an aqueous solution acidified with sulfuric acid, alkane sulfonic acid, alkanol sulfonic acid or the like and sufficiently dissolving it,
It is prepared by adding the water-soluble silver salt and the water-soluble salt of the alloy component, and further adding the nonionic surfactant as the component (c).
【0020】本発明の銀および銀合金浴においては、浴
性を酸性にするだけでなく、浴中の金属イオンを安定に
保つ作用もあるため、アルカンスルホン酸およびアルカ
ノールスルホン酸を用いることが好ましい。 具体的に
は、メタンスルホン酸、エタンスルホン酸等を用いるこ
とが好ましい。In the silver and silver alloy baths of the present invention, it is preferable to use alkane sulfonic acid and alkanol sulfonic acid because they not only make the bath properties acidic but also keep the metal ions in the bath stable. . Specifically, it is preferable to use methanesulfonic acid, ethanesulfonic acid, or the like.
【0021】これらの酸は、水溶性錫塩や合金成分の水
溶性塩がアルカンスルホン酸塩またはアルカノールスル
ホン酸塩である場合は、それらの塩の酸基と共通のもの
であっても異なるものであってもよく、二種類以上を併
用してもよい。浴中のアルカンスルホン酸およびアルカ
ノールスルホン酸の濃度は、そのイオン濃度として約5
〜300g/lが適当である。When the water-soluble tin salt or the water-soluble salt of the alloy component is an alkane sulfonate or an alkanol sulfonate, these acids may be the same as or different from the acid group of those salts. Or two or more kinds may be used in combination. The concentration of alkanesulfonic acid and alkanolsulfonic acid in the bath is about 5 as its ion concentration.
~ 300 g / l is suitable.
【0022】本発明の銀および銀合金浴中の全金属イオ
ン濃度は0.5〜240g/l程度とすることが適当で
ある。また、銀合金浴中における(a)成分と(d)成
分の量は、目標とする合金組成に合せて調製する必要が
あるが、一般には(a)成分は、Ag+として5〜20
0g/l程度であることが好ましく、また、(d)成分
は、合金成分イオンの種類によっても異なるが、一般に
0.1〜40g/l程度であることが好ましい。 (b)
成分の量は(a)成分の濃度によっても異なるが、一般
に0.01〜40g/l程度、特に0.1〜20g/l程
度であることが好ましい。 更に、(c)成分の量は、
密着性よく緻密で平滑なめっき面を得るのに十分な量で
良く、一般には、0.5〜30g/l程度である。The total metal ion concentration in the silver and silver alloy bath of the present invention is suitably about 0.5 to 240 g / l. Further, the amounts of the component (a) and the component (d) in the silver alloy bath must be adjusted according to the target alloy composition, but the component (a) is generally 5 to 20 as Ag +.
It is preferably about 0 g / l, and the component (d) is preferably about 0.1 to 40 g / l, although it varies depending on the type of alloy component ions. (B)
Although the amount of the component varies depending on the concentration of the component (a), it is generally about 0.01 to 40 g / l, and preferably about 0.1 to 20 g / l. Furthermore, the amount of component (c) is
The amount is sufficient to obtain a dense and smooth plated surface with good adhesion and is generally about 0.5 to 30 g / l.
【0023】本発明の銀および銀合金めっき浴には、上
記した成分の他、本発明の効果を損なわない範囲で光沢
剤、酸化防止剤、湿潤剤等を必要に応じて添加すること
ができる。In the silver and silver alloy plating bath of the present invention, in addition to the above-mentioned components, a brightening agent, an antioxidant, a wetting agent and the like can be added, if necessary, within a range not impairing the effects of the present invention. .
【0024】また、Sn2+を用いる場合は、スズの酸化
防止剤として、例えばフェノール、カテコール、レゾル
シン、ヒドロキノン、ピロガロール等のヒドロキシフェ
ニル化合物や、L−アスコルビン酸、ソルビトール等を
利用することができる。When Sn 2+ is used, a hydroxyphenyl compound such as phenol, catechol, resorcin, hydroquinone, pyrogallol, L-ascorbic acid, sorbitol or the like can be used as an antioxidant for tin. .
【0025】かくして得られる本発明の酸性銀および銀
合金浴を用いてめっきを行う場合、例えば、めっき浴の
浴温は約10〜60℃程度、好ましくは約20〜30℃
程度、陰極電流密度は約0.01〜100A/dm2程
度、好ましくは約0.1〜10A/dm2程度でめっきす
ることができる。 また、陽極としては、不溶解性電極
等を利用することができる。When plating is performed using the acidic silver and silver alloy bath of the present invention thus obtained, for example, the bath temperature of the plating bath is about 10 to 60 ° C., preferably about 20 to 30 ° C.
The cathode current density may be about 0.01 to 100 A / dm 2 , and preferably about 0.1 to 10 A / dm 2 . In addition, an insoluble electrode or the like can be used as the anode.
【0026】以上の酸性銀および銀合金めっき浴から得
られる銀めっきあるいは銀合金めっき皮膜は、従来のシ
アン系めっき浴で得られる銀あるいは銀合金めっき皮膜
と同等の緻密性を有するものであり、電気部品端子やプ
リント配線基板のめっき浴として利用することができる
ものである。The above-mentioned silver plating or silver alloy plating film obtained from the acidic silver and silver alloy plating bath has the same degree of compactness as the silver or silver alloy plating film obtained in the conventional cyan plating bath. It can be used as a plating bath for electrical component terminals and printed wiring boards.
【0027】[0027]
【実施例】以下、実施例、比較例および試験例を挙げ、
本発明を説明するが、本発明はこれら実施例等になんら
制約されるものではない。The following examples, comparative examples and test examples are given.
The present invention will be described, but the present invention is not limited to these examples.
【0028】実 施 例 1 下記組成により、常法にしたがって銀めっき浴を調製し
た。 ( 組 成 ) メタンスルホン酸銀(I) 10 g/l メタンスルホン酸(遊離酸) 100 g/l アリルチオ尿素 20 g/l 2−メルカプトベンツイミダゾール 1 g/l ノニルフェノールエトキシレートの 10 g/l エチレンオキサイド12モル付加物Example 1 A silver plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 10 g / l Methanesulfonic acid (free acid) 100 g / l Allylthiourea 20 g / l 2-Mercaptobenzimidazole 1 g / l Nonylphenol ethoxylate 10 g / l Ethylene Oxide 12 mol adduct
【0029】実 施 例 2 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) メタンスルホン酸銀(I) 1 g/l メタンスルホン酸錫(II) 40 g/l メタンスルホン酸(遊離酸) 120 g/l チオ尿素 5 g/l N,N'−ジエチルチオ尿素 5 g/l ラウリルアミンの 8 g/l エチレンオキサイド7モル付加物 カテコール 1 g/lExample 2 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 1 g / l Tin (II) methanesulfonate 40 g / l Methanesulfonic acid (free acid) 120 g / l Thiourea 5 g / l N, N'-diethylthiourea 5 g / l 8 g / l laurylamine 8 g / l ethylene oxide 7 mol adduct catechol 1 g / l
【0030】実 施 例 3 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) メタンスルホン酸銀(I) 1 g/l メタンスルホン酸錫(II) 30 g/l メタンスルホン酸ビスマス(II) 3 g/l メタンスルホン酸(遊離酸) 80 g/l チオグリコール酸 5 g/l 2−ベンゾキサゾールチオール 3 g/l β−ナフトールの 4 g/l エチレンオキサイド8モル付加物Example 3 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 1 g / l Tin (II) methanesulfonate 30 g / l Bismuth (II) methanesulfonate 3 g / l Methanesulfonic acid (free acid) 80 g / l Thioglycol Acid 5 g / l 2-benzoxazole thiol 3 g / l β-naphthol 4 g / l ethylene oxide 8 mol adduct
【0031】実 施 例 4 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) エタンスルホン酸銀(I) 0.5 g/l エタンスルホン酸錫(II) 20 g/l エタンスルホン酸亜鉛(I) 40 g/l エタンスルホン酸(遊離酸) 100 g/l 2−メルカプトベンゾチアゾール 2 g/l ジエチルチオカルバミン酸ナトリウム 0.5 g/l エチレンジアミンのエチレンオキサイド 5 g/l 48モル、プロピレンオキサイド44モル付加物 オクチルフェノールエトキシレートの 5 g/l エチレンオキサイド10モル付加物Example 4 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver ethanesulfonate (I) 0.5 g / l Tin ethanesulfonate (II) 20 g / l Zinc ethanesulfonate (I) 40 g / l Ethanesulfonate (free acid) 100 g / l 2-Mercaptobenzothiazole 2 g / l Sodium diethylthiocarbamate 0.5 g / l Ethylenediamine ethylene oxide 5 g / l 48 mol, Propylene oxide 44 mol adduct Octylphenol ethoxylate 5 g / l Ethylene oxide 10 mol addition Stuff
【0032】実 施 例 5 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) メタンスルホン酸銀(I) 1 g/l メタンスルホン酸錫(II) 20 g/l メタンスルホン酸銅(II) 20 g/l メタンスルホン酸(遊離酸) 80 g/l β−チオジグリコール 4 g/l N,N'−ジエチル 4 g/l ジチオカルバミン酸ナトリウム ラウリルエーテルのエチレンオキサイド 5 g/l 15モル付加物Example 5 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 1 g / l Tin (II) methanesulfonate 20 g / l Copper (II) methanesulfonate 20 g / l Methanesulfonic acid (free acid) 80 g / l β- Thiodiglycol 4 g / l N, N'-diethyl 4 g / l sodium dithiocarbamate Ethylene oxide 5 g / l 15 mol adduct of lauryl ether
【0033】実 施 例 6 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) メタンスルホン酸銀(I) 0.5 g/l メタンスルホン酸錫(II) 10 g/l メタンスルホン酸インジウム(III) 1 g/l メタンスルホン酸(遊離酸) 100 g/l 2−メルカプトベンツイミダゾール 0.5 g/l ジエチルジチオカルバミン酸 2 g/l ジエチルアンモニウム ドデシルアミンのエチレンオキサイド 10 g/l 8モル付加物 オクチルフェノールエトキシレートの 2 g/l エチレンオキサイド10モル付加物Example 6 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 0.5 g / l Tin (II) methanesulfonate 10 g / l Indium (III) methanesulfonate 1 g / l Methanesulfonic acid (free acid) 100 g / l 2-mercaptobenzimidazole 0.5 g / l diethyldithiocarbamic acid 2 g / l diethylammonium dodecylamine ethylene oxide 10 g / l 8 mol adduct octylphenol ethoxylate 2 g / l ethylene oxide 10 mol adduct
【0034】比 較 例 1 下記組成により、常法にしたがって銀めっき浴を調製し
た。 ( 組 成 ) メタンスルホン酸銀(I) 10 g/l メタンスルホン酸(遊離酸) 100 g/l ノニルフェノールエトキシレートの 10 g/l エチレンオキサイド12モル付加物Comparative Example 1 A silver plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 10 g / l Methanesulfonic acid (free acid) 100 g / l Nonylphenol ethoxylate 10 g / l Ethylene oxide 12 mol adduct
【0035】比 較 例 2 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) メタンスルホン酸銀(I) 1 g/l メタンスルホン酸錫(II) 40 g/l メタンスルホン酸(遊離酸) 120 g/l ラウリルアミンの 8 g/l エチレンオキサイド7モル付加物 カテコール 1 g/lComparative Example 2 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 1 g / l Tin (II) methanesulfonate 40 g / l Methanesulfonic acid (free acid) 120 g / l 8 g / l laurylamine 8 g / l 7-mol ethylene oxide adduct Catechol 1 g / l
【0036】比 較 例 3 下記組成により、常法にしたがって銀合金めっき浴を調
製した。 ( 組 成 ) メタンスルホン酸銀(I) 1 g/l メタンスルホン酸錫(II) 30 g/l メタンスルホン酸ビスマス(II) 3 g/l メタンスルホン酸(遊離酸) 80 g/l β−ナフトールの 4 g/l エチレンオキサイド8モル付加物Comparative Example 3 A silver alloy plating bath having the following composition was prepared by a conventional method. (Composition) Silver (I) methanesulfonate 1 g / l Tin (II) methanesulfonate 30 g / l Bismuth (II) methanesulfonate 3 g / l Methanesulfonate (free acid) 80 g / l β- Naphthol 4 g / l ethylene oxide 8 mol adduct
【0037】試 験 例 1 上記の実施例1〜6および比較例1〜3のめっき浴を使
用し、30mm×10mmの銅板を5分間浸漬させ、浴
の濁りおよび銀の置換を比較した。この結果を表1に示
す。Test Example 1 Using the plating baths of the above Examples 1 to 6 and Comparative Examples 1 to 3, a 30 mm × 10 mm copper plate was immersed for 5 minutes to compare the turbidity of the bath and the substitution of silver. Table 1 shows the results.
【0038】 ( 結 果 ) 表 1 ──────────────────────────── めっき浴 浴の濁り 銀の置換 ──────────────────────────── 実 施 例 1 無 無 実 施 例 2 無 無 実 施 例 3 無 無 実 施 例 4 無 無 実 施 例 5 無 無 実 施 例 6 無 無 ──────────────────────────── 比 較 例 1 有 有 比 較 例 2 有 有 比 較 例 3 有 有 ────────────────────────────(Results) Table 1 ──────────────────────────── Plating bath Bath turbidity Silver substitution ───── ─────────────────────── Example 1 No No Example 2 No No Example 3 No No Example 4 No No Example 5 No No Example 6 No No ──────────────────────────── Ratio Comparison Example 1 Yes Yes Ratio Example 2 Yes Yes Ratio Comparative Example 3 Yes Yes ────────────────────────────
【0039】試 験 例 2 次の組成のめっき浴において、含イオウ化合物Aおよび
Bの二種類の組み合わせを変化させた銀合金めっき浴を
調製し、ここに30mm×10mmの銅板を5分間浸漬
させ、浴の濁りおよび銀の置換を比較した。その結果を
表2〜7に示す。Test Example 2 In a plating bath having the following composition, a silver alloy plating bath was prepared in which the combination of two kinds of the sulfur-containing compounds A and B was changed, and a 30 mm × 10 mm copper plate was immersed therein for 5 minutes. , Bath turbidity and silver displacement were compared. The results are shown in Tables 2-7.
【0040】 ( 組 成 ) メタンスルホン酸銀(I) 1 g/l メタンスルホン酸錫(II) 40 g/l メタンスルホン酸(遊離酸) 120 g/l 含イオウ化合物 A X g/l 含イオウ化合物 B Y g/l ラウリルアミンの 8 g/l エチレンオキサイド7モル付加物 カテコール 1 g/l(Composition) Silver (I) methanesulfonate 1 g / l Tin (II) methanesulfonate 40 g / l Methanesulfonic acid (free acid) 120 g / l Sulfur-containing compound A X g / l Sulfur-containing Compound B Y g / l Laurylamine 8 g / l Ethylene oxide 7 mol adduct Catechol 1 g / l
【0041】1.チオ尿素系の組み合わせ:(1)含イオウ
化合物 Aは、チオ尿素、X=5は一定; 表 2 ───────────────────────────────── 含イオウ化合物 B(Y=5) 浴の濁り 銀の置換 ───────────────────────────────── アリルチオ尿素 無 無 エチレンチオ尿素 無 無 二酸化チオ尿素 無 無 S−メチルイソチオ尿素硫酸塩 無 無 トリメチルチオ尿素 無 無 (チオ尿素のみ) 有 無 ───────────────────────────────── 1. Thiourea-based combination: (1) Sulfur-containing compound A is thiourea, X = 5 is constant; Table 2 ──────────────────── ─────────────── Sulfur-containing compound B (Y = 5) Bath turbidity Silver substitution ───────────────────── ──────────── Allyl thiourea No No Ethylene thiourea No No No thiourea dioxide No No S-methylisothiourea sulfate No No Trimethylthiourea No No (thiourea only) Yes No ───── ────────────────────────────
【0042】(2)含イオウ化合物 Aは、N,N'−ジエチ
ルチオ尿素、X=5は一定; 表 3 ───────────────────────────────── 含イオウ化合物 B(Y=5) 浴の濁り 銀の置換 ───────────────────────────────── アリルチオ尿素 無 無 エチレンチオ尿素 無 無 二酸化チオ尿素 無 無 S−メチルイソチオ尿素硫酸塩 無 無 トリメチルチオ尿素 無 無 (N,N'−ジエチルチオ尿素のみ) 有 無 ─────────────────────────────────(2) Sulfur-containing compound A is N, N'-diethylthiourea, X = 5 is constant; Table 3 ─────────────────────── ─────────── Sulfur-containing compound B (Y = 5) Bath turbidity Silver substitution ──────────────────────── ───────── Allylthiourea No No Ethylenethiourea No No Thiourea dioxide No No S-Methylisothiourea Sulfate No No Trimethylthiourea No No (N, N'-diethylthiourea only) Yes No ─── ──────────────────────────────
【0043】2.チオ尿素系とチアゾール系の組み合わ
せ:(1)含イオウ化合物 Aは、S−メチルイソチオ尿素
硫酸塩、X=5は一定; 表 4 ───────────────────────────────── 含イオウ化合物 B(Y=1) 浴の濁り 銀の置換 ───────────────────────────────── 2−メルカプトベンゾチアゾール 無 無 ジベンゾチアジルジスルフィド 無 無 2−メルカプトベンゾチアゾールの 無 無 シクロヘキシルアミン塩 2−(N,N'−ジエチルチオ 無 無 カルバモイルチオ)ベンゾチアゾール 2−(4'−モルホリノジチオ) 無 無 ベンゾチアゾール (S−メチルイソチオ尿素硫酸塩のみ) 有 無 ─────────────────────────────────2. Combination of thiourea type and thiazole type: (1) Sulfur-containing compound A is S-methylisothiourea sulfate, and X = 5 is constant; Table 4 ───────────── ───────────────────── Sulfur-containing compound B (Y = 1) Bath turbidity Silver substitution ────────────── ─────────────────── 2-Mercaptobenzothiazole None Dibenzothiazyl disulfide None None 2-Mercaptobenzothiazole None None Cyclohexylamine salt 2- (N, N ' -Diethylthio None None Carbamoylthio) benzothiazole 2- (4'-morpholinodithio) None None Benzothiazole (S-methylisothiourea sulfate only) Yes No ────────────────── ────────────────
【0044】(2)含イオウ化合物 Aは、2−メルカプト
ベンゾチアゾール、X=1は一定; 表 5 ───────────────────────────────── 含イオウ化合物 B(Y=5) 浴の濁り 銀の置換 ───────────────────────────────── 1−アセチル−2−チオ尿素 無 無 塩酸ベンジルイソチオ尿素 無 無 2−マロニルチオ尿素 無 無 1−ナフチルチオ尿素 無 無 トリブチルチオ尿素 無 無 (2−メルカプトベンゾチアゾールのみ) 有 無 ─────────────────────────────────(2) Sulfur-containing compound A is 2-mercaptobenzothiazole, X = 1 is constant; Table 5 ───────────────────────── ───────── Sulfur-containing compound B (Y = 5) Bath turbidity Silver substitution ─────────────────────────── ─────── 1-Acetyl-2-thiourea No No benzylisothiourea hydrochloride No No 2-malonylthiourea No No 1-naphthylthiourea No No Tributylthiourea No No (2-mercaptobenzothiazole only) Yes None ──────────────────────────────────
【0045】3.チオ尿素系とその他の含イオウ化合物
の組み合わせ:(1)含イオウ化合物 Aは、N,N'−ジフ
ェニルチオ尿素、X=5は一定; 表 6 ───────────────────────────────── 含イオウ化合物 B(Y=1) 浴の濁り 銀の置換 ───────────────────────────────── 2−ベンゾキサゾールチオール 無 無 ジエチルジチオカルバミン酸 無 無 ジエチルアンモニウム ジエチルジチオカルバミン酸ナトリウム 無 無 三水和物 チオグリコール酸 無 無 チオジグリコール酸 無 無 (N,N'−ジフェニルチオ尿素のみ) 有 無 ─────────────────────────────────3. Combination of thiourea system and other sulfur-containing compound: (1) Sulfur-containing compound A is N, N'-diphenylthiourea, X = 5 is constant; Table 6 ──────── ────────────────────────── Sulfur-containing compounds B (Y = 1) Bath turbidity Silver substitution ───────── ──────────────────────── 2-Benzoxazole Thiol None None Diethyldithiocarbamate None None Diethylammonium Diethyldithiocarbamate None None Trihydrate Thio Glycolic acid No No Thiodiglycolic acid No No (N, N'-diphenylthiourea only) Yes No ──────────────────────────── ──────
【0046】(2)含イオウ化合物 Aは、ジエチルジチオ
カルバミン酸ナトリウム三水和物、X=1は一定; 表 7 ───────────────────────────────── 含イオウ化合物 B(Y=5) 浴の濁り 銀の置換 ───────────────────────────────── 1−アセチル−2−チオ尿素 無 無 塩酸ベンジルイソチオ尿素 無 無 2−マロニルチオ尿素 無 無 1−ナフチルチオ尿素 無 無 トリブチルチオ尿素 無 無 (ジエチルジチオカルバミン酸ナトリウム 有 無 三水和物のみ) ─────────────────────────────────(2) Sulfur-containing compound A is sodium diethyldithiocarbamate trihydrate, X = 1 is constant; Table 7 ────────────────────── ──────────── Sulfur-containing compound B (Y = 5) Bath turbidity Silver substitution ─────────────────────── ────────── 1-Acetyl-2-thiourea No No benzylisothiourea hydrochloride No No 2-malonylthiourea No No 1-naphthylthiourea No No Tributylthiourea No No (sodium diethyldithiocarbamate Yes Non-trihydrate only) ─────────────────────────────────
【0047】試 験 例 3 実施例1〜6で得られためっき浴を使用し、下記の条件
で30mm×10mmの銅板にめっきを行った。Test Example 3 Using the plating baths obtained in Examples 1 to 6, a 30 mm × 10 mm copper plate was plated under the following conditions.
【0048】( めっき条件 ) 陰極電流密度 4A/dm2 浴 温 25℃ 撹 拌 ゆるやかなスターラー撹拌 膜 圧 5μm(Plating conditions) Cathode current density 4 A / dm 2 bath temperature 25 ° C. agitation gentle stirrer agitation membrane pressure 5 μm
【0049】実施例1〜6のめっき浴を使用して加工し
ためっき済み銅板は、どれも均一で微細な結晶を持つめ
っき皮膜を有するものであった。The plated copper plates processed using the plating baths of Examples 1 to 6 all had a plating film having uniform and fine crystals.
【0050】[0050]
【発明の効果】本発明の銀および銀合金めっき浴により
得られる銀および銀合金被膜は、従来のシアン化物系め
っき浴で得られる銀あるいは銀合金めっき皮膜と同等の
緻密性を有するものである。 そして、本発明の銀およ
び銀合金めっき浴は、人体に悪影響を及ぼすシアン系化
合物を含まないため、安全性や公害防止の面から有利な
ものである。 以 上The silver and silver alloy coatings obtained by the silver and silver alloy plating baths of the present invention have the same degree of compactness as the silver or silver alloy plating coatings obtained by conventional cyanide-based plating baths. . Since the silver and silver alloy plating bath of the present invention does not contain a cyanide compound that adversely affects the human body, it is advantageous in terms of safety and pollution prevention. that's all
───────────────────────────────────────────────────── フロントページの続き (72)発明者 矢田 佳彦 神奈川県藤沢市善行坂1−1−6 荏原ユ ージライト株式会社中央研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshihiko Yada 1-1-6 Yoshiyukizaka, Fujisawa City, Kanagawa Prefecture
Claims (5)
銀めっき浴。1. One or more of the following three components (a) to (c) (a) Ag + ion (b) sulfur-containing compound (c) nonionic surfactant, and cyan compound A silver plating bath characterized by the absence thereof.
Bi3+からなる群から選ばれた金属イオンの1種または
それ以上 を含有し、シアン系化合物を含まないことを特徴とする
銀合金めっき浴。2. One or more of the following four components (a) to (d) (a) Ag + ion (b) sulfur-containing compound (c) nonionic surfactant (d) Sn 2+ , Cu 2 A silver alloy plating bath containing one or more metal ions selected from the group consisting of + , In 3+ , Tl + , Zn 2+ and Bi 3+ and containing no cyanide compound. .
チアゾール系化合物、スルフェンアミド系化合物、チウ
ラム系化合物、ジチオカルバミン酸塩系化合物、ビスフ
ェノール系化合物、ベンツイミダゾール系化合物および
有機チオ酸系化合物からなる群より選ばれるものである
請求項第1項または第2項記載のめっき浴。3. The sulfur-containing compound is a thiourea compound,
The compound selected from the group consisting of thiazole compounds, sulfenamide compounds, thiuram compounds, dithiocarbamate compounds, bisphenol compounds, benzimidazole compounds and organic thioacid compounds. The plating bath according to item 2.
酸イオン又はアルカノールスルホン酸イオンを含有する
請求項第1項または第2項記載のめっき浴。4. The plating bath according to claim 1, further containing at least one kind of alkane sulfonate ion or alkanol sulfonate ion.
(4) 【化1】 [式中、R1は、炭素数8〜22の脂肪族アルコール、
炭素数1〜25のアルキル基で置換されたフェノール、
炭素数1〜25のアルキルで置換されたβ−ナフトー
ル、炭素数1〜25のアルコキシル化リン酸、炭素数8
〜22の脂肪酸でエステル化したソルビタンもしくはス
チレン化フェノール(そのフェノール核の水素は炭素数
1〜4のアルキル基またはフェニル基で置換されてもよ
い)からそれらの水酸基の水素原子を除いて得られる残
基または水素原子を示し、R2は炭素数8〜18のアル
キル基を、R3およびR4は水素原子または炭素数1〜5
のアルキル基を示し、Aは−CH2CH2O−を、Bは−
CH2CH(CH3)O−を示し、m1およびn1は0〜3
0の整数、m2、n2、m3およびn3は0〜40の整数、
m4およびn4は0〜20の整数をそれぞれ示す。 但
し、m1とn1、m2とn2、m3とn3およびm4とn4がそ
れぞれ同時に0となることはなく、m1〜m4およびn1
〜n4は、置換基における総数を意味し、AとBの存在
位置は限定されないものとする]で表わされるものの何
れかである請求項第1項または第2項記載のめっき浴。5. The nonionic surfactant is represented by the following formula (1):
(4) [In the formula, R 1 is an aliphatic alcohol having 8 to 22 carbon atoms,
A phenol substituted with an alkyl group having 1 to 25 carbon atoms,
Β-naphthol substituted with alkyl having 1 to 25 carbons, alkoxylated phosphoric acid having 1 to 25 carbons, 8 carbons
Obtained by removing hydrogen atoms of hydroxyl groups from sorbitan or styrenated phenol esterified with ~ 22 fatty acid (the hydrogen of the phenol nucleus may be substituted with an alkyl group having 1 to 4 carbon atoms or a phenyl group) Represents a residue or a hydrogen atom, R 2 is an alkyl group having 8 to 18 carbon atoms, R 3 and R 4 are hydrogen atoms or 1 to 5 carbon atoms
Represents an alkyl group of, A is —CH 2 CH 2 O—, and B is —
CH 2 CH (CH 3 ) O—, wherein m 1 and n 1 are 0 to 3
An integer of 0, m 2 , n 2 , m 3 and n 3 are integers of 0 to 40,
m 4 and n 4 each represent an integer of 0-20. However, m 1 and n 1 , m 2 and n 2 , m 3 and n 3 and m 4 and n 4 do not become 0 at the same time, and m 1 to m 4 and n 1
To n 4 mean the total number of substituents, and the positions where A and B are present are not limited], and the plating bath according to claim 1 or 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7319740A JP3012182B2 (en) | 1995-11-15 | 1995-11-15 | Silver and silver alloy plating bath |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7319740A JP3012182B2 (en) | 1995-11-15 | 1995-11-15 | Silver and silver alloy plating bath |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09143786A true JPH09143786A (en) | 1997-06-03 |
JP3012182B2 JP3012182B2 (en) | 2000-02-21 |
Family
ID=18113653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7319740A Expired - Lifetime JP3012182B2 (en) | 1995-11-15 | 1995-11-15 | Silver and silver alloy plating bath |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3012182B2 (en) |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001164396A (en) * | 1999-09-27 | 2001-06-19 | Ishihara Chem Co Ltd | Tin-copper-containing alloy plating bath, tin-copper- containing alloy plating method and article formed with tin-copper-containing alloy plating film |
JP2002124267A (en) * | 2000-10-16 | 2002-04-26 | Toyota Motor Corp | Manufacturing method for separator of fuel cell with high-polymer electrolyte |
JP2002356783A (en) * | 2001-05-30 | 2002-12-13 | Ishihara Chem Co Ltd | Electroless silver plating bath |
JP2003533597A (en) * | 2000-05-18 | 2003-11-11 | コラス・アルミニウム・バルツプロドウクテ・ゲーエムベーハー | Manufacturing method of aluminum products |
JP2003535222A (en) * | 2000-05-30 | 2003-11-25 | デーエル.−イーエヌゲー.マックス シュレッター ゲーエムベーハー ウント ツェーオー.カーゲー | Electrolyte and method for electrodepositing a tin-silver alloy layer |
WO2004011698A1 (en) * | 2002-07-25 | 2004-02-05 | Shinryo Electronics Co., Ltd. | Tin-silver-copper plating solution, plating film containing the same, and method for forming the plating film |
WO2004001101A3 (en) * | 2002-06-24 | 2004-03-18 | Milano Politecnico | Electrolytic bath for the electrodeposition of noble metals and their alloys |
US7122108B2 (en) | 2001-10-24 | 2006-10-17 | Shipley Company, L.L.C. | Tin-silver electrolyte |
US7151049B2 (en) | 2003-04-07 | 2006-12-19 | Rohm And Haas Electronic Materials Llc | Electroplating compositions and methods |
US7273540B2 (en) | 2002-07-25 | 2007-09-25 | Shinryo Electronics Co., Ltd. | Tin-silver-copper plating solution, plating film containing the same, and method for forming the plating film |
WO2008007469A1 (en) * | 2006-07-13 | 2008-01-17 | Central Japan Railway Company | Coating fluid, conductive thin film formed from coating fluid, and method of forming the same |
JP2009535661A (en) * | 2006-04-29 | 2009-10-01 | インクテック カンパニー リミテッド | Reflective film coating liquid composition containing organic silver complex compound and method for producing reflective film using the same |
US7628903B1 (en) | 2000-05-02 | 2009-12-08 | Ishihara Chemical Co., Ltd. | Silver and silver alloy plating bath |
JP2010265491A (en) * | 2009-05-12 | 2010-11-25 | Ishihara Chem Co Ltd | Bath for tin or tin-alloy plating, and barrel-plating process using the plating bath |
JP2012092434A (en) * | 2010-09-21 | 2012-05-17 | Rohm & Haas Electronic Materials Llc | Cyanide-free silver electroplating solutions |
WO2013001673A1 (en) * | 2011-06-29 | 2013-01-03 | Jx日鉱日石金属株式会社 | Laminate structure provided with silver alloy layer having oxide layer |
JP2013093228A (en) * | 2011-10-26 | 2013-05-16 | Fujikura Ltd | Connector and manufacturing method therefor, and plating method of silver |
US20130206602A1 (en) * | 2012-02-09 | 2013-08-15 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
US8980077B2 (en) | 2012-03-30 | 2015-03-17 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
JP2018012889A (en) * | 2016-07-18 | 2018-01-25 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | Indium electroplating composition containing 2-imidazolidinethione compound, and method for electroplating indium |
EP3816326A1 (en) * | 2019-10-17 | 2021-05-05 | Rohm and Haas Electronic Materials LLC | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
US20210172082A1 (en) * | 2019-12-10 | 2021-06-10 | Rohm And Haas Electronic Materials Llc | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
JP6916971B1 (en) * | 2020-09-15 | 2021-08-11 | Dowaメタルテック株式会社 | Silver plating material and its manufacturing method |
CN115125591A (en) * | 2021-03-29 | 2022-09-30 | 罗门哈斯电子材料有限责任公司 | Silver electroplating compositions and methods for electroplating silver with low coefficient of friction |
-
1995
- 1995-11-15 JP JP7319740A patent/JP3012182B2/en not_active Expired - Lifetime
Cited By (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100671459B1 (en) * | 1999-09-27 | 2007-01-18 | 이시하라 야쿠힌 가부시끼가이샤 | Plating bath and method of alloy including Sn-Cu and Articles coated by plating of alloy including Sn-Cu |
JP2001164396A (en) * | 1999-09-27 | 2001-06-19 | Ishihara Chem Co Ltd | Tin-copper-containing alloy plating bath, tin-copper- containing alloy plating method and article formed with tin-copper-containing alloy plating film |
US6607653B1 (en) | 1999-09-27 | 2003-08-19 | Daiwa Fine Chemicals Co., Ltd. | Plating bath and process for depositing alloy containing tin and copper |
US7938948B2 (en) | 2000-05-02 | 2011-05-10 | Ishihara Chemical Co., Ltd. | Silver and silver alloy plating bath |
US7628903B1 (en) | 2000-05-02 | 2009-12-08 | Ishihara Chemical Co., Ltd. | Silver and silver alloy plating bath |
JP2003533597A (en) * | 2000-05-18 | 2003-11-11 | コラス・アルミニウム・バルツプロドウクテ・ゲーエムベーハー | Manufacturing method of aluminum products |
JP2003535222A (en) * | 2000-05-30 | 2003-11-25 | デーエル.−イーエヌゲー.マックス シュレッター ゲーエムベーハー ウント ツェーオー.カーゲー | Electrolyte and method for electrodepositing a tin-silver alloy layer |
JP2002124267A (en) * | 2000-10-16 | 2002-04-26 | Toyota Motor Corp | Manufacturing method for separator of fuel cell with high-polymer electrolyte |
JP4660806B2 (en) * | 2001-05-30 | 2011-03-30 | 石原薬品株式会社 | Electroless silver plating bath |
JP2002356783A (en) * | 2001-05-30 | 2002-12-13 | Ishihara Chem Co Ltd | Electroless silver plating bath |
US7122108B2 (en) | 2001-10-24 | 2006-10-17 | Shipley Company, L.L.C. | Tin-silver electrolyte |
WO2004001101A3 (en) * | 2002-06-24 | 2004-03-18 | Milano Politecnico | Electrolytic bath for the electrodeposition of noble metals and their alloys |
WO2004011698A1 (en) * | 2002-07-25 | 2004-02-05 | Shinryo Electronics Co., Ltd. | Tin-silver-copper plating solution, plating film containing the same, and method for forming the plating film |
US7273540B2 (en) | 2002-07-25 | 2007-09-25 | Shinryo Electronics Co., Ltd. | Tin-silver-copper plating solution, plating film containing the same, and method for forming the plating film |
US7151049B2 (en) | 2003-04-07 | 2006-12-19 | Rohm And Haas Electronic Materials Llc | Electroplating compositions and methods |
JP2009535661A (en) * | 2006-04-29 | 2009-10-01 | インクテック カンパニー リミテッド | Reflective film coating liquid composition containing organic silver complex compound and method for producing reflective film using the same |
JPWO2008007469A1 (en) * | 2006-07-13 | 2009-12-10 | 東海旅客鉄道株式会社 | Coating liquid, conductive thin film formed using coating liquid, and method for forming the same |
JP5226512B2 (en) * | 2006-07-13 | 2013-07-03 | 東海旅客鉄道株式会社 | Coating liquid, conductive thin film formed using coating liquid, and method for forming the same |
US8003219B2 (en) | 2006-07-13 | 2011-08-23 | Central Japan Railway Company | Coating liquid, conductive film formed by coating liquid, and forming method thereof |
WO2008007469A1 (en) * | 2006-07-13 | 2008-01-17 | Central Japan Railway Company | Coating fluid, conductive thin film formed from coating fluid, and method of forming the same |
JP2010265491A (en) * | 2009-05-12 | 2010-11-25 | Ishihara Chem Co Ltd | Bath for tin or tin-alloy plating, and barrel-plating process using the plating bath |
JP2012092434A (en) * | 2010-09-21 | 2012-05-17 | Rohm & Haas Electronic Materials Llc | Cyanide-free silver electroplating solutions |
WO2013001673A1 (en) * | 2011-06-29 | 2013-01-03 | Jx日鉱日石金属株式会社 | Laminate structure provided with silver alloy layer having oxide layer |
JP2013093228A (en) * | 2011-10-26 | 2013-05-16 | Fujikura Ltd | Connector and manufacturing method therefor, and plating method of silver |
KR20130092515A (en) * | 2012-02-09 | 2013-08-20 | 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. | Plating bath and method |
JP2013167019A (en) * | 2012-02-09 | 2013-08-29 | Rohm & Haas Electronic Materials Llc | Plating bath and method |
CN103361685A (en) * | 2012-02-09 | 2013-10-23 | 罗门哈斯电子材料有限公司 | Plating bath and electroplating method |
US8888984B2 (en) | 2012-02-09 | 2014-11-18 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
TWI467066B (en) * | 2012-02-09 | 2015-01-01 | 羅門哈斯電子材料有限公司 | Plating bath and method |
EP2626449A3 (en) * | 2012-02-09 | 2017-08-16 | Rohm and Haas Electronic Materials LLC | Plating bath and method |
US20130206602A1 (en) * | 2012-02-09 | 2013-08-15 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
US8980077B2 (en) | 2012-03-30 | 2015-03-17 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
JP2018012889A (en) * | 2016-07-18 | 2018-01-25 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | Indium electroplating composition containing 2-imidazolidinethione compound, and method for electroplating indium |
EP4098778A1 (en) * | 2019-10-17 | 2022-12-07 | Rohm and Haas Electronic Materials LLC | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
EP3816326A1 (en) * | 2019-10-17 | 2021-05-05 | Rohm and Haas Electronic Materials LLC | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
US20210172082A1 (en) * | 2019-12-10 | 2021-06-10 | Rohm And Haas Electronic Materials Llc | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
EP3835459A1 (en) * | 2019-12-10 | 2021-06-16 | Rohm and Haas Electronic Materials LLC | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
JP2021091959A (en) * | 2019-12-10 | 2021-06-17 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | Acidic aqueous two-component silver-bismuth alloy electroplating composition and method |
CN112941578A (en) * | 2019-12-10 | 2021-06-11 | 罗门哈斯电子材料有限责任公司 | Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods |
JP6916971B1 (en) * | 2020-09-15 | 2021-08-11 | Dowaメタルテック株式会社 | Silver plating material and its manufacturing method |
WO2022059237A1 (en) * | 2020-09-15 | 2022-03-24 | Dowaメタルテック株式会社 | Silver-plated material and method for producing same |
JP2022048977A (en) * | 2020-09-15 | 2022-03-28 | Dowaメタルテック株式会社 | Silver-plated material and method for producing the same |
JP2022048959A (en) * | 2020-09-15 | 2022-03-28 | Dowaメタルテック株式会社 | Silver-plated material and method for producing the same |
JP2022159396A (en) * | 2020-09-15 | 2022-10-17 | Dowaメタルテック株式会社 | Silver-plated material and method for producing the same |
CN115125591A (en) * | 2021-03-29 | 2022-09-30 | 罗门哈斯电子材料有限责任公司 | Silver electroplating compositions and methods for electroplating silver with low coefficient of friction |
JP2022153298A (en) * | 2021-03-29 | 2022-10-12 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシー | Silver electroplating composition and method for electrically plating silver with low friction coefficient |
Also Published As
Publication number | Publication date |
---|---|
JP3012182B2 (en) | 2000-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3012182B2 (en) | Silver and silver alloy plating bath | |
JP4559019B2 (en) | Plating bath and method for depositing a metal layer on a substrate | |
US6911068B2 (en) | Plating bath and method for depositing a metal layer on a substrate | |
US8262895B2 (en) | Plating bath and method | |
JP5574912B2 (en) | Tin plating solution | |
US7179362B2 (en) | Electrolyte and method for depositing tin-copper alloy layers | |
US4473448A (en) | Electrodeposition of chromium | |
DE10026680C1 (en) | Electrolyte and method for depositing tin-silver alloy layers and use of the electrolyte | |
JP3365866B2 (en) | Non-cyanide precious metal plating bath | |
WO2012073816A1 (en) | Method for maintaining etching liquid and system therefor | |
US6183619B1 (en) | Metal alloy sulfonic acid electroplating baths | |
JP3274766B2 (en) | Low melting tin alloy plating bath | |
US6458264B1 (en) | Sn-Cu alloy plating bath | |
JP3632499B2 (en) | Tin-silver alloy electroplating bath | |
TWI648437B (en) | SnAg alloy plating solution | |
US20050077186A1 (en) | Electrolysis bath for electrodepositing silver-tin alloys | |
KR20070120592A (en) | Electrolyte and method for depositing tin bismuth alloy layers | |
JP4524483B2 (en) | Tin or tin alloy plating method | |
KR20170035783A (en) | Acid copper electroplating bath and method for electroplating low internal stress and good ductility copper deposits | |
US4496439A (en) | Acidic zinc-plating bath | |
JP4605359B2 (en) | Lead-free acid tin-bismuth alloy electroplating bath | |
JP3920983B2 (en) | Silver or silver alloy acidic electroplating bath | |
JP3645955B2 (en) | Tin-silver alloy acid plating bath | |
JPS61235592A (en) | Improved electroplating method | |
CZ20011633A3 (en) | Aqueous solution for electroplating with tin and zinc alloys |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071210 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081210 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081210 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091210 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091210 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101210 Year of fee payment: 11 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101210 Year of fee payment: 11 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111210 Year of fee payment: 12 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111210 Year of fee payment: 12 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121210 Year of fee payment: 13 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131210 Year of fee payment: 14 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131210 Year of fee payment: 14 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131210 Year of fee payment: 14 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |