JPH09138167A - Method and instrument for surface temperature measurement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure precise surface temperature by providing a surface temperature measuring jig, which is formed in such a way that the metal whose melting point is lower than that of a solid is thinly formed on the solid surface, and a thermometer and a hydrogen detector, which are provided contacting or near the jig, so that the metal detects eutectic temperature with the solid, acting as an object, at heating, and the hydrogen released when reaching melting point is detected. SOLUTION: A solid surface 1 is heated, so that, when metals 2a and 2b reach eutectic temperature or melting point with the solid 1, the hydrogen contained in the metal is released as gas. The hydrogen gas is detected with a hydrogen detector 4, and the temperature is recorded with a thermometer 3. The value is corrected based on the known eutectic temperature and melting point, known from a well known phase chart, etc., for measuring the solid surface with high precision.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid surface temperature measuring device and a measuring method thereof.

[0002]

2. Description of the Related Art Conventionally, in the measurement of a surface, methods such as (1) bringing a thermometer into contact with the surface, (2) embedding the thermometer in the vicinity of the surface, and (3) using a radiation thermometer are generally used. Met.

In the so-called contact method of (1) and (2), the contact method and the embedding method are carefully devised so that the measurement with good reproducibility can be performed. However, the temperature obtained there reflects only the surface temperature, but only indicates the temperature of the thermometer itself. In particular, in the contact method of (1), the temperature indicated by the thermometer is measured only when the solid surface is in equilibrium with the ambient atmospheric temperature, because the temperature measuring part is in contact with the surface only at one point and most of the temperature measuring part exists in the air. Was not guaranteed to be equal to the surface temperature. Even in the embedding method of (2), when there is a temperature gradient between the surface and the inside, the temperature measuring unit has a certain size regardless of the type of thermometer, so it is also different from the true surface temperature. Will be lost.

The radiation thermometer of (3) is suitable for measuring the surface temperature, but when measuring infrared light emitted from the surface, a window material (sodium chloride, potassium bromide, etc.) that transmits infrared light is used. Changes over time, the measurement temperature range is limited to a relatively high temperature of several hundreds of degrees Celsius or more, and when the substance to be measured is transparent to infrared light, it is affected by the temperature of a nearby heating element. However, when the surface condition, shape, flatness, etc. change with increasing temperature, the emissivity is different and causes a measurement error.

As described above, according to the conventional measurement method, the value detected by the thermometer becomes an apparent value, and the temperature at which various surface reactions including the film formation temperature occur can be accurately determined. Was difficult.

For example, it is said that desorption of hydrogen terminating the silicon (111) surface occurs at about 400 to 500 ° C. and crystallization of amorphous silicon occurs at about 500 to 600 ° C.
It was not known exactly how many times it occurred, or whether the reaction temperature was different depending on the surface properties at that time.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to calibrate a thermometer based on known temperatures such as eutectic temperature and melting point to measure an accurate surface temperature.

[0008]

According to the present invention, there is provided a surface temperature measuring jig in which a metal having a melting point lower than that of the solid is thinly formed on a target solid surface, and a jig for contacting with or near the surface of the jig. A surface temperature measuring system consisting of a thermometer and a hydrogen detector is configured to detect hydrogen that is released at the same time when the metal reaches the eutectic temperature of the target solid during heating or the melting point. It is characterized by Here, the thickness of the metal formation is such that the temperature changes sufficiently quickly to follow the solid surface temperature, and is usually several n.
The thickness is from m to several μm.

That is, it comprises a solid to be measured, a thermometer, a hydrogen detector and a heating means, and the solid to be measured has a metal whose melting point is lower than that of the solid or a eutectic temperature with the solid. It is characterized by having one or two or more kinds of metal films.

It is preferable that the film has a thickness of several nm to several μm and that the thermometer can measure from room temperature or lower to the melting point of the metal or higher because the accuracy of surface temperature measurement is improved.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As a result of earnest research, the present inventor has found that when various thin films containing a metal formed on the surface of a solid are heated, their melting point or reaction temperature with a substrate causes hydrogen. I found a phenomenon that emits. Even in a vacuum, which is generally an atmosphere for forming a thin film, hydrogen exists to some extent as hydrogen itself or as water, and is taken into the film spontaneously during the thin film formation except for an extremely high vacuum, and the film is heated. It is presumed that the hydrogen is released into the atmosphere when undergoes a phase change.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a conceptual diagram of a surface temperature measuring system. 1 is a target solid, 2a and 2b are metal thin films of different types formed on the solid surface, 3 is a thermometer, and 4 is a hydrogen detector. is there. When the surface of the solid 1 is heated, when the metal of 2a or 2b reaches the eutectic temperature or the melting point with the solid 1, hydrogen contained in the metal is released as a gas. The hydrogen gas is detected by the hydrogen detector 4 and the temperature is recorded by the thermometer 3
The value is calibrated from the known eutectic temperature and melting point that can be known from the phase diagram which is a known fact. In FIG. 1, two metal thin films are used.
Although the example in which the types are formed is shown, as a matter of course, one type or three or more types may be used. The metal does not necessarily have to exhibit a eutectic with the solid. Although the example in which the thermometer is brought into contact with the surface of the solid is shown here, it may be placed near the solid or a radiation thermometer may be used.

FIG. 2 shows the melting points of some metals and the eutectic temperature with silicon. The melting point is in parentheses, and the eutectic temperature of metal and silicon is in brackets. When the solid is silicon, for example, when a metal thin film shown here is formed on the surface, standard temperatures can be obtained at several points from around 200 ° C to a point of 1000 ° C or higher.

FIG. 3 shows a silicon plate on which a thermocouple and an atmospheric pressure ionization mass spectrometer are used as a thermometer and a hydrogen detector in an argon gas atmosphere of 1 atm under the arrangement as shown in FIG. 2 is a graph of the amount of hydrogen released and the temperature when an aluminum thin film and a gold thin film are formed to a thickness of 200 nm each as a metal thin film by a sputtering method. The thermocouple was calibrated by the respective eutectic temperature and melting point. The starting temperature of hydrogen release was set to the eutectic temperature or the melting point.

In FIG. 3, 31 is a eutectic temperature of gold and silicon, 32 is a eutectic temperature of aluminum and silicon, and 33 is a eutectic temperature.
Is the melting point of aluminum, and 34 is the melting point of gold. As can be seen from FIG. 3, the amount of released hydrogen begins to increase in each 31, 32, 33, 34.

Here, an example of gold and aluminum on silicon is shown, but silicon and other metals, or various solids and metals other than silicon can be combined. Also, when the atmosphere is evacuated, the surface temperature can be similarly determined if the state diagram in the atmosphere is known.

[0017]

As described above, when the surface temperature measuring system and the measuring method of the present invention are used, the surface temperature can be known from the known temperatures such as the eutectic temperature and the melting point by the amount of released hydrogen. The temperature of the solid surface can be measured with high accuracy by correcting the thermometer.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram of a surface temperature measuring system of the present invention.

FIG. 2 is a diagram showing melting points of several kinds of metals and eutectic temperatures with silicon.

FIG. 3 is a graph showing the relationship between the amount of released hydrogen and temperature.

[Explanation of symbols]

 1 target solid, 2a, 2b metal thin film formed on solid surface, 3 thermometer, 4 hydrogen detector, 31 eutectic temperature of gold and silicon, 32 eutectic temperature of aluminum and silicon, 33 melting point of aluminum, 34 Melting point of gold.

Claims (2)

[Claims] 1. A solid to be measured, a thermometer, a hydrogen detector and a heating means, wherein the solid to be measured has a metal having a melting point lower than that of the solid and / or a eutectic with the solid on the surface thereof. A surface temperature measuring device having a film of one or more kinds of metals whose temperatures are known. 2. The surface temperature measuring device according to claim 1, wherein the temperature of the solid to be measured is raised to detect hydrogen released at a eutectic temperature and / or a melting point of the metal, and the hydrogen. Calibrating the indicated value of the thermometer at the time of release with the eutectic temperature and / or the melting point of the metal detected by the release of hydrogen.