JPH09136046A - Gas blow-off nozzle and liquid blowing-off device of base plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformly blow-off gas in the form of belt to improve treatment capacity to flow off liquid of a base plate. SOLUTION: A gas blow-off nozzle 4 for blowing gas against a pricipal surface of a base plate comprises an opening member 44 with a slit-shaped opening to allow the gas to pass therethrough and a nozzle body 41, which is provided to cover the member 44, leaving the opening uncovered, and the opening member 44 is made of metal and the nozzle body 41 is made of synthetic resin. The nozzle body 41 is formed from a first nozzle body 42 and a second nozzle body 43 and the opening member 44 is formed from a first opening member 45 and a second opening member 46.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is directed to a glass substrate for a liquid crystal display, a semiconductor wafer substrate, and the like, and has a main surface (either one of the front surface and the back surface or both surfaces) to which a predetermined processing liquid is attached. ) To a gas injection nozzle for injecting a gas toward the nozzle, and a substrate drainer using the gas injection nozzle.

[0002]

2. Description of the Related Art Conventionally, for example, when manufacturing a liquid crystal display, a plate-shaped glass substrate is subjected to a so-called wet surface treatment in which treatment liquids of different kinds are sequentially supplied to its main surface.
The wet surface treatment is performed by supplying an etching liquid to a substrate having a metal film formed on its main surface, or by supplying a cleaning liquid such as pure water to the main surface after the treatment to remove the adhered etching liquid. There is a cleaning process to remove it.

Then, a processing liquid (such as the above-mentioned etching liquid or cleaning liquid) is applied to the substrate subjected to each of the above-mentioned wet surface treatments.
However, such a residual liquid needs to be removed (drained) before the next wet surface treatment. Therefore, conventionally, a liquid draining device is provided at an appropriate place in a series of wet surface treatment steps, and immediately after one wet surface treatment is performed, the substrate is subjected to the liquid draining treatment by this liquid draining device. There is.

As such a liquid draining device, while the substrate having the treatment liquid attached thereto is conveyed in a predetermined direction with the main surface opened, gas is jetted in a band shape from the gas jet nozzle toward the main surface. In general, the treatment liquid is blown off from the main surface to be removed.

The gas injection nozzle described in Japanese Utility Model Laid-Open No. 3-79852 is known. The gas injection nozzle described in this publication is formed by stacking two plates made of synthetic resin via a spacer and screwing them together. A slit-shaped opening is formed over the entire length in the longitudinal direction. The width of this opening is 0.1-1
It is set to a very thin value of mm.

[0006]

By the way, the above-mentioned gas injection nozzle of the related art is formed of a synthetic resin having poor dimensional stability such as polyvinyl chloride (PVC), so that there is a limit in processing accuracy, and the gas injection is not possible. There is a problem that it is very difficult to set the opening width dimension to 0.1 to 1 mm over the entire length of the nozzle. Therefore, the opening width adjusting means using an adjusting screw is applied to the nozzle body, and the opening width dimension is adjusted by changing the screwing amount of the adjusting screw, but even if such an adjusting screw is used, There is the inconvenience that it is not possible to achieve a uniform opening width dimension due to the deflection of the plate between one adjusting screw and the other adjusting screw.

In recent years, the liquid crystal display has been increased in size,
As a result, there is a very large substrate having a substrate size of about 1 m square, so that the gas injection nozzle for such a large substrate becomes long,
It is becoming more and more difficult to make the opening width size uniform over the entire length in the longitudinal direction.

In the conventional liquid draining device, since the gas injection nozzle made of synthetic resin as described above is used as a whole, the gas injection state is caused by the nonuniform opening width dimension in the longitudinal direction. However, the treatment liquid adhering to the substrate cannot be reliably removed by one gas jet nozzle, and therefore a plurality of gas jet nozzles are arranged side by side in the substrate transport direction.

However, if a plurality of gas injection nozzles are provided, the apparatus structure becomes complicated and the installation space for the plurality of nozzles must be secured, which causes an inconvenience that the equipment cost increases. In order to eliminate this inconvenience, it is conceivable to increase the injection pressure from the gas injection nozzle and thereby reduce the number of nozzles. However, if the injection pressure is increased, the nozzle body is a synthetic resin product, so the slit-shaped A new problem arises that the opening portion is deformed and spreads, which further promotes the non-uniformity of the jet air flow.

Therefore, in order to prevent the above deformation, it is conceivable that the nozzle body itself is entirely made of metal. However, for example, since the acidic treatment liquid adheres to the substrate after the etching treatment, There is a problem that the nozzle body is easily corroded under the influence of this acidic treatment liquid.

The present invention has been made in order to solve the above-mentioned problems, and it is possible to uniformly inject a belt-like gas, thereby improving the liquid draining processing ability of the substrate. An object is to provide a gas injection nozzle.

Another object of the present invention is to provide a substrate draining device which can surely drain the substrate in a small installation space, thereby contributing to a reduction in equipment cost.

[0013]

According to the first aspect of the present invention,
A gas injection nozzle for injecting gas toward the main surface of a substrate, comprising an opening member having a slit-shaped opening for passing the gas, and a nozzle body supporting the opening member, wherein the opening member is The nozzle body is made of metal, and the nozzle body is made of synthetic resin.

According to the present invention, since the opening member is made of metal, the dimensional accuracy is better than that made of synthetic resin, and it is easy to obtain a desired opening width dimension. Moreover, since the opening member is covered with the nozzle main body in a state where the opening is secured, and the nozzle main body plays a role of the reinforcing material, it is possible to reduce the material forming the opening member. Further, since the surface of the opening member is covered by the nozzle body, the surface is prevented from being corroded even in a corrosive atmosphere.

According to a second aspect of the invention, in the first aspect of the invention, the nozzle body has an opening width adjusting means for adjusting the opening width of the opening member over the entire length in the longitudinal direction. It is characterized by.

According to the present invention, even if the opening width dimension of the opening member is distorted during manufacture, the opening width dimension is adjusted by operating the opening width adjusting means after mounting the opening member on the nozzle body. It Since the opening member is made of metal, the above-mentioned adjustment ensures that the opening has a desired width.

According to a third aspect of the present invention, in a substrate drainer for transporting a substrate to which a treatment liquid is attached and spraying a gas onto the main surface to remove the treatment liquid, the main surface of the substrate is not covered. And a gas injection nozzle according to claim 1 or 2.

According to the present invention, the treatment liquid adhering to the substrate is blown off by blowing the gas from the gas jet nozzle onto the main surface of the substrate being conveyed by the conveying means, whereby the substrate is drained. It will be done.

Since the injection nozzle according to claim 1 or 2 is adopted, the opening width dimension of the opening member is uniform over the entire length, whereby the opening member has a longitudinal direction. A uniform gas flow will be injected over. Therefore, it is not necessary to arrange a plurality of gas injection nozzles in series in order to compensate for the case where the injection flow is non-uniform as in the conventional case, and one gas is provided for the main surface of the substrate. It becomes possible to cope with it with the injection nozzle.

According to a fourth aspect of the present invention, in the third aspect of the invention, the injection pressure when the gas injection nozzle is on standby is greater than the injection pressure when the gas injection nozzle is blowing the gas onto the substrate. It is characterized in that it has control means for controlling so as to reduce the size.

According to the present invention, when the substrate is not present at the gas injection position, a small amount of gas is injected from the gas injection nozzle by the control of the control means, so that the amount of gas for injection can be saved. The power cost for injection is also saved. In addition, since the gas is always flowing in the pipeline reaching the gas injection nozzle, when controlling to inject the gas to the substrate that has arrived from the state where the gas injection is completely stopped. In comparison, the jet state of the gas is always stable, and the turbulence of the air flow is prevented from adversely affecting the substrate.

Further, the acidic treatment liquid supplied to the substrate on the upstream side is carried into the liquid draining device along with the substrate, and the inside of the device is in an acidic atmosphere, but the gas injection nozzle stands by. Since the gas is being jetted even when the gas jet nozzle is present, the acidic atmosphere does not enter the gas jet nozzle and corrosion inside the gas jet nozzle is prevented.

[0023]

1 is a partially cutaway perspective view showing an embodiment of a liquid draining device 1 for a substrate B according to the present invention. As shown in this figure, the liquid draining device 1 includes a box-shaped liquid draining tank 2, a conveying means 3 provided inside the liquid draining tank 2, and upper and lower portions provided so as to cross the conveying means 3. It is formed by including a pair of gas injection nozzles 4. The substrate B introduced into the liquid draining tank 2 is transported by the transporting means 3 and at the same time, the treatment liquid adhered in the previous step is blown off by the air stream jetted from the gas jet nozzle 4.
Thus, the substrate B is drained.

An etching device is provided on the upstream side of the liquid draining tank 2. A discharge pipe 3 for discharging an acidic etching liquid from a nozzle 35 is provided in the etching apparatus.
A plurality of 4 are provided side by side. Substrate B is this discharge pipe 3
Since the etching liquid is sprayed from 4 into the drainage tank 2, the inside of the drainage tank 2 is in an acidic atmosphere.

A substrate receiving port 22 for receiving the substrate B in the liquid draining tank 2 is formed in an upstream wall 21 provided on the upstream side (left side in FIG. 1) of the liquid draining tank 2. A substrate discharge port 24 for discharging the substrate B from the drainage tank 2 is provided on the downstream wall 23 provided on the downstream side. The substrate receiving port 22 and the substrate discharging port 24 are provided at the same height position, and the substrate B introduced from the substrate receiving port 22 into the liquid draining tank 2 is horizontally moved in the liquid draining tank 2 by the transfer means 3. Is moved straight in the direction of
It is designed to be discharged from No. 4.

Further, the liquid draining tank 2 has a constricted hopper portion 25 extending below and a drain pipe 26 provided at the bottom of the hopper portion 25. The removed processing liquid is received by the hopper portion 25 and then discharged through the drain pipe 26 to the outside of the system.

The transfer means 3 includes a pair of roller supporting bases 31 in the width direction arranged in the draining tank 2 from the upstream side to the downstream side, and a plurality of substrates sandwiched by the pair of roller supporting bases 31. A transport roller 32 for transporting B and a drive mechanism 33 for rotating the transport rollers 32 around the horizontal shaft 32a are provided. The roller support base 31 supports each of the plurality of transport rollers 32 at substantially equal intervals from the upstream side to the downstream side so as to be at the same height position as the substrate receiving port 22 and the substrate discharging port 24. In the present embodiment, the six roller rollers 32 are mounted on the roller support base 31.
Is supported.

Each of the transport rollers 32 has a flange portion 32b on both sides, and a substrate transfer wheel 32c having a diameter slightly smaller than the flange portion 32b at a portion inside the flange portion 32b. The dimension between the flange portions 32 is set to be slightly wider than the lateral width dimension of the substrate B, and the dimension between the substrate transfer wheels 32c is set to be slightly narrower than the lateral width dimension of the substrate B. As a result, the substrate B is transferred on the substrate transfer wheel 32c, and the flange 32
Side shift is prevented by b. An annular rubber roller 32d is fitted on the substrate transfer wheel 32c to prevent slippage.

The drive mechanism 33 includes a roller support base 31.
Of the drive motor 33a provided on the upstream side of the gas injection nozzle 4 and a pair of pressing rollers 33b in the width direction provided so as to be rotatable with the drive shaft 33c of the drive motor 33a (in FIG. 1). The right pressing roller 33b is omitted.), A drive gear 33d provided at the right end of the drive shaft 33c, a plurality of driven gears 33e that mesh with this drive gear 33d and the other do not mesh, and these driven gears. 33e
It is formed by including a plurality of connecting gears 33f that mesh with the.

The driven gear 33e is provided on each of the conveying rollers 32.
Is fixed concentrically with each other, and a communication gear 33f is provided between one driven gear 33e and another driven gear 33e. Therefore, when the drive motor 33a is driven, the rotation of the drive motor 33a is transmitted through the drive shaft 33c and the drive gear 33d to one driven gear 3a.
3e, the rotation of the driven gear 33e is transmitted to the next driven gear 33e via the communication gear 33f, and is similarly sequentially transmitted to other driven gears 33e.
All the transport rollers 32 rotate in the same direction, and the substrate B on the rubber roller 32d is transported.

The pressing roller 33b is set to have a diameter so that the outer peripheral surface of the pressing roller 33b comes into contact with the surface of the rectangular substrate B loosely. The rubber roller 32d immediately upstream of
The substrate B, which is sandwiched between the pressing roller 33b and the pressing roller 33b, reaches the gas injection nozzle 4 and is blown up by the air ejected from the gas injection nozzle 4 to float upward from the transport roller 32 or vibrate. Are prevented.

A pair of upper and lower gas injection nozzles 4 are provided on the downstream side in the liquid draining tank 2 so as to sandwich the transfer path of the substrate B by the transfer rollers 32. In each of these gas injection nozzles 4, each opening 40 diagonally traverses the transport path of the substrate B toward the tip side in the horizontal direction, and the jet flow of the substrate from each opening 40 is directed obliquely toward the upstream side in the vertical direction. By this, an air flow is supplied to the front and back surfaces of the substrate B passing between the upper and lower openings 40 so as to push the adhered processing liquid toward the upstream side.

In the present embodiment, the gas injection nozzle 4
The clean air is supplied to. Therefore, a clean air source 5 is arranged, and the clean air from the clean air source 5 is supplied to the upper and lower gas injection nozzles 4 through a predetermined air pipeline. A control valve 51 is provided in the air pipe, and by opening and closing the control valve 51 based on a control signal from a control device described later, supply, shutoff, and supply of air pressure to the gas injection nozzle 4 are controlled. It is possible to make adjustments.

The control valve 51 is a first control valve 51a provided in an air pipe line toward the upper gas injection nozzle 4,
And a second control valve 51b provided in an air pipeline toward the gas injection nozzle 4 below, and these control valves 51b
Air injection to the front and back of substrate B by opening and closing a and 51b,
Also, it is possible to select either one of front and back air injection.

FIG. 2 is an exploded perspective view showing an embodiment of the gas injection nozzle 4 according to the present invention. As shown in this figure, the gas injection nozzle 4 includes a nozzle body 41 made of synthetic resin.
And the metallic opening member 4 covered with the nozzle body 41.
4 is formed.

The nozzle body 41 is formed so as to be divided in the width direction with a central dividing surface extending in the longitudinal direction as a boundary, and the first nozzle body 42 is divided on the one hand and the second nozzle body 43 is formed on the other. Has been formed. In addition, the opening member 4
4 is composed of a first opening member 45 corresponding to the first nozzle body 42 and a second opening member 46 corresponding to the second nozzle body 43. Both of these opening members 45,
By stacking 46 via the spacer 47,
A gap is formed between the facing surfaces of the two opening members 45, 46, and the opening 40 (FIG. 1) of the gas injection nozzle 4 is formed by this gap.

The lower end portion of the first opening member 45 is formed in a knife edge shape with a single edge so that the surface facing the second opening member 46 is a flat surface 45a.
An inclined surface 45 is provided below the surface facing the first nozzle body 42.
b is formed. In addition, a concave groove 45c is formed in the thick portion of the flat surface 45a over the entire length in the longitudinal direction. Further, in the first opening member 45, a plurality of screw holes 45d and locking holes 45e in which screws are not screwed are alternately provided in the longitudinal direction at substantially equal intervals. When the gas injection nozzle 4 is assembled, a jack bolt (opening width adjusting means) 48a is screwed into the screw hole 45d and a locking bolt 48b longer than the jack bolt 48a is screwed into the locking hole 45e. Is inserted.

The second opening member 46 is formed of a flat metal plate whose vertical length and longitudinal length are set to be the same as those of the first opening member 45. In the second opening member 46,
A plurality of locking holes 46a corresponding to the locking holes 45e of the first opening member 45 are formed. The second opening member 4
6 has no hole corresponding to the screw hole 45d. Therefore, the tip of the jack bolt 48a screwed into the screw hole 45d comes into contact with the second opening member 46.

The first opening member 45 and the second opening member 46 described above.
A metal ring-shaped spacer 47 is interposed between and. The thickness of the spacer 47 is set to the minimum opening width dimension of the opening 40 (FIG. 1).
Therefore, when the first opening member 45 and the second opening member 46 are pressed and stacked with the spacer 47 sandwiched therebetween, the opening 40 having the minimum opening width is formed between the opening members 45 and 46. . In the present embodiment, the spacer 47 is arranged at a position corresponding to the locking hole 45e and the locking hole 46a, and the locking bolt 48b is locked by the locking hole 45e, the spacer 47 and the locking hole 46a. Is inserted into.

The first nozzle body 42 is formed as a knife-edge-shaped downward constriction, and an inclined surface 42a corresponding to the inclined surface 45b of the first opening member 45 is formed in the lower portion of the first nozzle body 42. A concave groove 42b into which the first opening member 45 is fitted is formed in the groove. The concave groove 42b has an inclined surface so that the lower portion conforms to the three-dimensional shape of the surface of the first opening member 45, and is upward in the state where the first opening member 45 is fitted in the concave groove 42b. The shape is set so that a space extending in the longitudinal direction is formed.

The first nozzle body 42 has the above-mentioned first
A plurality of through holes 42c corresponding to the screw holes 45d and the locking holes 45e of the opening member 45 are bored, and when the gas injection nozzle 4 is assembled, the jack bolts 48a and the locking bolts 48b are inserted into these through holes 42c. It is inserted alternately. Further, a thickened portion 42d that is flush with the inside is formed on the upper edge portion and both side edge portions of the first nozzle body 42, and a plurality of fastening holes 42e are formed at appropriate positions on the thickened portion 42d. Has been drilled. In this fastening hole 42e,
At the time of assembling operation of the gas injection nozzle 4, the locking bolt 4
A fastening bolt 48c having substantially the same length as 8b is inserted.

A semicircular arc groove 42f in plan view is recessed in the central top portion of the first nozzle body 42.
An arc groove 43f, which will be described later, is formed on the inner peripheral surface of the arc groove 42f.
The female screw is provided in the state of being combined with.

Similar to the first nozzle body 42, the second nozzle body 43 is formed in a downward constriction in the shape of a knife edge, and has an inclined surface 43a at the lower part of the surface thereof. In the assembled state, the lower portion of the nozzle body 41 is tapered as shown in FIG. 1, so that the substrate B carried by the carrying means 3 and the gas jet nozzle 4 do not interfere with each other. ing.

The second nozzle body 43 has a thick portion 43d which is flush with the thick portion 42d of the first nozzle body 42 on the upper and both sides of the back surface, so that the lower portion is open. The concave groove 43b surrounded by the thick portion 43d
Are formed. The recessed groove 43b has a deck portion 43g extending downward from the groove bottom and extending over the entire length in the longitudinal direction, and the second opening member 46 is mounted on the deck portion 43g. And this deck part 43
In the upper part of g, a space extending upward in the longitudinal direction with the second opening member 46 attached is formed.

Further, the second nozzle body 43 has the above-mentioned second
A plurality of screw holes 4 corresponding to the locking holes 46a of the opening member 46
3c are screwed, and when the gas injection nozzle 4 is assembled, the locking holes 45e,
The tip of the locking bolt 48b inserted into the spacer 47 and the locking hole 46a is screwed. Further, a screw hole 43e corresponding to the fastening hole 42e is formed in the thick portion 43d. The screw hole 43e is provided with a fastening hole 42e when the gas injection nozzle 4 is assembled.
The tip end portion of the locking bolt 48b inserted through is screwed to form the gas injection nozzle 4 in which the first opening member 45 is fitted.

An arcuate groove 43f corresponding to the arcuate groove 42f is recessed in the central top of the second nozzle body 43. The other half of the female screw corresponding to the arc groove 42f is provided on the inner peripheral surface of the arc groove 42f.
The nozzle main body 42 and the second nozzle main body 43 are united, and a joint member (FIG. 3) including a circular hole having an internal thread formed on the inner peripheral surface is formed in the state where the nozzle main body 41 is formed. ing.

When the gas injection nozzle 4 is assembled, the jack bolt 48a and the locking bolt 48 are attached.
A seal member 49 having an insertion hole through which either one or both of b is formed is provided between the concave groove 42b of the first nozzle body 42 and the first opening member 45, and the deck portion 43g of the second nozzle body 43. The opening member 44 is mounted between the second opening member 46 and the seal member 49, and the opening member 44 is mounted in the nozzle body 41 in a close contact state.

In this embodiment, the nozzle body 4 is
1 is made of polyvinyl chloride,
The opening member 44 and the spacer 47 are made of stainless steel that is unlikely to rust. In addition, the seal member 4
No. 9 is a fluororesin sheet that is flexible and tough, and is resistant to deterioration in an acidic atmosphere.

FIG. 3 is a perspective view of the gas injection nozzle 4 formed by assembling the respective parts shown in FIG.
Is a sectional view thereof, (a) is a sectional view taken along the line AA,
(B) is a sectional view taken along line BB. 5 is a cross-sectional view taken along the line CC of the gas injection nozzle shown in FIG. 3, where (a) is the state in which the opening of the opening member is set to the thickness dimension of the spacer, and (b) is the opening of the opening member. Shows the state of being set larger than the thickness dimension of the spacer.

When the parts shown in FIG. 2 are assembled, the gas injection nozzle 4 shown in FIG. 3 is obtained. Specifically, the three spacers 47 are attached to the first opening member 45 and the second opening member 46 in a state of corresponding to the locking holes 45e and 46a.
The opening member 44 is formed by sandwiching the opening member 44 with the opening member 44.

The opening member 44 is formed in the concave grooves 42b, 43.
After being sandwiched between the first nozzle body 42 and the second nozzle body 43 via the pair of seal members 49 in a state corresponding to the lower part of b, the fastening bolt 48c is fastened to the fastening hole 42e of the first nozzle body 42 and the seal member. 49, the tip thereof is screwed into the screw hole 43e of the second nozzle body 43, the jack bolt 48a is further inserted into the through hole 42c and the hole of the seal member 49, and the tip thereof is screwed into the screw hole 45d. While attaching the engaging bolt 48b, the through hole 42c, the hole of the seal member 49, the engaging hole 45e, the hole of the front (left) spacer 47, the engaging hole 46a and the rear seal member 49.
Through the holes, and screw the tip into the screw hole 43c.
Finally, the bolts 48a, 48b, 48c are fastened to complete the gas injection nozzle 4 as shown in FIG.

In the state in which the gas injection nozzle 4 is assembled in this manner, the circular arc grooves 42f and 43f are in contact with each other on the inner peripheral surface of the central top of the nozzle body 41 as shown in FIG. A joint portion 423f having a female screw formed therein is formed. This joint part 423f
Connects the pipe 420 from the clean air source 5 to the nozzle body 41.
It is for connecting to.

Then, as shown in (a) of FIG. 4, by tightening the locking bolt 48b, the opening member 44 is pressed and sandwiched by the first nozzle body 42 and the second nozzle body 43, Moreover, due to the presence of the spacer 47, the opening 40 is formed between the first opening member 45 and the second opening member 46. In this state, the tip of the jack bolt 48a is in contact with the surface of the second opening member 46, as shown in FIG.

Therefore, in a state where the gas injection nozzle 4 is connected to the pipe from the clean air source 5, the clean air supplied into the gas injection nozzle 4 becomes a band-shaped air flow and is ejected from the opening 40 to the outside. Will be done. The opening 4
The air jetted from 0 is the first opening member 45 before jetting.
Once diffused in the recessed groove 45c provided in, the uniformization of the strip-shaped airflow over the entire length in the longitudinal direction is achieved.

FIG. 5A shows the relative positional relationship between the jack bolt 48a and the locking bolt 48b in FIGS. 4A and 4B. As shown in FIG.
The locking bolt 48b is tightly fastened, whereas the jack bolt 48a is only in contact with the second opening member 46 at its tip.

Next, when widening the opening 40 of the nozzle body 41, the locking bolt 48b is loosened and the fastening of the jack bolt 48a is strengthened. Then, the jack bolt 48a is screwed into the screw hole 45d of the first opening member 45, and the tip of the jack bolt 48a presses the surface of the second opening member 46. (B), the gap between the first opening member 45 and the second opening member 46 is widened. Therefore, the width dimension of the opening 40 of the opening member 44 can be made larger than the thickness dimension of the spacer 47 by appropriately adjusting the loosening amount of the locking bolt 48b and the fastening amount of the jack bolt 48a. become.

FIG. 6 shows a substrate drainer 1 according to the present invention.
3 is a block diagram showing an embodiment of control of FIG. As shown in this figure, a control device 6 for controlling the pressure of the air supplied from the clean air source 5 to the first nozzle body 42 is provided in the vicinity of the liquid draining device 1, and also immediately upstream of the gas injection nozzle 4. On the side, a substrate presence / absence sensor 61 for detecting the presence / absence of the substrate B transported in the liquid draining device 1 by the transport means 3
Is provided.

The substrate presence / absence sensor 61 is used in the drainage device 1.
During operation, the presence or absence of the substrate B transported by the transport means 3 is constantly detected, and the detection result is always input to the control device 6. The control device 6 outputs a control signal to the control valve 51 based on the detection result from the substrate presence / absence sensor 61, and the opening degree of the control valve 51 is set by this control signal.

Specifically, when a signal indicating that the substrate B has been conveyed from the substrate presence / absence sensor 61 is input to the control device 6, the control device 6 increases the opening degree of the control valve 51 to clean the substrate. A control signal is output to the control valve 51 so that the air pressure from the air source 5 becomes a preset high pressure, and the control signal is output for a predetermined time by a timer (not shown) incorporated in the control device 6. I am trying to continue. In the above timer, the substrate B is the gas injection nozzle 4
The time to pass is set. Therefore, while the substrate B is passing through the gas injection nozzle 4, air is supplied from the clean air source 5 and thereby the treatment liquid adhering to the substrate B is surely removed.

Next, when the substrate presence / absence sensor 61 does not detect the presence of the substrate B, the detection signal indicates the control device 6
The control device 6 outputs to the control valve 51 a control signal for reducing the opening degree of the valve. As a result, the opening degree of the control valve 51 is reduced, so that the amount of air discharged from the gas injection nozzle 4 is reduced and wasteful use of air is reliably suppressed.

When the substrate B does not exist, the control valve 5
1 is not completely closed. If it is completely closed, air is suddenly jetted from the gas jet nozzle 4 by the opening operation of the control valve 51 when the substrate B arrives at the first nozzle body 42, or conversely. There is a time lag between the opening of the control valve 51 and the discharge of air from the gas injection nozzle 4, and due to this, it becomes impossible to reliably inject the air onto the substrate B, which is stable at the beginning of the valve opening. This is because an inconvenience arises in that air is not ejected. On the other hand, if a small amount of air is ejected from the gas injection nozzle 4 even when the substrate B is not present, the upstream side of the control valve 51 does not become an unnecessary high pressure state, and the downstream side always has air. Since the existing state exists, the above inconvenience is suppressed.

In addition, the acidic etching liquid supplied to the substrate B from the discharge pipe 34 of the etching processing apparatus on the upstream side is intentionally carried into the liquid draining tank 2 along with the substrate B, whereby the liquid draining tank 2 Has an acidic atmosphere,
By injecting air from the gas injection nozzle 4 even when the substrate B does not exist, the acidic atmosphere does not enter the gas injection nozzle 4 and the corrosion inside the gas injection nozzle 4 is reliably prevented.

As described above in detail, in the gas injection nozzle 4 of the present invention, the nozzle body 41 made of synthetic resin is internally provided with the opening member 44 made of metal so that the opening 40 can be secured. Is very effective in making the very thin width dimension of the opening 40 uniform over the entire length in the longitudinal direction as compared with a gas injection nozzle made entirely of synthetic resin, and as a result, a band-like air flow is evenly generated from the opening 40. It becomes possible to inject. Therefore, in the case of the conventional gas jet nozzle that can jet only a non-uniform band-shaped air flow, in order to reliably remove the cleaning liquid of the substrate B, there is a disadvantage that a plurality of nozzles must be arranged in series. As a result, the processing liquid adhering to the substrate can be surely removed by one gas injection nozzle 4 per surface of the substrate B, and the equipment cost can be reduced.

The present invention is not limited to the above embodiment, but the following can be adopted.

(1) In the above embodiment, the nozzle body 41
A joint portion 423f is recessed at the central top of the, but instead of recessing the joint portion 423f, a male screw-threaded cylinder is provided in this portion, and a pipe from the clean air source 5 is provided in this cylinder. You may make it connect by screwing.

(2) In the above embodiment, the nozzle body 41
Polyvinyl chloride is used as the material, but polypropylene, urethane-based polyethylene, polyether ether ketone, or the like may be used.

(3) In the above embodiment, the material of the opening member 44 is stainless steel, but titanium, titanium palladium alloy, aluminum alloy, Hastelloy C or the like may be used instead of stainless steel.

(4) In the above embodiment, the seal member 49
Although fluorocarbon resin is used, polytetrafluoroethylene may be used as fluorocarbon resin, or synthetic rubber such as styrene rubber and silicon rubber may be used.

(5) In the above embodiment, the gas injection nozzle 4 is fixed in the liquid draining tank 2 to move the substrate B. On the contrary, the substrate B is moved in the liquid draining tank 2. Alternatively, the gas jet nozzle 4 may be moved while the air is jetted toward the stopped substrate B.

[0070]

According to the first aspect of the present invention, there is provided a gas injection nozzle for injecting gas toward the main surface of a substrate, the opening member having a slit-shaped opening through which the gas passes, and the opening. It consists of a nozzle body that supports the member, the opening member is made of metal, and the nozzle body is made of synthetic resin, so compared with the conventional gas injection nozzle that is entirely made of synthetic resin. Therefore, the dimensional accuracy of the opening portion can be improved, and the opening width dimension of the opening member can be made uniform and desired over the entire length in the longitudinal direction.

Further, since the above-mentioned opening member is covered with the nozzle main body in a state where the opening is secured, and this nozzle main body plays the role of a reinforcing material, it is possible to reduce the metal material forming the opening member. This is effective in reducing the equipment cost.

Furthermore, since the surface of the opening member is covered by the nozzle body, even if the gas injection nozzle is installed in a corrosive atmosphere, the surface is reliably prevented from corroding, and the generation of particles due to the formation of rust due to corrosion is generated. Can be effectively suppressed, and the contamination of the substrate by particles due to rusting can be reliably prevented.

According to the second aspect of the present invention, the nozzle body has the opening width adjusting means for adjusting the opening width of the opening member over the entire length in the longitudinal direction. Even if the opening width dimension of the opening member varies during manufacture, the opening width dimension can be easily adjusted by operating the opening width adjusting means after mounting the opening member on the nozzle body. Further, since the opening member is made of metal, it is possible to surely make the desired opening width dimension by the above adjustment, and it is possible to make the gas jet flow from the opening uniform.

According to the invention described in claim 3, the liquid draining device for a substrate comprises a transport means for transporting the substrate in a state where the main surface is not covered, and the gas injection nozzle according to claim 1 or 2. Since it is provided, the opening width dimension of the opening member is uniform over the entire length, whereby a uniform gas flow is ejected from the opening member in the longitudinal direction. Therefore, it is not necessary to arrange a plurality of gas injection nozzles in series in order to compensate for the case where the injection flow is non-uniform as in the conventional case, and one gas is provided for the main surface of the substrate. It becomes possible to respond with the injection nozzle,
As a result, the installation space of the gas injection nozzle can be made small in capacity, which is convenient for reducing the equipment cost.

According to the fourth aspect of the invention, the injection pressure when the gas injection nozzle is on standby is controlled to be smaller than the injection pressure when the gas injection nozzle is blowing the gas onto the substrate. When the substrate is not present at the gas injection position, a small amount of gas is injected from the gas injection nozzle by the control of the control device, thereby saving the amount of gas for injection. At the same time, the power cost for injection is saved, which is effective in reducing the operating cost.

In addition, the acidic treatment liquid supplied to the substrate on the upstream side is carried into the liquid removing device along with the substrate, and the inside of the device is in an acidic atmosphere, but the gas injection nozzle stands by. Since the gas is jetted even when the gas jet nozzle is present, the acidic atmosphere does not enter the gas jet nozzle, and it is possible to reliably prevent corrosion inside the gas jet nozzle.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view showing an embodiment of a substrate drainer according to the present invention.

FIG. 2 is an exploded perspective view showing an embodiment of a gas injection nozzle according to the present invention.

FIG. 3 is a perspective view showing a gas injection nozzle formed by assembling the respective parts shown in FIG.

4 is a cross-sectional view of the gas injection nozzle shown in FIG.
(A) is a sectional view taken along line AA, and (B) is a sectional view taken along line BB.

5 is a cross-sectional view taken along line CC of the gas injection nozzle shown in FIG. 3, in which (a) is a state in which the opening of the opening member is set to the thickness dimension of the spacer, and (b) is the opening of the opening member is the spacer. The state is set to be larger than the thickness dimension of.

FIG. 6 is a block diagram showing an embodiment of a control system of the substrate drainer according to the present invention.

[Explanation of symbols]

 B substrate 1 liquid draining device 2 liquid draining tank 21 upstream wall 22 substrate receiving port 23 downstream wall 24 substrate discharging port 25 hopper portion 26 drain pipe 3 transporting means 31 roller support frame 32 transporting roller 32a horizontal shaft 32b flange portion 33 drive mechanism 33a Drive motor 33b Pressing roller 4 Gas jet nozzle 40 Opening 41 Nozzle body 42 First nozzle body 42a Sloping surface 42b Recessed groove 42c Through hole 42d Thick portion 42e Fastening hole 43 Second nozzle body 43a Sloping surface 43b Recessed groove 43d Thick portion 43e screw hole 43d thick part 43e screw hole 423f joint part 44 opening member 45 first opening member 45a flat surface 45b inclined surface 45c groove 45d screw hole 45e locking hole 46 second opening member 46a locking hole 47 spacer 48a jack Bolt 48b Locking bolt 4 c fastening bolt 5 clean air source 51 controlled valve 51a first control valve 51b second control valve 6 the control device 6 61 substrate presence sensor

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Mitsuo Ogasawara 1 at 480 Takamiya-cho, Hikone-shi, Shiga Dainippon Screen Mfg. Co., Ltd. Hikone district business office (72) Inventor Yoshihiko Matsushita, 480, Takamiya-cho, Hikone-shi, Shiga 1 Dainippon Screen Mfg. Co., Ltd. Hikone District Office

Claims (4)

[Claims] 1. A gas injection nozzle for injecting a gas toward a main surface of a substrate, comprising an opening member having a slit-shaped opening for passing the gas, and a nozzle body supporting the opening member. The opening member is made of metal, and the nozzle body is made of synthetic resin. 2. The gas injection nozzle according to claim 1, wherein the nozzle body has an opening width adjusting means for adjusting the opening width of the opening member over the entire length in the longitudinal direction. Gas injection nozzle. 3. A substrate drainer that relatively conveys a substrate on which a treatment liquid is adhered and blows gas onto the main surface to remove the treatment liquid, and conveys the substrate in a state where the main surface is not covered. And a gas injection nozzle according to claim 1 or 2. 4. The substrate drainer according to claim 3, wherein the jet pressure when the gas jet nozzle is on standby is made smaller than the jet pressure when the gas jet nozzle blows gas onto the substrate. A liquid draining device for a substrate, characterized in that it has control means for controlling as described above.