JPH091354A - Parallel seam joining equipment - Google Patents

Abstract

PURPOSE: To apply good force at all times, to precisely execute position control by locking an elastic body between a support body of a roller electrode and its sliding body and executing interval adjustment of the roller electrode by rotating a screw. CONSTITUTION: A left side roller electrode 301 is supported by an arm 307 in a welding head 3. The arm 307 is mounted to sliders 309, 311, the sliders 309, 311 slide in the vertical direction in combination with a guide 312. A coil spring 321 is inserted between a disk 319 of the upper end of the arm 307 and a flange 319 and a pressure force of the roller electrode 301 is adjusted. A right side roller electrode 331 is constituted in the same way. Change of the interval between a pair of rollers 301, 331 is executed in combination of a stepping motor 361, a right ball screw 327, and a left ball screw 357. An elevation mechanism having a motion transfer mechanism of a motor, an eccentric cam, etc., is arranged to the roller electrode, thus, the roller electrode is brought into contact with a work without shock.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a parallel seam joining apparatus suitable for joining a lid and an envelope made of ceramic or metal containing a semiconductor integrated circuit, a crystal oscillator, or the like.

[0002]

2. Description of the Related Art A parallel seam bonding apparatus for hermetically sealing a circuit element such as a semiconductor integrated circuit or a crystal unit generally has a ceramic package which is an envelope and a cover made of Kovar, and a pair of roller-shaped bonding. The working electrode is rotated while applying pressure on it, and a current is passed from one of the pair of roller-shaped joining electrodes through the lid to the other to join the envelope and the lid in a continuous line.

[0003]

In order to perform seam joining, the roller electrode is pressed against the work. In the conventional gravity pressurization method using a metal block as this pressurization method, the followability of penetration during the joining work is not good. Further, since the spring is fixed or closed by the conventional pressurization by the spring, the replacement work of the spring is not easy. The first object of the present invention is to facilitate adjustment and replacement of the pressure spring in the seam joining device.

[0004]

[Second problem] In order to perform seam joining, it is necessary to displace the roller electrodes substantially symmetrically on both edges of the work.
Conventionally, the left and right roller electrodes are each provided with a fine movement device in the left and right direction to control the fine movement device in the left and right direction. However, controlling the fine movement devices on both sides in cooperation has a problem that the mechanical structure is complicated and the control device is also complicated. A second object of the present invention is to optimize the lateral position control of the roller electrode in the seam bonding apparatus.

[0005]

[Third problem] In order to perform seam joining, the roller electrode is moved up and down with respect to the work. As a method of vertically moving the roller electrode, conventionally, a worm gear or rack and a pinion are used to slowly move at a low speed to reduce the impact on the workpiece during contact. Although it is necessary to reduce the impact, there is a problem that the moving time becomes long. A third object of the present invention is to optimize the descending speed of the roller electrode in the seam bonding apparatus.

[0006]

[Means for Solving the Problems] In order to solve the first problem, the present invention proposes the following means. Proposed to include a roller electrode support, a sliding body that slides in a direction perpendicular to the roller electrode support, and an elastic body that is locked between the roller electrode support and the sliding body. To do. Since the elastic body is locked, it can be attached or replaced.

[0007]

[Second Means] In order to solve the second problem, the following means are proposed. A nut opposite to the screwing direction is passed through each of the pair of roller electrode supports laterally,
It is proposed that a common uniaxial screw threaded to both nuts is provided with a screw opposite to the screwing direction with the middle part as a boundary, and the interval between the roller electrodes is adjusted by controlling the rotation of the screw.

[0008]

[Third Means] In order to solve the third problem, the following means are proposed. It is equipped with an elevating mechanism for the support of the roller electrodes, and this elevating mechanism is composed of a motor and a motion transmission mechanism. The approach speed becomes small just before the pair of roller electrodes come into contact with the work, and it is possible to contact the work without impact. suggest.

[0009]

Embodiment FIG. 1 is a system diagram of a parallel seam bonding apparatus 1 according to the present invention. In the figure, commands for complicated control of the joining process are issued from the touch panel display 23. In response to this command, the CPU 21 sends a control signal to each control unit and receives a detection signal from a sensor (not shown). A floppy disk 25 is connected to the CPU 21 to read and write necessary data.

Upon receiving the control signal from the CPU 21, the table rotation mechanism / control unit 7 rotates the table 6 by an angle θ. Further, the control signal from the CPU 21 is passed through the controller 19 to the d control unit 17, the Z control unit 15, the X control unit 13, the Y control unit 11
Respectively sent to. The d controller 17 supplies a signal for setting the electrode spacing d of the bonding head 3. The Z control unit 15 gives a signal to the Z-axis lifting mechanism 5 to control the vertical position of the bonding head 3. The X controller 13 gives a signal to the X-axis moving mechanism 8 to control the lateral position of the bonding head 3. Y controller
Reference numeral 11 gives a signal to the Y-axis advancing / retreating mechanism 9 to control the position of the joining head 3 in the front-rear direction.

The table 6 on which the work 2 is placed can be rotated by an arbitrary angle θ by the table rotation mechanism / control unit 7.
Here, the rotation angle θ is designated as 90 °. Table 6
The work 2 is arranged on the upper surface of the in a rectangular coordinate system.

At both ends of the work 2, a pair of roller electrodes and a bonding head 3 that supports them and moves up and down in the Z-axis direction are provided. The joining head 3 further has a function of moving in the X-axis and the Y-axis by the X-axis moving mechanism 8 and the Y-axis advancing / retreating mechanism 9.

FIG. 2 shows an embodiment of the bonding head 3 in the parallel seam bonding apparatus according to the present invention. First, the left roller electrode will be described. Left roller electrode
The electrode holder 303 is mechanically rotatably supported by the arm 307 by the electrode holder 303. The roller electrode 301 is electrically a power supply shaft.
It is well connected to 305 and is connected to one end of the junction power supply (10). The arm 307 is vertically attached by sliders 309 and 311. These sliders 309 and 311 are combined with the guide 312 and can freely slide in the vertical direction. This guide 312 is fixed to the column 313. Further, the column 313 is attached to the base plate 501 via a slider 375 and a guide 377 that can slide in the horizontal direction. An arm 315 is horizontally fixed to the upper end of the column 313.
Then, a disc 319 is attached to the lower end of the arm 315 via a shaft 317. Disk 319
A flange 323 is disposed on the upper end of the arm 307 so as to face each other, and a coil spring 321 is inserted between the disc 319 and the flange 323. When the disc 319 is rotated, the shaft 317 connected to it is vertically moved up and down by the screw at the connection point with the arm 315, and the elastic force of the coil spring 321 can be adjusted. Although not shown, the disk 319 and the flange 323 are provided with cylindrical or conical projections at the centers thereof, which serve to facilitate and secure the attachment and replacement of the coil spring 321. . Instead of this protrusion, an edge portion may be provided around both or either of the disk 319 and the flange 323, and the same effect can be obtained. Further, the coil spring 321 can be replaced with another elastic body.

The roller electrode on the right side is also configured symmetrically with the left side. That is, the roller electrode 331, the electrode holder 333, the feeding shaft 335, the arm 337, the sliders 339 and 341,
Guide 342, Column 343, Arm 345, Shaft 347,
The disk 349, the coil spring 351, the flange 353, the slider 373, and the guide 377 are similarly configured.

Next, the distance d between the pair of roller electrodes 301 and 331
A configuration for changing the will be described. A yoke 360 is fixed near the left end of the base plate 501 and is spaced apart from the yoke 365.
And, a yoke 369 is installed near the right end. A stepping motor 361 is fixed to the yoke 360, and a bearing 36 is fixed to the yoke 365.
7, the bearing 371 is installed on the yoke 369, the ball nut 325 is installed on the left column 313, and the right column is installed.
A ball nut 355 is arranged on 343, and a common working shaft 364 connects them. The action shaft 364 is, in order from the left end, a coupling 363 connected to the rotation shaft of the stepping motor 361, a right ball screw 327 located on the right side of the bearing 367, a portion that is connected to the ball nut 325, and a screw portion from the intermediate portion 328. Left ball screw 357 with opposite direction
And is supported by the bearing 371 in combination with the ball nut 355.

Now, when the stepping motor 361 rotates in the direction of the arrow in the figure, the rotating right ball screw 327 causes the ball nut 325 to move to the left side, and the roller electrode 301 coupled thereto also moves to the left side. At the same time, due to the action of the left ball screw 357, the ball nut 355 moves to the right side, and the roller electrode 331 connected thereto moves to the right side.
Therefore, the distance d between the roller electrodes 301 and 331 becomes wider. Conversely, when the stepping motor 361 rotates in the direction opposite to the direction of the arrow in the figure, the distance d between the roller electrodes 301 and 331 becomes narrower.

Regarding the distance between the roller electrodes 301 and 331, the shortest reference distance dimension and the maximum distance are determined by a separately prepared gauge, and this dimension is determined by the CPU 21 that generates the command signal.
(See also FIG. 1) to be entered and stored in advance.
Then, the control signal corresponding to the required electrode spacing is supplied to the d control unit 17
Generate.

FIG. 3 shows an embodiment of the Z-axis lifting mechanism in the parallel seam bonding apparatus according to the present invention. The reduction motor 511 is attached to the bracket 513, and its rotary shaft 50
The eccentric shaft 505 is attached to the 9 through the crank 507. The eccentric shaft 505 engages with a sliding lateral elongated hole 503 provided in the base plate 501. Four sliders 519, 521, 523, 525 are attached to the base plate 501, and guides 515, 517 are attached to the bracket 513 corresponding to these. The bracket 513 is held by an X-axis moving mechanism and a Y-axis advancing / retreating mechanism (not shown).

The deceleration motor 511 rotates and the eccentric shaft 505
The sliders 519 to 525 and the guide 51
Guided by 5,517, the sliding horizontal hole 50 on the base plate 501
3 also goes up. Further, when the eccentric shaft 505 comes to the lower side, the sliding lateral oblong hole 503 also descends to the lower side. Therefore, depending on the rotation angle of the deceleration motor 511, the base plate 501 moves up and down along the Z axis.

At this time, in the movement of the eccentric shaft 505,
The speed from the top position to the center position to the bottom position is slow at the beginning, becomes faster near the center part, and becomes slower near the bottom part. The relationship of the ascending / descending speed is most preferable when the roller electrode in the seam joining contacts the work. Expressing this velocity change relationship mathematically, it is a cosine function of the angle that the crank 507 supporting the eccentric shaft 505 makes with the vertical plane, and corresponds to when the cosine function changes from 0 ° to 90 °, 180 °. To do.
When the roller electrode contacts the work, it can be understood as the descending velocity corresponding to a function near 180 °.

In this embodiment, the cosine function based on the eccentric axis is used to make the ascending / descending speed of the roller electrode suitable for seam welding. However, even if another motion transmission mechanism is used, the roller electrode works similarly. It is possible to reduce the approaching speed just before the contact with. In FIG. 3, the same speed function can be obtained by enlarging the diameter of the circle of the eccentric shaft 505 and connecting the rotary shaft of the reduction motor to a point that is not the center of the circle. It is also possible to obtain the required speed function by bringing the cam follower into contact with a cam having a curved surface of an arbitrary function curve and connecting this cam follower to the base plate 501 in FIG.

[0022]

Since the parallel seam bonding apparatus according to the present invention has the features described above,
The following effects are obtained.

Since the elastic body such as the spring is locked between the support body of the roller electrode and the sliding body thereof, it is possible to easily change the pressing force individually by replacing the spring or the like. In addition, elastic force is applied to these left and right independently,
Good pressure is always applied in response to work-melting and subtle changes.

Since the distance between the pair of roller electrodes is adjusted by rotating the screws in opposite directions,
The displacement is always symmetrical from the center. It has a simple structure and precise position control.

The roller electrode elevating mechanism is composed of a motor and a motion transmitting mechanism such as an eccentric cam. The approaching speed becomes small just before the roller electrode comes into contact with the work, and the work can be brought into contact with the work without impact. Can be improved. In addition, each mechanism that determines the displacement of the support body of these roller electrodes can be selected to be lightweight, which improves the response speed of position control and is economical.

[Brief description of the drawings]

FIG. 1 shows a system diagram of an embodiment of a parallel seam joining apparatus according to the present invention.

FIG. 2 shows an embodiment of a joining head in a parallel seam joining apparatus according to the present invention.

FIG. 3 shows an embodiment of a Z-axis lifting mechanism in the parallel seam bonding apparatus according to the present invention.

[Explanation of symbols]

1 ... Parallel seam joining device 2 ... Work 3
... Joining head 5 ... Z-axis lifting mechanism 6 ... Table 7 ... Table rotating mechanism 8 ... X-axis moving mechanism
9 ... Y-axis moving mechanism 10 ... Junction power supply 11 ... Y control unit
13 ... X controller 15 ... Z controller 17 ... d controller 19 ... Controller 21 ... CPU 23 ... Touch panel display 25 ...
Floppy disk 301… Roller electrode 303… Electrode holder 305… Feed shaft
307… Arm 309,311… Slider 312… Guide 313… Column
315… Arm 317… Shaft 319… Disc 321… Coil spring
323… Flange 325… Nut 327… Right ball screw 331… Roller electrode 333… Electrode holder 335… Feed shaft
337… Arms 339, 341… Sliders 342… Guides 343… Columns
345… Arm 347… Shaft 349… Disc 351… Coil spring
353… Flange 355… Nut 357… Left ball screw 360… Yoke 361… Stepping motor 363… Coupling 365… Yoke 367… Bearing 369… Yoke 371… Bearing 373,375… Slider
377… Guide 501… Base plate 503… Sliding laterally elongated hole 505… Eccentric shaft 507… Crank 509… Rotating shaft 511… Deceleration motor 513… Bracket 515,517… Guide 519,521,523,
525… slider

Claims (6)

[Claims] 1. A parallel seam joining apparatus for carrying out seam joining by passing an electric current between a pair of roller electrodes which rotate while applying pressure to an envelope containing a predetermined circuit element or an electronic circuit and a lid member, A roller electrode support, a sliding body that slides in a direction perpendicular to the roller electrode support, and an elastic body that is locked between the roller electrode support and the sliding body. Characteristic parallel seam joining device. 2. A common uniaxial screw threaded through the sliding body in the lateral direction and having nuts of opposite screwing directions penetrating in the lateral direction. 2. The parallel seam joining apparatus according to claim 1, wherein the screw is provided and the distance between the pair of roller electrodes is adjusted by controlling the rotation of the screw. 3. An elevating mechanism for the sliding body is provided, and the elevating mechanism is composed of a motor and a motion transmitting mechanism. The approaching speed becomes small just before the pair of roller electrodes come into contact with the work, so that the work can be performed without impact. The parallel seam bonding apparatus according to claim 1 or 2, which can be contacted. 4. A parallel seam joining apparatus for carrying out seam joining by passing an electric current between a pair of roller electrodes which rotate while pressurizing an envelope containing a predetermined circuit element or an electronic circuit and a lid member, Nuts of opposite screwing directions are laterally penetrated through the pair of roller electrode supports, and a common uniaxial screw threaded on both nuts is provided. A parallel seam joining device, wherein the screw is provided and the distance between the pair of roller electrodes is adjusted by controlling the rotation of the screw. 5. A lifting mechanism for the pair of roller electrode supports is provided, and this lifting mechanism is composed of a motor and a motion transmission mechanism, and the approaching speed becomes small just before the pair of roller electrodes come into contact with the work. The parallel seam bonding apparatus according to claim 4, wherein the parallel seam bonding apparatus can contact a work without impact. 6. A parallel seam joining apparatus for carrying out seam joining by passing an electric current between a pair of roller electrodes which rotate while pressurizing an envelope containing a predetermined circuit element or an electronic circuit and a lid member, The lifting / lowering mechanism for the pair of roller electrode supports is provided, and the lifting / lowering mechanism is composed of a motor and a motion transmission mechanism. The approaching speed becomes small just before the pair of roller electrodes comes into contact with the work, and the work can be performed without impact. Parallel seam joining device characterized by being able to contact.