JPH09131559A - Coating device and coating method as well as apparatus for production of color filter and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stabilize the shape of a liquid pool during the formation of a coating film and to make the formation of the coating film having a uniform film thickness possible by setting the length along the progressing direction of the bottom end face of a front lip of a coating applicator shorter than the length along the progressing direction of the bottom end face of a rear lip. SOLUTION: This coating device is constituted by arranging a slit die 40 as the coating applicator above a stage 6 so as to face this stage. This slit die 40 has the front lip 58 and the rear lip 60. These lips are stuck to each other forward and backward in the forward and backward moving directions of the stage 6 and are integrally coupled to each other. A manifold 62 is formed in the central part in the slit die 40 and is connected via an inside passage to a coating liquid supplying hose. In such a case, the length LF at the bottom end face 70 of the front lip 58 is set shorter than the length LR at the bottom end face 74 of the rear lip 60. As a result, the shape of the liquid pool is stabilized during the formation of the coating film. The formation of the coating film having the uniform film thickness is made possible.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating liquid coating apparatus and coating method, and particularly for a color liquid crystal display for discharging a coating liquid onto the upper surface of a flat sheet member to form a coating film having a uniform thickness. The present invention relates to a coating apparatus and a coating method suitable for manufacturing the color filter, and a manufacturing apparatus and a manufacturing method of the color filter using these apparatuses and methods.

[0002]

Related Background Art A color filter for a color liquid crystal display has a fine grid pattern of three primary colors on a glass substrate. Such a grid pattern is formed after a black coating film is formed on the glass substrate. , Red, blue, and green can be obtained by painting them separately. Therefore, in manufacturing a color filter, a coating process for coating a glass substrate with black, red, blue, and green coating liquids to form a coating film is essential. Conventionally, spinners, bar coaters or roll coaters have been used as coating devices in this type of coating process, but in recent years, in order to reduce the consumption of the coating liquid and improve the physical properties of the coating film, Use of a die coater is being considered.

The die coater is equipped with an applicator so-called slit die for discharging the coating liquid, and the slit die is disclosed in, for example, Japanese Patent Application Laid-Open No. 2-164480 and Japanese Patent Application Laid-Open No. 6-154687. All of these publicly known slit dies are for applying a coating liquid to a flexible web such as a film or a tape.

[0004]

Since the known slit die uses the bending of the web to discharge the coating liquid on one surface thereof, it is not suitable for a hard single-wafer member such as a glass substrate. Not applicable. Further, in the production of the color filter, it is necessary to control the coating film formed on the glass substrate to have a uniform film thickness, but simply using a known slit die can reduce the film thickness and the uniformity of the coating film. It cannot be maintained within the desired range.

The present invention has been made based on the above-mentioned circumstances, and an object thereof is to apply a coating liquid on the upper surface of a member to be coated even if the member to be coated is a hard member such as a glass substrate. An object of the present invention is to provide a coating apparatus and a coating method that can be easily discharged and can easily form a coating film having a uniform film thickness, and a manufacturing apparatus and a manufacturing method of a color filter using these apparatuses and methods. .

[0006]

The above-mentioned object is achieved by the present invention, and the coating apparatus according to claim 1 discharges the coating liquid supplied from the supplying device for supplying the coating liquid. An applicator having a discharge port extending in one direction, and a moving means for relatively moving either the applicator or the member to be coated, and the applicator of the apparatus according to claim 1. When viewed in the relative advancing direction of the member to be coated, it has a front lip located on the advancing direction side, a rear lip located on the opposite side to the advancing direction, and a lip gap formed between these two lips. Further, each of the two lips has a liquid contact surface that forms at least a lip gap and a lip lower surface that is continuous with the liquid contact surface and faces the member to be coated, and the lower end surface of the front lip advances. Length along the direction is set shorter than the length along the traveling direction of the lower end surface of the rear lip.

According to the coating apparatus of the first aspect, when the coating liquid is discharged from the discharge port of the applicator while the member to be coated is relatively advanced with respect to the applicator, the front and rear lips of the applicator are underneath. A coating film of the coating liquid is formed on the upper surface of the coating target member in a state where the pool of the coating liquid formed between the end surface and the coating target member is maintained in a constant shape.
That is, the coating film is formed on the member to be coated with the boundary line of the liquid pool in contact with the lower end surface of the front lip being kept constant.

In the coating apparatus of the second aspect, the length of the lower end surface of the front lip is set to 0.5 mm or less. In this case, the boundary line of the liquid pool is stably maintained on the lower end surface of the front lip. It In the coating apparatus according to claim 3, the lower end surfaces of the front lip and the rear lip are positioned in the same plane, and in this case, even if the member to be coated advances relatively,
The liquid pool does not change.

In the coating apparatus of claim 4, the length of the lower end surface of the rear lip is set to 1 mm or more and 4 mm or less. If this length is secured on the lower end surface of the rear lip,
A meniscus generated in a liquid pool between the lower end surface of the rear lip and the member to be coated can be stably maintained. In the coating apparatus according to the fifth aspect, an inclined surface is formed on the front surface of the front lip, and the inclined surface is inclined toward the discharge port and is continuous with the lower end surface of the front lip. And, the inclined surface of the front lip is 30
It has an angle of not less than 60 ° and not more than 60 °. In this case, the liquid pool between the lower end surface of the front lip and the member to be coated does not wrap around to the inclined surface of the front lip, and the boundary line of the liquid pool is stably maintained at the lower end surface of the front lip. . Moreover, in this case, the lower end of the front lip is not excessively tapered, and the strength of the lower end is sufficiently secured.

According to the sixth aspect of the present invention, the gap between the front lip and the rear lip forming the slit is 0.05.
It is set to mm or more and 0.3 mm or less. In this case, the flow path resistance of the slit is maintained within a desired range, and the coating liquid is uniformly discharged from the discharge port of the applicator along its longitudinal direction. In the coating apparatus of claim 7, the member to be coated is a single-wafer member, and in this case, a coating film is formed on the upper surface of the single-wafer member.

The coating apparatus according to claim 8 is applied to the manufacture of a color filter, and in this case, a high quality color filter can be obtained. The color filter manufacturing apparatus according to claim 9 manufactures a color filter using the applicator according to claims 1 to 8, and in this case, a high quality color filter is obtained. A coating method according to claim 10 uses the applicator according to claim 1, wherein either the applicator or the member to be coated is relatively moved while ejecting the coating liquid from the ejection port of the applicator. A coating film is formed on the member to be coated, and the operation in this case is the same as that of the coating apparatus according to claim 1.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. 1, there is shown a so-called die coater applied to the manufacture of a color filter, and the die coater includes a base 2. Base 2
A pair of guide groove rails 4 is provided on the upper side, and a stage 6 is disposed on these guide groove rails 4, and the upper surface of the stage 6 is configured as a suction surface. The stage 6 can reciprocate horizontally on the guide groove rail 4. Specifically, a pair of slide legs 8 are projected from the lower surface of the stage 6, and these slide legs 8 are slidably fitted to the corresponding guide groove rails 4. The outer plate member 4a constituting each guide groove rail 4 is bent inward with its upper end edge substantially at a right angle, and is fitted into the side groove 10 formed in the slide leg 8 of the stage 4.

A casing 12 containing a feed mechanism is arranged between the pair of guide groove rails 4, and the casing 12 extends along the guide groove rails 4. The feed mechanism has a feed screw 14 composed of a ball screw as shown in FIG. 2, and the feed screw 14 is screwed into a nut-like connector 16 fixed to the lower surface of the stage 6. Extends through it. Both ends of the feed screw 14 are rotatably supported by bearings (not shown), and an AC servo motor 18 is connected to one end thereof. In addition, casing 1
An opening for allowing the movement of the connector 16 is formed on the upper surface of 2, but the opening is omitted in FIG.

A sensor column 20 is arranged on the upper surface of the base 2 at one end thereof. The sensor column 20 is inverted L
It is in the shape of a letter, the tip of which extends above one of the guide groove rails 4. An electric lift actuator 21 is attached to the tip of the sensor column 20, and a thickness sensor 22 is attached downward to the lift actuator 21. As the thickness sensor 22, a laser displacement meter, an electronic micro displacement meter, an ultrasonic thickness meter, or the like can be used.

Further, the sensor column 20 is provided on the upper surface of the base 2.
The die strut 24 is disposed closer to the center of the base 2 than the base 2, and the die strut 24 also has an inverted L shape. An elevating mechanism 26 is attached to the tip of the die column 24, and although the elevating mechanism 26 is not shown in detail in FIG. 1, an elevating bracket is provided, and the elevating bracket can be raised and lowered by a pair of guide rods. Is attached to. A feed screw composed of a ball screw is arranged between the guide rods, and the feed screw is screwed into the elevating bracket so as to pass through the elevating bracket. The upper end of the feed screw is rotatably supported via a bearing in a casing 28 that houses the guide rod and the feed screw, and an AC servomotor 30 is connected to the upper end of the casing.

A U-shaped die holder 32 is rotatably mounted in a vertical plane on the elevating bracket. The die holder 32 extends horizontally above a pair of guide groove rails 4 between the rails 4. It is extended. Further, a horizontal bar 36 is fixed to the lifting bracket above the die holder 32.
Extend along the die holder 32. Pneumatic adjustment actuators 38 are attached to both ends of the horizontal bar 36, respectively. These adjustment actuators 38
Has expandable rods protruding from the lower surface of the horizontal bar 36, and these rods are in contact with both ends of the die holder 32.

A slit die 40 as an applicator is mounted in the die holder 32. As shown in FIG. 2, the supply hose 4 for the coating liquid is supplied from the slit die 40.
2 extends, and the tip of the supply hose 42 is connected to the supply port of the electromagnetic switching valve 46 of the syringe pump 44. A suction hose 48 extends from the suction port of the electromagnetic switching valve 46, and the tip of the suction hose 48 is
It is inserted in the tank 50 that stores the coating liquid.

The pump body 52 of the syringe pump 44 is
It is possible to selectively connect to one of the supply hose 42 and the suction hose 48 by the switching operation of the electromagnetic switching valve 46. The electromagnetic switching valve 46 and the pump main body 52 are electrically connected to a computer 54, and their operations are controlled by receiving a control signal from the computer 54. Computer 5
4, the lifting actuator 21 and the thickness sensor 22 described above are also electrically connected.

A sequencer 56 is also electrically connected to the computer 54 to control the operation of the syringe pump 44. The sequencer 56 includes an AC servomotor 18 of the feed screw 14 on the stage 6 side and an elevating mechanism 26,
In order to control the sequence, the sequencer 56 has a signal indicating the operation state of the AC servomotors 18 and 30, a signal from the position sensor 58 for detecting the moving position of the stage 6, and a slit. A signal from a sensor (not shown) for detecting the operation state of the die 40 is input, and a signal indicating a sequence operation is output from the sequencer 56 to the computer 54. Instead of using the position sensor 58, an encoder may be incorporated in the AC servomotor 18, and the position of the stage 6 may be detected by the sequencer 56 based on a pulse signal output from the encoder.

Although not shown, the die coater is provided with a loader for supplying the glass substrate A for the color filter as a single-wafer member on the stage 6 and an unloader for removing the glass substrate A from the stage 6. For these loaders and unloaders, a cylindrical coordinate system industrial robot can be used for the main components.

As is apparent from FIG. 1, the slit die 40 described above extends horizontally between the pair of guide groove rails 4 in a direction orthogonal to the reciprocating direction of the stage 6.
Here, the horizontal adjustment of the slit die 40 is performed by the horizontal bar 36.
This can be done by moving the telescopic rods of the adjusting actuator 38 provided at both ends of the die holder 32 back and forth and rotating the die holder 32 around its rotation axis.

The details of the slit die 40 are shown in FIG. 3. In FIG. 3, the rotation axis of the die holder 32, that is, the slit die 40 is shown by a chain line. The slit die 40 is provided with a long block-shaped front lip 58 and rear lip 60.
0 is attached to the front and back when viewed in the reciprocating direction of the stage 6, and is integrally connected to each other. Slit die 40
A manifold 62 is formed in the center of the inside,
The manifold 62 extends in a direction orthogonal to the reciprocating direction of the stage 6. The manifold 62 is always connected to the coating liquid supply hose 42 described above through an internal passage.

A slit 64 extends vertically downward from the manifold 62 and opens on the lower surface of the slit die 40. The lower end opening of the slit 64, that is, the discharge port 6
Similarly to the manifold 62, the reference numeral 6 extends in a direction orthogonal to the reciprocating direction of the stage 6. Specifically, a shim (not shown) is provided between the front lip 58 and the rear lip 60.
And the slit 6 is formed by the thickness of the shim.
4 and the discharge port 66, that is, the length along the reciprocating direction of the stage 6 is, for example, 0.05 mm or more, 0.
It is set to 3 mm or less.

When the stage 6 moves forward from the state shown in FIG. 1 toward the slit die 40, the front lip 5 located on the front side in the forward direction (direction of arrow B in FIG. 3).
8, the lower part of the front surface is formed into an inclined surface 68 inclined toward the discharge port 66, and the lower end surface 70 of the front lip 58 is formed between the lower end edge of the inclined surface 68 and the discharge port 66. It is prescribed. On the other hand, with respect to the rear lip 60, the lower end portion of the rear surface thereof is formed as an inclined surface 72 inclined toward the discharge port 66, and the rear lip 60 of the rear lip 60 is formed between the lower end edge of the inclined surface 72 and the discharge port 66. Bottom surface 74
Is stipulated.

As can be seen from FIG. 3, the lower end surface 70 of the front lip 58 as seen in the reciprocating direction of the stage 6.
Has a length LF shorter than the length LR of the lower end surface 74 of the rear lip 60, and these lower end surfaces 70 and 74 are located in the same horizontal plane. For example, the length LF of the lower end surface 70 is set to 0.5 mm or less, and the length LR of the lower end surface 74 is set to 1 mm or more and 4 mm or less.

Further, in the front lip 58, the angle θF formed by the inclined surface 68 and the horizontal plane is 30 ° or more,
It is set to 60 ° or less. On the other hand, regarding the rear lip 60, the angle θR formed by the inclined surface 72 and the horizontal plane is not particularly limited, but is preferably set in the same range as θF. Next, a process relating to the manufacture of the color filter, that is, a coating method performed using the die coater having the slit die 40 described above will be described.

First, when the origin of each operating portion of the die coater is returned, the stage 6 is positioned below the thickness sensor 22, and the suction hose 48 from the tank 50.
The coating liquid fills the inside of the path through the supply hose 42 and the manifold 62 and the slit 64 in the slit die 40. In this state, the glass substrate A is supplied onto the stage 6 from a loader (not shown), and the glass substrate A is held on the stage 6 under suction pressure. When the loading of the glass substrate A is completed, the thickness sensor 22 is lowered to a predetermined position, and the thickness of the glass substrate A is measured by the thickness sensor 22. After the measurement, the thickness sensor 22 is raised to the original position.

Simultaneously with the start of the loading of the glass substrate A, the electromagnetic switching valve 46 of the syringe pump 44 is switched to connect the pump body 52 and the suction hose 48, and the pump body 52 is connected to the tank 50 inside the tank 50. A suction operation of sucking the coating liquid through the suction hose 48 is performed. When a predetermined amount of the coating liquid is sucked into the syringe pump 44, the electromagnetic switching valve 46 of the syringe pump 44 is switched to connect the pump body 52 and the supply hose 42, and the stage 6 moves to the slit die 40. It is moved forward and stopped immediately before the slit die 40. After that, the slit die 40 is lowered, and a predetermined clearance between the lower end surfaces 70 and 74 of the slit die 40 and the upper surface of the glass substrate A, that is, several times the thickness of the coating film to be formed, for example, A clearance of 0.05 to 0.2 mm is secured. The clearance takes into account the thickness of the glass substrate A measured by the thickness sensor 22, and based on an output signal from a distance sensor (not shown) that measures the distance between the stage 6 and the slit die 40, It is accurately determined by controlling the descent.

Next, the stage 6 is further moved forward to position the start line where the coating film should start on the upper surface of the glass substrate A immediately below the discharge port 66 of the slit die 40 and stop the stage 6 once. Substantially simultaneously with the temporary stop of the stage 6, the syringe pump 44 starts the discharge operation of the coating liquid and supplies the coating liquid toward the slit die 40. Therefore, the coating liquid is discharged onto the glass substrate A from the discharge port 66 of the slit die 40. Here, since the gap LP of the discharge port 66 is constant along the longitudinal direction of the slit die 40, that is, in the direction orthogonal to the reciprocating direction of the stage 6, the discharge port 66 extends from the discharge line 66 to the start line of the glass substrate A. The coating liquid is evenly discharged along this, and as a result, a liquid pool C (see FIG. 3) having a meniscus is formed between the slit die 40 and the glass substrate A along the start line.

When the stage 6 is advanced in the forward direction at a constant speed while continuously discharging the coating liquid from the discharge port 66 simultaneously with the formation of the liquid pool C as shown in FIG. Thus, the coating film D of the coating liquid is continuously formed on the upper surface of the guide substrate A. In forming the coating film D, the start line of the glass substrate A is set to the discharge port 6 of the slit die 40 without temporarily stopping the forward movement of the stage 6.
The coating liquid may be discharged from the discharge port 66 at the timing when the coating liquid passes.

With the progress of the stage 6, when the finish line on the glass substrate A where the formation of the coating film D should be finished reaches the position immediately before the slit die 40 and the discharge port 66,
At this point, the discharge operation of the syringe pump 44 is stopped. In this way, even if the discharge of the coating liquid from the slit die 40, that is, the discharge port 66 thereof is stopped, the coating liquid in the liquid pool C is consumed (squeezed) on the upper surface of the glass substrate A, and the coating film D is formed. Formation continues until the finish line. The discharge operation of the syringe pump 44 may be stopped when the finish line on the glass substrate A passes through the discharge port 66 of the slit die 40.

At the time when the finish line on the glass substrate A passes through the discharge port 66 or at the time when the finish line passes, the suction operation of the syringe pump 44 is slightly performed, whereby the coating liquid in the slit 64 of the slit die 40 is removed. It is sucked to the manifold 62 side. After this, slit die 4
0 is raised to the original position, and the process of discharging the coating liquid from the slit die 40 is completed. At the raised position of the slit die 40, the coating liquid adhering to the lower end surface thereof is wiped off by a cleaner (not shown).

On the other hand, the forward movement of the stage 6 is continued even after the step of discharging the coating liquid is completed, and when the stage 6 reaches the end of the guide groove rail 4, the forward movement is stopped. In this state, the glass substrate A having the coating film D formed thereon is removed from the stage 6 by the unloader. After this, the stage 6 is moved back and returned to the initial position shown in FIG. 1 to complete the series of coating steps. At the initial position, the stage 6 waits until a new glass substrate is loaded.

Since the die coater for forming the coating film D on the glass substrate A is equipped with the slit die 40 described above, the coating film D can be formed uniformly and is suitable for the production of color filters. Become. That is, with respect to the slit die 40, the lower end surface 70 of the front lip 58 has a length LF shorter than the length LR of the lower end surface of the rear lip 60, so that the boundary line E (see FIG. 3) of the liquid pool C is set. It can be reliably maintained on the lower end surface 70. Therefore, during the formation of the coating film D, the shape of the liquid pool C does not change, and the thickness of the coating film D becomes uniform. In this case, if the length LF of the lower end surface 70 is set to 0.5 mm or less, it is ensured that the boundary line E of the liquid pool C exceeds the lower end surface 70 due to the surface tension and wraps around the front side of the front lip 58. Can be prevented. In this regard, when the angle θF of the inclined surface 68 connected to the lower end surface 70 is 30 ° or more, the boundary line E of the liquid pool C does not protrude to the inclined surface 68, and the inclined surface 68 If the angle θF exceeds 60 °, the rigidity of the lower end portion of the front lip 58 may be insufficient.

If the boundary line E of the liquid pool C wraps around the front side of the front lip 58, the film thickness of the coating film D cannot be kept thin. The lower end surface of the front lip 58 may have a length LF of 0, that is, may have an edge shape, but in this case, it is difficult to secure the rigidity of the edge. When the lower end surfaces 70 and 74 of the front lip 58 and the rear lip 60 are in the same horizontal plane, both boundary lines that define the upper edge of the liquid pool C are stably maintained, and the shape of the liquid pool C becomes unstable. There is no such thing.

The lower end surface 74 of the rear lip 60 has a length L
Since R is set to 1 mm or more and 4 mm or less, a meniscus can be reliably formed between the lower end surface 74 and the glass substrate A. Furthermore, the gap Lp of the slit 64
Is 0.05 mm or more, the inner surfaces of the front lip 58 and the rear lip 60 defining the slit 64 can be sufficiently flat in terms of processing accuracy. On the other hand, when the gap Lp exceeds 0.3 mm, the discharge pressure of the coating liquid in the slit 64 and the manifold 62 decreases, and the coating liquid can be uniformly discharged from the discharge port 66 of the slit die 40. Can not.

Lengths LF and LR of the lower end surfaces 70 and 74 described above
Table 1 below shows the experimental results of forming the coating film D on the glass substrate A with various changes. In this experiment, slit 6
The gap LP of 4 is 0.1 mm, the size of the glass substrate A is 400 × 300 mm in length and width, and the film thickness of the coating film D to be formed is 1.6 μ.
m, the moving speed of the stage 6 is set to 3 m / min.

[0038]

[Table 1]

As is clear from Table 1 above, the lower end surface 70
If the length LF is 0.6 mm or more, the bottom surface 7
It can be seen that the coating film D cannot be formed well when the length LR of 4 is shorter than 1 mm. In the description of the above embodiment,
The formation of a coating film on a single-wafer member such as a glass substrate has been described. However, the apparatus and method of the present invention can be used for continuous coating of a coating liquid on a long coating target member or for an endless coating target member. Application to is also possible. Further, in the above-mentioned embodiment, the applicator is arranged downward, but even if the applicator is arranged laterally or upward, a coating film having a uniform film thickness is similarly formed on the member to be coated. be able to.

[0040]

As described above, the coating apparatus and coating method according to claims 1, 7, 8, 9, and 10 of the present invention,
According to the manufacturing apparatus and the manufacturing method of the color filter of claims 9 and 11, since the length of the lower end surface of the applicator, that is, the front lip is made shorter than the lower end surface of the rear lip, during the formation of the coating film, the liquid The shape of the puddle can be stabilized, the coating liquid can be easily applied, and the film thickness of the coating film can be made uniform. As a result, when the member to be coated is a single-wafer member, that is, a glass substrate for a color filter, a high quality color filter can be obtained.

According to the coating apparatus of the second, third and fourth aspects, there is a further advantage in stabilizing the shape of the liquid pool. According to the coating device of the fifth and sixth aspects, not only is there an advantage in stabilizing the shape of the liquid pool, but there is also a great advantage in the rigidity and processing accuracy of the applicator.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a die coater of an embodiment.

FIG. 2 is a schematic configuration diagram showing the die coater of FIG. 1 including a coating liquid supply system.

3 is a sectional view of a slit die used in the die coater of FIG.

[Explanation of symbols]

 6 stage 14 feed screw 40 slit die (applicator) 44 syringe pump (supply means) 50 tank 58 front lip 60 rear lip 62 manifold 64 slit 66 discharge port 68,72 inclined surface 70,74 lower end surface

Claims (11)

[Claims] 1. A supply unit for supplying a coating liquid, an applicator having a discharge port extending in one direction for discharging the coating liquid supplied from the supply unit, and either the applicator or a member to be coated. In a coating device including a moving unit that relatively moves one, the applicator, when viewed in the relative traveling direction of the member to be coated, a front lip located on the traveling direction side,
There is a rear lip located on the opposite side to the advancing direction, and a lip gap formed between the both lips, and each of the both lips has a liquid contact surface forming at least the lip gap and the contact surface. The front lip has a lower end surface which is continuous with the liquid surface and faces the member to be coated, and the lower end surface of the front lip has a length along the advancing direction along the advancing direction of the lower end surface of the rear lip. A coating device characterized by being shorter than the length. 2. The coating apparatus according to claim 1, wherein the length of the lower end surface of the front lip is 0.5 mm or less. 3. The coating apparatus according to claim 1, wherein the lower end surfaces of the front lip and the rear lip are in the same plane. 4. The coating apparatus according to claim 1, wherein the length of the lower end surface of the rear lip is 1 mm or more and 4 mm or less. 5. A front surface of the front lip is formed with an inclined surface that is inclined toward the discharge port and is continuous with the lower end surface of the front lip. The angle of the inclined surface with respect to the lower end surface is 30.
The angle is not less than 60 ° and not more than 60 °.
The coating apparatus according to any one of to 4. 6. The gap between the front lip and the rear lip forming the slit is 0.05 mm or more,
It is 3 mm or less, The coating device in any one of Claims 1-5 characterized by the above-mentioned. 7. The coating apparatus according to claim 1, wherein the member to be coated is a single-wafer member. 8. The coating apparatus according to claim 1, which is used for manufacturing a color filter. 9. A color filter manufacturing apparatus, which manufactures a color filter by using the coating apparatus according to claim 1. 10. The applicator according to claim 1, wherein either the applicator or the member to be coated is relatively moved while ejecting a coating liquid from a discharge port of the applicator. A coating method of forming a coating film of a coating liquid on the member to be coated. 11. A method for manufacturing a color filter, which comprises manufacturing a color filter by using the coating method according to claim 10.