JPH089437Y2 - オイルフリースクリュ式真空ポンプ - Google Patents

オイルフリースクリュ式真空ポンプ

Info

Publication number
JPH089437Y2
JPH089437Y2 JP1989059582U JP5958289U JPH089437Y2 JP H089437 Y2 JPH089437 Y2 JP H089437Y2 JP 1989059582 U JP1989059582 U JP 1989059582U JP 5958289 U JP5958289 U JP 5958289U JP H089437 Y2 JPH089437 Y2 JP H089437Y2
Authority
JP
Japan
Prior art keywords
gas
discharge port
suction
vacuum pump
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989059582U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02149893U (US06811534-20041102-M00003.png
Inventor
昇 壺井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP1989059582U priority Critical patent/JPH089437Y2/ja
Publication of JPH02149893U publication Critical patent/JPH02149893U/ja
Application granted granted Critical
Publication of JPH089437Y2 publication Critical patent/JPH089437Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989059582U 1989-05-23 1989-05-23 オイルフリースクリュ式真空ポンプ Expired - Lifetime JPH089437Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989059582U JPH089437Y2 (ja) 1989-05-23 1989-05-23 オイルフリースクリュ式真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989059582U JPH089437Y2 (ja) 1989-05-23 1989-05-23 オイルフリースクリュ式真空ポンプ

Publications (2)

Publication Number Publication Date
JPH02149893U JPH02149893U (US06811534-20041102-M00003.png) 1990-12-21
JPH089437Y2 true JPH089437Y2 (ja) 1996-03-21

Family

ID=31586204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989059582U Expired - Lifetime JPH089437Y2 (ja) 1989-05-23 1989-05-23 オイルフリースクリュ式真空ポンプ

Country Status (1)

Country Link
JP (1) JPH089437Y2 (US06811534-20041102-M00003.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3673744B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 真空ポンプ
WO2004036047A1 (en) * 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336085A (ja) * 1986-07-30 1988-02-16 Taiko Kikai Kogyo Kk スクリユウ型真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336085A (ja) * 1986-07-30 1988-02-16 Taiko Kikai Kogyo Kk スクリユウ型真空ポンプ

Also Published As

Publication number Publication date
JPH02149893U (US06811534-20041102-M00003.png) 1990-12-21

Similar Documents

Publication Publication Date Title
TWI285912B (en) Processing apparatus and method of processing apparatus maintenance
JPH089437Y2 (ja) オイルフリースクリュ式真空ポンプ
JPH045836B2 (US06811534-20041102-M00003.png)
US5540061A (en) Refrigerator
KR20020043852A (ko) 진공 냉장고
JPS61169691A (ja) 冷凍装置用密閉形スクロ−ル圧縮機
CN217561659U (zh) 一种芯片耐热度检测装置
KR100217121B1 (ko) 로터리 압축기
JP4055264B2 (ja) 空気調和装置
JPS62265490A (ja) 密閉型ロ−タリ圧縮機
JPH02136669A (ja) 冷蔵庫
JPH05106578A (ja) スクリユー式ドライ真空ポンプの暖気運転制御方法
JPS5816167A (ja) 冷蔵庫
JPS5898692A (ja) ロ−タリ−コンプレツサ
JPH0339864A (ja) 低温用冷凍圧縮機
KR0113417Y1 (ko) 스크롤압축기
JPH065583Y2 (ja) 前面開扉式ショーケースの風路構造
JPS5896195A (ja) ロ−タリ−コンプレツサ
JPH02149795A (ja) 無給油式スクリュー圧縮機
JPS5835974Y2 (ja) 冷凍又は冷暖房装置
JPH0733094Y2 (ja) 冷蔵庫
JPH11325704A (ja) 冷凍庫
JPH09119761A (ja) 冷蔵庫の吸入ポートの構造
KR20030065667A (ko) 열전소자를 이용한 냉온장고
JPH0123708B2 (US06811534-20041102-M00003.png)