JPH0864740A - Manufacture of ic lead frame - Google Patents

Manufacture of ic lead frame

Info

Publication number
JPH0864740A
JPH0864740A JP22091994A JP22091994A JPH0864740A JP H0864740 A JPH0864740 A JP H0864740A JP 22091994 A JP22091994 A JP 22091994A JP 22091994 A JP22091994 A JP 22091994A JP H0864740 A JPH0864740 A JP H0864740A
Authority
JP
Japan
Prior art keywords
lead frame
frame material
manufacturing
leads
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22091994A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamada
廣志 山田
Fumio Iwane
文男 岩根
Shigeru Koide
茂 小出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Original Assignee
Daido Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP22091994A priority Critical patent/JPH0864740A/en
Publication of JPH0864740A publication Critical patent/JPH0864740A/en
Pending legal-status Critical Current

Links

Landscapes

  • Punching Or Piercing (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE: To provide the manufacturing method of a QFP-type IC package lead frame by which a stable lead frame which shows almost no contraction and whose leads show very little vertical and horizontal fluctuation can be obtained. CONSTITUTION: The manufacturing method is related to the manufacturing process of a QFP-type IC package lead frame which has 160 or more leads and includes a press-punching process of lead frame material. When the lead frame material which is wound into a coil form is continuously subjected to a required punching process while the lead frame material is paid off from the coil, a frame-cutting process by which the lead frame material is cut into required dimensions is eliminated. Further, before the tips of leads are cut, the lead frame material is subjected to an annealing treatment while a required tension is applied to the lead frame to remove the strain given by a punching process and then the tips of the leads are cut off.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明はICリードフレームの
製造方法に関し、詳しくはリード数(ピン数)が160
本以上のQFP型ICパッケージ用リードフレームの製
造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an IC lead frame, more specifically, the number of leads (number of pins) is 160.
The present invention relates to a method for manufacturing a lead frame for a QFP IC package.

【0002】[0002]

【従来の技術】ICパッケージの一種に、パッケージ本
体が扁平な四辺形を成し、四辺の各辺から多数のリード
(ピン)が延び出した形態のQFP型ICパッケージが
あり、広く用いられている。
2. Description of the Related Art As one type of IC package, there is a QFP type IC package in which the package body has a flat quadrilateral shape and a large number of leads (pins) extend from each side of the four sides, and are widely used. There is.

【0003】ところでこのQFP型ICパッケージ用リ
ードフレームを製造するに際して、プレス打抜の最終工
程であるリード先端の切断加工後に、打抜時に生ずる歪
によってリードの垂直方向(板厚と直角方向)及び水平
方向(板面方向)の変位が発生し、後のワイヤボンディ
ング等の工程に支障を来すといった問題が生じていた。
When manufacturing the lead frame for the QFP type IC package, after the lead tip cutting process, which is the final step of press punching, the vertical direction of the leads (the direction perpendicular to the plate thickness) and Displacement in the horizontal direction (plate surface direction) occurs, which causes a problem in the subsequent steps such as wire bonding.

【0004】QFP型ICパッケージ用リードフレー
ム、特にリード数(ピン数)が160本以上のリードフ
レームの場合、リードの数が多く且つピッチも狭いこと
から、高い形状・寸法精度が要求されるが、プレス打抜
加工時に上記変位を生ずると形状・寸法精度が悪くな
り、ワイヤボンディング等の工程を良好に実施できなく
なる不都合を生ずるのである。
In the case of a lead frame for a QFP type IC package, particularly a lead frame having 160 or more leads (pin number), high shape and dimensional accuracy are required because the number of leads is large and the pitch is narrow. If the above displacement occurs during press punching, the shape and dimensional accuracy will deteriorate, and there will be the inconvenience that the steps such as wire bonding cannot be carried out satisfactorily.

【0005】そこでリード先端の切断加工前に雰囲気焼
鈍を行い、以てそれまでの打抜きによる歪を除去すると
いったことが考えられる。しかしながら打抜加工したリ
ードフレーム材を所定長さ寸法で切断(フレームカッ
ト)した状態で焼鈍を行うと、リードフレームが長手方
向に収縮を起こしてしまい、後の打抜きが困難となる場
合が生ずる。この傾向はリードフレーム材としてFe−
Ni系合金材を用いた場合において特に顕著である。
Therefore, it is conceivable to perform annealing in the atmosphere before cutting the lead tip to remove the strain due to the punching up to that point. However, when the punched lead frame material is annealed in a state of being cut (frame cut) in a predetermined length dimension, the lead frame contracts in the longitudinal direction, which may make it difficult to perform the subsequent punching. This tendency is due to Fe-
This is particularly remarkable when a Ni-based alloy material is used.

【0006】これは圧延加工によって長手方向(圧延方
向)に規則的に配列した原子が焼鈍によってランダム配
列することによるものと考えられる。
It is considered that this is because atoms regularly arranged in the longitudinal direction (rolling direction) by the rolling process are randomly arranged by annealing.

【0007】何れにしろ単に焼鈍処理を行って歪をとっ
ただけであると、その後の打抜き或いはワイヤボンディ
ング等の工程を良好に行うことができないのである。
In any case, if the annealing is simply performed to remove the strain, the subsequent steps such as punching or wire bonding cannot be performed well.

【0008】[0008]

【課題を解決するための手段】本願の発明はこのような
事情を背景として成されたもので、実質上リードフレー
ムの収縮もなく且つリード先端の切断加工後にリードの
垂直,水平方向の変位も非常に小さいQFP型ICパッ
ケージ用リードフレームの製造方法を提供することを目
的とする。
The invention of the present application has been made in view of such circumstances, and there is substantially no contraction of the lead frame, and there is no displacement of the leads in the vertical and horizontal directions after cutting the tip of the lead. An object of the present invention is to provide a manufacturing method of a lead frame for a very small QFP type IC package.

【0009】而して本願の発明は、リードフレーム材に
対してプレス打抜加工を施す工程を含む、リード数が1
60以上のQFP型ICパッケージ用リードフレームの
製造方法において、コイル状に巻いたリードフレーム材
を該コイルより繰り出しつつ所定の打抜加工を連続して
実施するに際して、該リードフレーム材を所定寸法ごと
に切断するフレームカットを行うことなく、且つ最終的
にリード先端の切断加工を行う前にリードフレーム材に
対し、その板厚と直角方向の長手方向に所定の張力を加
えた状態で焼鈍処理を行い、以て打抜加工による歪を除
去した上で該リード先端の切断加工を行うことを特徴と
する(請求項1)。
Thus, the invention of the present application includes the step of press-punching the lead frame material, and the number of leads is one.
In a method for producing a lead frame for a QFP type IC package of 60 or more, when a predetermined punching process is continuously performed while the lead frame material wound in a coil shape is unrolled from the coil, the lead frame material is sized at predetermined intervals. Without performing frame cutting, and before finally cutting the lead tip, an annealing process is performed on the lead frame material with a predetermined tension applied in the longitudinal direction perpendicular to the plate thickness. Then, the distortion due to the punching process is removed, and then the cutting process of the lead tip is performed (claim 1).

【0010】本願の別の発明は、請求項1の製造方法に
おいて、前記焼鈍処理を温度500〜700℃の範囲で
行うことを特徴とする(請求項2)。
According to another invention of the present application, in the manufacturing method of claim 1, the annealing treatment is performed at a temperature in the range of 500 to 700 ° C. (claim 2).

【0011】本願の更に別の発明は、請求項1又は2の
製造方法において、前記焼鈍処理を3kgf/mm2
上の張力を加えた状態で行うことを特徴とする(請求項
3)。
Still another invention of the present application is the manufacturing method according to claim 1 or 2, characterized in that the annealing treatment is performed in a state in which a tension of 3 kgf / mm 2 or more is applied (claim 3).

【0012】本願の更に別の発明は、請求項1,2又は
3の製造方法において、前記リードフレーム材がNiを
重量%で30〜55%含有するFe−Ni系合金材であ
ることを特徴とする(請求項4)。
Still another invention of the present application is the manufacturing method according to claim 1, 2 or 3, wherein the lead frame material is an Fe-Ni alloy material containing 30 to 55% by weight of Ni. (Claim 4).

【0013】[0013]

【作用】以上のように本発明は、コイル状に巻いたリー
ドフレーム材をコイルより繰り出しつつ所定の打抜加工
を連続して実施するに際し、打抜加工したリードフレー
ム材を長手方向に所定寸法ごと切断する前の段階でこれ
を長手方向に張力を加えた状態の下、所定温度で焼鈍処
理を行い、しかる後リード先端の切断加工を行うもので
ある。
As described above, according to the present invention, when the lead frame material wound in a coil shape is unrolled from the coil and a predetermined punching process is continuously carried out, the punched lead frame material has a predetermined dimension in the longitudinal direction. Prior to the cutting, each piece is annealed at a predetermined temperature under tension applied in the longitudinal direction, and then the lead tip is cut.

【0014】本発明に従って焼鈍処理を行った場合、打
抜きにより発生した歪が良好に除去され、しかも後の実
施例において明らかにされるように実質上リードフレー
ムの長手方向の収縮も起こさないことが確認されてい
る。従って本発明によれば、その後のワイヤボンディン
グ工程等を良好に実施できるようになる。
When the annealing treatment is performed in accordance with the present invention, the strain generated by punching is satisfactorily removed, and, as will be apparent from the later examples, substantially no contraction in the longitudinal direction of the lead frame occurs. It has been confirmed. Therefore, according to the present invention, the subsequent wire bonding step and the like can be favorably carried out.

【0015】本発明において上記焼鈍処理は500〜7
00℃の温度範囲で行うのが望ましい(請求項2)。焼
鈍の温度は高いほど歪除去の効果も大きいが、700℃
より高い温度で行うと硬さの低下が著しく、望ましい値
よりも低くなってしまう。一方500℃よりも低い温度
で行った場合、十分な焼鈍効果が得られ難い。
In the present invention, the annealing treatment is performed in the range of 500 to 7
It is desirable to carry out in the temperature range of 00 ° C (claim 2). The higher the annealing temperature, the greater the effect of strain relief, but 700 ° C
At higher temperatures, the hardness is significantly reduced and is lower than the desired value. On the other hand, when the temperature is lower than 500 ° C., it is difficult to obtain a sufficient annealing effect.

【0016】一方、焼鈍時に加える張力は3kgf/m
2以上とすることが望ましい(請求項3)。張力がこ
れより弱いとリードフレーム材を切断したときに長手方
向に収縮を起こす恐れが生ずる。
On the other hand, the tension applied during annealing is 3 kgf / m.
It is desirable that it is m 2 or more (claim 3). If the tension is weaker than this, there is a risk of contraction in the longitudinal direction when the lead frame material is cut.

【0017】前述のようにかかる収縮を生じ易いのは、
特にリードフレーム材としてFe−Ni系の合金材を用
いた場合であり、従って本発明はかかるFe−Ni系合
金材からなるリードフレーム材を用いた場合に適用して
特に効果の大きいものである。
As described above, the contraction is apt to occur
This is especially the case when an Fe-Ni alloy material is used as the lead frame material, and therefore the present invention is particularly effective when applied to a lead frame material made of such an Fe-Ni alloy material. .

【0018】ここでFe−Ni系合金材から成るリード
フレーム材の組成として、Fe−42%Ni等、Ni3
0〜55重量%含有するもの、具体的にはNi:30〜
55重量%、残部実質的にFeから成る組成のものが好
適である。
Here, as the composition of the lead frame material made of the Fe--Ni alloy material, Fe--42% Ni, Ni3, etc.
Those containing 0 to 55% by weight, specifically Ni: 30 to
A composition having 55% by weight and the balance substantially consisting of Fe is preferable.

【0019】但し必要に応じてNb:1〜5重量%,C
O:1〜5重量%,S:≧0.005重量%を含有させ
たもの等にも適用可能である。
However, if necessary, Nb: 1 to 5% by weight, C
It is also applicable to those containing O: 1 to 5% by weight and S: ≧ 0.005% by weight.

【0020】尚、焼鈍時にリードフレーム材に対して長
手方向に張力を加えるのは、張力を加えない通常の焼鈍
を行った場合でも幅方向にはほとんど収縮を生じないこ
とによる。勿論長手方向にのみ張力を加えて焼鈍を行っ
た場合にも幅方向の収縮はほとんど起こらない。
The reason why tension is applied to the lead frame material in the longitudinal direction during annealing is that shrinkage does not occur in the width direction even when ordinary annealing is performed without applying tension. Of course, shrinkage in the width direction hardly occurs even when annealing is performed by applying tension only in the longitudinal direction.

【0021】[0021]

【実施例】次に本発明の実施例を以下に詳述する。コイ
ル状に巻いたFe−42%Niから成るリードフレーム
材を、本発明に従いコイルより連続的に繰り出しつつ所
定の打抜加工を行うとともに、その状態でリードフレー
ム材に対し長手方向に強さ3kgf/mm2の張力を加
えた状態で各種温度の下で連続的に諸焼鈍処理を施し、
最終的にリードの先端を切断してリード数(ピン数)1
60本のQFP型ICパッケージ用リードフレームを製
造した。
EXAMPLES Examples of the present invention will be described in detail below. A leadframe material made of Fe-42% Ni wound in a coil shape is subjected to a predetermined punching process while being continuously fed out from the coil according to the present invention, and in that state, a strength of 3 kgf in the longitudinal direction is applied to the leadframe material. / Mm 2 tension is applied and various annealing treatments are continuously applied at various temperatures.
Finally, the tip of the lead is cut and the number of leads (number of pins) is 1
Sixty lead frames for QFP type IC packages were manufactured.

【0022】そしてこのリードフレームのリードの垂
直,水平方向の変位を測定した。また併せて焼鈍処理に
よる硬さの変化を求めた。結果が焼鈍処理を行わない場
合との比較において図1〜図3に示してある。
Then, the displacement of the leads of this lead frame in the vertical and horizontal directions was measured. In addition, the change in hardness due to the annealing treatment was also obtained. The results are shown in FIGS. 1 to 3 in comparison with the case without annealing.

【0023】これらの結果において、長手方向に張力を
加えた状態の下で焼鈍処理を施すことにより、リードの
垂直,水平方向の変位が非常に小さいことが分かる。こ
のとき硬さも併せて低下し、その値は焼鈍処理温度が7
00℃を超えると望ましい値よりも小さくなってしま
う。従って焼鈍の温度としては700℃以下が好適であ
る。
From these results, it can be seen that the displacement of the leads in the vertical and horizontal directions is very small by performing the annealing treatment under the condition that tension is applied in the longitudinal direction. At this time, the hardness also decreases, and the value is 7 when the annealing temperature is 7
If it exceeds 00 ° C., it becomes smaller than the desired value. Therefore, the annealing temperature is preferably 700 ° C. or lower.

【0024】次に張力及び焼鈍処理の温度を変化させた
ときのリードフレーム材の切断後の長手方向の寸法収縮
を求めたところ、図4の通りであった。この結果から、
3kgf/mm2以上の張力を付与することによって収
縮を効果的に抑制できることが分かる。
Next, the dimensional shrinkage in the longitudinal direction after cutting the lead frame material when the tension and the temperature of the annealing treatment were changed was obtained, and it was as shown in FIG. from this result,
It is understood that shrinkage can be effectively suppressed by applying a tension of 3 kgf / mm 2 or more.

【0025】以上本発明の実施例を詳述したがこれはあ
くまで一例示であり、本発明はその主旨を逸脱しない範
囲において、種々変更を加えた態様で実施可能である。
The embodiment of the present invention has been described in detail above, but this is merely an example, and the present invention can be implemented in variously modified modes without departing from the spirit of the invention.

【0026】[0026]

【発明の効果】以上詳述したように本発明によれば、実
質上収縮がなく且つリードの垂直,水平方向の変位が非
常に小さく、安定したリードフレームを得ることがで
き、またIC製造における生産効率を高めることができ
る。
As described above, according to the present invention, it is possible to obtain a stable lead frame which has substantially no shrinkage and has a very small vertical and horizontal displacement of the lead, and also in IC manufacturing. The production efficiency can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例において得られた焼鈍温度と垂
直方向変位との関係を表す図である。
FIG. 1 is a diagram showing a relationship between an annealing temperature and a vertical displacement obtained in an example of the present invention.

【図2】本発明の実施例において得られた焼鈍温度と水
平方向変位との関係を表す図である。
FIG. 2 is a diagram showing the relationship between the annealing temperature and the horizontal displacement obtained in the example of the present invention.

【図3】本発明の実施例において得られた焼鈍温度と硬
さとの関係を表す図である。
FIG. 3 is a diagram showing the relationship between annealing temperature and hardness obtained in the example of the present invention.

【図4】本発明の実施例において得られた焼鈍温度及び
張力と収縮率との関係を表す図である。
FIG. 4 is a diagram showing the relationship between the annealing temperature and the tension and the shrinkage obtained in the example of the present invention.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 リードフレーム材に対してプレス打抜加
工を施す工程を含む、リード数が160以上のQFP型
ICパッケージ用リードフレームの製造方法においてコ
イル状に巻いたリードフレーム材を該コイルより繰り出
しつつ所定の打抜加工を連続して実施するに際して、該
リードフレーム材を所定寸法ごとに切断するフレームカ
ットを行うことなく、且つ最終的にリード先端の切断加
工を行う前にリードフレーム材に対し、その板厚と直角
方向の長手方向に所定の張力を加えた状態で焼鈍処理を
行い、以て打抜加工による歪を除去した上で該リード先
端の切断加工を行うことを特徴とするICリードフレー
ムの製造方法。
1. A method of manufacturing a lead frame for a QFP type IC package having 160 or more leads, which includes a step of stamping the lead frame material, wherein the lead frame material is wound into a coil from the coil. When continuously performing a predetermined punching process while unwinding, the lead frame material is not subjected to frame cutting for cutting the lead frame material into predetermined dimensions, and finally to the lead frame material before cutting the lead tip. On the other hand, it is characterized in that an annealing process is performed in a state in which a predetermined tension is applied in the longitudinal direction perpendicular to the plate thickness, and the strain due to the punching process is removed, and then the cutting process of the lead tip is performed. Manufacturing method of IC lead frame.
【請求項2】 請求項1の製造方法において、前記焼鈍
処理を温度500〜700℃の範囲で行うことを特徴と
するICリードフレームの製造方法。
2. The method of manufacturing an IC lead frame according to claim 1, wherein the annealing treatment is performed at a temperature of 500 to 700 ° C.
【請求項3】 請求項1又は2の製造方法において、前
記焼鈍処理を3kgf/mm2以上の張力を加えた状態
で行うことを特徴とするICリードフレームの製造方
法。
3. The method of manufacturing an IC lead frame according to claim 1 or 2, wherein the annealing treatment is performed in a state where a tension of 3 kgf / mm 2 or more is applied.
【請求項4】 請求項1,2又は3の製造方法におい
て、前記リードフレーム材がNiを重量%で30〜55
%含有するFe−Ni系合金材であることを特徴とする
ICリードフレームの製造方法。
4. The manufacturing method according to claim 1, 2, or 3, wherein the lead frame material contains Ni in an amount of 30 to 55% by weight.
% Fe-Ni alloy material is contained.
JP22091994A 1994-08-22 1994-08-22 Manufacture of ic lead frame Pending JPH0864740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22091994A JPH0864740A (en) 1994-08-22 1994-08-22 Manufacture of ic lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22091994A JPH0864740A (en) 1994-08-22 1994-08-22 Manufacture of ic lead frame

Publications (1)

Publication Number Publication Date
JPH0864740A true JPH0864740A (en) 1996-03-08

Family

ID=16758604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22091994A Pending JPH0864740A (en) 1994-08-22 1994-08-22 Manufacture of ic lead frame

Country Status (1)

Country Link
JP (1) JPH0864740A (en)

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