JP2902830B2 - Lead frame material and manufacturing method thereof - Google Patents

Lead frame material and manufacturing method thereof

Info

Publication number
JP2902830B2
JP2902830B2 JP26570391A JP26570391A JP2902830B2 JP 2902830 B2 JP2902830 B2 JP 2902830B2 JP 26570391 A JP26570391 A JP 26570391A JP 26570391 A JP26570391 A JP 26570391A JP 2902830 B2 JP2902830 B2 JP 2902830B2
Authority
JP
Japan
Prior art keywords
lead frame
frame material
relief annealing
strain relief
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26570391A
Other languages
Japanese (ja)
Other versions
JPH05109960A (en
Inventor
寛紀 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
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Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP26570391A priority Critical patent/JP2902830B2/en
Publication of JPH05109960A publication Critical patent/JPH05109960A/en
Application granted granted Critical
Publication of JP2902830B2 publication Critical patent/JP2902830B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は集積回路素子のリードフ
レーム成形素材に関し、加熱時の収縮量を低減し、加工
時の加工精度を向上したリードフレーム材料に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lead frame molding material for an integrated circuit device, and more particularly to a lead frame material having reduced shrinkage during heating and improved processing accuracy during processing.

【0002】[0002]

【従来の技術】集積回路素子のリードフレームは、Fe-
42%Ni合金に代表されるFe-Ni系合金、またはFe-29%
Ni-17Co%(コバール)に代表されるFe-Co-Ni系合金
等の帯板を所定の幅にスリット加工し、次いで打抜き加
工を施して製造される。この打抜き加工において、リー
ドフレームの特にインナーリードの位置精度は集積回路
素子の組立工程のワイヤボンディング作業における自動
位置決め等に極めて重要な影響を及ぼす。近年、集積回
路素子の高集積化に伴ってリードは非常に多ピン(ピン
はリードともいう)、複雑化してきており、また前記の
ワイヤボンディングの際の自動位置決め等の点より、打
抜き加工後のインナーリードの位置に対する規格が非常
に厳しくなってきており、インナーリードの位置等に対
する規格を満足させるためには、従来の打抜き加工技術
だけでは極めて難しくなってきている。このため、図1
(a)に示すようにインナーリードbがタブaに接続され
た中間のリードフレーム状態において歪取り焼鈍(スト
レスレリーフ)を施し、打抜き加工により付加された加
工歪を解放した後、再度打抜き加工を施し、インナーリ
ードbをタブaと切り離し、図1(b)に示す最終のリー
ドフレームに加工する方法が採用されるようになってき
ている。しかし、この打抜き加工に供されるリードフレ
ーム素材の加熱収縮が大きいと中間状態のフレームで施
される歪取り焼鈍時に送り穴cのピッチが収縮し、次の
最終打抜き加工が困難になるかまたは加工精度が劣る等
の問題を生ずるため、加熱収縮の小さいリードフレーム
素材が必要になる。
2. Description of the Related Art The lead frame of an integrated circuit device is Fe-
Fe-Ni alloy represented by 42% Ni alloy or Fe-29%
It is manufactured by slitting a strip of Fe-Co-Ni alloy represented by Ni-17Co% (Kovar) into a predetermined width and then punching. In this punching process, the positional accuracy of the lead frame, particularly the inner lead, has a very important effect on the automatic positioning in the wire bonding operation in the assembly process of the integrated circuit element. In recent years, leads have become very multi-pin (pins are also referred to as leads) and complicated due to the high integration of integrated circuit elements. The standard for the position of the inner lead is becoming very strict, and it is extremely difficult to satisfy the standard for the position of the inner lead only by the conventional punching technique alone. Therefore, FIG.
As shown in (a), the inner lead b is subjected to strain relief annealing (stress relief) in an intermediate lead frame state connected to the tab a, and after releasing the processing strain added by the punching process, the punching process is performed again. Then, a method of separating the inner lead b from the tab a and processing the inner lead b into a final lead frame shown in FIG. 1B has been adopted. However, if the heat shrinkage of the lead frame material subjected to this punching process is large, the pitch of the feed holes c shrinks during the strain relief annealing performed on the frame in the intermediate state, making the next final punching process difficult or Since problems such as inferior processing accuracy occur, a lead frame material with small heat shrinkage is required.

【0003】[0003]

【発明が解決しようとする課題】従来のリードフレーム
素材は、打抜き加工性を特に重視してきたため、加工性
の点から材料の内部歪を多くする方向で製造が行なわれ
てきた。すなわち、リードフレームの一般的な硬さ規格
HV=200±20に対し圧延歪により上限の硬さを狙うこと
および素材のスリット後の歪取り焼鈍においても平坦度
改善等のために比較的大きな張力(テンション)を付加す
る方法(テンションアンニーリング)がとられてきた。し
かし、このようなリードフレーム素材は、前述の打抜き
加工中間状態のフレームでの歪取り焼鈍において、加熱
収縮が大きく、フレームの送り穴のピッチの変化量が大
きく最終打抜き加工が不可能であったり、加工精度が出
ない等の問題があった。本発明は、以上の点に鑑み、加
熱収縮の小さいリードフレーム材料およびその製造方法
を提供することを目的とするものである。
Since the conventional lead frame material has been given special emphasis on punching workability, it has been manufactured in the direction of increasing the internal strain of the material from the viewpoint of workability. That is, a general hardness standard for lead frames
A method of applying a relatively large tension (tension) to aim at the upper limit hardness by rolling strain for HV = 200 ± 20 and to improve flatness even in strain relief annealing after slitting of material (tension annealing ) Has been taken. However, such a lead frame material has a large heat shrinkage in the strain relief annealing in the frame in the above-described intermediate state of the punching process, a large amount of change in the pitch of the feed hole of the frame, and the final punching process is impossible. However, there are problems such as lack of processing accuracy. In view of the above, an object of the present invention is to provide a lead frame material with small heat shrinkage and a method for manufacturing the same.

【0004】[0004]

【課題を解決するための手段】本発明者は、リードフレ
ーム素材の加熱収縮を低減すべく検討を行なった結果、
次のことを見出した。すなわち、製品板厚に冷間圧延し
た後、所定の幅にスリット加工し、次に歪取り焼鈍を施
す製造工程において、歪取り焼鈍時に全く張力を付加し
ないかまたは張力を5.0kg/mm2以下に抑えることによ
り、従来のリードフレーム材料に比べ著しく加熱収縮が
小さい新規な材料が得られることを見出した。また、こ
の新規な材料はフレーム製造中の中間状態での歪取り焼
鈍条件を想定した650℃において10分間加熱した場合の
材料の元の長さに対する収縮率が0.03%以下であり、こ
の収縮率の場合には、良好なフレームの加工精度が得ら
れることを知見した。ここで素材の歪取り焼鈍時の張力
を5.0kg/mm2以下に規定したのは、それ以上の張力にお
いては歪取り焼鈍時に新たに引張応力が付加され、加熱
収縮が0.03%以上になるためである。好ましくは、歪取
り焼鈍時の張力は2.0kg/mm2以下に抑えることが望まし
い。本発明でいうFe-Ni系合金とは主要成分として、
Niを重量%で20%以上とFeを含有する合金であり、Fe
-Ni-Co系合金とは主要成分として、NiとCoおよびF
eを含有する合金であるが、これらの合金はいずれも少
量の他の元素(例えばSi,Mn,Cr,V,Nb,Mo,Wなど)
を含有してもよいものである。
The present inventor has studied to reduce the heat shrinkage of the lead frame material, and as a result,
We found the following: That is, after cold rolling to a product thickness, slit processing to a predetermined width, and then in the manufacturing process of performing the strain relief annealing, no tension is applied at all during strain relief annealing, or the tension is 5.0 kg / mm 2 or less. It has been found that, by suppressing the temperature of the lead frame material, a novel material having significantly smaller heat shrinkage than the conventional lead frame material can be obtained. In addition, this new material has a shrinkage rate of 0.03% or less of the original length of the material when heated at 650 ° C for 10 minutes assuming conditions for strain relief annealing in an intermediate state during frame manufacturing, and In the case of, it was found that good frame processing accuracy was obtained. Here the defined tension during stress relief annealing of the material to 5.0 kg / mm 2 or less, more in the tension is added newly tensile stress during stress relief annealing, since the heat shrinkage is more than 0.03% It is. Preferably, the tension during the strain relief annealing is desirably suppressed to 2.0 kg / mm 2 or less. The Fe-Ni-based alloy referred to in the present invention is, as a main component,
An alloy containing 20% or more Ni by weight and Fe.
-Ni-Co alloys are Ni, Co and F as main components.
These alloys contain a small amount of other elements (eg, Si, Mn, Cr, V, Nb, Mo, W, etc.).
May be contained.

【0005】[0005]

【実施例】以下、本発明を実施例により説明する。Fe-
42%Ni合金、Fe-50%Ni合金ならびにFe-29%Ni-17%C
o合金のストリップを製造し、冷間圧延工程の後所定の
スリット加工を行なうことにより、厚さ 0.25mm、幅 70
mmのリードフレーム素材を得た。この素材に600〜700℃
の温度に1〜3分間加熱する条件で材料に付加する張力量
を0〜7.0kg/mm2の範囲で変化させ、歪取り焼鈍を行な
い、リードフレーム材料を得た。各条件で得られたリー
ドフレーム材の加熱収縮率は、図2に示すように材料を
200mmの長さに切断した後、元の長さである160mm長さの
圧痕dをつけ、次に650℃において、10分間加熱した後
の圧痕間の距離を測って収縮量を測定し、次式により求
めた。 加熱収縮率={(160mm−L1)/160mm}×100(%) L1:650℃において10分間加熱後の常温における長さ 表1に結果を示す。表から明らかなように、本発明のリ
ードフレーム材料においては、従来材に比べ著しく加熱
収縮率が低減されている。このリードフレーム材料を図
1(a)に示すタブaとインナーリードbを切り離さない
形状に打抜き、次に600℃で3分間加熱して加工歪を解散
し、その後タブaとインナーリードbを仕上げ打抜き加
工により切り離して図1(b)に示す形状を得た。この仕
上げ打抜き加工の時に、送り穴cのピッチが収縮し、送
り不可となったものを不良(×)、全く問題なくスムーズ
な送りが可能なものを良好(○)、送りは可能であるが、
スムーズではないものをやや良好(△)として、仕上げの
打抜き加工性を評価した。この結果を表1に示す。表1
より本発明のリードフレーム材料は、仕上げ打抜きにお
いて、送り不良が発生しないことがわかる。また、張力
を2.0kg/mm2のリードフレーム材料は、スムーズな送り
が可能となり、より好ましいことが確認された。
The present invention will be described below with reference to examples. Fe-
42% Ni alloy, Fe-50% Ni alloy and Fe-29% Ni-17% C
o By manufacturing a strip of alloy and performing a predetermined slitting process after the cold rolling process, a thickness of 0.25 mm and a width of 70 mm
mm lead frame material was obtained. 600-700 ℃ for this material
Under the condition of heating at a temperature of 1 to 3 minutes, the amount of tension applied to the material was changed in the range of 0 to 7.0 kg / mm 2 , and strain relief annealing was performed to obtain a lead frame material. As shown in FIG. 2, the heat shrinkage of the lead frame material obtained under each condition
After cutting to a length of 200 mm, make an indentation d of 160 mm in length, which is the original length, and then measure the distance between the indentations after heating at 650 ° C. for 10 minutes to measure the amount of shrinkage. It was determined by the formula. Heat shrinkage = {(160 mm−L 1 ) / 160 mm} × 100 (%) L 1 : Length at room temperature after heating at 650 ° C. for 10 minutes Table 1 shows the results. As is clear from the table, in the lead frame material of the present invention, the heat shrinkage is significantly reduced as compared with the conventional material. The lead frame material is punched into a shape that does not separate the tab a and the inner lead b shown in FIG. 1A, and then heated at 600 ° C. for 3 minutes to dissolve the processing strain, and then the tab a and the inner lead b are finished. The shape shown in FIG. 1 (b) was obtained by cutting by punching. At the time of this finish punching, the pitch of the feed hole c shrinks, and the one that cannot be fed is defective (x), and the one that can feed smoothly without any problem is good (○), but the feed is possible. ,
Unsmoothness was evaluated as slightly good (△), and the finish punching workability was evaluated. Table 1 shows the results. Table 1
It can be seen from the above that the lead frame material of the present invention does not cause feeding failure in finish punching. In addition, it was confirmed that a lead frame material having a tension of 2.0 kg / mm 2 enables smooth feeding and is more preferable.

【0006】[0006]

【表1】 [Table 1]

【0007】[0007]

【発明の効果】本発明の方法によれば、リードフレーム
材料製造時の歪取り焼鈍を、張力を極力抑えて行なうと
いう比較的簡単な方法によって、加熱時の材料収縮量が
小さい新規なリードフレーム材料が得られる。このリー
ドフレーム材料は、650℃において、10分間加熱した後
の収縮率が、元の長さに対して0.03%以下という、今ま
で実現されていなかった特性を有するものである。本発
明のリードフレーム材料は、前述のようなインナーリー
ドがタブに接続された製造工程の中間のリードフレーム
状態での歪取り焼鈍において、送り穴のピッチ変化量が
小さいので、その後の仕上げ打抜き加工における加工性
ならびに加工精度の向上に対して、非常に効果がある。
According to the method of the present invention, a novel lead frame having a small amount of material shrinkage during heating can be obtained by a relatively simple method of performing strain relief annealing during production of a lead frame material while minimizing tension. The material is obtained. This lead frame material has a property that has not been realized until now, that the shrinkage after heating at 650 ° C. for 10 minutes is 0.03% or less of the original length. The lead frame material of the present invention has a small amount of pitch change of the perforation hole in the strain relief annealing in the intermediate lead frame state of the manufacturing process in which the inner lead is connected to the tab as described above. Is very effective in improving the workability and the processing accuracy in

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1(a)は、インナーリードがタブと接続し
たリードフレームの中間状態を示す図であり、図1(b)
は歪取り焼鈍後仕上げ打ち抜き加工を施した状態のリー
ドフレームを示す図である。
FIG. 1A is a diagram showing an intermediate state of a lead frame in which inner leads are connected to tabs, and FIG.
FIG. 3 is a view showing a lead frame in a state where finish punching has been performed after strain relief annealing.

【図2】加熱収縮量の測定方法を示す図である。FIG. 2 is a diagram showing a method of measuring a heat shrinkage amount.

【符号の説明】[Explanation of symbols]

a タブ b インナーリード c 送り穴 d 圧痕 a tab b inner lead c sprocket hole d indentation

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 Fe-Ni系合金またはFe-Ni-Co系合金
からなり、650℃において10分間加熱した材料の常温に
おける該材料の元の長さに対する収縮率が0.03%以下で
あることを特徴とするリードフレーム材料。
1. A material made of a Fe-Ni-based alloy or a Fe-Ni-Co-based alloy, which is heated at 650 ° C. for 10 minutes and has a contraction rate of 0.03% or less with respect to an original length of the material at room temperature. Characteristic lead frame material.
【請求項2】 製品板厚に冷間圧延した後、所定の幅に
スリット加工し、次に歪取り焼鈍を施す製造工程におい
て、張力を付加しないで歪取り焼鈍を行なうか、張力を
5.0kg/mm2以下に抑えて歪取り焼鈍を行なうことによ
り、650℃において10分間加熱した材料の常温における
該材料の収縮率を0.03%以下とすることを特徴とするリ
ードフレーム材料の製造方法。
2. In a manufacturing process in which a product is cold-rolled to a product thickness, slitted to a predetermined width, and then subjected to strain relief annealing, the strain relief annealing is performed without applying tension, or the tension is reduced.
A method for manufacturing a lead frame material, wherein the material is heated at 650 ° C. for 10 minutes and the shrinkage of the material at room temperature is reduced to 0.03% or less by performing strain relief annealing at 5.0 kg / mm 2 or less. .
JP26570391A 1991-10-15 1991-10-15 Lead frame material and manufacturing method thereof Expired - Lifetime JP2902830B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26570391A JP2902830B2 (en) 1991-10-15 1991-10-15 Lead frame material and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26570391A JP2902830B2 (en) 1991-10-15 1991-10-15 Lead frame material and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH05109960A JPH05109960A (en) 1993-04-30
JP2902830B2 true JP2902830B2 (en) 1999-06-07

Family

ID=17420839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26570391A Expired - Lifetime JP2902830B2 (en) 1991-10-15 1991-10-15 Lead frame material and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP2902830B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5170866B2 (en) 2006-10-10 2013-03-27 古河電気工業株式会社 Copper alloy material for electric and electronic parts and method for producing the same
JP5130838B2 (en) * 2007-09-12 2013-01-30 Jfeスチール株式会社 Method for eliminating shear warpage of thick steel plate, shearing method and shearing line
JP5365997B2 (en) * 2008-04-09 2013-12-11 日立金属株式会社 Method for producing stainless steel strip for blades

Also Published As

Publication number Publication date
JPH05109960A (en) 1993-04-30

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