JPH086184Y2 - クリーンルームの床下気流制御構造 - Google Patents

クリーンルームの床下気流制御構造

Info

Publication number
JPH086184Y2
JPH086184Y2 JP12659690U JP12659690U JPH086184Y2 JP H086184 Y2 JPH086184 Y2 JP H086184Y2 JP 12659690 U JP12659690 U JP 12659690U JP 12659690 U JP12659690 U JP 12659690U JP H086184 Y2 JPH086184 Y2 JP H086184Y2
Authority
JP
Japan
Prior art keywords
curtain
floor
clean room
air
control structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12659690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0485037U (enExample
Inventor
政和 宮谷
博実 勢越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP12659690U priority Critical patent/JPH086184Y2/ja
Publication of JPH0485037U publication Critical patent/JPH0485037U/ja
Application granted granted Critical
Publication of JPH086184Y2 publication Critical patent/JPH086184Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
JP12659690U 1990-11-30 1990-11-30 クリーンルームの床下気流制御構造 Expired - Lifetime JPH086184Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12659690U JPH086184Y2 (ja) 1990-11-30 1990-11-30 クリーンルームの床下気流制御構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12659690U JPH086184Y2 (ja) 1990-11-30 1990-11-30 クリーンルームの床下気流制御構造

Publications (2)

Publication Number Publication Date
JPH0485037U JPH0485037U (enExample) 1992-07-23
JPH086184Y2 true JPH086184Y2 (ja) 1996-02-21

Family

ID=31874141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12659690U Expired - Lifetime JPH086184Y2 (ja) 1990-11-30 1990-11-30 クリーンルームの床下気流制御構造

Country Status (1)

Country Link
JP (1) JPH086184Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5738646B2 (ja) * 2011-03-27 2015-06-24 三機工業株式会社 クリーンルーム内床開口作業用囲い

Also Published As

Publication number Publication date
JPH0485037U (enExample) 1992-07-23

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