JPH0859211A - Ozonizer - Google Patents

Ozonizer

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Publication number
JPH0859211A
JPH0859211A JP19530594A JP19530594A JPH0859211A JP H0859211 A JPH0859211 A JP H0859211A JP 19530594 A JP19530594 A JP 19530594A JP 19530594 A JP19530594 A JP 19530594A JP H0859211 A JPH0859211 A JP H0859211A
Authority
JP
Japan
Prior art keywords
air
dry air
ozone generator
ozone
generating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19530594A
Other languages
Japanese (ja)
Inventor
Osamu Takase
治 高瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19530594A priority Critical patent/JPH0859211A/en
Publication of JPH0859211A publication Critical patent/JPH0859211A/en
Pending legal-status Critical Current

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  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE: To prevent penetration of moisture into an ozone generating device by setting a humidity sensor in a dry air supplying pipeline and changing supplied air to a by-pass pipeline when the humidity rises in an ozonizer for forming ozone from oxygen in dry air. CONSTITUTION: A route of a three-way valve 15a is opened to an inlet side of an ozone generating device 8 when dry air supplied from a dry air supplying device is passed through a filter 7 and satisfies the prescribed values of a thermometer 13 and a dew-point hygrometer 12. The three-way valves 15a and 15b are changed so as to pass air to the by-pass piping 16 when the dry air does not satisfy the prescribed values of the thermometer 13 and the dew-point hygrometer 12 to provide the objective ozonizer for preventing penetration of humid air into an ozone generating device and having extremely high reliability.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は空気を原料とし、この空
気を圧縮・除湿してオゾンを発生させるオゾン発生装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator which uses air as a raw material and compresses and dehumidifies the air to generate ozone.

【0002】[0002]

【従来の技術】従来のオゾン発生装置を図3を参照して
説明する。同図に示すように、主ブロワ1で加圧されて
高温となった吐出空気が冷却器3に送られ、図示しない
外部の冷却水と熱交換され低温となるが、系統に余分な
空気はバイパス弁2より放出される。その後、冷凍式の
エアドライヤ4で1次脱湿された水分は、オートドレン
14から排水される。脱湿された空気は、切換弁5aを
通り吸着筒6aに入り、内蔵された吸着剤にてさらに水
分が除去される。そして、吸着筒6aにて除湿された乾
燥空気は、(露点が−60℃以下)フィルタ7を経てオ
ゾン発生器8へと流れる。その際、調整弁11により所
定の圧力になるよう調整されている。オゾン発生器8に
てオゾンを含む空気は、図示しないオゾン反応槽へと流
れる。
2. Description of the Related Art A conventional ozone generator will be described with reference to FIG. As shown in the figure, the discharge air pressurized by the main blower 1 and having a high temperature is sent to the cooler 3 and heat-exchanged with external cooling water (not shown) to have a low temperature. It is discharged from the bypass valve 2. Then, the water that has been primarily dehumidified by the refrigeration type air dryer 4 is drained from the auto drain 14. The dehumidified air passes through the switching valve 5a and enters the adsorption cylinder 6a, and the adsorbent contained therein further removes water. Then, the dry air dehumidified by the adsorption cylinder 6 a flows to the ozone generator 8 through the filter 7 (with a dew point of −60 ° C. or lower). At that time, the pressure is adjusted to a predetermined pressure by the adjusting valve 11. Air containing ozone in the ozone generator 8 flows to an ozone reaction tank (not shown).

【0003】一方、切換弁5bを出た乾燥空気の一部
は、調整弁10を経てヒータ9に入り加熱され、切換弁
5bのもう一方の通路を通って吸着筒6bに入り、吸着
剤の吸着した水分を脱着させ、切換弁5aのもう一方の
通路を通り外部へ放出される。一定時間加熱が行われ、
吸着筒6bの下部まで加熱脱着が進むと、ヒータ9はオ
フとなり、一部の乾燥空気のみを流して冷却を行う。こ
のような加熱再生方法は、8時間をサイクルとして繰り
返される。
On the other hand, a part of the dry air that has flowed out of the switching valve 5b enters the heater 9 through the adjusting valve 10 and is heated, enters the adsorption cylinder 6b through the other passage of the switching valve 5b, and enters the adsorbent. The adsorbed water is desorbed and discharged to the outside through the other passage of the switching valve 5a. Heating is done for a certain time,
When the thermal desorption progresses to the lower part of the adsorption cylinder 6b, the heater 9 is turned off and only a part of the dry air is flowed to perform the cooling. Such a heating regeneration method is repeated with a cycle of 8 hours.

【0004】このようなシステムにおける乾燥空気製造
工程の異常、例えばオートドレン14が詰まり、排水で
きない状態が生ずると、多量の水分が吸着筒6aに入
り、吸着剤がオーバー負荷になり、露点の高い(−60
℃以上)空気をオゾン発生器8へ送ることになる。この
際、オゾン発生器8の内部構成品がこの湿度のため劣化
する。
When an abnormality occurs in the dry air manufacturing process in such a system, for example, when the auto drain 14 is clogged and cannot be drained, a large amount of water enters the adsorption cylinder 6a, the adsorbent is overloaded, and the dew point is high. (-60
Air will be sent to the ozone generator 8. At this time, the internal components of the ozone generator 8 deteriorate due to this humidity.

【0005】ところで、オゾン発生器8は、図4に示す
ような構成をしている。すなわち、容器30内に設けら
れた2つの隔壁31,32によって左右2つの空室3
3,34が形成されている。一方の空室33には原料ガ
ス入口35が形成され、他方の空室34にはオゾン化空
気出口36が形成されている。また、両隔壁31,32
を貫通するようにして接地電極となる円筒金属管(ステ
ンレス管)37が接続されて空室38が形成されてい
る。この空室38は下部に冷却水入口39、上部に冷却
水出口40がそれぞれ設けられている。また、円筒金属
管37内に円筒形のガラスの放電管41がスペーサによ
って同心状に挿入されている。この放電管41は、その
内面に導電被膜42が形成されていて、この被膜42の
導電接触子43の中心に導体44が付けられ、この導体
44が絶縁のためのブッシング45を介して容器外の図
示していない電源に接続されている。円筒金属管37と
放電管41との間を通る空気から放電によってオゾンが
生成される。通常は、接地電極(円筒金属管)37と放
電管41との組み合わせが複数組構成されている。
By the way, the ozone generator 8 is constructed as shown in FIG. That is, by the two partition walls 31 and 32 provided in the container 30, two left and right empty chambers 3 are provided.
3, 34 are formed. A raw material gas inlet 35 is formed in one chamber 33, and an ozonized air outlet 36 is formed in the other chamber 34. In addition, both partition walls 31, 32
A cylindrical metal pipe (stainless steel pipe) 37 that serves as a ground electrode is connected so as to penetrate through, and a vacant chamber 38 is formed. The vacant chamber 38 is provided with a cooling water inlet 39 at the bottom and a cooling water outlet 40 at the top. In addition, a cylindrical glass discharge tube 41 is concentrically inserted into the cylindrical metal tube 37 by a spacer. A conductive coating 42 is formed on the inner surface of the discharge tube 41, a conductor 44 is attached to the center of the conductive contact 43 of the coating 42, and the conductor 44 is attached to the outside of the container via a bushing 45 for insulation. Is connected to a power source (not shown). Ozone is generated by discharge from the air passing between the cylindrical metal tube 37 and the discharge tube 41. Usually, a plurality of combinations of the ground electrode (cylindrical metal tube) 37 and the discharge tube 41 are configured.

【0006】オゾン発生器8の材料としては、ステンレ
ス鋼,ガラス,セラミクス,ポリ塩化ビニル,フッソ樹
脂などの耐オゾン材料が使用される。また、乾燥条件下
では、鉄,アルミニウムといった材料も一部使用され
る。また、放電管41の導電被膜としてはカーボン塗料
やアルミ溶射膜が使用されている。
As a material for the ozone generator 8, ozone resistant materials such as stainless steel, glass, ceramics, polyvinyl chloride, and fluorine resin are used. Also, under dry conditions, some materials such as iron and aluminum are used. Further, carbon paint or aluminum sprayed film is used as the conductive film of the discharge tube 41.

【0007】上記のような構成のオゾン発生器8におい
ては、放電によるNOxの発生とそのNOxと水分が反
応し、硝酸となって内部部品を腐食劣化、汚れが生ずる
ので、このような腐食劣化や汚れを早期に発見し、オゾ
ン発生器8の放電を停止する手段として、オートドレン
接点付14や露点計接点付12を設けている。
In the ozone generator 8 having the above-mentioned structure, NOx is generated by discharge and the NOx reacts with water to form nitric acid, which causes corrosion deterioration and stains of internal parts. As means for detecting dirt and dirt at an early stage and stopping discharge of the ozone generator 8, an auto drain contact type 14 and a dew point contact type 12 are provided.

【0008】又、吸着筒の相互切換等のシーケンス回路
が故障し、加熱空気がオゾン発生器8に入り、部品を損
傷する事故を未然に防ぐために温度計接点付13を設け
て、システムの停止等を行ってきた。
Further, in order to prevent an accident in which the sequence circuit such as the mutual switching of the adsorption cylinders fails, the heated air enters the ozone generator 8 and damages the parts, a system with a thermometer contact 13 is provided to stop the system. And so on.

【0009】しかしながら、このような手段によりシス
テムを停止し、故障箇所を直し、再スタートさせる場
合、システムは1系統の配管によってのみ接続されてお
り、再スタート当初、乾燥した空気が流れたとしても、
配管内壁,機器内空気通路部は水分等を含んでおり、乾
燥空気によって徐々に壁面の水分が乾燥空気に取り込ま
れて壁面は乾燥状態になっていく。この間、オゾン発生
器8内を流れる空気は乾燥度の低いものとなる。
However, when the system is stopped by such means, the faulty part is repaired, and the system is restarted, the system is connected only by the piping of one system, and even if dry air flows at the beginning of the system restart. ,
The inner wall of the pipe and the air passage in the device contain moisture, and the moisture on the wall surface is gradually taken into the dry air by the dry air, and the wall surface becomes dry. During this time, the air flowing through the ozone generator 8 has a low degree of dryness.

【0010】そこで、従来、オゾン発生器内を湿り空気
が通っても時間をかけ、その内部が十分乾燥状態になっ
てから放電を開始すれば、機器は損傷,腐食汚れ等はし
ないと考えられていた。しかし、それは誤りであること
が分かった。例えば、放電によって円筒金属管からは、
微粉金属(鉄,ニッケル,クロム等)が飛び出してお
り、これらは乾燥空気中にあっては粉末でふわふわして
いるが、一度空気にふれると水酸化物となり、狭い隙間
にたまる。その後、充分乾燥した空気にふれると水分が
飛ぶと共に固い塊となって部品表面に付着し、放電管の
放電表面を汚し、性能低下を起こし、放電管の内面にお
いて金属膜を腐食し、放電管と円筒管の隙間で固着し、
放電管の取り出しを困難にする等の問題が生じていた。
以上のことから、要するにオゾン発生器8内部には湿り
空気は入れてはいけないということである。
Therefore, conventionally, it is considered that the equipment will not be damaged or corroded if the humidification air passes through the ozone generator and the discharge is started after the interior is sufficiently dried. Was there. But it turned out to be false. For example, from a cylindrical metal tube by discharge,
Fine metal particles (iron, nickel, chromium, etc.) are popping out, and they are fluffy with powder in dry air, but once exposed to air, they become hydroxides and accumulate in narrow gaps. After that, if you touch it with sufficiently dry air, the water will fly and it will become a solid lump that will adhere to the surface of the component, polluting the discharge surface of the discharge tube, causing performance degradation, corroding the metal film on the inner surface of the discharge tube, and Fixed in the gap between the cylindrical tube and
There have been problems such as making it difficult to take out the discharge tube.
From the above, it means that moist air should not be introduced into the ozone generator 8.

【0011】[0011]

【発明が解決しようとする課題】本発明は、上記事情に
鑑みてなされたもので、その目的は、オゾン発生器内に
湿気が浸入しない極めて信頼性の高いオゾン発生装置を
提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide an extremely reliable ozone generator in which moisture does not enter the ozone generator. .

【0012】[0012]

【課題を解決するための手段】上記目的を達成するため
に、本発明の請求項1のオゾン発生装置は、乾燥空気供
給装置から供給される乾燥空気中の酸素からオゾンを生
成するオゾン発生器を有するオゾン発生装置において、
前記乾燥空気供給装置から供給される乾燥空気の湿度を
測定するセンサーと、前記乾燥空気供給装置と前記オゾ
ン発生器との間に設けられ、前記センサーにより測定さ
れる乾燥空気の湿度が予定値以下であれば、この乾燥空
気をオゾン発生器への供給管路に供給し、予定値を越え
た場合はオゾン発生器に対するバイパス管路側に切り換
える切換弁とを備えたことを特徴とする。
In order to achieve the above object, an ozone generator according to claim 1 of the present invention is an ozone generator for generating ozone from oxygen in dry air supplied from a dry air supply device. In an ozone generator having
A sensor for measuring the humidity of the dry air supplied from the dry air supply device, provided between the dry air supply device and the ozone generator, the humidity of the dry air measured by the sensor is less than or equal to a predetermined value. In this case, the dry air is supplied to the supply line to the ozone generator, and when the predetermined value is exceeded, a switching valve for switching to the bypass line side to the ozone generator is provided.

【0013】[0013]

【作用】本発明のオゾン発生装置によると、圧縮・冷却
・乾燥した後フィルタにて除塵した空気が、規定乾燥度
を満しかつ規定温度以下であるとき、フィルタ出口に設
けた3方向弁の切り換えにより空気をオゾン発生器側へ
流す。また、規定乾燥度を満さずまたは規定温度以上で
あるとき、フィルタ出口に設けた3方向弁の切り換えに
より空気をバイパス配管側に流す。このようにしてオゾ
ン発生器内には湿気のある空気は流れることはないの
で、オゾン発生器の腐食劣化,損傷などの不具合を完全
に防ぐことができる。
According to the ozone generator of the present invention, when the air that has been compressed, cooled, and dried and has been dust-removed by the filter satisfies the specified dryness and is below the specified temperature, the three-way valve provided at the filter outlet By switching the air flow to the ozone generator side. When the prescribed dryness is not satisfied or the temperature is equal to or higher than the prescribed temperature, air is flowed to the bypass pipe side by switching the three-way valve provided at the filter outlet. In this way, no moist air flows in the ozone generator, so that problems such as corrosion deterioration and damage of the ozone generator can be completely prevented.

【0014】[0014]

【実施例】以下、本発明の実施例を図を参照して説明す
る。図1は本発明の一実施例の系統図であり、本実施例
が既に説明した図3の従来例と相違する点はフィルタの
下流側であり、その他の構成は同一であるので、同一部
分には同一符号を付してその説明は省略する。図1にお
いて、フィルタ7の出口側は3方向切換弁15aが接続
されており、、3方向切換弁15aの空気出口は、一方
をバイパス配管16に接続され、他方を配管17に接続
されている。配管17はオゾン発生器8に接続され、そ
の出口側は調整弁11,配管18を介して3方向切換弁
15bの一方端に接続されている。バイパス配管16の
他方は3方向切換弁15bの他方端に接続されている。
3方向切換弁15bを通った空気又はオゾン化空気は、
図示しないオゾン反応槽へ通じている。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a system diagram of one embodiment of the present invention. The present embodiment is different from the conventional example of FIG. 3 already described in the downstream side of the filter, and other configurations are the same. Are denoted by the same reference numerals and description thereof will be omitted. In FIG. 1, a three-way switching valve 15a is connected to the outlet side of the filter 7, and one of the air outlets of the three-way switching valve 15a is connected to a bypass pipe 16 and the other is connected to a pipe 17. . The pipe 17 is connected to the ozone generator 8, and its outlet side is connected to one end of the three-way switching valve 15b via the adjusting valve 11 and the pipe 18. The other side of the bypass pipe 16 is connected to the other end of the three-way switching valve 15b.
The air or ozonized air that has passed through the three-way switching valve 15b is
It leads to an ozone reaction tank (not shown).

【0015】次に、本実施例の作用について説明する。
フィルタ7を通った空気が温度計13,露点計12の規
定値を満足したとき、3方向切換弁15aの通路は、オ
ゾン発生器8入口側へ空気を通じる方向に切り換えられ
る。オゾン発生器8の出口も、3方向切換弁15bの通
路も同様に切り換えられる。しかし、フィルタ7を通っ
た空気が温度計13,露点計12の規定値を満足しなか
ったときは、3方向切換弁15a,15bはバイパス配
管16側に空気を通すように切り換えられる。
Next, the operation of this embodiment will be described.
When the air that has passed through the filter 7 satisfies the specified values of the thermometer 13 and the dew point meter 12, the passage of the three-way switching valve 15a is switched to the direction of passing air to the inlet side of the ozone generator 8. Similarly, the outlet of the ozone generator 8 and the passage of the three-way switching valve 15b are switched. However, when the air that has passed through the filter 7 does not satisfy the specified values of the thermometer 13 and the dew point meter 12, the three-way switching valves 15a and 15b are switched to allow the air to flow to the bypass pipe 16 side.

【0016】このように空気が温度,露点において、オ
ゾン発生器8への流入空気として適さない状態にあると
きは、バイパス配管16側の回路に流通し、オゾン発生
器8内は空気を流すことがない。したがって、オゾン発
生器8内に湿気のある空気が入ることによる不具合(腐
食劣化,損傷)を完全に防ぐことができる。
As described above, when the air is not suitable as the inflowing air to the ozone generator 8 at the temperature and the dew point, the air flows through the circuit on the side of the bypass pipe 16 and the air flows through the ozone generator 8. There is no. Therefore, it is possible to completely prevent problems (corrosion deterioration, damage) due to the entry of humid air into the ozone generator 8.

【0017】図2は本発明の他の実施例(請求項2対
応)の系統図である。本実施例が既に説明した図1の実
施例と相違する点は、2台のオゾン発生器を備えた点で
あり、その他の構成は同一であるので、同一部分には同
一符号を付してその説明は省略する。図2に示すよう
に、オゾン発生器8a,8bの入口側には3方向切換弁
20a,20bを接続し、オゾン発生器8a,8bの出
口側には調整弁11a,11bを介して2方向弁19
a,19bの入口側に接続し、2方向弁19a,19b
の出口側は配管18a,18bに接続されている。ま
た、3方向切換弁20a,20bの他方は、バイパス配
管16a,16bに接続されている。しかして、バイパ
ス配管16a,16bに3方向切換弁20a,20bが
切り換わったとき、2方向弁19a,19bは閉の方向
になり、バイパス配管16a,16bを通った空気は大
気へ放出される。
FIG. 2 is a system diagram of another embodiment (corresponding to claim 2) of the present invention. The present embodiment is different from the embodiment of FIG. 1 described above in that it is provided with two ozone generators, and other configurations are the same. The description is omitted. As shown in FIG. 2, three-way switching valves 20a and 20b are connected to the inlet sides of the ozone generators 8a and 8b, and two-way valves are connected to the outlet sides of the ozone generators 8a and 8b via adjusting valves 11a and 11b. Valve 19
Two-way valves 19a, 19b connected to the inlet side of a, 19b
The outlet side of is connected to the pipes 18a and 18b. The other of the three-way switching valves 20a and 20b is connected to the bypass pipes 16a and 16b. Then, when the three-way switching valves 20a, 20b are switched to the bypass pipes 16a, 16b, the two-way valves 19a, 19b are closed, and the air passing through the bypass pipes 16a, 16b is released to the atmosphere. .

【0018】例えば、オゾン発生器8a側に空気を通し
オゾン発生をしているとき、バイパス配管16bを通っ
た空気を配管18a側に入れるとすれば、反応槽へ送る
オゾン化空気の濃度が変わり、オゾン反応性能に悪い影
響がでるので、バイパス配管16a,16bは纏めて大
気に放出するようにしている。
For example, if air is passed through the ozone generator 8a side to generate ozone, and if the air passed through the bypass pipe 16b is put into the pipe 18a side, the concentration of ozonized air sent to the reaction tank changes. Since the ozone reaction performance is adversely affected, the bypass pipes 16a and 16b are collectively discharged to the atmosphere.

【0019】[0019]

【発明の効果】以上説明したように、本発明によれば、
原料としての空気が温度,露点においてオゾン発生器へ
の流入空気として適さない状態にあるとき、オゾン発生
器のバイパス配管に流通させてオゾン発生器内には流通
することはないので、湿気のある空気が入ることによる
オゾン発生器の腐食劣化,損傷などの不具合を完全に防
ぐことができる。
As described above, according to the present invention,
When the air as a raw material is not suitable for the inflow air to the ozone generator at the temperature and dew point, it flows through the bypass pipe of the ozone generator and does not flow inside the ozone generator, so it is damp. It is possible to completely prevent problems such as corrosion deterioration and damage of the ozone generator due to the entry of air.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の系統図。FIG. 1 is a system diagram of an embodiment of the present invention.

【図2】本発明の他の実施例の系統図。FIG. 2 is a system diagram of another embodiment of the present invention.

【図3】従来のオゾン発生装置の系統図。FIG. 3 is a system diagram of a conventional ozone generator.

【図4】従来のオゾン発生器の断面図。FIG. 4 is a sectional view of a conventional ozone generator.

【符号の説明】[Explanation of symbols]

1…ブロワ、2…バイパス弁、3…冷却器、4…エアド
ライヤ、5a,5b,15a,15b,20a,20b
…3方向切換弁、6a,6b…吸着筒、7…フィルタ、
8,8a,8b…オゾン発生器、9…ヒータ、10,1
1,11a,11b…調整弁、12…露点計接点付、1
3…温度計接点付、14…オールドレン接点付、19
a,19b…2方向切換弁、16,16a,16b…バ
イパス配管、17,17a,17b,18,18a,1
8b…配管、30…容器、31,32…隔壁、33,3
4,38…空室、35…ガス入口、36…オゾン空気出
口、37…円筒金属管、39…冷却水入口、40…冷却
水出口、41…放電管、42…導電被膜、43…導電接
触子、44…導体、45…ブッシング。
1 ... Blower, 2 ... Bypass valve, 3 ... Cooler, 4 ... Air dryer, 5a, 5b, 15a, 15b, 20a, 20b
... 3-way switching valve, 6a, 6b ... Adsorption cylinder, 7 ... Filter,
8, 8a, 8b ... Ozone generator, 9 ... Heater, 10, 1
1, 11a, 11b ... Regulator valve, 12 ... With dew point contact, 1
3 ... With thermometer contact, 14 ... With old drain contact, 19
a, 19b ... 2-way switching valve, 16, 16a, 16b ... Bypass piping, 17, 17a, 17b, 18, 18a, 1
8b ... Piping, 30 ... Container, 31,32 ... Partition, 33,3
4, 38 ... Vacancy, 35 ... Gas inlet, 36 ... Ozone air outlet, 37 ... Cylindrical metal tube, 39 ... Cooling water inlet, 40 ... Cooling water outlet, 41 ... Discharge tube, 42 ... Conductive coating, 43 ... Conductive contact Child, 44 ... Conductor, 45 ... Bushing.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 乾燥空気供給装置から供給される乾燥空
気中の酸素からオゾンを生成するオゾン発生器を有する
オゾン発生装置において、前記乾燥空気供給装置から供
給される乾燥空気の湿度を測定するセンサーと、前記乾
燥空気供給装置と前記オゾン発生器との間に設けられ、
前記センサーにより測定される乾燥空気の湿度が予定値
以下であれば、この乾燥空気をオゾン発生器への供給管
路に供給し、予定値を越えた場合はオゾン発生器に対す
るバイパス管路側に切り換える切換弁とを備えたことを
特徴とするオゾン発生装置。
1. An ozone generator having an ozone generator that generates ozone from oxygen in the dry air supplied from the dry air supply device, and a sensor for measuring the humidity of the dry air supplied from the dry air supply device. And provided between the dry air supply device and the ozone generator,
If the humidity of the dry air measured by the sensor is less than or equal to the predetermined value, this dry air is supplied to the supply line to the ozone generator, and if it exceeds the predetermined value, it is switched to the bypass line side to the ozone generator. An ozone generator comprising a switching valve.
JP19530594A 1994-08-19 1994-08-19 Ozonizer Pending JPH0859211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19530594A JPH0859211A (en) 1994-08-19 1994-08-19 Ozonizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19530594A JPH0859211A (en) 1994-08-19 1994-08-19 Ozonizer

Publications (1)

Publication Number Publication Date
JPH0859211A true JPH0859211A (en) 1996-03-05

Family

ID=16338951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19530594A Pending JPH0859211A (en) 1994-08-19 1994-08-19 Ozonizer

Country Status (1)

Country Link
JP (1) JPH0859211A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002129341A (en) * 2000-10-24 2002-05-09 Huei-Tarng Liou Method for coating gold on quartz tube or high alumina- content tube with durability under high temperature and high voltage, and gold coated quartz tube and high alumina-content tube for ozonizer
JP2013075792A (en) * 2011-09-30 2013-04-25 Ihi Corp Ozone generating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002129341A (en) * 2000-10-24 2002-05-09 Huei-Tarng Liou Method for coating gold on quartz tube or high alumina- content tube with durability under high temperature and high voltage, and gold coated quartz tube and high alumina-content tube for ozonizer
JP2013075792A (en) * 2011-09-30 2013-04-25 Ihi Corp Ozone generating apparatus

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