JPH04139345A - Method and apparatus for supplying constant temperature and constant moisture air - Google Patents

Method and apparatus for supplying constant temperature and constant moisture air

Info

Publication number
JPH04139345A
JPH04139345A JP2262490A JP26249090A JPH04139345A JP H04139345 A JPH04139345 A JP H04139345A JP 2262490 A JP2262490 A JP 2262490A JP 26249090 A JP26249090 A JP 26249090A JP H04139345 A JPH04139345 A JP H04139345A
Authority
JP
Japan
Prior art keywords
temperature
air
target temperature
heated
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2262490A
Other languages
Japanese (ja)
Inventor
Shoichi Kobayashi
Mitsuyasu Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orion Machinery Co Ltd
Original Assignee
Orion Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orion Machinery Co Ltd filed Critical Orion Machinery Co Ltd
Priority to JP2262490A priority Critical patent/JPH04139345A/en
Publication of JPH04139345A publication Critical patent/JPH04139345A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To supply stable constant temperature and constant moisture air in a high accuracy by primarily heating cooled dehumidified air to a predetermined temperature lower than a target temperature to raise its temperature, then secondarily heating the primarily heated air to the target temperature, and supplying it.
CONSTITUTION: When the atmospheric air introduced by a blower 4 is humidified by a humidifier 5 and then passed through a cooler 7, it is cooled to be dehumidified to a temperature corresponding to the dew point of the air having temperature, moisture conditions requested in an object space 40. The air passed through the cooler 7 is heated to an intermediate predetermined temperature to a target temperature such as a predetermined temperature higher by 3-6 degrees than the temperature of the dew point by a primary heater 8. The thus primarily heated air is introduced to a secondary heater 15 at the intermediate of a hose duct, secondarily heated so that the temperature of an air supply port 18 becomes the target temperature, and supplied as the air having target temperature and moisture conditions to the object space.
COPYRIGHT: (C)1992,JPO&Japio
JP2262490A 1990-09-29 1990-09-29 Method and apparatus for supplying constant temperature and constant moisture air Pending JPH04139345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2262490A JPH04139345A (en) 1990-09-29 1990-09-29 Method and apparatus for supplying constant temperature and constant moisture air

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2262490A JPH04139345A (en) 1990-09-29 1990-09-29 Method and apparatus for supplying constant temperature and constant moisture air

Publications (1)

Publication Number Publication Date
JPH04139345A true JPH04139345A (en) 1992-05-13

Family

ID=17376522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2262490A Pending JPH04139345A (en) 1990-09-29 1990-09-29 Method and apparatus for supplying constant temperature and constant moisture air

Country Status (1)

Country Link
JP (1) JPH04139345A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06257791A (en) * 1993-02-27 1994-09-16 Orion Mach Co Ltd Constant-temperature air supplying apparatus
US5921088A (en) * 1994-07-01 1999-07-13 Komatsu Ltd. Air conditioning apparatus
US6752543B2 (en) 2002-05-23 2004-06-22 Dainippon Screen Mfg. Co. Ltd. Substrate processing apparatus
JP2012207802A (en) * 2011-03-29 2012-10-25 Nippon Steel Engineering Co Ltd Temperature and humidity adjusting device and carbon dioxide gas separating system
CN102967014A (en) * 2012-11-02 2013-03-13 伟盈技术研发(无锡)有限公司 Environmentally-friendly constant-temperature constant-moisture water exchange fresh air system
KR101677957B1 (en) * 2016-07-12 2016-11-21 강성덕 Thermo-hygrostat apparatus
CN107664340A (en) * 2017-09-12 2018-02-06 广东美的制冷设备有限公司 Air conditioner and its control method, device
CN108006917A (en) * 2017-11-29 2018-05-08 广东美的制冷设备有限公司 Air conditioner and its control method and device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06257791A (en) * 1993-02-27 1994-09-16 Orion Mach Co Ltd Constant-temperature air supplying apparatus
JPH0810064B2 (en) * 1993-02-27 1996-01-31 オリオン機械株式会社 Constant temperature air supply device
US5921088A (en) * 1994-07-01 1999-07-13 Komatsu Ltd. Air conditioning apparatus
US6752543B2 (en) 2002-05-23 2004-06-22 Dainippon Screen Mfg. Co. Ltd. Substrate processing apparatus
JP2012207802A (en) * 2011-03-29 2012-10-25 Nippon Steel Engineering Co Ltd Temperature and humidity adjusting device and carbon dioxide gas separating system
CN102967014A (en) * 2012-11-02 2013-03-13 伟盈技术研发(无锡)有限公司 Environmentally-friendly constant-temperature constant-moisture water exchange fresh air system
KR101677957B1 (en) * 2016-07-12 2016-11-21 강성덕 Thermo-hygrostat apparatus
CN107664340A (en) * 2017-09-12 2018-02-06 广东美的制冷设备有限公司 Air conditioner and its control method, device
CN107664340B (en) * 2017-09-12 2020-05-05 广东美的制冷设备有限公司 Air conditioner and control method and device thereof
CN108006917A (en) * 2017-11-29 2018-05-08 广东美的制冷设备有限公司 Air conditioner and its control method and device

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