JPH0839025A - Cleaning method - Google Patents

Cleaning method

Info

Publication number
JPH0839025A
JPH0839025A JP19588894A JP19588894A JPH0839025A JP H0839025 A JPH0839025 A JP H0839025A JP 19588894 A JP19588894 A JP 19588894A JP 19588894 A JP19588894 A JP 19588894A JP H0839025 A JPH0839025 A JP H0839025A
Authority
JP
Japan
Prior art keywords
cleaning
cleaning liquid
liquid
cleaned
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP19588894A
Other languages
Japanese (ja)
Inventor
Naoyasu Hanamura
尚容 花村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP19588894A priority Critical patent/JPH0839025A/en
Publication of JPH0839025A publication Critical patent/JPH0839025A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To control the lowering of ultrasonic cavitation effect and prevent the re-adhesion of floating soils. CONSTITUTION:A ultrasonic oscillator 2 is set on the bottom section of a cleaning tank 1. Cleaning fluid is circulated between the cleaning tank 1 and a reserve tank 3 by a circulating pump 4 and overflowed. The circulating amount of cleaning fluid is set so as to satisfy the equation [circulating amount of cleaning fluid (l/minute)]/[cleaning tank volume (liter)]=0.1-0.4.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、金属、ガラス、セラミ
ックス、プラスチック等の部品に付着した切削油等の油
脂類や接着剤や手脂、塵埃等の洗浄において、超音波に
よる洗浄効果と洗浄液の循環・オーバーフロー機構を生
かして短時間に効率的に洗浄できる洗浄方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning effect and a cleaning liquid for cleaning oils and fats such as cutting oil, adhesives, hand grease, dust, etc. adhering to parts such as metal, glass, ceramics and plastics. The present invention relates to a cleaning method capable of efficiently cleaning in a short time by utilizing the circulation / overflow mechanism of

【0002】[0002]

【従来の技術】一般に、金属、ガラス、セラミックス等
の部品に付着した切削油、機械油や手脂、塵埃などを除
去するための洗浄において、洗浄効率を上げるための補
助的手段として、超音波洗浄が行われている。そして、
洗浄時、洗浄槽内の洗浄液はオーバーフローし、予備タ
ンクに貯留されるのが通常である。予備タンクに貯留さ
れた洗浄液は、ポンプにより圧送され、フィルターを介
して塵埃を除去した後、再び洗浄槽に戻されるといった
洗浄液の循環が行われている。
2. Description of the Related Art Generally, ultrasonic waves are used as an auxiliary means for increasing cleaning efficiency in cleaning for removing cutting oil, machine oil, hand oil, dust, etc. adhering to parts such as metal, glass and ceramics. It is being cleaned. And
During cleaning, the cleaning liquid in the cleaning tank normally overflows and is stored in the spare tank. The cleaning liquid stored in the spare tank is pumped by a pump to remove dust through a filter, and then returned to the cleaning tank again to circulate the cleaning liquid.

【0003】洗浄を短時間で効率的に行うため、超音波
を用いる方法がとられているが、大部分の洗浄方法で
は、超音波のキャビテーション効果が減衰し、超音波に
よる洗浄効果が十分に得られていない。そこで、洗浄力
を上げるため、特開平4−199714号公報に開示さ
れるように、超音波の周波数を変化させたり、超音波の
発振周波数の変化に同期化させて洗浄液の深さを変化さ
せる方法が行われている。
In order to carry out the cleaning efficiently in a short time, a method using ultrasonic waves has been adopted. However, in most cleaning methods, the cavitation effect of ultrasonic waves is attenuated and the cleaning effect by ultrasonic waves is sufficient. Not obtained. Therefore, in order to increase the cleaning power, as disclosed in Japanese Patent Laid-Open No. 4-199714, the frequency of ultrasonic waves is changed, or the depth of the cleaning liquid is changed in synchronization with the change in oscillation frequency of ultrasonic waves. The way is done.

【0004】また、被洗浄物を洗浄槽から引き上げると
き、液面に浮遊している油等の再付着を防止するため、
洗浄液をオーバーフローさせて液面に浮遊している油等
の汚れを除去する方法が一般的に行われている。特開平
5−92186号公報には、洗浄槽の−側から液流出側
(オーバーフロー側)に向けて圧力空気を噴出させ、浮
遊している油等を強制的にオーバーフローさせる方法が
開示されている。
When the object to be cleaned is pulled out from the cleaning tank, in order to prevent re-adhesion of oil floating on the liquid surface,
A method of overflowing the cleaning liquid to remove dirt such as oil floating on the liquid surface is generally used. Japanese Unexamined Patent Publication No. 5-92186 discloses a method in which pressurized air is jetted from the negative side of the cleaning tank toward the liquid outflow side (overflow side) to force the floating oil or the like to overflow. .

【0005】[0005]

【発明が解決しようとする課題】しかしながら、超音波
洗浄において、洗浄液をポンプを用いて循環させること
は、洗浄槽内で洗浄液の乱流が発生するため、超音波の
キャビテーション効果が著しく低下する。その結果、十
分な洗浄効果が得られない。
However, in the ultrasonic cleaning, when the cleaning liquid is circulated by using a pump, a turbulent flow of the cleaning liquid occurs in the cleaning tank, so that the cavitation effect of the ultrasonic waves is significantly reduced. As a result, a sufficient cleaning effect cannot be obtained.

【0006】特開平4−199714号公報で用いられ
ている方法では、超音波の周波数を変化させたり、同期
化して液の深さを変化させて超音波のキャビテーション
効果の低下を防止しようとしているが、その装置の複雑
さや作業の煩雑さ、更にコストアップ等を考えると実用
的でない。また、洗浄液を循環させてオーバーフローさ
せないと油等の汚れが洗浄液面に浮遊しているため、被
洗浄物を洗浄槽から引き上げるときに汚れが再付着して
しまう。そこで、特開平5−92186号公報で用いら
れている方法は、洗浄槽の−側から液流出側(オーバー
フロー側)に向けて圧力空気を噴出させて、浮遊してい
る油等を強制的にオーバーフローさせている。しかし、
この方法では、被洗浄物を洗浄液中から引き上げるとき
に圧力空気が被洗浄物に直接あたるため、被洗浄物が乾
燥して、洗浄液の成分が被洗浄物に乾燥固化し、被洗浄
物にシミ等の不具合が発生するという問題がある。ま
た、この方法では、洗浄液の液面に浮遊している汚れは
ある程度除去できるが完全ではなく、洗浄液と混合され
ないため、乳化・溶解が困難である。
The method used in Japanese Patent Laid-Open No. 4-199714 attempts to prevent the cavitation effect of ultrasonic waves from being lowered by changing the frequency of ultrasonic waves or changing the depth of the liquid in synchronization. However, it is not practical considering the complexity of the device, the complexity of the work, and the cost increase. Further, if the cleaning liquid is circulated and does not overflow, dirt such as oil floats on the surface of the cleaning liquid, so that the dirt is redeposited when the object to be cleaned is pulled out from the cleaning tank. Therefore, in the method used in Japanese Patent Laid-Open No. 5-92186, pressured air is jetted from the-side of the cleaning tank toward the liquid outflow side (overflow side) to forcibly suspend floating oil and the like. It is overflowing. But,
In this method, when the object to be cleaned is pulled out of the cleaning liquid, the pressurized air directly hits the object to be cleaned, so that the object to be cleaned is dried, the components of the cleaning liquid are dried and solidified on the object to be cleaned, and stains are formed on the object to be cleaned. There is a problem that problems such as the above occur. Further, with this method, although the dirt floating on the surface of the cleaning liquid can be removed to some extent, it is not perfect and is not mixed with the cleaning liquid, so that emulsification and dissolution are difficult.

【0007】本発明は、かかる従来の問題点に鑑みてな
されたもので、請求項1に係る発明は洗浄液の循環量を
規定して、汚れの再付着を防止する洗浄液のオーバーフ
ロー機能を有しながら、超音波のキャビテーション効果
の低下を抑えられる洗浄方法を提供することを目的とす
る。
The present invention has been made in view of the above-mentioned conventional problems, and the invention according to claim 1 has an overflow function of the cleaning liquid for defining the circulation amount of the cleaning liquid and preventing reattachment of dirt. However, it is an object of the present invention to provide a cleaning method capable of suppressing deterioration of the cavitation effect of ultrasonic waves.

【0008】請求項2に係る発明は、超音波が出力して
洗浄している間は洗浄液の循環を停止することによっ
て、超音波の効果を最大限発揮させ、更に被洗浄物を洗
浄槽に浸漬した直後と洗浄完了直前から洗浄液を循環さ
せることによって、浮遊している汚れの再付着を防止で
きる洗浄方法を提供することを目的とする。
According to the second aspect of the invention, the ultrasonic effect is maximized by stopping the circulation of the cleaning liquid while the ultrasonic waves are being output and the cleaning is performed. An object of the present invention is to provide a cleaning method capable of preventing reattachment of floating dirt by circulating a cleaning liquid immediately after immersion and immediately before completion of cleaning.

【0009】請求項3に係る発明は、汚れの持ち込み量
が多く、液面に多くの汚れが浮遊するため、常時強制的
に洗浄液をオーバーフローさせる必要がある場合、超音
波のキャビテーション効果の低下を抑え、且つ、汚れの
再付着を防止できる洗浄方法を提供することを目的とす
る。
According to the third aspect of the present invention, since a large amount of dirt is carried in and a large amount of dirt floats on the liquid surface, when it is necessary to forcibly overflow the cleaning liquid at all times, the cavitation effect of ultrasonic waves is reduced. An object of the present invention is to provide a cleaning method that can suppress and prevent redeposition of dirt.

【0010】すなわち、以上のような洗浄液の循環量,
液循環の方法,洗浄液の供給方法を用いることによっ
て、超音波による洗浄効果を高め、十分な洗浄品質が得
られる洗浄方法を提供する。
That is, the circulation amount of the cleaning liquid as described above,
A cleaning method that enhances the cleaning effect by ultrasonic waves and provides sufficient cleaning quality by using a liquid circulation method and a cleaning liquid supply method.

【0011】[0011]

【課題を解決するための手段】上記課題を解決するため
に、請求項1に係る発明は、超音波を用いて洗浄する洗
浄方法において、洗浄液の循環量を、 [洗浄液の循環量(リットル/分)]/[洗浄槽容量
(リットル)]=0.1〜0.4 にすることとした。
In order to solve the above problems, the invention according to claim 1 provides a cleaning method in which cleaning is performed using ultrasonic waves, wherein the circulating amount of the cleaning liquid is [circulating amount of cleaning liquid (liter / liter / Min)] / [washing tank capacity (liter)] = 0.1 to 0.4.

【0012】請求項2に係る発明は、超音波を用いて洗
浄する洗浄方法において、被洗浄物を洗浄している間は
洗浄液の循環を停止させる間欠循環を行うこととした。
According to the second aspect of the present invention, in the cleaning method using ultrasonic waves, intermittent circulation is performed to stop the circulation of the cleaning liquid while the object to be cleaned is being cleaned.

【0013】請求項3に係る発明は、洗浄槽内の洗浄液
の液面から下方100mm以内の場所で、水平方向と鉛
直下方向とに洗浄液を均一に分散して供給することを特
徴とする洗浄方法である。
The invention according to claim 3 is characterized in that the cleaning liquid is uniformly dispersed and supplied in a horizontal direction and a vertically downward direction at a position within 100 mm below the surface of the cleaning liquid in the cleaning tank. Is the way.

【0014】[0014]

【作用】請求項1に係る発明の作用は、洗浄液の循環量
として、循環量の洗浄槽容量の比を [洗浄液の循環量(リットル/分)]/[洗浄槽容量
(リットル)]=0.1〜0.4 に設定し、洗浄液の循環量を制御することによって、超
音波のキャビテーション効果を低下させることなく洗浄
することである。また、この時、循環している洗浄液を
洗浄槽内に供給するとき、供給洗浄液が直接被洗浄物に
当たらないように供給口に分散板等を設け、洗浄液を分
散供給することによって、更に超音波のキャビテーショ
ン効果の低下を抑えることができる。
The operation of the invention according to claim 1 is that, as the circulation amount of the cleaning liquid, the ratio of the circulation amount of the cleaning tank is [the circulation amount of the cleaning liquid (liter / minute)] / [the cleaning tank volume (liter)] = 0. 0.1 to 0.4 and control the circulating amount of the cleaning liquid to perform cleaning without lowering the cavitation effect of ultrasonic waves. Further, at this time, when the circulating cleaning liquid is supplied into the cleaning tank, a dispersion plate or the like is provided at the supply port so that the supplied cleaning liquid does not directly contact the object to be cleaned, and the cleaning liquid is dispersed and supplied, thereby further It is possible to suppress deterioration of the cavitation effect of sound waves.

【0015】請求項2に係る発明では、洗浄液の循環を
循環ポンプのON・OFF制御により、被洗浄物が洗浄
槽に浸漬している間(超音波発振時)は洗浄液の循環を
停止する。洗浄液の循環を停止することにより、洗浄槽
内の洗浄液の乱流がなくなり、超音波のキャビテーショ
ン効果が高くなって、超音波洗浄本来の効果が発揮さ
れ、洗浄性が向上する。この間欠循環方法の具体例とし
ては、洗浄完了の直前(120秒以内)から次の被洗浄
物が入った後の一定時間(120秒以内)まで洗浄液を
循環させ、それ以外は、洗浄液の循環を停止する等であ
る。これにより、洗浄槽内の洗浄液の滞留防止と洗浄液
のオーバーフロー機能(浮遊している汚れの再付着防
止)持たせたまま、超音波洗浄の効果も発揮され、洗浄
性が向上する。この時、超音波は常時発振していても、
被洗浄物が洗浄槽内に入った時のみ発振してもかまわな
い。
In the invention according to claim 2, the circulation of the cleaning liquid is stopped by the ON / OFF control of the circulation pump while the object to be cleaned is immersed in the cleaning tank (at the time of ultrasonic oscillation). By stopping the circulation of the cleaning liquid, the turbulent flow of the cleaning liquid in the cleaning tank is eliminated, the cavitation effect of ultrasonic waves is enhanced, the original effect of ultrasonic cleaning is exerted, and the cleaning performance is improved. As a specific example of this intermittent circulation method, the cleaning liquid is circulated from immediately before the completion of cleaning (within 120 seconds) to a fixed time (within 120 seconds) after the next object to be cleaned, and in other cases, circulation of the cleaning liquid. And so on. As a result, the effect of ultrasonic cleaning is exerted while the retention function of the cleaning liquid in the cleaning tank and the overflow function of the cleaning liquid (prevention of reattachment of floating dirt) are exerted, and the cleaning property is improved. At this time, even if the ultrasonic waves are constantly oscillating,
It may oscillate only when the object to be cleaned enters the cleaning tank.

【0016】請求項3に係る発明の作用は、被洗浄物か
らの汚れの混入が激しく、常時洗浄液を循環させる必要
がある場合に、図2に示すように、予備タンク3から循
環してきた洗浄液の噴出を液面下方100mm以内から
水平方向と鉛直下方向の双方に向けることによって、洗
浄槽1内の超音波のキャビテーション効果の低下を防止
しながら、浮遊している汚れを押し出す強制的なオーバ
ーフロー機能と、洗浄槽1内の洗浄液を入れ替え、液の
滞留が防止ができることである。
The effect of the invention according to claim 3 is that, when dirt is heavily mixed from the object to be cleaned and it is necessary to constantly circulate the cleaning liquid, as shown in FIG. By directing the jet of water from within 100 mm below the liquid surface in both the horizontal and vertical downward directions, it is possible to prevent the cavitation effect of ultrasonic waves in the cleaning tank 1 from decreasing while forcibly overflowing the floating dirt. The function is to replace the cleaning liquid in the cleaning tank 1 and prevent the liquid from staying.

【0017】循環している洗浄液で強制的にオーバーフ
ローさることにより、短時間で効率的に浮遊している汚
れを除去し、被洗浄物への再付着を防止することができ
る。このときの、水平方向と鉛直下方向に出す洗浄液
は、洗浄槽全面に広がるよう分散噴出するとよく、オー
バーフローする面積は、液面全面にできる限り広く取っ
た方が効率が良い。この方法によれば、被洗浄物を乾燥
させたり、圧力空気等の特別の装置を必要とせず、被洗
浄物への影響もなく、かつ、低コストで洗浄効果を上げ
ることができる。なお、このときに用いる洗浄液は、水
系洗浄液、非水系洗浄液を選ばず、全ての種類の洗浄液
に用いることができる。
By forcibly overflowing with the circulating cleaning liquid, the floating dirt can be efficiently removed in a short time, and reattachment to the object to be cleaned can be prevented. At this time, the cleaning liquid discharged in the horizontal direction and the vertically downward direction may be dispersed and jetted so as to spread over the entire surface of the cleaning tank, and it is more efficient to make the overflow area as wide as possible over the entire liquid surface. According to this method, it is possible to enhance the cleaning effect at a low cost without drying the object to be cleaned or requiring a special device such as pressurized air to affect the object to be cleaned. The cleaning liquid used at this time is not limited to an aqueous cleaning liquid and a non-aqueous cleaning liquid, and can be used for all kinds of cleaning liquids.

【0018】[0018]

【実施例】次に、図1から図4を用いて本発明の実施例
を説明する。図1は、洗浄機の概念図を示す。図1に示
す洗浄機には、洗浄槽1の底部に28kHz・600W
の超音波発振器2が設置されている。また、洗浄液は洗
浄槽1と予備タンク3との間を循環ポンプ4で循環し、
洗浄液をオーバーフローさせる機能を有している。
EXAMPLES Next, examples of the present invention will be described with reference to FIGS. FIG. 1 shows a conceptual diagram of a washing machine. In the washing machine shown in FIG. 1, 28 kHz.
The ultrasonic oscillator 2 is installed. The cleaning liquid is circulated between the cleaning tank 1 and the spare tank 3 by the circulation pump 4,
It has the function of overflowing the cleaning liquid.

【0019】被洗浄物5としては、微細な汚れの残留も
目視で判断が可能な物として、光学硝子レンズと光学硝
子プリズム(硝材BK7、(株)小原光学硝子製造所
製)を用いた。洗浄サンプルは、汚れとして切削油(ダ
フニーカットGS90、出光興産(株)製)に浸漬した
ものと加工用接着剤(アスファルト系ピッチK1、九重
電気(株)製)を1.2mm塗布したものを用いた。
As the object to be cleaned 5, an optical glass lens and an optical glass prism (glass material BK7, manufactured by Ohara Optical Glass Manufacturing Co., Ltd.) were used so that the presence of minute stains can be visually judged. The washed sample was one that was dipped in cutting oil (Daphne Cut GS90, manufactured by Idemitsu Kosan Co., Ltd.) as stains, and coated with 1.2 mm of a processing adhesive (asphalt pitch K1, manufactured by Kuju Denki KK). Using.

【0020】洗浄液は、水系洗浄液EE−1120また
は非水系洗浄液EE−4110(共にオリンパス光学工
業(株)製)を用いた。
As the cleaning liquid, an aqueous cleaning liquid EE-1120 or a non-aqueous cleaning liquid EE-4110 (both manufactured by Olympus Optical Co., Ltd.) was used.

【0021】[実施例1]洗浄液は循環方法として、常
時循環した場合と間欠循環法による場合で洗浄効果の差
を確認した結果を表1に示す。洗浄液の循環量は、8リ
ットル/分に設定した。
[Example 1] Table 1 shows the results of confirming the difference in the cleaning effect between the case where the cleaning liquid is constantly circulated and the case where the cleaning liquid is intermittently circulated. The circulation rate of the cleaning liquid was set to 8 liters / minute.

【0022】[0022]

【表1】 [Table 1]

【0023】ここで、間欠循環法としては、被洗浄物を
浸漬後、30秒間洗浄液を循環オーバーフローさせ、そ
の後、洗浄液の循環を停止した。更に、洗浄完了30秒
前に再度、洗浄液を循環オーバーフローさせた後、被洗
浄物を引き上げる方法をとった。
As the intermittent circulation method, the cleaning liquid is circulated and overflowed for 30 seconds after the object to be cleaned is dipped, and then the circulation of the cleaning liquid is stopped. Further, 30 seconds before the completion of cleaning, the cleaning solution was circulated again and overflowed, and then the object to be cleaned was pulled up.

【0024】洗浄液には、アルカリ性水系洗浄液EE−
1120を用いた。洗浄液の温度は、30℃に設定し
た。洗浄槽は、槽容量20リットルのものを用いた。
As the cleaning liquid, an alkaline aqueous cleaning liquid EE-
1120 was used. The temperature of the cleaning liquid was set to 30 ° C. The cleaning tank used had a tank capacity of 20 liters.

【0025】被洗浄物としては、切削油に浸漬したもの
と手脂を強制的に付着させた光学硝子レンズを洗浄し、
レンズ表面の洗浄度合いを目視(呼気試験)により検査
・評価した。この結果から、洗浄液の循環を停止するこ
とによって超音波による洗浄効果が飛躍的に向上し、シ
ミが発生するレンズがほとんどなくなると共に、レンズ
に発生したシミの程度も極めて薄く、次工程でコーティ
ングを行ってもコート膜の剥離等の不具合が発生せず、
良好な洗浄品質を確認した。
As the objects to be cleaned, those immersed in cutting oil and the optical glass lens forcibly adhered with hand oil are cleaned,
The degree of cleaning of the lens surface was visually inspected and evaluated (breath test). From this result, the cleaning effect by ultrasonic waves is dramatically improved by stopping the circulation of the cleaning liquid, the lens that causes the stain is almost eliminated, and the stain generated on the lens is extremely thin. Even if you go, problems such as peeling of the coat film do not occur,
A good cleaning quality was confirmed.

【0026】しかし、全く洗浄液を循環させないと洗浄
液の表面に浮遊している油等の汚れが、洗浄完了後、レ
ンズを引き上げる時にレンズ表面に再付着し、汚れの残
留によるシミが発生した。したがって、被洗浄物を浸漬
した直後と引き上げる直前に洗浄液を循環させ、洗浄液
をオーバーフローさせることにより、浮遊している油等
の汚れの再付着が防止できる効果が確認できた。
However, if the cleaning liquid was not circulated at all, stains such as oil floating on the surface of the cleaning liquid were reattached to the lens surface when the lens was pulled up after the cleaning was completed, and stains due to the residual stain were generated. Therefore, it was confirmed that the cleaning liquid was circulated immediately before the immersion of the object to be cleaned and immediately before it was pulled up, and the cleaning liquid was allowed to overflow, whereby the reattachment of dirt such as floating oil could be prevented.

【0027】[実施例2]洗浄液の循環量の差による洗
浄性を確認するため、切削油に浸漬したものと手脂を強
制的に付着させた光学硝子レンズを洗浄液の循環量を変
化させて洗浄し、レンズ表面の洗浄度合いを目視(呼気
試験)により検査・評価した。洗浄液には、アルカリ性
水系洗浄液EE−1120を用いた。洗浄液の温度は、
30℃に設定した。洗浄槽は、槽容量20リットルのも
のを用いた。洗浄後の評価で汚れ等の残留によるシミや
曇り等が発生した光学硝子レンズの数を表2に示す。
[Embodiment 2] In order to confirm the cleaning performance by the difference in the circulating amount of the cleaning liquid, the circulating amount of the cleaning liquid was changed between the optical glass lens immersed in cutting oil and the optical glass lens forcibly adhering the hand oil. After cleaning, the degree of cleaning of the lens surface was visually inspected and evaluated (breath test). As the cleaning liquid, an alkaline aqueous cleaning liquid EE-1120 was used. The temperature of the cleaning solution is
It was set to 30 ° C. The cleaning tank used had a tank capacity of 20 liters. Table 2 shows the number of optical glass lenses in which stains and fogging due to residual stains were generated in the evaluation after cleaning.

【0028】[0028]

【表2】 [Table 2]

【0029】この結果から、洗浄液の循環量を浮遊した
油や汚れをオーバーフローさせるのに必要な最少量に設
定することで、汚れの再付着を防止しながら、かつ、超
音波の効果を十分引き出した洗浄が可能で、洗浄性の向
上が確認できた。
From this result, by setting the circulating amount of the cleaning liquid to the minimum amount necessary to overflow the floating oil and dirt, the dirt can be prevented from being reattached and the ultrasonic effect can be sufficiently obtained. It was possible to perform cleaning, and it was confirmed that the cleaning performance was improved.

【0030】特に、循環量を2リットル/分(循環量/
槽容量=0.1)に設定した条件では、レンズに発生し
たシミの程度は極めて薄く、次工程でコーティングを行
ってもコート膜の剥離等の不具合が発生せず、良好な洗
浄品質を確認した。
In particular, the circulation rate is 2 liters / minute (circulation rate /
Under the condition of setting the tank volume = 0.1), the degree of stains on the lens is extremely small, and even if coating is performed in the next step, defects such as peeling of the coat film do not occur, and good cleaning quality is confirmed. did.

【0031】同様に、非水系洗浄液EE−4110を用
いて、ピッチK1が1.2mm付着した光学硝子レンズ
を用いてピッチの洗浄性を確認した。洗浄液の液温は4
0℃に設定した。洗浄槽は槽容量20リットルのものを
用いた。ピッチが完全に洗浄できるまでの時間を表3に
示す。
Similarly, the non-aqueous cleaning liquid EE-4110 was used to confirm the cleaning property of the pitch using an optical glass lens having a pitch K1 of 1.2 mm attached thereto. The cleaning liquid temperature is 4
It was set to 0 ° C. The cleaning tank used had a tank capacity of 20 liters. Table 3 shows the time required for the pitch to be completely cleaned.

【0032】[0032]

【表3】 [Table 3]

【0033】この結果から、洗浄液の循環量を最少量に
設定することにより、超音波のキャビテーション効果を
十分引き出した洗浄が可能で、短時間でピッチが洗浄で
きた。特に、自動搬送方式を用いた洗浄機で、一定のタ
クトタイム内で短時間に洗浄を行う工程では、循環量を
2リットル/分(循環量/槽容量=0.1)に設定した
条件が有効であった。
From these results, it was possible to carry out the cleaning with a sufficient cavitation effect of ultrasonic waves by setting the circulating amount of the cleaning liquid to the minimum amount, and the pitch could be cleaned in a short time. In particular, in the process of washing in a short time within a constant takt time with a washing machine using an automatic transfer system, the condition that the circulation rate is set to 2 liters / minute (circulation rate / tank volume = 0.1) It was effective.

【0034】[実施例3]洗浄液の供給方法の差による
洗浄性を確認するため、多量の切削油に浸漬した光学硝
子プリズムを洗浄した。
[Embodiment 3] In order to confirm the cleaning property due to the difference in the supply method of the cleaning liquid, the optical glass prism immersed in a large amount of cutting oil was cleaned.

【0035】洗浄液には、アルカリ性水系洗浄液EE−
1120を用いた。洗浄液の温度は、30℃に設定し
た。洗浄槽は、槽容量20リットルのものを用いた。プ
リズム表面の洗浄度合いを目視(呼気試験)により検査
・評価した結果を表4に示す。
As the cleaning liquid, an alkaline aqueous cleaning liquid EE-
1120 was used. The temperature of the cleaning liquid was set to 30 ° C. The cleaning tank used had a tank capacity of 20 liters. Table 4 shows the results of visual inspection (exhalation test) for the degree of cleaning of the prism surface.

【0036】[0036]

【表4】 [Table 4]

【0037】この結果から、洗浄槽の底付近から循環液
を直接供給した場合(図4)と、循環液を水平方向と鉛
直下方に供給した場合(図2)の洗浄仕上がり品質を比
較すると、後者の方法では、多量の油が表面に浮遊して
も循環液を液面水平方向に供給して、浮遊している油を
強制的にオーバーフローするため、被洗浄物への再付着
が防止でき良好な洗浄結果が得られた。また、洗浄液を
鉛直下方にも出すことで、洗浄槽内の汚れた洗浄液の滞
留も防止できた。
From these results, when the circulating liquid is directly supplied from near the bottom of the cleaning tank (FIG. 4) and the circulating liquid is supplied vertically and vertically (FIG. 2), the cleaning finish quality is compared. In the latter method, even if a large amount of oil floats on the surface, the circulating fluid is supplied in the horizontal direction of the liquid surface, and the floating oil is forced to overflow, preventing re-adhesion to the object to be cleaned. Good cleaning results were obtained. Further, by discharging the cleaning liquid vertically downward, it is possible to prevent the dirty cleaning liquid from staying in the cleaning tank.

【0038】また、循環してきた洗浄液を洗浄槽内に供
給するときに、洗浄液が直接被洗浄物に当たらないよ
う、邪魔板6(分散板)で分散することでも、直接供給
するより良好な洗浄結果が得られた(図5)。これは、
超音波の定在波を乱すことなく、超音波のキャビテーシ
ョン効果を十分引き出した洗浄が可能になったためであ
る。
Further, when the circulating cleaning liquid is supplied into the cleaning tank, the cleaning liquid is dispersed by the baffle plate 6 (dispersion plate) so that the cleaning liquid does not directly contact the object to be cleaned. Results were obtained (Fig. 5). this is,
This is because it is possible to perform cleaning with the cavitation effect of ultrasonic waves sufficiently drawn out without disturbing the standing waves of ultrasonic waves.

【0039】洗浄品質としては、プリズムに発生したシ
ミの程度も極めて薄く、次工程でコーティングを行って
もコート膜の剥離等の不具合が発生せず、良好な洗浄品
質を確認した。
As for the cleaning quality, the degree of stains generated on the prism was extremely small, and even if coating was performed in the next step, defects such as peeling of the coating film did not occur, and good cleaning quality was confirmed.

【0040】以上の結果から、洗浄液の供給時に液の乱
流を防止して、超音波の定在波を乱すことなく、かつ、
効率的に浮遊している汚れをオーバーフロー除去さるこ
とにより、多量の油が付着した被洗浄物を連続洗浄する
場合も超音波の効果を低下させることなく洗浄すること
ができることがわかった。
From the above results, it is possible to prevent the turbulent flow of the cleaning liquid at the time of supplying the cleaning liquid without disturbing the standing wave of ultrasonic waves, and
It was found that by efficiently removing the floating contaminants by overflow, it is possible to perform cleaning without lowering the effect of ultrasonic waves even when the object to be cleaned to which a large amount of oil has adhered is continuously cleaned.

【0041】[0041]

【発明の効果】以上のように、請求項1〜3に係る発明
によれば、洗浄液の循環量のコントロール、洗浄液の循
環方法または洗浄液の供給方法を改良することにより、
洗浄効果に大きく影響する超音波のキャビテーョン効果
を最大限に引き出し、効果的かつ効率的に被洗浄物の洗
浄行うことができ、また、超音波の洗浄効果を低下させ
ることなく、浮遊した汚れを効率的に除去し、被洗浄物
への汚れの再付着を防止しながら洗浄性を向上させるこ
とができる。
As described above, according to the inventions of claims 1 to 3, by improving the control of the circulating amount of the cleaning liquid, the cleaning liquid circulating method or the cleaning liquid supplying method,
The cavitation effect of ultrasonic waves, which greatly affects the cleaning effect, can be maximized to effectively and efficiently clean the object to be cleaned, and the floating dirt can be removed without reducing the ultrasonic cleaning effect. It is possible to efficiently remove and improve the cleaning property while preventing reattachment of dirt to the object to be cleaned.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例1,2で用いた洗浄機を示す概略側面図
である。
FIG. 1 is a schematic side view showing a washing machine used in Examples 1 and 2.

【図2】実施例3で用いた洗浄機を示す概略側面図であ
る。
FIG. 2 is a schematic side view showing a washing machine used in a third embodiment.

【図3】実施例3で用いた洗浄機を示す概略平面図であ
る。
FIG. 3 is a schematic plan view showing a cleaning machine used in a third embodiment.

【図4】実施例3で用いた他の洗浄機を示す概略側面図
である。
FIG. 4 is a schematic side view showing another washing machine used in Example 3.

【図5】実施例3で用いた他の洗浄機を示す概略側面図
である。
FIG. 5 is a schematic side view showing another washing machine used in the third embodiment.

【符号の説明】[Explanation of symbols]

1 洗浄槽 2 超音波発振器 3 予備タンク 4 循環ポンプ 5 被洗浄物 1 Cleaning tank 2 Ultrasonic oscillator 3 Spare tank 4 Circulation pump 5 Cleaning object

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 超音波を用いて洗浄する洗浄方法におい
て、洗浄液の循環量を、 [洗浄液の循環量(リットル/分)]/[洗浄槽容量
(リットル)]=0.1〜0.4 にすることを特徴とする洗浄方法。
1. A cleaning method in which cleaning is performed using ultrasonic waves, wherein the circulation amount of the cleaning liquid is [circulation amount of cleaning liquid (liter / min)] / [cleaning tank volume (liter)] = 0.1 to 0.4. A cleaning method comprising:
【請求項2】 超音波を用いて洗浄する洗浄方法におい
て、被洗浄物を洗浄している間は洗浄液の循環を停止さ
せる間欠循環を行うことを特徴とする洗浄方法。
2. A cleaning method for cleaning using ultrasonic waves, characterized by performing intermittent circulation for stopping the circulation of the cleaning liquid while the object to be cleaned is being cleaned.
【請求項3】 洗浄槽内の洗浄液の液面から下方100
mm以内の場所で、水平方向と鉛直下方向とに洗浄液を
均一に分散して供給することを特徴とする洗浄方法。
3. The cleaning liquid in the cleaning tank is located 100 below the surface of the cleaning liquid.
A cleaning method characterized in that a cleaning liquid is uniformly dispersed and supplied in a horizontal direction and a vertically downward direction at a location within a mm.
JP19588894A 1994-07-28 1994-07-28 Cleaning method Withdrawn JPH0839025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19588894A JPH0839025A (en) 1994-07-28 1994-07-28 Cleaning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19588894A JPH0839025A (en) 1994-07-28 1994-07-28 Cleaning method

Publications (1)

Publication Number Publication Date
JPH0839025A true JPH0839025A (en) 1996-02-13

Family

ID=16348660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19588894A Withdrawn JPH0839025A (en) 1994-07-28 1994-07-28 Cleaning method

Country Status (1)

Country Link
JP (1) JPH0839025A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007287790A (en) * 2006-04-13 2007-11-01 Tokyo Electron Ltd Substrate cleaning method, substrate cleaning device and program, and recording medium
WO2014050700A1 (en) * 2012-09-26 2014-04-03 大日本印刷株式会社 Glass reprocessing method, remade glass substrate, and photo mask blank and photo mask employing same
CN108854559A (en) * 2018-09-07 2018-11-23 华电水务膜分离科技(天津)有限公司 Suitable for the ultrasonic cleaning equipment of hollow fiber film assembly, system and technique
WO2020067227A1 (en) * 2018-09-26 2020-04-02 日本製鉄株式会社 Metal pipe cleaning method and cleaning device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007287790A (en) * 2006-04-13 2007-11-01 Tokyo Electron Ltd Substrate cleaning method, substrate cleaning device and program, and recording medium
US8449684B2 (en) 2006-04-13 2013-05-28 Tokyo Electron Limited Substrate cleaning method, substrate cleaning system and program storage medium
WO2014050700A1 (en) * 2012-09-26 2014-04-03 大日本印刷株式会社 Glass reprocessing method, remade glass substrate, and photo mask blank and photo mask employing same
JPWO2014050700A1 (en) * 2012-09-26 2016-08-22 大日本印刷株式会社 Glass regeneration processing method, recycled glass substrate, and photomask blanks and photomasks using the same
CN108854559A (en) * 2018-09-07 2018-11-23 华电水务膜分离科技(天津)有限公司 Suitable for the ultrasonic cleaning equipment of hollow fiber film assembly, system and technique
WO2020067227A1 (en) * 2018-09-26 2020-04-02 日本製鉄株式会社 Metal pipe cleaning method and cleaning device
CN112739465A (en) * 2018-09-26 2021-04-30 日本制铁株式会社 Method and apparatus for cleaning metal pipe
JPWO2020067227A1 (en) * 2018-09-26 2021-08-30 日本製鉄株式会社 Cleaning method and cleaning device for metal pipes

Similar Documents

Publication Publication Date Title
JP2006346531A (en) Method of washing optical element
JP2007090344A (en) Method for cleaning hollow component, cleaning assembly and method for maintenance of turbine blade
US4375992A (en) Apparatus and method for cleaning recorded discs
JP6437949B2 (en) Emulsion cleaning device
JP5892109B2 (en) Ultrasonic cleaning apparatus and cleaning method
JPH0839025A (en) Cleaning method
JPH0695509B2 (en) Cleaning method and its apparatus
JPH065577A (en) Substrate cleaning device
JP2002273358A (en) Method for cleaning optical element
JPH09143767A (en) Method and device for cleaning surface of metallic material
KR200246383Y1 (en) A bathtub of the ultrasonic-washer for the glasses
JP2005158132A (en) Method for washing magnetic head and magnetic head using same
JPH0448629A (en) Liquid processor for semiconductor wafer
JPH07214014A (en) Washing device
JPS61148821A (en) Processing apparatus
TW201318719A (en) Method of cleaning a substrate using the ultrasonic vibration of a medium
JPH0699149A (en) Ultrasonic cleaning method
JP3951157B2 (en) Metal mask plate cleaning method
JP2004241639A (en) Development processing method and development processor
JP2004082076A (en) Washing apparatus
JP3549285B2 (en) Substrate cleaning method and cleaning apparatus, high-clean substrate manufacturing method and high-clean substrate
JP4744260B2 (en) Degreasing device and door frame manufacturing system
JPH09164374A (en) Ultrasonic cleaner
JP2000058493A (en) Cleaning equipment for silicon wafer
JPH07155715A (en) Water-soluble washing device

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20011002