JPH0835988A - Inspection prober - Google Patents

Abstract

PURPOSE:To provide the inspection prober having high reliability and economic efficiency, which can accurately support the position of the tip part of a probe without impairing the elasticity of the probe and can cope with the terminals of a highly integrated part under inspection arranged at minute pitches. CONSTITUTION:Each probe 3 is coupled into each groove of a plurality of probe coupling grooves 15, which are provided at the lower surface of a probe supporting block 11 under the electrically insulated state to each other. Under the state, wherein allowance is provided in the depth direction in the groove 15 so that the front tip part and the base part of each probe can be moved up and down to some extent and the probe can be bent, the vicinity of the intermediate part of the probe is fixed with a bonding agent 16. Then, the probe supporting block 11 is attached to an inspecting hole 2 of a board 1 so that the block can be attached and removed under the state, wherein the base part of each probe 3 is in contact with each terminal, 5 of the signal input/output board 1. In this constitution, each probe 3 can be supported so that the probe can be moved up and down to the vicinity of the front tip part. Furthermore, the same board can be utilized commonly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention, in order to inspect the electrical performance of highly integrated electronic components such as LSI, contact the tip of the probe with the terminal of the component to be inspected and The present invention relates to an inspection prober that inputs and outputs an inspection signal with an inspection device.

[0002]

2. Description of the Related Art FIG. 8 is a plan view showing an example of a conventional inspection prober, and FIG. 9 is a vertical sectional view of the inspection prober.

As shown in the figure, this inspection prober has a plurality of conductive conductive probes 3 such as piano wires in an inspection hole 2 in the center of a signal input / output board 1 having a donut disk shape.
Is made to project.

A plurality of pairs of signal input / output terminals 5 and 6 which are electrically connected to each other to form a pair are arranged on the inner peripheral side and the outer peripheral side of the lower surface of the board 1, and the signal on the inner peripheral side thereof is arranged. The base end portion of the probe 3 is fixed to each of the input / output terminals 5 using solder 7 or the like. And the tip of each probe 3
It projects into the inspection hole 2 of the board and is bent downward.

When the electrical performance of an electronic component, for example, a circuit element 9 formed on a silicon wafer is inspected using this inspection prober, the inspection hole 2 of the board 1 is used to inspect the circuit element 9 which is the inspected component. In accordance with the above, by holding the tip of each probe 3 in contact with a plurality of terminals of the circuit element 9, each terminal of the circuit element 9 and the signal input / output terminal 6 on the outer peripheral side of the board 1 are held. An inspection signal is input to and output from an inspection device (not shown) connected to.

The position of the tip of each probe 3 is set in advance in accordance with the position of each terminal of the circuit element 9 which is the component to be inspected. When each probe 3 comes into contact with the corresponding terminal, the probe 3 is bent by the elastic force of the probe 3 and is brought into pressure contact with each terminal without being shocked to be electrically connected.

[0007]

However, in the above-described conventional inspection prober, the length of the unsupported portion of each probe 3 protruding into the inspection hole 2 of the signal input / output board 1 is determined by the length of each probe 3.
It must be set long enough to ensure the elasticity of the. For this reason, it is difficult to align the tip end portion of each probe 3 at the time of assembly, and at the same time, it is easy to come up after assembly, and there is a possibility that the probes 3 may short-circuit. This has become a greater problem as the inspected parts are highly integrated and the terminal pitch thereof is miniaturized.

Further, in the above-mentioned conventional structure, since the board 1 and the probe 3 are fixed, when inspecting parts to be inspected having different terminal positions, the inspection prober must be changed accordingly. Therefore, it is necessary to prepare an inspection prober for each type of parts to be inspected, and there is also a problem that the cost is high.

The present invention has been proposed in order to solve these problems, and it accurately supports the position of the tip of the probe without impairing its elasticity, and is highly integrated. It is possible to support terminals with a fine pitch, and it is possible to use a common signal input / output board for various types of parts under test with different terminal positions. It aims at providing the inspection prober equipped with.

[0010]

In order to achieve the above object, in the inspection prober according to the present invention, each probe (3) is
A probe support block (11) having a hole (13) in the center
In a plurality of probe fitting grooves (15) provided on the lower surface of the probe, the tips of the probes (3) are projected into the hole (13) while being electrically insulated from each other. The tip of each probe (3) is supported so that it can move up and down while being fitted in the state of being made to fit. Then, the plurality of probes (3)
The probe support block (11) supporting the signal input / output board with the base end portion of each probe (3) electrically connected to each terminal (5) of the signal input / output board (1). It was removably attached to the inspection hole (2) of (1).

[0011]

In the inspection prober having the above construction, each probe (3) can be supported by the probe support block (11) so as to be vertically movable up to the vicinity of its tip. Therefore, the position of the tip of each probe (3) does not move,
There is no risk of short-circuiting between the probes (3).

Further, the probe fitting groove (1) of the block (11)
If 5) is formed according to the position of each terminal of the component to be inspected, the tip of each probe (3) is fitted by fitting the probe (3) into the groove (15) at the time of assembly. It is possible to easily align the parts.

Further, by supporting up to the vicinity of the tip of the probe (3), it becomes possible to use a thinner probe (3) and the probe support block (1).
The probe fitting groove (15) of 1) can also be formed accurately and easily with a minute width and pitch using a precision groove carving machine or the like. It is also possible to deal with terminals with a minute pitch of parts.

In addition, since the probe support block (11) is attachable to and detachable from the signal input / output board (1), the probe support block in which the probes (3) are arranged according to the type of the part to be inspected is supported. If the block (11) is prepared, the same board (1) can be commonly used, and it is possible to cope with the inspection of various kinds of inspected parts at low cost.

The reference numerals in the above parentheses are for comparison with the drawings and do not limit the structure of the present invention in any way.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. In the drawings of the embodiments, the same reference numerals are used for the components corresponding to the components of the conventional example shown in FIGS. 8 and 9, and the description of the components that are not different from the conventional example is omitted. <Embodiment 1> FIG. 1 is a plan view of an inspection prober in Embodiment 1 of the present invention, and FIG. 2 is a partial vertical sectional view of the prober.
FIG. 3 is a view seen from the hole side of the probe support block of the inspection prober.

As shown in the figure, in the inspection prober of this embodiment, the probe 3 is supported by the disk-shaped probe support block 11, and the screw 12 is attached to the lower surface side of the inspection hole 2 of the signal input / output board 1. It is detachably attached using.

The probe support block 11 is made of an insulating material such as synthetic resin, has a hole, for example, a rectangular hole 13 in the center, and has an L shape from the lower surface to the outer peripheral surface.
A plurality of probe fitting grooves 15 are radially provided. The probe 3 is fitted in each probe fitting groove 15. Moreover, the probe 3 has a margin in the depth direction within the groove 15 and is bonded in the vicinity of its intermediate portion so that the tip end and the base end can be vertically moved to some extent and bent. Agent 1
It is fixed by 6 and is further supported by a support plate 17 made of an insulating material such as a synthetic resin attached to the lower surface of the block 11 so as not to fall out from the groove 15. Since the blocks 11 and the support plate 17 are made of an insulating material, the probes 3 thus supported are electrically insulated from each other.

The tip of the probe 3 slightly protrudes from the probe fitting groove 15 into the hole 13 and is bent downward. Further, the base end portion of the probe 3 is bent upward along the groove 15 and is brought into pressure contact with the signal input / output terminal 5 on the inner peripheral side of the board 1 by the elastic force of the probe 3 itself to be electrically connected. It is connected to the. That is, the base end portion is in a state of slightly protruding from the upper surface of the block 11 before the block 11 is attached to the board 1, and is in a slightly bent state after the attachment.

When inspecting the electrical performance of an electronic component, for example, a circuit element 9 formed on a silicon wafer using this inspection prober, the hole 1 of the probe support block 11 is used.
By aligning 3 with the circuit element 9 and holding the tip of each probe 3 in contact with the plurality of terminals of the circuit element 9, the respective terminals of the circuit element 9 and the outer peripheral side of the board 1 are held. The inspection signal is input / output to / from an inspection device (not shown) connected to the signal input / output terminal 6.

The position of the tip of each probe 3 is set in advance in accordance with the position of each terminal of the circuit element 9 which is the component to be inspected. Then, when each probe 3 comes into contact with the corresponding terminal, in the probe fitting groove 15 of the probe support block 11,
The elastic force causes the terminals to bend, and each terminal is pressed into contact and electrically connected without giving a shock.

In the inspection prober having the above structure, the probe support block 11 can support each probe 3 up and down to the vicinity of its tip, so that the tip of the probe 3 can be moved. There is no possibility that the probes 3 are short-circuited.

Further, the probe fitting groove 15 of the block 11 is
If it is formed according to the position of each terminal of the circuit element 9, by fitting the probe 3 into the groove 15 at the time of assembly,
The position of the tip of each probe 3 can be easily adjusted.

Further, by supporting up to the vicinity of the tip of the probe 3, a thinner probe 3 can be used, and the probe fitting groove 15 of the probe support block 11 can also be used. Since it can be formed accurately and easily with a minute width and pitch using a precision groove carving machine, it can be applied to terminals with a minute pitch of highly integrated parts to be inspected. it can.

Moreover, since the probe support block 11 is attachable to and detachable from the signal input / output board 1, the probe support block 11 in which the probes 3 are arranged according to the type of the part to be inspected.
If the board 1 is prepared, the same board 1 can be commonly used, and it is possible to support inspection of various kinds of inspected parts at low cost.

FIG. 4 is a partial vertical cross-sectional view showing another structural example of the probe 3 and the probe support block 11.

As shown in the figure, in this configuration example, an upwardly projecting curved portion 3a is formed in the middle portion of the probe 3, and in the middle portion of the probe fitting groove 15 of the probe support block 11. A concave portion 15a into which the curved portion 3a of the probe 3 is fitted is formed. According to this configuration, the probe 3 can be supported in a state of being positioned in the probe fitting groove 15 without using an adhesive, and the assembly is further facilitated. The concave portion 15a of the probe fitting groove 15 is arranged so as to intersect with all the grooves 15 provided in the block 11.
It can be easily formed by carving a deep groove in a circular shape. <Second Embodiment> FIG. 5 is a partial vertical cross-sectional view of an inspection prober according to a second embodiment of the present invention, and FIG. 6 is a view as seen from the hole side of a probe support block of the inspection prober.

As shown in the figure, in the inspection prober of this embodiment, the upper portion of the inner peripheral portion of the probe support block 11 along the hole 13 is shaved to be thin, and the thin portion thereof has the hole 13 side. Since the notch 21 is made from the plurality of elastic portions 22 corresponding to each probe fitting groove 15,
Are formed. The tips of the probes 3 fitted in the probe fitting grooves 15 of the block 11 can be vertically moved by being fixed in the elastic portion 22 with an adhesive 23. Is supported as. In addition, in this embodiment, the support plate in the first embodiment is not necessary. Other configurations are the same as those in the first embodiment.

In the case of this embodiment, each probe 3 comes into contact with each terminal of the circuit element 9 as the component to be inspected when the probe 3 is contacted.
Bending upward due to the elasticity of itself and the elasticity of the elastic portion 22,
Each terminal will be pressure-contacted and electrically connected without shock.

According to the configuration of this embodiment, since the probe 3 is supported in a state of being fixed to the elastic portion 22 of the probe support block 11, the probe 3 is further provided as compared with the case of the first embodiment. Since a thin one can be used, a large number of probes 3 can be arranged at a finer pitch. As a result, it becomes possible to deal with terminals with a finer pitch of highly integrated parts to be inspected. <Third Embodiment> FIG. 7 is a plan view of an inspection prober according to a third embodiment of the present invention.

As shown in the figure, in the inspection prober in this embodiment, the probe support block 11 is divided into a plurality of small blocks, for example, four rectangular small blocks 11a, and each small block 11a is a relay plate. It is removably attached to the inspection hole 2 of the signal input / output board 1 via 31.

A plurality of probe fitting grooves 15 are provided in parallel on the lower surface of each small block 11a, and the probe 3 is provided in each groove 15 as in the first or second embodiment. Is supported so that it can move up and down. The base end of each probe 3 is electrically connected to the signal input / output terminal 5 on the inner peripheral side of the board 1 via the wiring 32 provided on the relay plate 31.

As described above, in the structure in which the probe support block 11 is made into a small block, the position of the tip of the probe 3 can be more freely corresponded to various terminal positions of the circuit element (component to be inspected) 9. be able to. Further, when the inspection is performed by using a part of the plurality of terminals of the circuit element 9, it is possible to attach and use only the necessary small blocks 11a.

In each of the first to third embodiments, when it is not necessary to attach / detach the probe support block 11 to / from the signal input / output board 1, the base end of each probe 3 or the relay plate 31 is used. The wiring 32 may be connected to the signal input / output terminal 5 of the board 1 in a fixed state by soldering or the like.

[0035]

As described above, according to the inspection prober of the present invention, the position of the tip portion of the probe can be accurately set without impairing its elasticity, and moreover, there is no risk of the probes being short-circuited. Therefore, the reliability as an inspection prober is remarkably improved. Moreover, it is possible to deal with terminals with a fine pitch of highly integrated parts to be inspected.

Further, since a common signal input / output board can be used for many kinds of parts to be inspected having different terminal positions, it is very economical.

[Brief description of drawings]

FIG. 1 is a plan view of an inspection prober according to a first embodiment of the present invention.

FIG. 2 is a partial vertical sectional view of the prober.

FIG. 3 is a view seen from a hole side of a probe support block of the inspection prober.

FIG. 4 is a partial vertical cross-sectional view showing another configuration example of the probe and the probe support block in the first embodiment.

FIG. 5 is a partial vertical cross-sectional view of the inspection prober according to the second embodiment of the present invention.

FIG. 6 is a view seen from a hole side of a probe support block of the inspection prober.

FIG. 7 is a plan view of an inspection prober according to a third embodiment of the present invention.

FIG. 8 is a plan view of an inspection prober in a conventional example.

FIG. 9 is a vertical cross-sectional view of the inspection prober.

[Explanation of symbols]

 1 signal input / output board 2 inspection hole 3 probe 5,6 signal input / output terminal 9 circuit element (part to be inspected) 11 probe support block 13 hole 15 probe fitting groove 21 notch 22 elastic part

Claims (2)

[Claims] 1. A signal input / output board having a plurality of signal input / output terminals and having an inspection hole in the center, and a base end portion electrically connected to each terminal of the signal input / output board, and a tip end. A plurality of elastic conductive probe parts projecting into the inspection holes of the signal input / output board, the inspection holes of the signal input / output board are aligned with the parts to be inspected, and In an inspection prober that inputs and outputs an inspection signal between each terminal of the inspected component and an inspection device by bringing a tip end into contact with a plurality of terminals of the inspected component, Each of the plurality of probe fitting grooves provided on the lower surface of the probe support block having a hole in the hole is electrically insulated from each other, and the tip of each probe protrudes into the hole. The tip of each probe is supported so that it can move up and down. In addition, the probe support block supporting the plurality of probes is configured to inspect the signal input / output board with the base end of each probe electrically connected to each terminal of the signal input / output board. An inspection prober that is detachably attached to the hole. 2. A plurality of elastic portions corresponding to the respective probe fitting grooves are formed by making cuts from the hole side of the block between the respective probe fitting grooves of the probe supporting block. The probe formed and fitted into each probe fitting groove is supported by the elastic portion so that each tip is supported so as to be vertically movable. The inspection prober described in 1.