JPH08333038A - Sheet material peeling device - Google Patents

Abstract

PURPOSE: To surely and easily peel a sheet material from a sheet material placing body by holding a suction instrument with a gradient toward the peripheral edge area side from the interior area side of the sheet material placed on the placing body. CONSTITUTION: The peripheral wall of the opening 72a of the suction pad 72 held with a gradient is made to abut on a thin metal plate K on the interior area side 73A of the thin metal plate K. The suction pad 72 of a bellows shape, when continuously pressed, is elastically deformed on the interior area side 73a and then on the peripheral edge area side, too, resulting in the abutting of all the area of the peripheral wall of the opening 72a on the thin metal plate K. When the suction of the air in the suction pad 72 is started in this state, the thin metal plate K is absorbed toward the suction pad 72 at its peripheral edge area, being drawn to the suction pad 72. In this case, since elastic deformation of the suction pad 72 on the peripheral edge area side 73b is less than on the interior area side 73a, the peripheral edge area 73b is elastically deformed further so as to be deformed in the same extent as in the interior area side 73a, peeling the peripheral edge end side from a supply section 34.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet material peeling device for peeling a sheet material of a sheet material mounting body by using a suction tool which sucks the sheet material through air suction.

[0002]

2. Description of the Related Art Conventionally, this type of sheet material peeling apparatus peels a sheet material from a sheet material placing body and delivers it to a conveying device, or is incorporated in the conveying device itself to peel and convey the sheet material. It is used as something to do.
When peeling the sheet material, a so-called suction pad having various shapes such as a dish shape, a bowl shape, and a bellows shape is pressed against the sheet material of the sheet material mounting body from directly above and sucked, and this suction pad is used. Adsorb the sheet material. Next, in this state, the suction pad is lifted and pulled away from the sheet material mounting body to peel off the sheet material. In this case, if the sheet material is slightly separated from the sheet material mounting body at the peripheral edge thereof, the subsequent peeling is easy, and therefore the suction pad is normally pressed in the peripheral area of the sheet material.

[0003]

However, in the above-described sheet material peeling device, when the sheet material is peeled from the sheet material placing body, which is indispensable to adhere to the sheet material, the sheet material to be peeled cannot be peeled. There was an occasion. this is,
The reason is as follows.

For example, in the process of manufacturing shadow masks for apertures for color picture tubes, aperture grilles, lead frames for semiconductors, etc., a metal thin plate, which is the raw material, is closely sandwiched between opposed plates, and a predetermined pattern is formed on the main surface of the metal thin plate. Baking is performed. In such a case, in order to secure the pattern printing quality, a relatively high degree of vacuum suction is performed between the opposing plates, so that the thin metal plate is in close contact with the plate over the entire main surface thereof. In addition, since the plate and the thin metal plate are smoothed with high precision, the degree of close contact is high. For this reason, when the metal thin plate is sucked and peeled off by the suction pad in the peripheral region, the close contact on the inner region side of the metal thin plate becomes a resistance. Therefore, the suction force that exceeds the vacuum adhesion of the thin metal plate is required, and the suction force needs to be adjusted relatively frequently in accordance with the size of the thin metal plate. If the suction force is insufficient, peeling cannot be performed. Further, when the size of the thin metal plate was changed, it was sometimes impossible to perform suction / peeling due to improper adjustment of suction force, although it was able to suction / peele well until then.

In addition, usually, 4 of each corner of the thin metal plate is used.
Although suction is performed by the suction pad at one place, if the suction force is weak at one or two places, the metal thin plate cannot be peeled off and lifted.

The present invention solves the above-mentioned conventional problems, and an object of the present invention is to reliably and easily peel a sheet material from a sheet material mounting body.

[0007]

[Means for Solving the Problems] Means adopted in a sheet material peeling apparatus according to claim 1 for solving the above-mentioned problems are an adsorbing tool for adsorbing a sheet material through air suction, and the adsorbing tool. And a suction tool holding means for pressing the suction tool to the peripheral region of the sheet material placed on the sheet material support and separating the suction tool from the sheet material support, A sheet material peeling device for peeling a sheet material of the sheet material mounting body from the sheet material mounting body, wherein the suction tool surrounds an opening closed by the sheet material and surrounds the opening. An air suction space is formed in the sheet material, and a suction port enclosure that elastically deforms by contacting the sheet material is provided, and the suction tool holding means is arranged from the inner region side of the sheet material placed on the sheet material placing body. Inclining the suction tool toward the peripheral area side In that it comprises inclined holding means for lifting the gist thereof.

Further, the means adopted in the sheet material peeling apparatus according to claim 2 is an adsorption tool for adsorbing a sheet material via air suction, and a holding means for the adsorption tool, which is placed on a sheet material placing body. A suction member holding means for pressing the suction member to the peripheral region of the sheet material and separating the suction member from the sheet material mounting body; and a sheet material of the sheet material mounting body, A sheet material peeling device for peeling from a sheet material mounting body, wherein the suction tool surrounds an opening closed by the sheet material, forms an air suction space around the opening, and abuts on the sheet material. Equipped with a suction port envelope that elastically deforms,
The suction port enclosure has a deformability that elastically deforms more easily in a region corresponding to a peripheral side of the sheet material than in a region corresponding to an inner side of the sheet material placed on the sheet material placing body, The tool holding means provides a margin to the extent of deformation displacement when the suction port surrounding is elastically deformed on the peripheral side of the sheet material in the sheet material mounting body, and the suction tool is provided in the peripheral area of the sheet material. The gist of the present invention is to provide a suction tool pressing means for pressing.

In the sheet peeling apparatus according to claim 3, further, an air nozzle arranged toward a peripheral edge of the sheet material placed on the sheet material placing body, and the suction tool by the suction tool holding means. And a blowing unit that blows air from the air nozzle at the time of separation.

[0010]

In the sheet material peeling apparatus according to the above-mentioned claim 1, the suction tool which is pressed against the peripheral area of the sheet material by the suction tool holding means is provided with respect to the sheet material of the sheet material mounting body by the tilt holding means. It is held so as to be inclined from the inner region side toward the peripheral region side. Therefore, when this suction tool is pressed against the peripheral area of the sheet material, the suction port enclosure of the suction tool initially contacts the inner area side of the sheet material, and thereafter elastically deforms at this initial contact point. ,
Eventually, the peripheral region side will also come into contact. Therefore, the suction port enclosure abuts on the sheet material without being largely elastically deformed on the inner region side of the sheet material and relatively elastically deformed on the peripheral region side, and in this state, the opening is closed by the sheet material. The surrounding air suction space is airtight. That is, the suction port enclosure comes into contact with the sheet material in a state in which the amount of elastic deformation of the suction port enclosure is smaller on the peripheral region side of the sheet material than on the inner region side. Then, since the air in the air suction space is sucked, the sheet material is sucked by the suction tool in the peripheral region thereof.
At this time, since the suction force acts on the sheet material toward the suction port enclosure, the sheet material is attracted to the suction port enclosure.

By the way, since the displacement amount of the elastic deformation of the suction port enclosure on the peripheral region side of the sheet material is smaller than that on the inner region side, the suction port enclosure is formed by attracting the sheet material to the suction port enclosure. Further, elastic deformation is further performed on the peripheral region side where the amount of elastic deformation is small. For this reason, the sheet material of the sheet material mounting body is peeled off from the sheet material mounting body at the peripheral edge side due to further elastic deformation of the suction port enclosure on the peripheral area side. The resistance due to the close contact with the sheet material mounting body on the side of the inner region of is less likely to occur.

Further, in the sheet material peeling apparatus according to the second aspect, the suction port enclosure of the suction tool which is pressed against the peripheral area of the sheet material is provided in the area inside the sheet material placed on the sheet material placing body. In comparison, the region of the sheet material that is in contact with the peripheral edge side is more elastically deformable.
When the suction tool is pressed against the peripheral area of the sheet material, the suction tool pressing means of the suction tool holding means has a margin in the degree of deformation displacement when the suction port surrounding is elastically deformed on the peripheral side of the sheet material. I decided to let it. Therefore, in the area of the suction port enclosure that is in contact with the peripheral edge of the sheet material, there is room for further elastic deformation of the suction port enclosure as compared with the area that is inward of the sheet material.

Then, the suction member is pressed against the peripheral region of the sheet material to close the opening of the suction port enclosure with the sheet material to hermetically seal the air suction space around the sheet material. Since the air is sucked, the sheet material is sucked by the suction tool in the peripheral region thereof. At this time, since the suction force acts on the sheet material toward the suction port enclosure,
The sheet material will be attracted to the suction port enclosure.

By the way, since the room for further elastic deformation of the suction port enclosure is left in the region corresponding to the peripheral side of the sheet material as compared with the region corresponding to the inner side of the sheet material, the sheet material to the suction port enclosure is Due to the attraction, the suction port enclosure is further elastically deformed in a region corresponding to the peripheral side of the sheet material, which has room for further elastic deformation. For this reason, the sheet material of the sheet material mounting body is peeled off from the sheet material mounting body at the peripheral edge side due to further elastic deformation of the suction port enclosure on the peripheral area side. There is no resistance due to the close contact with the sheet material mounting body on the inner region side.

In the sheet material peeling apparatus according to the third aspect, when the suction tool holding means separates the suction tool, air is blown from the air nozzle by the blower means, so this air is directed toward the peripheral edge of the sheet material. To be sprayed. Therefore, air is introduced between the sheet material and the sheet material mounting body from the peripheral edge side of the sheet material peeled off due to the further elastic deformation of the suction port enclosure on the peripheral area side, and the sheet material Also separates from the sheet material mounting body in the inner region.

[0016]

EXAMPLE Next, an example of a sheet material peeling apparatus according to the present invention will be described by taking as an example the case where the sheet material peeling apparatus is incorporated in a conveying device in an exposure apparatus. First, an overall configuration of the exposure apparatus of the embodiment and an overview of its operation will be described.

The exposure apparatus 30 is an apparatus for simultaneously printing and exposing an array pattern of through holes on the front and back main surfaces of a thin metal plate which is a raw material of a shadow mask for a color picture tube, and has the following configuration. Prepare The exposure apparatus 30 is
As shown in FIG. 1 which is a schematic front view thereof, an exposure unit 32 is provided at the center thereof, and a supply unit 34 for loading the metal thin plate K into the exposure unit 32 and a carry-out unit from the exposure unit 32 are provided on the left and right sides thereof. A discharge unit 36 for receiving the thin metal plate K is provided. The supply unit 34 preliminarily aligns the thin metal plate K, which is loaded and placed on the upper surface thereof from the outside, on the upper surface. Ejector 36
Receives the exposed thin metal plate K from the exposure unit 32,
The thin metal plate K is discharged to an etching device which is a post process.

The exposure unit 32 includes upper and lower exposure light sources 38 and 40.
And a mask portion 42 for closely sandwiching the metal thin plate K between both light sources and closely contacting the baking pattern to the front and back main surfaces of the metal thin plate K. The mask portion 42 is the upper mask portion 4
4 and the lower mask portion 46 are opposed to each other so that they can approach and separate,
The upper and lower mask portions are provided in parallel. Upper mask part 44
Holds the upper mask plate 48 on its lower surface side integrally with the upper plate suction frame 50 by suction, and the lower mask portion 46 holds the lower mask plate 52 on its upper surface side by the lower plate suction frame 54.
It is adsorbed and held together with. The upper mask plate 48 and the lower mask plate 52 have a light-transmitting property with high transmission efficiency of light having a wavelength in the ultraviolet region, and a predetermined baking pattern is formed on the lower surface of the upper mask plate 48 and the upper surface of the lower mask plate 52, respectively. Is provided in advance.

Then, the two CCD cameras 20 and 22 below the lower plate suction frame 54 are used to align the positions of both mask plates, and then a thin metal plate K is sandwiched between the mask plates to surround them. The seal body 55 is made airtight, and vacuum suction is performed to bring them into vacuum contact. Next, in this state, the exposure light sources 38 and 40 are controlled to be lighted, and the pattern of each mask plate is printed on the front and back main surfaces of the metal thin plate K.

The upper mask portion 44 and the lower mask portion 4
6, each mask plate is supported by an upper mask plate support base 56 and a lower mask plate support base 60 via respective plate suction frames, and each support base is an upper holding frame 58 and a lower holding frame 62. It is surrounded and held on all three sides.

A transfer device 70 is installed between the supply part 34 and the exposure part 32. The transfer device 70 adsorbs the thin metal plate K placed on the mounting table of the supply part 34. Is held, and the thin metal plate K is lifted from the supply unit 34 and then conveyed to the exposure unit 32. Then, the conveyed metal thin plate K is placed on a predetermined position of the lower mask plate 52 in the lower mask portion 46. On the other hand, between the exposure unit 32 and the supply unit 34, the transfer device 70 having the same configuration as the transfer device 70 is also provided.
a is provided, the carrying device 70a sucks and holds the exposed thin metal plate K of the lower mask plate 52, and carries it, and places the exposed thin metal plate K at a predetermined position of the placing table of the discharging section 36. When transporting the thin metal plate K from the supply unit 34 or the discharge unit 36, the shutter 3
Opening / closing control of 2a and 32b is carried out.

Next, the structure of the carrier device 70 and the carrier device 70a will be described by taking the carrier device 70 as an example. As shown in FIG. 2, which is a schematic perspective view, the carrying device 70 mainly includes a sheet material peeling device 71, and the sheet material peeling device 71 includes a suction pad holding plate 74 having suction pads 72 at both ends. I have one. As shown in FIGS. 2 and 3,
Each suction pad holding plate 74 is located on the lower surface of the transfer plate 76, and a male screw portion (not shown) of the fixed screw handle 78 penetrates the elongated hole 76 a of the transfer plate 76 and is screwed into the female screw hole of the suction pad holding plate 74. are doing. Therefore, the suction pad holding plate 74 is fixed to an arbitrary position of the long hole 76a by the fixing screw handle 78.

As shown in the figure, the suction pad 72 has a bellows-like appearance and is molded from synthetic rubber or synthetic resin such as silicone rubber or silicone resin, which is a highly elastic material.

The suction pad holding plate 74 has a long hole 7
4a is provided, and the suction pad 72 is incorporated in the long hole 74a as follows. As shown in FIG. 3 and a sectional view taken along line 4-4 thereof, slide pieces 80 and 82 having a T-shaped cross section are slidably fitted in the long hole 74a from above and below. , 82 are fixed by bolts (not shown). Slide pieces 80, 8
The suction pad communication pipe 84 is fitted and fixed to the second member 2 while being inclined outward, and the suction pad 72 is provided at the tip thereof. Therefore, the suction pad 72 is provided below the supply unit 3
With respect to the thin metal plate K of the supply unit 34 placed on the sheet 4, the slanting pieces 80 and 82 hold the thin metal plate K inclined from the inner region side toward the peripheral region side.
The suction pad 72 is held at an arbitrary position in the long hole 74a by sliding the slide pieces 80 and 82 along the long hole 74a as shown by an arrow A in the figure. The suction pad communication pipe 84 is connected to a suction device (not shown).

Further, the carrier device 70 includes horizontal slide shafts 88a and 88b for horizontally guiding the slide block 86 of the carrier plate 76 as shown by an arrow B in FIG.
An end block 90 to which the shaft is fixed, and a vertical linear guide 92 that vertically guides the end block 90 as shown by an arrow C in the drawing are provided. Since the horizontal slide shafts 88a and 88b are installed so as to extend between the supply unit 34 and the exposure unit 32, the transport device 70 causes the sheet material peeling device 71 to pass through the horizontal slide of the slide block 86 by a cylinder (not shown). It reciprocates between the supply unit 34 and the exposure unit 32. On the other hand, the vertical linear guide 9
2 is a surface of the supply unit 34 on which the thin metal plate K is placed and the exposure unit 32.
Since it is erected from the upper surface of the lower mask plate 52 of the lower mask portion 46 up to a predetermined height, the conveying device 70 causes the sheet material peeling device 71 to expose the sheet feeding device 34 and the exposure through the vertical slide of the end block 90 by a cylinder (not shown). The part 32 moves up and down. Therefore, the transfer device 70
Transports the thin metal plate K from the surface of the supply unit 34 on which the thin metal plate K is placed to the upper surface of the lower mask plate 52 of the exposure unit 32.

Further, the sheet material peeling device 71 is provided with an air nozzle 94 connected to an air blower (not shown), which is fixed to the suction pad holding plate 74 so that its blowing end faces the tip of the suction pad 72.

Next, a thin metal plate K produced by the carrying device 70.
The state of adsorption of and the state of peeling of the thin metal plate K will be described. First, the sheet material peeling device 71 at the suction start position shown in FIG. 3 is brought close to the metal thin plate K through the vertical slide descent of the end block 90, and the suction pad 72 is moved to the metal thin plate K.
Press on the peripheral area of. Then, as shown in FIG. 5, the suction pad 72 held in an inclined manner as described above has the peripheral wall of the opening 72a (see FIG. 3) formed on the metal thin plate K at the inner region side 73a of the metal thin plate K. Initially abut (FIG. 5 (a)). And when it is continuously pressed,
The suction pad 72 elastically deforms (compresses and deforms) the bellows shape on the inner region side 73a which is the initial contact side, and eventually also elastically deforms on the peripheral region side 73b of the metal thin plate K to open. The peripheral wall of 72a is brought into contact with the thin metal plate K over its entire area (FIG. 5B). In this state, the suction pad 72 is not relatively elastically deformed on the peripheral area side 73b, the inner area side 73a is elastically deformed to a greater extent and abuts the metal thin plate K, and the opening 72a is closed by the metal thin plate K. The air suction space 72b (see FIG. 3) around it is airtight. That is, in the suction pad 72, the displacement amount of the elastic deformation of the suction pad 72 is 7 in the peripheral area side 7
It contacts the thin metal plate K in a smaller amount than 3a.

When the air suction space 72b is thus made airtight, air suction of the air suction space 72b is started, and the air in the space is continuously sucked into the suction device via the suction pad communication pipe 84. . Then, the thin metal plate K
Is sucked in the peripheral area by this air suction.
2 is attracted to the suction pad 72 and is attracted to the suction pad 72 by receiving the suction force toward the suction pad 72. In this case, since the displacement amount of the elastic deformation of the suction pad 72 on the peripheral region side 73b is smaller than that on the inner region side 73a, the suction pad 72 is attracted to the peripheral region side 73b by attracting the metal thin plate K to the suction pad 72. Is further elastically deformed so that the displacement amount becomes the same as that of the inner region side 73a (see FIG. 5).
(C)). Therefore, the metal thin plate K placed on the supply unit 34 is peeled off from the supply unit 34 at the peripheral edge side due to further elastic deformation on the peripheral region side 73b of the suction pad 72.

When the peripheral edge side of the thin metal plate K is peeled off in this manner, the transport device 70 lifts the sheet material peeling device 71 from the supply portion 34 to the suction start position of FIG. The pad 72 is separated from the supply unit 34. Then, at the time of this separation, or at the time of peeling off the peripheral edge portion described above prior to this separation, air is blown from the air nozzle 94 toward the tip of the suction pad 72, that is, the peeled portion of the metal thin plate K. After that, the transfer device 70 moves the slide block 8
The sheet material peeling device 71 is conveyed from the supply unit 34 to the exposure unit 32 through the horizontal slide 6 and the exposure unit 32 lowers the sheet material peeling device 71, stops air suction, and raises the sheet material peeling device 71. The metal thin plate K is placed on the lower mask plate 52 of the exposure unit 32. Then, the transport device 70 returns to the suction start position above the supply unit 34 together with the sheet material peeling device 71.

As described above, in the sheet material peeling device 71 of this embodiment, the suction pad 72 has a peripheral region side 73b.
Since the peripheral edge side of the metal thin plate K is peeled off from the supply part 34 in accordance with the further elastic deformation in the above, there is no resistance due to the close contact with the supply part 34 on the inner region side of the metal thin plate K at this time. . Therefore, according to the sheet material peeling device 71 of the present embodiment, since it is not necessary to exert the suction force that exceeds the adhesion resistance on the inner region side of the metal thin plate K or to adjust the suction force, the metal thin plate K is supplied. It can be reliably and easily peeled from the portion 34.

In addition, in the sheet material peeling device 71 of this embodiment, when the thin metal plate K is peeled off, it is peeled off on the peripheral edge side due to the further elastic deformation of the peripheral area side 73b of the suction pad 72. Air is blown on the thin metal plate K. Therefore, the metal thin plate K is separated from the supply unit 34 even in the inner region of the metal thin plate K by blowing air between the metal thin plate K and the supply unit 34. Therefore, according to the sheet material peeling device 71 of the present embodiment, the thin metal plate K can be quickly peeled from the supply unit 34.

Further, in the sheet material peeling device 71, the thin metal plate K can be reliably and easily peeled off only by holding the suction pad 72 with the slide pieces 80 and 82 inclined as described above. Therefore, the existing sheet material peeling device for pressing the suction pad 72 onto the metal thin plate K from directly above can be surely and easily peeled off the metal thin plate K by simple modification, and the effective reason for the existing equipment is aimed at. be able to.

Further, in this embodiment, the sheet material peeling device 7 is used.
By incorporating 1 into the transport device 70 of the exposure apparatus 30, it is possible to shorten the transport time of the metal thin plate K and improve the efficiency of the exposure process through rapid peeling of the metal thin plate K.

Next, other embodiments will be described.
In the second embodiment, the suction pad 96 shown in FIG. 6 is used instead of the suction pad 72 in the first embodiment.
Like the suction pad 72, the suction pad 96 is molded from synthetic rubber or synthetic resin such as silicone rubber or silicone resin, which is a highly elastic material, but has a deep cup shape. Then, the inner region side 9 of the thin metal plate K
In 6a, the thickness of the peripheral wall of the suction pad 96 is thick, and in the peripheral region side 96b, the thickness of the peripheral wall is thin. Then, it is held substantially perpendicular to the metal thin plate K via the suction pad communication pipe 84 and slide pieces 80, 82 (not shown), and is pressed against the metal thin plate K in this posture.

Therefore, the second using the suction pad 96
In the embodiment, when the suction pad 96 is pressed against the peripheral region of the thin metal plate K, the peripheral region side 96b is elastically deformed more easily than the inner region side 96a due to the difference in the wall thickness of the suction pad 96. It will be. For this reason, on the peripheral region side 96b, there is a margin in the degree of deformation displacement when elastically deformed by being pressed against the metal thin plate K, and the inner region side 9b.
There is still room for further elastic deformation as compared with 6a.

Then, the opening of the suction pad 96 is closed by the thin metal plate K to hermetically seal the air suction space around it.
In this state, air is sucked from the air suction space. Then, the metal thin plate K is attracted by the suction force by the air suction to the suction pad 96, and the suction pad 96 is moved to the peripheral area side 96b where there is room for further elastic deformation, as shown by the two-dot chain line in the figure. Further elastically deforms. Therefore, the metal thin plate K placed on the supply unit 34 is peeled off from the supply unit 34 at the peripheral edge side, as in the case of the first embodiment. Therefore, also according to the second embodiment using the suction pad 96, the thin metal plate K can be reliably and easily peeled from the supply section 34.

Further, in the second embodiment, the direction in which the suction pad is pressed against the thin metal plate K is the same as that of the conventional one, and only the construction of the suction pad is different. Therefore, according to the second embodiment, it is possible to modify the existing sheet material peeling device into one that reliably and easily peels the thin metal plate K, only by exchanging the suction pad.

In the third embodiment, instead of the suction pad 96 in the second embodiment, the suction pad 9 shown in FIG. 7 is used.
8 was used. Like the suction pad 96, the suction pad 98 has a deep cup shape, but the configuration is different in the following points. That is, the suction pad 98 is formed by so-called two-color molding using two types of elastic materials having different elasticity, such as synthetic rubber and synthetic resin. Specifically,
An elastic material having relatively little elasticity is provided on the left half of the mold for manufacturing the suction pad 98, and an elastic material having large elasticity is provided on the right half.
The suction pads 98 are manufactured by injecting them at the same time. Although the suction pad 98 manufactured in this manner has the same thickness of the peripheral wall, the elasticity is small on the inner region side 98a of the metal thin plate K which corresponds to the left half range, and the elasticity on the peripheral region side 98b which corresponds to the right half range. growing.

Therefore, when this suction pad 98 is pressed against the peripheral area of the metal thin plate K, like the suction pad 96 of the second embodiment, the peripheral area 98b is closer to the peripheral area side due to the difference in elasticity of the peripheral wall of the suction pad 98. It will be elastically deformed more easily than the inner region side 98a. For this reason, even with this suction pad 98, as with the suction pad 96, there is a margin in the degree of deformation displacement when elastically deforming on the peripheral area side 98b, and further elastic deformation is possible compared to the internal area 98a. There is room left. Therefore, according to the third embodiment using the suction pad 98, as in the second embodiment, the thin metal plate K can be reliably and easily peeled from the supply unit 34, and the existing sheet material peeling device can be used for the metal peeling. It is possible to easily modify the thin plate K so that it can be peeled reliably and easily.

The embodiments of the present invention have been described above.
The present invention is not limited to such embodiments, and it goes without saying that the present invention can be carried out in various modes without departing from the scope of the present invention. For example, the exposure device 3
It is needless to say that the sheet material peeling device 71 of the present embodiment can be applied to any device that requires peeling of the sheet material and subsequent conveyance of the sheet material, not limited to 0.

[0041]

As described above, in the sheet material peeling apparatus according to the first and second aspects, when the sheet material is sucked onto the suction tool in the peripheral region thereof, the suction port enclosure of the suction tool is The sheet material is further elastically deformed on the peripheral region side. Therefore, the peripheral edge side of the sheet material of the sheet material mounting body can be peeled off from the sheet material mounting body along with further elastic deformation of the suction port enclosure on the peripheral area side. Therefore, the resistance due to the close contact with the sheet material mounting body on the inner region side of the sheet material is not received. Therefore, according to the sheet material peeling apparatus according to the first and second aspects, since it is not necessary to exert the suction force exceeding the adhesion resistance on the inner region side of the sheet material or to adjust the suction force, the sheet material is removed. It can be reliably and easily peeled off from the sheet material mounting body.

In the sheet material peeling apparatus according to the third aspect, the sheet material peeled off at the peripheral edge side due to the further elastic deformation of the suction port enclosure on the peripheral area side is placed on the sheet material and the sheet material. Air is blown into the space between the sheet material placement body and the sheet material placement body in the inner region. Therefore, according to the sheet material peeling device of the third aspect, it is possible to quickly peel the sheet material from the sheet material mounting body.

[Brief description of drawings]

FIG. 1 is a schematic front view of an exposure device 30 to which a sheet material peeling device 71 according to an embodiment of the present invention is applied.

FIG. 2 is a schematic perspective view of a conveyance device 70 in which a sheet material peeling device 71 is incorporated.

FIG. 3 is an explanatory diagram illustrating a main part of a sheet material peeling device 71.

4 is a sectional view taken along line 4-4 of FIG.

FIG. 5 is an explanatory view for explaining how the thin metal plate K is attracted by the sheet material peeling device 71 and how it is peeled from the supply section 34.

FIG. 6 is a sectional view of a suction pad 96 in the sheet material peeling device of the second embodiment.

FIG. 7 is a sectional view of a suction pad 98 in the sheet material peeling device of the third embodiment.

[Explanation of symbols]

 30 ... Exposure device 32 ... Exposure part 34 ... Supply part 36 ... Ejection part 38, 40 ... Exposure light source 42 ... Mask part 44 ... Upper mask part 46 ... Lower mask part 52 ... Lower mask plate 54 ... Lower plate suction frame 60 ... Lower Mask plate supporting base 62 ... Lower holding frame 70 ... Conveying device 70a ... Conveying device 71 ... Sheet material peeling device 72 ... Adsorption pad 72a ... Opening 72b ... Air suction space 73a ... Internal area side 73b ... Peripheral area side 74 ... Adsorption pad holding Plate 76 ... Conveying plate 80,82 ... Slide piece 84 ... Suction pad communication pipe 86 ... Slide block 88a, 88b ... Horizontal slide shaft 90 ... End block 92 ... Vertical linear guide 94 ... Air nozzle 96 ... Suction pad 96a ... Internal area Side 96b ... Edge area side 98 ... Adsorption pad 98a ... Inner area side 98b ... Edge area side K ... Genus thin

Claims (3)

[Claims] 1. An adsorbing tool for adsorbing a sheet material through air suction, and holding the adsorbing tool and pressing the adsorbing tool against a peripheral region of the sheet material placed on a sheet material placing body and And a suction tool holding means for separating the suction tool from the sheet material mounting body, and a sheet material peeling device for peeling the sheet material of the sheet material mounting body from the sheet material mounting body. The suction tool includes a suction port enclosure that surrounds an opening closed by the sheet material to form an air suction space around the opening and elastically deforms by abutting the sheet material. The holding means, from the inner region side of the sheet material placed on the sheet material placing body toward the peripheral region side,
A sheet material peeling apparatus comprising an inclined holding means for holding the suction tool in an inclined manner. 2. An adsorbing tool for adsorbing a sheet material through air suction, and holding the adsorbing tool and pressing the adsorbing tool against the peripheral region of the sheet material placed on the sheet material placing body and And a suction tool holding means for separating the suction tool from the sheet material mounting body, and a sheet material peeling device for peeling the sheet material of the sheet material mounting body from the sheet material mounting body. The suction tool includes a suction port enclosure that surrounds the opening closed by the sheet material to form an air suction space around the opening and elastically deforms by contacting the sheet material. The envelope body is provided with deformability such that the region of the sheet material placed on the sheet material placing body is elastically deformed more easily in the region of the sheet material peripheral edge side than in the region of the sheet material placed body. Is the circumference of the sheet material in the sheet material mounting body. The sheet material peeling apparatus is characterized in that the sheet material peeling apparatus further comprises suction tool pressing means for pressing the suction tool against the peripheral region of the sheet material while allowing a margin for deformation displacement when the suction port surrounding elastically deforms. . 3. The sheet peeling apparatus according to claim 1, further comprising an air nozzle arranged toward a peripheral edge of a sheet material placed on the sheet material placing body, A sheet material peeling apparatus comprising: a blowing unit that blows air from the air nozzle when the suction member holding unit separates the suction member.