JPH08310025A - Manufacture of glazed ceramic board - Google Patents

Manufacture of glazed ceramic board

Info

Publication number
JPH08310025A
JPH08310025A JP12018295A JP12018295A JPH08310025A JP H08310025 A JPH08310025 A JP H08310025A JP 12018295 A JP12018295 A JP 12018295A JP 12018295 A JP12018295 A JP 12018295A JP H08310025 A JPH08310025 A JP H08310025A
Authority
JP
Japan
Prior art keywords
organic solvent
glass layer
board
etching
ceramic substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12018295A
Other languages
Japanese (ja)
Other versions
JP3151380B2 (en
Inventor
Yoshimasa Hayashi
芳昌 林
Mitsuru Suda
充 須田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP12018295A priority Critical patent/JP3151380B2/en
Publication of JPH08310025A publication Critical patent/JPH08310025A/en
Application granted granted Critical
Publication of JP3151380B2 publication Critical patent/JP3151380B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To enhance printing quality by a method wherein the accuracy of the surface of a glass glazing layer is enhanced. CONSTITUTION: This manufacturing method includes a process for forming a glass layer on the surface of a ceramic board, a process for forming a resist at a predetermined position of the glass layer, a process for etching the glass layer, a process for immersing the board after being etched in a polarized organic solvent having the vapour pressure at 25 deg.C of 200mmHg or higher, a process for drying the board immersed in the organic solvent in the air, a process for washing the board after being dried and a process for treating the washed board under heat at 900-1,200 deg.C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、グレーズドセラミック
基板の製造方法に係り、特に部分凸を有するグレーズ層
を被覆したグレーズドセラミック基板の製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a glazed ceramic substrate, and more particularly to a method for manufacturing a glazed ceramic substrate coated with a glaze layer having partial protrusions.

【0002】[0002]

【従来の技術】セラミック基板上にガラス層を被覆した
グレーズドセラミック基板はサーマルプリンターヘッド
用の電子回路基板として用いられている。特に高印刷品
質、高速印刷といった高性能印刷機用には、一定の曲率
の凸部を有したグレーズ層を被覆したグレーズドセラミ
ック基板が用いられている。
2. Description of the Related Art A glazed ceramic substrate having a ceramic substrate coated with a glass layer is used as an electronic circuit substrate for a thermal printer head. Particularly for high-performance printing machines such as high printing quality and high-speed printing, a glazed ceramic substrate coated with a glaze layer having convex portions with a constant curvature is used.

【0003】上記基板は次のような手順で作製される。
まずアルミナなどのセラミック基板の表面に印刷法など
によりガラス層をつくり、これを加熱することにより平
滑なガラス層を形成する。ついでこのガラス層の表面の
所定の位置に樹脂を塗布してレジスト膜を形成する。こ
の基板を弗酸若しくは弗酸含む混酸よりなるエッチャン
トに浸漬し、レジスト膜が形成された部分以外のガラス
層を腐食することによりエッチングを行う。 エッチン
グした後には腐食されたエッチング残渣が残るので、こ
れを水または有機溶剤中に数分間浸漬した後に、超音波
洗浄などにより除去する。
The above substrate is manufactured by the following procedure.
First, a glass layer is formed on the surface of a ceramic substrate such as alumina by a printing method or the like, and the glass layer is heated to form a smooth glass layer. Then, a resin is applied to a predetermined position on the surface of the glass layer to form a resist film. Etching is performed by immersing this substrate in an etchant made of hydrofluoric acid or a mixed acid containing hydrofluoric acid to corrode the glass layer other than the portion where the resist film is formed. After etching, a corroded etching residue remains, which is soaked in water or an organic solvent for several minutes and then removed by ultrasonic cleaning or the like.

【0004】エッチング残渣を除去した後、さらに有機
溶剤や超純水で洗浄する。洗浄後これを乾燥し、900
〜1200℃の温度で加熱処理することにより一定の曲
率の凸部を有したグレーズ層を被覆したグレーズドセラ
ミック基板が作製される。
After removing the etching residue, it is further washed with an organic solvent or ultrapure water. After washing, dry it to 900
By performing heat treatment at a temperature of up to 1200 ° C., a glaze ceramic substrate coated with a glaze layer having convex portions with a constant curvature is produced.

【0005】[0005]

【発明が解決しようとする課題】しかし、水または有機
溶剤中に浸漬した後にエッチング残渣を除去する方法で
は、残渣中に残ったエッチャントが水または有機溶剤中
に溶出する。この溶出したエッチャントがレジスト膜を
剥離し、その下面のガラス層までを腐食し、加熱処理し
た後のグレーズ層の表面に厚さ数μmの凹凸を発生させ
る。この凹凸が曲率精度不良の原因となり、ひいてはこ
れが基板を印刷機に用いたときの印字品質の低下に繋が
る。
However, in the method of removing the etching residue after the immersion in water or the organic solvent, the etchant remaining in the residue is eluted in the water or the organic solvent. The eluted etchant peels off the resist film, corrodes up to the glass layer on the lower surface of the resist film, and causes unevenness with a thickness of several μm on the surface of the glaze layer after heat treatment. These irregularities cause a curvature accuracy defect, which in turn leads to a deterioration in print quality when the substrate is used in a printing machine.

【0006】[0006]

【課題を解決するための手段】そこで、上記課題を解決
すべく検討を重ねた結果、エッチャントへ浸漬した後の
基板を、25℃で蒸気圧が200mmHg以上の極性を
有する有機溶剤に数秒間浸漬し、これを大気中で乾燥す
ることによりエッチング残渣を完全に剥離できることを
見出した。
Therefore, as a result of repeated studies to solve the above problems, the substrate after being immersed in the etchant is immersed at 25 ° C. in an organic solvent having a polarity with a vapor pressure of 200 mmHg or more for several seconds. Then, it was found that the etching residue can be completely removed by drying it in the air.

【0007】したがってこの方法を用いると、水や有機
溶剤でエッチャントを除去する際のレジストの剥離が起
こらないので、ガラス層の腐食がなく、加熱処理した後
のガラス面には凹凸が生じない。
Therefore, when this method is used, the resist does not peel off when the etchant is removed with water or an organic solvent, so that the glass layer is not corroded and the glass surface after heat treatment is not uneven.

【0008】すなわち、本発明の要旨は、セラミック基
板上に平滑に形成されたガラス層の一部を化学エッチン
グすることにより部分凸を形成する方法において、エッ
チング後の基板を、25℃で蒸気圧が200mm以上の
極性を有する有機溶剤に浸漬した後に、これを大気中で
乾燥することによって、エッチング残渣を完全に除去す
ることにある。
That is, the gist of the present invention is to provide a method for forming a partial protrusion by chemically etching a part of a glass layer formed smoothly on a ceramic substrate, wherein the substrate after etching is vapor-pressured at 25 ° C. Is immersed in an organic solvent having a polarity of 200 mm or more and then dried in the atmosphere to completely remove the etching residue.

【0009】[0009]

【作用】本発明によると、エッチングが終了した基板を
エッチャントから取出した後に、25℃で蒸気圧が20
0mmHg以上の極性を有する有機溶剤に、数秒間浸漬
することにより酸であるエッチャントと有機溶剤が均一
の相となり、これを大気に曝すと急激に乾燥するので、
乾燥の際の蒸気の圧力でエッチング残渣を破壊させ除去
することができるのである。
According to the present invention, after the etched substrate is taken out from the etchant, the vapor pressure is 20 at 25 ° C.
By soaking in an organic solvent having a polarity of 0 mmHg or more for a few seconds, the etchant which is an acid and the organic solvent become a uniform phase, and when exposed to the atmosphere, it rapidly dries,
The etching residue can be destroyed and removed by the pressure of the steam during the drying.

【0010】有機溶剤の25℃での蒸気圧を200mm
Hg以上だとするのは、これ以下では乾燥が遅く、エッ
チング残渣の除去が完全ではないからである。
Vapor pressure of organic solvent at 25 ° C. is 200 mm
The reason why it is Hg or higher is that the drying is slow and the removal of the etching residue is not complete under the Hg.

【0011】有機溶剤が極性を必要とするのは、無極性
の溶剤ではエッチャントとの親和性がないので、有機溶
剤のみが乾燥し、エッチャントの乾燥が十分にできず、
結果として、エッチング残渣がそのまま残るからであ
る。
The reason why the organic solvent needs to be polar is that since a non-polar solvent has no affinity with the etchant, only the organic solvent dries and the etchant cannot be dried sufficiently.
As a result, the etching residue remains as it is.

【0012】[0012]

【実施例】以下に本発明の実施例を比較例とともに説明
する。本発明はこの実施例に制限されるものではない。
EXAMPLES Examples of the present invention will be described below together with comparative examples. The invention is not limited to this example.

【0013】〈実施例1〉285mm×60mm×1.
2mmの96%アルミナ基板上に、60μmの厚さで印
刷法によりガラス層を形成した。
Example 1 285 mm × 60 mm × 1.
A glass layer having a thickness of 60 μm was formed on a 2 mm 96% alumina substrate by a printing method.

【0014】この基板の表面に、幅が、それぞれ0.2
mm,0.5mm,0.8mm,1.1mm,1.4m
m,1.7mm,2.0mmで、長さが223mmの矩
形状に耐酸性レジスト形成用樹脂を塗布してレジストを
形成した。レジストの間隔はそれぞれ5mmとした。こ
の基板を弗酸をエッチャントとしてエッチングを行っ
た。エッチング後この基板をアセトン中に5秒間浸漬し
た。ついでこれを大気中に取出し乾燥させたところエッ
チング残渣が完全に除去できた。エッチング残渣を除去
した基盤のレジストを除去した後、アセトンで洗浄し、
さらに仕上げとして超純水での洗浄を行った。
The surface of the substrate has a width of 0.2.
mm, 0.5 mm, 0.8 mm, 1.1 mm, 1.4 m
A resist was formed by applying an acid-resistant resist-forming resin in a rectangular shape having m, 1.7 mm, and 2.0 mm and a length of 223 mm. The resist interval was 5 mm. This substrate was etched using hydrofluoric acid as an etchant. After etching, this substrate was immersed in acetone for 5 seconds. Then, when this was taken out into the air and dried, the etching residue could be completely removed. After removing the base resist from which the etching residue has been removed, wash with acetone,
Furthermore, as a finish, cleaning with ultrapure water was performed.

【0015】ついで1050℃で加熱し凸部に曲率を持
たせた。加熱処理後のグレーズ層の表面を光学顕微鏡で
観察したが、凹凸は発見されなかった。 〈実施例2〉エッチング残渣除去剤としてジエチルエー
テル、エチルメチルエーテルを用いて、実施例1と同様
の試験を行い同様の結果を得た。
Then, it was heated at 1050 ° C. to give the convex portion a curvature. The surface of the glaze layer after the heat treatment was observed with an optical microscope, but no unevenness was found. <Example 2> Diethyl ether and ethyl methyl ether were used as etching residue removers, the same test as in Example 1 was conducted, and similar results were obtained.

【0016】〈比較例1〉エッチング残渣除去剤として
エチルアルコール、メチルアルコール、イソプロピルア
ルコール、酢酸プロピルを用いて、実施例1と同様の試
験を行ったが、エッチング残渣の除去が十分ではなく、
グレーズ層の表面には約5μmの凹凸があった。
Comparative Example 1 The same test as in Example 1 was conducted using ethyl alcohol, methyl alcohol, isopropyl alcohol and propyl acetate as etching residue removers, but the removal of etching residues was not sufficient.
The surface of the glaze layer had irregularities of about 5 μm.

【0017】〈比較例2〉エッチング残渣除去剤として
石油ベンジンを用いて、実施例1と同様の試験を行った
が、エッチング残渣の除去が十分ではなかった。
Comparative Example 2 The same test as in Example 1 was conducted using petroleum benzine as an etching residue removing agent, but the etching residue was not sufficiently removed.

【0018】上記実施例及び比較例に用いた有機溶剤の
25℃での、飽和蒸気圧は表1のとおりである。なお、
石油ベンジンのみは極性を有していない。 〈表1〉 アセトン 231mmHg ジエチルエーテル 534mmHg エチルメチルエーテル 1465mmHg エチルアルコール 59mmHg メチルアルコール 127mmHg イソプロピルアルコール 45mmHg 酢酸プロピル 33mmHg 石油ベンジン 320mmHg
Table 1 shows the saturated vapor pressures of the organic solvents used in the above Examples and Comparative Examples at 25 ° C. In addition,
Only petroleum benzine has no polarity. <Table 1> Acetone 231 mmHg Diethyl ether 534 mmHg Ethyl methyl ether 1465 mmHg Ethyl alcohol 59 mmHg Methyl alcohol 127 mmHg Isopropyl alcohol 45 mmHg Propyl acetate 33 mmHg Petroleum benzine 320 mmHg

【0019】[0019]

【発明の効果】本発明によると、ガラス層をエッチング
した後の、エッチング残渣の除去が完全に行われる結
果、グレーズ層の表面に凹凸が発生せず、高性能のグレ
ーズドセラミック基板が得られる。
According to the present invention, the etching residue is completely removed after the glass layer is etched, and as a result, no unevenness is generated on the surface of the glaze layer, and a high-performance glaze ceramic substrate can be obtained.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 セラミック基板上に形成されたガラス層
の一部を化学エッチングすることにより部分凸部を形成
して、グレーズドセラミック基板を製造する方法におい
て、化学エッチング後の残渣を、25℃で蒸気圧が20
0mmHg以上の極性を有する有機溶剤で除去すること
を特徴とするグレーズドセラミック基板の製造方法。
1. A method for producing a glaze ceramic substrate by forming a partial convex portion by chemically etching a part of a glass layer formed on a ceramic substrate, and removing the residue after the chemical etching at 25 ° C. Vapor pressure is 20
A method for producing a glaze ceramic substrate, which comprises removing with an organic solvent having a polarity of 0 mmHg or more.
JP12018295A 1995-05-18 1995-05-18 Manufacturing method of glazed ceramic substrate Expired - Fee Related JP3151380B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12018295A JP3151380B2 (en) 1995-05-18 1995-05-18 Manufacturing method of glazed ceramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12018295A JP3151380B2 (en) 1995-05-18 1995-05-18 Manufacturing method of glazed ceramic substrate

Publications (2)

Publication Number Publication Date
JPH08310025A true JPH08310025A (en) 1996-11-26
JP3151380B2 JP3151380B2 (en) 2001-04-03

Family

ID=14779950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12018295A Expired - Fee Related JP3151380B2 (en) 1995-05-18 1995-05-18 Manufacturing method of glazed ceramic substrate

Country Status (1)

Country Link
JP (1) JP3151380B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016062014A (en) * 2014-09-19 2016-04-25 日本碍子株式会社 Optical component

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101677919B1 (en) 2015-05-07 2016-11-21 한서대학교 산학협력단 Portable wireless speaker device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016062014A (en) * 2014-09-19 2016-04-25 日本碍子株式会社 Optical component

Also Published As

Publication number Publication date
JP3151380B2 (en) 2001-04-03

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