JPH0830964A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0830964A JPH0830964A JP15607094A JP15607094A JPH0830964A JP H0830964 A JPH0830964 A JP H0830964A JP 15607094 A JP15607094 A JP 15607094A JP 15607094 A JP15607094 A JP 15607094A JP H0830964 A JPH0830964 A JP H0830964A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording layer
- magnetic
- recording medium
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、強磁性金属を主成分と
する薄膜型磁気記録媒体に係わり、さらに詳しくは薄膜
磁気記録層の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic recording medium containing a ferromagnetic metal as a main component, and more particularly to improvement of a thin film magnetic recording layer.
【０００２】[0002]
【従来の技術】強磁性金属薄膜を磁気記録層とする磁気
記録媒体は、高密度記録に適した優れた特性を持つた
め、薄膜型固定ディスク、ディジタルＶＴＲ等の次世代
の磁気記録媒体として注目されている。2. Description of the Related Art A magnetic recording medium having a ferromagnetic metal thin film as a magnetic recording layer has excellent characteristics suitable for high-density recording, and therefore, it is attracting attention as a next-generation magnetic recording medium such as a thin film type fixed disk and a digital VTR. Has been done.
【０００３】[0003]
【発明が解決しようとする課題】ところが、表面に金属
が露出しているので、磁気ヘッド等との摺動時に磨耗し
やすく走行耐久性に劣るという欠点を持つため、カーボ
ン膜やＳｉＯ2 膜等の非磁性硬質保護膜を薄膜磁気記録
層上に設けることが提案されている。However [0007] Since the metal on the surface is exposed, because of its inferior wear easy running durability during sliding of the magnetic head or the like, carbon film or SiO 2 film or the like It has been proposed to provide the non-magnetic hard protective film described above on the thin film magnetic recording layer.
【０００４】しかしながら、走行中に非磁性硬質保護膜
が剥離するなどの問題があり、走行耐久性を十分に改善
するには至っていない。However, there is a problem that the non-magnetic hard protective film is peeled off during running, and the running durability has not been sufficiently improved.
【０００５】本発明は、上記従来技術が有していた非磁
性硬質保護膜が剥離しやすいという欠点を解決し、以て
走行耐久性に優れた磁気記録媒体の提供を目的とする。An object of the present invention is to provide a magnetic recording medium having excellent running durability by solving the drawback that the non-magnetic hard protective film of the prior art described above is easily peeled off.
【０００６】[0006]
【課題を解決するための手段】本発明は前記目的を達成
するため、非磁性基体上に強磁性金属を主成分とする薄
膜磁気記録層を形成し、さらに該薄膜磁気記録層の上部
に非磁性硬質保護膜を形成してなる磁気記録媒体におい
て、薄膜磁気記録層中の磁性金属もしくは非磁性金属元
素を一部金属状態のままで非磁性硬質保護膜に接しせし
めたことを特徴とするものである。In order to achieve the above object, the present invention forms a thin film magnetic recording layer containing a ferromagnetic metal as a main component on a non-magnetic substrate, and further forms a thin film magnetic recording layer above the thin film magnetic recording layer. A magnetic recording medium formed with a magnetic hard protective film, characterized in that the magnetic metal or nonmagnetic metal element in the thin film magnetic recording layer is brought into contact with the nonmagnetic hard protective film in a partially metal state. Is.
【０００７】[0007]
【作用】薄膜磁気記録層の表面は、通常、１〜２０ｎｍ
厚の酸化物で覆われている。特に金属と金属酸化物の混
合物を磁気記録層とする磁気記録媒体においては、磁気
記録層を形成する際に、酸素ガスを導入するために、磁
気記録層表面は厚く硬質な金属酸化物となっている。こ
の上部に非磁性硬質保護膜を形成するが、硬質なもの同
士の接触なので歪みが入りやすく、摺動時に衝撃で剥離
が起きやすい。そこで、磁気記録層表面を金属化するこ
とにより軟質な金属により歪みが吸収され、摺動耐久性
が著しく向上する。 磁気記録層上の金属成分の存在量
は、少なく過ぎると歪み吸収効果が低減するため、硬質
保護膜に接する磁気記録層の表面側５ｎｍ深部までの金
属元素の１０原子％以上、好ましくは２０原子％以上が
金属状態であることが望ましい。The function of the thin film magnetic recording layer is usually 1 to 20 nm.
Covered with thick oxide. In particular, in a magnetic recording medium having a mixture of metal and metal oxide as the magnetic recording layer, the surface of the magnetic recording layer becomes thick and hard metal oxide because oxygen gas is introduced when forming the magnetic recording layer. ing. A non-magnetic hard protective film is formed on top of this, but since hard materials are in contact with each other, distortion is likely to occur and peeling is likely to occur due to impact during sliding. Therefore, by metallizing the surface of the magnetic recording layer, distortion is absorbed by the soft metal, and sliding durability is significantly improved. If the amount of the metal component present on the magnetic recording layer is too small, the strain absorption effect will be reduced. % Or more is preferably in a metallic state.
【０００８】[0008]
【実施例】基体上に形成される薄膜磁気記録層は、Ｃ
ｏ、Ｆｅ、Ｎｉ、Ｃｏ−Ｎｉ合金、Ｃｏ−Ｃｒ合金、Ｃ
ｏ−Ｐ合金、Ｃｏ−Ｎｉ−Ｐ合金などの強磁性金属や合
金を真空蒸着、イオンプレーティング、スパッタリン
グ、メッキ等の手段によって、基体上に被着するなどの
方法で形成される。なお、この磁気記録層中には、例え
ば、Ｃｒ、Ｐｔ、Ｃｕ、Ｍｎなどの非磁性金属からなる
第３金属元素を添加する場合もある。EXAMPLE A thin film magnetic recording layer formed on a substrate is C
o, Fe, Ni, Co-Ni alloy, Co-Cr alloy, C
A ferromagnetic metal or alloy such as an o-P alloy or a Co-Ni-P alloy is formed on the substrate by a method such as vacuum deposition, ion plating, sputtering or plating. Incidentally, a third metal element made of a non-magnetic metal such as Cr, Pt, Cu or Mn may be added to the magnetic recording layer.
【０００９】磁気記録層表面を金属化する方法として
は、水素プラズマに晒す、水素気流中で加熱する、表面
酸化層をエッチングで除去する等、種々の手法が適用で
きる。磁気記録層表面の金属成分量を定量する方法とし
ては、ＥＳＣＡやオージェ電子分光法が最適であり、当
該金属のスペクトルをピーク分離して金属成分と金属酸
化物成分を定量する。As a method of metallizing the surface of the magnetic recording layer, various methods such as exposure to hydrogen plasma, heating in a hydrogen stream, and removal of the surface oxide layer by etching can be applied. ESCA or Auger electron spectroscopy is the most suitable method for quantifying the amount of metal component on the surface of the magnetic recording layer, and the spectrum of the metal is peak-separated to quantify the metal component and the metal oxide component.
【００１０】非磁性硬質保護膜としては、ダイヤモンド
構造を有するアモルファスカーボン（ＤＬＣ）、ＳｉＯ
2 、ＴｉＯ2 、ＴｉＯ、Ａｌ2 Ｏ3 等のビッカース硬度
２００以上のものが全て好適に使用され、蒸着、スパッ
タリング、ＣＶＤ等の方法で、磁気記録層上に形成され
る。As the non-magnetic hard protective film, amorphous carbon (DLC) having a diamond structure, SiO
All of Vickers hardness of 200 or more such as 2 , TiO 2 , TiO, and Al 2 O 3 are preferably used and are formed on the magnetic recording layer by a method such as vapor deposition, sputtering and CVD.
【００１１】磁気記録媒体としては、ポリエステルフィ
ルム、ポリイミドフィルムなどの合成樹脂フィルムを基
体とする磁気テープ、ガラス板、アルミニウム板、合成
樹脂板などを基体とする磁気ディスクや磁気ドラムなど
磁気ヘッドと摺接する構造の種々の形態を包含する。As a magnetic recording medium, a magnetic tape based on a synthetic resin film such as a polyester film or a polyimide film, a magnetic disk based on a glass plate, an aluminum plate, a synthetic resin plate or a magnetic head such as a magnetic drum is used. It includes various forms of contacting structures.
【００１２】次に本発明の具体的な実施例について説明
する。Next, specific examples of the present invention will be described.
【００１３】（実施例１）厚さ１０μｍのポリエステル
フィルムを真空蒸着装置にセットし、１０-6Ｔｏｒｒの
真空下で、Ｃｏ８０原子％・Ｎｉ２０原子％合金を加熱
蒸発させ、酸素ガスを導入しながら、ポリエステルフィ
ルム上に厚さ２００ｎｍのＣｏＮｉ強磁性金属薄膜から
なる磁気記録層を形成した。(Example 1) A polyester film having a thickness of 10 μm was set in a vacuum vapor deposition apparatus, and 80 at% Co and 20 at% Ni alloy was heated and evaporated under a vacuum of 10 −6 Torr, while introducing oxygen gas. A magnetic recording layer made of a CoNi ferromagnetic metal thin film having a thickness of 200 nm was formed on the polyester film.
【００１４】次いで磁気記録層表面をＲＦ１３．５６Ｍ
Ｈｚ、ガス圧５Ｐａ、ガス流量２００ｃｃ／ｍｉｎ（４
℃）、０．５Ｗ／ｃｍ2 の条件の水素プラズマに１０秒
間晒した。続いてＲＦスパッタ法により、磁気記録層上
に厚さ１０ｎｍのＳｉＯ2 からなる非磁性硬質保護層を
形成し、さらに最表面にディップ塗布法により、パーフ
ルオロポリエーテルからなる潤滑層を５ｎｍの厚さで形
成して磁気テープを作った。Then, the surface of the magnetic recording layer is RF13.56M.
Hz, gas pressure 5 Pa, gas flow rate 200 cc / min (4
C.) and 0.5 W / cm 2 of hydrogen plasma for 10 seconds. Then, a non-magnetic hard protective layer made of SiO 2 having a thickness of 10 nm is formed on the magnetic recording layer by RF sputtering, and a lubricating layer made of perfluoropolyether having a thickness of 5 nm is formed on the outermost surface by dip coating. Then, it was formed into a magnetic tape.
【００１５】（実施例２）実施例１において、磁気記録
層表面を水素プラズマに晒す代わりに、条件のアルゴン
イオンを照射して表面を１０ｎｍエッチングした他は同
様にして磁気テープを作った。(Example 2) A magnetic tape was prepared in the same manner as in Example 1 except that the surface of the magnetic recording layer was exposed to argon ions and the surface was etched by 10 nm instead of exposing the surface to hydrogen plasma.
【００１６】（比較例１）実施例１において、磁気記録
層表面の水素プラズマ処理を省いた他は同様にして磁気
テープを作った。Comparative Example 1 A magnetic tape was prepared in the same manner as in Example 1 except that the hydrogen plasma treatment on the surface of the magnetic recording layer was omitted.
【００１７】（比較例２）実施例１において、磁気記録
層表面の水素プラズマ処理と非磁性硬質保護膜の形成を
省いた他は同様にして磁気テープを作った。Comparative Example 2 A magnetic tape was prepared in the same manner as in Example 1 except that the hydrogen plasma treatment on the surface of the magnetic recording layer and the formation of the nonmagnetic hard protective film were omitted.
【００１８】以上のようにして作製した磁気記録媒体に
ついて走行耐久性を調べた。走行耐久性は鋼球摺動試験
を行い、荷重１０ｇ、速度２ｍ／ｍｉｎの条件で摺動を
行い、磁気記録層に傷が入るまでのパス回数により評価
した。結果と潤滑層の表面分布状態を次の表に示す。The running durability of the magnetic recording medium manufactured as described above was examined. The running durability was evaluated by performing a steel ball sliding test, sliding under the condition of a load of 10 g and a speed of 2 m / min, and the number of passes until the magnetic recording layer was scratched. The results and the surface distribution of the lubricating layer are shown in the following table.
【００１９】 [0019]
【００２０】[0020]
【発明の効果】上表より、明らかに実施例１、２で得ら
れた磁気記録媒体は比較例１、２に比べて走行耐久性に
優れることが分かる。従って、本発明によれば著しく走
行耐久性に優れた磁気記録媒体を得ることができる。From the above table, it is apparent that the magnetic recording media obtained in Examples 1 and 2 are superior in running durability to Comparative Examples 1 and 2. Therefore, according to the present invention, it is possible to obtain a magnetic recording medium having extremely excellent running durability.
Claims (4)
る薄膜磁気記録層を形成し、さらに該薄膜磁気記録層の
上部に非磁性硬質保護膜を形成してなる磁気記録媒体に
おいて、 薄膜磁気記録層中の磁性金属元素もしくは非磁性金属元
素が一部金属状態のままで非磁性硬質保護膜に接してい
ることを特徴とする磁気記録媒体。1. A magnetic recording medium comprising a non-magnetic substrate, a thin-film magnetic recording layer containing a ferromagnetic metal as a main component, and a non-magnetic hard protective film formed on the thin-film magnetic recording layer. A magnetic recording medium characterized in that a magnetic metal element or a non-magnetic metal element in a thin film magnetic recording layer is in contact with a non-magnetic hard protective film in a partially metal state.
接する薄膜磁気記録層の表面側５ｎｍ深部までの金属元
素の１０原子％以上が金属状態であることを特徴とする
磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein 10 atomic% or more of the metal element up to a depth of 5 nm on the surface side of the thin film magnetic recording layer in contact with the nonmagnetic hard protective film is in a metallic state.
属と金属酸化物からなることを特徴とする磁気記録媒
体。3. The magnetic recording medium according to claim 1, wherein the thin film magnetic recording layer is made of a metal and a metal oxide.
め蒸着磁気記録層であることを特徴とする磁気記録媒
体。4. The magnetic recording medium according to claim 1, wherein the thin film magnetic recording layer is an obliquely evaporated magnetic recording layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15607094A JPH0830964A (en) | 1994-07-07 | 1994-07-07 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15607094A JPH0830964A (en) | 1994-07-07 | 1994-07-07 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0830964A true JPH0830964A (en) | 1996-02-02 |
Family
ID=15619652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15607094A Pending JPH0830964A (en) | 1994-07-07 | 1994-07-07 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0830964A (en) |
-
1994
- 1994-07-07 JP JP15607094A patent/JPH0830964A/en active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20030701 |