JPH05128469A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH05128469A
JPH05128469A JP6197991A JP6197991A JPH05128469A JP H05128469 A JPH05128469 A JP H05128469A JP 6197991 A JP6197991 A JP 6197991A JP 6197991 A JP6197991 A JP 6197991A JP H05128469 A JPH05128469 A JP H05128469A
Authority
JP
Japan
Prior art keywords
magnetic
layer
magnetic layer
coercive force
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6197991A
Other languages
Japanese (ja)
Inventor
Hiroyasu Fujimori
啓安 藤森
Hiroaki Morita
博昭 森田
Zenzo Okumura
善造 奥村
Yoshiki Takemura
芳樹 竹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kubota Corp
Original Assignee
Kubota Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubota Corp filed Critical Kubota Corp
Priority to JP6197991A priority Critical patent/JPH05128469A/en
Publication of JPH05128469A publication Critical patent/JPH05128469A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To attain the overwrite property by more lowering coercive force of an underside magnetic layer than of an upperside magnetic layer when direction of a surface faced to a magnetic head from a substrate is regarded as upperside. CONSTITUTION:A magnetic layer 5, a Cr layer 6, a magnetic layer 7, a Cr layer 8 and a magnetic layer 9 are laminated with an under layer 4 on a substrate 3 in this order. In this case, each thickness of the magnetic layer 5, 7, 9 increases in proportion as the magnetic layer nears to the side of the under layer 4 from the surface side to weaken coercive force. In this way, as coercive force of the underside magnetic layer is made lower than of the upperside magnetic layer, a pattern is easily written on the underside magnetic layer and the overwrite property is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気ディスク等の磁気記
録媒体に係り、特に重ね書き特性の良好なものに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium such as a magnetic disk, and more particularly to a magnetic recording medium having a good overwriting characteristic.

【0002】[0002]

【従来の技術】近年、磁気記録媒体の高密度記録化に伴
って、CoNiCr,CoCr等の一軸結晶磁気異方性
を有するCo合金系強磁性金属の薄膜(磁性層)を非磁
性基体上に成膜した金属薄膜型磁気記録媒体が用いられ
ている。前記磁気記録媒体において、高密度記録化を行
うには、高い保磁力を具備する必要があり、磁性層の薄
膜化を促進しなければならない。しかし、薄膜化を促進
すると残留磁束密度Brと膜厚δとの積Brδが小さく
なり、再生出力が小さくなるという問題があった。
2. Description of the Related Art In recent years, a thin film (magnetic layer) of a Co alloy type ferromagnetic metal having uniaxial crystal magnetic anisotropy such as CoNiCr or CoCr has been formed on a non-magnetic substrate as the recording density of a magnetic recording medium is increased. A metal thin film type magnetic recording medium is used. In order to achieve high density recording in the magnetic recording medium, it is necessary to have a high coercive force, and it is necessary to promote thinning of the magnetic layer. However, when the thinning is promoted, the product Brδ of the residual magnetic flux density Br and the film thickness δ becomes small, and there is a problem that the reproduction output becomes small.

【0003】そこで、特開平1−217723号公報に開示さ
れているように、非磁性基体の上にCrからなる下地層
を設け、その上にCo合金系磁性層と非磁性層とを交互
に積層した磁気記録媒体が開発されるに至った。この媒
体においては、高保磁力の薄膜磁性層が多数形成されて
いるため、各磁性層のBrδの総和は大きな値となり、
再生出力を損うことなく高密度記録化が可能となった。
Therefore, as disclosed in Japanese Patent Application Laid-Open No. 1-217723, an underlayer made of Cr is provided on a non-magnetic substrate, and Co alloy magnetic layers and non-magnetic layers are alternately formed on the underlayer. Laminated magnetic recording media have been developed. In this medium, since a large number of thin-film magnetic layers with high coercive force are formed, the total sum of Brδ of each magnetic layer becomes a large value,
High-density recording has become possible without damaging the reproduction output.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、前記磁
性層を積層化した磁気記録媒体においては、重ね書き特
性(オーバーライト特性、O/W特性という。)につい
て配慮されておらず、O/W特性に問題があった。すな
わち、磁気ヘッドの起磁力は磁気記録媒体の表面(ヘッ
ド対向面)から下方(基体側方向)にいくほど小さくな
るが、下層の磁性層においても保磁力が高いため、磁気
ヘッドの起磁力の低下と相まって、新たなパタン(情
報)が下層まで書き込み難くなり、以前のパタンの残留
に起因するノイズにより新しいパタンのS/Nが悪くな
るという問題があった。
However, in the magnetic recording medium in which the magnetic layers are laminated, the overwrite characteristics (referred to as overwrite characteristics and O / W characteristics) are not taken into consideration, and the O / W characteristics are not taken into consideration. I had a problem with. That is, the magnetomotive force of the magnetic head decreases from the surface of the magnetic recording medium (head facing surface) downward (toward the substrate side), but the coercive force of the lower magnetic layer is high, so Along with the decrease, it is difficult to write a new pattern (information) to the lower layer, and there is a problem that the S / N of the new pattern deteriorates due to noise caused by the residual of the previous pattern.

【0005】本発明はかかる問題に鑑みなされたもの
で、記録密度および再生出力が高く、しかも良好なオー
バーライト特性を備えた磁気記録媒体を提供することを
目的とする。
The present invention has been made in view of the above problems, and an object of the present invention is to provide a magnetic recording medium having a high recording density and a high reproduction output and having a good overwrite characteristic.

【0006】[0006]

【課題を解決するための手段】上記目的に鑑みなされた
本発明の磁気記録媒体は、非磁性基体の上にCrからな
る下地層が形成され、該下地層の上に強磁性Co合金か
らなる磁性層とCr層とが交互に積層された磁気記録層
が形成された磁気記録媒体において、基体から磁気ヘッ
ドに対向する表面の方向を上方としたとき下側の磁性層
の保磁力が上側の磁性層の保磁力よりも小さいことを発
明の構成とするものである。この際、下側の磁性層の保
磁力を小さくするには、上側の磁性層より膜厚を厚くす
ればよい。
In the magnetic recording medium of the present invention made in view of the above object, an underlayer made of Cr is formed on a nonmagnetic substrate, and a ferromagnetic Co alloy is formed on the underlayer. In a magnetic recording medium in which a magnetic recording layer in which magnetic layers and Cr layers are alternately laminated is formed, the coercive force of the lower magnetic layer is the upper side when the direction of the surface facing the magnetic head from the base is upward. It is an aspect of the invention that the magnetic field is smaller than the coercive force of the magnetic layer. At this time, in order to reduce the coercive force of the lower magnetic layer, the film thickness may be made larger than that of the upper magnetic layer.

【0007】[0007]

【作用】下側の磁性層の保磁力を上側の磁性層の保磁力
に対して小さくしたので、磁気ヘッドからの起磁力が上
層の磁性層に対して弱まっても、容易にパタンを書き換
えることができ、書き込み前のパタンの残留によるノイ
ズを防止することができる。
[Function] Since the coercive force of the lower magnetic layer is made smaller than that of the upper magnetic layer, the pattern can be easily rewritten even if the magnetomotive force from the magnetic head weakens with respect to the upper magnetic layer. Therefore, it is possible to prevent noise due to the residual pattern before writing.

【0008】下側の磁性層の保磁力を上側の磁性層に対
して小さくするには、磁性層の層厚を上側に対して厚く
すればよく、成膜の際、成膜条件(例えば成膜時間)を
コントロールすることにより、容易に所期の磁気記録層
を形成することができる。
In order to make the coercive force of the lower magnetic layer smaller than that of the upper magnetic layer, the layer thickness of the magnetic layer may be made larger than that of the upper magnetic layer. By controlling the film time, the desired magnetic recording layer can be easily formed.

【0009】[0009]

【実施例】図1は実施例に係る磁気記録媒体の部分断面
図を示しており、非磁性の基体3の上にCrからなる下
地層4 が形成されており、その上に一軸結晶磁気異方性
を有する強磁性Co合金からなる磁性層5,7,9 とCr層
6,8 とが交互に積層されかつ最上層が磁性層9 とされた
磁気記録層10が形成され、更にその上に保護層11が形成
されている。
EXAMPLE FIG. 1 is a partial cross-sectional view of a magnetic recording medium according to an example. An underlayer 4 made of Cr is formed on a non-magnetic substrate 3, and a uniaxial crystal magnetic anisotropy is formed on the underlayer 4. Magnetic layers 5,7,9 and Cr layers made of ferromagnetic Co alloy having directionality
A magnetic recording layer 10 in which 6 and 8 are alternately laminated and the uppermost layer is a magnetic layer 9 is formed, and a protective layer 11 is further formed thereon.

【0010】前記基体3 はAl合金製基板1 の上に、剛
性を確保するため10〜20μm 程度の非晶質Ni−Pメッ
キ層2 が形成されている。基体3 としては、かかる構成
に限らず、ガラスやセラミックスを利用してもよい。
尚、Ni−Pメッキ層2 の上面は、通常、磁気ヘッドと
の接触抵抗を軽減するために、テキスチャーと呼ばれる
凹凸加工が施される。
The substrate 3 has an amorphous Ni-P plating layer 2 of about 10 to 20 μm formed on the Al alloy substrate 1 to ensure rigidity. The substrate 3 is not limited to this structure, and glass or ceramics may be used.
The upper surface of the Ni-P plated layer 2 is usually provided with a textured process called texture in order to reduce the contact resistance with the magnetic head.

【0011】基体3 の上に形成されるCr下地層4 は、
その上に形成される磁性層5 の強磁性Co合金(結晶構
造hcp)のc軸(結晶磁気異方性を示す結晶軸)を面
内配向させるために形成されるもので、通常、500 〜20
00Å程度の厚さに形成される。前記磁気記録層10の磁性
層5,7,9 を形成する強磁性Co合金としては、hcp結
晶構造を有するものならいずれのものでもよく、例えば
CoNiCr、CoCrTa、CoCrPt等を挙げる
ことができる。磁性層5,7,9 は表面側より下地層側にい
くほど保磁力を弱めるため層厚を厚くする。もっとも、
各磁性層5,7,9の層厚の合計は 600〜 800Åとし、最上
層の磁性層9 は 100Å以上とするのがよい。全層厚を 6
00〜800Åとするのは、再生出力の確保とノイズ低減の
ために磁気記録媒体としてBrδが 450〜 600G・μの
ものが要求されているからである。最も層厚の薄い最上
層の層厚を 100Å以上とするのは 100Å未満になると連
続膜でなく、合金部分が島状に散在するようになり、超
常磁性が現れ、保磁力が急激に小さくなるからである。
尚、図例では磁性層5,7,9 は三層としたが、層数は自由
に設定することができる。
The Cr underlayer 4 formed on the substrate 3 is
It is formed for in-plane orientation of the c-axis (crystal axis showing crystal magnetic anisotropy) of the ferromagnetic Co alloy (crystal structure hcp) of the magnetic layer 5 formed thereon, and usually 500- 20
It is formed to a thickness of about 00Å. The ferromagnetic Co alloy forming the magnetic layers 5, 7, 9 of the magnetic recording layer 10 may be any alloy having an hcp crystal structure, and examples thereof include CoNiCr, CoCrTa, and CoCrPt. The magnetic layers 5, 7, 9 are made thicker in order to weaken the coercive force from the surface side toward the underlayer side. However,
The total thickness of the magnetic layers 5, 7 and 9 is preferably 600 to 800Å, and the uppermost magnetic layer 9 is preferably 100Å or more. Total layer thickness 6
The reason why it is set to 00 to 800Å is that a magnetic recording medium having a Brδ of 450 to 600 G · μ is required to secure a reproduction output and reduce noise. If the thickness of the uppermost layer, which is the thinnest, is 100 Å or more, if it is less than 100 Å, alloy parts will be scattered like islands instead of a continuous film, superparamagnetism will appear, and coercive force will suddenly decrease. Because.
In the illustrated example, the magnetic layers 5, 7, 9 are three layers, but the number of layers can be set freely.

【0012】磁性層5,7,9 の間に形成されるCr層6,8
は、磁性層のCo系合金のc軸を面内配向させるため及
び磁性層間の磁気的な相互作用を弱めるために設けら
れ、層厚は50〜 250Å程度でよい。50Å未満では、Cr
層を挟む磁性層相互間の磁気的相互作用が強すぎるた
め、多層化による媒体ノイズの低減が現われにくい。一
方、 250Åを越えると媒体ノイズが大きくなり、又電気
的特性も劣化するようになるからである。
Cr layers 6, 8 formed between the magnetic layers 5, 7, 9
Is provided for in-plane orientation of the c-axis of the Co-based alloy of the magnetic layer and for weakening the magnetic interaction between the magnetic layers, and the layer thickness may be about 50 to 250 Å. Cr less than 50Å
Since the magnetic interaction between the magnetic layers sandwiching the layers is too strong, it is difficult to reduce the medium noise due to the multilayer structure. On the other hand, if it exceeds 250 Å, the medium noise becomes large and the electrical characteristics also deteriorate.

【0013】前記磁気記録層10の上にはカーボン等から
なる非磁性保護層11が 200〜 400Å程度形成されてお
り、更にその上にフッ素化ポリエーテル等の潤滑剤を20
〜50Å程度塗布してもよい。尚、前記保護層11や潤滑塗
布層は必要に応じて形成すればよい。尚、基体上に磁性
層、Cr層、カーボン系保護層を形成する手段として
は、スパッタリングが一般的に行われるが他の物理気相
蒸着法を利用することもできる。
A non-magnetic protective layer 11 made of carbon or the like is formed on the magnetic recording layer 10 to a thickness of about 200 to 400 liters, and a lubricant such as fluorinated polyether or the like is further formed thereon.
You may apply about 50Å. The protective layer 11 and the lubricant coating layer may be formed as needed. As the means for forming the magnetic layer, the Cr layer, and the carbon-based protective layer on the substrate, sputtering is generally performed, but other physical vapor deposition methods can be used.

【0014】次に具体的実施例を掲げる。 (1) Al基板にNi−Pメッキ層を形成し、その表面に
テキスチャーを施した基体を用い、Ni−Pメッキ層の
上に、図1のように、Cr下地層4 を1000Å形成した。
その上に表1の膜厚の磁性層5,7,9 を 100ÅのCr層6,
8 を介して三層積層した。更に、その上にカーボン層を
300Å積層成膜した。
Next, specific examples will be given. (1) A Ni-P plated layer was formed on an Al substrate, and a substrate having a textured surface was used to form a 1000-liter Cr underlayer 4 on the Ni-P plated layer as shown in FIG.
On top of that, the magnetic layers 5, 7 and 9 having the film thicknesses shown in Table 1 are formed on the 100 Å Cr layer
Three layers were laminated via 8. In addition, a carbon layer on it
A 300Å laminated film was formed.

【0015】成膜法としてはRFマグネトロンスパッタ
法を用い、成膜条件はArガス圧5mmTorr、基体温度 2
30℃とした。ターゲットとして用いたCo合金組成(磁
性層の組成) はCo86Cr12Ta2 である。尚、該Co合金
の膜厚と保磁力Hcとの関係を図2に示す。図2より実施
例の磁性層は下側の層ほど膜厚が厚いため、保磁力が低
くなっている。
The RF magnetron sputtering method is used as the film forming method, and the film forming conditions are Ar gas pressure of 5 mmTorr and substrate temperature 2
It was set to 30 ° C. The Co alloy composition (composition of the magnetic layer) used as the target is Co 86 Cr 12 Ta 2 . The relationship between the film thickness of the Co alloy and the coercive force Hc is shown in FIG. As shown in FIG. 2, the lower magnetic layer of the example has a larger film thickness, and thus has a lower coercive force.

【0016】[0016]

【表1】 [Table 1]

【0017】(2) 成膜後の磁気記録媒体の保持力、媒体
ノイズ(SNm)およびオーバーライト特性を調べた。
その結果を表2に示す。尚、オーバーライト特性は、媒
体に1Fデータを書き込み、次に直流消去することな
く、2Fデータを重ね書きした後、1Fと2Fの周波数
成分をスペクトラム・アナライザで測定し、下記式によ
って定義する値(O/W値)によって評価した。O/W
値が小さい(絶対値は大)程、書き込み前のパタンはき
れいに消去されていることを示す。測定条件は、磁気ヘ
ッドとして薄膜ヘッドを用い、浮上高さ0.13μm 、1F
データ:1.75MHz 、2Fデータ:5.0MHzとした。
(2) The coercive force, medium noise (SNm) and overwrite characteristic of the magnetic recording medium after film formation were examined.
The results are shown in Table 2. The overwrite characteristic is a value defined by the following formula after writing 1F data on the medium and then overwriting 2F data without erasing DC, measuring the frequency components of 1F and 2F with a spectrum analyzer. (O / W value) evaluated. O / W
A smaller value (larger absolute value) indicates that the pattern before writing is erased cleanly. The measurement conditions used a thin film head as the magnetic head, and the flying height was 0.13 μm and 1F.
Data: 1.75MHz, 2F data: 5.0MHz.

【0018】[0018]

【数1】 [Equation 1]

【0019】[0019]

【表2】 [Table 2]

【0020】(3) 表2より、実施例は比較例に比して保
磁力が向上しているにも拘らず、O/W値は大幅に低下
しており、オーバーライト特性の向上が認められる。
尚、媒体ノイズについては著しい改善は認められない
が、比較例と同等かそれ以上良好な結果が得られた。
(3) From Table 2, it can be seen that although the coercive force of the example is higher than that of the comparative example, the O / W value is greatly reduced, and the overwrite characteristic is improved. Be done.
It should be noted that although no remarkable improvement was observed in the medium noise, the result was equal to or better than that of the comparative example.

【0021】[0021]

【発明の効果】以上説明した通り、本発明の磁気記録媒
体は、複数の磁性層がCr層を介して積層されているた
め記録密度および再生出力の向上を図ることができる。
しかも、磁気記録層の下側の磁性層ほど保磁力を小さく
したので、磁気ヘッドからの起磁力が減少しても、下側
の磁性層に容易に新しいパタンを書き込むことができ、
オーバーライト特性の向上を図ることができる。
As described above, in the magnetic recording medium of the present invention, since the plurality of magnetic layers are laminated with the Cr layer interposed, the recording density and the reproduction output can be improved.
Moreover, since the coercive force is made smaller toward the lower magnetic layer of the magnetic recording layer, new patterns can be easily written in the lower magnetic layer even if the magnetomotive force from the magnetic head decreases.
It is possible to improve the overwrite characteristic.

【0022】この場合、下側の磁性層の層厚を上側のそ
れより厚く成膜することにより、容易に保滋力を小さく
することができ、成膜条件の簡単なコントロールで容易
にオーバーライト特性の改善を図ることができる。
In this case, by lowering the thickness of the lower magnetic layer to be thicker than that of the upper magnetic layer, it is possible to easily reduce the nutritional support, and to easily overwrite by simply controlling the deposition conditions. It is possible to improve the characteristics.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例に係る磁気記録媒体の要部断面図であ
る。
FIG. 1 is a cross-sectional view of essential parts of a magnetic recording medium according to an example.

【図2】実施例に係るCo合金の膜厚と保磁力との関係
を示すグラフである。
FIG. 2 is a graph showing the relationship between the film thickness and the coercive force of the Co alloy according to the example.

【符号の説明】[Explanation of symbols]

3 基体 4 下地層 5 磁性層 6 Cr層 7 磁性層 8 Cr層 9 磁性層 10 磁気記録層 3 Substrate 4 Underlayer 5 Magnetic Layer 6 Cr Layer 7 Magnetic Layer 8 Cr Layer 9 Magnetic Layer 10 Magnetic Recording Layer

───────────────────────────────────────────────────── フロントページの続き (72)発明者 奥村 善造 兵庫県伊丹市奥畑5丁目10番地 株式会社 クボタ尼崎工場伊丹分工場内 (72)発明者 竹村 芳樹 兵庫県伊丹市奥畑5丁目10番地 株式会社 クボタ尼崎工場伊丹分工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Zenzo Okumura 5-10 Okuhata, Itami City, Hyogo Prefecture Kubota Amagasaki Plant, Itamibu Plant (72) Inventor Yoshiki Takemura 5-10 Okubata, Itami City, Hyogo Stock Company Kubota Amagasaki Factory Itamibu Factory

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 非磁性基体の上にCrからなる下地層が
形成され、該下地層の上に強磁性Co合金からなる磁性
層とCr層とが交互に積層された磁気記録層が形成され
た磁気記録媒体において、 基体から磁気ヘッドに対向する表面の方向を上方とした
とき下側の磁性層の保磁力が上側の磁性層の保磁力より
も小さいことを特徴とする磁気記録媒体。
1. An underlayer made of Cr is formed on a non-magnetic substrate, and a magnetic recording layer in which magnetic layers made of a ferromagnetic Co alloy and Cr layers are alternately laminated is formed on the underlayer. In the magnetic recording medium, the coercive force of the lower magnetic layer is smaller than the coercive force of the upper magnetic layer when the direction of the surface facing the magnetic head from the substrate is upward.
【請求項2】 下側の磁性層の膜厚が上側の磁性層の膜
厚よりも厚い請求項1に記載した磁気記録媒体。
2. The magnetic recording medium according to claim 1, wherein the film thickness of the lower magnetic layer is thicker than the film thickness of the upper magnetic layer.
JP6197991A 1991-03-26 1991-03-26 Magnetic recording medium Pending JPH05128469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6197991A JPH05128469A (en) 1991-03-26 1991-03-26 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6197991A JPH05128469A (en) 1991-03-26 1991-03-26 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05128469A true JPH05128469A (en) 1993-05-25

Family

ID=13186808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6197991A Pending JPH05128469A (en) 1991-03-26 1991-03-26 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH05128469A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0654783A1 (en) * 1993-11-22 1995-05-24 Hewlett-Packard Company Multilayered longitudinal magnetic recording media with improved overwrite
EP1600951A1 (en) * 2004-05-24 2005-11-30 Hitachi Global Storage Technologies B. V. Magnetic Recording System
US7180710B2 (en) 2004-05-24 2007-02-20 Hitachi Global Storage Technologies Netherlands B.V. Magnetic recording medium having three ferromagnetic layers with increasing intrinsic coercivity from the lower to the upper layer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0654783A1 (en) * 1993-11-22 1995-05-24 Hewlett-Packard Company Multilayered longitudinal magnetic recording media with improved overwrite
EP1600951A1 (en) * 2004-05-24 2005-11-30 Hitachi Global Storage Technologies B. V. Magnetic Recording System
US7177118B2 (en) 2004-05-24 2007-02-13 Hitachi Global Storage Technologies Netherlands B.V. Magnetic recording system with three-layer laminated media having improved signal-to-noise ratio
US7180710B2 (en) 2004-05-24 2007-02-20 Hitachi Global Storage Technologies Netherlands B.V. Magnetic recording medium having three ferromagnetic layers with increasing intrinsic coercivity from the lower to the upper layer

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