JPH08303051A - Clean room building structure - Google Patents

Abstract

PURPOSE: To effectively use a restricted site area, obviating the need of a site for constructing a utility building for a machine room or a servicing room, and form environment under the control of a vibration, and base isolation environment against the medium and small scale of an earthquake. CONSTITUTION: A clean room 10 has a utility building section 14 to install machinery for the air conditioning and servicing systems of a clean room 18 or the like via a vibration eliminator 12, in such a state as constructed on a body building section 11 forming the room 18 internally. Furthermore, a water tank 16 is provided as integral part of the section 11 in a basement as the bottom thereof.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room building structure, and more particularly to a clean room building structure in which precision equipment for manufacturing and assembling is installed in a semiconductor manufacturing factory, an optical product manufacturing / assembling factory or the like.

[0002]

2. Description of the Related Art In semiconductor manufacturing plants and optical product manufacturing and assembly plants, clean rooms are provided to properly control environmental conditions such as temperature, humidity, and dust amount, and take measures to reduce vibration. There is. Factors of vibration include not only vibration generated from precision equipment itself for manufacturing or assembly, but also vibration generated from utility-related equipment or external vibration propagating from the outside of the factory to the ground. The main cause of vibrations due to utility-related equipment is an air-conditioning machine that supplies clean air-conditioning air into a clean room, and a utility machine that exhausts gas or water generated from a production line. The main cause of external vibration is vibration from other factories and vibration propagating through the ground from transportation facilities.

A typical conventional clean room building structure has an air conditioner and utility machines such as water, drainage, and exhaust gas treatment equipment in the basement, and a clean room is formed on the first floor to put the air conditioner and basement in the basement. The working machine is equipped with a damper that absorbs vibration. In addition, some basements are separated from the basement of the building on the first floor to prevent the propagation of vibration. Another typical clean room building structure includes a utility building for an air conditioning machine room and a utility room adjacent to the main building part where the clean room is installed. In the conventional clean room building, it is common to install the clean room on the lower floor of the second floor or lower in consideration of vibration countermeasures.

As a measure against external vibration propagating from the outside of the factory to the ground, the surrounding traffic environment and the environment where vibration is generated from another factory are investigated, and the factory is constructed in an area satisfying the vibration environment. Is common.

[0005]

However, the conventional method of placing an air conditioning machine or a utility machine in the basement has the advantage that the construction site cannot be taken in the air conditioner machine room or the utility room, but it does not always have a good vibration isolation effect. There is a drawback that is not obtained.
In addition, when the basement of the basement and the building of the first floor are separated, the number of pillars increases, the structure becomes complicated, and the arrangement of machines is easily restricted.

On the other hand, the conventional system in which the utility building of the air conditioning machine room or the utility room is provided adjacent to the clean room building is ideal in terms of anti-vibration, but it requires a large site area. There is a drawback that it cannot be adopted depending on the location conditions. Further, traffic vibration, which is the main factor of vibration propagating from outside the factory, increases year by year due to an increase in traffic volume and the opening of new transportation facilities. As a result, there is a problem that the content of the vibration greatly changes from the vibration at the time of factory construction. Furthermore, in recent years, it is an era in which it is necessary to consider the combined use of seismic isolation measures against earthquakes, and there is a demand for a clean room building structure that controls both vibration and earthquakes.

As described above, the conventional clean room building structure has merits and demerits, and none has satisfied both the anti-vibration measures and the effective use of the construction site. The present invention has been made in view of such circumstances, and since it does not require a construction site for a utility building, it is possible to effectively use a small site area and effectively take anti-vibration measures. The purpose is to provide a clean room building structure.

[0008]

In order to achieve the above-mentioned object, the present invention provides an air conditioning system for a clean room or the like through a vibration isolation device on a main body building part in which a clean room is formed. A utility building part for installing role-related equipment is provided, and a water tank is integrally provided with the main body building part in a bottom underground portion of the main body building part.

[0009]

According to the present invention, the utility building section is provided on the main body building section in which the clean room is formed via the vibration isolation device, whereby the equipment installed in the utility building section can be installed. While satisfying the condition that vibration does not propagate to the main building, the construction site for the utility building is not required.

[0010] In addition, the disadvantage that the center of gravity of the clean room building part becomes unstable by disposing the utility building part on the main body building part is that the water tank is integrally formed with the main body building part in the bottom underground part of the main body building part. The center of gravity is lowered by the provision of the structure to provide a well-balanced structure. By installing a water tank in the bottom underground part of the main building, external vibrations (surface waves, underground waves) propagating in the ground can be effectively blocked or damped.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of a clean room building structure according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is an explanatory diagram illustrating an example of the overall configuration of the clean room building 10. As shown in FIG. 1, a clean room building 10 of the present invention is a four-story main body building section 11 of a reinforced concrete structure, and a two-story building provided on the main body building section 11 via a vibration isolation device 12. A utility building portion 14 having a steel frame structure, and a water tank 16 integrally formed with the main body building portion 11 in a bottom underground portion of the main body building portion 11,
Consists of

On each floor of the main body building section 11, for example, a clean room 18 for installing precision equipment for semiconductor manufacturing is formed. This clean room 18 is formed into a double floor structure by a grating floor 20.
A maintenance pit 26 is formed below. A precision instrument 24 is installed on the grating floor 20 via a vibration isolation table 22 (see FIG. 3). Ceiling 28 of clean room 18
A plurality of FFUs 32 (a fan filter unit including a blowing fan and a HEPA filter) are installed on the surface, and conditioned air is supplied to the FFUs 32 through the air conditioning duct 30. An air conditioning machine room 34 is formed on the first floor of the two-story utility building section 14, and an air conditioning machine such as an air conditioner, a blower fan, an outside air introduction fan, a cooling fan, or a refrigerator is formed in the air conditioner machine room 34. Class 36 is installed.
A utility room 38 is formed on the second floor with the upper part open, and serves as an exhaust fan for exhaust gas generated in the production line, a scrubber for purifying the gas, a water supply pump for supplying clean water into the clean room, a cold water tower, etc. System equipment 39 is installed. As described above, the utility-related equipment such as the air-conditioning system and the utility system includes the main body building portion 11 in which the clean room 18 is formed.
It is configured to be stored in the utility building portion 14 provided on the above. The air conditioning machine room 34 and the utility room 38 may be arranged on either the first floor or the second floor of the utility building section 14, but the equipments are arranged in a well-balanced manner so that the center of gravity of the utility building section 14 is stable. Preferably.

The vibration isolator 12 interposed between the main body building section 11 and the utility building section 14 is shown in FIG.
As shown in FIG. 7, a structure in which a multi-stage laminated rubber 13 using natural rubber and a damper 15 are combined is used, and it is configured so that vibrations of the equipment of the utility building section 14 do not propagate to the main body building section 11. . In this case, as the damper 15, it is possible to use a viscous damper that damps vibration by utilizing the viscous force generated between the horizontal plate 15A and the bottom of the storage container 15C that stores the viscous liquid 15B. The weight of various devices installed in the utility building section 14 is used as a weight (weight) of the multi-stage laminated rubber 13A.

As shown in FIGS. 1 and 3, the main body building portion 1
In the bottom underground part of 1, a water tank 16 in the form of a closed container is formed, which has a base 40 buried in the underground of a predetermined depth as a bottom surface and has an outer circumference slightly larger than the outer circumference of the main body building section 11. The total mass of the water tank 16 (the total mass of the wall material of the water tank and the stored water) is set to be larger than the total mass of the equipment installed in the utility building portion 14. The water stored in the water tank 16 is used as cooling water, and is sent to a cooling unit (not shown) of the air conditioner by the pump 42 installed on the ground. New water 17 can be supplied to the water tank 16 by a pump (not shown), and the amount of stored water, that is, the water depth can be arbitrarily adjusted. As shown in FIG. 4, the inside of the water tank 16 is divided into a plurality of areas a, b, c, d communicating with each other by a plurality of parallel partition walls 44. A plurality of baffles 46 are provided in the vertical direction. A space is formed between the upper ends of the partition wall 44 and the baffle plate 46 and the ceiling surface of the aquarium (see FIG. 3), and when the ground shakes significantly due to an earthquake or the like, the upper ends of the partition wall 44 and the baffle plate 46 are Overcoming water 17 in each area a, b, c,
It can be moved to d.

A plurality of struts 48 of the main body building portion 11 are erected at predetermined intervals along the outer periphery 47 of the main body building portion 11, and a bottom end of the struts 48 having a tapered end is buried underground. Supported by 40. A surrounding frame 50 is formed around each of the columns 48, and a viscous liquid 52 is filled between the surrounding frame 50 and the columns 48. As a result, when the structure of the clean room building 10 is viewed from the viewpoint of the propagation path of the external vibration, the clean room building 10 is transmitted to the pillar 48 of the main body building portion 11 via the water tank 16 except for the supporting points for supporting the pillar 48 on the foundation 40. A propagation path is formed.

According to the structure of the clean room building 10 of the present invention configured as described above, the utility building portion 14 for installing the utility-related equipment is provided on the main body building portion 11 via the vibration isolation device 12. Therefore, when the clean room building 10 is constructed, the construction site for the utility building portion 14 of the air conditioning machine room 34 or the utility room 38 is not required. Moreover, the vibration from the utility building portion 14 due to the utility-related equipment can be prevented from propagating to the main body building portion 11 having the clean room 18 by the vibration isolation device 12. As a result, even if the construction site is small, the space of the clean room 18 can be made large, so that the construction site can be effectively used.

Further, since the utility building portion 14 is provided on the main body building portion 11, the devices installed in the utility building portion 14 are provided at a high place. As a result, even when the clean room building 10 is built on a narrow construction site, it is possible to secure a distance between the noisy equipment and a chimney that emits exhaust gas, and the surrounding ground portion, so that the distance attenuation effect of noise and It is possible to obtain the distance diffusion effect of smoke.

Further, in the bottom underground part of the main body building part 11,
Since the water tank 16 is provided integrally with the main body building section 11, even if the utility building section 14 is arranged on the main body building section 11, the center of gravity of the entire clean room building 10 does not become unstable. That is, by installing the utility building portion 14 on the main body building portion 11, the center of gravity of the clean room building 10 is at the top. However, the main building section 11
In the bottom underground part of the water tank 1
6 is provided and the weight of this aquarium is made larger than the weight of the utility building portion 14 including the weight of the utility equipment, so that the center of gravity of the clean room building 10 can be lowered, and the clean room has a well-balanced and stable structure. The building 10 can be built.

Further, by providing the water tank 16, it is possible to block or attenuate external vibrations (surface waves or underground waves) propagating through the ground 45 from transportation means or other factories. Further, in the present invention, the amount of water stored in the water tank 16 can be adjusted to change the water depth, so that the natural vibration period determined by the size of the water tank 16 and the water depth can be changed to a predetermined value. This makes it possible to set the optimum natural vibration period of the water tank 16 for efficiently damping the external vibration, so that it is easy even if the environment or situation of the external vibration from the traffic volume or other factories changes. And, it can respond promptly.

Further, the partition wall 44 and the baffle plate 4 are provided in the water tank 16.
Since 6 is provided and the viscous liquid 52 is filled around the column 48, the blocking effect or the reducing effect can be further enhanced as compared with the case where the water tank 16 is simply provided. Furthermore,
Since the outer circumference of the water tank 16 is formed to be larger than the outer circumference of the main body building portion 11, it is possible to effectively block or attenuate the surface waves that account for a large proportion of external vibration.

Further, by providing the water tank 16, it is possible to suppress the shaking of the clean room building 10 against a small or medium-sized earthquake. That is, as described above, the water put in the water tank 16 has a unique vibration cycle determined by the size and water depth of the water tank 16, and by utilizing this property, the water tank 16
The water inside is resonated with the vibration of the ground 45. This makes it possible to generate a force in a direction to stop the swing of the clean room building 10, so that the swing of the clean room building 10 can be reduced even if there is an earthquake.

In this embodiment, an example of precision equipment used for semiconductor manufacturing has been described, but the present invention is not limited to this and can be applied to all precision equipment industries requiring an environment for controlling vibration. it can. Further, the vibration isolation device is not particularly limited to the combination of the multi-layered rubber and the damper, and the point is that vibration from the utility building can be prevented from propagating to the main body building portion. The clean room building structure of the present invention may be configured such that the maintenance pit of the clean room on the first floor is located in the basement to improve the stability when it is a high-rise building of the main body building. In this embodiment, the partition wall and the baffle plate are provided in the water tank,
The invention is not limited to the partition wall and the baffle, and a water tank without the partition wall and the baffle may be provided.

[0023]

As described above, according to the clean room building structure of the present invention, the utility building portion is provided on the main body building portion via the vibration isolation device, and the main body is provided at the bottom underground portion of the main body building portion. Since a water tank was integrated in the building, a clean room building with a well-balanced center of gravity can be constructed without the need for a site for the air conditioning machine room or utility room of the utility room when constructing a clean room building. be able to. As a result, even if the construction site is small, the space of the clean room can be made large, and the site area can be effectively used.

Further, the clean room building structure of the present invention propagates the vibration generated from the air conditioning system and the utility system equipment installed in the utility building section by the vibration isolator and the water tank, and the ground. It is possible to block or dampen external vibrations of transportation facilities and the like. In addition, by providing a water tank, it is possible to create a seismic isolation environment for small and medium-sized earthquakes.

The clean room building structure of the present invention is extremely effective especially when constructing a clean room building in a location condition where it is difficult to secure a large construction site space such as an urban area and there are many external vibrations such as traffic vibrations. .

[Brief description of drawings]

FIG. 1 is an explanatory diagram illustrating the overall configuration of a clean room building structure of the present invention.

FIG. 2 is a partial cross-sectional view illustrating a vibration isolation device interposed between a main body building portion and a utility building in the clean room building structure of the present invention.

FIG. 3 is a vertical cross-sectional view illustrating a water tank provided in the bottom underground portion of the clean room building structure of the present invention.

FIG. 4 is a cross-sectional view illustrating a water tank.

[Explanation of symbols]

 10 ... Clean room building 11 ... Main body building section 12 ... Vibration isolation device 14 ... Utility building section 16 ... Water tank 17 ... Water 18 ... Clean room 20 ... Grating floor 24 ... Precision equipment 28 ... Ceiling 32 ... FFU 34 ... Air conditioning machine room 38 ... Utility room 40 ... Foundation 44 ... Partition wall 45 ... Ground 46 ... Baffle plate 48 ... Struts 50 ... Enclosing frame 52 ... Viscous liquid

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location F24F 3/16 F24F 3/16 7/06 7/06 C (72) Inventor Akira Kamigami Chiyoda, Tokyo 1-14-14 Kanda, Tokyo (72) Inventor Fumi Sato 1-14-14, Kanda, Uchikanda, Chiyoda-ku, Tokyo (72) Kazuhiro Shimono, Inventor 21, Saiin Mizozaki-cho, Ukyo-ku, Kyoto-shi, Kyoto Prefecture Rome Corporation (72) Inventor Hiroshi Yamamoto 21, Saiin-Mizozaki-cho, Ukyo-ku, Kyoto City, Kyoto Prefecture

Claims (5)

[Claims] 1. A utility building section for installing equipment such as an air conditioning system and a utility system via a vibration isolation device is provided on a main body building section in which a clean room is formed, and the main body building section A clean room building structure characterized in that an aquarium is provided integrally with the main building in the bottom underground part. 2. The clean room building structure according to claim 1, wherein a plurality of clean rooms are formed in the main body building section. 3. The clean room building according to claim 1, wherein a total mass of the aquarium including stored water is larger than a mass of the utility building including the devices. Construction. 4. The outer circumference of the water tank is larger than the outer circumference of the main body building portion.
Clean room building structure. 5. The inside of the water tank is divided into a plurality of areas communicating with each other by partition walls, and each partition wall is provided with a baffle plate in a direction substantially perpendicular to the partition wall. The clean room building structure according to claim 1.