JP3336516B2 - Building structure for clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room building structure, and more particularly to a clean room building for installing precision equipment used in manufacturing and assembling processes in a semiconductor manufacturing plant or an optical product manufacturing / assembly plant. Regarding the structure.

[0002]

2. Description of the Related Art In a semiconductor manufacturing plant and an optical product manufacturing and assembling plant, a clean room is provided to appropriately control environmental conditions such as temperature, humidity, and dust amount, and take measures to reduce vibration. I have. Factors of vibration include vibration generated from utility-related equipment and external vibration transmitted from the outside of the factory to the ground, in addition to vibration generated from precision equipment itself for manufacturing and assembly. The main factors of the vibrations caused by the utility-related equipment are air-conditioning machines that supply clean air-conditioning air into the clean room, and utility machines such as exhaust gas and water supply from the production line. The main factor of external vibration is vibration transmitted from other factories or transportation to the ground.

Conventional typical clean room building structures include an air conditioner, a utility machine such as water, drainage and exhaust gas treatment equipment, and a clean room installed on the first floor. Utility machines are equipped with dampers that absorb vibration. In some cases, the base of the basement and the building on the first floor are separated to prevent propagation of vibration. Another typical clean room building structure includes a utility building for an air conditioner room and a utility room adjacent to a main building where a clean room is installed. In a conventional clean room building, a clean room is generally installed on a lower floor of the second floor or lower in consideration of vibration countermeasures, and the number of columns is generally larger than that of a general office building.

[0004]

However, the conventional system in which an air-conditioning machine or a utility machine is placed underground has an advantage that a construction site is not provided in an air-conditioning machine room or a utility room, but it always has a good vibration isolation effect. However, there is a disadvantage that is not obtained.
In addition, when the foundation of the basement portion and the first floor building portion are separated, the number of pillars increases, the structure becomes complicated, and there is a problem that the arrangement of machines is easily restricted.

[0005] On the other hand, the conventional system in which the utility building of the air-conditioning machine room and utility room is adjacent to the clean room building is ideal in terms of vibration isolation, but requires a large site area, so that the location of the factory is large. There is a disadvantage that it cannot be adopted depending on conditions. Furthermore, what can be said in common for these clean room buildings is that the air conditioning and utility ducts and piping provided between the utility building and the clean room building have a considerable space occupancy in the clean room building. Therefore, there is a drawback that this is a factor that substantially reduces the clean room area.
For example, as shown in FIG. 9, if there are many columns in the clean room building 1, when laying out, for example, four production lines A, B, C, and D in the clean room 3, it is not necessary to lay out the columns 2. In many cases, it must not be done. As a result, there is a drawback that formation of a desired layout with high working efficiency is restricted, and a useless dead zone 4 is easily generated on the floor surface of the clean room 3.

The present invention has been made in view of such circumstances, and has as its object to provide a clean room building structure capable of increasing the substantial area of a clean room even when the construction site space is small.

[0007]

According to the present invention, in order to achieve the above object, an air conditioning system and a utility system are installed via a vibration isolator on a main building in which a clean room is formed. In addition to providing a utility building, the pillars of the main body building are formed in a cylindrical structure having a high strength and a space inside with a plurality of pillars converged, and the inside of the pillars between the equipment and the clean room. It is characterized in that it is used as a utility passage for ducts, pipes, and the like disposed between them.

[0008]

A feature of the present invention is that a clean room building structure is provided in which a substantial area of the clean room can be increased even when a clean room building is constructed on a narrow construction site. That is, according to the present invention, a utility building is provided via a vibration isolator on a main body building in which a clean room is formed, whereby vibrations of devices installed in the utility building are reduced. The construction site for the utility building is no longer required while satisfying the conditions that do not propagate to the city.

In addition, the support of the main building is formed in a cylindrical structure, and the inside of the support is disposed between the air-conditioning system or utility system equipment in the utility building and the clean room in the main building. The number of pillars in the main building was reduced by using the ducts and pipes as a utility passage for arranging the pillars, and by forming the tubular structure of the pillars into a rigid structure capable of withstanding a large load.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the clean room building structure according to the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is an explanatory diagram illustrating an example of the overall configuration of the clean room building 10. As shown in FIG. 1, a clean room building 10 of the present invention includes a main building 11 having a four-story reinforced concrete structure and a vibration isolator 1 on the main building 11.
2 and a utility building 14 having a two-story steel structure and a water tank 16 formed integrally with the main body building 11 in the basement at the bottom of the main body building 11.

On each floor of the main building 11, a clean room 18 for installing, for example, precision equipment of a semiconductor manufacturing line is formed. The clean room 18 is formed in a double floor structure by a grating floor 20, and a maintenance pit 26 is formed below the grating floor 20. An air-conditioning machine room 34 is formed on the first floor of the two-story utility building 14, and air-conditioning machinery such as an air conditioner, a blower fan, an outside air introduction fan, a cooling fan, and a refrigerator is provided in the air-conditioning machine room 34. 36 are installed. A utility room 38 is formed on the second floor, whose upper part is open. The utility room 38 has a utility fan such as an exhaust fan for exhaust gas generated in the production line, a scrubber for purifying gas, a water supply pump for supplying clean water to the clean room, and a cooling water tower. System devices 39 are installed. That is, the utility-related equipment of the air conditioning system and the utility system is configured to be housed in the utility building 14 provided on the main building 11 in which the clean room 18 is formed. Air conditioning machine room 34
The utility room 38 may be arranged on either the first floor or the second floor of the utility building 14, but it is preferable to arrange the equipments in a balanced manner so that the center of gravity of the utility building 14 is stabilized.

The main building 11 and the utility building 1
As shown in FIG. 2, the vibration isolator 12 interposed between the damper 4 and the multi-layer laminated rubber 13 using natural rubber and the damper 15 are used. It is configured such that vibration does not propagate to the main building 11. In this case, damper 1
As 5, a viscous damper that attenuates vibration by using a viscous force generated between the horizontal plate 15A and the bottom of the storage container 15C that stores the viscous liquid 15B can be used. The weight of various devices installed in the utility building 14 is used as the weight (weight) of the multi-layer laminated rubber 12A.

As shown in FIG. 1, a closed container having a base 40 buried underground at a predetermined depth as a bottom surface and having an outer periphery slightly larger than the outer periphery of the main body building 11 is provided at the bottom underground portion of the main body building 11. A water tank 16 is formed. The water tank 1
The water stored in 6 is used as cooling water, and is sent to an air conditioner (not shown) or the like by a pump 42 installed on the ground. In the water tank 16, new water 17 can be supplied by a pump (not shown), and the amount of stored water, that is, the water depth can be arbitrarily adjusted.

As shown in FIG. 3, a plurality of columns 48 of the main building 11 are provided at four corners of the building 11, substantially at the center of four sides, and at the center. As shown in FIG. 4, the support columns 48 include four steel frames 4 erected at four corners of a square.
An iron plate 48B is welded to the outside of 8A to form a cylindrical structure, and a cross-shaped reinforcing member 48C shown in FIG. 5 is provided within the cylindrical structure at a predetermined height interval.
Is strongly supported. FIG. 6 shows another strut 48
This shows a structure in which a steel pipe 48D containing concrete is used in place of the steel frame 48A, and a steel pipe 48D is used.
D were reinforced with a plurality of braces 48E and a plurality of horizontal bars 48F. The cylindrical support 48 thus configured has a structure in which the support 48 is provided with a supply duct for supplying conditioned air from the air conditioner installed in the utility building 14 to each clean room 18 and a return air from each clean room 18. Used as a return air duct to return air to the air conditioner. That is,
As shown in FIG. 7, among a plurality of pillars 48 of the main body building 11, conditioned air 50 to be supplied from the air conditioner to the clean room 18 is provided in a pair of pillars 48 arranged at the center position of the opposite side of the building 11. It is flowing. In FIG. 7, a part of the side wall 51 of the main building 11 is omitted so that the arrangement of the columns 48 and the flow of the conditioned air 50 can be easily understood. A ceiling chamber 30 is formed behind the ceiling 28 of the clean room 18 and a number of FFUs
32 (a fan filter unit including a blower fan and a HEPA filter) is installed. Further, a pair of branch ducts 52 are provided in the ceiling chamber 30, a tip of a branch 52 A of the branch duct 52 is connected to each FFU 32, and a trunk 52 B of the branch duct 52 is a column through which the conditioned air 50 flows. Is communicated to. Supports 4 at four corners of building 11
A suction port (not shown) is formed at the position of the maintenance pit 26 in FIG. 8 so that return air 53 returning to the air conditioner flows from inside the clean room 18. Thus, the conditioned air 50 adjusted by the air conditioner is supplied to the air supply support 4.
After flowing through the inside 8 and the inside of the branch duct 52, it is supplied to the FFU 32, filtered and then blown out into the clean room 18. The conditioned air 50 blown out into the clean room 18 enters the maintenance pit 26 through the grating floor 20 and returns to the air conditioner through the return air column 48.

According to the structure of the clean room building 10 of the present invention configured as described above, the utility building 14 for installing the utility-related equipment is provided on the main body building 11 via the vibration isolator 12. Therefore, when the clean room building 10 was constructed,
The construction site for the utility building 14 in the utility room 4 and the utility room 38 is not required. Moreover, the vibration from the utility building 14 due to the utility-related equipment is:
The vibration isolation device 12 can prevent the vibration from propagating to the main building 11 forming the clean room 18. Thereby, even when the construction site is narrow, the space of the clean room building 10 can be increased, so that the construction site can be effectively used.

Further, by providing the utility building 14 on the main body building 11, the equipment to be installed in the utility building 14 is provided at a high place. As a result, the clean room building 10
Even when a construction is performed, it is possible to secure the distance between the noise-producing equipment and the chimney that discharges exhaust gas and the surrounding ground part, so that it is possible to obtain a noise attenuation effect and a smoke diffusion effect. .

Also, the support 48 of the main building 11 is formed in a cylindrical structure, and the inside of the support 48 is used as an air supply duct for the conditioned air 50 and a return air duct for the return air 53, so that special There is no need to provide a duct for air conditioning in the building. Thereby, the space space in the main building 11 can be effectively used for the clean room, so that the clean room area can be increased. In the present embodiment, the support 48 of the main building 11 is used as an air supply duct for the conditioned air 50 and a return air duct for the return air 53. Alternatively, it may be used as an exhaust duct for exhaust gas generated in the clean room 18.

Further, since the strut 48 is structured as described above, the strut can have a rigid structure capable of withstanding a large load. Thus, although the outer diameter is slightly larger than the columns 48 of the conventional clean room building 10, the number of columns 48 can be reduced. Therefore, FIG.
As can be seen from the comparison between FIG. 9 and FIG. 9, the production lines A, B, C,
In the case of the layout D, in the clean room building structure of the present invention, the support columns 48 can be laid out with almost no hindrance, so that a layout with high working efficiency can be performed.

FIG. 8 shows another embodiment of the clean room building structure of the present invention. That is, the active vibration isolator 60 is used as a vibration isolator interposed between the main building 11 and the utility building 14, and the clean room 18 is used.
A detection / transmitter 62 for detecting vibration in a portion of the inside that dislikes vibration and transmitting the vibration to the active vibration isolator 60 is provided. Then, the active vibration isolator 60 is controlled so as to minimize the vibration of the portion where the detection / transmitter 62 is installed. This makes it possible to actively dampen a part of the clean room 18 that particularly dislikes vibration.

Although the present embodiment has been described with reference to an example of precision equipment used for semiconductor manufacturing, the present invention is not limited to this, and is applicable to all precision equipment industries that require an environment for controlling vibration. it can. In addition, the vibration isolator does not need to be particularly limited to the combination of the multi-layer laminated rubber and the damper, but it is essential only that vibration from the utility building be prevented from propagating to the main building. Further, the clean room building structure of the present invention may be configured such that when the main building is a high-rise building, the maintenance pit of the clean room on the first floor is located underground to improve the stability.

[0021]

As described above, according to the clean room building structure of the present invention, the clean room building is provided on the main body building via the vibration isolator, so that the site for the utility building is provided. do not need. In addition, the pillars of the main building are formed in a tubular structure, and ducts and pipes are arranged between the air-conditioning and utility equipment in the utility building and the clean room in the main building. And so on, so that it can be used as a utility passageway, so that the space in the clean room can be increased.

Further, since the columns are formed in a rigid cylindrical structure capable of withstanding a large load, the number of columns can be reduced. As a result, it is possible to secure a large real area in the clean room,
Since the number of columns is reduced, the layout of precision equipment installed in the clean room becomes easier. Therefore, the clean room building structure of the present invention is particularly effective when it is difficult to secure a large construction site space, such as in a city, and when a clean room building is constructed in a location with a lot of external vibration such as transportation. .

[Brief description of the drawings]

FIG. 1 is an explanatory view illustrating the overall configuration of a clean room building structure according to the present invention.

FIG. 2 is a partial cross-sectional view illustrating a vibration isolation device interposed between a main body building and a utility building in the clean room building structure of the present invention.

FIG. 3 is an explanatory view for explaining the arrangement of the columns and the production line of the clean room building.

FIG. 4 is a cross-sectional view illustrating the structure of a column.

FIG. 5 is a perspective view illustrating a reinforcing member of a column.

FIG. 6 is an explanatory view for explaining another structure of a support.

FIG. 7 is an explanatory view for explaining the use of a column as a duct.

FIG. 8 is an explanatory view illustrating another embodiment of the clean room building structure of the present invention.

FIG. 9 is an explanatory view for explaining the arrangement of columns and the production line of a conventional clean room building.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Clean room building 11 ... Main body building 12 ... Vibration isolation apparatus 14 ... Utility building 16 ... Water tank 17 ... Water 18 ... Clean room 20 ... Grating floor 28 ... Ceiling 32 ... FFU 34 ... Air conditioning machine room 38 ... Office room 40 ... Foundation 45 ... ground 48 ... post 50 ... air-conditioned air 52 ... branched duct 53 ... return air 60 ... active type anti-vibration device 62 ... detection / transmitter

Continued on the front page (72) Inventor Akira Kamigami 1-1-1 Uchikanda, Chiyoda-ku, Tokyo Hitachi Plant Construction Co., Ltd. (72) Inventor Fumi Sato 1-11-1 Uchikanda, Chiyoda-ku, Tokyo Hitachi Plant Within Construction Co., Ltd. (72) Inventor Kazuhiro Shimono 21st Ryozaki-cho, Saiin-ku, Kyoto-shi, Kyoto Inside Rohm Co., Ltd. References JP-A-4-146377 (JP, A) JP-A-7-82918 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) E04H 5/02 E04H 9/02 301 E04B 1/98 E04F 17/08 F24F 5/00

Claims (3)

(57) [Claims] 1. A utility building for installing an air-conditioning system or a utility system via a vibration isolator on a main building in which a clean room is formed. A structure for a clean room, wherein the structure is formed in a shape of a pillar, and the inside of the support is used as a utility passage for a duct, a pipe, or the like disposed between the equipment and the clean room. 2. The pillar according to claim 1, wherein an iron plate is provided outside four steel frames erected at four corners of a quadrangular shape to form a cylindrical structure, and the pillars are provided at predetermined height intervals in the cylindrical structure. The building structure for a clean room according to claim 1, wherein a reinforcing member for supporting the steel frames is provided. 3. The clean room building structure according to claim 1, wherein a plurality of clean rooms are formed in the main body building.