JPH08297101A - Surface inspecting device - Google Patents

Abstract

PURPOSE: To provide a device capable of inspecting a projection defect generated when a foreign matter is stuck to the surface of an inspected body without omission including the surface end section of the inspected body with a simple structure at a low cost. CONSTITUTION: This surface inspecting device is constituted of a base section 5, multiple gate members 4 arranged along the width direction of an inspected body 3 and rockably fitted to the base section 5, detecting levers 6 provided to be rotated integrally with the gate members 4, and photo-sensors 7 detecting the rotation of the detecting levers 6. The gate members 4 are rockably fitted to holdes 12 fixed to the lower face of a bracket 11. When a gate plate 15 is pressed by a projection defect having a height higher than the gap between the gate plate 15 and the surface of the inspected body 3, the gate member 4 is rotated. The rotation of the detecting lever 6 rotated integrally with the gate member 4 is detected by the photo-sensor 7, and the projection defect is specified.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface inspection apparatus for producing projection defects caused by foreign matter adhering to the surface of a web-shaped inspection object.

[0002]

2. Description of the Related Art Products obtained by applying various substances to a support such as paper, metal plate and plastic film, for example, photographic film and photographic paper, are produced by continuously running a sheet-shaped or roll-shaped support in the manufacturing process. , Various substances are applied during this running. At this time, the support is run with a certain clearance so as not to contact the coating head. Therefore, if there is a protrusion on the surface of the support that has a height greater than the clearance between the support and the coating head, the protrusion not only abuts the coating head to prevent the support from running, but also the support breaks, or Problems such as damage to the coating head occur. Therefore, in the product as described above, it is extremely important to surely detect the protrusion defect existing on the surface of the support and remove the protrusion before the support is sent to the coating process.

In order to detect the defects existing on the surface of the sheet-like material which continuously runs in this way, for example, Japanese Patent Application Laid-Open No. 4-1 / 1992 is used.
A surface inspection device known in Japanese Patent No. 25455 is used. This surface inspection device uses the fact that the normal portion and the defective portion have different light reflectivities and transmissivities, and the surface of the object to be inspected is scanned with spot light by a laser, and the reflected light or transmitted light is scanned. Photoelectric detection is performed by a light receiver, and the presence or absence of various defects is evaluated based on the detection output.

[0004]

However, in the above-mentioned surface inspection apparatus, the intensity of the reflected light or the transmitted light photoelectrically detected is affected by a variety of defects existing in the inspection portion. It is very difficult to selectively detect only defects. In addition, in the sheet-shaped or roll-shaped material before processing, generally, the vicinity of the edge is not used as a product, and the change in the detection signal is unique at the edge, so that erroneous detection is likely to occur. Therefore, in the conventional surface inspection apparatus, only the central portion of the inspection object is set as the inspection target portion, and the scanning region of the inspection light is set narrow enough to cover the inspection target portion. For this reason, the protrusion existing on the edge portion of the object to be inspected is not detected, so that the protrusion comes into contact with the coating head as described above.

Further, the inspection light has to be scanned for a long distance with respect to a wide object to be inspected, but the linearity is likely to be impaired as the scanning distance increases. Therefore, not only the detection sensitivity becomes unstable due to variations in the amount of inspection light incident on the light receiver, but it also causes erroneous detection. Also,
Although the above-mentioned device can inspect the surface in a non-contact manner, it also requires expensive mechanical parts such as a laser light source, a scanner mechanism, and a light receiver, which causes a problem that the facility cost increases.

The present invention has been made in consideration of the above circumstances, and a surface inspection apparatus capable of reliably detecting a projection defect existing on the surface of an object to be continuously inspected, including the edge portion, at low cost. The purpose is to provide.

[0007]

In order to achieve the above-mentioned object, the present invention provides a base portion and a tip end thereof with respect to an object to be inspected in a width direction of the object to be inspected. With a certain gap between them, it is swingably attached to the base part so as to be directed in the direction perpendicular to the surface of the object to be inspected. The gate member is oscillated in the conveyance direction of the object to be inspected, and the detection means for detecting the oscillation of the gate member is provided. The detection means detects the swinging in the conveyance direction, and the passage of the protrusion defect is confirmed.

According to a second aspect of the invention, the gate member comprises:
Since a plurality of the inspection objects are arranged in the width direction, the position of the protrusion defect can be finely detected. In the invention according to claim 3, the gate member is restricted from rotating in the direction opposite to the conveying direction of the object to be inspected. Therefore, the gate member may be arranged laterally so that the projection defect can be scraped off by the gate member. it can.

In the invention of claim 4, the gate member is provided with a weight for adjusting the swinging torque of the gate member. According to the invention of claim 5, the detection means comprises a detection lever that rotates integrally with the gate member and a photosensor that photoelectrically detects the position of the detection lever, and has a simple structure and is very low in cost. Is.

[0010]

1 is a schematic view showing a surface inspection apparatus of the present invention, and FIG. 2 is an enlarged view showing a part of the surface inspection apparatus shown in FIG. The inspected object 3 is a sheet-like object and is pulled from the front and rear of the conveying roller 2 by a tension roller or the like so that a part thereof comes into close contact with the outer periphery of the conveying roller 2. During inspection, the inspection object 3 is conveyed by a motor. The roller 2 rotates in the direction of the arrow and the inspection object 3 is continuously fed.

The surface inspection apparatus includes a base portion 5 and a plurality of gate members 4 arranged along the width direction of the object 3 to be inspected and pivotally mounted on the base portion 5 integrally with the gate member 4. It is composed of a detection lever 6 which is provided so as to be pivoted to and a photo sensor 7 which detects the tip of the detection lever 6. The base part 5 includes a base 10 and a bracket 1.
1 and holder 12, and the gate member 4 is
It is composed of a gate plate 15 and a stay 16.

The gate plate 15 is made of a thin plate resin or the like so as to be lightweight, and is fixed to the stay 16. The rotation shafts 17 and 18 of the stay 16 are pivotally attached to the holder 12 fixed to the lower surface of the bracket 11 so as to be swingable.

An adjusting screw 19 is provided above the base 10. Rotate the adjusting screw 19 to rotate the bracket 1
By moving one by one, the gap between the gate plate 15 and the surface of the inspection object 3 is adjusted. The adjusting screw 19 attaches the gate plate 15 to
The height can be set in the range of 0.05 mm to 5.0 mm from the surface of the inspection object 3 depending on the height of the projection defect to be detected. When the protrusion defect is higher than the gap between the gate plate 15 and the surface of the inspection object 3, the protrusion defect pushes the gate plate 15 and the gate member 4 is swung.

A gap of 0.4 mm is provided between the gate plates 15 and 15 so that they do not interfere with each other. The gate plate 15 protrudes from both ends of the inspected body 3 so that the surface of the inspected body 3 can be inspected even if it includes the edge portion. Stay 16
A balance weight 13 is fixed to the back of the device in order to reduce the torque required to lift up the gate plate 15, so that the protrusion defect is not scraped off.

A cylinder unit 22 is provided on the upper surface of the bracket 11. This cylinder unit 22
Is composed of a cylinder 24 and a regulation plate 23 fixed to the tip of the cylinder. The regulation plate 23 contacts the regulation piece 19 formed on the rotary shaft 17 to prevent the gate member 4 from rotating in the reverse direction, and also causes the gate member 4 to face the surface of the inspection object 3 perpendicularly. The cylinder 24 drives the regulating plate 23 downward to forcibly lift up the gate member 4 when the joint portion of the device under test 3 passes, and the gate member 4 comes into contact with the joint portion of the device under test 3. Prevent.

The photo sensor 7 is fixed to the tip of an arm portion 25 extending from the bracket 11. The detection lever 6 is provided so as to rotate coaxially with the rotation shaft 18. The photo sensor 7 is composed of a light emitter and a light receiver which are arranged with a concave portion sandwiched between them. The bent tip 6a of the detection lever 6 enters the concave portion of the photo sensor 7, and the light from the light projector is blocked. The photo sensor 7 detects the rotation of the gate member 4 when the detection lever 6 rotates by 2.3 ° or more and the light from the light projector is received by the light receiver. Then, the detection signal is sent to the processing circuit 20. When the photo sensor 7 is composed of four gate members 4 as shown in FIG. 1, one photo sensor 7 is provided for each gate member, and the four photo sensors include the gate members 4. The rotation of each of the above can be detected.

The operation of such a configuration will be described.
The transport roller 2 is rotated by a motor to continuously transport the inspection object 3 in the arrow direction. The gate member 4 is shown in FIG.
As shown in (A), it is perpendicular to the surface of the inspection object 3. When a protrusion defect 40 having a height equal to or higher than the gap between the surface of the DUT 3 and the gate plate 15 passes through the gate member 4, the protrusion defect 40 causes the gate plate 15 to splash on the gate plate 15 as shown in FIG. 3B. increase. The detection lever 6 rotates integrally with the rotation of the gate member 4, and the photo sensor 7 moves to the gate member 4
When the rotation is detected, the photo sensor 7 sends a detection signal to the processing circuit 20. The processing circuit 20 can limit to which position on the surface of the inspection object 3 the protrusion defect is attached based on the detection signal and the rotation amount of the transport roller 2.

FIG. 5 is a schematic view of a horizontal type surface inspection device in which a gate member is arranged laterally. The base portion 65 includes a base 60, a bracket 61, and a holder 62, and the gate member 64 includes a gate plate 75,
And a stay 76. The gate member 64 is
A holder 62 fixed to a bracket 61 is pivotally attached to a holder 62. A reverse rotation preventing body 70 is fixed to one of the rotating shafts of the gate member 64. This abuts the regulation plate 73 of the cylinder unit 72 to prevent the gate member 64 from rotating in the reverse direction, and biases the gate plate 78 substantially horizontally by its weight.

The bracket 61 is attached to the base 60 so as to be slidable back and forth. The back portion of the bracket 61 is engaged with a worm gear formed on the shaft of the adjustment knob 59, and the gap between the gate plate 75 and the surface of the inspection object 63 can be easily adjusted by rotating the adjustment knob 59. be able to.

The gate member 64 includes a detection lever 80,
An adjustment shaft 82 to which a weight 81 for adjusting the splashing torque is attached is fixed. By moving the weight 81 forward and backward with respect to the adjustment shaft 82, the force required to flip up the gate member 64 can be adjusted. For example, the flip-up torque may be increased to scrape off the protrusion defects attached to the surface of the inspection object 63 by the gate plate 75. In this horizontal type surface inspection apparatus, the scraped-out protrusion defect does not fall on the surface of the inspection object 63. Further, in the vertical type shown in FIG. 1, since the photo sensor 7 and the balance weight 18 are arranged below the base portion 5, adjustment is troublesome, but in the case of this horizontal type surface inspection device, Can easily make these adjustments.

Since the above-described surface inspection apparatus does not require expensive mechanical parts such as a laser light source, a scanner mechanism, and a light receiver, the inspection equipment cost can be suppressed.
Further, since the structure is simple, the size can be reduced. The number of gate members is not limited to the number shown in the figure, and can be increased or decreased as appropriate according to the width of the inspection object. Further, a sensor may be provided along the movement locus of the detection lever to detect the rotation amount of the detection lever so that the height of the protrusion defect can also be detected. Further, the length of the protrusion defect may be detected by detecting the rotation time at this time. Further, the gate member is not limited to the plate, and may be L-shaped or U-shaped.

[0022]

As described above, in the surface inspection apparatus of the present invention, the base portion and the end of the inspection object are opened along the width direction of the inspection object with a certain gap from the inspection object. It is swingably attached to the base so as to go in the direction perpendicular to the body surface, and when a protrusion defect having a height higher than the gap is passed, it is pressed by the protrusion defect and swings in the conveying direction of the object to be inspected. And a detecting means for detecting the swing of the gate member. The detecting means detects that a projection defect having a height higher than the gap swings the gate member in the conveyance direction of the object to be inspected. Is detected and the passage of the projection defect is confirmed, and since an expensive mechanism is not required, the cost of the inspection equipment can be reduced.

Further, when a plurality of gate members are arranged in the width direction of the object to be inspected, the protrusion defect can be detected accurately. If the gate member is restricted from rotating in the direction opposite to the conveyance direction of the inspection object, the gate member can be arranged horizontally with respect to the surface of the inspection object for inspection. In this case, the protrusion defect scraped off by the gate member does not fall on the surface of the inspection object.

Furthermore, in the case where the gate member is provided with a weight for adjusting the flip-up torque of the gate member, the flip-up torque of the gate member can be adjusted according to the protrusion defect to be detected. Further, the detection means is composed of a detection lever that rotates integrally with the gate member and a photosensor that photoelectrically detects the position of the detection lever, and has a simple structure and is extremely low in cost.

[Brief description of drawings]

FIG. 1 is a perspective view showing a surface inspection apparatus of the present invention.

FIG. 2 is a perspective view showing a part of FIG. 1 in an enlarged manner.

FIG. 3 is a horizontal plan view showing a state of inspection.

FIG. 4 is a perspective view showing a horizontal surface inspection apparatus.

[Explanation of symbols]

 2 Conveyor roller 3 Object to be inspected 4,64 Gate member 5 Base part 7 Photo sensor 40 Protrusion defect

Claims (5)

[Claims] 1. A surface inspection apparatus for detecting a protrusion defect existing on the surface of a continuously inspected object, comprising: a base portion; and a tip thereof with respect to the inspected object along a width direction of the inspected object. Is mounted on the base portion so as to be oriented in a direction perpendicular to the surface of the object to be inspected with a certain gap, and the protrusion defect is pressed when a protrusion defect having a height higher than the gap passes. A surface inspection apparatus comprising: a gate member that is swung in the conveyance direction of the object to be inspected; and a detection unit that detects the swing of the gate member. 2. The surface inspection apparatus according to claim 1, wherein a plurality of the gate members are provided in the width direction of the inspection object. 3. The surface inspection apparatus according to claim 1, wherein the gate member is restricted from rotating in a direction opposite to the conveyance direction of the object to be inspected. 4. The surface inspection apparatus according to claim 1, wherein the gate member is provided with a weight for adjusting a splashing torque of the gate member. 5. The detection means comprises a detection lever that rotates integrally with the gate member, and a photosensor that photoelectrically detects the position of the detection lever. The surface inspection device described.