JPH08277485A - Production of copper foil for printed circuit - Google Patents

Production of copper foil for printed circuit

Info

Publication number
JPH08277485A
JPH08277485A JP10317195A JP10317195A JPH08277485A JP H08277485 A JPH08277485 A JP H08277485A JP 10317195 A JP10317195 A JP 10317195A JP 10317195 A JP10317195 A JP 10317195A JP H08277485 A JPH08277485 A JP H08277485A
Authority
JP
Japan
Prior art keywords
bath
copper foil
plating
alloy plating
current density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10317195A
Other languages
Japanese (ja)
Other versions
JP3361914B2 (en
Inventor
Hidehiko Enomoto
英彦 榎本
Yutaka Fujiwara
裕 藤原
Yoshio Kawasumi
良雄 川澄
Hiroo Tsuchiya
弘雄 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka City
Eneos Corp
Original Assignee
Japan Energy Corp
Osaka City
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Energy Corp, Osaka City filed Critical Japan Energy Corp
Priority to JP10317195A priority Critical patent/JP3361914B2/en
Publication of JPH08277485A publication Critical patent/JPH08277485A/en
Application granted granted Critical
Publication of JP3361914B2 publication Critical patent/JP3361914B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE: To obtain a heat-resistant coating layer having a sufficient adhesive strength to a substrate and not generating a dissolution residue at the time of forming a circuit by etching without using a toxic cyanide bath by using a pyrophosphoric acid-polyphosphoric acid bath to form a Cu-Zn alloy barrier film on a surface-roughened electrolytic copper foil. CONSTITUTION: A plating bath consisting of one kind selected from the alkali metal salts of pyrophosphoric acid and polyphosphoric acid, a copper salt, zinc and at least one kind selected from amino acids and their salts is used, and plating is conducted with the traveling speed of copper foil in the bath controlled to 500-3000m/hr, and the cathode current density to 6-15A/dm<2> . The bath composition is connected with the plating condition and not generally indicated. However, the current density is controlled to 10A/dm<2> , the current to 80A.s/dm<2> and the copper foil travel to 2000/hr. When the bath is kept at 30 deg.C, the bath preferably contains 0.30-1.50mol/l K4 P4 O7 , 0.10-0.20mol/l Cu<2+> , 0.04-0.10mol/l Zn<2+> and 0.05-0.10mol/l L-histidine hydrochloride, and the bath is kept at pH8-13.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、印刷回路用銅箔の製造
技術に関するものであり、特には、電解銅箔の粗化面に
Cu−Zn合金めっき障壁層を付与する方法に関するも
のである。更に詳しくは、本発明は、Cu−Zn合金め
っき障壁層の形成方法の改善に関するものであり、シア
ンを用いない、ピロりん酸・ポリりん酸系めっき浴で障
壁層を形成したことを特徴とする印刷回路用銅箔の製造
技術に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for producing a copper foil for a printed circuit, and more particularly to a method for providing a Cu-Zn alloy plating barrier layer on a roughened surface of an electrolytic copper foil. . More specifically, the present invention relates to an improvement in a method for forming a Cu-Zn alloy plating barrier layer, which is characterized in that the barrier layer is formed by a pyrophosphoric acid / polyphosphoric acid plating bath without using cyanide. The present invention relates to a manufacturing technology of a copper foil for a printed circuit.

【0002】[0002]

【従来の技術】印刷回路用銅箔の基板となる樹脂基材に
接着する面(粗化面)に対しては次のような特性が要求
される: 基板との間に十分な接着強度(引き剥し強度)を有す
ること、 エッチング液に対して適度な溶解性を有し、回路形成
時に溶解残を生じないこと、及び 接着界面が安定で回路形成・部品積層・半田付けに伴
う加熱や薬品処理を受けても更には実際の製品使用時の
環境下に置かれても十分な接着強度を保つこと。例え
ば、回路基板としてよく用いられるエポキシ系樹脂は金
属銅と直接接触したまま加熱されると樹脂が銅の触媒作
用で劣化変質し接着強度が著しく低下する。このことを
防止するため、銅箔表面には樹脂に対して化学的に安定
な成分からなる耐熱被覆層(障壁層)が形成される。
2. Description of the Related Art The following characteristics are required for the surface (roughened surface) of a copper foil for a printed circuit that is bonded to a resin base material that serves as a substrate: Sufficient adhesive strength with a substrate ( Peeling strength), it has a moderate solubility in an etching solution, and it does not leave a residue when forming a circuit. The adhesive interface is stable and the heating and chemicals involved in circuit formation, component lamination, and soldering. Maintain sufficient adhesive strength even after being treated and even when placed in the environment where the product is actually used. For example, when an epoxy resin, which is often used as a circuit board, is heated while being in direct contact with metallic copper, the resin deteriorates and deteriorates due to the catalytic action of copper, and the adhesive strength is significantly reduced. In order to prevent this, a heat resistant coating layer (barrier layer) made of a chemically stable component with respect to the resin is formed on the surface of the copper foil.

【0003】この耐熱被覆層としては、Zn、Cu−Z
n、Cu−Ni、Cu−Coなど多数のものが実用化さ
れている。中でも、Cu−10〜30%Zn(黄銅)か
らなる耐熱被覆層を被覆した銅箔は、エポキシ系樹脂等
からなる印刷回路板に積層した場合にしみが生じないこ
と又高温加熱後の接着強度の低下が少ないことなどの優
れた特性を有しているため、広く使用されている。この
Cu−Zn層を形成させる方法としては、シアン系の
浴を用いた合金めっきやZnを銅箔にめっきした後加
熱拡散させてCu−Zn合金層をつくるなどの方法があ
るが、厚さの管理その他の理由からのシアン系合金め
っきが主として採用されてきた。このシアン系合金めっ
き方法や条件及び製造する箔の性状については、例え
ば、特公昭35−51711号、特公昭54−6701
号、特開平3−122298号その他に詳しく記載され
ている。
As the heat resistant coating layer, Zn, Cu-Z
Many materials such as n, Cu-Ni, and Cu-Co have been put to practical use. Among them, the copper foil coated with the heat-resistant coating layer made of Cu-10 to 30% Zn (brass) does not cause stains when laminated on a printed circuit board made of epoxy resin or the like, and has an adhesive strength after heating at high temperature. It is widely used because it has excellent characteristics such as less decrease in As a method of forming this Cu-Zn layer, there is a method of forming an Cu-Zn alloy layer by alloy plating using a cyan-based bath or by plating Zn on a copper foil and then heating and diffusing it. Cyan-based alloy plating has been mainly adopted for the purpose of control of the above and other reasons. Regarding the cyan alloy plating method and conditions and the properties of the foil to be produced, for example, Japanese Patent Publication No. 35-51711 and Japanese Patent Publication No. 54-6701.
And JP-A-3-122298, and others.

【0004】[0004]

【発明が解決しようとする課題】しかし、これら従来技
術であるシアン浴は安全面・環境面の負担が大きく、排
水処理にもコストを要していた。そのため、印刷回路用
銅箔のための非シアン系Cu−Zn合金めっき浴の開発
が強く要求されている。
However, these conventional cyan baths have a large safety and environmental burden, and wastewater treatment requires a high cost. Therefore, development of a non-cyan type Cu-Zn alloy plating bath for copper foil for printed circuits is strongly demanded.

【0005】非シアン系Cu−Zn合金めっき浴は、黄
金色めっき方法の開発を目的に、装飾めっき工業で多く
検討されている。その重要な点は、 Cu、Znの共析が可能となる平衡電位を得るため
の錯化剤の探索、及び Cuの析出反応過電圧を高める添加剤の探索 である。現在、装飾めっき工業等で注目されている非シ
アン浴は、グルコヘプトン酸ナトリウムを錯化剤とする
グルコヘプトン酸浴、錯化剤がピロりん酸で、析出過電
圧改善の添加剤としてL−ヒスチジンを添加するピロり
ん酸浴がある。これらの浴からは低い陰極電流密度範囲
で黄金色の平滑めっき面が得られている。ピロりん酸C
u−Zn合金めっき浴の組成並びにめっき条件の例(特
公平3−20478号)を下記に示す。 (ピロりん酸系Cu-Zn 合金めっき浴組成) ピロりん酸カリ :180 g/l ポリりん酸ソーダ:100 g/l ピロりん酸銅 :12 g/l ピロりん酸亜鉛 :2.5 g/l クエン酸ソーダ :100 g/l グリシン :2.0 g/l L−ヒスチジン塩酸塩:2.0 g/l スズ酸カリ :1.0 g/l (めっき条件) 浴温度 :35℃ 陰極電流密度:0.3-5A/dm2 撹拌 :静止浴 pH :10.8
Non-cyan-based Cu-Zn alloy plating baths have been widely studied in the decorative plating industry for the purpose of developing a golden color plating method. The important point is the search for a complexing agent for obtaining the equilibrium potential that enables the co-deposition of Cu and Zn, and the search for an additive that increases the overvoltage of the precipitation reaction of Cu. Currently, non-cyan baths that are attracting attention in the decorative plating industry and the like are glucoheptonic acid baths that use sodium glucoheptonate as a complexing agent, pyrophosphoric acid is a complexing agent, and L-histidine is added as an additive for improving precipitation overvoltage. There is a pyrophosphate bath. From these baths, golden smooth plated surfaces were obtained in the low cathode current density range. Pyrophosphate C
An example of the composition of the u-Zn alloy plating bath and plating conditions (Japanese Patent Publication No. 3-20478) is shown below. (Pyrophosphate Cu-Zn alloy plating bath composition) Potassium pyrophosphate: 180 g / l Sodium polyphosphate: 100 g / l Copper pyrophosphate: 12 g / l Zinc pyrophosphate: 2.5 g / l Quen Acid soda: 100 g / l Glycine: 2.0 g / l L-histidine hydrochloride: 2.0 g / l Potassium stannate: 1.0 g / l (plating conditions) Bath temperature: 35 ° C Cathode current density: 0.3-5 A / dm 2 Agitation: Still bath pH: 10.8

【0006】これらピロりん酸浴では、シアン浴のよう
な毒性の問題はない。しかし、このピロりん酸浴につい
ては次のような課題・問題があった: 光沢装飾めっきを想定した静止浴での実績しか知られ
ておらず、銅箔のようなロール製品を繰り出してめっき
浴中を移動させながら均一な厚さに連続めっきしうる可
能性・条件が未知である。 これらピロりん酸浴では均一・光沢めっきが可能な電
流密度が5A/dm2 以下、好ましくは2A/dm2
下であり、銅箔で必要な厚さのCu−Zn合金層を生産
性良く形成するのに必要とされている電流密度4〜8A
/dm2 に比べて小さい。
These pyrophosphoric acid baths do not have the toxicity problem of cyanide baths. However, there were the following problems and problems with this pyrophosphoric acid bath: Only the actual results of static baths assuming bright decorative plating are known, and roll products such as copper foil are fed out to obtain a plating bath. The possibility and conditions for continuous plating to a uniform thickness while moving inside are unknown. In these pyrophosphoric acid baths, the current density that enables uniform and bright plating is 5 A / dm 2 or less, preferably 2 A / dm 2 or less, and a Cu-Zn alloy layer of the required thickness can be formed with high productivity in copper foil. Current density required to do 4-8A
It is smaller than / dm 2 .

【0007】本発明の課題は、印刷回路用電解銅箔を対
象として、非シアン浴、特にピロりん酸系めっき浴によ
る、電解銅箔粗化面へのCu−Zn合金めっき障壁層形
成のためのめっき方法および条件を確立することであ
る。
An object of the present invention is to form a Cu-Zn alloy plating barrier layer on a roughened surface of an electrolytic copper foil by a non-cyan bath, especially a pyrophosphoric acid type plating bath, for an electrolytic copper foil for a printed circuit. Is to establish the plating method and conditions.

【0008】[0008]

【課題を解決するための手段】前述のように、公知のピ
ロりん酸めっきは、例外なく陰極電流密度は5A/dm
2 以下であり、連続的に移動している銅箔を対象とする
ものではない。本発明者等は、陰極電流密度、銅箔の移
動速度、通電電気量、浴組成の要因をつぶさに検討し
た。その結果、(1)ピロりん酸のアルカリ金属塩及び
ポリりん酸のアルカリ金属塩から選ばれた少なくとも1
種、(2)銅塩、(3)亜鉛塩並びに(4)アミノ酸及
びその塩から選ばれた少なくとも1種よりなるめっき浴
を用い、浴中の箔の移動速度を速くし、陰極電流密度を
大幅に高くする方法で、シアン浴Cu−Zn合金めっき
と同等の特性を有するCu−Zn合金めっき障壁層が得
られることを確認した。この知見に基づいて、本発明
は、電解銅箔の粗化面にCu−Zn合金めっき障壁層を
形成するためにCu−Zn合金めっき浴を通して電解銅
箔を移動させながらCu−Zn合金めっきを行う段階を
含む印刷回路用銅箔の製造方法において、前記Cu−Z
n合金めっき浴として(1)ピロりん酸のアルカリ金属
塩及びポリりん酸のアルカリ金属塩から選ばれた少なく
とも1種、(2)銅塩、(3)亜鉛塩並びに(4)アミ
ノ酸及びその塩から選ばれた少なくとも1種よりなるめ
っき浴を用い、そして該めっき浴中の電解銅箔の移動速
度を500m/hr〜3000m/hrとしそして陰極
電流密度を6A/dm2 〜15A/dm2 とすることを
特徴とする印刷回路用銅箔の製造方法を提供する。
As mentioned above, the known pyrophosphate plating has a cathode current density of 5 A / dm without exception.
It is 2 or less, and is not intended for a copper foil that is continuously moving. The inventors of the present invention thoroughly examined the factors of the cathode current density, the moving speed of the copper foil, the amount of electricity supplied, and the bath composition. As a result, (1) at least 1 selected from alkali metal salts of pyrophosphoric acid and alkali metal salts of polyphosphoric acid.
, A (2) copper salt, (3) zinc salt, and (4) an amino acid and at least one selected from the salts thereof are used to increase the moving speed of the foil in the bath and increase the cathode current density. It was confirmed that a Cu-Zn alloy plating barrier layer having properties equivalent to those of the cyan bath Cu-Zn alloy plating was obtained by the method of significantly increasing the height. Based on this finding, the present invention performs Cu-Zn alloy plating while moving the electrolytic copper foil through a Cu-Zn alloy plating bath to form a Cu-Zn alloy plating barrier layer on the roughened surface of the electrolytic copper foil. A method for manufacturing a copper foil for a printed circuit, comprising the steps of:
At least one selected from (1) alkali metal salts of pyrophosphoric acid and alkali metal salts of polyphosphoric acid as an n alloy plating bath, (2) copper salts, (3) zinc salts, and (4) amino acids and salts thereof. A plating bath consisting of at least one selected from the following, the moving speed of the electrolytic copper foil in the plating bath is 500 m / hr to 3000 m / hr, and the cathode current density is 6 A / dm 2 to 15 A / dm 2 . A method for producing a copper foil for a printed circuit is provided.

【0009】[0009]

【作用】シアンを含まない、ピロりん酸のアルカリ金属
塩及びポリりん酸のアルカリ金属塩から選ばれた少なく
とも1種、代表的にピロりん酸カリ、銅塩、代表的に硫
酸銅、亜鉛塩、代表的に硫酸亜鉛、アミノ酸及びその
塩、代表的にL−ヒスチジン塩酸塩よりなるめっき浴を
用いて、浴中の箔の移動速度を速くし、陰極電流密度を
高くしてめっきするCu−Zn合金めっき障壁層の形成
方法は、結論的にはCuおよびZnの平衡電位及び析出
過電圧を好ましい関係に保持する作用を奏し、均質なC
u−Zn合金めっき層を形成することができると判断さ
れる。
[Function] At least one selected from cyanide-free alkali metal salts of pyrophosphoric acid and alkali metal salts of polyphosphoric acid, typically potassium pyrophosphate, copper salts, typically copper sulfate, zinc salts. Cu using a plating bath typically consisting of zinc sulfate, amino acid and its salt, typically L-histidine hydrochloride to increase the moving speed of the foil in the bath and increase the cathode current density. In conclusion, the method of forming the Zn alloy plating barrier layer has the effect of keeping the equilibrium potential and precipitation overvoltage of Cu and Zn in a favorable relationship, and provides a homogeneous C
It is judged that the u-Zn alloy plating layer can be formed.

【0010】本発明で用いるピロりん酸のアルカリ金属
塩及びポリりん酸のアルカリ金属塩としては、公知のも
のが何れも使用でき、例えばそのナトリウム塩、カリウ
ム塩等を挙げることができ、代表的にはピロりん酸カリ
である。銅塩としては、公知のものが何れも使用でき、
例えばピロりん酸銅、硫酸銅、りん酸銅、クエン酸第二
銅等を挙げることができる。亜鉛塩としては、公知のも
のが何れも使用でき、例えばピロりん酸亜鉛、硫酸亜
鉛、りん酸亜鉛、乳酸亜鉛等を挙げることができる。ま
た、アミノ酸及びその塩としては、公知のものが何れも
使用でき、例えばグリシン、グルタミン酸、アスパラギ
ン酸、ヒスチジン等のα−アミノ酸もしくはその塩酸
塩、ナトリウム塩等を挙げることができる。以下、ピロ
りん酸カリ、硫酸銅、硫酸亜鉛、L−ヒスチジン塩酸塩
を例に説明するが、本発明はこれによってなんら制限さ
れるものではない。
As the alkali metal salt of pyrophosphoric acid and the alkali metal salt of polyphosphoric acid used in the present invention, any of known ones can be used, and examples thereof include sodium salt and potassium salt thereof. Is potassium pyrophosphate. As the copper salt, any known one can be used,
Examples thereof include copper pyrophosphate, copper sulfate, copper phosphate, cupric citrate and the like. Any known zinc salt can be used, and examples thereof include zinc pyrophosphate, zinc sulfate, zinc phosphate, and zinc lactate. Any known amino acids and salts thereof can be used, and examples thereof include α-amino acids such as glycine, glutamic acid, aspartic acid, and histidine, or their hydrochlorides and sodium salts. Hereinafter, potassium pyrophosphate, copper sulfate, zinc sulfate, and L-histidine hydrochloride will be described as examples, but the present invention is not limited thereto.

【0011】本発明に用いるピロりん酸めっき浴の好ま
しい組成は、めっき条件と密接な関係があるので、一義
的な表示は困難であるが、例えば、陰極電流密度:10
A/dm2 、通電電気量:80A・S/dm2 、めっき
浴中の箔の移動速度:2000m/hr、めっき浴温度
30℃であれば、めっき浴成分の有効濃度範囲(Mol/l)
は次のようになる(括弧内は最適濃度範囲(Mol/l) を示
す)。 K4P2O7 :0.30〜1.50(0.50〜 1.00 ) Cu2+ :0.10〜0.30(0.10〜 0.25 ) Zn2+ :0.04〜0.10(0.40〜 0.06 ) L−ヒスチジン塩酸塩:0.005 〜 0.03 (0.008〜 0.01
0) pH :8.0 〜 13 (8.0〜 11.5 )
The preferred composition of the pyrophosphoric acid plating bath used in the present invention is closely related to the plating conditions, so it is difficult to make a unique display. For example, the cathode current density: 10
A / dm 2 , energization amount: 80 A · S / dm 2 , moving speed of foil in plating bath: 2000 m / hr, plating bath temperature of 30 ° C., effective concentration range (Mol / l) of plating bath component
Is as follows (the optimum concentration range (Mol / l) is shown in parentheses). K 4 P 2 O 7 : 0.30 to 1.50 (0.50 to 1.00) Cu 2+ : 0.10 to 0.30 (0.10 to 0.25) Zn 2+ : 0.04 to 0.10 (0.40 to 0.06) L-histidine hydrochloride: 0.005 to 0.03 (0.008) ~ 0.01
0) pH: 8.0 to 13 (8.0 to 11.5)

【0012】K427 の濃度が高すぎると、めっき
浴に微細な懸濁物が出るなど浴が不安定となる。K4
27 の濃度が低過ぎるとCu及びZnの溶解度が低下
し、好ましい安定した浴組成が得られなくなる。Cuイ
オンの濃度が高すぎると、めっき仕上がり面の色調が赤
味をおび、めっき層のZn含有量が低くなる。Cuイオ
ンの濃度が低過ぎるとZnの電解析出量が増し、めっき
仕上がり面の色調が青味がかり、目的の組成のCu−Z
n合金めっき障壁層は得られない。Znイオン濃度も同
様に目的の組成のそして所望のめっき仕上がり面の色調
を備えるCu−Zn合金めっき障壁層が得られるように
決定される。一方、L−ヒスチジン塩酸塩は、K42
7 と同様に、金属イオンの錯化剤で浴の安定性を増す
と共にCu、Znの析出過電圧の変化に関与し、析出C
u−Zn合金めっき層の平滑性への影響が大きい。過剰
の添加はCu−Zn合金めっき障壁層の耐熱性を低下さ
せる。他方、添加量が少な過ぎても、合金組成が銅リッ
チとなり、やはり耐熱性が劣化する。めっき浴のpH
は、浴の安定性、電解析出Cu−Zn合金めっき層の色
調に影響をあたえる。pHが高すぎると、析出Cu−Z
n合金めっき層中にCu−Znの酸化物が認められるな
ど、粗悪なCu−Zn合金めっき層となる。他方、pH
が低過ぎると、ピロりん酸が分解する。
If the concentration of K 4 P 2 O 7 is too high, the bath becomes unstable, for example, a fine suspension appears in the plating bath. K 4 P
If the concentration of 2 O 7 is too low, the solubilities of Cu and Zn decrease, and it becomes impossible to obtain a preferable stable bath composition. If the Cu ion concentration is too high, the color tone of the plated surface becomes reddish and the Zn content of the plated layer becomes low. When the concentration of Cu ions is too low, the amount of electrolytic deposition of Zn increases, and the color tone of the plated surface becomes bluish, and Cu-Z having the desired composition is obtained.
No n-alloy plating barrier layer is obtained. The Zn ion concentration is similarly determined so as to obtain a Cu—Zn alloy plating barrier layer having a desired composition and a desired finish of the plating surface. On the other hand, L-histidine hydrochloride is K 4 P 2
Similar to O 7 , the metal ion complexing agent increases the stability of the bath and contributes to the change in the precipitation overvoltage of Cu and Zn.
It has a great influence on the smoothness of the u-Zn alloy plating layer. Excessive addition lowers the heat resistance of the Cu-Zn alloy plating barrier layer. On the other hand, if the addition amount is too small, the alloy composition becomes rich in copper, and the heat resistance also deteriorates. PH of plating bath
Affects the stability of the bath and the color tone of the electrolytically deposited Cu—Zn alloy plating layer. If the pH is too high, precipitated Cu-Z
A Cu—Zn alloy plating layer is inferior, for example, an oxide of Cu—Zn is observed in the n alloy plating layer. On the other hand, pH
If is too low, pyrophosphate decomposes.

【0013】箔の移動速度は他の条件との関係で決定さ
れるが、上に示した最適濃度のめっき浴を使用し、浴
温:45℃、陰極電流密度:10A/dm2 、通電電気
量:80A・S/dm2 の条件で効果がある箔の移動速
度は500m/hr〜3000m/hrであり、最適値
は1000m/hr〜2500m/hrである。銅箔の
移動速度の低下は粉状析出を招き、また、移動速度が速
過ぎるとZn含有量が少ない銅色のCu−Zn合金めっ
きとなり、目的の障壁層が得られない。こうした高速度
で箔が移動し、液が撹拌されている条件では、既存技術
に述べられているよりも高い電流密度での高速めっきが
可能である。
Although the moving speed of the foil is determined in relation to other conditions, the plating bath having the optimum concentration shown above is used, the bath temperature: 45 ° C., the cathode current density: 10 A / dm 2 , and the electrification electric current. Amount: 80 A · S / dm 2 The moving speed of the foil that is effective under the conditions of 500 m / hr to 3000 m / hr, and the optimum value is 1000 m / hr to 2500 m / hr. A decrease in the moving speed of the copper foil causes powdery precipitation, and when the moving speed is too fast, copper-colored Cu-Zn alloy plating with a small Zn content is obtained, and the intended barrier layer cannot be obtained. Under such a condition that the foil moves at a high speed and the solution is stirred, high-speed plating with a higher current density than that described in the existing art is possible.

【0014】電流密度もまた、浴組成、銅箔移動速度等
との関連で選定されるが、例えば、上に示した最適濃度
浴、浴温45℃、箔速度2000m/hr、通電電気
量:80A・S/dm2 の条件の場合には、好ましい陰
極電流密度は6A/dm2 〜15A/dm2 で、最適値
は10A/dm2 〜13A/dm2 である。陰極電流密
度が高過ぎると析出Cu−Zn合金めっきは粉状析出と
なる。また、低過ぎるとZn含有量が少ない銅色のCu
−Zn合金めっきとなり、目的の障壁層が得られない。
The current density is also selected in relation to the bath composition, the copper foil moving speed and the like. For example, the optimum concentration bath shown above, the bath temperature of 45 ° C., the foil speed of 2000 m / hr, and the amount of electricity supplied: Under the condition of 80 A · S / dm 2 , the preferable cathode current density is 6 A / dm 2 to 15 A / dm 2 , and the optimum value is 10 A / dm 2 to 13 A / dm 2 . When the cathode current density is too high, the deposited Cu-Zn alloy plating becomes powdery deposition. Further, if it is too low, the copper content of the Cu is small and the Zn content is small.
-Zn alloy plating results and the intended barrier layer cannot be obtained.

【0015】通電電気量の影響も他の条件の影響を受け
る。先に示した最適濃度浴、浴温:45℃、箔の移動速
度:2000m/hr、陰極電流密度:10A/dm2
の条件で効果のある範囲は60A・S/dm2 〜130
A・S/dm2 、最適値は80A・S/dm2 〜130
A・S/dm2 である。通電電気量の不足は、被覆が不
十分となり障壁層の耐熱性が低くなる。高すぎると平滑
性が損なわれ、赤味のあるCu−Zn合金めっきとな
る。
The effect of the amount of electricity supplied is also affected by other conditions. The optimum concentration bath shown above, bath temperature: 45 ° C., foil moving speed: 2000 m / hr, cathode current density: 10 A / dm 2
The effective range is 60 A · S / dm 2 to 130
A · S / dm 2 , optimum value is 80 A · S / dm 2 to 130
A · S / dm 2 . When the amount of electricity supplied is insufficient, the coating becomes insufficient and the heat resistance of the barrier layer becomes low. If it is too high, the smoothness is impaired, resulting in a reddish Cu-Zn alloy plating.

【0016】同様に、めっき浴温は先の最適濃度浴、陰
極電流密度:10A/dm2 、箔の移動速度:2000
m/hrの条件で30℃〜55℃で効果が見られ、最適
値は40℃〜50℃である。低温では粉状析出となり、
高温ではZn含有量が少なくなり、銅色のCu−Zn合
金めっきとなり、目的とする障壁層は得られない。
Similarly, the plating bath temperature is the optimum concentration bath described above, the cathode current density is 10 A / dm 2 , and the foil moving speed is 2000.
The effect is observed at 30 ° C to 55 ° C under the condition of m / hr, and the optimum value is 40 ° C to 50 ° C. At low temperature, powdery precipitation occurs,
At a high temperature, the Zn content decreases, resulting in copper-colored Cu-Zn alloy plating, and the intended barrier layer cannot be obtained.

【0017】[0017]

【実施例】本発明を例示する目的で以下に実施例及び比
較例を呈示する。出発原料箔は全て、接着性を高めるた
めの表面粗化処理を行った粗化面粗化箔とした。電解析
出量、組成、色差、接着性の加熱劣化率について試験し
た。なお、表面電析量は、Cu−Zn合金めっき前後の
重量で、組成は所定量の銅箔を全量溶解し、分析で求め
たZnの含有量とめっき重量とから算出した。色差は、
スガ試験機(株)製カラーコンピューター色差計を用
い、標準箔をシアン浴Cu−Zn合金めっきで得られた
銅箔とし、この銅箔との相対比較値△E*(△E*値の
感覚的表現として、0−0.5:かすかに、0.5−
1.5:わずかに、1.5−3.0:目立つ・・・JI
S Z 8730)を求め比較した。接着性の加熱劣化
率は、得られた銅箔の粗化面と基板材料(FR−4)と
をエポキシ系接着剤で加熱圧着して作製した回路板の常
態及び180℃×48hr加熱後の引き剥し強度を測定
して求めた。 (標準箔) Cu-Zn 合金めっき量 :22.0 mg/dm2 Cu-Zn 合金めっき層のZn含有量 :20.0 % Cu-Zn 合金めっき面の色調 :△E*=0.0 基板と接着後の常態引き剥し強度 :2.25 kg/cm 基板と接着後 180℃×48hr加熱後引き剥し強度:1.96 kg/cm 加熱劣化率 :13.0 %
EXAMPLES Examples and comparative examples are presented below for the purpose of illustrating the present invention. All of the starting material foils were roughened surface roughened foils that were subjected to a surface roughening treatment to enhance the adhesiveness. The amount of electrolytic deposition, composition, color difference, and heat deterioration rate of adhesiveness were tested. The amount of surface electrodeposition was the weight before and after Cu-Zn alloy plating, and the composition was calculated from the Zn content and the plating weight obtained by analysis by completely dissolving a predetermined amount of copper foil. The color difference is
Using a color computer color difference meter manufactured by Suga Test Instruments Co., Ltd., a standard foil was used as a copper foil obtained by Cu-Zn alloy plating in a cyan bath, and a relative comparison value ΔE * (sensation of ΔE * value with this copper foil was obtained. 0-0.5: faintly, 0.5-
1.5: Slightly, 1.5-3.0: Conspicuous ... JI
S Z 8730) was obtained and compared. The heat deterioration rate of the adhesiveness is the normal state of the circuit board prepared by thermocompression bonding the roughened surface of the obtained copper foil and the substrate material (FR-4) with an epoxy adhesive and after heating at 180 ° C. × 48 hr. The peel strength was measured and determined. (Standard foil) Cu-Zn alloy plating amount: 22.0 mg / dm 2 Zn content of Cu-Zn alloy plating layer: 20.0% Cu-Zn alloy plating surface color tone: △ E * = 0.0 Normal drawing after bonding to substrate Peel strength: 2.25 kg / cm After adhering to the substrate 180 ℃ × 48hr After heating Peel strength: 1.96 kg / cm Heat deterioration rate: 13.0%

【0018】(実施例1)厚さ35μmの粗化面粗化箔
を陰極とし、Zn20%−Cu80%の黄銅板を陽極と
して、浴組成:K427 :1.0Mol/l、C
u:0.25Mol/l、Zn:0.06Mol/l、
L−ヒスチジン塩酸塩:0.01Mol/l、pH:
9.9のピロりん酸Cu−Zn合金めっき浴を用い、温
度:40℃、箔速度:2000m/hr、陰極電流密
度:10A/dm2 の条件で、8sec間(通電電気
量:80A・S/dm2 )めっきした。その後、直ち
に、水洗し、得られた面を浴組成:CrO3 :3.5g
/l、pH:4.8及び浴温50℃のクローメート処理
液に浸漬することによりクローメート処理した。その
後、直ちに、水洗、乾燥を行って、Cu−Zn合金めっ
き障壁層をもつ印刷回路用電解銅箔を作製した。得られ
た箔のCu−Zn合金めっき層の組成、色調(色差)、
接着後の常態引き剥し強度、接着・加熱後引き剥し強
度、加熱劣化率の測定結果を次に示す: (測定結果) Cu-Zn 合金めっき量 :22.1 mg/dm2 Cu-Zn 合金めっき層のZn含有量 :19.8 % Cu-Zn 合金めっき面の色調 :△E*=0.3 基板と接着後の常態引き剥し強度 :2.28 kg/cm 基板と接着後 180℃×48hr加熱後引き剥し強度:1.98 kg/cm 加熱劣化率 :13.0 %
(Example 1) A roughened surface roughened foil having a thickness of 35 μm was used as a cathode, a brass plate of Zn20% -Cu80% was used as an anode, and a bath composition: K 4 P 2 O 7 : 1.0 Mol / l, C
u: 0.25 Mol / l, Zn: 0.06 Mol / l,
L-histidine hydrochloride: 0.01 Mol / l, pH:
Using a Cu-Zn pyrophosphate Cu plating bath of 9.9, temperature: 40 ° C., foil speed: 2000 m / hr, cathode current density: 10 A / dm 2 , for 8 sec (electricity: 80 A · S / Dm 2 ) plated. Immediately thereafter, it was washed with water, and the obtained surface was bath composition: CrO 3 : 3.5 g
/ L, pH: 4.8, and a bath temperature of 50 ° C. Immediately thereafter, it was washed with water and dried to prepare an electrolytic copper foil for a printed circuit having a Cu-Zn alloy plating barrier layer. The composition, color tone (color difference) of the Cu—Zn alloy plating layer of the obtained foil,
The measurement results of normal peel strength after adhesion, peel strength after adhesion and heating, and heat deterioration rate are as follows: (Measurement results) Cu-Zn alloy plating amount: 22.1 mg / dm 2 Cu-Zn alloy plating layer Zn content: 19.8% Cu-Zn alloy Plating surface color tone: △ E * = 0.3 Normal peel strength after bonding to substrate: 2.28 kg / cm 180 ℃ × 48hr after bonding to substrate: Peel strength after heating: 1.98 kg / cm Heat deterioration rate: 13.0%

【0019】(実施例2)厚さ35μmの粗化面粗化箔
を陰極とし、Zn30%−Cu70%の黄銅板を陽極と
して、浴組成:K427 :1.0Mol/l、C
u:0.25Mol/l、Zn:0.06Mol/l、
L−ヒスチジン塩酸塩:0.01Mol/l、pH:
9.9のピロりん酸Cu−Zn合金めっき浴を用い、温
度:45℃、箔の移動速度:2000m/hr、電流密
度:13A/dm2 の条件で、6.2sec間(通電電
気量:80A・S/dm2 )めっきした。その後、直ち
に、水洗し、得られた面を浴組成:CrO3 :3.5g
/l、pH:4.8及び浴温50℃のクローメート処理
液に浸漬することによりクローメート処理した。その
後、直ちに、水洗、乾燥を行って、Cu−Zn合金めっ
き障壁層をもつ印刷回路用電解銅箔を作製した。得られ
た箔のCu−Zn合金めっき層の組成、色調(色差)、
接着後の常態引き剥し強度、接着・加熱後引き剥し強
度、加熱劣化率の測定結果を次に示す: (測定結果) Cu-Zn 合金めっき量 :22.1 mg/dm2 Cu-Zn 合金めっき層のZn含有量 :20.1 % Cu-Zn 合金めっき面の色調 :△E*=0.4 基板と接着後の常態引き剥し強度 :2.28 kg/cm 基板と接着後 180℃×48hr加熱後引き剥し強度:1.97 kg/cm 加熱劣化率 :13.8 %
(Example 2) A roughened surface roughened foil having a thickness of 35 μm was used as a cathode, a brass plate of Zn30% -Cu70% was used as an anode, and a bath composition: K 4 P 2 O 7 : 1.0 Mol / l, C
u: 0.25 Mol / l, Zn: 0.06 Mol / l,
L-histidine hydrochloride: 0.01 Mol / l, pH:
Using a Cu-Zn pyrophosphate alloy plating bath of 9.9, temperature: 45 ° C., foil moving speed: 2000 m / hr, current density: 13 A / dm 2 for 6.2 sec (the amount of electricity supplied: 80 A · S / dm 2 ) was plated. Immediately thereafter, it was washed with water, and the obtained surface was bath composition: CrO 3 : 3.5 g
/ L, pH: 4.8, and a bath temperature of 50 ° C. Immediately thereafter, it was washed with water and dried to prepare an electrolytic copper foil for a printed circuit having a Cu-Zn alloy plating barrier layer. The composition, color tone (color difference) of the Cu—Zn alloy plating layer of the obtained foil,
The measurement results of normal peel strength after adhesion, peel strength after adhesion and heating, and heat deterioration rate are as follows: (Measurement results) Cu-Zn alloy plating amount: 22.1 mg / dm 2 Cu-Zn alloy plating layer Zn content: 20.1% Cu-Zn alloy Plating surface color tone: △ E * = 0.4 Normal peel strength after bonding to substrate: 2.28 kg / cm 180 ℃ × 48hr after bonding to substrate: Peel strength after heating: 1.97 kg / cm Heat deterioration rate: 13.8%

【0020】(比較例1)厚さ35μmの粗化面粗化箔
を陰極とし、Zn20%−Cu80%の黄銅板を陽極と
し浴組成:K427 :1.0Mol/l、Cu:
0.25Mol/l、Zn:0.06Mol/l、L−
ヒスチジン塩酸塩:0.01Mol/l、pH:11.
0、のピロりん酸Cu−Zn合金めっき浴を用い、温
度:45℃、箔速度:0 m/hr、電流密度:10A
/dm2 の条件で8sec間めっきした。その後、直ち
に、水洗しようとしたが、得られた面は黒色の粉状電着
で水洗によって一部流れ出したので以降の処理及び特性
測定は行わなかった。
(Comparative Example 1) A roughened surface roughened foil having a thickness of 35 μm was used as a cathode, a brass plate of Zn20% -Cu80% was used as an anode, and a bath composition: K 4 P 2 O 7 : 1.0 Mol / l, Cu :
0.25 Mol / l, Zn: 0.06 Mol / l, L-
Histidine hydrochloride: 0.01 Mol / l, pH: 11.
0, Cu-Zn pyrophosphate alloy plating bath, temperature: 45 ° C., foil speed: 0 m / hr, current density: 10 A
The plating was performed for 8 seconds under the condition of / dm 2 . Immediately after that, an attempt was made to wash with water, but since the obtained surface was partially washed out by washing with black powdery electrodeposition, the subsequent treatment and characteristic measurement were not performed.

【0021】(実施例3〜13及び比較例2〜3)表1
に示す浴組成及びめっき条件でピロりん酸Cu−Zn合
金めっきを行い、先と同様にクローメート処理した。そ
の後、直ちに、水洗、乾燥を行って、Cu−Zn合金め
っき障壁層をもつ印刷回路用電解銅箔を作製した。得ら
れた箔のめっき面の色調(色差)、接着後の常態引き剥
し強度、接着・加熱後引き剥し強度、加熱劣化率の測定
結果を表1にまとめて示す。
(Examples 3 to 13 and Comparative Examples 2 to 3) Table 1
Cu-Zn pyrophosphate alloy plating was performed under the bath composition and plating conditions shown in (1) and chromate treatment was performed in the same manner as above. Immediately thereafter, it was washed with water and dried to prepare an electrolytic copper foil for a printed circuit having a Cu-Zn alloy plating barrier layer. Table 1 shows the measurement results of the color tone (color difference) of the plated surface of the obtained foil, the normal peel strength after adhesion, the peel strength after adhesion and heating, and the heat deterioration rate.

【0022】[0022]

【表1】 [Table 1]

【0023】[0023]

【発明の効果】本発明により、これまで出来なかった、
非シアン浴による電解銅箔粗化面のCu−Zn合金めっ
きによる障壁層の作製が可能となり、作業の安全性、排
液処理コストが大幅に改善される。
According to the present invention, it has not been possible until now.
A barrier layer can be produced by Cu-Zn alloy plating on the roughened surface of an electrolytic copper foil with a non-cyan bath, and work safety and drainage treatment cost are greatly improved.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 川澄 良雄 埼玉県戸田市新曽南3丁目17番35号株式会 社ジャパンエナジー内 (72)発明者 土屋 弘雄 埼玉県戸田市新曽南3丁目17番35号株式会 社ジャパンエナジー内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshio Kawasumi, 3-17-35, Shinzonan, Toda City, Saitama Prefecture Within Japan Energy (72) Inventor Hiroo Tsuchiya 3--1735, Shinzonan, Toda City, Saitama Prefecture No. Stock Company Japan Energy

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 電解銅箔の粗化面にCu−Zn合金めっ
き障壁層を形成するためにCu−Zn合金めっき浴を通
して電解銅箔を移動させながらCu−Zn合金めっきを
行う段階を含む印刷回路用銅箔の製造方法において、前
記Cu−Zn合金めっき浴として(1)ピロりん酸のア
ルカリ金属塩及びポリりん酸のアルカリ金属塩から選ば
れた少なくとも1種、(2)銅塩、(3)亜鉛塩並びに
(4)アミノ酸及びその塩から選ばれた少なくとも1種
よりなるめっき浴を用い、そして該めっき浴中の電解銅
箔の移動速度を500m/hr〜3000m/hrとし
そして陰極電流密度を6A/dm2 〜15A/dm2
することを特徴とする印刷回路用銅箔の製造方法。
1. A printing method comprising performing Cu—Zn alloy plating while moving the electrolytic copper foil through a Cu—Zn alloy plating bath to form a Cu—Zn alloy plating barrier layer on a roughened surface of the electrolytic copper foil. In the method for producing a copper foil for a circuit, as the Cu-Zn alloy plating bath, at least one selected from (1) an alkali metal salt of pyrophosphoric acid and an alkali metal salt of polyphosphoric acid, (2) a copper salt, ( 3) Using a plating bath comprising at least one selected from a zinc salt and (4) an amino acid and its salt, and setting a moving speed of the electrolytic copper foil in the plating bath to 500 m / hr to 3000 m / hr and a cathode current. method of manufacturing a printed circuit copper foil, characterized in that the density of 6A / dm 2 ~15A / dm 2 .
JP10317195A 1995-04-05 1995-04-05 Manufacturing method of copper foil for printed circuit Expired - Fee Related JP3361914B2 (en)

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JPH08277485A true JPH08277485A (en) 1996-10-22
JP3361914B2 JP3361914B2 (en) 2003-01-07

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CN102027162A (en) * 2008-05-12 2011-04-20 株式会社普利司通 Copper-zinc alloy electroplating bath and plating method using same
JP2010053444A (en) * 2008-07-30 2010-03-11 Bridgestone Corp Copper-zinc alloy electroplating bath and wire for steel cord
WO2010027021A1 (en) * 2008-09-04 2010-03-11 株式会社ブリヂストン Copper-zinc alloy electroplating bath
JP2010059508A (en) * 2008-09-04 2010-03-18 Bridgestone Corp Copper-zinc alloy electroplating bath
CN102341530A (en) * 2009-03-04 2012-02-01 株式会社普利司通 Copper-zinc alloy electroplating bath and method of plating using same
JP2012136753A (en) * 2010-12-27 2012-07-19 Bridgestone Corp Copper-zinc alloy plating method, and copper-zinc alloy plating bath used therefor

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