JPH0827172B2 - 集積光学センサ装置 - Google Patents
集積光学センサ装置Info
- Publication number
- JPH0827172B2 JPH0827172B2 JP3046847A JP4684791A JPH0827172B2 JP H0827172 B2 JPH0827172 B2 JP H0827172B2 JP 3046847 A JP3046847 A JP 3046847A JP 4684791 A JP4684791 A JP 4684791A JP H0827172 B2 JPH0827172 B2 JP H0827172B2
- Authority
- JP
- Japan
- Prior art keywords
- auxiliary
- sensor device
- light guide
- detector
- scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/572—Wavelength control
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Fluid Pressure (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4011718A DE4011718A1 (de) | 1990-04-11 | 1990-04-11 | Integriert-optische sensoreinrichtung |
| DE40117189 | 1990-04-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04225117A JPH04225117A (ja) | 1992-08-14 |
| JPH0827172B2 true JPH0827172B2 (ja) | 1996-03-21 |
Family
ID=6404215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3046847A Expired - Lifetime JPH0827172B2 (ja) | 1990-04-11 | 1991-03-12 | 集積光学センサ装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5113066A (enExample) |
| EP (1) | EP0451475B1 (enExample) |
| JP (1) | JPH0827172B2 (enExample) |
| AT (1) | ATE93621T1 (enExample) |
| DE (2) | DE4011718A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE59102268D1 (de) * | 1991-05-24 | 1994-08-25 | Heidenhain Gmbh Dr Johannes | Vorrichtung zum Ein- und/oder Auskoppeln von Lichtstrahlen mit einem integriert-optischen Baustein. |
| US5534692A (en) * | 1992-09-14 | 1996-07-09 | Sony Corporation | Method for detecting origin point of position sensor |
| DE4302313C2 (de) * | 1993-01-28 | 1996-12-05 | Heidenhain Gmbh Dr Johannes | Mehrkoordinaten-Meßeinrichtung |
| DE19652562C2 (de) * | 1996-12-17 | 1999-07-22 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
| US5978119A (en) * | 1997-02-18 | 1999-11-02 | Lucent Technologies Inc. | System and method for synchronizing an optical source and a router in a wavelength division multiplexed fiber optic network |
| WO1999042790A1 (de) | 1998-02-21 | 1999-08-26 | Dr. Johannes Heidenhain Gmbh | Verfahren zum betrieb eines positionsmesssystems und geeignete positionsmesssystem hierzu |
| DE19917950A1 (de) | 1999-04-21 | 2000-10-26 | Heidenhain Gmbh Dr Johannes | Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung |
| DE10058239B4 (de) | 2000-11-17 | 2012-01-26 | Dr. Johannes Heidenhain Gmbh | Positionsmeßeinrichtung |
| US6878880B2 (en) * | 2002-12-03 | 2005-04-12 | Lloyd Herbert King, Jr. | Twist-on wire connector |
| CN103516434B (zh) * | 2012-06-19 | 2016-08-31 | 上海贝尔股份有限公司 | 光发射机 |
| US9871595B2 (en) * | 2016-04-27 | 2018-01-16 | Industrial Technology Research Institute | Decoding device and method for absolute positioning code |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3674335A (en) * | 1970-05-25 | 1972-07-04 | Bell Telephone Labor Inc | Light wave coupling into thin film light guides |
| FR2495873B1 (fr) * | 1980-12-05 | 1987-01-02 | Thomson Csf | Dispositif de commutation de faisceaux optiques et central telephonique comprenant un tel dispositif |
| DE3404963C2 (de) * | 1984-02-11 | 1986-09-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Laser-Interferometer zur Längenmessung |
| DE3625327C1 (de) * | 1986-07-26 | 1988-02-18 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmesseinrichtung |
| US4697134A (en) * | 1986-07-31 | 1987-09-29 | Commonwealth Edison Company | Apparatus and method for measuring battery condition |
| US4724314A (en) * | 1986-08-21 | 1988-02-09 | Harbor Branch Oceanographic Institution Inc. | Material characteristics measuring methods and devices |
| DE3633574A1 (de) * | 1986-10-02 | 1988-04-14 | Heidenhain Gmbh Dr Johannes | Lichtelektrische winkelmesseinrichtung |
| DE3702314C1 (de) * | 1987-01-27 | 1988-01-14 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Messeinrichtung |
| DE8717558U1 (de) * | 1987-02-21 | 1989-02-23 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische Positionsmeßeinrichtung |
| DE3885134D1 (de) * | 1987-03-30 | 1993-12-02 | Siemens Ag | Anordnung zur Steuerung oder Regelung einer Emissionswellenlänge und emittierten Leistung eines Halbleiterlasers. |
| FR2615281B1 (fr) * | 1987-05-11 | 1996-08-23 | Canon Kk | Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre |
| DE3715627A1 (de) * | 1987-05-11 | 1988-12-08 | Hommelwerke Gmbh | Vorrichtung zur messung des abstandes zwischen der vorrichtung und einer messflaeche |
| JPH01204088A (ja) * | 1988-02-10 | 1989-08-16 | Nec Corp | ホログラム |
| JP2687451B2 (ja) * | 1988-06-28 | 1997-12-08 | 日本電気株式会社 | 偏光素子 |
| DE3836703A1 (de) * | 1988-10-28 | 1990-05-03 | Heidenhain Gmbh Dr Johannes | Winkelmesseinrichtung |
| JPH02184828A (ja) * | 1989-01-12 | 1990-07-19 | Toshiba Corp | 半導体光増幅器 |
| US4998043A (en) * | 1989-05-01 | 1991-03-05 | Fujikura Ltd. | LED stabilizing light source device |
-
1990
- 1990-04-11 DE DE4011718A patent/DE4011718A1/de active Granted
-
1991
- 1991-02-26 AT AT91102771T patent/ATE93621T1/de not_active IP Right Cessation
- 1991-02-26 EP EP91102771A patent/EP0451475B1/de not_active Expired - Lifetime
- 1991-02-26 DE DE91102771T patent/DE59100312D1/de not_active Expired - Fee Related
- 1991-03-12 JP JP3046847A patent/JPH0827172B2/ja not_active Expired - Lifetime
- 1991-04-08 US US07/681,883 patent/US5113066A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0451475B1 (de) | 1993-08-25 |
| EP0451475A3 (en) | 1992-01-15 |
| DE59100312D1 (de) | 1993-09-30 |
| DE4011718C2 (enExample) | 1993-09-16 |
| JPH04225117A (ja) | 1992-08-14 |
| DE4011718A1 (de) | 1991-10-17 |
| ATE93621T1 (de) | 1993-09-15 |
| EP0451475A2 (de) | 1991-10-16 |
| US5113066A (en) | 1992-05-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4930895A (en) | Encoder for forming interference fringes by re-diffracted lights from an optical type scale and photoelectrically converting the interference fringes to thereby detect the displacement of the scale | |
| US4676645A (en) | Optical instrument for measuring displacement | |
| US5991480A (en) | Process and device for measuring light beams | |
| US4970388A (en) | Encoder with diffraction grating and multiply diffracted light | |
| US5483377A (en) | Displacement detection apparatus | |
| US5127733A (en) | Integrated optical precision measuring device | |
| JP3308230B2 (ja) | 主要光学システムの対象物と光学出力ステージとの間の目標分離距離を維持する維持装置、および維持方法 | |
| JPH0827172B2 (ja) | 集積光学センサ装置 | |
| JPH02231525A (ja) | エンコーダー | |
| US3861801A (en) | Device for sampling laser beams | |
| JP2011237272A (ja) | 光距離計及び距離測定方法 | |
| US5298727A (en) | Device for reading bar codes on semiconductor surfaces | |
| US5196711A (en) | Deviation measuring device including a mask having a grating pattern and a zone plate pattern | |
| JPH048724B2 (enExample) | ||
| US5187545A (en) | Integrated optical position measuring device and method with reference and measurement signals | |
| US5066129A (en) | Optical linear encoder with light quantity calabration | |
| US6535290B1 (en) | Optical position measuring device with a beam splitter | |
| JP3030905B2 (ja) | 定点検出装置 | |
| US7389595B2 (en) | Position-measuring device and method for operating a position-measuring device | |
| JPH0235248B2 (enExample) | ||
| US5170221A (en) | Parallel light ray measuring apparatus | |
| JPS59163517A (ja) | 光学式スケ−ル読取装置 | |
| JP2715623B2 (ja) | エンコーダ | |
| KR0112496Y1 (ko) | 강판의 표면조도 측정장치 | |
| JPH0512753Y2 (enExample) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19960917 |