JPH08258198A - Porous sheet for suction fixation - Google Patents
Porous sheet for suction fixationInfo
- Publication number
- JPH08258198A JPH08258198A JP7062361A JP6236195A JPH08258198A JP H08258198 A JPH08258198 A JP H08258198A JP 7062361 A JP7062361 A JP 7062361A JP 6236195 A JP6236195 A JP 6236195A JP H08258198 A JPH08258198 A JP H08258198A
- Authority
- JP
- Japan
- Prior art keywords
- porous sheet
- sheet
- porous
- suction
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は吸着固定に用いる積層型
多孔質シートに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated porous sheet used for adsorption and fixation.
【０００２】[0002]
【従来の技術】液晶用ガラス板、半導体ウェハ、セラミ
ックコンデンサやセラミック基板の精密切断、液晶用ガ
ラス板や半導体ウェハへの精密塗工、偏光板と位相差板
あるいはこれらとガラス板との精密貼り合わせ等の加工
に際しては、これらの被加工体が位置ズレしないように
固定して作業している。2. Description of the Related Art Precision cutting of glass plates for liquid crystals, semiconductor wafers, ceramic capacitors and ceramic substrates, precision coating on glass plates for semiconductors and semiconductor wafers, precision bonding of polarizing plates and retardation plates or these and glass plates At the time of processing such as alignment, these work pieces are fixed so as not to be displaced.
【０００３】上記被加工体の固定には真空吸着法が採用
されている。この方法は、例えば、図２に示すように、
上面に所定個数の通気孔１を設けると共に所定位置に吸
引孔２を設けた基台（金属等の機械的強度を有する材料
から成る）３を用い、基台３の通気孔形成面上に被加工
体６を載置し、吸引孔２に接続された真空ポンプ（図示
省略）により減圧し基台１の内部を減圧状態とすること
により、被加工体６を基台１上に吸着固定しその位置ズ
レを防止して、これを加工するものである。A vacuum suction method is used to fix the workpiece. This method is, for example, as shown in FIG.
A base (made of a material having mechanical strength such as metal) 3 having a predetermined number of ventilation holes 1 on its upper surface and suction holes 2 at predetermined positions is used. The workpiece 6 is placed, and the inside of the base 1 is depressurized by a vacuum pump (not shown) connected to the suction hole 2, so that the workpiece 6 is adsorbed and fixed onto the base 1. The position shift is prevented and this is processed.
【０００４】そして、通常、加工に際してはプラスチッ
クフィルムから成る基材の片面全面に接着剤層を形成し
た粘着テープ７を用い、この粘着テープ７の接着剤層上
に被加工体６を接着させている（「半導体産業と先端技
術」、第１２０〜１２７頁、発行日昭和６２年１０月２
５日、工学図書株式会社発行）。この粘着テープは被加
工体を吸着固定して加工した後、基台から取り外すまで
の間の被加工体の不用意な移動を防止するために用いる
ものである。Usually, during processing, an adhesive tape 7 having an adhesive layer formed on the entire surface of one side of a substrate made of a plastic film is used, and the work piece 6 is adhered onto the adhesive layer of the adhesive tape 7. ("Semiconductor industry and advanced technology", pages 120-127, date of issue October 2, 1987)
Published by Engineering Book Co., Ltd. 5th). This adhesive tape is used to prevent the inadvertent movement of the object to be processed after the object is sucked and fixed to be processed and then removed from the base.
【０００５】[0005]
【発明が解決しようとする課題】しかし、基材の片面全
面に接着剤層を設けて成る粘着テープを用いる方法にお
いては、被加工体表面に接着剤が移行し該被加工体を汚
染するという問題があった。従って、本発明は被加工体
を接着剤により汚染するようなことのない吸着固定用シ
ートを提供することを目的とする。However, in the method of using an adhesive tape having an adhesive layer provided on the entire surface of one side of a substrate, the adhesive migrates to the surface of the work piece and contaminates the work piece. There was a problem. Therefore, an object of the present invention is to provide a sheet for adsorption and fixation which does not contaminate a work piece with an adhesive.
【０００６】[0006]
【課題を解決するための手段】本発明者は従来技術の有
する上記問題を解決するため鋭意研究の結果、多孔質シ
ートを用いると共に該シートを多層とすることにより所
期の目的を達成できることを見い出し、本発明を完成す
るに至ったものである。DISCLOSURE OF THE INVENTION As a result of intensive research to solve the above problems of the prior art, the present inventor has found that the intended purpose can be achieved by using a porous sheet and forming the sheet into multiple layers. They have found the present invention and completed the present invention.
【０００７】即ち、本発明に係る吸着固定用多孔質シー
トは通気度の異なる多孔質シートを積層したことを特徴
とするものである。That is, the adsorption-fixing porous sheet according to the present invention is characterized by laminating porous sheets having different air permeability.
【０００８】本発明に係る吸着固定用多孔質シートは通
気度の異なる多孔質シートを積層したものである。この
多孔質シートの材質は特に限定はなく、例えば、ポリエ
チレン、超高分子量ポリエチレン（以下、「ＵＨＭＷＰ
Ｅ」という）、ポリプロピレン、ポリスチレン、ポリア
ミド、ポリエステル、ポリアクリル、フッ素樹脂（ポリ
テトラフルオロエチレン等）、ブタジエンゴム、スチレ
ンブタジエンゴム、イソプレンゴム、ニトリルゴム等の
高分子材料から成るものを使用できる。この多孔質シー
トの厚さ、気孔率、孔径は特に限定されないが、通常、
厚さは約０．０５〜１０ｍｍ、気孔率は約１０〜５０
％、微孔の孔径は約５〜２００μｍである。かような気
孔率および孔径を有する多孔質シートの通気度は、例え
ば、ガーレー値で表すことができ、その値は約２０００
秒／１００ｃｍ3 以下である。なお、ガーレー値はＪＩ
Ｓ Ｐ ８１１７により測定できる。The adsorption-fixing porous sheet according to the present invention is a stack of porous sheets having different air permeabilities. The material of the porous sheet is not particularly limited, and examples thereof include polyethylene and ultra high molecular weight polyethylene (hereinafter referred to as “UHMWP”).
E ”), polypropylene, polystyrene, polyamide, polyester, polyacryl, fluororesin (polytetrafluoroethylene, etc.), butadiene rubber, styrene butadiene rubber, isoprene rubber, nitrile rubber, and other polymeric materials. The thickness of the porous sheet, the porosity, the pore size is not particularly limited, but usually,
Thickness is about 0.05-10mm, porosity is about 10-50
%, The pore size of the micropores is about 5 to 200 μm. The air permeability of the porous sheet having such a porosity and a pore size can be represented by, for example, a Gurley value, and the value is about 2000.
Second / 100 cm 3 or less. The Gurley value is JI
It can be measured by SP 8117.
【０００９】そして、積層は同材質の多孔質シート相互
で行ってもよく、あるいは異なる材質の多孔質シート相
互で行ってもよい。ただし、積層する多孔質シート相互
の通気度は異なるようにする必要がある。積層する多孔
質シート相互の通気度を異なるようにする手段として
は、例えば、シート相互の気孔率および／または孔径を
変える方法を採用できる。なお、積層する多孔質シート
相互の通気度の異なり具合は適宜設定できるが、通気度
の高い多孔質シートとしてガーレー値が０．５秒／１０
０ｃｍ3 〜１０秒／１００ｃｍ3 のものを用い、通気度
の低い多孔質シートとしてガーレー値が３０秒／１００
ｃｍ3 〜６０秒／１００ｃｍ3 のものを用いるのが好適
である。The stacking may be performed between the porous sheets of the same material, or may be performed between the porous sheets of different materials. However, the air permeability of the porous sheets to be laminated needs to be different from each other. As a means for making the air permeability of the laminated porous sheets different from each other, for example, a method of changing the porosity and / or the pore diameter of the sheets can be adopted. The degree of difference in air permeability between the laminated porous sheets can be appropriately set, but a Gurley value of 0.5 seconds / 10 is obtained as a porous sheet having high air permeability.
A Gurley value of 30 seconds / 100 is used as a porous sheet having a low air permeability using 0 cm 3 to 10 seconds / 100 cm 3.
It is preferable to use the one having cm 3 to 60 seconds / 100 cm 3 .
【００１０】このように本発明においては通気度の異な
る多孔質シート相互を積層するが、この積層の具体的態
様としては２枚の多孔質シーを積層する例や、３枚以上
の多孔質シートを積層する例を挙げることができる。２
枚の多孔質シートを用いるときは通気度の高い１枚の多
孔質シーと通気度の低い１枚の多孔質シートを積層す
る。また、３枚以上の多孔質シートを用いるときはこれ
らのうち少なくとも２枚のシートの通気度が異なるよう
にする。多孔質シート相互の積層は、シート相互を接着
剤を用いて部分的（点状、筋状、網目状等）に接着する
方法、シート相互を部分的に熱融着する方法等で行い、
多孔質シートの通気度の大幅な低下を招かないようにす
る。As described above, according to the present invention, the porous sheets having different air permeability are laminated with each other. Specific examples of the lamination include an example in which two porous sheets are laminated or three or more porous sheets. An example of stacking can be given. Two
When using one porous sheet, one porous sheet having high air permeability and one porous sheet having low air permeability are laminated. When three or more porous sheets are used, at least two of these sheets should have different air permeabilities. Lamination of the porous sheets to each other is performed by a method of partially adhering the sheets to each other with an adhesive (dotted, streak-like, mesh-like), a method of partially heat-sealing the sheets,
Make sure that the air permeability of the porous sheet is not significantly reduced.
【００１１】なお、本発明においては積層する多孔質シ
ートの少なくとも一つを帯電防止性とすることができ
る。多孔質シートを帯電防止性とするには、例えば、シ
ート成形時に帯電防止剤を配合してシート成形したり、
多孔質シートに帯電防止剤を含浸させたりする方法を採
用できる。In the present invention, at least one of the laminated porous sheets can be made antistatic. To make the porous sheet antistatic, for example, by blending an antistatic agent at the time of sheet formation,
A method of impregnating a porous sheet with an antistatic agent can be adopted.
【００１２】上記したように本発明においては多孔質シ
ートの材質に限定はないが、通気度や厚さを比較的自由
に設定できる点を考慮すると、少なくとも一つの多孔質
シートとしてＵＨＭＷＰＥ製のものを用いるのが好適で
ある。ＵＨＭＷＰＥは、一般のポリエチレンの分子量
（粘度法による測定値）が約１０万以下であるのに対
し、約５０万以上の高い値を示す点で特異である。かよ
うなＵＨＭＷＰＥは、例えば、三井石油化学工業社から
「ハイゼックス・ミリオン」、ヘキスト社から「ホスタ
レンＧＵＲ」等の商品名で市販されている。As described above, the material of the porous sheet is not limited in the present invention, but considering that the air permeability and the thickness can be set relatively freely, at least one porous sheet made of UHMWPE is used. Is preferably used. UHMWPE is peculiar in that it has a high molecular weight (measured by the viscosity method) of about 100,000 or less, whereas it has a high value of about 500,000 or more. Such UHMWPE is commercially available, for example, from Mitsui Petrochemical Co., Ltd. under the trade names of "Hi-Zex Million" and Hoechst "Hostalen GUR".
【００１３】このＵＨＭＷＰＥは溶融粘度が高く融点以
上に加熱しても流動し難いので、多孔質シートを製造す
るに際しては他の高分子材料とは異なる方法が採用され
る。ここでＵＨＭＷＰＥ多孔質シートの製造法の一例を
述べる。該多孔質シートは、例えば、ＵＨＭＷＰＥ粉末
を金型に充填し、次いで、これをＵＨＭＷＰＥの融点以
上の温度に加熱された水蒸気雰囲気中で焼結してブロッ
ク状成形体とした後冷却し、この成形体を所定厚さのシ
ートに切削する方法により製造できる。Since this UHMWPE has a high melt viscosity and does not easily flow even when heated above the melting point, a method different from other polymer materials is adopted when manufacturing the porous sheet. Here, an example of a method for producing the UHMWPE porous sheet will be described. The porous sheet is obtained by, for example, filling a mold with UHMWPE powder, then sintering this in a steam atmosphere heated to a temperature equal to or higher than the melting point of UHMWPE to form a block-shaped molded body, and then cooling it. It can be manufactured by a method of cutting a molded body into a sheet having a predetermined thickness.
【００１４】この方法においては、先ず、ＵＨＭＷＰＥ
粉末（粒径は通常３０〜２００μｍ）を金型に充填し、
次いで、これをＵＨＭＷＰＥの融点以上に加熱された水
蒸気雰囲気中で焼結してブロック状成形体とする。この
ようにＵＨＭＷＰＥ粉末を金型に充填し、これを加熱さ
れた水蒸気雰囲気中で焼結するので、金型としては少な
くとも一つの開口部（加熱水蒸気導入用）を有するもの
を用いる。焼結に要する時間は粉末の充填量や水蒸気の
温度等によって変わるが、通常、約１〜１２時間であ
る。In this method, first, UHMWPE
Fill the mold with powder (usually 30-200 μm particle size),
Then, this is sintered in a steam atmosphere heated to a melting point of UHMWPE or higher to obtain a block-shaped molded body. Since the UHMWPE powder is filled in the mold in this way and is sintered in a heated steam atmosphere, a mold having at least one opening (for introducing heated steam) is used. The time required for sintering varies depending on the powder filling amount, the temperature of steam, and the like, but is usually about 1 to 12 hours.
【００１５】この際に用いる水蒸気はＵＨＭＷＰＥの融
点以上に昇温させるため、加圧状態とされるので、金型
に充填されたＵＨＭＷＰＥ粉末間に容易に進入すること
ができる。なお、ＵＨＭＷＰＥ粉末間への加熱水蒸気の
進入をより容易にするため、該粉末を金型に充填し、こ
の金型を耐圧容器に入れ、減圧状態とする脱気操作を施
し、その後加熱された水蒸気雰囲気中で焼結するように
してもよい。この際の減圧度合いは特に限定されない
が、約１〜１００ｍｍＨｇが好ましい。Since the water vapor used at this time is heated to a temperature higher than the melting point of UHMWPE and is in a pressurized state, it can easily enter between the UHMWPE powders filled in the mold. In order to make it easier for the heated steam to enter between the UHMWPE powders, the powders were filled in a mold, the molds were placed in a pressure resistant container, and deaeration operation was performed to reduce the pressure, and then the powders were heated. You may make it sinter in a steam atmosphere. The degree of pressure reduction at this time is not particularly limited, but is preferably about 1 to 100 mmHg.
【００１６】従って、金型に充填されたＵＨＭＷＰＥ粉
末の焼結は、前記耐圧容器に水蒸気導入管およびその開
閉バルブを設けておき、該粉末間の空気を脱気した後、
減圧を止めあるいは減圧を続けながら、水蒸気バルブを
開いて加熱水蒸気を導入する方法によって行うことがで
きる。Therefore, for the sintering of the UHMWPE powder filled in the mold, a steam inlet tube and its on-off valve are provided in the pressure resistant container, and the air between the powders is degassed.
It can be carried out by a method of opening the steam valve and introducing heated steam while stopping or continuing the depressurization.
【００１７】この焼結時において、ＵＨＭＷＰＥ粉末は
融点以上の温度に加熱されるがその溶融粘度が高いので
あまり流動せず、その粉末形状を一部乃至大部分維持
し、隣接する粉末相互がその接触部位において熱融着し
多孔質のブロック状成形体（粉末相互の非接触部が該多
孔質成形体の微孔となる）が形成される。なお、焼結に
際し、所望により加圧することもできるが、その圧力
は、通常、約１０ｋｇ／ｃｍ2 以下とするのが好まし
い。During this sintering, the UHMWPE powder is heated to a temperature equal to or higher than its melting point, but its melt viscosity is high, so that it does not flow so much, its powder shape is maintained partially or largely, and the adjacent powders have the same shape. At the contact portion, heat fusion is performed to form a porous block-shaped molded body (the non-contact portions of the powders become fine pores of the porous molded body). During sintering, pressure may be applied if desired, but the pressure is usually preferably about 10 kg / cm 2 or less.
【００１８】上記のようにして焼結を行った後、冷却す
る。冷却に際してはブロック状成形体への亀裂の発生を
防止するため、急冷を避けるのが好ましく、例えば、室
温に放置して冷却する方法を採用できる。なお、冷却は
ブロック状成形体を金型に入れたまま行ってもよく、あ
るいは金型から取り出して行ってもよい。このようにし
てブロック状成形体を冷却した後、旋盤等により所定厚
さに切削することにより、多孔質シートを得ることがで
きる。After the sintering is performed as described above, it is cooled. When cooling, it is preferable to avoid rapid cooling in order to prevent cracks from occurring in the block-shaped molded body, and for example, a method of cooling by leaving it at room temperature can be adopted. The cooling may be performed while the block-shaped molded body is kept in the mold, or may be taken out from the mold. After cooling the block-shaped molded body in this manner, the porous sheet can be obtained by cutting to a predetermined thickness with a lathe or the like.
【００１９】上記方法により得られるＵＨＭＷＴＥ多孔
質シートの微孔の孔径、気孔率は用いるＵＨＭＷＰＥ粉
末の粒径や焼結時における加圧の有無によって決定され
る。他の条件が同じであれば、用いた粉末の粒径が大き
い程微孔の孔径が大きく、気孔率の高い多孔質シートが
得られる。また、焼結時に加圧しない場合は加圧した場
合に比べ微孔の孔径が大きく、気孔率の高い多孔質シー
トが得られる。更に、焼結時に加圧した場合はその圧力
が高い程微孔の孔径が小さく、気孔率の低い多孔質シー
トが得られる。The pore size and porosity of the UHMWTE porous sheet obtained by the above method are determined by the particle size of the UHMWPE powder used and the presence or absence of pressure during sintering. If the other conditions are the same, the larger the particle size of the powder used, the larger the pore size of the fine pores and the higher the porosity of the porous sheet. Further, when pressure is not applied during sintering, the pore size of the micropores is larger than that when pressure is applied, and a porous sheet having a high porosity can be obtained. Further, when pressure is applied during sintering, the higher the pressure, the smaller the pore size of the fine pores, and the porous sheet with low porosity can be obtained.
【００２０】本発明においては通気性シートの少なくと
一つとしてとしてポリテトラフルオロエチレン（以下、
「ＰＴＦＥ」という）性の多孔質シートを用いるのも好
ましい。ＰＴＦＥ多孔質シートは撥液性に優れており、
これを用いた吸着固定用シートは被加工体を吸着固定し
これを加工するに際し、水等の処理液を使用する場合で
もその撥液性のために該処理液の排気系への侵入を防止
できる利点がある。In the present invention, at least one of the breathable sheets is polytetrafluoroethylene (hereinafter,
It is also preferable to use a porous sheet (referred to as "PTFE"). The PTFE porous sheet has excellent liquid repellency,
The adsorption fixing sheet using this prevents the infiltration of the processing liquid into the exhaust system due to its liquid repellency even when using a processing liquid such as water when adsorbing and fixing the workpiece and processing it. There are advantages.
【００２１】ここで本発明に係る吸着固定用多孔質シー
トを用いて被加工体を吸着固定する方法の実例について
説明する。図１において３は基台であり、所定個数の通
気孔１と吸引孔２を有している。この基台３上に、通気
度の高い多孔質シート４と通気度の低い多孔質シート５
を積層させた積層型の吸着固定用シートをその低通気度
多孔質シート５が基台３側になるように配置する。そし
て、通気度の高い多孔質シート４上に被加工体６を載置
し、次いで、吸引孔２に接続した真空ポンプ（図示省
略）を作動させることにより減圧し、被加工体６を吸着
固定用シートに吸着固定し、ダイシング加工等の所定の
加工を施すのである。Here, an example of a method for adsorbing and fixing a workpiece by using the adsorption-fixing porous sheet according to the present invention will be described. In FIG. 1, 3 is a base, which has a predetermined number of ventilation holes 1 and suction holes 2. On this base 3, a porous sheet 4 having a high air permeability and a porous sheet 5 having a low air permeability are provided.
The low-permeability porous sheet 5 is arranged so that the low-permeability porous sheet 5 is on the base 3 side. Then, the work piece 6 is placed on the porous sheet 4 having a high air permeability, and then a vacuum pump (not shown) connected to the suction hole 2 is operated to reduce the pressure, and the work piece 6 is adsorbed and fixed. It is adsorbed and fixed to a sheet for use and subjected to predetermined processing such as dicing processing.
【００２２】なお、所望により通気度の高い多孔質シー
トに接着剤層を部分的（点状、筋状、網目状等）に設け
ておき、この接着剤層により被加工体を接着させること
ができる。このように接着剤層を部分的に設けておけ
ば、加工終了後に被加工体を剥離するに際し、接着剤が
被加工体表面に移行するようなことがないばかりでな
く、被加工体の剥離も容易に行うことができる。また、
通気度の低い多孔質シートに接着剤層を部分的に設け、
この接着剤層により吸着固定用シートを基台に接着させ
るようにすることもできる。勿論、通気度の高い多孔質
シートおよび通気度の低い多孔質シートの双方に接着剤
層を部分的に設け、吸着固定用シートを基台上に接着す
ると共に通気度の高い多孔質シート上に被加工体を接着
させるようにすることもできる。この接着剤としては接
着作業や剥離作業の容易さからゴム系、アクリル系、シ
リコーン系等の感圧性接着剤が好適であるが、ホットメ
ルト型接着剤を用いることもできる。If desired, an adhesive layer may be partially (dotted, streak-like, mesh-like, etc.) provided on a porous sheet having a high air permeability, and the workpiece may be adhered by this adhesive layer. it can. If the adhesive layer is partially provided in this way, the adhesive does not migrate to the surface of the work piece when peeling the work piece after the processing is completed, and the work piece is peeled off. Can also be done easily. Also,
Partially provide an adhesive layer on a porous sheet with low air permeability,
It is also possible to adhere the adsorption fixing sheet to the base by this adhesive layer. Of course, an adhesive layer is partially provided on both the porous sheet with high air permeability and the porous sheet with low air permeability, and the adsorption / fixing sheet is adhered on the base, and at the same time on the porous sheet with high air permeability. It is also possible to bond the work piece. As this adhesive, a rubber-based, acrylic-based, silicone-based, or other pressure-sensitive adhesive is suitable because of the ease of the bonding work and the peeling work, but a hot-melt type adhesive can also be used.
【００２３】上記図２に示す方法においては通気度の高
い多孔質シートが被加工体側になるように用いたが、本
発明に係る吸着固定用多孔質シートは通気度の低い多孔
質シートが被加工体側になるようにして用いることもで
きる。In the method shown in FIG. 2, the porous sheet having a high air permeability is used so that it is placed on the side of the object to be processed, but the porous sheet for adsorption and fixation according to the present invention is a porous sheet having a low air permeability. It can also be used so that it is on the processed body side.
【００２４】[0024]
【実施例】以下、実施例により本発明を更に詳細に説明
する。The present invention will be described in more detail with reference to the following examples.
【００２５】実施例１ 内径１０５ｍｍの円筒状金型（上面開口、底面閉鎖）に
ＵＨＭＷＰＥ粉末（分子量６００万、融点１３５℃、平
均粒径１１０μｍ）を充填し、該粉末を９０ｇ／ｃｍ2
の割合で加圧する。Example 1 A cylindrical mold having an inner diameter of 105 mm (top opening, bottom closing) was filled with UHMWPE powder (molecular weight 6,000,000, melting point 135 ° C., average particle size 110 μm), and the powder was 90 g / cm 2.
Pressurize at a rate of.
【００２６】これを金属製耐圧容器（水蒸気導入管およ
びその開閉バルブを備える）に入れ、真空ポンプを作動
させて雰囲気圧を３０ｍｍＨｇまで減圧することによ
り、充填された粉末間の空気を脱気する。This is placed in a metal pressure vessel (provided with a steam inlet tube and its opening / closing valve), and the vacuum pump is operated to reduce the atmospheric pressure to 30 mmHg to deaerate the air between the filled powders. .
【００２７】脱気後、真空ポンプを止め、水蒸気導入バ
ルブを開き水蒸気（温度１５８℃、６気圧）を導入して
６０分間加熱することによりＵＨＭＷＰＥ粉末を焼結
し、丸棒状多孔質体を得る。After deaeration, the vacuum pump was stopped, the steam introduction valve was opened, and steam (temperature 158 ° C., 6 atm) was introduced and heated for 60 minutes to sinter the UHMWPE powder and obtain a round rod-shaped porous body. .
【００２８】次に、これを温度２５℃の部屋に３時間放
置して冷却した後金型から丸棒状成形体（外径約１０５
ｍｍ）を取り出し、旋盤によりその周方向に沿って厚さ
５００μｍに切削して白色不透明の多孔質シート（気孔
率２５％、平均孔径３０μｍ、ガーレー値５秒／１００
ｃｍ3 ）を得る。Next, this is left to cool in a room at a temperature of 25 ° C. for 3 hours and then cooled from the mold to a round bar-shaped body (outer diameter of about 105).
mm) is taken out and is cut along the circumferential direction by a lathe to a thickness of 500 μm, and a white opaque porous sheet (porosity 25%, average pore diameter 30 μm, Gurley value 5 seconds / 100).
cm 3 ).
【００２９】一方、これとは別にメルトインデックス
０．４の高密度ポリエチレンをＴダイ押出機を用い、ダ
イス温度１５０℃にて厚さ５２μｍの長尺シート状に押
し出し、次に、このシートを温度１３０℃で長尺方向に
延伸率が４００％になるように延伸することにより多孔
質化し、厚さ３２μｍ、気孔率５５％、微孔の平均孔径
０．１３μｍ、ガーレー値１０００秒／１００ｃｍ3 の
多孔質シートを得る。Separately from this, a high-density polyethylene having a melt index of 0.4 was extruded into a long sheet having a thickness of 52 μm at a die temperature of 150 ° C. using a T-die extruder. It was made porous by stretching at 130 ° C. in the longitudinal direction so that the stretching ratio was 400%, and the thickness was 32 μm, the porosity was 55%, the average pore diameter of the fine pores was 0.13 μm, and the Gurley value was 1000 seconds / 100 cm 3 . Obtain a porous sheet.
【００３０】そして、ＵＨＭＷＰＥ多孔質シートとポリ
エチレン多孔質シートを点状に熱融着することにより吸
着固定用多孔質シートを得た。なお、熱融着部の直径は
約０．５ｍｍ、融着部の点在密度は２５個所／ｃｍ2 と
した。Then, the UHMWPE porous sheet and the polyethylene porous sheet were heat-bonded in spots to obtain a porous sheet for adsorption and fixation. The diameter of the heat-sealed portion was about 0.5 mm, and the scattered density of the heat-sealed portion was 25 points / cm 2 .
【００３１】実施例２ 実施例１で用いたのと同じＵＨＭＷＰＥ多孔質シートと
ＰＴＦＥ多孔質シート（厚さ２５μｍ、気孔率８０％、
微孔の平均孔径０．６μｍ、ガーレー値８秒／１００ｃ
ｍ3 ）の間にポリエチレン製網目状シート（網目の大き
さは縦が１ｍｍ、横が１ｍｍ）を介在させる。次に、温
度１４０℃、圧力１ｋｇ／ｃｍ2 の条件で１分間加熱加
圧することより両シート網目状に熱融着させ、吸着固定
用多孔質シートを得た。Example 2 The same UHMWPE porous sheet and PTFE porous sheet as used in Example 1 (thickness 25 μm, porosity 80%,
Micropore average pore size 0.6μm, Gurley value 8 seconds / 100c
A polyethylene mesh sheet (mesh size is 1 mm in length and 1 mm in width) is interposed between m 3 ). Next, by heating and pressurizing for 1 minute under the conditions of a temperature of 140 ° C. and a pressure of 1 kg / cm 2 , both sheets were heat-sealed in a mesh shape to obtain a porous sheet for adsorption and fixation.
【００３２】比較例 厚さ５０μｍのポリエチレンフィルムの片面全面に厚さ
１００μｍの熱硬化型アクリル系接着剤層を設けた粘着
テープを得た。Comparative Example A pressure-sensitive adhesive tape was obtained in which a 100-μm-thick thermosetting acrylic adhesive layer was provided on the entire one surface of a 50-μm-thick polyethylene film.
【００３３】試験例１ 図１に示すのと同構造の金属製基台上に実施例１および
比較例で得た吸着固定用多孔質シートを配置する。この
とき実施例１のシートは高密度ポリエチレン製多孔質シ
ート（通気度の高い多孔質シート）が基台と反対側にな
るように配置し、比較例のシート（粘着テープ）は接着
剤層が基台と反対側になるように配置する。Test Example 1 The porous sheet for adsorption and fixation obtained in Example 1 and Comparative Example is placed on a metal base having the same structure as shown in FIG. At this time, the sheet of Example 1 was arranged so that the high density polyethylene porous sheet (porous sheet having high air permeability) was on the side opposite to the base, and the comparative example sheet (adhesive tape) had an adhesive layer. Place it on the opposite side of the base.
【００３４】そして、これら吸着固定用シート上にガラ
ス板（厚さ１ｍｍ）を載置し、次いで、吸引孔に接続し
た真空ポンプを作動させて通気孔を介して減圧すること
により吸引固定し、該ガラス板を縦１３０ｍｍ、横２０
０ｍｍのサイズになるようにダイシング加工する。加工
後に減圧を止めダイシングされたガラス板を吸着固定用
シートから取り外した。なお、比較例の粘着テープにつ
いてはダイシング後、温度８０℃で１分間加熱すること
により接着剤を熱硬化させ、その後ダイシングされたガ
ラス板を取り外した。Then, a glass plate (thickness: 1 mm) was placed on these suction-fixing sheets, and then a vacuum pump connected to the suction holes was operated to reduce the pressure through the ventilation holes, thereby fixing the suction. The glass plate is 130 mm in length and 20 in width.
Dicing is performed so that the size becomes 0 mm. After the processing, the reduced pressure was stopped and the diced glass plate was removed from the adsorption fixing sheet. Regarding the adhesive tape of Comparative Example, after dicing, the adhesive was thermoset by heating at a temperature of 80 ° C. for 1 minute, and then the diced glass plate was removed.
【００３５】実施例１の吸着固定用シートでは取外しは
容易にできたが、比較例ではガラス板が接着剤層に強固
に接着しているため剥離作業がし難く、しかも、ダイシ
ングされたガラス板の５％に接着剤の移行現象が観察さ
れた。The adsorption fixing sheet of Example 1 could be easily removed, but in the Comparative Example, the glass plate was firmly adhered to the adhesive layer, so that the peeling work was difficult and the dicing glass plate was used. In 5% of the cases, the migration phenomenon of the adhesive was observed.
【００３６】試験例２ 図１に示すのと同構造の金属製基台上に実施例２の吸着
固定用シートをＵＨＭＷＰＥ多孔質シートが基台と反対
側になるように配置し、該吸着固定用シート上にガラス
板（厚さ５ｍｍ）を載置する。Test Example 2 The adsorption fixing sheet of Example 2 was placed on the metal base having the same structure as shown in FIG. 1 so that the UHMWPE porous sheet was on the side opposite to the base, and the adsorption fixation was performed. A glass plate (thickness 5 mm) is placed on the sheet for use.
【００３７】そして、ガラス板側から水を流しながら吸
引孔に接続した真空ポンプを作動させて通気孔を介して
減圧することにより吸引固定し、該ガラス板を縦５０ｍ
ｍ、横１００ｍｍのサイズになるようにダイシング加工
する。加工後に水を止めると共に減圧を止めダイシング
されたガラス板を吸着固定用シートから取り外した。吸
着固定用シートからのガラス板の取外し容易にできた。
また、排気系への水の侵入はなかった。Then, while flowing water from the glass plate side, a vacuum pump connected to the suction hole is operated to reduce the pressure through the ventilation hole to thereby fix the glass plate by suction to a length of 50 m.
Dicing is performed so that the size is m and the width is 100 mm. After the processing, the water was stopped and the reduced pressure was stopped to remove the dicing glass plate from the adsorption fixing sheet. It was possible to easily remove the glass plate from the adsorption fixing sheet.
In addition, no water entered the exhaust system.
【００３８】[0038]
【発明の効果】本発明は上記のように構成され、通気度
の異なる多孔質シートを積層したので、接着剤による被
加工体の汚染がなく、また、加工後における被加工体の
取外しも容易であるという利点がある。Since the present invention is constructed as described above and the porous sheets having different air permeability are laminated, the work piece is not contaminated by the adhesive and the work piece can be easily removed after the work. The advantage is that
【図１】本発明に係る吸着固定用多孔質シートを用いて
吸着固定する方法の実例を示す正面図である。FIG. 1 is a front view showing an actual example of a method for adsorption and fixation using an adsorption-fixing porous sheet according to the present invention.
【図２】従来の吸着固定用シートを用いて吸着固定する
方法の実例を示す正面図である。FIG. 2 is a front view showing an actual example of a method of performing suction fixing using a conventional suction fixing sheet.
１ 通気孔 ２ 吸引孔 ３ 基台 ４ 通気度の高い多孔質シート ５ 通気度の低い多孔質シート ６ 被加工体 ７ 粘着テープ 1 Vent 2 Suction 3 Base 4 Porous sheet with high air permeability 5 Porous sheet with low air permeability 6 Workpiece 7 Adhesive tape
───────────────────────────────────────────────────── フロントページの続き (72)発明者 矢野 周治 大阪府茨木市下穂積１丁目１番２号 日東 電工株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Shuji Yano 1-2 1-2 Shimohozumi, Ibaraki City, Osaka Prefecture Nitto Denko Corporation
Claims (3)
ことを特徴とする吸着固定用多孔質シート。1. A porous sheet for adsorption and fixation, which comprises laminated porous sheets having different air permeabilities.
トラフルオロエチレン製である請求項１記載の吸着固定
用多孔質シート。2. The porous sheet for adsorption and fixation according to claim 1, wherein at least one of the porous sheets is made of polytetrafluoroethylene.
子量ポリエチレン製である請求項１記載の吸着固定用多
孔質シート。3. The adsorption-immobilizing porous sheet according to claim 1, wherein at least one of the porous sheets is made of ultra-high molecular weight polyethylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7062361A JPH08258198A (en) | 1995-03-22 | 1995-03-22 | Porous sheet for suction fixation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7062361A JPH08258198A (en) | 1995-03-22 | 1995-03-22 | Porous sheet for suction fixation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08258198A true JPH08258198A (en) | 1996-10-08 |
Family
ID=13197916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7062361A Pending JPH08258198A (en) | 1995-03-22 | 1995-03-22 | Porous sheet for suction fixation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08258198A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005049318A1 (en) * | 2003-11-19 | 2005-06-02 | Tonen Chemical Corporation | Composite microporous film, and production method and use thereof |
| KR100975492B1 (en) * | 2004-07-13 | 2010-08-11 | 닛토덴코 가부시키가이샤 | Sheet for suction and fixation, and method of producing the same |
| CN102179881A (en) * | 2011-04-01 | 2011-09-14 | 石金精密科技（深圳）有限公司 | System for adsorbing and fixing plane thin plate |
| JP2013189012A (en) * | 2012-02-17 | 2013-09-26 | Nitto Denko Corp | Porous sheet for suction and surface layer for exchange used in porous sheet for suction |
| WO2020045973A1 (en) * | 2018-08-28 | 2020-03-05 | 주식회사 스마테크 | Substrate protection sheet |
| WO2024062988A1 (en) * | 2022-09-20 | 2024-03-28 | 三星ダイヤモンド工業株式会社 | Resin film, scribing device, and scribing method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6288557U (en) * | 1985-11-22 | 1987-06-06 | ||
| JPH07214442A (en) * | 1994-01-28 | 1995-08-15 | Roland D G Kk | Vacuum table |
-
1995
- 1995-03-22 JP JP7062361A patent/JPH08258198A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6288557U (en) * | 1985-11-22 | 1987-06-06 | ||
| JPH07214442A (en) * | 1994-01-28 | 1995-08-15 | Roland D G Kk | Vacuum table |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005049318A1 (en) * | 2003-11-19 | 2005-06-02 | Tonen Chemical Corporation | Composite microporous film, and production method and use thereof |
| JPWO2005049318A1 (en) * | 2003-11-19 | 2007-06-07 | 東燃化学株式会社 | Composite microporous membrane, production method and use thereof |
| US7781094B2 (en) | 2003-11-19 | 2010-08-24 | Tonen Chemical Corporation | Microporous composite membrane and its production method and use |
| JP5057419B2 (en) * | 2003-11-19 | 2012-10-24 | 東レバッテリーセパレータフィルム株式会社 | Composite microporous membrane, production method and use thereof |
| KR100975492B1 (en) * | 2004-07-13 | 2010-08-11 | 닛토덴코 가부시키가이샤 | Sheet for suction and fixation, and method of producing the same |
| US7851058B2 (en) | 2004-07-13 | 2010-12-14 | Nitto Denko Corporation | Sheet for suction and fixation, and method of producing the same |
| CN102179881A (en) * | 2011-04-01 | 2011-09-14 | 石金精密科技（深圳）有限公司 | System for adsorbing and fixing plane thin plate |
| JP2013189012A (en) * | 2012-02-17 | 2013-09-26 | Nitto Denko Corp | Porous sheet for suction and surface layer for exchange used in porous sheet for suction |
| JP2017105200A (en) * | 2012-02-17 | 2017-06-15 | 日東電工株式会社 | Porous sheet for adsorption and surface layer for exchange used in porous sheet for adsorption |
| WO2020045973A1 (en) * | 2018-08-28 | 2020-03-05 | 주식회사 스마테크 | Substrate protection sheet |
| KR20200024487A (en) * | 2018-08-28 | 2020-03-09 | 주식회사 스마테크 | Seat for protecting flexible substrate |
| WO2024062988A1 (en) * | 2022-09-20 | 2024-03-28 | 三星ダイヤモンド工業株式会社 | Resin film, scribing device, and scribing method |
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