JPH08241501A - Nonmagnetic substrate for magnetic head - Google Patents
Nonmagnetic substrate for magnetic headInfo
- Publication number
- JPH08241501A JPH08241501A JP7068978A JP6897895A JPH08241501A JP H08241501 A JPH08241501 A JP H08241501A JP 7068978 A JP7068978 A JP 7068978A JP 6897895 A JP6897895 A JP 6897895A JP H08241501 A JPH08241501 A JP H08241501A
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- Prior art keywords
- mol
- substrate
- mgo
- thermal expansion
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- Magnetic Heads (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、金属性磁性膜を蒸着す
るための非磁性の磁気ヘッド用基板組成に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-magnetic magnetic head substrate composition for depositing a metallic magnetic film.
【0002】[0002]
【従来技術】従来この種の用途のものとして、BaTiO3、
CaTiO3等が使用されていたが、近年、高記録密度磁性膜
用の基板として、熱膨張係数が130〜145×10-7/℃を有
するMnO−NiO系、MgO−NiO系、CoO−NiO系の非磁性基板
が使用されるようになった。2. Description of the Related Art Conventionally, BaTiO 3 ,
Although CaTiO 3 and the like have been used, in recent years, as a substrate for high recording density magnetic film, MnO-NiO system, MgO-NiO system, CoO-NiO system having a thermal expansion coefficient of 130 ~ 145 × 10 -7 / ℃. Non-magnetic substrates of the system have come to be used.
【0003】[0003]
【発明が解決しようとする課題】しかし、上記MnO−NiO
系、MgO−NiO系、CoO−NiO系非磁性基板は、高記録密度
磁性膜と良好な熱膨張係数の一致を示すが、難焼結性材
料で緻密な焼結体を得ることが困難であり、また、従来
使用されていたBaTiO3、CaTiO3等に比べ機械的強度が劣
るため、磁気ヘッド用基板としての諸条件を十分に満足
するものではなかった。[Problems to be Solved by the Invention] However, the above MnO-NiO
System, MgO-NiO system, CoO-NiO system non-magnetic substrate shows good thermal expansion coefficient match with high recording density magnetic film, but it is difficult to obtain a dense sintered body with a hardly sinterable material. However, the mechanical strength thereof is inferior to those of BaTiO 3 , CaTiO 3 and the like which have been conventionally used, and therefore, various conditions as a magnetic head substrate were not sufficiently satisfied.
【0004】このような130〜145×10-7/℃の熱膨張係
数を有する磁気ヘッド用基板の材料としてMgxNi1-xO(0<
x<1)を主成分とする材料が知られている(特公平5-8004
4)。しかし、このMgxNi1-xO(0<x<1)は、焼結体密度が
向上しない問題点がある。As a material for a magnetic head substrate having a thermal expansion coefficient of 130 to 145 × 10 −7 / ° C., Mg x Ni 1-x O (0 <
A material whose main component is x <1 is known (Japanese Patent Publication No. 5-8004).
Four). However, this Mg x Ni 1-x O (0 <x <1) has a problem that the sintered body density is not improved.
【0005】[0005]
【課題を解決するための手段及び作用】本発明者らは上
記問題点を解決するため、(Ni1-X,MgX)O、x≧0.05を基
本組成とし、これにAl2O3を0.2〜7モル%添加すること
により、ビッカース硬度700以上、ヤング率170GPa以
上、焼結体の相対密度98%以上、100〜400℃における熱
膨張係数が130〜150×10-7/℃の磁気ヘッド用非磁性基
板を得ることができることを見いだした。Means and Actions for Solving the Problems In order to solve the above-mentioned problems, the present inventors set (Ni 1-X , Mg X ) O, x ≧ 0.05 as a basic composition, and add Al 2 O 3 thereto. By adding 0.2 to 7 mol%, Vickers hardness of 700 or more, Young's modulus of 170 GPa or more, relative density of sintered body of 98% or more, and magnetic expansion coefficient of 130 to 150 × 10 −7 / ° C. at 100 to 400 ° C. It has been found that a non-magnetic substrate for head can be obtained.
【0006】すなわち、本発明は上記の課題を解決した
もので、NiOを基本組成とし、これにMgOを5モル%以上2
6モル%以下、Al2O3を0.2モル%以上9.5モル%以下含有
した磁気ヘッド用非磁性基板であって、その熱膨張係数
が130×10-7/℃以上であることを特徴とする磁気ヘッド
用非磁性基板であり、NiOを基本組成とし、これにMgOを
5モル%以上、Al2O3を0.2モル%以上含有し、かつMgO含
有量をx(モル%)、Al2O3含有量をy(モル%)としたと
き、Al2O3含有量yが、y≦-1.8×10-3x3+0.053x2−
0.59x+11.4 であることを特徴とする磁気ヘッド用非
磁性基板である。That is, the present invention has solved the above-mentioned problems and has NiO as a basic composition and MgO in an amount of 5 mol% or more 2
A non-magnetic substrate for a magnetic head containing 6 mol% or less and Al 2 O 3 in the range of 0.2 mol% or more and 9.5 mol% or less, characterized by having a thermal expansion coefficient of 130 × 10 -7 / ° C or more. A non-magnetic substrate for magnetic heads, with NiO as the basic composition and MgO
5 mol% or more, the Al 2 O 3 contains more than 0.2 mol%, and x (mol%) of MgO content, when the content of Al 2 O 3 was y (mol%), content of Al 2 O 3 y is y ≦ -1.8 × 10 −3 x 3 + 0.053x 2 −
It is a non-magnetic substrate for a magnetic head characterized by having a size of 0.59x + 11.4.
【0007】[0007]
【発明の具体的説明】本発明の理解を容易にするため、
具体的かつ詳細に説明する。NiOは金属酸化物の中でも
非常に高い熱膨張係数を有する材料であり、これに全律
固溶するMgOを含有させることで、高記録密度用磁性膜
の基板材料として要求される130〜150×10-7/℃の間の
熱膨張係数を任意に選択することが可能になると同時
に、機械的強度も上昇する。DETAILED DESCRIPTION OF THE INVENTION In order to facilitate understanding of the present invention,
A specific and detailed description will be given. NiO is a material having a very high coefficient of thermal expansion among metal oxides, and by containing MgO which forms a solid solution throughout this, 130-150 × which is required as a substrate material for a magnetic film for high recording density. It becomes possible to arbitrarily select the thermal expansion coefficient between 10 -7 / ° C, and at the same time, the mechanical strength increases.
【0008】また、添加したAl2O3は、焼結の昇温過程
で一部がマトリックスと固溶し、陽イオン空孔を形成、
陽イオンの拡散速度を速めるため、焼結助剤効果を示
す。また、固溶限以上のAl2O3はマトリックスと反応
し、結晶粒界上に(Ni,Mg)Al2O4スピネルを形成し、結晶
粒の成長を抑制するため、結晶粒径が微細化し、機械的
な強度が向上すると同時に、スピネル構造を有する上記
化合物の耐摩耗性、高いヤング率特性により、耐摩耗
性、ヤング率が向上する。Further, the added Al 2 O 3 partly forms a solid solution with the matrix during the temperature rising process of sintering to form cation vacancies,
Since it accelerates the diffusion rate of cations, it exhibits a sintering aid effect. In addition, Al 2 O 3 above the solid solubility limit reacts with the matrix to form (Ni, Mg) Al 2 O 4 spinel on the grain boundaries and suppresses grain growth, so And the mechanical strength is improved, and at the same time, the wear resistance and the Young's modulus are improved by the wear resistance and the high Young's modulus characteristics of the compound having the spinel structure.
【0009】Al2O3の添加量が0.2モル%より少ないとAl
2O3の焼結助剤としての効果が無くなり、相対密度98%
以上の緻密な焼結体を得ることができない。また、MgO
含有量が5モル%未満の場合、ビッカース硬度700未満、
ヤング率が170GPa未満となり機械的強度が低い。MgO
含有量が5モル%以上、Al2O3の添加量が0.2モル%以上
で熱膨張係数の上限150×10-7/℃となる。一方、熱膨張
係数の下限130×10-7/℃は、Al2O3とMgOの含有量を調整
して制御する。熱膨張係数の下限130×10-7/℃となるAl
2O3とMgOの含有量は、図1の曲線aで示される。When the amount of Al 2 O 3 added is less than 0.2 mol%, Al
The effect of 2 O 3 as a sintering aid disappears, and the relative density is 98%.
The above dense sintered body cannot be obtained. Also, MgO
If the content is less than 5 mol%, Vickers hardness less than 700,
Young's modulus is less than 170 GPa and mechanical strength is low. MgO
When the content is 5 mol% or more and the amount of Al 2 O 3 added is 0.2 mol% or more, the upper limit of the thermal expansion coefficient is 150 × 10 -7 / ° C. On the other hand, the lower limit of the thermal expansion coefficient of 130 × 10 -7 / ° C is controlled by adjusting the contents of Al 2 O 3 and MgO. Al with a lower thermal expansion coefficient of 130 × 10 -7 / ° C
The contents of 2 O 3 and MgO are shown by the curve a in FIG.
【0010】図1の曲線a以下の範囲において熱膨張係
数130×10-7/℃以上となる。よって、図1の斜線で示さ
れる組成範囲において、ビッカース硬度700以上、ヤン
グ率170GPa以上、焼結体の相対密度98%以上、100〜
400℃における熱膨張係数が130〜150×10-7/℃の磁気ヘ
ッド用非磁性基板を得ることができる。曲線aは、MgO
含有量をx(モル%)、Al2O3含有量をy(モル%)としたと
き、 y=-1.8×10-3x3+0.053x2−0.59x+11.4 で示される。以下、本発明の実施例について説明する。In the range below the curve a in FIG. 1, the coefficient of thermal expansion is 130 × 10 −7 / ° C. or more. Therefore, in the composition range shown by the diagonal lines in FIG. 1, Vickers hardness of 700 or more, Young's modulus of 170 GPa or more, relative density of the sintered body of 98% or more, 100 to
A non-magnetic substrate for a magnetic head having a thermal expansion coefficient at 400 ℃ of 130 to 150 × 10 -7 / ℃ can be obtained. Curve a is MgO
When the content is x (mol%) and the Al 2 O 3 content is y (mol%), y = −1.8 × 10 −3 x 3 + 0.053x 2 −0.59x + 11.4. Examples of the present invention will be described below.
【0011】[0011]
【実施例】基本組成であるNiO粉に、MgO粉を0モル%(無
添加)、Al2O3粉を0、0.1、0.2、3、7モル%添加、またM
gO粉を5、15、20、25モル%、更にAl2O3粉をそれぞれ
0、0.1、0.2、0.5、1、3、7、10モル%添加し、エタノ
ールを媒体とした湿式ボールミルにより、20時間混合し
た。混合スラリーを乾燥後、1000℃、10時間仮焼し、再
びエタノールを媒体とした湿式ボールミルにより粉砕を
行った。この粉砕粉を造粒した後、一軸加圧により予備
成形を行い、更にCIPにより本成形を行った。焼成は大
気中で、1320℃、10時間の保持を行った後、更に1280
℃、1時間、1000kg/cm2の条件でHIP処理を行った。得
られた焼結体について、密度、ビッカース硬度、ヤング
率、及び100〜400℃の間の熱膨張係数を評価した。この
実施例により得られた結果を表1に示す。Example: To the basic composition NiO powder, MgO powder was added 0 mol% (no addition), Al 2 O 3 powder was added 0, 0.1, 0.2, 3 , 7 mol%, and M
5, 15, 20, 25 mol% gO powder, and Al 2 O 3 powder respectively
0, 0.1, 0.2, 0.5, 1, 3, 7, 10 mol% was added and mixed for 20 hours by a wet ball mill using ethanol as a medium. After the mixed slurry was dried, it was calcined at 1000 ° C. for 10 hours and then pulverized again by a wet ball mill using ethanol as a medium. After granulating this pulverized powder, preforming was performed by uniaxial pressing, and then main forming was performed by CIP. After firing at 1320 ° C for 10 hours in air, 1280
HIP treatment was carried out at 1000 ° C. for 1 hour at 1000 kg / cm 2 . The obtained sintered body was evaluated for density, Vickers hardness, Young's modulus, and coefficient of thermal expansion between 100 and 400 ° C. The results obtained by this example are shown in Table 1.
【0012】[0012]
【表1】 [Table 1]
【0013】表1に示すように、Al2O3粉を0.2モル%以
上添加(含有)した焼結体の相対密度は、いずれも98%以
上に緻密化していた。また、MgO粉を5モル%以上、Al2O
3粉を0.2モル%以上添加(含有)した焼結体のヤング率及
びビッカース硬度は、それぞれ170GPa以上、700以
上、MgO含有量及びAl2O3含有量の増加に伴って上昇し
た。また、焼結体の熱膨張係数は、150×10-7/℃以下と
なった。特にAl2O3粉を0.5モル%以上添加(含有)したも
のは、焼結体の相対密度が99%以上となり好ましい。As shown in Table 1, the relative densities of the sintered bodies to which Al 2 O 3 powder was added (contained) by 0.2 mol% or more were all densified to 98% or more. In addition, MgO powder 5 mol% or more, Al 2 O
The Young's modulus and Vickers hardness of the sintered body in which 0.2 mol% or more of the three powders were added (inclusion) increased to 170 GPa or more and 700 or more, respectively, as the MgO content and the Al 2 O 3 content increased. The coefficient of thermal expansion of the sintered body was 150 × 10 -7 / ℃ or less. In particular, one containing (containing) 0.5 mol% or more of Al 2 O 3 powder is preferable because the relative density of the sintered body is 99% or more.
【0014】熱膨張係数が130×10-7/℃となるのは、Al
2O3含有量と熱膨張係数との関係(図2)より求めるこ
とができる。The coefficient of thermal expansion of 130 × 10 −7 / ° C. is due to Al
It can be determined from the relationship between the 2 O 3 content and the coefficient of thermal expansion (Fig. 2).
【0015】□は、MgO含有量は5モル%のとき、○はMg
O含有量は15モル%のとき、■はMgO含有量は20モル%の
とき、●はMgO含有量は25モル%のときを示している。
これを熱膨張係数が130×10-7/℃となるAl2O3含有量とM
gO含有量との関係に書き直すと図1の曲線aとなる。し
たがって、図1の(MgO含有量、Al2O3含有量)が大略(26
モル%、0.2モル%)(5モル%、0.2モル%)(5モル%、9.
5モル%)及び曲線aで囲まれた領域範囲において、ビッ
カース硬度700以上、ヤング率170GPa以上、焼結体の
相対密度98%以上、100〜400℃における熱膨張係数が13
0〜150×10-7/℃の磁気ヘッド用非磁性基板を得ること
ができる。□ is MgO content of 5 mol%, ○ is Mg
When the O content is 15 mol%, ■ indicates the MgO content is 20 mol%, and ● indicates the MgO content is 25 mol%.
The content of M 2 and the Al 2 O 3 content that gives a thermal expansion coefficient of 130 × 10 -7 / ° C.
Rewriting the relationship with the gO content gives the curve a in FIG. Therefore, (MgO content, Al 2 O 3 content) in FIG.
Mol%, 0.2 mol%) (5 mol%, 0.2 mol%) (5 mol%, 9.
5 mol%) and a region surrounded by a curve a, the Vickers hardness is 700 or more, the Young's modulus is 170 GPa or more, the relative density of the sintered body is 98% or more, and the thermal expansion coefficient at 100 to 400 ° C. is 13
It is possible to obtain a non-magnetic substrate for a magnetic head of 0 to 150 × 10 -7 / ° C.
【0016】[0016]
【発明の効果】以上説明したように、本発明では、MgxN
i1-xO(0<x<1)にAl2O3を添加することで、その焼結体
の相対密度が飛躍的に向上すると同時に、機械的強度に
優れ高記録密度用磁性膜の熱膨張係数と良く一致した磁
気ヘッド用非磁性基板が得られる。As described above, according to the present invention, Mg x N
By adding Al 2 O 3 to i 1-x O (0 <x <1), the relative density of the sintered body is dramatically improved, and at the same time, the mechanical strength of the magnetic film for high recording density is excellent. A non-magnetic substrate for a magnetic head having a good thermal expansion coefficient can be obtained.
【図1】図1は、ビッカース硬度700以上、ヤング率170
GPa以上、焼結体の相対密度98%以上、100〜400℃に
おける熱膨張係数が130〜150×10-7/℃の磁気ヘッド用
非磁性基板を得ることができるAl2O3含有量とMgO含有量
の組成範囲を示した図である。FIG. 1 is a Vickers hardness of 700 or more and a Young's modulus of 170.
Al 2 O 3 content which can obtain a non-magnetic substrate for a magnetic head having a GPa or more, a relative density of a sintered body of 98% or more, and a thermal expansion coefficient at 100 to 400 ° C. of 130 to 150 × 10 −7 / ° C. It is the figure which showed the composition range of MgO content.
【図2】図2は、Al2O3含有量と熱膨張係数との関係を
示した図であり、□は、MgO含有量は5モル%のとき、○
はMgO含有量は15モル%のとき、■はMgO含有量は20モル
%のとき、●はMgO含有量は25モル%のときを示してい
る。FIG. 2 is a diagram showing the relationship between the Al 2 O 3 content and the coefficient of thermal expansion, and □ indicates that the MgO content was 5 mol%.
Indicates that the MgO content is 15 mol%, ■ indicates that the MgO content is 20 mol%, and ● indicates that the MgO content is 25 mol%.
Claims (2)
%以上26モル%以下、Al2O3を0.2モル%以上9.5モル%
以下含有した磁気ヘッド用非磁性基板であって、その熱
膨張係数が130×10-7/℃以上であることを特徴とする磁
気ヘッド用非磁性基板。1. A basic composition of NiO, to which MgO is contained in an amount of 5 mol% to 26 mol% and Al 2 O 3 is contained in an amount of 0.2 mol% to 9.5 mol%.
A non-magnetic substrate for a magnetic head containing the following, which has a thermal expansion coefficient of 130 × 10 −7 / ° C. or more.
%以上、Al2O3を0.2モル%以上含有し、かつMgO含有量
をx(モル%)、Al2O3含有量をy(モル%)としたとき、Al2
O3含有量yが、 y≦-1.8×10-3x3+0.053x2−0.59x+11.4 であることを特徴とする磁気ヘッド用非磁性基板。2. A basic composition of NiO, containing 5 mol% or more of MgO and 0.2 mol% or more of Al 2 O 3 , and having a MgO content of x (mol%) and an Al 2 O 3 content of When y (mol%), Al 2
A non-magnetic substrate for a magnetic head, wherein the O 3 content y is y ≦ −1.8 × 10 −3 x 3 + 0.053x 2 −0.59x + 11.4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7068978A JPH08241501A (en) | 1995-03-03 | 1995-03-03 | Nonmagnetic substrate for magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7068978A JPH08241501A (en) | 1995-03-03 | 1995-03-03 | Nonmagnetic substrate for magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08241501A true JPH08241501A (en) | 1996-09-17 |
Family
ID=13389276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7068978A Pending JPH08241501A (en) | 1995-03-03 | 1995-03-03 | Nonmagnetic substrate for magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08241501A (en) |
-
1995
- 1995-03-03 JP JP7068978A patent/JPH08241501A/en active Pending
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