JPH08234009A - Color filter and its production - Google Patents

Abstract

PURPOSE: To provide color filters having good quality and to provide an apparatus for producing these color filters. CONSTITUTION: Respective colored pixels 2 of R, G, B are formed in a pattern form on a glass substrate GB, and further, light shielding layers 1 are so formed as to cover the boundary parts of the adjacent colored pixels 2 and to overlap at the ends of the respective adjacent colored pixels 2. Since the light shielding layers 1 are so formed as to overlap on the boundary parts of the respective colored pixels 2, the intrusion of air between the light shielding layers 1 and the colored pixels 2 and the peel up of the colored pixels 2 as with the conventional color filters do not arise. These color filters are produced by an apparatus for production equipped with first to fourth production units. Namely, the colored pixels 2 of the three colors, R, G, B are continuously formed by the first to third production units and thereafter, the light shielding layers 1 are formed by the fourth production unit.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter having a light-shielding layer and colored pixels of different colors having different spectral characteristics on a glass substrate, and a manufacturing apparatus thereof.

[0002]

2. Description of the Related Art Generally, the cross-sectional structure of a color filter is shown in FIG.
In the color filter shown in FIG. 2, after forming the black matrix 1 as a light shielding layer on the glass substrate GB, R (red) and G are provided between each black matrix 1.
Each of the (green) and B (blue) colored pixels 2 is formed in a pattern so as to overlap with the black matrix 1, and a transparent protective film 3 is formed on the colored pixels 2 in a separate process, if necessary. It is manufactured by forming the transparent conductive film 4.

[0003]

When the color filter having the structure described in the prior art is manufactured by the embossing type transfer device described above, as shown in FIG. 13A, the black matrix 1 and the colored pixels 2 are formed. There is a problem that air is mixed in a position where and overlap, and the colored pixel 2 cannot be transferred well, or transmitted light is adversely affected. That is, when the air layer 5 is present as shown in the drawing, a defect occurs in which white stripes and color unevenness are visible. In addition, after transferring the colored pixel 2, there is also a problem that the edge of the colored pixel 2 is curled up as shown in FIG. This is not limited to the transfer method, and the same applies to a color filter in which colored pixels are formed by a photolithography method.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a color filter of high quality and to suitably use it for producing this color filter. The present invention is to provide a manufacturing apparatus.

[0005]

In order to achieve the above object, the color filter of the present invention is a color filter having a light-shielding layer and R, G, B colored pixels on a glass substrate. The R, G, and B colored pixels are formed in a pattern on the substrate, and the light shielding layer is formed so as to cover the boundary portion between the adjacent colored pixels and overlap the end portions of the adjacent colored pixels. It is characterized by being. Here, the "boundary portion" of the adjacent colored pixels is
When the adjacent colored pixels are in contact with each other, the boundary is referred to, and when the adjacent colored pixels have a gap, the gap is referred to. If there is a mixed area in which the boundary between the colored pixels is unclear and the color is gradually changed in a region other than the region used as the filter, the mixed region is referred to.

The color filter manufacturing apparatus of the present invention comprises a first manufacturing unit for forming one of R, G, and B colored pixels on a glass substrate, and a first manufacturing unit. Second manufacturing unit for forming one colored pixel other than the colored pixels on the glass substrate, and a third manufacturing unit for forming colored pixels not formed by the first and second manufacturing units on the glass substrate And a fourth manufacturing unit that forms a light-shielding layer so as to cover the boundary between the adjacent colored pixels and to overlap the end of each adjacent colored pixel.

Then, in order to form the colored pixels and the light-shielding layer at accurate positions on the glass substrate, a detection unit equipped with a detection camera for detecting the alignment mark on the glass substrate,
The manufacturing unit includes a calculation control unit that calculates a position where a colored pixel or a light-shielding layer should be formed based on a signal from a detection camera, and a position adjustment unit that adjusts the position of the substrate based on a calculation result of the calculation control unit. It is good to arrange before.

[0008]

According to the color filter of the present invention having the above-described structure, the R, G, and B colored pixels are formed in a pattern on the glass substrate, and the adjacent colored pixels that cover the boundary between the adjacent colored pixels are adjacent to each other. Since the light-shielding layer is formed so as to overlap the end portion of the pixel, air does not enter between the light-shielding layer and the colored pixel and the colored pixel does not turn up.

Further, in the manufacturing apparatus having the above structure, the colored pixels of three colors are formed by the first to third manufacturing units, and then the light shielding layer is formed by the fourth manufacturing unit.
The light-shielding layer presses the end portion of the colored pixel, and it is possible to avoid the problem of the colored pixel turning up. Then, by positioning the substrate by the position adjusting unit and then forming the colored pixels and the light shielding layer, these can be formed on the substrate with high positional accuracy.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional structural view of a color filter according to the present invention. As shown in the figure, in this color filter, the R, G, and B colored pixels 2 are formed on the glass substrate GB.
Are formed in a pattern, and the black matrix 1 which is a light-shielding layer is formed so as to cover the boundary between the adjacent colored pixels and overlap with the end of each adjacent colored pixel. Then, in a separate step, the transparent protective film 3 is formed on the colored pixels 2, and the transparent conductive film 4 is further formed, whereby the color filter is manufactured. Thus R, G,
By forming the black matrix 1 so as to overlap between the colored pixels 2 of B, air is not mixed in a portion where the black matrix 1 and the colored pixel 2 overlap, unlike a conventional color filter.

Here, the protective film 3 formed in a separate step has functions such as smoothing the surface of the transparent conductive film 4 and improving the chemical resistance of the black matrix 1 and the colored pixels 2. . Therefore, if there is little unevenness between the colored pixels 2 and the black matrix 1 and the chemical resistance and heat resistance of these are good, and the heat when forming the transparent conductive film 4 is not a problem, the protective film 3 is formed. Alternatively, the transparent conductive film 4 may be formed on the black matrix 1 and the colored pixels 2. This is not limited to the transfer method described below, and the same applies to a color filter in which the colored pixel 2 is formed by a photolithography method.

FIG. 2 is a block diagram showing an example of a manufacturing apparatus for manufacturing the above color filter, and the manufacturing process will be described below with reference to this.

(1) The glass substrate GB is loaded from the left side of the figure, and first, the first position adjusting section D ₁ roughly aligns the substrate GB. Next, a pattern of blue (B) colored pixels is formed on the substrate GB by the manufacturing unit U ₁ for forming colored pixels of the first color, and alignment marks are formed in regions other than the pattern portion. Here, the first position adjusting part D ₁ is of a fixed type so that colored pixels can be formed within a certain range of the substrate GB. That is, the substrate GB is aligned only by the transport roller and the stopper. However, it is more accurate to position the substrates GB one by one by the position adjusting unit described later. (2) The substrate GB on which the B colored pixel and the alignment mark are formed is conveyed to the second position adjusting section D ₂ , where the alignment is performed using the alignment mark. Specifically, based on the signal from the detection camera 40,
The arithmetic control unit 43 determines the position where the second colored pixel is to be formed.
And the second position adjusting unit D ₂ adjusts the position of the substrate GB based on the calculation result. Next, in the second manufacturing unit U ₂ for forming the second colored pixel, the substrate GB is processed.
Then, a pattern of red (R) colored pixels is formed. (3) Subsequently, the substrate GB is aligned in the same manner as described above by the third position adjusting unit D ₃ , and then the substrate GB is formed by the third manufacturing unit U ₃ that forms colored pixels of the third color. Then, a pattern of colored pixels of green (G) is formed. (4) Next, after the substrate GB is aligned in the same manner as described above in the fourth position adjusting section D _4, the three colors already formed by the _fourth manufacturing unit U ₄ that forms the light shielding layer. The pattern of the black matrix (BM) as the light-shielding layer is formed so as to cover the boundary between the adjacent colored pixels and overlap with the end of the adjacent colored pixel. (5) After forming the R, G, and B colored pixels and the light-shielding layer on the substrate GB, it is confirmed whether these are formed correctly. Specifically, the substrate GB is transported to the inspection table 44,
A visual inspection is performed by an inspection camera 45 installed above, and defective products are discharged by a reject device 46. An inspection device similar to this may be arranged after the third manufacturing unit U ₃ to inspect the formation state of the colored pixels of three colors. Here, when inspecting a state in which colored pixels of three colors are formed, the image data obtained by the CCD camera shows unevenness due to the colored pixels of different hues and the light shielding layer formed in a pattern. Since it shows a certain complicated signal waveform, an image processing method different from the case of inspecting a transfer film described later is adopted.

As described above, since the position adjusting section for adjusting the position of the substrate GB is provided in front of each of the manufacturing units U _{1 to} U ₄ , the respective colored pixels are accurately arranged so that the adjacent colored pixels are almost in contact with each other. It can be formed at various positions. Even if a gap is formed between the colored pixels, the light-shielding layer is formed on the gap, so that the gap does not adversely affect the performance of the color filter.

FIG. 3 is a schematic structural view showing the embossing / transferring device, which is an example of the above manufacturing unit, together with a position adjusting section.

As the transfer film 10, a support film such as a PET film on which a coloring material is formed is used. It is advisable to use a thin support film having a thickness of 3 to 10 μm so that the second and subsequent colorants can be easily transferred. When a cushion material layer, a release layer, etc. are laminated on the support film, the thickness may be 100 to 300 μm,
Here, in order to suck with a transfer roller described later, 3 to 10 μm
A thickness of about m is suitable. Then, a coloring material having a thickness of about 3 μm is formed on the support film.
The thickness of the coloring material may be changed according to the thickness of the colored pixel of the color filter to be formed, but it is generally about 1 to 5 μm. The transfer film 10 is set in the supply section A as a winding 11 made by winding a long one. Therefore, in this example, a peeling layer capable of peeling the colorant only when heated was formed on one surface of the support film to form the colorant thereon, and a peeling layer to which the colorant did not adhere was formed on the opposite surface. It is preferable to use the transfer film 10 having a layer structure. That is, even if the transfer film 10 is wound into a roll, the coloring material does not adhere.
In the illustrated supply unit A, the number of windings 11 is one, but if the production efficiency is further improved, a plurality of windings 11 may be set, and the transfer film 10 can be automatically connected. Paster may be used.

The transfer film 10 is unwound from the winding section 11 of the supply section A by being wound in the discharging section E which will be described later.
The transfer film 10 from the supply unit A reaches the inspection unit B via the first dancer roller 12 for tension control. A weight of 10 to 30 kg is set for the dancer roller 12, and the tension of the transfer film 10 is kept constant by changing the position of the dancer roller 12. That is, when the transfer film 10 is strongly pulled, the dancer roller 12 moves upward so as to reduce the tension and reach the set value. On the contrary, when the transfer film 10 is loosened, the dancer roller 12 increases the tension and moves downward to reach the set value.

In the inspection section B, a CCD camera 21 for inputting the image of the transfer film 10 is set, and it is possible to inspect for color unevenness, streaks, or dust with the coloring material. As the structure of the optical system in the inspection section B, the CCD camera 21 with the transfer film 10 as a boundary is used.
The diffuser plate 22 is set on the opposite side of the diffuser plate 22 and the diffuser plate 22 is provided from both sides of the diffuser plate 22 by using a three-wavelength light source 23 (a white fluorescent lamp or a halogen lamp) having peaks for R, G and B colors of the color filter. The means to irradiate the. In this case, the use of the three-wavelength light source 23 provides better color development for R, G, and B colors and better inspection performance. Since the light is diffused by the diffusion plate 22 and illuminates the transfer film 10 uniformly,
This image is input from the CCD camera 21 and a determination unit (not shown) determines a good product or a defective product.

An example of the judgment image at this time is shown in FIGS. 4 and 5. The horizontal axis represents the width direction of the transfer film 10, and the vertical axis represents the color density of the transfer film 10. The non-defective product and the defective product are determined by comparing the allowable value ± a prepared for each color of R, G, B of the color filter, the reference color density level m, and the input data from the CCD camera 21. in this case,
Using a digital switch, the allowable value ± a is set to ± a (r), ± a (g), ± a (b) for each color of R, G, B, and the reference color density level m is m (r), m. (G) and m (b) are set respectively. Here, the reference color density level m may be stored for each color by averaging the image input data by pressing the reference value input switch when the operator determines that the product is a non-defective product.

FIG. 4 is an example showing the case of a non-defective product, and the data input as an image is within the allowable value ± a centering on the set reference color density level m. FIG. 5 shows an example of a defective product, in which the image input data deviates from the allowable value ± a centering on the set reference color density level m. The steep protrusion x on the left side is a defect due to dust, and the gentle convex portion y on the right side is unevenness in the density of the coloring material.

When the transfer film 10 is judged to be non-defective by the inspection section B, the transfer film 10 is moved to the transfer section C via the second dancer roller 13 so as to be transferred to the glass substrate GB for the color filter. To do. Here, generally, when the transfer film 10 is heated, it expands and it becomes difficult to adjust the tension, and therefore the transfer film 10 is not heated and is kept at room temperature. However, if there is no problem with the elongation of the transfer film 10 such as when the support film is thick, a film heating unit may be provided for preheating to facilitate transfer. When preheating, the heating temperature of the transfer film 10 is preferably about 20 to 50 ° C. If heated too much, the film will stretch, making it difficult to control tension. Along with the movement of the transfer film 10, the glass substrate GB is supplied to the transfer section C via the position adjusting section D. The glass substrate GB is also preheated to transfer part C.
You may move to. If the inspection film B determines that the transfer film 10 is defective, the defective position is detected by a film meter number counter installed on one of the rear rollers, and the defective position is recorded by a controller (not shown). . Then, based on the stored defective position data, the defective transfer film portion is not transferred and is wound around the discharge portion E.

FIG. 6 is a plan view showing the position adjusting section D arranged in front of the manufacturing unit, and FIG. 7 is a perspective view showing the position adjusting mechanism of the position adjusting section D.

As shown in FIG. 6, the "left" -shaped swing plate 30, which is the first positioning member in the left-right direction, swings in the direction orthogonal to the direction of travel of the substrate GB. The position of the GB is roughly adjusted. The substrate is positioned in the left-right direction by the inclined conveyance roller group that is the second positioning member. The conveyance rollers 31 facing each other in this conveyance roller group are gradually arranged with a space therebetween so that the substrate GB is adjusted to a predetermined position. The substrate GB whose position is adjusted in the left-right direction in this way is temporarily stopped by the stopper 32 that is a positioning member in the forward direction that rises after the previous substrate GB has passed, and at the same time, the rotation of the transport roller 31 is also temporarily stopped. At this point, the substrate GB is transferred to the transport roller 31.
The carrying roller 31 is held by the roller mounting table 33 by a holding means (not shown).

As shown in FIGS. 3 and 7, the roller mounting table 33 is held by a rotary table 34, the rotary table 34 is held by a Y-direction moving member 35, and the Y-direction moving member 35 is a Y-direction guide member 36. The Y-direction guide member 36 is held by the X-direction moving member 37, the X-direction moving member 37 is held by the X-direction guiding member 38, and the X-direction guiding member 38 is held by the base 3.
It is held at 9. As a result, the X of the roller mount 33 is
The position of the substrate GB is adjusted by moving and rotating in the −Y direction.

The X-direction moving member 37 is moved in the left-right direction along the X-direction guide member 38 in accordance with the amount of positional deviation calculated by the detection signal of the position detection camera 40, and along the Y-direction guide member 36. The Y-direction moving member 35 in the front-back direction. When rotation is necessary, the rotary table 34 is rotated to change the angle of the substrate GB in the traveling direction. By doing so, the calculated positional deviation amount is set to "0" or within the allowable range.

In the present embodiment, the substrate GB is provided with "+" type alignment marks on both sides of the pattern forming portion, with the traveling direction thereof as the head. Further, the glass plate 41 having the "□" type camera-side alignment mark formed thereon is positioned on the "+" type alignment mark of the substrate GB at the position where the substrate GB is stopped. That is, when viewed from the detection camera 40, as shown in FIG. 8, the “□” type alignment mark MA and the “+” type alignment mark MB are shown.
Are overlapped. After the detection camera 40 detects both marks MA and MB, the arithmetic control unit calculates the lateral positional deviation amount on the α line and the longitudinal positional deviation amount on the β line. Then, when the allowable values of the positional deviation amount are ± Δa and ± Δb, respectively, a ₁ ≦ a ₂ ± Δa, b
The position of the substrate GB is adjusted based on the signal of the arithmetic control unit so that ₁ ≦ b ₂ ± Δb.

Here, the alignment mark M on the substrate GB is
As an arrangement example of B, there are three types of configurations shown in FIGS. 9A, 9B, and 9C, but other configurations may be used. Anyway, in each of the transfer units for R, G, and B, the position of the substrate GB is adjusted by making the alignment mark “□” on the camera side correspond to the alignment mark “+” for each of R, G, and B on the substrate GB. In this manner, by sequentially transferring the R, G, and B colors, colored pixels corresponding to the color filter pattern can be sequentially formed on the substrate GB. in this case,
As shown in FIG. 9 on both sides of the pattern forming portion provided in the center of the substrate GB.
By arranging the alignment mark group as shown in (a) in a “C” shape, it is convenient to visually confirm the traveling direction of the substrate GB. In addition, by arranging in a C-shape in this way, the distance between the two detection cameras 40 becomes R,
Since it will be expanded for each G and B, it is possible to prevent accidental reading of another alignment mark.

After the position adjustment of the substrate GB is completed as described above, the first timing signal by the rotary encoder synchronized with the rotation of the transfer roller 51 in the transfer portion C and the timing sensor 4 for detecting the edge of the substrate GB.
2 (see FIG. 6) and the second timing signal are input to the arithmetic and control unit, and when the transfer roller 51 and the substrate GB are subjected to the overlapping tamping, the stopper 32 is lowered and the substrate GB is transferred to the transfer unit C. Start moving.

The transfer portion C is composed of a transfer roller 51 and a pressing roller 52 disposed below the transfer roller 51. Before and after the pressing roller 52, there are conveying rollers 53 at regular intervals so that the substrate GB can be smoothly conveyed, and each roller 53 is connected by a timing mechanism using a timing belt and further connected by a driving mechanism using a motor. By doing so, each roller 53 is driven while being synchronized,
When the stopper 32 of the position adjusting section D descends, the substrate GB is conveyed to the transfer section C at a constant timing. Note that the side surface of the transport roller 53 is not in contact with the side surface of the substrate GB so as not to shift the already positioned substrate GB. Further, the pressing roller 52 has a built-in heating means. Thereby, the transfer film 10 and the substrate GB are pressed between the transfer roller 51 and the pressing roller 52 while the substrate GB is heated from the lower side and kept at a temperature (high temperature of 80 to 170 ° C.) suitable for transfer, so that the transfer process is performed. I do.

FIG. 10 shows a transfer roller in the transfer portion, (a) is a front view thereof, and (b) is a section XX of (a).
It is sectional drawing.

The transfer roller 51 is a cylindrical roller portion 53.
And a support member 54 connected to the support member 54.
The roller portion 53 is rotated by rotating the roller 4. Convex portions 55 are provided on the outer peripheral surface of the roller portion 53 in the pattern illustrated in FIG. The pattern illustrated in FIG. 11 is a pattern for “R” in the mosaic type. The width of the protrusion 55 is about 100 μm and the interval is 30
It is about 0 μm. The height of the convex portion 55 is 10 in this embodiment.
The thickness is about 50 μm, but may be about 300 μm, for example, depending on the thickness of the transfer film 10. Further, the support member 54 is provided with a drive mechanism for vertical movement (not shown) so that the entire transfer roller 51 can be raised and lowered. Of course, when the substrate GB and the roller portion 53 overlap, the convex portion 55 provided on the roller portion 53 pushes the transfer film 10 so that the substrate G corresponds to the convex portion 55.
Colored pixels can be formed on B.

The inside of the roller portion 53 is connected to the suction passage 56, and one of the supporting members 54 is supported by the suction passage 56 via a bearing 54a. The air in the roller portion 53 is discharged to the outside via the suction passage 56, and the air passage at this time is the suction hole 57, the suction chamber 58, and the suction passage 56 in this order. Then, a mask member 59 is provided above the suction chamber 58 so that suction is not performed on the upper side of the roller portion 53.
Is provided to close the suction hole 57 from the inside of the roller portion 53. Although the mask member 59 does not rotate even if the roller portion 53 rotates, the center of the mask member 59 is connected to the suction passage 56, so that the air is discharged therethrough. By adopting this suction means, at the time of transfer, the suction holes 57 between the convex portions 55 suck the transfer film 10 and suck the transfer film 10 to the roller portion 53. When the transfer film 10 is sucked by the suction holes 57 in this way, the portion corresponding to the convex portion 55 is in a state of protruding to the substrate GB side, so that high quality transfer is performed.

Returning to FIG. 3, after the transfer process is completed at the transfer section C, the transferred transfer film 10 is taken up by the take-up roll 62 of the discharge section E via the third dancer roller 61, and the substrate GB is formed with colored pixels and discharged to the next step.

[0035]

Since the present invention is configured as described above, it has the following effects.

In the color filter according to the first aspect, the light-shielding layer is formed so as to overlap the boundary portion of each colored pixel. Therefore, as in the conventional color filter, there is air between the light-shielding layer and the colored pixel. It is possible to provide a high quality product without the occurrence of cracks or the colored pixels being turned up. Even if air enters between the colored pixels, it does not appear as white stripes or color unevenness due to the light-shielding layer on the air.

According to the manufacturing apparatus of the second aspect, the first to third aspects are provided.
Since the light-shielding layer is formed by the fourth manufacturing unit after the three-colored pixels are formed by the manufacturing unit described above, the light-shielding layer presses the end portion of the colored pixel, thereby avoiding the problem that the colored pixel is turned up. As a result, high quality color filters can be efficiently produced.

In the manufacturing apparatus according to the third aspect, the colored pixels and the light-shielding layer are formed after the substrate is aligned by the position adjusting unit, so that these can be formed on the substrate with high positional accuracy. it can.

[Brief description of drawings]

FIG. 1 is a sectional structural view of a color filter according to the present invention.

FIG. 2 is a block diagram showing an example of a manufacturing apparatus for manufacturing the color filter of FIG.

FIG. 3 is a schematic configuration diagram showing an embossing transfer device, which is an example of a manufacturing unit, together with a position adjusting section.

FIG. 4 is a graph showing an example of a determination image in the inspection unit of the transfer device.

FIG. 5 is a graph showing an example of a determination image in the inspection unit of the transfer device.

FIG. 6 is a plan view of a position adjusting unit.

FIG. 7 is a perspective view showing a position adjusting mechanism of a position adjusting unit.

FIG. 8 is an explanatory diagram showing a state in which alignment marks on the substrate side and the camera side are overlapped with a detection graph.

FIG. 9 is an explanatory diagram showing an arrangement example of alignment marks on the substrate side.

FIG. 10 shows a transfer roller in a transfer section,
(A) is the front view, (b) is XX sectional drawing of (a).

FIG. 11 is a pattern diagram showing a convex portion formed on the outer peripheral surface of the transfer roller.

FIG. 12 is a sectional structural view of a conventional color filter.

FIG. 13 is an explanatory diagram for explaining a defect of a conventional color filter.

[Explanation of symbols]

GB glass substrate 1 light-shielding layer 2 colored pixel 3 protective layer 4 transparent conductive film U ₁ first manufacturing unit U ₂ second manufacturing unit U ₃ third manufacturing unit U ₄ fourth manufacturing unit 40 detection camera 43 arithmetic control Part D (D ₁ , D ₂ , D ₃ , D ₄ ) Position adjustment part

Claims (3)

[Claims] 1. A color filter having a light-shielding layer and R, G, B colored pixels on a glass substrate, wherein R, G, B colored pixels are formed in a pattern on a glass substrate. Further, the color filter is characterized in that the light shielding layer is formed so as to cover a boundary portion between adjacent colored pixels and to overlap an end portion of each adjacent colored pixel. 2. A first manufacturing unit for forming one of R, G, B colored pixels on a glass substrate, and one colored pixel other than the colored pixel formed by the first manufacturing unit. A second manufacturing unit formed on the glass substrate, and a first manufacturing unit
And a third manufacturing unit for forming colored pixels not formed in the second manufacturing unit on the glass substrate, so as to cover the boundary between the adjacent colored pixels and overlap with the end of each adjacent colored pixel. An apparatus for manufacturing a color filter, comprising: a fourth manufacturing unit for forming a light-shielding layer. 3. A detection section having a detection camera for detecting an alignment mark on a glass substrate, an arithmetic control section for calculating a position where a colored pixel or a light shielding layer is to be formed based on a signal from the detection camera, and an arithmetic operation. 3. The color filter manufacturing apparatus according to claim 2, wherein a position adjusting unit that adjusts the position of the substrate based on the calculation result of the control unit is arranged in front of the manufacturing unit.