JPH0823085A - Solid state image pickup device - Google Patents

Solid state image pickup device

Info

Publication number
JPH0823085A
JPH0823085A JP6157201A JP15720194A JPH0823085A JP H0823085 A JPH0823085 A JP H0823085A JP 6157201 A JP6157201 A JP 6157201A JP 15720194 A JP15720194 A JP 15720194A JP H0823085 A JPH0823085 A JP H0823085A
Authority
JP
Japan
Prior art keywords
window
hygroscopic
resin film
package
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6157201A
Other languages
Japanese (ja)
Inventor
Takashi Wakabayashi
巍 若林
Tsutomu Okuno
努 奥野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP6157201A priority Critical patent/JPH0823085A/en
Publication of JPH0823085A publication Critical patent/JPH0823085A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Abstract

PURPOSE:To prevent a light-permeable window sealed in a package with adhesives from dewing on its inner surface if moisture enters a chip mounting space by forming a transparent and hygroscopic resin film on this surface. CONSTITUTION:A resin-made hollow package 2 houses a CCD image chip 3 sealed with a glass window 4. A transparent and hygroscopic resin film 6 is formed on the inner surface of the window 4 and preferably made of a hygroscopic metacrylate polymer or copolymer thereof. When the title device is left long in a high-humidity atmosphere enough to penetrate the moisture into a space round the chip and rapidly cooled to rise the relative humidity in the space with reduction of the temp., the resin film on the inner surface of the window quickly absorbs the moisture to thereby lower the relative humidity and prevent the window inner surface and chip surface from dewing.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、CCDイメージチッ
プを用いた固体撮像装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image pickup device using a CCD image chip.

【0002】[0002]

【従来の技術】従来、この種の固体撮像装置は、セラミ
ック中空パッケージ内にCCDイメージチップを設置
し、ガラスよりなる窓材により接着封止されている。
2. Description of the Related Art Conventionally, in this type of solid-state image pickup device, a CCD image chip is installed in a ceramic hollow package and is sealed by a window material made of glass.

【0003】[0003]

【発明が解決しようとする課題】従来のセラミック製パ
ッケージは高価なため、より安価な樹脂製パッケージが
望まれている。しかし樹脂製パッケージからなる固体撮
像装置では、高湿度環境に長時間放置すると、樹脂製パ
ッケージを透してチップ設置空間内に湿気が浸入し、環
境湿度に近い湿度に達する。このような吸湿状態で装置
を低温環境に移動すると、空間内部の相対湿度が飽和状
態になり、窓部の内面に結露し、不具合が発生するとい
う問題がある。
Since the conventional ceramic package is expensive, a cheaper resin package is desired. However, in a solid-state imaging device including a resin package, when left in a high humidity environment for a long time, moisture penetrates through the resin package into the chip installation space and reaches a humidity close to the ambient humidity. When the apparatus is moved to a low temperature environment in such a moisture absorption state, there is a problem that relative humidity inside the space becomes saturated and dew condensation occurs on the inner surface of the window, causing a problem.

【0004】この発明の目的は、安価で、しかもチップ
設置空間に湿気が浸入しても、窓部内面に結露が発生し
ない固体撮像装置を提供することである。
An object of the present invention is to provide a solid-state image pickup device which is inexpensive and which does not cause dew condensation on the inner surface of the window even when moisture enters the chip installation space.

【0005】[0005]

【課題を解決するための手段】この発明の固体撮像装置
は、CCDイメージチップを収納した中空樹脂パッケー
ジと、このパッケージに接着封止した光透過性窓部と、
この窓部の内面に塗布した透明でかつ吸湿性を有した樹
脂皮膜とを備えたものである。
A solid-state image pickup device according to the present invention comprises a hollow resin package accommodating a CCD image chip, and a light-transmissive window portion adhesively sealed in the package.
A transparent resin film having a hygroscopic property applied to the inner surface of the window portion is provided.

【0006】透明でかつ吸湿性を有した樹脂皮膜は、吸
湿性アクリル系重合体あるいは吸湿性メタアクリル系重
合体またはそれらを主成分とし疎水性モノマーを共重合
させた吸湿性樹脂またはマルトトリオース化合物からな
る。
The transparent and hygroscopic resin film is a hygroscopic acrylic polymer or hygroscopic methacrylic polymer, or a hygroscopic resin or maltotriose having a hydrophobic monomer as a main component and copolymerized with them. Composed of compounds.

【0007】光透過性窓部は、ガラスあるいは有機高分
子体、またはそれらの複合系体からなる。
The light transmitting window portion is made of glass, an organic polymer, or a composite system thereof.

【0008】[0008]

【作用】この発明の構成によれば、パッケージが樹脂製
であるため、安価である。また、パッケージを光透過性
窓材で接着封止し、その窓部内面に透明でかつ吸湿性を
有した樹脂皮膜を塗布形成したので、樹脂皮膜が湿気を
吸着し、窓部内面およびチップ表面への結露が防止でき
る。
According to the structure of the present invention, since the package is made of resin, it is inexpensive. In addition, the package is adhesively sealed with a light-transmissive window material, and a transparent and hygroscopic resin film is applied and formed on the inner surface of the window, so the resin film absorbs moisture, and the inner surface of the window and the chip surface Condensation can be prevented.

【0009】[0009]

【実施例】この発明の実施例1の固体撮像装置について
述べる。
Embodiment A solid-state image pickup device according to Embodiment 1 of the present invention will be described.

【0010】図1はこの実施例1の断面図である。図に
おいて、2は樹脂からなる中空パッケージ、3はCCD
イメージチップ、4はパッケージ2を封止するガラスか
らなる窓部、5はリード、6は窓部4の内面に塗布した
透明でかつ吸湿性を有した樹脂皮膜である。このパッケ
ージの中空部の容積は約0.04cm3である。
FIG. 1 is a sectional view of the first embodiment. In the figure, 2 is a hollow package made of resin, 3 is a CCD
Image chip 4, a window portion made of glass for sealing the package 2, 5 leads, and 6 a transparent and hygroscopic resin film applied to the inner surface of the window portion 4. The hollow volume of this package is about 0.04 cm 3 .

【0011】なお、パッケージ2は、半導体パッケージ
用のトランスファーモルド用封止樹脂にて構成されてい
る。
The package 2 is made of transfer mold sealing resin for semiconductor packages.

【0012】また、吸湿性樹脂皮膜6は、2−ヒドロキ
シエチルメタアクリレート、テトラヒドロフルフリルア
クリレート、メタアクリル酸グリシジルの各モル比が1
7:5:3で合成された共重合体からなり、5μmの厚
さに塗布されている。表1に、この材料の20℃での飽
和吸湿量を示す。
Further, the hygroscopic resin film 6 has a molar ratio of 2-hydroxyethyl methacrylate, tetrahydrofurfuryl acrylate, and glycidyl methacrylate of 1 each.
It consists of a copolymer synthesized at 7: 5: 3 and is applied to a thickness of 5 μm. Table 1 shows the saturated moisture absorption of this material at 20 ° C.

【0013】次にこの発明の実施例2の固体撮像装置に
ついて述べる。この実施例2は、図1に示した例と同じ
構造であり、吸湿性樹脂皮膜6がマルトトリオースの重
合体(プルラン:林原(株)製)からなり、1μmの厚
さに塗布されている。この材料の吸湿量を表1に示す。
Next, a solid-state image pickup device according to a second embodiment of the present invention will be described. This Example 2 has the same structure as the example shown in FIG. 1, and the hygroscopic resin film 6 is made of a polymer of maltotriose (Pullulan: manufactured by Hayashibara Co., Ltd.) and is applied to a thickness of 1 μm. There is. The moisture absorption of this material is shown in Table 1.

【0014】また窓部4がノルボルネン系樹脂のゼオネ
ックス(日本ゼオン(株)製品)からなる。
The window 4 is made of norbornene resin ZEONEX (product of Nippon Zeon Co., Ltd.).

【0015】[0015]

【表1】 [Table 1]

【0016】上述の実施例の固体撮像装置と同じ構造
で、吸湿性樹脂皮膜のみを設けていない固体撮像装置を
比較例とした。
As a comparative example, a solid-state image pickup device having the same structure as the solid-state image pickup device of the above-mentioned embodiment but not provided with a hygroscopic resin film was used.

【0017】上記実施例および比較例の固体撮像装置
を、温度85℃、相対湿度85%の環境に100時間放
置したのち、0℃,10℃,20℃の温度の各環境に急
速に移動し、窓部4内面への結露の状況を観測比較し
た。
The solid-state image pickup devices of the above-mentioned examples and comparative examples were left in an environment of temperature 85 ° C. and relative humidity of 85% for 100 hours, and then rapidly moved to each environment of temperature 0 ° C., 10 ° C., 20 ° C. The conditions of condensation on the inner surface of the window 4 were observed and compared.

【0018】比較例では全温度の環境で結露が発生した
が、実施例の装置では全温度環境で結露は観測されず、
また動作上の不具合も発生しなかった。
In the comparative example, dew condensation occurred in the environment of all temperatures, but in the apparatus of the example, no dew condensation was observed in the environment of all temperatures,
In addition, no operational problems occurred.

【0019】また上記実施例および比較例の固体撮象装
置を、温度40℃、相対湿度90%の環境に1000時
間放置したのち、0℃および23℃の温度の環境に急速
に移動し、窓部4内面への結露の状況を観測比較した。
The solid-state imaging devices of the above-mentioned examples and comparative examples were left in an environment of a temperature of 40 ° C. and a relative humidity of 90% for 1000 hours, and then rapidly moved to an environment of 0 ° C. and 23 ° C. The situation of dew condensation on the inner surface of Part 4 was observed and compared.

【0020】比較例では両環境とも結露が発生したが、
実施例の装置では両環境とも結露は観測されなかった。
また動作上の不具合も発生しなかった。
In the comparative example, dew condensation occurred in both environments,
No condensation was observed in the devices of the examples in both environments.
In addition, no operational problems occurred.

【0021】なお、中空樹脂パッケージ2は、半導体用
封止樹脂に限定されることはなく、熱硬化性および熱可
塑性樹脂などの成形材料が広く適用できる。
The hollow resin package 2 is not limited to the semiconductor encapsulation resin, and molding materials such as thermosetting and thermoplastic resins can be widely applied.

【0022】また、吸湿性樹脂皮膜6は実施例の材料に
限定されることはなく、光透過率が優れ、吸湿量が相対
湿度50%で2.0重量%以上であり、かつ相対湿度9
5%での吸湿量が相対湿度50%での吸湿量の2.5倍
以上であり、また環境の相対湿度の変化にすばやく対応
し吸脱湿する材料が好ましく適用できる。
Further, the hygroscopic resin film 6 is not limited to the material of the embodiment, and has an excellent light transmittance, a moisture absorption amount of not less than 2.0% by weight at a relative humidity of 50%, and a relative humidity of 9%.
A material having a moisture absorption amount at 5% of 2.5 times or more the moisture absorption amount at a relative humidity of 50%, and capable of quickly absorbing and dehumidifying in response to changes in the relative humidity of the environment can be preferably applied.

【0023】樹脂皮膜の厚さはパッケージ中空部の容積
と樹脂の吸湿特性から適度に決められる。
The thickness of the resin film is appropriately determined based on the volume of the package hollow portion and the hygroscopic property of the resin.

【0024】また窓部4は実施例の材料に限定されるこ
となく、アクリル樹脂やポリカーボネート等の透明プラ
スチック材料や透明プラスチック材料の表面にガラスを
複合した材料など広く適用できる。
Further, the window portion 4 is not limited to the material of the embodiment, but can be widely applied to a transparent plastic material such as acrylic resin or polycarbonate, or a material in which glass is compounded on the surface of the transparent plastic material.

【0025】また、パッケージに光透過性窓部を接着封
止し、窓部の内面に透明でかつ吸湿性を有した樹脂皮膜
を塗布したので、装置が高湿度雰囲気に長時間放置さ
れ、チップ周辺空間内に湿気が浸入した後に急激に冷却
され、温度低下に伴って空間内の相対湿度が上昇する
と、窓部の内面に設けられた吸湿性の樹脂皮膜が湿気を
すばやく吸着し、相対湿度を低下させて、窓部内面およ
びチップ表面への結露を防止する。したがって、セラミ
ックパッケージの固体撮像装置と同様の高信頼性を有す
る。
Further, since the light-transmissive window portion is adhered and sealed to the package and the transparent and hygroscopic resin film is applied to the inner surface of the window portion, the device is left in a high humidity atmosphere for a long time, When moisture enters the surrounding space and is rapidly cooled, and the relative humidity in the space rises as the temperature decreases, the hygroscopic resin film on the inner surface of the window quickly adsorbs the moisture, and the relative humidity increases. To prevent condensation on the inner surface of the window and the surface of the chip. Therefore, it has the same high reliability as the solid-state imaging device of the ceramic package.

【0026】[0026]

【発明の効果】この発明の固体撮像装置によれば、パッ
ケージが樹脂製であるため、安価である。
According to the solid-state image pickup device of the present invention, since the package is made of resin, it is inexpensive.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の固体撮像装置の断面図FIG. 1 is a sectional view of a solid-state imaging device according to the present invention.

【符号の説明】[Explanation of symbols]

1 固体撮像装置 2 中空樹脂パッケージ 3 CCDイメージチップ 4 光透過性窓部 6 吸湿性樹脂皮膜 1 Solid-state imaging device 2 Hollow resin package 3 CCD image chip 4 Light transmissive window 6 Hygroscopic resin film

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 CCDイメージチップを収納した中空樹
脂パッケージと、前記パッケージに接着封止した光透過
性窓部と、前記光透過性窓部の内面に形成した透明でか
つ吸湿性を有した樹脂皮膜とを備えた固体撮像装置。
1. A hollow resin package accommodating a CCD image chip, a light-transmissive window part sealed in the package, and a transparent and hygroscopic resin formed on the inner surface of the light-transmissive window part. A solid-state imaging device including a film.
【請求項2】 前記樹脂皮膜が、吸湿性アクリレートあ
るいは吸湿性メタアクリレート重合体もしくはそれらを
主成分とする共重合体からなることを特徴とする請求項
1記載の固体撮像装置。
2. The solid-state imaging device according to claim 1, wherein the resin film is made of a hygroscopic acrylate, a hygroscopic methacrylate polymer, or a copolymer containing them as a main component.
【請求項3】 前記樹脂皮膜が、マルトトリオース化合
物からなることを特徴とする請求項1記載の固体撮像装
置。
3. The solid-state imaging device according to claim 1, wherein the resin film is made of a maltotriose compound.
【請求項4】 前記光透過性窓部がガラスもしくは有機
高分子体からなることを特徴とする請求項1記載の固体
撮象装置。
4. The solid-state imaging device according to claim 1, wherein the light transmissive window is made of glass or an organic polymer.
JP6157201A 1994-07-08 1994-07-08 Solid state image pickup device Pending JPH0823085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6157201A JPH0823085A (en) 1994-07-08 1994-07-08 Solid state image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6157201A JPH0823085A (en) 1994-07-08 1994-07-08 Solid state image pickup device

Publications (1)

Publication Number Publication Date
JPH0823085A true JPH0823085A (en) 1996-01-23

Family

ID=15644419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6157201A Pending JPH0823085A (en) 1994-07-08 1994-07-08 Solid state image pickup device

Country Status (1)

Country Link
JP (1) JPH0823085A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007019153A (en) * 2005-07-06 2007-01-25 Citizen Electronics Co Ltd Optical link device
US7371431B2 (en) * 2000-04-04 2008-05-13 Schott Ag Method for producing small, sheet glass plates and larger sheet glass plates as semifinished products for producing the former
CN100397664C (en) * 2003-06-05 2008-06-25 三洋电机株式会社 Optical semiconductor device and method of manufacturing same
JP2011091436A (en) * 2011-01-11 2011-05-06 Fujitsu Ltd Packaged device
CN112414020A (en) * 2019-08-23 2021-02-26 爱斯佩克株式会社 Environmental test device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7371431B2 (en) * 2000-04-04 2008-05-13 Schott Ag Method for producing small, sheet glass plates and larger sheet glass plates as semifinished products for producing the former
CN100397664C (en) * 2003-06-05 2008-06-25 三洋电机株式会社 Optical semiconductor device and method of manufacturing same
JP2007019153A (en) * 2005-07-06 2007-01-25 Citizen Electronics Co Ltd Optical link device
JP2011091436A (en) * 2011-01-11 2011-05-06 Fujitsu Ltd Packaged device
CN112414020A (en) * 2019-08-23 2021-02-26 爱斯佩克株式会社 Environmental test device

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