JPH0822782A - Sheet frit, vacuum vessel sealing method and manufacture of image display device - Google Patents

Abstract

PURPOSE:To provide a method by which sealing can be reliably performed with excellent productivity in the case of manufacturing a large vacuum vessel, particularly, a plate type image display device, and a sheet frit suitable for this method. CONSTITUTION:A sheet frit by temporarily baking frit glass after it is molded into a sheet-like small piece is used as a sealing material. Engaging parts, that is, step difference parts 101a and 104a or groove parts 102a and slant face parts 105a and 106a are arranged on sheet frits 101 to 106. Plural sheet frits are arranged in a sealing part so that the engaging parts engage with each other, and sealing is performed by heating. When paper strip-shaped sheet frits having no engaging part are used, the sheet frits are arranged by two or more layers or by two or more rows in the sealing part so that sheet frit end parts are dislocated from each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a method for sealing a vacuum container,
In particular, the present invention relates to a sealing / manufacturing method at the time of manufacturing an image display device that displays an image using an electron beam, and a sheet frit made of frit glass used for this sealing.

[0002]

2. Description of the Related Art A cathode ray tube (CRT) display has been put into practical use as an image display device having a wide viewing angle, easy colorization, and high brightness. However, with the recent progress in information processing by computers and high image quality in television broadcasting, the need for a high-definition, large-screen, flat-panel image display device is rapidly increasing.

Therefore, several image display devices having an electron beam acceleration type and a flat plate shape have been proposed, taking advantage of the advantages of the conventional CRT display. For example
In the 56-28445 publication, a large number of electron sources are arranged on a plane,
An electron beam is extracted from these electron sources, controlled by a control electrode group provided with a large number of holes corresponding to the phosphor pixels, and accelerated to irradiate a flat phosphor screen to emit light from a desired phosphor pixel. Image display devices have been disclosed.

Two types of electron sources are known: an electron source and a cold cathode electron source. Although the thermionic source has been used for a long time, it is not suitable for applications such as a large number arranged on a flat plate in terms of reliability, life, heat generation, and power consumption. Therefore, as the electron source in the flat panel type image display device, a cold cathode type is attracting attention. Cold cathode electron sources include field emission type (hereinafter abbreviated as FE type), metal /
There are various electron-emitting devices such as an insulating layer / metal type (hereinafter abbreviated as MIM type) and a surface conduction type (hereinafter abbreviated as SCE type). As an example of FE type, WP Dyke and WW Dola
n, "Field emission", Advance in Electron Physics,
There are 8 and 89 (1956). An example of the MIM type is C.
A. Mead, "The tunnel-emission amplifier", J. Appl.
Phys., 32 , 646 (1961) and CA Spindt, "Physical prop
erties of thin-film field emission cathodes with m
Olybdenum cones ", J. Appl. Phys., 47 , 5248 (1976) are known.

On the other hand, as an example of the SCE type, a cold cathode device announced by MI Elinson et al. Is known [Radio Eng. Electron Phy
s., 10 , 1290-1296 (1965)]. The SCE type electron-emitting device utilizes a phenomenon in which electron emission is caused by flowing a current in parallel to a film surface of a thin film having a small area formed on a substrate.

In a flat panel image display device using an electron beam, the inside of the display device including the flight space of the electron beam must be maintained in a vacuum for many years. Therefore, in such a flat-panel image display device, a support frame is sandwiched by a face plate containing a phosphor and a rear plate in which electron-emitting devices are arranged in a matrix, and an envelope is formed by these members. The space inside the envelope is evacuated to a vacuum. Then, the joint surface between the face plate and the support frame and the joint surface between the rear plate and the support frame are generally structured to be sealed by using a glass material. It is possible to adopt a structure that does not use a supporting frame, but in this case as well, the face plate and the rear plate are sealed with a glass-based material. Specifically, a glass frit with a low melting point that is stable for a long period of time is used.
Here, the low melting point generally means that the rear plate and / or the face plate are made of glass, so that the rear plate and / or the face plate is softened and sealed at a temperature lower than the softening point of the glass plates constituting the rear plate and the face plate. It means that you can wear it. After the enclosure, which is the main body of the image display device, is sealed, the envelope is evacuated, the getter flash and the exhaust pipe are sealed to make it airtight, and a vacuum container is completed.

Thus, the sealing of the envelope is generally performed by melting the glass frit. As the glass frit used in such a sealing step, for example, PbO.B ₂ O ₃ -based low melting point glass powder mixed with special ceramics is used. Then, an acrylic resin having a relatively small degree of polymerization and a solvent are added to this glass frit to form a paste, which is applied to at least one of the sealing surfaces by a printing method or the like, and then the resin in the coating film is decomposed and removed. By pre-baking at a temperature necessary for that (generally lower than the temperature at the time of sealing), and finally by firing both members sandwiching the sealing surface butting the glass frit into at least a semi-molten state, Sealing is performed. Further, in the case of sealing a relatively small envelope, for example, in sealing a vacuum tube such as a transmitting and receiving tube or a small display device such as a fluorescent display tube, a powdery glass frit and an acrylic resin having a relatively low degree of polymerization are used. A preform type sheet frit that is prepared by adding a solvent and a solvent, and then stretching this into a sheet shape to make it into a shape that is almost the same as the sealing part of the envelope and then performing calcination to form a frit into a sheet shape. In addition, a method is used in which the preform-type sheet frit is placed in the sealing portion of the envelope and baked to perform sealing.

[0008]

However, when considering the application of the above-mentioned conventional sealing method to the manufacture of a flat image display device of a larger size, there are the following problems.

In the method of applying the paste-like frit to the sealing surface for sealing, it is necessary to perform calcination in order to remove the acrylic resin in the paste-like frit, and the sealed object such as the envelope is sealed. It is necessary to apply the heat cycle at least twice to the above, and it takes a lot of time to perform the sealing work. Further, it is necessary to prepare a firing furnace or change the firing temperature for each heat cycle, which requires manufacturing facilities and a manufacturing space corresponding to that, which leads to high cost.

In the method using the preform type sheet frit, the heat cycle applied to the object to be sealed is only one, but when a larger object to be sealed is considered, the size of the sealing portion becomes large. It is difficult to manufacture a sheet frit suitable for a large sealed object. In particular, it is difficult to control shrinkage and warpage due to calcination, and it is not easy to create. Further, a thin sheet frit is difficult to handle, and even if it can be manufactured, it is often chipped or broken during handling.

The present invention has been made in view of the above problems, and an object of the present invention is to reliably and productively seal a large-sized vacuum container, particularly a flat plate type image display device. (EN) A sealing method capable of performing the sealing method and a sheet frit suitable for carrying out the sealing method.

[0012]

A sheet frit according to the present invention is a sheet frit made of frit glass used for sealing an airtight portion and shaped into a sheet, and is a pair of sheets to be contacted with an object to be sealed. It has a parallel surface and an engaging portion provided on a portion other than the parallel surface, and the thickness of the frit glass at the engaging portion is different from the thickness at the portion of the parallel surface. Here, the engaging portion may have any shape, but may be formed as, for example, a step connecting to the parallel surface, or may be formed as an inclined surface connecting to the parallel surface.

A first method for sealing a vacuum container according to the present invention is a sealing method for forming a vacuum container by sealing a plurality of objects to be sealed, wherein a plurality of sheet frits according to the present invention are used. The sheet frit is arranged on the sealing surface so that the engaging portions engage with each other, and then the sheet frit is heated to seal the object to be sealed.

A first method of manufacturing an image display device of the present invention comprises a rear plate having a plurality of electron sources arranged on a plane, and a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron sources. A method for manufacturing an image display device, comprising: sealing a face plate having a plurality of sheet frits according to the present invention; The face plate is placed on the sealing portion of the face plate, and then heated to seal the rear plate and the face plate by the sheet frit.

A second method for manufacturing an image display device according to the present invention comprises a rear plate having a plurality of electron sources arranged on a plane, and a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron sources. A method of manufacturing an image display device for sealing a face plate having the sheet frit, wherein a plurality of sheet frits according to the present invention are used, and the sheet frits are arranged such that the engaging portions engage with each other. The rear plate or the face plate is formed into an arrangement shape corresponding to the shape of the sealing portion, and then only the engaging portion is heated to integrate the plurality of sheet frits, and the integrated sheet frit is attached to the rear portion. The rear plate and the face plate are sealed by the integrated sheet frit which is arranged on the plate or the sealing portion of the face plate. That.

A second method for sealing a vacuum container according to the present invention is a sealing method for forming a vacuum container by sealing a plurality of objects to be sealed, the frit glass being formed into a sheet-like small piece. A plurality of sheet frit that are used, and arranging the sheet frit on the sealing portion so as to be at least two layers and continuous in each layer,
A second step of sealing the object to be sealed with the sheet frit by heating, wherein the position of the end of the sheet frit in at least one of the layers is in the other layer. It is displaced from the end position.

A third method for sealing a vacuum container according to the present invention is a sealing method for forming a vacuum container by sealing a plurality of objects to be sealed, the frit glass being formed into a sheet-like small piece. A plurality of sheet frit to be used, the first step of circumferentially arranging the sheet frit on the sealing portion so as to be at least two rows and continuous in each row; and the sheet by heating. A second step of sealing the object to be sealed with a frit, wherein the position of the end of the sheet frit in at least one of the rows is from the position of the end of the sheet frit in another row. Deviated.

A third method for manufacturing an image display device according to the present invention comprises a rear plate having a plurality of electron sources arranged on a plane, and a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron sources. A method of manufacturing an image display device, comprising: sealing a face plate having a plurality of sheet frits made of frit glass formed into sheet-like small pieces, which are continuous in at least two layers. The first step of disposing the sheet frit on the sealing portion of the rear plate or the face plate, and the second step of sealing the rear plate and the face plate with the sheet frit by heating. The position of the end of the sheet frit in at least one of the layers is in front of the other layer. It is shifted from the position of the end portion of the sheet frit.

A fourth image display device manufacturing method according to the present invention comprises a rear plate having a plurality of electron sources arranged on a plane, and a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron sources. A method of manufacturing an image display device, comprising: sealing a face plate having a plurality of sheet frits made of frit glass formed into small sheet-like pieces, and continuously using at least two rows in each row. A first step of circumferentially disposing the sheet frit on the sealing portion of the rear plate or the face plate, and sealing the rear plate and the face plate with the sheet frit by heating. And a second step of adjusting the position of the end of the sheet frit in at least one of the rows to the other row. Are shifted from the position of an end portion of the sheet frit that.

[0020]

The sheet frit of the present invention is a sheet frit obtained by molding a powdery frit glass used as a sealing material for a vacuum container or an airtight portion into a sheet shape, and an engaging portion is provided in a part thereof. Is. The engaging portion has a shape capable of engaging with the engaging portion of the seat frit having the same shape or another shape. In order to perform mutual sealing of the objects to be sealed, the sheet frit of the present invention is formed with a pair of parallel surfaces that come into contact with the objects to be sealed. It is formed as a step or a slope connecting to each other. When the engaging portion is a step (hereinafter referred to as “stepped sheet frit”), the thickness of the step is a certain thickness smaller than the thickness between the pair of parallel planes.

When sealing is performed using such a stepped sheet frit, a plurality of stepped sheet frits are prepared and a step is formed on the sealing portion so that the stepped portions (thin portions) overlap each other. The attached sheet frits may be arranged and heated and fired to seal the objects to be sealed. Also, if steps are provided at both ends of the sheet frit,
By stacking the steps on each other, it is possible to continuously line the sealing portion of the envelope.

In the case of a stepped sheet frit, the steps which are the engaging portions are used by being overlapped with each other.
By setting the thickness of the stepped portion to 1/2 or less of the thickness of the other portion, and stacking the sheet frit with the front and back reversed, stacking it on one envelope at the time of sealing. When combined, the sheet frit can be prevented from cracking due to the load at the time of sealing.

Further, a plurality of sheet frits with steps corresponding to the shape of the sealing portion are arranged so as to overlap each other,
By heating and fusing the overlapped step portions, it is possible to obtain a sheet frit integrated with the shape of the sealing portion. As a heating method in this case, there is a method of irradiating the overlapping portion with laser light. The heating for integration may be performed after disposing the stepped sheet frit on the sealing portion, or may be performed at a place different from the sealing portion. When it is performed at a portion other than the sealing portion, the integrated sheet frit is placed in the sealing portion after heating and integration, and sealing is performed. In any case, there is no change in the fact that they are integrated into a continuous sheet frit.

As described above, regarding the sheet frit of the present invention,
The case where the engaging portion has a step shape has been described as an example,
The above discussion still applies when the engaging portion has another shape, for example, an inclined surface. Further, a strip-shaped sheet frit having a uniform thickness, and instead having a cut or protrusion in the in-plane direction at the end thereof corresponds to the sheet frit of the present invention.

The sheet frit of the present invention can be manufactured by adding a binder such as acrylic resin and a solvent to a powder of frit glass to form a paste, molding the paste into a predetermined shape, and pre-baking. Since the shape of the sheet frit, which is a unit of calcination, is sufficiently smaller than the size of the sealing portion, it is possible to ignore the effects of shrinkage and warpage due to calcination. In addition, the sheet frit itself can be general-purpose regardless of the shape of the sealing part, and the firing furnace required for pre-baking (that is, the production of the sheet frit) is considerably smaller than the sealed object. Therefore, it is possible to easily and reliably seal a large vacuum container or the like at low cost.

The sealing method using the sheet frit can be applied to a container that requires a vacuum, such as an electron tube, and in a flat image display device, a structure in which electrons are accelerated to cause a phosphor to emit light. That is, it can be used for an image display device in which at least an electron source and a phosphor are arranged in the image display device and a vacuum is required to emit electrons into a space. As the electron source in this case, SCE type or FE type cold cathode electron sources, wire-shaped thermionic electron sources and the like can be used.

Further, in the second and third vacuum container sealing methods and the third and fourth image display device manufacturing methods of the present invention, a sheet-like small piece not necessarily provided with an engaging portion is formed. The plurality of sheet frits thus prepared are used, and the sheet frits are doubly arranged on the sealing portion as described later. The shape of the sheet frit is typically a strip shape.
This sheet frit is made by adding a binder of acrylic resin and a solvent to a powder of frit glass to form a paste, and then forming the paste into a predetermined shape in advance, and performing preliminary firing to remove the binder. Such a sheet frit is suitable for mass production.

When actually performing the sealing, first, at least two layers are continuous in each layer, and the position of the end of the sheet frit in at least one of these layers is the sheet in the other layer. These sheet frits are arranged on the sealing part so that they are displaced from the positions of the ends of the frit, or at least two rows are continuous in each row and at least one of these rows These sheet frits are circumferentially arranged on the sealing portion so that the positions of the edge portions of the sheet frit in are shifted from the positions of the edge portions of the sheet frit in the other rows. Then, it is heated and the object to be sealed is sealed by the sheet frit in the sealing portion.

The sheet frits are arranged in two or more layers or in two or more rows and offset from each other in order to prevent the gap between the sheet frits from being not completely closed at the time of sealing and forming a leak path. is there. In this case, the arrangement of the sheet frit, which is typically strip-shaped, is characteristic, and the order of arranging the sheet frit is arbitrary. Further, there is no upper limit on the number of layers when stacking the sheet frits and the number of rows when arranging the sheet frits in a circumferential shape. In this method of arranging the ends of the sheet frit to be displaced between the layers or between the rows, it is not necessary that the ends of the layers or the rows are all displaced from each other, and the edges of the sheet frit of at least one layer or one row However, it suffices that it is offset with respect to the edge of the sheet frit of another layer or row. Furthermore, it is also possible to use a method in which the number of layers is two or more and a method in which the number of columns is two or more, and this combined method can also be adopted as one that further increases the effect of the present invention.

In the second and third vacuum container sealing methods and the third and fourth image display device manufacturing methods of the present invention, as described above, a small sheet frit is doubled in the sealing portion. Since it is arranged in the above, it is possible to easily manufacture a large-sized vacuum container or a flat-panel image display device having a large screen without requiring special equipment for calcination. Here, the flat image display device to which the present invention can be applied has a structure in which electrons are accelerated to cause a phosphor to emit light, that is, at least an electron source and a phosphor are arranged in the image display device. It is possible to exemplify an image display device that requires a vacuum to emit electrons into a space. As the electron source in this case, SCE type or FE type cold cathode electron sources, wire-shaped thermionic electron sources and the like can be used.

[0031]

Embodiments of the present invention will be described below with reference to the drawings.

<< Embodiment 1 >> FIGS. 1 (a) to 1 (f) respectively show
It is a perspective view showing an example of a seat frit according to the present invention,
(a) ~ (d) has a stepped portion as an engaging portion, (e),
The one shown in (f) has an inclined surface as an engaging portion.

The sheet frit 101 shown in FIG.
It has a strip shape, and a step portion 101a is provided on its short side.
Have been. That is, in this sheet frit 101,
At both longitudinal ends, scrape from one main surface side
The thickness is thin so that it can be removed. Seat frit
Length L of each step portion 101a with respect to the longitudinal direction of 101 ₁
Is the width W of this sheet frit 101₁Is almost equal to
ing. The thickness of the step portion 101a is
It is almost half the thickness of the other parts.

Here, an example of a method of manufacturing a sheet frit having such a step portion will be described. A commercially available powdery low-melting-point glass frit containing lead as a main component was mixed with an acrylic resin and a solvent to form a paste-like frit. At this time, the viscosity of the frit should be the same as that of clay in consideration of the subsequent steps. Next, the frit is spread in a sheet shape, and is leveled with a roller having a step to make unevenness to form a step. This was cut into strips and then calcined in an oven to decompose and volatilize the acrylic component to obtain a sheet frit having a step portion. Alternatively, a paste-like frit may be put in a mold to be molded, and then calcined.

As another manufacturing method, an acrylic resin and a solvent are added to the low-melting-point glass frit to form a paste-like frit, which is pre-baked and then partially ground with a cutter to make unevenness. To form a step,
Finally, it is also possible to manufacture a sheet frit with a step by separating it into strips. However, in this method, the frit hardened by the calcination is likely to be cracked or chipped at the time of polishing or separation, and the yield is poor.

The sheet frit 102 shown in FIG. 1 (b) is
Proximity to the longitudinal ends of the strip-shaped sheet frit,
A linear groove portion 102a is provided on one main surface side. The groove portion 102a is a step portion that can be engaged with a step portion provided at the end portion of another sheet frit, and is provided so as to connect the long sides of the sheet frit 102. In addition, the sheet frit 103 shown in FIG.
Has an elongated shape with an L-shaped cross section. The L-shaped portions are used in combination. FIG.
The sheet frit 104 shown in (d) is similar to the sheet frit 101 shown in FIG. 1 (a), except that the shape is not a strip shape but an arc shape. Step portions 104a are provided at both ends of the arc. The sheet frit 104 is particularly adapted to a circular sealing portion, and these sheet frits 104 are arranged and used in the sealing portion so that an even number of sheet frits 104 are combined to form a circle. .

The sheet frit 105 shown in FIG.
Both end portions in the longitudinal direction are slope portions 105a.
That is, in this sheet frit 105, the cross section along the longitudinal direction is trapezoidal. Further, in the sheet frit 106 shown in FIG. 1 (f), the inclined surface portion 106a is formed only at one end in the longitudinal direction. These sheet frits 1
When arranging 05 and 106 in the sealing portion, the slope portions may be in contact with each other.

Example 2 FIGS. 2 and 3 show a sealing method using the sheet frit of Example 1, respectively. Here, a case of manufacturing an image display device having an SCE type electron source will be described.

FIG. 2 shows an example in which an image display device is formed by using four sheet frits 101 similar to those shown in FIG. 1 (a). This image display device includes a rear plate 3 on which a plurality of electron sources are arranged, a face plate 4 on which a phosphor (not shown) is provided, and a substantially rectangular shape through which an exhaust pipe (not shown) is provided. The support frame 5 of FIG. 4 is provided, and the rear plate 3 and the support frame 5 and the face plate 4 and the support frame 5 are sealed by adhesive portions 6 using sheet frits. After the sealing, the space surrounded by the rear plate 3, the face plate 4 and the support frame 5 is evacuated to a vacuum through the above-mentioned exhaust pipe.

Next, a specific sealing method will be described.
Two kinds of sheet frit 101 corresponding to each of the long side and the short side of the support frame 5 are prepared, and these four sheet frits 10 are arranged so that the step portions 101a are engaged with each other.
1 is arranged on the corresponding side of the support frame 5. Then, the face plate 4 is placed on these sheet frits, and firing is performed while applying a constant load from above, whereby the sealing between the support frame 5 and the face plate 4 is completed. Similarly, the adhesive portion 6 between the rear plate 3 and the support frame 5 is also sealed. In practice, both adhesive parts 6 may be completed at the same time.

When the inside of the thus-sealed image display device was evacuated by the exhaust pipe, no leak occurred. That is, by arranging a plurality of sheet frits having stepped portions in the sealing portion and performing sealing, it is possible to seal a large-sized device without fear of leakage.

FIG. 3 is similar to that shown in FIG. 2 using two sheet frit 101 of the type shown in FIG. 1 (a) and two sheet frit 102 of the type shown in FIG. 1 (b). 2 shows an example in which the sealing is performed. Here, in the groove portion 102a of the sheet frit 102 of the type shown in FIG. 1B, the step portion 1 of the sheet frit 101 of the type shown in FIG.
01a is engaged. When the inside of the thus-sealed image display device was evacuated by the exhaust pipe described above, no leak occurred.

<Third Embodiment> In the second embodiment, one sheet frit corresponds to one side of the sealing portion having a substantially rectangular shape. However, by using a larger number of sheet frits, a larger size can be obtained. It is also possible to adapt it to the sealing part. Here, a sealing process in the case of manufacturing an image display device similar to that shown in Embodiment 2 will be described as an example. FIG. 4A is a partially cutaway plan view of the image display device according to this embodiment, and FIG. 4B is a view for explaining the sealing step.

Here, the sheet frit 101 shown in FIG. 1A was used. A plurality of sheet frits 101 are arranged on each side of the support frame 5 so that the front and back sides are alternately reversed. In FIGS. 4A and 4B, the sheet frit 101
Depending on the direction of hatching with respect to the sheet frit 101, the front surface (the main surface on which the step portion 101a is provided) of the sheet frit 101 faces upward in the drawing or the back surface (step portion 101a).
It is distinguished whether or not the main surface (on which one is not provided) faces upward in the drawing. Except for the four corners of the support frame 5, each sheet frit 101 is continuously arranged in the longitudinal direction by overlapping the step portions 101a. At the four corner portions, the step portions 101a are overlapped and the longitudinal directions are orthogonal to each other. It is arranged to. Then, as in the case of the second embodiment,
The face plate 4 was placed on these sheet frits, and the face plate 4 and the support frame 5 were sealed by firing while applying a constant load from above.

When the inside of the thus-sealed image display device was evacuated by the above-mentioned exhaust pipe, no leak occurred. Therefore, by arranging a large number of sheet frits each having an engaging portion in succession to the sealing portion, there is no fear of leaks and the like in a large sealing portion typified by a large image display device. It turns out that sealing can be done.

<Embodiment 4> When a plurality of sheet frits having engaging portions are used, only the engaging portions of the sheet frit are heated before firing for sealing, and the plurality of sheet frits are used. Can be integrated.
Here, a sealing process at the time of manufacturing an image display device similar to that of the second embodiment will be described as an example. FIG. 5 is a diagram for explaining the sealing step in this embodiment.

Similar to the second embodiment, four sheet frits 101 having step portions 101a are arranged on the support frame 5 so that the step portions 101a overlap each other, and then, as shown in FIG. The laser beam 20 was irradiated to the overlapping portion of. The sheet frit 101 contains, for example, lead oxide (PbO) and is colored, so that the sheet frit 101 is heated by the laser beam 20 and the step portions 101a are partially fused to each other to integrate the sheet frit 101. Face plate 4 on the integrated sheet frit
Was placed, and a constant load was applied from above to perform firing, and sealing was performed.

In this embodiment, since the sheet frit is welded and integrated in advance, the sheet frit is not displaced on the sealing portion during the sealing by firing, and the sealing work becomes easier. .

<Embodiment 5> In Embodiment 4, the sheet frit is partially heated while being placed on the sealing portion, but in this embodiment, the sheet frit is partially heated at a place other than the sealing portion. Then, this sheet frit was integrated. That is, before arranging the sheet frit on the support frame, a sheet frit with an engaging portion was arranged at another place, and the overlapping portion was partially welded by laser light. afterwards,
The integrated sheet frit was placed on the support frame, and the face plate was placed thereon. Firing was performed while applying a constant load from above to seal the support frame and the face plate. Similarly, the supporting frame and the rear plate were also sealed to complete the image display device.

Also in this embodiment, since the sheet frit is previously welded and integrated, the sheet frit is not displaced on the sealing portion during the sealing by firing, and the sealing work is facilitated. It was

Example 6 In Example 3, a surface conduction electron emission (SCE) type electron source was used as the electron source arranged on the rear plate 3. FIG. 6 is a plan view showing the rear plate 3 in this embodiment.

The rear plate 3 includes a large number of row-direction wirings 7 and column-direction wirings 9 on the insulating substrate 1 made of glass or the like.
A plurality of electron-emitting devices 10 to which voltages are respectively applied by the row-directional wiring 7 and the column-directional wiring 9 are arranged in a matrix in the vicinity of the intersection of the row-directional wiring 7 and the column-directional wiring 9. It is composed. At the intersection of the row-direction wiring 7 and the column-direction wiring 9, both wirings are insulated by the interlayer insulating film 8. As the electron emitting element 10, the surface conduction electron emitting type is used as described above.
In this case, the row-direction wiring 7, the interlayer insulating film 8, and the column-direction wiring 9
The electron-emitting device 10 and the electron-emitting device 10 are formed by the photolithography etching method according to the process for manufacturing a semiconductor device.

In the image display device that has undergone the sealing process of this embodiment, no leak occurs when the inside is vacuumed by the exhaust pipe. From this, it is possible to manufacture even a large-screen image display device using an SCE type electron source without a risk of leakage by continuously arranging sheet frits having engaging portions and performing the sealing process. I understood.

<Embodiment 7> By arranging a number of strip-shaped sheet frits in double in the sealing portion by shifting the ends, the vacuum container can be sealed without fear of leakage. Here, a case of manufacturing an image display device similar to that of the above-described second embodiment will be described as an example. FIG. 7A is a partially cutaway plan view showing the image display device according to the seventh embodiment, and FIG. 7B is a diagram for explaining the sealing step.

At each bonding portion 6 between the support frame 5 and the rear plate 3 and between the support frame 5 and the face plate 4, strip-shaped sheet frits 30 are arranged in two layers and fired. Due to this, sealing is performed.
In the figure, the sheet frit 30 (first-layer sheet frit) directly laminated on the support frame 5 and the second-layer sheet frit laminated on the first-layer sheet frit 30 have hatching directions. Differentiated by changing. Here, the first-layer sheet frit is continuously arranged on the support frame 5 with a slight gap so that the longitudinal direction thereof faces the side direction of the support frame 5. The sheet frit for the second layer is also arranged in the same manner, but the end portion in the longitudinal direction of the sheet frit for the second layer is arranged at a position corresponding to substantially the central portion in the longitudinal direction of the sheet frit for the first layer. Has become. That is, in the arrangement phase of the sheet frit of each layer, the first layer and the second layer are exactly shifted by a half cycle. An exhaust pipe 21 for exhausting the inside of the container constituted by the support frame 5, the rear plate 3 and the face plate 4 is attached to the support frame 5.

A specific method of manufacturing the image display device in this embodiment will be described. As an example, the rear plate 3 and the face plate 4 are 320 mm wide and 240 mm long.
Consider a case in which each of the rectangular blue plate glasses (soda glass) is used. First, a large number of cathodes are formed on the rear plate 3 by a vacuum film forming method and a photolithography technique. Sheet frit 30 preliminarily fired in a strip shape was arranged on the outer peripheral sealing portion of the rear plate 3 so as to be continuous with each other. This sheet frit 3
0 is a composite low melting point glass which is a blend of PbO.B ₂ O ₃ low melting point glass powder and a special ceramics powder, which is commercially available as a glass for sealing a display panel, and has a sealing temperature of 410 ° C. Glass frit used in the above, to which a vehicle (a low-polymerization degree acrylic resin dissolved in α-terpineol at about 5%) was added, stretched into a sheet and cut into strips, then 360- It is produced by pre-baking at a temperature of about 380 ° C. to decompose and sublimate the vehicle. The size of the sheet frit 30 is 80 mm in length, 4 mm in width, and 0.
It was 4 mm.

Since the sheet frit 30 is continuously arranged in the sealing portion, in other words, the sheet frit 30 is arranged so as not to form a gap in the vicinity of the end portion in the longitudinal direction of the sheet frit 30, the length of the sheet frit 30 becomes excessive. In some cases, the sheet frit was folded with tweezers to adjust the length and arranged. When the first-layer sheet frits 30 are arranged in a circumferential shape on the sealing portion in this manner, the end portions of the first-layer sheet frits 30 deviate from those of the first layer, and the second layer is formed on the first layer. The seat frit is placed.

Next, the supporting frame 5 provided with the exhaust pipe 21 was arranged so as to overlap these sheet frits 30.
After that, as in the case of the sealing portion of the rear plate 3, the sheet frit 30 was arranged in two layers on the sealing portion of the support frame 5 with the face plate 4 in a stacked manner. Then, the face plate 4 was arranged so that the phosphor screen faced the rear plate 3. Finally, with the weight placed on the entire body and being pressed, the sealing temperature of the sheet frit 30 is 410 ° C.
It was heated to the vicinity and held for several tens of minutes, and then the temperature was lowered to complete the sealing step. The envelope of the image display device manufactured in this way was evaluated for airtightness with a helium leak detector, and the sensitivity of the leak detector was found to be maximum (1 × 10 ^-10 [atm · cm ³ / sec] or less). However, no leak was confirmed.

After the vacuum-tight envelope is manufactured in this manner, the pressure inside the image display device is reduced to about 1 through the exhaust pipe 21.
The gas was evacuated to × 10 ^-7 Torr and the exhaust pipe 21 was sealed.
Then, a getter (not shown) for maintaining the degree of vacuum was operated to complete the image display device. The image display device manufactured in this manner was able to display images satisfactorily without leakage at the sealing portion.

<Embodiment 8> In Embodiment 7, the sheet frit 30 is arranged in two layers in the sealing portion.
Arranged in columns. FIG. 8A is a partially cutaway plan view showing the image display device according to the present embodiment, and FIG. 8B is a view for explaining the sealing step. The sheet frit 30 arranged on the inner side and the sheet frit 30 arranged on the outer side in the sealing portion are distinguished by the hatching direction in FIGS. 8A and 8B.

A specific method of manufacturing the image display device in this embodiment will be described. As an example, the rear plate 3, the face plate 4, and the support frame 5 are the same as those used in Example 7, and the seat frit 30 has the same composition, the same manufacturing method, and the same size as those of Example 7. It was used.

First, in the sealing portion on the outer periphery of the rear plate 3,
The above-mentioned sheet frit 30 was continuously lined up. In this case, since the sheet frits are continuously arranged on the sealing portion, when the length of the sheet frits is excessive, the sheet frit is folded by tweezers and the length is adjusted and arranged in the same manner as in Example 7. After arranging the sheet frit 30 in the circumferential shape in this manner, the sheet frit 30 was similarly arranged on the outer side thereof. At this time, the inner sheet frit and the outer sheet frit were arranged so that the ends thereof were not aligned, in other words, the ends were alternately arranged.

Next, the support frame 5 provided with the exhaust pipe 21 was arranged so as to overlap these sheet frits 30.
After that, the seat frits 30 were arranged in the inner and outer two rows at the sealing portion with the face plate 4 on the support frame 5, similarly to the sealing portion of the rear plate 3. Then, the face plate 4 was arranged so that the phosphor screen faced the rear plate 3. Finally, with the weight placed on the entire body and being pressed, the sealing temperature of the sheet frit 30 is 410 ° C.
It was heated to the vicinity and held for several tens of minutes, and then the temperature was lowered to complete the sealing step. The envelope of the image display device manufactured in this way was evaluated for airtightness with a helium leak detector, and the sensitivity of the leak detector was found to be maximum (1 × 10 ^-10 [atm · cm ³ / sec] or less). However, no leak was confirmed.

After the vacuum-tight envelope is produced in this manner, the pressure inside the image display device is reduced to about 1 via the exhaust pipe 21.
The gas was evacuated to × 10 ^-7 Torr and the exhaust pipe 21 was sealed.
Then, a getter (not shown) for maintaining the degree of vacuum was operated to complete the image display device. The image display device manufactured in this manner was able to display images satisfactorily without leakage at the sealing portion.

Example 9 In Example 7, a surface conduction electron emission (SCE) type electron source was used as the cathode arranged on the rear plate 3. This rear plate 3
Are the same as those described with reference to FIG. 6 in the sixth embodiment.

As in Example 7, the rear plate 3, the support frame 5 and the face plate 4 were sealed. The envelope of the image display device manufactured in this manner was evaluated for airtightness with a helium leak detector, and the sensitivity of the leak detector was maximized (1 × 10 ⁻¹⁰ [a
tm · cm ³ / sec] or less), no leak was confirmed.

After the vacuum-tight envelope is manufactured in this way, the pressure inside the image display device is reduced to about 1 via the exhaust pipe 21.
The gas was evacuated to × 10 ^-7 Torr and the exhaust pipe 21 was sealed.
Then, a getter (not shown) for maintaining the degree of vacuum was operated to complete the image display device. The image display device manufactured in this manner was able to display images satisfactorily without leakage at the sealing portion.

Example 10 In Example 8, a surface conduction electron emission (SCE) type electron source was used as the cathode arranged on the rear plate 3. This rear plate 3
Are the same as those described with reference to FIG. 6 in the sixth embodiment.

As in Example 7, the rear plate 3, the support frame 5 and the face plate 4 were sealed. The envelope of the image display device manufactured in this manner was evaluated for airtightness with a helium leak detector, and the sensitivity of the leak detector was maximized (1 × 10 ⁻¹⁰ [a
tm · cm ³ / sec] or less), no leak was confirmed.

After the vacuum-tight envelope is manufactured in this way, the pressure inside the image display device is reduced to about 1 via the exhaust pipe 21.
The gas was evacuated to × 10 ^-7 Torr and the exhaust pipe 21 was sealed.
Then, a getter (not shown) for maintaining the degree of vacuum was operated to complete the image display device. The image display device manufactured in this manner was able to display images satisfactorily without leakage at the sealing portion.

[0071]

As described above, the sheet frit of the present invention, that is, the sheet frit having the engaging portion, has the sealing portion in which the sheet frit is arranged by engaging the engaging portions with each other for use. Since it is not necessary to perform calcination together with the envelope, the heat cycle applied to the envelope can be substantially performed only once at the time of sealing, and it does not take time and effort to manufacture the envelope, which is large. It is no longer necessary to prepare a firing furnace for temporarily firing an envelope having a capacity, and the installation space for this firing furnace is no longer required.
The size of the sealing part is not limited, and a large flat panel image display device can be sealed.Furthermore, since a sheet frit of a certain length is used in combination, it can be folded carelessly during handling. The effect is that there is very little danger of being lost. In particular, the efficiency of the sealing operation of a large flat image display device is significantly improved. Therefore,
The sheet frit of the present invention is particularly suitable for use in sealing image display devices and the like, and enables production of an image display device having a large screen.

Further, according to the second and third vacuum container sealing methods and the third and fourth image display device manufacturing methods of the present invention, a sheet-like small piece not necessarily provided with an engaging portion is formed. By using a plurality of sheet frits that are formed and arranging the sheet frits at least twice in the sealing portion, it is not necessary to perform calcination together with the envelope having the sealing portion in which the sheet frits are arranged. Since the heat cycle applied to the envelope can be substantially performed only once at the time of sealing, it does not take time and effort to manufacture the envelope, and it is possible to perform temporary firing of the envelope having a large capacity. There is no need to prepare a baking furnace, there is no need for an installation space for this baking furnace, and it is possible to seal a large flat image display device without being limited to the size of the sealing part. effective. Therefore, the sheet frit of the present invention is particularly suitable for use in sealing image display devices and the like, and enables the manufacture of image display devices having a larger screen.

[Brief description of drawings]

1A to 1F are perspective views showing examples of a sheet frit according to the present invention.

FIG. 2 is a perspective view illustrating a sealing process of an image display device according to a second exemplary embodiment.

FIG. 3 is a perspective view illustrating a sealing process of an image display device according to a second exemplary embodiment.

FIG. 4A is a partially cutaway plan view of the image display device of the third embodiment, and FIG. 4B is a front view illustrating a sealing process of the image display device of the third embodiment.

FIG. 5 is a perspective view illustrating a sealing process of an image display device according to a fourth exemplary embodiment.

FIG. 6 is a plan view showing a rear plate provided with an SCE type electron-emitting device.

7A is a partially cutaway plan view of an image display device of Example 7, and FIG. 7B is a front view illustrating a sealing process of the image display device of Example 7.

FIG. 8A is a partially cutaway plan view of the image display device of the eighth embodiment, and FIG. 8B is a front view illustrating a sealing process of the image display device of the eighth embodiment.

[Explanation of symbols]

 3 Rear Plate 4 Face Plate 5 Support Frame 6 Adhesive Part 7 Row Direction Wiring 8 Interlayer Insulation Film 9 Column Direction Wiring 10 Electron Emitting Element 20 Laser Light 21 Exhaust Pipe 30, 101-106 Sheet Frit 101a, 104a Step 102a Groove 105a, 106a slope part

Claims (10)

[Claims] 1. A sheet frit made of sheet-shaped frit glass used for sealing an airtight portion, comprising a pair of parallel surfaces to be in contact with an object to be sealed, and a portion other than the parallel surfaces. A sheet frit having an engaging portion provided, wherein the thickness of the frit glass at the engaging portion is different from the thickness at the portion of the parallel surface. 2. The seat frit according to claim 1, wherein the engaging portion is formed as a step connecting to the parallel surface. 3. The seat frit according to claim 1, wherein the engaging portion is formed as an inclined surface connecting to the parallel surface. 4. A sealing method for sealing a plurality of objects to be sealed to form a vacuum container, wherein a plurality of sheet frits according to any one of claims 1 to 3 are used and the engagement is performed. A method for sealing a vacuum container, characterized in that the sheet frit is arranged on a sealing surface so that parts are engaged with each other, and then the object to be sealed is sealed by the sheet frit by heating. . 5. An image display device for sealing a rear plate having a plurality of electron sources arranged on a plane and a face plate having a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron sources. It is a manufacturing method, Comprising: The sheet frit of any one of Claim 1 thru | or 3 is used, Comprising: The said seat frit is the said rear plate or the said face plate so that the said engaging part may mutually engage. The method for manufacturing an image display device, wherein the rear plate and the face plate are sealed by the sheet frit by arranging the rear plate and the face plate by heating the sheet frit. 6. An image display device, comprising: a rear plate having a plurality of electron sources arranged on a plane; and a face plate having a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron source. A method of manufacturing, wherein a plurality of seat frits according to any one of claims 1 to 3 are used, and the seat frits are arranged such that the engaging portions engage each other, or the rear plate or An arrangement shape corresponding to the shape of the sealing portion of the face plate is formed, and then only the engaging portion is heated to integrate the plurality of sheet frits, and the integrated sheet frit is formed into the rear plate or the An image display device which is arranged at a sealing portion of a face plate and seals the rear plate and the face plate by the integrated sheet frit. The method of production. 7. A sealing method for sealing a plurality of objects to be sealed to form a vacuum container, wherein a plurality of sheet frits made of frit glass molded into sheet-like pieces are used, and at least two layers are used. And a second step of arranging the sheet frit on the sealing portion so as to be continuous in each layer, and a second step of sealing the adherend by the sheet frit by heating. The method for sealing a vacuum container according to claim 1, wherein the position of the end of the sheet frit in at least one of the layers is displaced from the position of the end of the sheet frit in another layer. 8. A sealing method for sealing a plurality of objects to be sealed to form a vacuum container, wherein a plurality of sheet frits made of frit glass molded into sheet-like pieces are used, and at least two rows are used. And a second step of circumferentially arranging the sheet frit on the sealing portion so as to be continuous in each row, and a second step of heating and sealing the object to be sealed by the sheet frit. And a step of :, the position of the end portion of the sheet frit in at least one of the rows is displaced from the position of the end portion of the sheet frit in another row. How to wear. 9. An image display device, comprising: a rear plate having a plurality of electron sources arranged on a plane; and a face plate having a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron source. A method of manufacturing, wherein a plurality of sheet frits made of frit glass formed into sheet-like pieces are used, and the rear plate or the face plate is sealed so as to form at least two layers and be continuous in each layer. At least one of the layers includes a first step of disposing the sheet frit on a portion and a second step of sealing the rear plate and the face plate with the sheet frit by heating. The position of the edge of the sheet frit in one layer is displaced from the position of the edge of the sheet frit in the other layer. A method of manufacturing an image display device, characterized in that 10. An image display device for sealing a rear plate having a plurality of electron sources arranged on a plane and a face plate having a fluorescent portion which emits light when irradiated with an electron beam emitted from the electron source. A method for manufacturing, wherein a plurality of sheet frits made of frit glass formed into sheet-like pieces are used, and the rear plate or the face plate is sealed so as to form at least two rows and be continuous in each row. A first step of circumferentially arranging the sheet frit on the attachment portion, and a second step of sealing the rear plate and the face plate by the sheet frit by heating, the row The position of the end of the sheet frit in at least one of the rows is the position of the end of the sheet frit in the other row A method of manufacturing an image display device, which is characterized in that the image display device is deviated.