JPH08204494A - Resonator and its manufacture - Google Patents

Abstract

PURPOSE: To suppress the generation of unrequired vibration from a vibration part by turning the tip side of the vibration part of a tongue piece shape to a positive X-direction and forming an etching surface on the outer periphery of the vibration part. CONSTITUTION: For a diaphragm 1, a U-shaped cut groove 6 by sand blasting work is formed on the inner part and thus, the vibration part 7 of the tongue piece shape is formed. In the vibration part 7 of the tongue piece shape, the opposite side of a base part 10, that is the tip side, is turned to the positive X-direction as crystal. Thus, when the outer periphery of the vibration part 7 facing the cut groove 6 is etched by etchant, the etching is efficient in a short time on the side of the base part 10 of the vibration part 7, that is on a negative X-direction side, and thus, the work alteration layer of the outer periphery of the vibration part 7 is effectively removed and the generation of the unrequired vibration from the vibration part 7 is suppressed as a result. Also, electrodes for excitation are formed on the front and rear surfaces of the vibration part 7 and the respective lead electrodes 11 and 12 are pulled out of the vibration part 7 through the base part 10 of the vibration part 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator such as a crystal and a method for manufacturing the vibrator.

[0002]

2. Description of the Related Art A conventional vibrator of this type includes a diaphragm and first and second covers that cover the front and back surfaces of the diaphragm and sandwich the outer peripheral portion of the diaphragm with its outer peripheral portion. Prepare,
The vibrating plate has a tongue-shaped vibrating portion inside the holding portion by the first and second covers, and excitation electrodes are formed on the front and back surfaces of the vibrating portion.

[0003]

In the above-mentioned conventional example, the tongue-shaped vibrating portion was formed by forming a cut groove by sandblasting. However, by this sandblasting, a work-affected layer is formed around the vibrating portion. However, there is a problem in that unnecessary vibration is generated as a result.

Therefore, the present invention has an object to suppress the generation of unnecessary vibration from the vibrating portion.

[0005]

In order to achieve this object, the present invention provides a vibrating portion having a tongue-like vibrating portion with a plus X.
In addition to the direction, an etching surface is formed on the outer circumference of the vibrating portion.

[0006]

With the above construction, the tongue-like vibrating portion is in the minus X direction from the tip to the root side, so that the work-affected layer can be efficiently removed in a short time by etching. As a result, it is possible to suppress the generation of unnecessary vibration from the vibrating section.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, reference numeral 1 is a vibrating plate having a plate thickness of 100 μm.
It is composed of a crystal plate. On the front and back of the diaphragm 1,
The covers 2 and 3 made of a crystal plate having a plate thickness of 400 μm are integrated by directly bonding the crystals. It is to be noted that reference numerals 4 and 5 in FIG. 1 are external electrodes and are arranged on a diagonal portion of the back surface of the cover 3. As shown in FIGS. 2 and 3, the diaphragm 1 has a U-shaped cut groove 6 formed inside by sandblasting, thereby forming a tongue-shaped vibrating portion 7. The tongue-shaped vibrating portion 7 is the base portion 1
The side opposite to 0, that is, the tip side is in the plus X direction as a crystal. Therefore, if the outer periphery of the vibrating portion 7 facing the kerf 6 is etched by the etching liquid, this etching is efficiently performed in a short time on the root portion 10 side of the vibrating portion 7, that is, the minus X direction side, and thereby the vibration is generated. Part 7
The work-affected layer on the outer periphery of can be effectively removed, and as a result, generation of unnecessary vibration from the vibrating portion 7 can be suppressed. Further, excitation electrodes 8 and 9 are formed on the front and back surfaces of the vibrating portion 7, and lead electrodes 11 and 12 thereof are drawn out of the vibrating portion 7 via a root portion 10 of the vibrating portion 7. As shown in FIGS. 2 to 5, the end of the inner lead electrode 11 penetrates the diaphragm 1 by the through hole 13, and then passes through the side of the vibrating section 7 as shown in FIG. The connection portion 14 is formed by extending to the side. Further, the lead electrode 12 forms a connecting portion 15 on the side of the root portion 10. And these connections 14,
Through holes 16 and 17 formed in the cover 3 corresponding to 15
Each of them is connected to the external electrodes 4 and 5 via a conductor (having a copper layer on a chrome layer) 18 therein. The covers 2 and 3 sandwich the front and back outer peripheries of the diaphragm 1 at their outer peripheral portions, and are directly bonded to each other by quartz crystals. In the case where the lead electrode 11 passes through the side of the vibrating portion 7 because they are joined, the cover 3 is provided outside the vibrating portion 7.
It is joined with. Thus, in order to form the lead electrode 11 on the rear surface side of the diaphragm 1 on the side of the vibrating portion 7, as shown in FIGS.
The plate thickness is increased only in the sandwiching part with the covers 2 and 3, and the plate thickness is thinned by etching in the parts where the vibrating part 7 and the lead electrodes 11 and 12 are formed. FIG.
Clearly shows the diaphragm 1 after this etching step, and the back surface portion corresponding to the frame line 19 is thinned by etching. In addition, this frame line 19
The outer peripheral portion of the diaphragm is a portion to be sandwiched and joined by the covers 2 and 3. As is apparent from FIG. 4, the sandwiching width 20 on the longitudinal side of the diaphragm 1 is made wider than the sandwiching width 21 in the short direction. ing.

Since the lead electrode 11 is provided on the side of the vibrating portion 7 as shown in FIG.
Are displaced from the center of the diaphragm 1 to one side.

It should be noted that the cut groove 6 in the root portion 10 has a semicircular shape as shown in FIG. 4, so that cracks are less likely to occur even when an excessive impact is applied.

[0010]

As described above, according to the present invention, the tip side of the tongue-shaped vibrating portion is in the plus X direction, and the etching surface is formed on the outer periphery of the vibrating portion. With the above configuration, since the direction from the tip of the tongue-like vibrating portion toward the base side is in the minus X direction, the work-affected layer can be efficiently removed in a short time by etching, and as a result, the vibration is generated. Therefore, it is possible to suppress the generation of unnecessary vibration from the part.

[Brief description of drawings]

FIG. 1 is a perspective view of one embodiment of the present invention.

FIG. 2 is an exploded perspective view of FIG.

FIG. 3 is an exploded perspective view of FIG.

FIG. 4 is a top view of the diaphragm of FIG.

5 is a cross-sectional view taken along the line AA of the vibrator in which the covers 2 and 3 are joined to the diaphragm of FIG.

6 is a cross-sectional view taken along the line BB of the vibrator in which the covers 2 and 3 are joined to the diaphragm of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration plate 2 Cover 3 Cover 7 Vibration part 9 Excitation electrode 10 Root part 11 Lead electrode 12 Lead electrode 14 Connection part 15 Connection part

Claims (4)

[Claims] 1. A vibrating plate, and first and second covers that cover the front and back surfaces of the vibrating plate and sandwich the outer peripheral part of the vibrating plate at the outer peripheral part thereof. There is a tongue-shaped vibrating portion inside the sandwiched portion by the first and second covers, the tip side of this tongue-shaped vibrating portion is the plus X direction side, and the etching surface is on the outer periphery of this vibrating portion. And a vibrator with excitation electrodes provided on the front and back surfaces. 2. The vibrator according to claim 1, wherein the diaphragm and the first and second covers are made of quartz. 3. A vibrating plate, and first and second covers that cover the front and back surfaces of the vibrating plate and sandwich the outer peripheral part of the vibrating plate at the outer peripheral part thereof. A tongue-shaped vibrating section having excitation electrodes on the front and back sides is provided inside the sandwiching section by the first and second covers, and the tip side of the tongue-shaped vibrating section is set to the plus X direction side. A method of manufacturing a vibrator in which a kerf is formed by sandblasting so as to have a tongue shape, and then the inner surface of the kerf is etched. 4. The method for manufacturing a vibrator according to claim 3, wherein the diaphragm and the first and second covers are made of quartz.