JPH08204489A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPH08204489A
JPH08204489A JP3315695A JP3315695A JPH08204489A JP H08204489 A JPH08204489 A JP H08204489A JP 3315695 A JP3315695 A JP 3315695A JP 3315695 A JP3315695 A JP 3315695A JP H08204489 A JPH08204489 A JP H08204489A
Authority
JP
Japan
Prior art keywords
piezoelectric
insulating substrate
wire bonding
vibrating plate
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3315695A
Other languages
Japanese (ja)
Inventor
Takahiro Ueda
貴博 植田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP3315695A priority Critical patent/JPH08204489A/en
Publication of JPH08204489A publication Critical patent/JPH08204489A/en
Pending legal-status Critical Current

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Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To easily manufacture the piezoelectric vibrator of improved characteristics and to improve productivity and reliability by fixing one end of a piezoelectric diaphragm at one point by an insulating adhesive material and connecting conductors by wire bonding. CONSTITUTION: One end of the long side of the piezoelectric diaphragm 2 and an opposing insulating substrate are fixed by the insulating adhesive material 3 at one part and the pull-out port of the electrode of the piezoelectric diaphragm 2 and the insulating substrate 1 are separately conducted by using the wire bonding 4 at two parts at the other end. The method can be used not only for the insulating substrate 1 but also for a ceramic case and a metallic case, etc., and the wire bonding on one side can be pulled from an opposite side. Instead of the method for simultaneously performing fixing and conduction by a conductive adhesive material, only one part of the piezoelectric diaphragm 2 is fixed to the insulating substrate 1 by the insulating adhesive material 3. As the other conduction is performed through the wire bonding 4, stress is hardly applied to the piezoelectric diaphragm 2. Thus, the characteristics themselves of the piezoelectric diaphragm 2 are without any incovenience demonstrated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】圧電振動子の支持及び電気的接続
構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator support and electrical connection structure.

【0002】[0002]

【従来の技術】従来より、絶縁性基板上に圧電振動板を
搭載した圧電振動子においては、絶縁基板上に圧電振動
板を固着し導通をとる方法としては、導電性接着剤を用
いて固着と導通を同時に行うのが一般的であった。さら
に固定方法も、圧電振動板の長手方向に対称的に両端を
固定するのが一般的であった。
2. Description of the Related Art Conventionally, in a piezoelectric vibrator in which a piezoelectric vibrating plate is mounted on an insulating substrate, a method of fixing the piezoelectric vibrating plate on the insulating substrate for electrical continuity is to fix it using a conductive adhesive. It was common to carry out and conduction at the same time. Further, as a fixing method, it is general that both ends are fixed symmetrically in the longitudinal direction of the piezoelectric diaphragm.

【0003】[0003]

【発明が解決しようとする課題】従来技術では、絶縁基
板上に圧電振動板を固着し導通をとる方法としては、導
電性接着剤を用いて固着と導通を同時に行うのが一般的
であったが、導電性接着剤は重量比で70〜80%が導
電物質であり、残り20〜30%しか接着剤はない。こ
のために接着剤の接着強度が低下するだけで無く、導電
性も金属よりも劣るという課題がある。さらに圧電振動
板の固定方法も、圧電振動板の長手方向の両端を固定す
る方法は接着力の強くない導電性接着剤でも容易に固定
することが可能になる反面、圧電振動板と絶縁基板との
線膨張係数の違いや曲げその他の応力の影響を受け易く
圧電振動子の特性を悪化させるという課題がある。
In the prior art, as a method of fixing a piezoelectric vibrating plate on an insulating substrate to make it conductive, it is general to use a conductive adhesive to perform fixing and conducting at the same time. However, 70% to 80% by weight of the conductive adhesive is a conductive substance, and the remaining 20% to 30% is the adhesive. Therefore, not only the adhesive strength of the adhesive is lowered, but also the conductivity is inferior to that of metal. Further, as for the method of fixing the piezoelectric vibrating plate, the method of fixing the both ends in the longitudinal direction of the piezoelectric vibrating plate can be easily fixed even with a conductive adhesive having a low adhesive force, while the piezoelectric vibrating plate and the insulating substrate are fixed. There is a problem that the characteristics of the piezoelectric vibrator are deteriorated because they are easily affected by the difference in linear expansion coefficient, bending, and other stress.

【0004】[0004]

【課題を解決する手段】圧電振動板を絶縁基板に固着方
法としては、一個所の絶縁性接着剤を用い、圧電振動板
の電極と絶縁基板の導体の導通については、ワイヤーボ
ンディング二ヶ所の構成による方法が用いられる。さら
に圧電振動板の固定方法も、圧電振動板の一端の一ヶ所
のみで固着を行う方法を用いた。
As a method for fixing a piezoelectric vibrating plate to an insulating substrate, an insulating adhesive is used at one place, and two electrodes are wire-bonded for the conduction between the electrode of the piezoelectric vibrating plate and the conductor of the insulating substrate. Method is used. Further, as the method of fixing the piezoelectric vibrating plate, a method of fixing the piezoelectric vibrating plate only at one end of the piezoelectric vibrating plate was used.

【0005】[0005]

【実施例】図1に、圧電振動板2の長辺の一端と相対す
る絶縁基板1とを一ヶ所の絶縁性接着剤3にて固着し、
他の一端に圧電振動板2の電極の引き出し口と絶縁基板
1の導通を分離して二ヶ所のワイヤーボンディング4を
使用して行っている実施例を示す。
EXAMPLE In FIG. 1, one end of a long side of a piezoelectric vibrating plate 2 and an insulating substrate 1 facing each other are fixed with an insulating adhesive 3 at one place,
An example is shown in which the lead-out port of the electrode of the piezoelectric vibrating plate 2 and the electrical connection of the insulating substrate 1 are separated from each other at one end by using the wire bonding 4 at two places.

【0006】図2に、圧電振動板2の長辺の一端と相対
する絶縁基板1とを一ヶ所の絶縁性接着剤3にて固着
し、同一端に圧電振動板2の電極の引き出し口と絶縁基
板1の導通を分離して二ヶ所のワイヤーボンディング4
を使用して行っている実施例を示す。要するに、圧電振
動板2の長辺の一端に固定用の絶縁性接着剤3と導通用
ワイヤーボンディング4とを集中させたタイプで、固着
用の絶縁性接着剤3は二ヶ所のワイヤーボンディング4
の間で圧電振動板2の電極にも絶縁基板1の導体にも接
触しない場所に絶縁性接着剤3を使用した実施例を示し
ている。
In FIG. 2, one end of the long side of the piezoelectric vibrating plate 2 and the insulating substrate 1 facing the long side are fixed to each other with an insulating adhesive 3 at one place, and the same end is connected to the lead-out port of the electrode of the piezoelectric vibrating plate 2. Separate the electrical connection of the insulating substrate 1 and wire bonding 4 at two locations.
An example is shown using In short, this is a type in which the fixing insulating adhesive 3 and the conducting wire bonding 4 are concentrated on one end of the long side of the piezoelectric vibrating plate 2, and the fixing insulating adhesive 3 has two wire bondings 4 at two locations.
An example is shown in which the insulating adhesive 3 is used in a place where neither the electrode of the piezoelectric vibrating plate 2 nor the conductor of the insulating substrate 1 contacts between them.

【0007】図1,図2では,圧電振動板の電極、絶縁
基板の導体、圧電振動子のカバーは省略している。また
これらの手法は絶縁基板のみに限らずセラミックケー
ス、金属ケース等にも用いることができる。なお、図
1,図2では,2本の導通用ワイヤーボンディングは同
じ方向に引き出されているがこの方法だけとは限らな
い、片側のワイヤーボンディングを反対側から引き出し
て圧電振動板の対角線に引き出してもよい
In FIGS. 1 and 2, the electrodes of the piezoelectric vibrating plate, the conductors of the insulating substrate, and the cover of the piezoelectric vibrator are omitted. Further, these methods can be applied not only to the insulating substrate but also to a ceramic case, a metal case, or the like. In addition, in FIG. 1 and FIG. 2, the two wire bonding wires for conduction are drawn out in the same direction, but not limited to this method. Wire bonding on one side is drawn out from the other side and drawn out to the diagonal line of the piezoelectric vibration plate. May

【0008】[0008]

【発明の効果】固着構造については、絶縁基板の上に圧
電振動板を搭載した圧電振動子において、従来の導電性
接着剤に依る固着と導通を同時に行う方法に替えて、圧
電振動板の一ヶ所のみ絶縁基板と絶縁性接着剤で固着す
る。他の導通はワイヤーボンディングにて行われるの
で、圧電振動板には殆ど応力がかからない。このため圧
電振動板そのものの特性が素直に発揮されので、良好な
特性の圧電振動子を容易につくることができるため、生
産性と信頼性が向上したばかりでなく、コストダウンも
実現できた。。
As for the fixing structure, in the piezoelectric vibrator in which the piezoelectric vibrating plate is mounted on the insulating substrate, instead of the conventional method of simultaneously fixing and conducting with the conductive adhesive, the piezoelectric vibrating plate is replaced. Only adhere to the insulating substrate with insulating adhesive in only one place. Since other conduction is performed by wire bonding, almost no stress is applied to the piezoelectric diaphragm. For this reason, the characteristics of the piezoelectric diaphragm itself are exerted in a straightforward manner, so that it is possible to easily manufacture a piezoelectric vibrator having good characteristics, which not only improves productivity and reliability but also realizes cost reduction. .

【図面の簡単な説明】[Brief description of drawings]

【図1】固定は絶縁性接着剤,導通はワイヤーボンディ
ングと分離して圧電振動板の長辺の両端に配した状態を
示す正面図である。
FIG. 1 is a front view showing a state in which an insulating adhesive is used for fixing, and wire bonding is used for conduction, separately from both ends of a long side of a piezoelectric diaphragm.

【図2】固定は絶縁性接着剤,導通はワイヤーボンディ
ングと分離して圧電振動板の同一端に配した状態を示す
正面図である。
FIG. 2 is a front view showing a state in which an insulating adhesive is used for fixing, and wire bonding is used for conducting, separately from the wire bonding, and arranged on the same end of the piezoelectric diaphragm.

【符号の説明】[Explanation of symbols]

1 絶縁基板 2 圧電振動板 3 絶縁性接着剤 4 ワイヤーボンディング 1 Insulating substrate 2 Piezoelectric diaphragm 3 Insulating adhesive 4 Wire bonding

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 絶縁基板上に圧電振動板を搭載した圧電
振動子において、該圧電振動板の主面が該絶縁基板の面
に平行して搭載され、該圧電振動板の長辺の一端が該絶
縁基板との間が絶縁性接着剤で一点で固着され、該圧電
振動板の電極の引き出し口と該絶縁基板との導体間の接
続はワイヤーボンディングにより接続されていることを
特徴とする圧電振動子。
1. A piezoelectric vibrator having a piezoelectric vibration plate mounted on an insulating substrate, wherein a main surface of the piezoelectric vibration plate is mounted parallel to a surface of the insulating substrate, and one end of a long side of the piezoelectric vibration plate is mounted. The piezoelectric element is characterized in that the insulating substrate is fixed to the insulating substrate at one point with an insulating adhesive, and the connection between the lead-out port of the electrode of the piezoelectric diaphragm and the conductor of the insulating substrate is made by wire bonding. Oscillator.
【請求項2】 該圧電振動板の長辺の一端と、該圧電振
動板と該絶縁基板との固着を該絶縁性接着剤で行い、該
圧電振動板の長辺の他端の圧電振動板の2ヶ所に電極の
引き出し口と該絶縁基板の導体の為の接続をワイヤーボ
ンディングにて行うことを特徴とする特許請求の範囲第
1項記載の圧電振動子。
2. A piezoelectric vibrating plate at the other end of the long side of the piezoelectric vibrating plate, wherein one end of the long side of the piezoelectric vibrating plate is fixed to the piezoelectric vibrating plate and the insulating substrate with the insulating adhesive. 2. The piezoelectric vibrator according to claim 1, wherein the lead-out ports of the electrodes and the conductors of the insulating substrate are connected to each other by wire bonding.
【請求項3】 該圧電振動板の長辺の一端と、該圧電振
動板と該絶縁基板との固着を該絶縁性接着剤で行い、該
圧電振動板の長辺の同一端の該圧電振動板の2ヶ所に電
極の引き出し口と該絶縁基板の導体の為の接続をワイヤ
ーボンディングにて行うことを特徴とする特許請求の範
囲第1項記載の圧電振動子。
3. The piezoelectric vibrating plate is fixed to one end of a long side thereof and the piezoelectric vibrating plate and the insulating substrate with the insulating adhesive, and the piezoelectric vibration at the same end of the long side of the piezoelectric vibrating plate. 2. The piezoelectric vibrator according to claim 1, wherein the lead-out ports of the electrodes and the conductors of the insulating substrate are connected to each other at two positions of the plate by wire bonding.
JP3315695A 1995-01-30 1995-01-30 Piezoelectric vibrator Pending JPH08204489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3315695A JPH08204489A (en) 1995-01-30 1995-01-30 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3315695A JPH08204489A (en) 1995-01-30 1995-01-30 Piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPH08204489A true JPH08204489A (en) 1996-08-09

Family

ID=12378714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3315695A Pending JPH08204489A (en) 1995-01-30 1995-01-30 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH08204489A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009239412A (en) * 2008-03-26 2009-10-15 Epson Toyocom Corp Piezoelectric device
JP2009253883A (en) * 2008-04-10 2009-10-29 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrating device
JP2011010158A (en) * 2009-06-29 2011-01-13 Tokyo Denpa Co Ltd Piezoelectric vibrator and method of manufacturing the same
JP4701536B2 (en) * 2000-12-12 2011-06-15 エプソントヨコム株式会社 Surface mount type piezoelectric device
JP2011229167A (en) * 2000-12-12 2011-11-10 Seiko Epson Corp Surface-mount piezoelectric device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4701536B2 (en) * 2000-12-12 2011-06-15 エプソントヨコム株式会社 Surface mount type piezoelectric device
JP2011229167A (en) * 2000-12-12 2011-11-10 Seiko Epson Corp Surface-mount piezoelectric device
JP2009239412A (en) * 2008-03-26 2009-10-15 Epson Toyocom Corp Piezoelectric device
JP2009253883A (en) * 2008-04-10 2009-10-29 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrating device
JP2011010158A (en) * 2009-06-29 2011-01-13 Tokyo Denpa Co Ltd Piezoelectric vibrator and method of manufacturing the same

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