JPH08203012A - Magnetic head device - Google Patents

Abstract

PURPOSE: To secure a high head output and to improve the productivity by making the extending direction in a magnetic recording medium slide surface of a metal magnetic film nearly parallel to the longitudinal direction of the magnetic head and inclining the traveling direction of the magnetic head to the extending direction of the metal magnetic film. CONSTITUTION: In the magnetic head 10, a magnetic gap g is formed between confronted surfaces of the metal magnetic films 1, 2 so as to face the magnetic recording medium slide surface 10a. The films 1, 2 are extended on a nearly straight line parallel to the longitudinal direction of the head 10 on the surface 10a, and the confronted surfaces of the films 1, 2 are vertical to the magnetic gap g. The magnetic head traveling direction M is inclined to the extending direction of the films 1, 2 of the surface 10a. Further, the surface 10a is extended nearly parallel to the direction M, and controls the width W of the surface 10a by step parts 11, 12. Thus, a magnetic path is secured regardless of size of azimuth angle, and a high head output is obtained, and the joining between substrates is facilitated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a video tape recorder or the like, and in particular, a pair of magnetic core halves each having a metallic magnetic film sandwiched between a pair of substrates are joined and integrated. The present invention relates to improvement of a so-called laminated magnetic head.

[0002]

2. Description of the Related Art In a consumer digital video tape recorder which digitizes a color video signal and records it on a magnetic recording medium such as a magnetic tape, in order to achieve a high recording density, for example, a track pitch of 10 μm or less and a narrow track. Or the recording wavelength is shortened to 0.5 μm or less.

In order to deal with this, a magnetic head having a magnetic core in which a magnetic metal thin film of about 2 to 5 μm and an insulating film are alternately laminated has been used as a magnetic head. In such a magnetic head, a pair of magnetic core halves sandwiching a metal magnetic film, which is the above-mentioned laminated magnetic film, from the film thickness direction by a pair of substrates are joined and integrated by abutting the metal magnetic films. ,
A so-called laminated magnetic head is known.

In the above-mentioned laminated magnetic head, since a magnetic gap is formed between the abutting surfaces of the metal magnetic film and the width of the metal magnetic film becomes the track width of the magnetic gap, narrow tracks can be realized. High density recording is achieved. In order to mount the above magnetic head on a video tape recorder, a magnetic head device is configured by mounting the magnetic head on a head base having a magnetic head mounting surface parallel to the reference surface. The running direction of the magnetic head in the magnetic head is parallel to the reference plane.

As the above-mentioned laminated magnetic head, for example,
As shown in FIG. 17, a substrate 101a made of a non-magnetic material such as ceramics or crystallized glass or an oxide magnetic material,
The magnetic core halves 104 and 105 in which the metal magnetic films 103a and 103b, which are laminated magnetic films, are sandwiched by 101b, 102a, and 102b are replaced by the metal magnetic films 103a and 103b.
In the above laminated magnetic head, the metal magnetic film 10 is used.
3a and 103b extend in the direction perpendicular to the magnetic gap G formed between these abutting surfaces.

Further, in the magnetic head such as the laminated magnetic head as described above, the azimuth angle is given to the magnetic gap in order to increase the recording density. In general, when the magnetic gap has an azimuth angle, it is necessary to increase the azimuth angle as the track width becomes narrower. For example, when the track width is set to about 10 μm as described above, It is said that it is preferable to set the azimuth angle to about 20 °.

However, if the azimuth angle is 20 ° or more in the laminated magnetic head in which the metal magnetic film extends in the direction perpendicular to the magnetic gap as described above, the following inconvenience occurs. That is, as shown in FIG. 18, the arrangement positions of the metal magnetic films 108 and 109 coincide with the formation positions of the winding grooves 110 and 111 for winding the coil, and the metal magnetic films 108 and 109 are formed into the winding grooves. 110,
Although the magnetic core halves 106 and 10 are not divided in the vicinity of 111 or the metal magnetic films 108 and 109 are not divided by the winding grooves 110 and 111 as shown in FIG.
The magnetic path formed by the metal magnetic films 108 and 109 formed in 7 becomes extremely narrow. Therefore, in either case, the head output of the magnetic head is lowered.

[0008]

SUMMARY OF THE INVENTION Therefore, the inventors of the present invention have arranged a laminated magnetic head such that the metal magnetic film is arranged not obliquely to the magnetic gap but obliquely, and the magnetic head travel direction is set. And the metal magnetic film are controlled so that the angle of the metal magnetic film with respect to the running direction of the magnetic head is controlled to control the position of the metal magnetic film, and the metal magnetic film is discontinued in the winding groove, or the metal magnetic film is interrupted. Has proposed a magnetic head that ensures a high head output by preventing the magnetic path formed by the above from becoming extremely narrow.

Examples of such a magnetic head include magnetic heads as shown in FIGS. 20 and 21. That is, from the pair of magnetic core halves 127, 128 in which the metal magnetic films 121, 122 are sandwiched between the first substrates 123, 124 and the second substrates 125, 126 made of, for example, a non-magnetic material in the film thickness direction. Therefore, the magnetic core halves 127, 128 are replaced by the metal magnetic films 121, 122.
They are joined and integrated by a fused glass 129 so that they abut each other.

At this time, the metal magnetic films 121 and 122
Are obliquely crossed at an angle θ ₁ with respect to the magnetic head traveling direction indicated by an arrow m in the figure so as to be connected in a substantially straight line. A magnetic gap G having an azimuth angle θ ₂ is formed between the abutting surfaces of the metal magnetic films 121 and 122. Therefore, in the above magnetic head,
The extending directions of the metal magnetic films 121 and 122 do not coincide with the direction perpendicular to the magnetic gap G, and are obliquely arranged. Further, in the above magnetic head, the extending direction of the metal magnetic films 121 and 122 is not aligned with the running direction of the magnetic head shown by the arrow m in the figure.

That is, in such a magnetic head, since the extending direction of the metal magnetic film can be controlled, the metal magnetic film is divided by the winding groove even if the azimuth angle of the magnetic gap is increased. The magnetic head formed by is not extremely narrowed, and a high head output is secured. In the magnetic head, winding grooves 112 and 113 for winding a coil are formed on the abutting surface sides of the pair of magnetic core halves 127 and 128, and the winding grooves 112 and 113 face each other. Winding auxiliary grooves 114 and 115 for assisting winding of the coil are also formed at the positions. Further, in the above magnetic head, a step is formed on the sliding surface of the magnetic recording medium in order to regulate the contact width with the magnetic recording medium.

In general, in the above-mentioned laminated magnetic head, uneven wear of the metal magnetic film is likely to occur, and therefore the angle of the metal magnetic film with respect to the running direction of the magnetic head is 5 degrees.
It is preferably about 10 °. The magnetic head described above is preferable also from such a viewpoint. However, in the above magnetic head, although a high head output is ensured and wear resistance is also good, the production yield is not so good, and the productivity is not so good.

That is, in order to manufacture the above magnetic head, first, both surfaces of a substrate made of, for example, a nonmagnetic material are mirror-finished by polishing or the like. Next, a metal magnetic film, which is a laminated magnetic film, is deposited on one surface of the substrate by sputtering or the like. At this time, if the metal magnetic film is formed on the entire surface of the substrate, stress is generated due to the difference in the coefficient of thermal expansion between the substrate and the metal magnetic film, and the substrate may be cracked or the metal magnetic film may be peeled off. The mask spattering method is used to form only the portion.

Further, on the metal magnetic film of the above substrate or
A low melting point glass film is formed on at least one surface opposite to
To film. Then, as shown in FIG. 22, one main surface 131a
The metal magnetic film 132 is formed, and the metal magnetic film 132 is formed on at least one surface.
A plurality of substrates 131 on which a low melting point glass film is formed are not shown.
Stack. At this time, the plurality of substrates 131 are
Stacked with an inclination angle α in the figure with respect to the stacking direction
To achieve. The inclination angle α is calculated by the following equation 1.
It is an angle. However, θ in equation 1₂ Is the magnetic gap
Indicates the mass angle, θ ₁ Is the magnetic direction of the magnetic head
Indicates the angle at which

Α = θ ₂ −θ ₁ (Equation 1) Next, as shown in FIG. 23, 500 ° C. to 700 ° C. while applying pressure in the stacking direction of the substrates 131 as indicated by arrow P in the figure.
A plurality of substrates are joined by heating at a temperature of ℃ and fusion of the low melting point glass film to form a magnetic core block 133. Note that, in practice, as shown in FIG. 24, a plurality of stacked substrates 131 are placed on a base 134 and sandwiched by a pressure plate 135 to apply pressure.

However, at this time, at the end portions 136 and 137 of the plurality of stacked substrates 131, sufficient pressure may not be obtained and the bonding may not be performed sufficiently. May occur. continue,
As shown in FIG. 25, the magnetic core block 133 is cut along a cutting line as indicated by xy in the drawing so that the cutting surface has a tilt angle α with respect to the stacking direction of the substrates 131.
Form multiple block halves.

At this time, as described above, the plurality of substrates 131
If the end portions 136 and 137 of the substrate are not sufficiently joined, peeling between the substrates 131 may occur in the block half cutting step. Next, the cut surface of the block half body is surface-polished by using a surface grinder or the like, and FIG.
As shown in FIG. 6, a plurality of glass grooves 139 for filling glass on one main surface 138a which was a cut surface of the block half body 138 and winding grooves 140, 14 for winding a coil.
1 is formed.

Next, the block half body 138 is represented by z- in the figure.
A pair of magnetic core half blocks 142 as shown in FIG. 27 (only one magnetic core half block 142 is shown in FIG. 27) is formed by cutting along the cutting line indicated by z ′. . A plurality of glass grooves 139a and winding grooves 140 are formed in the magnetic core half block 142.

However, as described above, the plurality of substrates 1
If the end portions 136, 137 of 31 are not sufficiently joined, peeling between the plurality of substrates 131 may occur in the magnetic core half block cutting step. And
After mirror-finishing the abutting surface of the magnetic core half block 142 to form a gap film, as shown in FIG. 28, the magnetic core half block 142 and a magnetic core half block 144 similar to this are joined. To do.

At this time, the glass grooves 139a and 139b of the pair of magnetic core half blocks 142 and 144 are aligned with each other, and the winding grooves 140 and 141 are aligned with each other, and the metal magnetic films 132a and 132b are butted to each other. Fused glass 145 is melt-filled between the groove portions between the glass grooves 139a and 139b. As a result, the pair of magnetic core half blocks 1
42 and 144 are joined and integrated, a magnetic gap G is formed between the metal magnetic films 132a and 132b, and a magnetic head block 146 is formed.

Next, the winding auxiliary groove is processed and the sliding surface of the magnetic recording medium is cylindrically polished. Then, as shown in FIG. 29, the magnetic head block 146 is tilted by an inclination angle ε having the same angle as the azimuth angle θ ₂ so that the magnetic gap G has the azimuth angle θ ₂ , and the magnetic gap G faces the magnetic recording medium. After the step processing is performed so that the sliding surface 146a has a predetermined contact width shown by w ₁ in the figure, the chip thickness of each magnetic head becomes the predetermined chip thickness shown by w ₂ in the figure. 20 and 2 are cut along the cutting line indicated by -a '.
The magnetic head as shown in 1 is completed. Note that FIG.
Inside, illustration of the glass groove and the fused glass is omitted.

Therefore, in the magnetic head manufactured as described above, there is a possibility that the substrates may be separated from each other in the substrate joining process, the block half cutting process and the magnetic core half block cutting process, and the manufacturing yield is not so high. Not good and not very productive. From such a viewpoint of productivity, a magnetic head in which the above-mentioned metal magnetic film extends in the direction perpendicular to the magnetic gap is preferable, but in the magnetic head, the azimuth angle is set as described above. If it is increased, there is a disadvantage that the head output cannot be secured.

Therefore, the present invention has been proposed in view of the conventional circumstances, and a high-output head is ensured, a manufacturing yield is less likely to decrease due to peeling between substrates, and a magnetic head having good productivity is provided. The purpose is to provide.

[0024]

In order to solve the above-mentioned problems, the present invention has a pair of magnetic core halves each having a magnetic metal film sandwiched between substrates from both sides in the film thickness direction. Comprises a magnetic head which is joined and integrated so that the end faces of the metal magnetic film are butted against each other, and a magnetic gap is formed between the butted faces of the metal magnetic film, and the magnetic head is mounted on a head base. In the magnetic head device, the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium is substantially parallel to the longitudinal direction of the magnetic head, and the magnetic head mounting surface of the head base is an inclined surface. The magnetic head running direction with respect to the recording medium is inclined with respect to the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium.

That is, the magnetic head device of the present invention secures a magnetic path by the metal magnetic film by making the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium substantially parallel to the longitudinal direction of the magnetic head. The azimuth angle of the magnetic gap is regulated by inclining the running direction of the magnetic head with respect to the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium. Even when the value is increased, the magnetic path can be secured regardless of the size of the azimuth angle.

Further, in the magnetic head device of the present invention, the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium is substantially parallel to the longitudinal direction of the magnetic head, and the extending direction of the metal magnetic film is magnetic. It suffices to make the direction orthogonal to the gap, and in the manufacturing process, a plurality of substrates may be laminated in the film thickness direction of the metal magnetic film without shifting the substrates, and these may be bonded while being pressed. Good bonding is achieved, and the production yield is unlikely to decrease due to peeling between the substrates.

Further, in the magnetic head device of the present invention, it is preferable that the sliding surface of the magnetic recording medium of the magnetic head extends in a direction substantially parallel to the traveling direction of the magnetic head. Further, in the magnetic head device of the present invention, the track width of the magnetic gap is preferably 16 μm or less. Furthermore, in the magnetic head device of the present invention, the azimuth angle of the magnetic gap is preferably 10 ° or more.

[0028]

In the magnetic head device of the present invention, the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium is substantially parallel to the longitudinal direction of the magnetic head, and the magnetic head running direction is the magnetic recording medium of the metal magnetic film. Since the azimuth angle of the magnetic gap is regulated by inclining obliquely with respect to the extending direction of the sliding surface, even if the azimuth angle of the magnetic gap is increased, the magnetic field irrespective of the magnitude of the azimuth angle is used. The road is secured.

Further, in the magnetic head device of the present invention, the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium is substantially parallel to the longitudinal direction of the magnetic head, and the extending direction of the metal magnetic film is magnetic. It suffices that the direction is orthogonal to the gap. In the manufacturing process, a plurality of substrates are laminated in the film thickness direction of the metal magnetic film without shifting the substrates and they are bonded under pressure. Is done well.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings. First, the magnetic head of the magnetic head device of this embodiment will be described. As shown in FIGS. 1 and 2, in the magnetic head 10, the metal magnetic films 1 and 2 are made of a non-magnetic material in the thickness direction.
It is composed of a pair of magnetic core halves 7 and 8 sandwiched between the substrates 3 and 4 and the second substrates 5 and 6, and these magnetic core halves 7 and 8 connect the end faces of the metal magnetic films 1 and 2 to each other. They are joined and integrated by the fused glass 9 so as to abut each other.

Further, in the magnetic head 10, a magnetic gap g is formed between the abutting surfaces of the metal magnetic films 1 and 2 so as to face the sliding surface 10a of the magnetic recording medium which slides on the magnetic recording medium. Then, the magnetic head 1
At 0, the metal magnetic films 1 and 2 extend substantially linearly in parallel with the longitudinal direction of the magnetic head 10 on the sliding surface 10a of the magnetic recording medium, and extend in a straight line. Of the metal magnetic films 1 and 2 is perpendicular to the extending direction of the metal magnetic films 1 and 2, in other words, the extending direction of the metal magnetic films 1 and 2 is perpendicular to the magnetic gap g.

In the magnetic head 10, the magnetic head running direction is the direction indicated by the arrow M in FIG. 2, and the magnetic head running direction M is the magnetic recording medium sliding surface 1.
0a of the metal magnetic films 1 and 2 is inclined with respect to the extending direction. Furthermore, in the above magnetic head 10,
The sliding surface 10a of the magnetic recording medium extends in a direction substantially parallel to the traveling direction M of the magnetic head, and the width of the sliding surface 10a of the magnetic recording medium is restricted to the width W ₁ in the figure. Step portions 11 and 12 are formed.

In the above magnetic head, the thickness of the metal magnetic films 1 and 2, that is, the track width of the magnetic gap is 16 μm. In the magnetic head 10, winding grooves 15, 16 for coil winding and glass grooves 13, 14 for filling the fused glass 9 are provided on the abutting surfaces of the magnetic core halves 7, 8. In order to secure the bonding strength of the magnetic core halves 7 and 8, the glass groove 1
Fused glass 9 from 3, 14 to winding grooves 15, 16
Is melt-filled.

Further, in the magnetic head 10, the coil formed in the winding grooves 15 and 16 is wound at a position opposite to the winding grooves 15 and 16 in order to improve the winding state. Line auxiliary grooves 17 and 18 are formed. Next, the magnetic head device of this embodiment will be described. As shown in FIG. 3, the magnetic head device includes a head base 2
The above-mentioned magnetic head 10 is placed on the first magnetic head mounting surface 21a.
Is placed.

In the magnetic head device of this embodiment, the head base 21 is formed as a member having a trapezoidal cross section, and one of the non-parallel facing surfaces is the reference surface 21b.
The other is the magnetic head mounting surface 21a. Therefore, the magnetic head mounting surface 21a becomes an inclined surface with respect to the reference surface 21b. Then, in the magnetic head device of the present embodiment, the inclination angle β of the magnetic head mounting surface 21a with respect to the reference surface 21b is set as follows. Have decided. That is, the magnetic head 1
When the magnetic head 10 is mounted on the head base 21, the side surface 10b or the side surface 10c in the longitudinal direction of 0 is used as the mounting surface (in FIG. 3, the side surface 10c is used as the mounting surface). The magnetic head running direction M of the magnetic head 10 is parallel to the angle.

At this time, in the magnetic head device of this embodiment, a magnetic head in which the extending directions of the metal magnetic films 1 and 2 are perpendicular to the magnetic gap g is used as the magnetic head 10. Therefore, the size of the azimuth angle θ of the magnetic gap g is determined by the head mounting surface 21 of the head base 21.
It is the same as the inclination angle β of a. In this embodiment, the inclination angle β is 20 ° and the azimuth angle θ is 20 °.

Further, in this embodiment, since the extending directions of the metal magnetic films 1 and 2 are perpendicular to the magnetic gap g, the magnetic head running direction M and the metal magnetic films 1 and 2 are set.
The angle γ formed with the extending direction of the magnetic recording medium sliding surface 10a also becomes 20 °. The magnetic metal films 1 and 2 of the magnetic head 10 are laminated magnetic films in which thin magnetic metal films are laminated with an insulating film interposed therebetween for the purpose of improving high frequency characteristics.

As a material for forming the magnetic metal thin film, sendust (Fe-Al-Si) or Fe-Ga-S is used.
Examples thereof include i-Ru, a crystalline magnetic metal material obtained by adding O, N, or the like to them, or an Fe-based or Co-based microcrystalline magnetic metal material. The thickness of the magnetic metal thin film is preferably 2 to 5 μm per layer in order to improve high frequency characteristics.

As one insulating film, for example, Si
An oxide film such as O ₂ or Ta ₂ O ₅ or a nitride film such as Si ₃ N ₄ is used. The thickness of the insulating film is preferably about 0.1 to 0.3 μm, for example. In this example, a Fe—Ga—Si—Ru film was used as the magnetic metal thin film, and a SiO ₂ film was used as the insulating film. In order to set the track width of the magnetic gap g to 16 μm, the magnetic metal thin film per layer is 3 μm, the insulating film per layer is 0.2 μm, and five magnetic metal thin films are laminated through the insulating film. Metal magnetic films 1 and 2 were formed.

Further, the substrates 3 of the metal magnetic films 1 and 2 are
A base film is formed on one of the substrates 3, 4, 5 and 6 on which the metal magnetic films 1 and 2 are formed when the magnetic head is manufactured for the purpose of improving the adhesion to the substrates 4, 5, and 6. The base film may be an oxide film such as SiO ₂ or Ta ₂ O ₅ , a nitride film such as Si ₃ N ₄ or a metal film such as Cr, Al or Pt or an alloy film or Si thereof. A film or a laminated film combining them is used. In this example, a SiO ₂ film having a film thickness of 50 nm was formed as the base film.

The constituent materials of the first and second substrates 3, 4 and 5, 6 include non-magnetic materials such as non-magnetic ferrite, ceramics and crystallized glass. In addition,
In this example, non-magnetic ferrite was used. Next, a method of manufacturing the magnetic head device of this embodiment will be described in the order of steps. First, as shown in FIG. 4, a substrate 31 made of non-magnetic ferrite is prepared, and both surfaces of the substrate 31 are mirror-finished by polishing or the like. next,
As shown in FIG. 5, a metal magnetic film 32 is deposited on the mirror-finished main surface 31a of the substrate 31 by sputtering.

At this time, if the metal magnetic film 32 is formed on the entire surface of the substrate 31 as described above, stress is generated due to the difference in the coefficient of thermal expansion between the substrate 31 and the metal magnetic film 32, and the substrate 3
Since the cracking of No. 1 and the peeling of the metal magnetic film 32 will occur, the mask sputtering method is used to form only the necessary minimum portion. And in this embodiment,
A plurality of metal magnetic films 32 formed as a rectangular pattern are arranged in the longitudinal direction of the metal magnetic film 32 and in a direction orthogonal to the longitudinal direction.

Further, as described above, in this embodiment, as shown in FIG. 6, in order to improve the adhesive force between the substrate 31 and the metal magnetic film 32, the base film is formed on the one main surface 31a of the substrate 31. After forming a SiO ₂ film having a film thickness of 50 nm as 33, a Fe—Ga—Si—Ru film having a film thickness of 3 μm is used as a magnetic metal thin film 34, and an insulating film 35 which is a SiO ₂ film having a film thickness of 0.2 μm is interposed. Five layers are stacked (two layers are shown in FIG. 6) to form a metal magnetic film 32 having a film thickness of 16 μm.

Further, the metal magnetic film 32 on the substrate 31
As shown in FIG. 7, a low-melting glass film 37 formed by sputtering low-melting glass is formed on the entire surface on which is formed. At this time, a base film 36 may be formed in order to prevent the reaction between the metal magnetic film 32 and the substrate 31 and the low melting point glass film 37 in the subsequent bonding process, and the base film may be SiO ₂ , Ta _{2 or the like.} O ₅ etc. oxide film, Si ₃ N
A nitride film such as ₄ or the like, a metal film such as Cr, Al, Pt or the like, an alloy film or an Si film of these, or a laminated film combining them can be used.

As the low melting point glass film 37, a film formed by sputtering the above low melting point glass or a film formed by applying frit glass by spin coating or the like can be used. , 0.1 μm to 0.5 μm is preferable. In this embodiment, as the base film 36, a Cr film having a thickness of 0.1 μm is used.
A film is formed on the surface of the substrate 31 on which the metal magnetic film 32 is formed and on the surface opposite thereto, and a PbO-based low-melting glass film having a thickness of 0.2 μm is formed as the low-melting glass film 37 by sputtering. It was formed only on the base film 36 on the surface on which the film 32 is formed.

In this embodiment, the low melting point glass film 37 is used.
Although only the surface of the substrate 31 on which the metal magnetic film 32 is formed is formed, the low melting point glass film 37 may be formed on at least one surface of the substrate 31. Next, the substrate 31 on which the metal magnetic film 32 and the low melting point glass film 37 are formed as described above is shown in FIG. 8 (hereinafter, the low melting point glass film 37 is not shown) of the metal magnetic film 32. A plurality of substrates 31 laminated in the film thickness direction and laminated as shown in FIG. 9 are pressed in the film thickness direction of the metal magnetic film 32 indicated by an arrow P in the drawing while pressing 50.
The plurality of substrates 31 are bonded by heating the low-melting-point glass film 37 by heating at 0 ° C. to 700 ° C.
Form 0. At this time, in the present embodiment, the plurality of substrates 31 are stacked without shifting the substrates 31 and tilting.

Next, as shown in FIG. 10, the magnetic core block 40 is cut along a cutting line parallel to the film thickness direction and the longitudinal direction of the metal magnetic film 32 as indicated by XY in the figure, and a plurality of blocks are cut. Form half. At this time, if necessary, the metal magnetic film 32 may also be cut in a direction orthogonal to the film thickness direction and the longitudinal direction. Subsequently, the cut surface of the block half body is surface-polished using a surface grinder or the like, and one main surface 4 which was the cut surface of the block half body 41 as shown in FIG.
1a is formed with a plurality of glass grooves 42 for filling glass in a direction parallel to the extending direction of the metal magnetic film 32, and a winding for winding a coil in a direction orthogonal to the glass grooves 42. The line grooves 43 and 44 are formed. Note that FIG. 11 shows an example of forming two magnetic core half blocks.

At this time, in the present embodiment, the abutting surface 32 of the metal magnetic film 32 exposed on the one main surface 41a which is the cut surface of the block half body 41 and becomes the abutting surface later.
The metal magnetic film 32 extends in a direction perpendicular to a.
Next, the block half body 41 is cut along a cutting line indicated by ZZ 'in the figure, and a pair of magnetic core half blocks 45 shown in FIG. 12 (one magnetic core half body in FIG. 12) is cut. Only block 45 is shown). A plurality of glass grooves 42 and winding grooves 43 are formed in the magnetic core half block 45.

Then, after mirror-finishing the one main surface 45a which is the abutting surface of the magnetic core half block 45 to form a gap film, as shown in FIG. 13, the magnetic core half block 45 and the magnetic core half block 45 are formed. The same magnetic core half block 46 is joined. At this time, the metal magnetic films 32b and 32c of the pair of magnetic core half blocks 45 and 46 are butted against each other to form the glass grooves 42a and 42b, the winding groove 43,
The glass groove 42 is aligned with the other 44.
The fused glass 47 is melted and filled from between the groove portions between a and 42b to between the groove portions between the winding grooves 43 and 44.

As a result, the pair of magnetic core half blocks 4
5, 46 are joined and integrated, and the metal magnetic film 32 is formed.
A magnetic gap g is formed between b and 32c, and a magnetic head block 48 is formed. Next, after the winding auxiliary groove is processed, the surface to be the magnetic recording medium sliding surface is cylindrically polished, and the external shape is processed as necessary, the magnetic recording medium slide extending in a direction substantially parallel to the magnetic head traveling direction is formed. In order to regulate the extending direction and the contact width of the moving surface, as shown in FIG. 14, the magnetic head block 48 is tilted by the same angle δ as the desired azimuth angle θ of the magnetic gap, and the magnetic recording medium facing the magnetic gap g. Step processing is performed so that the sliding surface 48a has a predetermined contact width indicated by W ₁ in the drawing.

At this time, in the present embodiment, step processing is performed so that the magnetic recording medium sliding surface 48a is parallel to the reference surface 49 when the magnetic head block 48 is tilted. As a result, the azimuth angle θ formed by the magnetic gap g and the traveling direction of the magnetic head shown by the arrow M in the figure becomes the same as the angle δ. In this embodiment, the azimuth angle θ is 20
Therefore, the angle δ was set to 20 °.

Subsequently, as shown in FIG. 15, the magnetic head block 48 is not tilted so that the chip thickness of each magnetic head becomes a predetermined chip thickness indicated by W ₂ in the drawing.
The cutting is performed along the cutting line indicated by A'to complete the magnetic head as shown in FIGS. Finally, the magnetic head obtained as described above is mounted on a head base in which the magnetic head mounting surface is an inclined surface having the same inclination angle as the azimuth angle θ of the magnetic head. The magnetic head device of this embodiment as shown is completed.

In the magnetic head device of the present embodiment thus completed, as shown in FIG. 3, the azimuth angle θ of the magnetic gap g becomes 20 °, and the metal magnetic property on the sliding surface 10a of the magnetic recording medium is increased. The angle γ of the films 1 and 2 with respect to the magnetic head traveling direction M is also 20 °. In the magnetic head device of this embodiment, the extending direction of the metal magnetic films 1 and 2 of the magnetic head 10 on the magnetic recording medium sliding surface 10a is set substantially parallel to the longitudinal direction of the magnetic head 10, and the magnetic head traveling direction M is set. Since the azimuth angle θ of the magnetic gap g is regulated by inclining the metal magnetic films 1 and 2 obliquely with respect to the extending direction of the magnetic recording medium sliding surface 10a, the azimuth angle of the magnetic gap g is regulated. Even when θ is increased, the magnetic path is secured regardless of the magnitude of the azimuth angle θ, and a high head output is secured.

Further, in the magnetic head device of this embodiment, since the magnetic head mounting surface 21a of the head base 21 is an inclined surface, if the magnetic head 10 is mounted on this surface, the magnetic head traveling direction M is changed. Similar to the conventional magnetic head device, it may be parallel to the reference surface 21b. Furthermore, in the magnetic head device of this embodiment,
Since the extending direction of the metal magnetic films 1 and 2 of the magnetic head 10 on the magnetic recording medium sliding surface 10a is perpendicular to the magnetic gap, the inclination angle β of the magnetic head mounting surface 21a of the head base 21 is β. Thus, the azimuth angle θ of the magnetic gap g of the magnetic head 10 is determined, and the regulation of the azimuth angle θ becomes easy.

In the magnetic head device of this embodiment, it is possible to stack the plurality of substrates 31 when manufacturing the magnetic head 10 without tilting the substrates 31, and to bond the plurality of substrates 31. Is sufficiently performed, the production yield is less likely to decrease due to peeling between the substrates 31, and the productivity is improved. Furthermore, in the magnetic head device of this embodiment, the angle γ of the metal magnetic films 1 and 2 of the magnetic head 10 with respect to the magnetic head running direction M is 20 °, uneven wear hardly occurs, and the product life is extended.

Although the magnetic head substrate is made of a non-magnetic material in the above embodiment, the present invention is also applicable to a magnetic head substrate made of a magnetic material. Examples of the magnetic material include a single crystal ferrite, a polycrystalline ferrite, a joining material of single crystal ferrite and a polycrystalline ferrite, a joining material of single crystal ferrites having different plane indices, and the like.

Next, in order to confirm the effect of the present invention, magnetic heads were manufactured by changing the number of stacked layers and the inclination angle when laminating a plurality of substrates, and the manufacturing yield of each magnetic head was investigated. That is, the number of stacked layers when stacking a plurality of substrates is changed, and the tilt angle is set to 0 ° when the magnetic head of the magnetic head device of the above embodiment is manufactured, and the number of stacked layers and a tilt when stacking a plurality of substrates. The manufacturing yield in the case of manufacturing the magnetic head according to the above-described conventional method for manufacturing the magnetic head while changing the angle was investigated.

The results are shown in FIG. 16 indicates the result of the magnetic head of the magnetic head device of this embodiment,
△ indicates the result when the conventional magnetic head was manufactured with an inclination angle of 5 °, and □ indicates the conventional magnetic head with an inclination angle of 10 °.
The results are shown in the case where the magnetic head is manufactured as .degree., And the crosses show the results when the conventional magnetic head is manufactured with an inclination angle of 15.degree.

From the results of FIG. 16, it can be seen that the manufacturing yield decreases as the number of stacked layers and the inclination angle increase. On the other hand, it was confirmed that the magnetic head of the magnetic head device of the above-mentioned embodiment to which the present invention is applied has good manufacturing yield and good productivity.

[0060]

As is apparent from the above description, in the magnetic head device of the present invention, the extending direction of the metal magnetic film of the magnetic head on the sliding surface of the magnetic recording medium is substantially parallel to the longitudinal direction of the magnetic head. In order to regulate the azimuth angle of the magnetic gap by assuming that the magnetic head traveling direction is inclined with respect to the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium, the azimuth angle of the magnetic gap is controlled. Even when the value is increased, the magnetic path is secured regardless of the size of the azimuth angle, and a high head output is secured.

Further, in the magnetic head device of the present invention, the extending direction of the metal magnetic film on the sliding surface of the magnetic recording medium is substantially parallel to the longitudinal direction of the magnetic head, and the extending direction of the metal magnetic film is magnetic. It suffices that the direction is orthogonal to the gap. In the manufacturing process, a plurality of substrates are laminated in the film thickness direction of the metal magnetic film without shifting the substrates and they are bonded under pressure. Is favorably performed, the production yield is less likely to decrease due to peeling between the substrates, and the productivity is improved.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of a main part of a magnetic head of a magnetic head device to which the present invention is applied.

FIG. 2 is a plan view schematically showing a magnetic gap vicinity portion of a magnetic head of a magnetic head device to which the present invention is applied.

FIG. 3 is a plan view schematically showing a magnetic head device to which the present invention is applied.

FIG. 4 is a perspective view showing a method of manufacturing a magnetic head device to which the present invention is applied, in order of steps, and showing steps of performing mirror finishing on a substrate.

FIG. 5 is a perspective view showing a method of manufacturing a magnetic head device to which the present invention is applied, in the order of steps, and showing steps of forming a metal magnetic film on a substrate.

FIG. 6 is a cross-sectional view showing a method of manufacturing a magnetic head device to which the present invention is applied in the order of steps, showing a state in which a metal magnetic film and a base film are formed on a substrate.

FIG. 7 is a cross-sectional view showing a method of manufacturing a magnetic head device to which the present invention is applied, in the order of steps, and showing steps of forming a low melting point glass film.

FIG. 8 is a perspective view showing a method of manufacturing a magnetic head device to which the present invention is applied in the order of steps, and is a perspective view showing a step of laminating a plurality of substrates.

FIG. 9 is a perspective view showing a method of manufacturing a magnetic head device to which the present invention is applied, in the order of steps, showing steps of joining a plurality of substrates to form a magnetic core block.

FIG. 10 is a perspective view showing the method of manufacturing the magnetic head device to which the present invention is applied in the order of steps, and showing steps of cutting the magnetic core block to form a block half body.

FIG. 11 is a perspective view showing the method of manufacturing the magnetic head device to which the present invention is applied in the order of steps, showing steps of forming glass grooves and winding grooves in the block half body.

FIG. 12 is a perspective view showing a method of manufacturing the magnetic head device to which the present invention is applied, in order of steps, and is a perspective view showing a step of cutting a block half body to form a pair of magnetic core half blocks.

FIG. 13 is a perspective view showing the method of manufacturing the magnetic head device to which the present invention is applied in the order of steps, and showing the step of forming a magnetic head block by joining and integrating a pair of magnetic core half blocks.

FIG. 14 is a plan view showing the method of manufacturing the magnetic head device to which the present invention is applied in the order of steps, and is a plan view schematically showing the step of processing a step on the magnetic head block.

FIG. 15 is a plan view showing the method of manufacturing the magnetic head device to which the present invention is applied, in order of steps, and is a plan view schematically showing a step of cutting the magnetic head block to obtain a magnetic head.

FIG. 16 is a characteristic diagram showing the relationship between the inclination angle when the substrates are stacked, the number of stacked substrates, and the manufacturing yield of the magnetic head.

FIG. 17 is a main part schematic perspective view showing an example of a conventional magnetic head.

FIG. 18 is a main part schematic perspective view showing another example of the conventional magnetic head.

FIG. 19 is a schematic perspective view of a main part showing still another example of a conventional magnetic head.

FIG. 20 is a schematic perspective view of a main part showing still another example of a conventional magnetic head.

FIG. 21 is a plan view schematically showing a magnetic gap vicinity portion of still another example of the conventional magnetic head.

FIG. 22 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, and showing a step of laminating a plurality of substrates.

FIG. 23 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, and is a perspective view showing a step of joining a plurality of substrates to form a magnetic core block.

FIG. 24 is a schematic view showing a method of manufacturing a conventional magnetic head in the order of steps, and is a schematic view showing a step of joining a plurality of substrates to form a magnetic core block.

FIG. 25 is a perspective view showing a conventional method of manufacturing a magnetic head in the order of steps, and is a perspective view showing a step of cutting a magnetic core block to form a block half body.

FIG. 26 is a perspective view showing the method of manufacturing the conventional magnetic head in the order of steps, and is a perspective view showing a step of forming a glass groove and a winding groove in the block half body.

FIG. 27 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, and is a perspective view showing a step of cutting a block half body to form a pair of magnetic core half blocks.

FIG. 28 is a perspective view showing a method of manufacturing a conventional magnetic head in order of steps, and is a perspective view showing a step of forming a magnetic head block by joining and integrating a pair of magnetic core half blocks.

FIG. 29 is a plan view showing the conventional method of manufacturing a magnetic head in the order of steps, and is a plan view schematically showing steps of forming a step on a magnetic head block and cutting the magnetic head block to obtain a magnetic head.

[Explanation of symbols]

 1, 2, 32 ... Metal magnetic film 3, 4, 5, 6, 31 ... Substrate 7, 8, ... Magnetic core half body 9, 47 ... Fused glass 10 ... Magnetic head 10a, 48a ... Magnetic recording medium sliding surface 21 ... Head base 21a ... Magnetic head mounting surface g ... Magnetic gap M ... Magnetic head running direction θ ... Azimuth angle

Claims (4)

[Claims] 1. A pair of magnetic core halves in which a metal magnetic film is sandwiched from both sides in the film thickness direction in a substrate, and these magnetic core halves are joined and integrated so that the end faces of the metal magnetic film are butted against each other. A magnetic head device comprising a magnetic head having a magnetic gap formed between the abutting surfaces of the metal magnetic films, the magnetic head being mounted on a head base. The extending direction at is substantially parallel to the longitudinal direction of the magnetic head, and the magnetic head mounting surface of the head base is an inclined surface,
A magnetic head device characterized in that a running direction of a magnetic head with respect to a magnetic recording medium is inclined with respect to an extending direction of the metal magnetic film on a sliding surface of the magnetic recording medium. 2. The magnetic head device according to claim 1, wherein the sliding surface of the magnetic recording medium of the magnetic head extends in a direction substantially parallel to the running direction of the magnetic head. 3. The magnetic head device according to claim 1, wherein the track width of the magnetic gap is 16 μm or less. 4. The magnetic head device according to claim 1, wherein an azimuth angle of the magnetic gap is 10 ° or more.